CN104060230B - A kind of TiZrAlSiON nano composite super-hards coated cutting tool and preparation method thereof - Google Patents
A kind of TiZrAlSiON nano composite super-hards coated cutting tool and preparation method thereof Download PDFInfo
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Abstract
A kind of TiZrAlSiON nano composite super-hards coated cutting tool and preparation method thereof, coated cutting tool includes hard alloy cutter body and TiZrAlSiON nano-composite coatings, TiZrAlSiON coatings include 50 100 nanometer thickness metal prime coat Zr metal levels, 100 200 nanometer thickness nitride transition layer ZrN, 1,000 4000 nanometer thickness functional layer TiZrAlSiON, preparation method is to carry out aura cleaning to hard alloy cutter, arc light ion bombards, and is then sequentially depositing bottoming metal level, transition metal nitride layer and TiZrAlSiON coatings；Prepared TiZrAlSiON composite coating hardness is high, coefficient of friction is low, toughness and adhesion are strong, with excellent high temperature resistance oxygen, can effectively strengthen the toughness and cutting ability of cutting tool, improves the service life of hard alloy cutter.
Description
Technical field
The present invention relates to a kind of coated cutting tool, and in particular to a kind of TiZrAlSiON nano composite super-hards coated cutting tool and its
Preparation method, belongs to thin film materials art.
Background technology
The metal cutting process of modernization, it is desirable to cutter have cutting speed high, feed speed high, high reliability, the long-life,
The performance such as high accuracy and good cutting controlling.The appearance of coated cutting tool, makes Tool in Cutting performance have important breakthrough, and it will
Tool matrix is combined with ganoine thin film top layer, because matrix maintains good toughness and intensity higher, and ganoine thin film
The characteristics of top layer has high-wearing feature and low-friction coefficient again, makes the performance of cutter be greatly enhanced.Modern High-Speed efficiently adds
Work and difficult-to-machine material use the increasing rigors to cutter material, cutting tool coating material also to be updated in constantly upgrading.
Nano composite structure coating is isolated nanocrystal（Such as nc-TiN）It is embedded in very thin noncrystal substrate（Such as a-Si3N4）In
A kind of composite structure coating, nanocrystalline with hardness relatively higher, amorphous phase has structural elasticity high, and two-phase interface has high
Cohesive energy, crystal phase and amorphous phase thermodynamically be in separation trend, therefore, this coating have ultrahigh hardness (>40GPa)、
High tenacity, excellent high-temperature stability and thermohardening (>1000 DEG C), inoxidizability high etc., be adapted to the difficult processing of High-speed machining
Requirement of the material to the high rigidity of cutter coat, high tenacity, high-wearing feature and high-temperature behavior.
CN201310489244.6 discloses a kind of coated cemented carbide endmill and preparation method thereof, and the coated cemented carbide endmill includes
The single or multiple lift coating coated on matrix and matrix, the coating is（Ti1-aMea）X coatings, wherein, Me is chemical element
The one of which of Al, Cr, Zr, Si, Hf, Nb, W and Ta is several, and X is the one of which or several of chemical element N, C, O and B, a
Between 0.2 to 0.6；（32-42）CN201310476304.0 discloses a kind of high rigidity, high elastic modulus TiSiN protective coatings
Preparation method, including matrix cleaning, TiSiN layer prepare etc. step.But the coating patents that the two patents are provided have painting
Not big enough the problem of mechanical property hardness of layer, it is impossible to adapt to the demand of some conditions of work.And CN201320550155.3 is public
A kind of diamond-like ground mass nano-composite coating cutter and preparation method thereof has been driven, it is attached successively from the inside to the outside on described tool matrix
Articulamentum, gradient layer and main wearing layer, articulamentum is attached on tool matrix, articulamentum is Mo, gradient layer is attached to company
Connect on layer, gradient layer is Mo-C layers, and carbon content gradually increases from the inside to the outside in gradient layer, and main wearing layer is attached on gradient layer,
Main wearing layer is the diamond-like coating doped with molybdenum carbide, i.e., M DEG C-DLC layer；Although the coated cutting tool power that this patent is prepared
Learn performance good, but preparation cost is higher and high-temperature resistance is weaker.
TiZrAlSiON nano-composite coatings have nanocrystalline（TiN, ZrN）It is embedded in noncrystal substrate（Al2O3,Si3N4）'s
Polynary nanometer composite construction, hardness close to 40GPa, oxidation resistance temperature more than 1000 DEG C, be it is a kind of it is excellent it is superhard, wear-resistant,
High-temperaure coating.The preparation of related TiZrAlSiON nano-composite coatings is there are no in domestic and foreign literature and data, therefore, this hair
It is bright that a kind of TiZrAlSiON nano composite super-hards coated cutting tool and preparation method thereof is provided, the nano-composite coating using multi sphere from
Son plating combines bipolar pulse magnetron sputtering technique and prepares, and the nano composite structure of noncrystal substrate is embedded in nano-crystalline granule,
I.e. nano particle is embedded in noncrystal substrate Al for TiN and ZrN2O3And Si3N4In, by the metal cutting process to improving modernization
Level provides valuable help.
The content of the invention
It is an object of the invention to be combined for Modern High-Speed highly-efficient processing industry provides a kind of TiZrAlSiON super hard nanos
Coated cutting tool and preparation method, the nano-composite coating has that hardness is high, coefficient of friction is low, toughness and adhesion are strong, excellent
High temperature resistance oxygen, can effectively strengthen the toughness and cutting ability of cutting tool, improve the service life of hard alloy cutter.
To achieve the above object, the technical scheme of present invention offer is：
A kind of TiZrAlSiON nano composite super-hards coated cutting tool, coated cutting tool includes hard alloy cutter body and body
The TiZrAlSiON nano-composite coatings of upper coating.
Described TiZrAlSiON nano-composite coatings, are multi-layer compound structure：Including 50-100 nanometer thickness metal bottoming
Layer Zr metal levels, 100-300 nanometer thickness nitride transition layer ZrN, 1000-4000 nanometer thickness functional layers TiZrAlSiON；
Further, the micro-structural of TiZrAlSiON nano-composite coatings is：Amorphous base is embedded in nano-crystalline granule
The nano composite structure of body, i.e. nano particle TiN and ZrN are embedded in noncrystal substrate Al2O3And Si3N4In, wherein nano-crystalline granule
The size of TiN and ZrN is 5-15 nanometers；
Further, TiZrAlSiON nano-composite coatings preparation method is：Using multi-arc ion coating combination bipolar pulse
Magnetron sputtering, multipath gas control prepares nanometer composite Ti ZrAlSiON coatings, and the wherein acquisition of Si elements passes through bipolar arteries and veins
The acquisition of magnetron sputtering Si cylindrical targets is rushed, the acquisition of Zr, Ti, Al element is then deposited with by multi sphere ion to be realized；
Further, the specific preparation technology and step of TiZrAlSiON nano-composite coatings are：When vacuum chamber background
Vacuum reaches 1 × 10-3To 8 × 10-3During Pa, control to be passed through Ar gas to 1 to 3Pa by gas, regulation substrate temperature is in 300-
400 DEG C, regulation substrate bias in-700-1000V, substrate frame rotating speed in 3-8rpm, to surface treated carbide cutter tool
Tool carries out aura cleaning；After aura cleaning terminates, regulation substrate bias in 200-300V, 300-500 DEG C of substrate temperature, air pressure exists
1-3×10-1Pa, opens arc ion plating Zr targets, and control Zr target currents bombard described hard alloy cutter 5-10 points in 50-70A
Clock, forms the Zr metal prime coats of 50-100 nanometer thickness；After metal prime coat deposition terminates, control to be passed through N by gas2And control
In 1-2Pa, substrate bias deposit 100-300nm thickness ZrN nitride transition to air pressure processed in 100-200V, Zr target current 50-80A
Layer；After nitride transition layer deposition terminates, arc ion plating Zr targets and AlTi alloys targets are opened, and control target current in 40-
60A, while opening bipolar pulse magnetron sputtering Si targets, then regulation electric current controls nitrogen to 5-10A by gas control system
And oxygen flow, N2And O2Each lead into 60-100 and 200-400sccm,Air pressure control is received in 2-4Pa, deposition 1000 to 4000
The thick TiZrAlSiON nano-composite coatings of rice；
Further, the mechanical property of TiZrAlSiON nano-composite coatings：With the ultrahigh hardness more than 35GPa, 0.3
The low-friction coefficient of left and right, the adhesive force more than 50N.
Further, the oxygen element content of TiZrAlSiON coatings and it is controlled to：Oxygen feedback device precise control coating
Oxygen content to 3-10at.%.
The present invention is relative to the beneficial effect of prior art：
Problem and the defect of cutting performance that the present invention exists for existing high-speed metal cutting Cutting-Tool Coating Technology, there is provided
A kind of hard alloy cutter nanometer composite Ti ZrAlSiON coated cutting tools and preparation method, its effective effect is：（1）On the one hand it is logical
Cross Zr metals prime coat and ZrN transition zones improve the bond strength and toughness of coated cutting tool, reduce coating internal stress, overcome list
Layer coating internal stress is high, poor adhesive force shortcoming, the incorporation of another aspect O elements can further improve the high temperature resistance of coating
Oxidability；（2）Nanometer composite Ti ZrAlSiON coatings have that hardness is high, coefficient of friction is low, adhesion is strong, resistance to high temperature oxidation
The features such as performance is good, very big advantage is shown in terms of the wear-resisting lubrication high temperature resistance of ultra-fine cemented carbide tool surface；（3）Open
Hair multilayer TiZrAlSiON nano-composite coatings and the application in hard alloy cutter, can effectively solve modernization metal high
The problem that fast process tool coating technology is present, brings huge economic and social benefit.
Brief description of the drawings
Fig. 1 is the equipment drawing that the present invention prepares TiZrAlSiON nano-composite coatings；
Fig. 2 for the present invention in O2Flow is the XRD spectrum of the TiZrAlSiON coatings of preparation under 200sccm；
Fig. 3 is the SEM sectional views that TiZrAlSiON coatings are prepared in the present invention；
Fig. 4 is Ti2p and the Si2p spectrum of obtained TiZrAlSiON coatings under optimal conditions in the present invention；
Fig. 5 is the friction coefficient curve of TiZrAlSiON coatings obtained in the present invention；
Fig. 6 is the transmission electron microscope full resolution pricture of TiZrAlSiON coatings obtained in the present invention；
Fig. 7 is the nano hardness of TiZrAlSiON coatings obtained in the present invention with the change of compression distance.
Specific embodiment
The present invention is described in further details below by embodiment, these embodiments are only used for illustrating the present invention, and
Do not limit the scope of the invention.
Embodiment 1
A kind of TiZrAlSiON nano composite super-hards coated cutting tool, coated cutting tool includes hard alloy cutter body and body
The TiZrAlSiON nano-composite coatings of upper coating, wherein TiZrAlSiON nano-composite coatings, are multi-layer compound structure：Including
50 nanometer thickness metal prime coat Zr metal levels, 100 nanometer thickness nitride transition layer ZrN, 1000 nanometer thickness functional layers
TiZrAlSiON；
Its preparation method is to obtain Zr, Ti, Al by arc evaporation Zr targets and TiAl alloy target, and the acquisition of Si passes through magnetic
Control sputtering column Si targets, and the acquisition of N and O is passed through N by gas control equipment2And O2Realize, comprise the following steps：
First, when vacuum chamber base vacuum reaches 1 × 10-3When, control to be passed through Ar gas to 1Pa by gas, adjust base
Temperature 300 DEG C, regulation substrate bias in -70V, substrate frame rotating speed in 3rpm, to surface treated carbide cutter tool
Tool carries out aura cleaning；After aura cleaning terminates, regulation substrate bias in 200V, 300 DEG C of substrate temperature, air pressure is 1 × 10- 1Pa, opens arc ion plating Zr targets, and control Zr target currents bombard the hard alloy cutter 5 minutes in 50A, forms 50 nanometers
Thick Zr metal prime coats；After metal prime coat deposition terminates, control to be passed through N by gas2And air pressure is controlled in 1Pa, matrix
100V, Zr target current 50A are biased in, 100nm thickness ZrN nitride transition layers are deposited；After nitride transition layer deposition terminates, open
Arc ion plating Zr targets and AlTi alloys targets, and target current is controlled in 40A, while opening bipolar pulse magnetron sputtering Si targets, adjust
Economize on electricity flow to 5A, then controls nitrogen and oxygen flow, N by gas control system2And O2Each lead into 60 and 200sccm,Gas
Voltage-controlled system deposits the TiZrAlSiON nano-composite coatings of 1000 nanometer thickness in 2Pa, after preparation technology terminates, natural cooling, when
When temperature drops to less than 40 DEG C, hard alloy cutter is taken out.
Embodiment 2
A kind of TiZrAlSiON nano composite super-hards coated cutting tool, coated cutting tool includes hard alloy cutter body and body
The TiZrAlSiON nano-composite coatings of upper coating, wherein TiZrAlSiON nano-composite coatings, are multi-layer compound structure：Including
100 nanometer thickness metal prime coat Zr metal levels, 300 nanometer thickness nitride transition layer ZrN, 4000 nanometer thickness functional layers
TiZrAlSiON；
Its preparation method is to obtain Zr, Ti, Al by arc evaporation Zr targets and TiAl alloy target, and the acquisition of Si passes through magnetic
Control sputtering column Si targets, and the acquisition of N and O is passed through N by gas control equipment2And O2Realize, comprise the following steps：
First, when vacuum chamber base vacuum reaches 8 × 10-3During Pa, control to be passed through Ar gas to 3Pa by gas, adjust
In 400 DEG C, regulation substrate bias in -1000V, substrate frame rotating speed is closed substrate temperature in 8rpm to surface treated hard
Golden cutter carries out aura cleaning；After aura cleaning terminates, regulation substrate bias in 300V, 500 DEG C of substrate temperature, air pressure 3 ×
10-1Pa, opens arc ion plating Zr targets, and control Zr target currents bombard the hard alloy cutter 10 minutes in 70A, forms 100
The Zr metal prime coats of nanometer thickness；After metal prime coat deposition terminates, control to be passed through N by gas2And air pressure is controlled in 2Pa,
Substrate bias deposit 300nm thickness ZrN nitride transition layers in 200V, Zr target current 80A；After nitride transition layer deposition terminates,
Arc ion plating Zr targets and AlTi alloys targets are opened, and controls target current in 60A, while opening bipolar pulse magnetron sputtering Si
Then target, regulation electric current to 5-10A controls nitrogen and oxygen flow, N by gas control system2And O2Each lead into 100 Hes
400sccm,Air pressure control deposits the TiZrAlSiON nano-composite coatings of 4000 nanometer thickness in 4Pa, after preparation technology terminates,
Natural cooling, when temperature is dropped to below 40 DEG C, takes out hard alloy cutter.
Embodiment 3
A kind of TiZrAlSiON nano composite super-hards coated cutting tool, coated cutting tool includes hard alloy cutter body and body
The TiZrAlSiON nano-composite coatings of upper coating, wherein TiZrAlSiON nano-composite coatings, are multi-layer compound structure：Including
80 nanometer thickness metal prime coat Zr metal levels, 200 nanometer thickness nitride transition layer ZrN, 3000 nanometer thickness functional layers
TiZrAlSiON；
Its preparation method is to obtain Zr, Ti, Al by arc evaporation Zr targets and TiAl alloy target, and the acquisition of Si passes through magnetic
Control sputtering column Si targets, and the acquisition of N and O is passed through N by gas control equipment2And O2Realize, comprise the following steps：
First, when vacuum chamber base vacuum reaches 7 × 10-3During Pa, control to be passed through Ar gas to 2.5Pa by gas, adjust
In 350 DEG C, regulation substrate bias in -800V, substrate frame rotating speed is closed section substrate temperature in 7rpm to surface treated hard
Golden cutter carries out aura cleaning；After aura cleaning terminates, regulation substrate bias in 220V, 380 DEG C of substrate temperature, air pressure is 1.5
×10-1Pa, opens arc ion plating Zr targets, and control Zr target currents bombard the hard alloy cutter 8 minutes in 55A, forms 75
The Zr metal prime coats of nanometer thickness；After metal prime coat deposition terminates, control to be passed through N by gas2And control air pressure to exist
1.5Pa, substrate bias deposit 200nm thickness ZrN nitride transition layers in 180V, Zr target current 70A；Nitride transition layer is deposited
After end, arc ion plating Zr targets and AlTi alloys targets are opened, and control target current in 50A, while opening bipolar pulse magnetic control
Then sputtering Si targets, regulation electric current to 8A controls nitrogen and oxygen flow, N by gas control system2And O2Each lead into 700
And 300sccm,Air pressure control deposits the TiZrAlSiON nano-composite coatings of 1500 nanometer thickness in 3Pa, and preparation technology terminates
Afterwards, natural cooling, when temperature is dropped to below 40 DEG C, takes out hard alloy cutter.
Embodiment 4
A kind of TiZrAlSiON nano composite super-hards coated cutting tool, coated cutting tool includes hard alloy cutter body and body
The TiZrAlSiON nano-composite coatings of upper coating, wherein TiZrAlSiON nano-composite coatings, are multi-layer compound structure：Including
75 nanometer thickness metal prime coat Zr metal levels, 120 nanometer thickness nitride transition layer ZrN, 1300 nanometer thickness functional layers
TiZrAlSiON；
Its preparation method is to obtain Zr, Ti, Al by arc evaporation Zr targets and TiAl alloy target, and the acquisition of Si passes through magnetic
Control sputtering column Si targets, and the acquisition of N and O is passed through N by gas control equipment2And O2Realize, comprise the following steps：
First, when vacuum chamber base vacuum reaches 6 × 10-3During Pa, control to be passed through Ar gas to 3Pa by gas, adjust
Substrate temperature 300 DEG C, regulation substrate bias in -900V, substrate frame rotating speed in 8rpm, to surface treated hard alloy
Cutter carries out aura cleaning；After aura cleaning terminates, regulation substrate bias in 270V, 330 DEG C of substrate temperature, air pressure 2.1 ×
10-1Pa, opens arc ion plating Zr targets, and control Zr target currents bombard the hard alloy cutter 8 minutes in 55A, forms 70 and receives
The thick Zr metal prime coats of rice；After metal prime coat deposition terminates, control to be passed through N by gas2And air pressure is controlled in 1.8Pa,
Substrate bias deposit 120nm thickness ZrN nitride transition layers in 120V, Zr target current 70A；After nitride transition layer deposition terminates,
Arc ion plating Zr targets and AlTi alloys targets are opened, and controls target current in 45A, while opening bipolar pulse magnetron sputtering Si
Then target, regulation electric current to 5-10A controls nitrogen and oxygen flow, N by gas control system2And O2Each lead into 70 Hes
330sccm,Air pressure control deposits the TiZrAlSiON nano-composite coatings of 2000 nanometer thickness in 3Pa, after preparation technology terminates,
Natural cooling, when temperature is dropped to below 40 DEG C, takes out hard alloy cutter.
Embodiment 5
A kind of TiZrAlSiON nano composite super-hards coated cutting tool, coated cutting tool includes hard alloy cutter body and body
The TiZrAlSiON nano-composite coatings of upper coating, wherein TiZrAlSiON nano-composite coatings, are multi-layer compound structure：Including
68 nanometer thickness metal prime coat Zr metal levels, 170 nanometer thickness nitride transition layer ZrN, 3000 nanometer thickness functional layers
TiZrAlSiON；
Its preparation method is to obtain Zr, Ti, Al by arc evaporation Zr targets and TiAl alloy target, and the acquisition of Si passes through magnetic
Control sputtering column Si targets, and the acquisition of N and O is passed through N by gas control equipment2And O2Realize, comprise the following steps：
First, when vacuum chamber base vacuum reaches 6 × 10-3During Pa, control to be passed through Ar gas to 2Pa by gas, adjust
In 400 DEG C, regulation substrate bias in -1000V, substrate frame rotating speed is closed substrate temperature in 7rpm to surface treated hard
Golden cutter carries out aura cleaning；After aura cleaning terminates, regulation substrate bias in 280V, 420 DEG C of substrate temperature, air pressure 2 ×
10-1Pa, opens arc ion plating Zr targets, and control Zr target currents bombard the hard alloy cutter 7 minutes in 60A, forms 95 and receives
The thick Zr metal prime coats of rice；After metal prime coat deposition terminates, control to be passed through N by gas2And air pressure is controlled in 1Pa, base
Body-bias deposit 200nm thickness ZrN nitride transition layers in 140V, Zr target current 70A；After nitride transition layer deposition terminates, open
Arc ion plating Zr targets and AlTi alloys targets are opened, and controls target current in 45A, while bipolar pulse magnetron sputtering Si targets are opened,
Then regulation electric current controls nitrogen and oxygen flow, N to 6.5A by gas control system2And O2Each lead into 77 Hes
300sccm,Air pressure control deposits the TiZrAlSiON nano-composite coatings of 4000 nanometer thickness in 3Pa, after preparation technology terminates,
Natural cooling, when temperature is dropped to below 40 DEG C, takes out hard alloy cutter.
Below in conjunction with accompanying drawing, TiZrAlSiON nano composite super-hard coated cutting tool performances prepared by the present invention are done further
Explanation
Fig. 1 is the vertical view and schematic cross-section of multi sphere combination bipolar pulse magnetic control sputtering system；
Fig. 2 be figure in provide O2The XRD spectrum of the TiZrAlSiON coatings prepared under the conditions of flow 200sccm, can see
Go out its structure and contain various Emission in Cubic：Cube TiAlN（111）,（200）, and（220）Phase, cube ZrN（200）Phase, hexagonal phase
ZrO2,Without there is obvious aluminum oxide or silicon nitride phase in coating, the nano combined painting that cubic polycrystalline is inlayed is suggested the formation of
Layer；
Fig. 3 is the Cross Section Morphology figure that TiZrAlSiON coatings are given in figure, it can be seen that obvious column crystals growth, coating
It is good with substrate adhesion；
Fig. 4 is bias 200V, O2The XPS spectrum of the TiZrAlSiON samples prepared under the conditions of flow 200sccm.XPS spectrum energy
The discriminating of the element and chemical state of 5nm or so below sample surfaces is provided.The XPS spectrum of Ti2p and Si2p is given in figure；Wherein
The 2p of Ti2p spectrums1/2And 2p2/3Peak is located at 458.8eV and 464.4eV respectively, corresponding to titanium nitride key, shows there is change in film
Learn the nitride of metering.There is peak value at only 101.4eV in the XPS spectrum of Si2p, corresponding to Si3N4In Si-N keys；
Fig. 5 is bias 200V, O2The high-resolution-ration transmission electric-lens of the TiZrAlSiON samples prepared under the conditions of flow 200sccm
Image, it can be seen that apparent nano-amorphous mosaic texture；
Learn coating by polycrystalline ZrN, TiAlN, ZrO with reference to XRD and XPS analysis2Mutually it is embedded in amorphous Si3N4And Al2O3
Composition；
Fig. 6 is bias 200V, O2The TiZrAlSiON nano-composite coatings prepared under the conditions of flow 200sccm are at 600 DEG C
When high temperature friction coefficient curve.Coefficient of friction is less than 0.3, it is known that coating has excellent resistance to high temperature oxidation characteristic；
Fig. 7 is bias 200V, O2The TiZrAlSiON nano-composite coatings prepared under the conditions of flow 200sccm are at 800 DEG C
When hardness with compression distance change curve.The hardness of coating is more than 35Gpa.
Claims (1)
1. a kind of TiZrAlSiON nano composite super-hards coated cutting tool, it is characterised in that：Coated cutting tool includes hard alloy cutter
The TiZrAlSiON nano-composite coatings of coating on body and body；
Described TiZrAlSiON nano-composite coatings include that 50-100 nanometer thickness metal prime coat Zr metal levels, 100-300 are received
Rice thick nitride transition zone ZrN, 1000-4000 nanometer thickness functional layer TiZrAlSiON；
The nanometer that there is described 1000-4000 nanometer thickness functional layers TiZrAlSiON nano-crystalline granule to be embedded in noncrystal substrate is answered
Close structure, i.e. nano particle TiN and ZrN and be embedded in noncrystal substrate Al2O3And Si3N4In, wherein nano-crystalline granule TiN's and ZrN
Size is 5-15 nanometers；
The mechanical property of the composite coating is that, with the ultrahigh hardness more than 35GPa, 0.3 or so low-friction coefficient is more than
The adhesive force of 50N；
The oxygen content of oxygen feedback device precise control coating is to 3-10at.%；
Its preparation method is as follows：
Its preparation method is that multipath gas prepare nano combined using multi-arc ion coating combination bipolar pulse magnetron sputtering
TiZrAlSiON coatings, the wherein acquisition of Si elements are obtained by bipolar pulse magnetron sputtering Si cylindrical targets, Zr, Ti, Al element
Acquisition then by multi sphere ion be deposited with realize, concretely comprise the following steps：
When vacuum chamber base vacuum reaches 1 × 10-3To 8 × 10-3During Pa, control to be passed through Ar gas to 1-3Pa by gas, adjust
Substrate temperature 300-400 DEG C, regulation substrate bias in -700-1000V, substrate frame rotating speed in 3-8rpm, at by surface
The hard alloy cutter of reason carries out aura cleaning；After aura cleaning terminates, regulation substrate bias are in 200-300V, substrate temperature
300-500 DEG C, air pressure is in 1-3 × 10-1Pa, opens arc ion plating Zr targets, and control Zr target currents bombard described hard in 50-70A
Matter alloy cutter 5-10 minutes, forms the Zr metal prime coats of 50-100 nanometer thickness；After metal prime coat deposition terminates, by gas
Body control is passed through N2And controlling air pressure in 1-2Pa, substrate bias deposit 100-300nm in 100-200V, Zr target current 50-80A
Thick ZrN nitride transition layers；After nitride transition layer deposition terminates, arc ion plating Zr targets and AlTi alloys targets are opened, and control
Target current processed is in 40-60A, while opening bipolar pulse magnetron sputtering Si targets, electric current is adjusted to 5-10A, then by gas control
System processed controls nitrogen and oxygen flow, N2And O260-100 and 200-400sccm is each led into, air pressure is controlled in 2-4Pa, is sunk
The TiZrAlSiON nano-composite coatings of 1000 to 4000 nanometer thickness of product.
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| JP5783462B2 (en) * | 2011-12-09 | 2015-09-24 | 三菱マテリアル株式会社 | Surface coated cutting tool |
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