CN105097572A - Modularly-design multi-functional heating table mechanism - Google Patents
Modularly-design multi-functional heating table mechanism Download PDFInfo
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- CN105097572A CN105097572A CN201510405034.3A CN201510405034A CN105097572A CN 105097572 A CN105097572 A CN 105097572A CN 201510405034 A CN201510405034 A CN 201510405034A CN 105097572 A CN105097572 A CN 105097572A
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- 238000001816 cooling Methods 0.000 claims description 37
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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Abstract
The invention relates to a modularly-designed multi-functional heating table mechanism which comprises a movement base table (1) and a jig (4), wherein the jig (4) is arranged on the movement base table (1), a workpiece matched with the jig (4) is placed on the jig (4), the movement base table (1) comprises a fixed bottom plate (11), a Theta-axis sliding table (12), a first carrying platform (13), a second carrying platform (15) and a third carrying platform (18), the Theta-axis sliding table (12) is arranged on the fixed bottom plate (11) and does Theta-direction rotation movement around a Z-axis, the first carrying platform (13), the second carrying platform (15) moving along a y-axis and the third carrying platform (18) moving along an x-axis are sequentially arranged on the Theta-axis sliding table (12) from bottom to top, during working, the Theta-axis sliding table (12), the second carrying platform (15) and the third carrying platform (18) are respectively adjusted, the jig (4) is moved onto an appointed station, and the workpiece on the jig is processed. Compared with the prior art, the modularly-designed multi-functional heating table mechanism has the advantages of multiple functions, high processing accuracy, low manufacturing cost and the like.
Description
Technical field
The present invention relates to the high-end sealed in unit field of semiconductor, especially relate to a kind of multi-functional thermal station mechanism of modularized design.
Background technology
Modular design concept stems from the sixties in 20th century, and under the overall background of scientific and technical develop rapidly over nearly 30 years, theory of modular design obtains constantly perfect.Along with the high speed development of national economy, plant equipment forward small lot, multi-functional and high accuracy trend development in basic manufacturing industry.This variation tendency causes traditional method for designing and design concept to be not suitable with quick to product, the efficient and economic demand of modern enterprise.Modularized design is effective ways that are cost-saving, that raise the efficiency and shorten the production cycle, and the application of this method for designing will get more and more.As patent 201310662161.2 the aircraft that discloses, the smart mobile phone that patent 201410077905.9 discloses and panel computer, the sand equipment processed that patent 201410070678 discloses.Equipment use that these patents disclose modular design concept or part employ modular design concept, but all modularized design is not done to the statement of complete display, not from the core of the angle statement modularized design of the overall situation: function modeling is separated with specific implementation.Thus, reference value is used for reference less.
Above patent has following inevitable shortcoming:
(1) not from profound level, to the function of equipment in addition abstract overview, function modeling and specific implementation are separated;
(2) do not state general process and the thinking of modularized design with having complete display, reference value is less;
(3) do not consider the connection element question in modularized design, narrowly the whole of modularized design are thought in the modification mechanism of a certain mechanism of equipment or replacement mechanism.
Summary of the invention
Object of the present invention is exactly provide a kind of multi-functional thermal station mechanism of modularized design to overcome defect that above-mentioned prior art exists.
Object of the present invention can be achieved through the following technical solutions:
A kind of multi-functional thermal station mechanism of modularized design, this thermal station mechanism comprises motion base station and is arranged on the tool on motion base station, described tool is placed the workpiece matched with it, described motion base station comprises fixed base plate, is arranged on fixed base plate and makes the θ axle slide unit of θ to rotary motion around z-axis, and be successively set on the first carrying platform on θ axle slide unit from top to bottom, the second carrying platform of moving along y-axis and the 3rd carrying platform moved along x-axis;
During work, regulate θ axle slide unit, the second carrying platform and the 3rd carrying platform respectively, tool is moved to and specifies on station, the workpiece on tool is processed.
Described thermal station mechanism also comprises depth of parallelism adjustment assembly and heating component, and described heating component and depth of parallelism adjustment assembly are arranged on motion base station from top to bottom, and described heating component arranges tool.
Described depth of parallelism adjustment assembly comprises the first U-shaped bearing, second U-shaped bearing and the first cooling platform, Open Side Down is arranged in the first U-shaped bearing for described second U-shaped bearing, moving block is provided with in second U-shaped bearing, this moving block by along x-axis to the second rotation axis run through the two side of the U-shaped bearing of connection second, should there be certain distance on the top of moving block and the second U-shaped bearing, to ensure that the second U-shaped bearing can rotate along x-axis, described moving block also by along y-axis to the first rotation axis run through the two side of the U-shaped bearing of connection first, moving block and the second U-shaped bearing and the first U-shaped rest base also should be at regular intervals, to ensure that moving block can along the rotation of y-axis, the first described cooling platform is arranged on the second U-shaped bearing, described second U-shaped bearing is also provided with multiple the 3rd micrometer knob be connected with the first U-shaped bearing,
Described heating component comprises the second cooling platform and the 4th carrying platform that set gradually from top to bottom, and the second described cooling platform is arranged on the first cooling platform, and the 4th described carrying platform is provided with thermocouple;
During work, regulate θ axle slide unit, the second carrying platform and the 3rd carrying platform respectively, tool is moved to and specifies on station, regulate the 3rd micrometer knob, second U-shaped bearing is rotated around the second rotation axis and the first rotation axis respectively, thus the depth of parallelism of regulating jig, workpiece heat on tool to processing temperature, then starts to process workpiece by unlatching thermocouple.
The sidewall of the described first U-shaped bearing and the second U-shaped bearing is equipped with at least one spacing slotted eye, this spacing slotted eye is provided with the spacer pin be fixed on moving block, the degree of freedom that the second U-shaped bearing rotates along x-axis and y-axis can be limited by spacing slotted eye and spacer pin, meanwhile, moving block can be allowed to have certain adjustment space along the z-axis direction;
Described second U-shaped bearing is provided with multiple 3rd L shape contiguous block, and the 3rd described micrometer knob is arranged on the 3rd L shape contiguous block, and is connected with the first U-shaped bearing;
The first described cooling platform is provided with many first heat radiation grooves, and for the heat dissipation channel that heat radiation cold air passes in and out;
The second described cooling platform lower surface is provided with many second heat radiation grooves, this the second heat radiation groove and first texturearunaperpendicular that dispels the heat is arranged, second cooling platform is also provided with the first temperature sensor, this first temperature sensor connects warning device, the temperature of the second cooling platform can be detected, if temperature is too high, equipment alarm, then stop heating immediately, to prevent from dispelling the heat not in time or other mechanisms of unfavorable damage of dispelling the heat;
The 4th described carrying platform is provided with the second temperature sensor of Real-time Feedback heating-up temperature, and the surrounding of the 4th carrying platform is also provided with thermal insulation board, can prevent heat diffusion and scatter and disappear, to ensure the heating to tool.
The second described cooling platform has the vacuum port connecting vacuum plant, the 4th described carrying platform is provided with the vacuum suction groove through with vacuum port, described tool is provided with the vacuum absorption holes corresponding with vacuum suction groove, during work, open vacuum plant, form absorption vacuum, make the workpiece on tool be adsorbed location.
Described vacuum port is made up of the first vacuum port, the second vacuum port and the 3rd vacuum port; Described vacuum suction groove is made up of the first vacuum suction groove, the second vacuum suction groove and the 3rd vacuum suction groove be connected through with the first vacuum port, the second vacuum port and the 3rd vacuum port respectively; Described vacuum absorption holes is by first vacuum absorption holes, second vacuum absorption holes and three vacuum absorption holes that arrange corresponding to the first vacuum suction groove, the second vacuum suction groove and the 3rd vacuum suction groove respectively.
The first described carrying platform is provided with the first guide rail along the x-axis direction, and the first micrometer knob, and the second described carrying platform to be arranged on the first guide rail and to be connected with the first micrometer knob;
The second described carrying platform is provided with the second guide rail along the y-axis direction, and the second micrometer knob, and the 3rd described carrying platform to be arranged on the second guide rail and to be connected with the second micrometer knob;
During work, regulating the first micrometer knob, making the second carrying platform make x-axis to moving along the first guide rail, regulating the second micrometer knob, making the 3rd carrying platform make y-axis to moving along the second guide rail.
The first described carrying platform is provided with a L shape contiguous block, and the first described micrometer knob is arranged on a L shape contiguous block, and is connected with the second carrying platform;
The second described carrying platform is provided with the 2nd L shape contiguous block, and the second described micrometer knob is arranged on the 2nd L shape contiguous block, and is connected with the 3rd carrying platform.
The first groups of springs is provided with along the first guide rail direction between the first described carrying platform and the second carrying platform, the second groups of springs is provided with along the second guide rail direction between the second described carrying platform and the 3rd carrying platform, after motion base station moves to the service position of specifying, lock the first micrometer knob and the second micrometer knob, the second carrying platform and the 3rd carrying platform realize self-locking respectively under the tension force effect of the first groups of springs and the second groups of springs.
Multi-functional thermal station mechanism of the present invention adopts theory of modular design, the detachable restructural of mechanism, thus forms different combinations to realize different functions.Such as, motion base station and tool combination, can realize only need in the job requirement of xy θ direction motion; Motion base station, depth of parallelism adjustment assembly and tool combination, be then applicable to xy θ direction and move and the processing operation needing to adjust the depth of parallelism; The combination of motion base station, heating component and tool is applicable to the motion of xy θ direction, needs the processing operation of heating; The combination of the adjustment of motion base station, the depth of parallelism assembly, heating component and tool is applicable to the motion of xy θ direction, has the depth of parallelism to adjust the processing operation of requirement and heating requirements.
Compared with prior art, the present invention has the following advantages:
(1) thermal station mechanism of the present invention by motion base station, the depth of parallelism adjust assembly, heating component and tool four part of module form, achieve function modeling to be separated with concrete, separate between each module, interactivity and interchangeability by force, are convenient to standardized management;
(2) thermal station mechanism of the present invention is detachable recombinates, and the combination of disparate modules can realize different functions, thus meets different job requirements, realizes a tractor serves several purposes, greatly reduces manufacturing cost;
(3) motion base station of the present invention can realize xy θ three-degree-of-freedom motion simultaneously, and depth of parallelism adjustment assembly can adjust the depth of parallelism of thermal station institution staff plane, thus can the condition of work of controlled working accurately, and the machining accuracy of workpiece is improved greatly.
Accompanying drawing explanation
Fig. 1 is that thermal station mechanism module of the present invention divides and design 3D illustraton of model;
Fig. 2 is the normal axomometric drawing of motion base station of the present invention;
Fig. 3 is the main TV structure schematic diagram of motion base station of the present invention;
Fig. 4 is the shaft side figure such as grade of the depth of parallelism of the present invention adjustment assembly;
Fig. 5 is the main TV structure schematic diagram of the depth of parallelism of the present invention adjustment assembly;
Fig. 6 is the shaft side figure such as grade of heating component of the present invention;
Fig. 7 is the main TV structure schematic diagram of heating component of the present invention;
Fig. 8 is the main TV structure schematic diagram of tool of the present invention;
In figure, 1-motion base station, 11-fixed base plate, 12-θ axle slide unit, 13-first carrying platform, 141-first micrometer knob, 142-second micrometer knob, 15-second carrying platform, 161-first guide rail, 162-second guide rail, 171-the one L shape contiguous block, 172-the 2nd L shape contiguous block, 18-the 3rd carrying platform, 191-first groups of springs, 192-second groups of springs, 2-depth of parallelism adjustment assembly, the U-shaped bearing of 21-first, 22-moving block, 23-first rotation axis, 24-second rotation axis, the U-shaped bearing of 25-second, 26-the 3rd L shape contiguous block, 27-the 3rd micrometer knob, 28-first cooling platform, 29-spacer pin, the spacing slotted eye of 211-, 212-first U-type groove hole, 251-second U-type groove hole, 281-first dispels the heat groove, 282-air admission hole, 283-venthole, 3-heating component, 31-second cooling platform, 32-first temperature sensor, 33-the 4th carrying platform, 34-thermocouple, 35-second temperature sensor, 36-thermal insulation board, 311-second dispels the heat groove, 331-first vacuum port, 332-first vacuum suction groove, 333-second vacuum port, 334-second vacuum suction groove, 335-the 3rd vacuum port, 336-the 3rd vacuum suction groove, 4-tool, 41-first vacuum absorption holes, 42-second vacuum absorption holes, 43-the 3rd vacuum absorption holes.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.The present embodiment is implemented premised on technical solution of the present invention, give detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment 1
A multi-functional thermal station mechanism for modularized design, as shown in Figure 1, this thermal station mechanism sets gradually its structure from top to bottom:
Motion base station 1, its structure is as shown in Figures 2 and 3: comprise fixed base plate 11, to be arranged on fixed base plate 11 and to make the θ axle slide unit 12 of θ to rotary motion around z-axis, and the first carrying platform 13 be successively set on from top to bottom on θ axle slide unit 12, the second carrying platform 15 moved along y-axis and the 3rd carrying platform 18 moved along x-axis, first carrying platform 13 is provided with the first guide rail 161 along the x-axis direction, and a L shape contiguous block 171, first micrometer knob 141 is arranged on a L shape contiguous block 171, second carrying platform 15 to be arranged on the first guide rail 161 and to be connected with the first micrometer knob 141, second carrying platform 15 is provided with the second guide rail 162 along the y-axis direction, and the 2nd L shape contiguous block 172, second micrometer knob 142 is arranged on the 2nd L shape contiguous block 172, 3rd carrying platform 18 to be arranged on the second guide rail 162 and to be connected with the second micrometer knob 142, the first groups of springs 191 is provided with along the first guide rail 161 direction between first carrying platform 13 and the second carrying platform 15, the second groups of springs 192 is provided with along the second guide rail 162 direction between second carrying platform 15 and the 3rd carrying platform 18,
Depth of parallelism adjustment assembly 2, its structure is as shown in Figure 4 and Figure 5: comprise the first U-shaped bearing 21, second U-shaped bearing 25 and the first cooling platform 28, first U-shaped bearing 21 is arranged on the 3rd carrying platform 18, Open Side Down is arranged in the first U-shaped bearing 21 for second U-shaped bearing 25, moving block 22 is provided with in second U-shaped bearing 25, this moving block 22 by along x-axis to the second rotation axis 24 run through the two side of the U-shaped bearing 25 of connection second, should there be certain distance on the top of moving block 22 and the second U-shaped bearing 25, to ensure that the second U-shaped bearing 25 can rotate along x-axis, moving block 22 also by along y-axis to the first rotation axis 23 run through the two side of the U-shaped bearing 21 of connection first, also should be at regular intervals bottom moving block 22 and the second U-shaped bearing 25 and the first U-shaped bearing 21, to ensure that moving block 22 can along the rotation of y-axis, first cooling platform 28 is arranged on the second U-shaped bearing 25, second U-shaped bearing 25 4 end is equipped with the 3rd L shape contiguous block 26, 3rd L shape contiguous block 26 is provided with the 3rd micrometer knob 27 that bearing 21 U-shaped with first is connected, the sidewall of the first U-shaped bearing 21 and the second U-shaped bearing 25 is equipped with two spacing slotted eyes 211, this spacing slotted eye 211 is provided with the spacer pin 29 be fixed on moving block 22, the degree of freedom that the second U-shaped bearing 25 rotates along x-axis and y-axis can be limited by spacing slotted eye 211 and spacer pin 29, simultaneously, moving block 22 can be allowed to have certain adjustment space along the z-axis direction, first cooling platform 28 is arranged on the second U-shaped bearing 25, first cooling platform 28 is provided with six group of first groove 281 that dispels the heat, and for the heat dissipation channel that heat radiation cold air passes in and out, heat radiation cold air enters from air admission hole 282, discharge from venthole 283 again, thus help the first cooling platform 28 to dispel the heat,
Tool 4, its structure as shown in Figure 8: tool 4 is arranged on heating component 3, and tool 4 is provided with the workpiece mated with it;
Heating component 3, its structure is as shown in Figure 6 and Figure 7: comprise the second cooling platform 31 and the 4th carrying platform 33 that set gradually from top to bottom, second cooling platform 31 is arranged on the first cooling platform 28, 4th carrying platform 33 is provided with thermocouple 34, second cooling platform 31 lower surface is provided with six group of second groove 311 that dispels the heat, this the second heat radiation groove 311 and first dispels the heat, and groove 281 is vertical to be arranged, second cooling platform 31 is also provided with the first temperature sensor 32, this first temperature sensor 32 connects warning device, the temperature of the second cooling platform 31 can be detected, if temperature is too high, equipment alarm, then stop heating immediately, to prevent from dispelling the heat not in time or other mechanisms of unfavorable damage of dispelling the heat, 4th carrying platform 33 is provided with the second temperature sensor 35 of Real-time Feedback heating-up temperature, the surrounding of the 4th carrying platform 33 is also provided with thermal insulation board 36, heat diffusion can be prevented and scatter and disappear, to ensure the heating to tool 4,
Second cooling platform 31 has the first vacuum port 331 connecting vacuum plant, second vacuum port 333 and the 3rd vacuum port 335, 4th carrying platform 33 be provided with respectively with the first vacuum port 331, first vacuum suction groove 332 of the second vacuum port 333 and the through connection of the 3rd vacuum port 335, second vacuum suction groove 334 and the 3rd vacuum suction groove 336, tool 4 be provided with respectively with the first vacuum suction groove 332, the first vacuum absorption holes 41 that second vacuum suction groove 334 and the 3rd vacuum suction groove 336 correspondence are arranged, second vacuum absorption holes 42 and the 3rd vacuum absorption holes 43, during work, open vacuum plant, form absorption vacuum, the workpiece on tool 4 is made to be adsorbed location,
During work, workpiece is placed on tool 4, regulate θ axle slide unit 12, first micrometer knob 141 and the second micrometer knob 142, drive thermal station mechanism to rotate along z-axis respectively, move along the y-axis direction and move along the x-axis direction, thus by workpiece movable to service position, then the 3rd micrometer knob 27 is regulated, the second U-shaped bearing 25 is driven to rotate around the second rotation axis 24 and the first rotation axis 23 respectively, thus regulate the depth of parallelism of workpiece, open thermocouple 34, by workpiece heat to working temperature, and then workpiece is processed.
Embodiment 2
A multi-functional thermal station mechanism for modularized design, this thermal station mechanism sets gradually from top to bottom:
Motion base station 1, its structure is as shown in Figures 2 and 3: comprise fixed base plate 11, to be arranged on fixed base plate 11 and to make the θ axle slide unit 12 of θ to rotary motion around z-axis, and the first carrying platform 13 be successively set on from top to bottom on θ axle slide unit 12, the second carrying platform 15 moved along y-axis and the 3rd carrying platform 18 moved along x-axis, first carrying platform 13 is provided with the first guide rail 161 along the x-axis direction, and a L shape contiguous block 171, first micrometer knob 141 is arranged on a L shape contiguous block 171, second carrying platform 15 to be arranged on the first guide rail 161 and to be connected with the first micrometer knob 141, second carrying platform 15 is provided with the second guide rail 162 along the y-axis direction, and the 2nd L shape contiguous block 172, second micrometer knob 142 is arranged on the 2nd L shape contiguous block 172, 3rd carrying platform 18 to be arranged on the second guide rail 162 and to be connected with the second micrometer knob 142, the first groups of springs 191 is provided with along the first guide rail 161 direction between first carrying platform 13 and the second carrying platform 15, the second groups of springs 192 is provided with along the second guide rail 162 direction between second carrying platform 15 and the 3rd carrying platform 18,
Tool 4, its structure as shown in Figure 8: tool 4 is arranged on the 3rd carrying platform 18, and tool 4 is provided with the workpiece mated with it;
During work, workpiece is placed on tool 4, regulates θ axle slide unit 12, first micrometer knob 141 and the second micrometer knob 142, drives thermal station mechanism to rotate along z-axis respectively, moves along the y-axis direction and move along the x-axis direction, thus by workpiece movable to service position, then workpiece is processed.
Embodiment 3
A multi-functional thermal station mechanism for modularized design, this thermal station mechanism sets gradually from top to bottom:
Motion base station 1, its structure is as shown in Figures 2 and 3: comprise fixed base plate 11, to be arranged on fixed base plate 11 and to make the θ axle slide unit 12 of θ to rotary motion around z-axis, and the first carrying platform 13 be successively set on from top to bottom on θ axle slide unit 12, the second carrying platform 15 moved along y-axis and the 3rd carrying platform 18 moved along x-axis, first carrying platform 13 is provided with the first guide rail 161 along the x-axis direction, and a L shape contiguous block 171, first micrometer knob 141 is arranged on a L shape contiguous block 171, second carrying platform 15 to be arranged on the first guide rail 161 and to be connected with the first micrometer knob 141, second carrying platform 15 is provided with the second guide rail 162 along the y-axis direction, and the 2nd L shape contiguous block 172, second micrometer knob 142 is arranged on the 2nd L shape contiguous block 172, 3rd carrying platform 18 to be arranged on the second guide rail 162 and to be connected with the second micrometer knob 142, the first groups of springs 191 is provided with along the first guide rail 161 direction between first carrying platform 13 and the second carrying platform 15, the second groups of springs 192 is provided with along the second guide rail 162 direction between second carrying platform 15 and the 3rd carrying platform 18,
Depth of parallelism adjustment assembly 2, its structure is as shown in Figure 4 and Figure 5: comprise the first U-shaped bearing 21, second U-shaped bearing 25 and the first cooling platform 28, first U-shaped bearing 21 is arranged on the 3rd carrying platform 18, Open Side Down is arranged in the first U-shaped bearing 21 for second U-shaped bearing 25, moving block 22 is provided with in second U-shaped bearing 25, this moving block 22 by along x-axis to the second rotation axis 24 run through the two side of the U-shaped bearing 25 of connection second, should there be certain distance on the top of moving block 22 and the second U-shaped bearing 25, to ensure that the second U-shaped bearing 25 can rotate along x-axis, moving block 22 also by along y-axis to the first rotation axis 23 run through the two side of the U-shaped bearing 21 of connection first, also should be at regular intervals bottom moving block 22 and the second U-shaped bearing 25 and the first U-shaped bearing 21, to ensure that moving block 22 can along the rotation of y-axis, first cooling platform 28 is arranged on the second U-shaped bearing 25, second U-shaped bearing 25 4 end is equipped with the 3rd L shape contiguous block 26, 3rd L shape contiguous block 26 is provided with the 3rd micrometer knob 27 that bearing 21 U-shaped with first is connected, the sidewall of the first U-shaped bearing 21 and the second U-shaped bearing 25 is equipped with two spacing slotted eyes 211, this spacing slotted eye 211 is provided with the spacer pin 29 be fixed on moving block 22, the degree of freedom that the second U-shaped bearing 25 rotates along x-axis and y-axis can be limited by spacing slotted eye 211 and spacer pin 29, simultaneously, moving block 22 can be allowed to have certain adjustment space along the z-axis direction, first cooling platform 28 is arranged on the second U-shaped bearing 25,
Tool 4, its structure as shown in Figure 8: tool 4 is arranged on the first cooling platform 28, and tool 4 is provided with the workpiece mated with it;
During work, workpiece is placed on tool 4, regulate θ axle slide unit 12, first micrometer knob 141 and the second micrometer knob 142, drive thermal station mechanism to rotate along z-axis respectively, move along the y-axis direction and move along the x-axis direction, thus by workpiece movable to service position, then regulate the 3rd micrometer knob 27, drive the second U-shaped bearing 25 to rotate around the second rotation axis 24 and the first rotation axis 23 respectively, thus be adjusted to the depth of parallelism of work pieces process, then workpiece is processed.
Claims (9)
1. the multi-functional thermal station mechanism of a modularized design, it is characterized in that, this thermal station mechanism comprises motion base station (1) and is arranged on the tool (4) on motion base station (1), described tool (4) above places the workpiece matched with it, described motion base station (1) comprises fixed base plate (11), be arranged on fixed base plate (11) go up and make the θ axle slide unit (12) of θ to rotary motion around z-axis, and the first carrying platform (13) be successively set on from top to bottom on θ axle slide unit (12), the second carrying platform (15) moved along y-axis and the 3rd carrying platform (18) moved along x-axis,
During work, regulate θ axle slide unit (12), the second carrying platform (15) and the 3rd carrying platform (18) respectively, tool (4) is moved to and specifies on station, the workpiece on tool is processed.
2. the multi-functional thermal station mechanism of a kind of modularized design according to claim 1, it is characterized in that, described thermal station mechanism also comprises depth of parallelism adjustment assembly (2) and heating component (3), described heating component (3) and depth of parallelism adjustment assembly (2) are arranged on motion base station (1) from top to bottom, and described heating component (3) arranges tool (4).
3. the multi-functional thermal station mechanism of a kind of modularized design according to claim 2, it is characterized in that, described depth of parallelism adjustment assembly (2) comprises the first U-shaped bearing (21), second U-shaped bearing (25) and the first cooling platform (28), Open Side Down is arranged in the first U-shaped bearing (21) for described second U-shaped bearing (25), moving block (22) is provided with in second U-shaped bearing (25), this moving block (22) by along x-axis to the second rotation axis (24) run through the two side of the U-shaped bearing of connection second (25), described moving block (22) also by along y-axis to the first rotation axis (23) run through the two side of the U-shaped bearing of connection first (21), described the first cooling platform (28) is arranged on the second U-shaped bearing (25), described second U-shaped bearing (25) is also provided with multiple the 3rd micrometer knob (27) be connected with the first U-shaped bearing (21),
Described heating component (3) comprises the second cooling platform (31) and the 4th carrying platform (33) that set gradually from top to bottom, described the second cooling platform (31) is arranged on the first cooling platform (28), and the 4th described carrying platform (33) is provided with thermocouple (34);
During work, regulate θ axle slide unit (12), the second carrying platform (15) and the 3rd carrying platform (18) respectively, tool (4) is moved to and specifies on station, regulate the 3rd micrometer knob (27), second U-shaped bearing (25) is rotated around the second rotation axis (24) and the first rotation axis (23) respectively, thus the depth of parallelism of regulating jig (4), upper for tool (4) workpiece heat to processing temperature, then starts to process workpiece by unlatching thermocouple (34).
4. the multi-functional thermal station mechanism of a kind of modularized design according to claim 3, it is characterized in that, the sidewall of the described first U-shaped bearing (21) and the second U-shaped bearing (25) is equipped with at least one spacing slotted eye (211), this spacing slotted eye (211) is provided with the spacer pin (29) be fixed on moving block (22);
Described second U-shaped bearing (25) is provided with multiple 3rd L shape contiguous block (26), the 3rd described micrometer knob (27) is arranged on the 3rd L shape contiguous block (26), and is connected with the first U-shaped bearing (21);
Described the first cooling platform (28) is provided with many first heat radiations groove (281), and for the heat dissipation channel that heat radiation cold air passes in and out;
Described the second cooling platform (31) lower surface is provided with many second heat radiations groove (311), this second heat radiation groove (311) and first is dispelled the heat, and groove (281) is vertical to be arranged, and the second cooling platform (31) is also provided with the first temperature sensor (32);
The 4th described carrying platform (33) is provided with the second temperature sensor (35), and the surrounding of the 4th carrying platform (33) is also provided with thermal insulation board (36).
5. the multi-functional thermal station mechanism of a kind of modularized design according to claim 3, it is characterized in that, described the second cooling platform (31) has the vacuum port connecting vacuum plant, the 4th described carrying platform (33) is provided with the vacuum suction groove through with vacuum port, described tool (4) is provided with the vacuum absorption holes corresponding with vacuum suction groove, during work, open vacuum plant, form absorption vacuum, make the workpiece on tool (4) be adsorbed location.
6. the multi-functional thermal station mechanism of a kind of modularized design according to claim 5, is characterized in that, described vacuum port is made up of the first vacuum port (331), the second vacuum port (333) and the 3rd vacuum port (335); Described vacuum suction groove is made up of the first vacuum suction groove (332), the second vacuum suction groove (334) and the 3rd vacuum suction groove (336) be connected through with the first vacuum port (331), the second vacuum port (333) and the 3rd vacuum port (335) respectively; Described vacuum absorption holes is by first vacuum absorption holes (41), second vacuum absorption holes (42) and three vacuum absorption holes (43) that arrange corresponding to the first vacuum suction groove (332), the second vacuum suction groove (334) and the 3rd vacuum suction groove (336) respectively.
7. the multi-functional thermal station mechanism of a kind of modularized design according to claim 1, it is characterized in that, described the first carrying platform (13) is provided with the first guide rail (161) along the x-axis direction, and the first micrometer knob (141), it is upper and be connected with the first micrometer knob (141) that described the second carrying platform (15) is arranged on the first guide rail (161);
Described the second carrying platform (15) is provided with the second guide rail (162) along the y-axis direction, and the second micrometer knob (142), it is upper and be connected with the second micrometer knob (142) that the 3rd described carrying platform (18) is arranged on the second guide rail (162);
During work, regulate the first micrometer knob (141), the second carrying platform (15) is made to make x-axis to motion along the first guide rail (161), regulate the second micrometer knob (142), make the 3rd carrying platform (18) make y-axis to motion along the second guide rail (162).
8. the multi-functional thermal station mechanism of a kind of modularized design according to claim 7, it is characterized in that, described the first carrying platform (13) is provided with a L shape contiguous block (171), the first described micrometer knob (141) is arranged on a L shape contiguous block (171), and is connected with the second carrying platform (15);
Described the second carrying platform (13) is provided with the 2nd L shape contiguous block (172), the second described micrometer knob (142) is arranged on the 2nd L shape contiguous block (172), and is connected with the 3rd carrying platform (18).
9. the multi-functional thermal station mechanism of a kind of modularized design according to claim 7, it is characterized in that, be provided with the first groups of springs (191) along the first guide rail (161) direction between described the first carrying platform (13) and the second carrying platform (15), between described the second carrying platform (15) and the 3rd carrying platform (18), be provided with the second groups of springs (192) along the second guide rail (162) direction.
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| CN107953056A (en) * | 2017-12-25 | 2018-04-24 | 苏州明氏自动化技术有限公司 | The welding fixture of conductive bar in sound-producing device |
| CN108196589A (en) * | 2017-12-26 | 2018-06-22 | 深圳市诺峰光电设备有限公司 | A kind of novel adjusting depth of parallelism mechanism arrangement |
| CN108436768A (en) * | 2018-05-17 | 2018-08-24 | 昆山市恒达精密机械工业有限公司 | Adjustable precise positioning device |
| CN114562709A (en) * | 2022-03-14 | 2022-05-31 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Bottom lighting module adjusting device |
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