CN114562709B

CN114562709B - Bottom lighting module adjusting device

Info

Publication number: CN114562709B
Application number: CN202210244714.1A
Authority: CN
Inventors: 郑艳芳; 杨师; 路继松; 李海彬
Original assignee: Beijing Semiconductor Equipment Institute
Current assignee: Beijing Semiconductor Equipment Institute
Priority date: 2022-03-14
Filing date: 2022-03-14
Publication date: 2023-04-25
Anticipated expiration: 2042-03-14
Also published as: CN114562709A

Abstract

The application relates to the technical field of semiconductor production, in particular to a bottom lighting module adjusting device which is arranged between a base frame and a bottom lighting module, wherein the bottom lighting module adjusting device comprises a supporting member, an X-direction adjusting mechanism, a Y-direction adjusting mechanism and a Z-direction adjusting mechanism, and the supporting member is connected with the base frame; the X-direction adjusting mechanism is arranged between the supporting member and the bottom lighting module and is used for adjusting and locking the X-direction position of the adjusted bottom lighting module; the Y-direction adjusting mechanism is arranged between the supporting member and the bottom lighting module and is used for adjusting and locking the Y-direction position and Rz of the adjusted bottom lighting module; the Z-direction adjusting mechanism is arranged between the supporting member and the bottom lighting module and is used for adjusting and locking the Z-direction position, rx and Ry of the bottom lighting module. Therefore, the device can realize the adjustment of Rx, ry, rz, X, Y and Z six degrees of freedom, realize the accurate resetting of the bottom lighting module and has strong universality.

Description

Bottom lighting module adjusting device

Technical Field

The application relates to the technical field of semiconductor production, in particular to a bottom lighting module adjusting device.

Background

At present, after the bottom lighting module works stably for about 3 months, the lenses at the top end of the bottom lighting module need to be wiped and cleaned, and the bottom lighting module needs to be wholly moved out to expose the lenses. In addition, when the internal lens, the motor, the controller and other parts of the bottom lighting module fail, the bottom lighting module needs to be removed, so that maintenance and repair or replacement can be performed. And when cleaning, maintenance or replacement work is carried out, the bottom lighting module needs to be reset, and high position repeatability, namely resetting precision, must be ensured.

Disclosure of Invention

An object of the present application is to provide a bottom lighting module adjusting device, which solves to a certain extent the technical problem of the device which is urgently needed to guarantee the resetting precision of the bottom lighting module in the prior art.

The application provides a bottom lighting module adjusting device for in the semiconductor manufacture, and install between basic frame and bottom lighting module, bottom lighting module adjusting device includes: a support member, an X-direction adjusting mechanism, a Y-direction adjusting mechanism and a Z-direction adjusting mechanism;

wherein the support member is connected with the base frame; the X-direction adjusting mechanism is arranged between the supporting member and the bottom lighting module and is used for adjusting and locking the adjusted X-direction position of the bottom lighting module;

The Y-direction adjusting mechanism is arranged between the supporting member and the bottom lighting module and is used for adjusting and locking the Y-direction position of the adjusted bottom lighting module and the rotation angle Rz around the Z axis;

the Z-direction adjusting mechanism is arranged between the supporting member and the bottom lighting module and is used for adjusting and locking the Z-direction position of the bottom lighting module, and the rotation angle Rx around the X axis and the rotation angle Ry around the Y axis;

the X-direction adjusting mechanism comprises a first X-direction adjusting component and a second X-direction adjusting component, and the first X-direction adjusting component and the second X-direction adjusting component are arranged on two opposite sides of the supporting member;

the first X-direction adjusting component and the second X-direction adjusting component are respectively provided with an X-direction connecting component, and the two X-direction connecting components are arranged on two opposite sides of the mounting surface of the bottom lighting module;

the first X-direction adjusting assembly comprises an X-direction positioning assembly, a locking assembly and a damping assembly, and the X-direction positioning assembly, the locking assembly and the damping assembly are sequentially arranged from top to bottom along the height direction of the supporting member.

In the above technical solution, further, the X-direction positioning assembly includes an X-direction auxiliary mounting member, an X-direction positioning member, a first adjusting bolt, and a first idler; wherein the X-direction auxiliary mounting member is connected with one side portion of the supporting member; the X-direction positioning member is positioned on one side of the X-direction auxiliary installation member, which is far away from the supporting member, and the X-direction positioning member is connected with the X-direction auxiliary installation member through a connecting bolt;

The first adjusting bolt penetrates through the X-direction positioning member, and the end part of the first adjusting bolt penetrates through the X-direction positioning member to be propped against the X-direction auxiliary mounting member; the first idler wheel is rotatably arranged on the X-direction positioning component.

In any of the above aspects, further, the damper assembly includes a damper mounting member connected to one side of the support member, and a damper penetrating the damper mounting member;

the bumper extends along the X direction, and a bumper end of the bumper is positioned on one side of the shock absorbing mounting member, which is close to the bottom lighting module.

In any of the above aspects, further, the locking assembly includes a locking mounting member and a first locking bolt, the locking mounting member being connected to one side of the support member, and the locking mounting member and the support member having a plurality of connection positions along the Y-direction;

the first locking bolt sequentially penetrates through the locking mounting member and the bottom lighting module and is used for locking the locking mounting member and the bottom lighting module.

In any of the above solutions, further, the second X-direction adjusting assembly includes the X-direction positioning assembly, the locking assembly, and a pressing assembly sequentially disposed along a height direction of the supporting member, and the pressing assembly of the second X-direction adjusting assembly includes a pressing shaft, a washer, a spring, a nut, and a spring positioning member;

wherein the spring positioning member is connected with one side of the support member; the compression shaft piece is arranged on the spring positioning member in a penetrating mode, the gasket and the spring are sleeved outside the compression shaft piece, and the gasket and the spring are arranged between the limiting head end of the compression shaft piece and one side of the spring positioning member; the gaskets are arranged at the two opposite ends of the spring;

the nut is screwed on the threaded connection column part of the compression shaft piece, and the nut is compressed on the other side of the spring positioning member.

In any of the above solutions, further, the Y-direction adjusting mechanism includes two Y-direction adjusting assemblies, and the two Y-direction adjusting assemblies are disposed on opposite sides of the mounting surface of the bottom lighting module;

any one of the Y-direction adjusting assemblies is provided with a jacking member, and the two jacking members are arranged on two opposite sides of the surface, close to the bottom lighting module, of the supporting member.

In any of the above solutions, further, the Y-direction adjusting assembly includes a Y-direction connecting member, an adjusting shim, a coping shim, and a second locking bolt; wherein the Y-direction connecting member is disposed at one side of the mounting surface of the bottom lighting module;

grooves are formed in two opposite side parts of the Y-direction connecting member, the two grooves are communicated through a through hole, the adjusting gasket is arranged in the groove close to one side of the bottom lighting module, and the grinding gasket is arranged in the groove close to one side of the supporting member; the method comprises the steps of carrying out a first treatment on the surface of the

The adjusting gasket is provided with a waist-shaped hole, the coping gasket is provided with a mounting through hole, and the second locking bolt sequentially penetrates through the adjusting gasket, the Y-direction connecting member and the coping gasket to be connected with the Y-direction jacking member so as to lock the Y-direction adjusting mechanism.

In any of the above technical solutions, further, the Z-direction adjusting mechanism includes at least three Z-direction adjusting assemblies, and any one of the Z-direction adjusting assemblies includes a caster, a bottom mounting member, a stud, a constant-height bolt, a belleville spring, a lock nut, and an adapter member;

wherein the adapting member is detachably connected with the bottom lighting module; the stud is screwed on the switching member, and the locking nut is screwed outside the stud and used for locking the stud on the switching member;

A spherical bulge is formed at one end part of the stud, a conical surface groove is formed on the bottom mounting member, and the spherical bulge is arranged in the conical surface groove;

the equal-height bolt is inverted and sequentially penetrates through the bottom mounting member, the belleville spring and the stud to lock the stud and the bottom mounting member together; the outer surfaces of the stud and the locking nut are respectively provided with a force application groove; the casters are connected with the bottom mounting member;

the Z-direction adjusting mechanism further comprises a foot margin, and the foot margin is detachably connected with the bottom lighting module.

In any of the above solutions, further, the Z-direction adjustment mechanism further includes a first marking assembly and a second marking assembly, where the first marking assembly and the second marking assembly are disposed on opposite sides of the mounting surface of the support member; the first marking assembly comprises an upper marking member, a second idler wheel, a plane matching member, a lower marking member and a second adjusting bolt;

wherein the upper marking member is disposed at the bottom lighting module; the second idler wheel is rotatably arranged on the upper marking member; the lower marking member is provided to the supporting member; the plane matching member is arranged above the lower marking member along the height direction of the supporting member, and the upper surface of the plane matching member along the height direction of the supporting member is a plane; the planar mating member and the support member have a plurality of connection locations along the Z-direction;

The second adjusting bolt is screwed on the lower marking member, and the end part of the second adjusting bolt penetrates through the lower marking member and is propped against the bottom of the plane matching member; the second idler can abut against an upper surface of the planar engagement member;

the second marking assembly includes the upper marking member, the second idler pulley, a V-shaped surface mating member, the lower marking member, and the second adjustment bolt, a portion of an upper surface of the V-shaped surface mating member along a height direction of the support member being V-shaped; the V-face engaging member and the support member have a plurality of connection locations along the Z-direction.

Compared with the prior art, the beneficial effects of this application are:

the application provides a bottom lighting module adjusting device installs between basic frame and bottom lighting module to utilize X to adjustment mechanism, Y to adjustment mechanism and Z to adjustment mechanism can realize Rx, ry, rz, X, Y and the regulation of Z six degrees of freedom, can realize bottom lighting module and basic frame's accurate equipment, also can realize bottom lighting module's accurate reset, practicality and commonality are all very strong.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is an isometric view of a bottom lighting module adjustment apparatus provided in an embodiment of the present application;

FIG. 2 is a schematic structural view of a support member according to an embodiment of the present disclosure;

FIG. 3 is an enlarged schematic view of FIG. 2 at A;

FIG. 4 is a schematic structural view of a compression assembly according to an embodiment of the present disclosure;

FIG. 5 is a cross-sectional view of a compression assembly provided in an embodiment of the present application;

fig. 6 is a schematic structural diagram of a bottom lighting module according to an embodiment of the present disclosure;

fig. 7 is a schematic structural diagram of a bottom lighting module adjusting device according to an embodiment of the present disclosure;

fig. 8 is another schematic structural view of a bottom lighting module adjusting device according to an embodiment of the present disclosure;

FIG. 9 is a schematic view of another embodiment of a bottom lighting module adjusting device according to the present disclosure;

FIG. 10 is a schematic view of another embodiment of a bottom lighting module adjusting device according to the present disclosure;

FIG. 11 is a schematic structural diagram of a Z-direction adjusting assembly according to an embodiment of the present disclosure;

fig. 12 is a cross-sectional view of a Z-adjust assembly provided in an embodiment of the present application.

Reference numerals:

1-a support member, 11-a mounting block;

2-X adjustment mechanism, 21-first X adjustment assembly, 211-X positioning assembly, 2111-X auxiliary mounting member, 2112-X positioning member, 2113-first adjustment bolt, 2114-first idler, 212-damper assembly, 2121-damper mounting member, 2122-bumper, 213-locking assembly, 2131-locking mounting member, 2132-first locking bolt, 22-second X adjustment assembly, 221-compression assembly, 2211-compression shaft, 2212-washer, 2213-spring, 2214-nut, 2215-spring positioning member, 23-X connecting member;

3-Y direction adjusting mechanism, 31-Y direction adjusting component, 311-Y direction connecting component, 312-adjusting pad, 313-grinding pad, 314-second locking bolt, 315-propping component;

4-Z direction adjusting mechanism, 41-Z direction adjusting component, 411-castor, 412-bottom mounting component, 413-stud, 414-equal height bolt, 415-belleville spring, 416-lock nut, 417-adapting component, 42-foot, 43-first marking component, 431-upper marking component, 432-second idler, 433-plane matching component, 434-lower marking component, 435-second adjusting bolt, 44-second marking component, 441-V-shaped surface matching component;

5-a base frame; 6-bottom lighting module.

Detailed Description

The following description of the embodiments of the present application will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown.

The components of the embodiments of the present application, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application.

All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of description of the present application and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.

The following describes a bottom lighting module adjustment apparatus according to some embodiments of the present application with reference to fig. 1 to 12.

Referring to fig. 1, an embodiment of the present application provides a bottom lighting module adjusting apparatus for use in semiconductor production and installed between a base frame 5 and a bottom lighting module 6, the bottom lighting module adjusting apparatus comprising: a support member 1, an X-direction adjusting mechanism 2, a Y-direction adjusting mechanism 3, and a Z-direction adjusting mechanism 4;

wherein the support member 1 is connected with the base frame 5; the X-direction adjusting mechanism 2 is arranged between the supporting member 1 and the bottom lighting module 6 and is used for adjusting and locking the X-direction position of the adjusted bottom lighting module 6;

the Y-direction adjusting mechanism 3 is disposed between the support member 1 and the bottom lighting module 6, and is used for adjusting and locking the Y-direction position of the adjusted bottom lighting module 6 and the rotation angle Rz around the Z-axis;

the Z-direction adjusting mechanism 4 is provided between the support member 1 and the bottom lighting module 6, and is used to adjust and lock the Z-direction position of the bottom lighting module 6, and the rotation angle Rx around the X-axis and the rotation angle Ry around the Y-axis.

Based on the above-described structure, the device is installed between the base frame 5 and the bottom lighting module 6, and can realize the adjustment of Rx, ry, rz, X, Y and Z six degrees of freedom by using the X-direction adjusting mechanism 2, the Y-direction adjusting mechanism 3 and the Z-direction adjusting mechanism 4, so that the bottom lighting module 6 and the base frame 5 can be precisely assembled, the bottom lighting module 6 can be precisely reset, and the practicability and the universality are very strong.

Further, it is preferable that the support member 1 has a rectangular parallelepiped structure, and is disposed along the Z direction, that is, the height direction of the support member 1 is the same as the Z direction, the width direction of the support member 1 is the same as the Y direction, and the length direction of the support member 1 is the same as the X direction.

Further, it is preferable that the support member 1 is further formed with a mounting block 11, and both front and rear sides of the mounting block 11 are formed with interfaces to be connected with other structures.

In this embodiment, preferably, as shown in fig. 1 and 2, the X-direction adjusting mechanism 2 includes a first X-direction adjusting assembly 21 and a second X-direction adjusting assembly 22, the first X-direction adjusting assembly 21 and the second X-direction adjusting assembly 22 being disposed on opposite sides of the support member 1;

the first X-direction adjusting assembly 21 and the second X-direction adjusting assembly 22 are each provided with one X-direction connecting member 23, and the two X-direction connecting members 23 are provided on opposite sides of the mounting surface of the bottom lighting module 6.

As is apparent from the above-described structure, when the bottom lighting module 6 and the base frame 5 are assembled, the two X-direction connecting members 23 on both sides of the mounting surface of the bottom lighting module 6 abut against the corresponding first X-direction adjusting assembly 21 and second X-direction adjusting assembly 22, respectively, thereby achieving the adjustment of the X-direction of the bottom lighting module 6 and the positioning after the adjustment.

In this embodiment, preferably, as shown in fig. 2, the first X-direction adjusting assembly 21 includes an X-direction positioning assembly 211, a locking assembly 213, and a damper assembly 212, and the X-direction positioning assembly 211, the locking assembly 213, and the damper assembly 212 are disposed in sequence from top to bottom along the height direction of the support member 1.

According to the above-described structure, the X-direction position of the bottom lighting module 6 is adjusted by the X-direction positioning component 211, and then the bottom lighting module 6 is positioned by the locking component 213, so as to keep the X-direction position unchanged, wherein the damping component 212 is mainly used for perfectly absorbing the energy generated by the impact of the bottom lighting module 6 when facing different loads and different impact speeds.

Further, it is preferable that the X-direction connecting member 23 has a rectangular parallelepiped structure extending along the Z-direction.

In this embodiment, preferably, as shown in fig. 2 and 3, the X-direction positioning assembly 211 includes an X-direction auxiliary mounting member 2111, an X-direction positioning member 2112, a first adjustment bolt 2113, and a first idler 2114; wherein the X-direction auxiliary mounting member 2111 is connected to one side portion of the support member 1; the X-direction positioning member 2112 is located on a side of the X-direction auxiliary mounting member 2111 remote from the support member 1, and the X-direction positioning member 2112 and the X-direction auxiliary mounting member 2111 are detachably connected by a connecting bolt;

The first adjusting bolt 2113 is provided through the X-direction positioning member 2112, and an end portion of the first adjusting bolt 2113 is provided on the X-direction auxiliary mounting member 2111 through the X-direction positioning member 2112; a first idler 2114 is rotatably provided to the X-direction positioning member 2112, the first idler 2114 being capable of contacting the X-direction connecting member 23 on the bottom lighting module 6.

As can be seen from the above-described structure, the two first adjusting bolts 2113 located at the left and right sides of the bottom lighting module 6 are abutted against the corresponding two X-direction auxiliary mounting members 2111 on the supporting member 1, and the first adjusting bolts 2113 are screwed and unscrewed, so that the adjustment in the X-direction can be achieved, especially when the adjustment is completed, the X-direction auxiliary mounting members 2111 and the X-direction positioning members 2112 can be locked by using the connecting bolts, further, preferably, the X-direction positioning members 2112 are provided with kidney-shaped holes along the Y-direction, through which the connecting bolts are connected with the X-direction auxiliary mounting members 2111, so that the position in the Y-direction of the X-direction positioning members 2112 can be adjusted conveniently.

Furthermore, the two first idler wheels 2114 can ensure sliding contact with the X-direction connecting member 23 on the bottom lighting module 6, adapting to the adjustment of the bottom lighting module 6 in the Z-direction.

Further, it is preferable that the X-direction auxiliary mounting member 2111 and the X-direction positioning member 2112 are each L-shaped, and the X-direction auxiliary mounting member 2111 is fixed at one side edge of the rectangular parallelepiped-shaped support member 1, wherein a part of the X-direction auxiliary mounting member 2111 extends in the X-direction and another part of the X-direction auxiliary mounting member 2111 extends in the Y-direction; the X-direction positioning member 2112 is disposed on a side of the X-direction auxiliary mounting member 2111 remote from the support member 1, and a portion of the X-direction positioning member 2112 extends in the X-direction and another portion of the X-direction positioning member 2112 extends in the Y-direction.

In this embodiment, preferably, as shown in fig. 2 and 3, the locking assembly 213 includes a locking mounting member 2131 and a first locking bolt 2132, the locking mounting member 2131 is connected to one side of the support member 1, and the locking mounting member 2131 and the support member 1 have a plurality of connection positions along the Y direction, for example, the locking mounting member 2131 is formed with a kidney-shaped hole extending along the Y direction, and the locking mounting member 2131 and the support member 1 are connected by a bolt passing through the kidney-shaped hole, so that the position of the locking mounting member 2131 in the Y direction can be adjusted according to actual needs;

the first lock bolt 2132 is provided to pass through the lock mounting member 2131 and the bottom lighting module 6 in this order, and is used to lock the lock mounting member 2131 and the bottom lighting module 6.

As can be seen from the above-described structure, when the adjustment of the X direction of the bottom lighting module 6 is completed, the first lock bolt 2132 is tightened, locking the X, rx and Ry directions of the bottom lighting module 6.

In this embodiment, as shown in fig. 2 and 3, the damper assembly 212 preferably includes a damper mounting member 2121 and a damper 2122, the damper mounting member 2121 being connected to one side of the support member 1, and the damper 2122 being provided to pass through the damper mounting member 2121;

The bumper 2122 extends along the X-direction, and the bumper end of the bumper 2122 is located on the side of the shock absorbing mounting member 2121 near the bottom lighting module 6, and the bumper end of the bumper 2122 can abut against the X-direction connecting member 23 on the bottom lighting module 6.

Further, it is preferable that the fitting member 2131 for locking is L-shaped, and the fitting member 2131 for locking is fixed to the auxiliary fitting member 2111 for X-direction located at one side edge of the rectangular parallelepiped supporting member 1.

As can be seen from the above described structure, the buffer 2122 is preferably an adjustable buffer, and the rotary button of the buffer 2122 can be adjusted to the most appropriate buffer strength in the face of different loads and different impact speeds, thereby perfectly absorbing the energy generated by the impact of the bottom lighting module 6.

Further, it is preferable that the damping mount member 2121 has a rectangular parallelepiped structure extending in the Y direction.

In this embodiment, preferably, as shown in fig. 2, 4 and 5, the second X-direction adjusting assembly 22 includes an X-direction positioning assembly 211, a locking assembly 213 and a pressing assembly 221 sequentially arranged along the height direction of the support member 1, and the pressing assembly 221 of the second X-direction adjusting assembly 22 includes a pressing shaft 2211, a washer 2212, a spring 2213, a nut 2214 and a spring positioning member 2215;

Wherein the spring positioning member 2215 is connected with one side of the support member 1; the compression shaft 2211 is arranged through the spring positioning member 2215 in a penetrating way, the gasket 2212 and the spring 2213 are sleeved outside the compression shaft 2211, the gasket 2212 and the spring 2213 are arranged between the limiting head end of the compression shaft 2211 and one side of the spring positioning member 2215, the gaskets 2212 are arranged at the opposite two ends of the spring 2213, and the adjustment of the bottom lighting module in the X direction can be adapted by increasing and decreasing the number of the gaskets 2212 and changing the thickness of the gaskets 2212 through machining;

the nut 2214 is screwed to the threaded connection column portion of the pressing shaft 2211, and the nut 2214 is pressed against the other side of the spring positioning member 2215.

According to the above-described structure, the compression length of the spring 2213 is adjusted by adjusting the length L of the compression shaft 2211 beyond the nut 2214, so as to adjust the spring force of the spring 2213, so that the limiting head end of the compression shaft 2211 tightly presses the X-direction connecting member 23, and the position of the bottom lighting module 6 after the X-direction adjustment is ensured to be unchanged.

Further, it is preferable that the spring positioning member 2215 has a rectangular parallelepiped structure extending along the Y direction.

In this embodiment, preferably, as shown in fig. 6 to 10, the Y-direction adjustment mechanism 3 includes two Y-direction adjustment assemblies 31, the two Y-direction adjustment assemblies 31 being disposed on opposite sides of the mounting surface of the bottom lighting module 6.

Either Y-direction adjustment assembly 31 is provided with one Y-direction propping member 315, and the two Y-direction propping members 315 are disposed on opposite sides of the surface of the support member 1 near the bottom lighting module 6.

As can be seen from the above-described structure, the Y-direction adjustment assembly 31 cooperates with the corresponding Y-direction top member 315 (fig. 2) to adjust the Y-direction position and Rz of the bottom lighting module 6 and lock the bottom lighting module after the adjustment is completed.

Further, it is preferable that the Y-direction propping member 315 is L-shaped and is mounted at one side edge of the rectangular parallelepiped-shaped supporting member 1, a part of the structure of the Y-direction propping member 315 extends in the X-direction, and another part of the structure of the Y-direction propping member 315 extends in the Y-direction.

In this embodiment, preferably, as shown in fig. 6 to 10, the Y-direction adjustment assembly 31 includes a Y-direction connection member 311, an adjustment shim 312, a grinding shim 313, and a second lock bolt 314; wherein the Y-direction connection member 311 is provided at one side of the mounting surface of the bottom lighting module 6;

grooves are formed on two sides of the middle part of the Y-direction connecting member 311, a through hole is formed between the two grooves, an adjusting gasket 312 is arranged in a groove on one side close to the mounting surface of the bottom lighting module 6, and a grinding gasket 313 is fixedly arranged in a groove on one side close to the supporting member 1;

The adjusting gasket 312 is provided with a waist-shaped hole, the grinding gasket 313 is provided with a mounting through hole, and the second locking bolt 314 sequentially passes through the adjusting gasket 312, the Y-direction connecting member 311 and the grinding gasket 313 to be connected with the jacking member 315 so as to lock the Y-direction adjusting mechanism 3;

as is apparent from the above-described structure, the bottom lighting module 6 is pushed to bring the grinding shims 313 into close contact with the Y-direction jacking member 315 on the support member 1, the second locking bolt 314 is tightened, fine adjustment in the Y and Rz directions is achieved by processing the thicknesses of the two grinding shims 313, for example, changing the thicknesses of the two grinding shims 313 and making the thicknesses of the two grinding shims 313 different, fine adjustment in the Rz direction can be achieved, changing the thicknesses of the two grinding shims 313 and making the thicknesses of the two grinding shims 313 the same, fine adjustment of the Y can be achieved, and after accurate positioning, the Y-direction connecting member 311 can be moved to appropriate positions in the X and Z directions by the cooperation of the kidney-shaped hole formed by the adjustment shim 312 and the mounting through hole formed by the grinding shim 313, thereby performing adjustment work of the bottom lighting module 6 in the X and Z directions.

Further, preferably, the Y-direction connection member 311 includes a first connection portion, a first extension portion, a mounting portion, a second extension portion, and a second connection portion that are sequentially connected in the Z-direction, and forms a handle-like structure, and the first connection portion and the second connection portion are respectively connected with the bottom lighting module 6 by pins, bolts, or screws.

In this embodiment, preferably, as shown in fig. 6, 11 and 12, the Z-direction adjustment mechanism 4 includes three Z-direction adjustment assemblies 41, and any one of the Z-direction adjustment assemblies 41 includes a caster 411, a bottom mounting member 412, a stud 413, a contour bolt 414, a belleville spring 415, a lock nut 416, and an adapter member 417;

wherein the adapter member 417 is detachably connected to the bottom lighting module 6, for example, a detachable connection structure using bolts, so that the adapter member can be easily removed after use; the stud 413 is screwed onto the adapter member 417, and the lock nut 416 is screwed to the outside of the stud 413 for locking the stud 413 to the adapter member 417;

one end of the stud 413 is formed with a spherical protrusion, the bottom mounting member 412 is formed with a conical surface groove, and the spherical protrusion is disposed in the conical surface groove;

the contour bolt 414 is inverted and sequentially threaded through the bottom mounting member 412, the belleville spring 415, and the stud 413 to lock the stud 413 with the bottom mounting member 412; the outer surfaces of the stud 413 and the lock nut 416 are formed with a force application groove; casters 411 are connected to bottom mounting member 412.

As can be seen from the above described structure, the contoured stud 413 and the bottom mounting member 412 form a line contact that is rotatable about the Z-axis by a certain angle. The outer surfaces of the stud 413 and the lock nut 416 are provided with grooves, and the grooves can be buckled by a hook-shaped wrench to rotate, so that the height of the adapting member 417 in threaded connection with the hook-shaped wrench can be adjusted or locked.

Further, preferably, the number of the Z-direction adjusting assemblies 41 is three, and the three Z-direction adjusting assemblies 41 are uniformly distributed at the bottom of the bottom lighting module 6, so that the heights of the adapting members 417 from the ground are different, the adjustment of the bottom lighting module 6 in the directions Z, rx and Ry is realized, and the matching of the spherical protrusions of the studs 413 and the conical surface grooves of the bottom mounting member 412 can automatically adapt to the adjustment process. The Z-direction adjusting assembly 41 is provided with the caster 411 capable of freely rolling, and can easily move in or out of the bottom lighting module 6, so that convenience is provided for adjustment, maintenance and repair of the bottom lighting module 6, space utilization is improved, the problem of interference with installation of other modules in the whole equipment is avoided, the Z-direction adjusting assembly 41 is required to be removed after the installation and adjustment of the bottom lighting module 6 are completed, the ground feet 42 are correspondingly arranged, the ground feet 42 are installed at the bottom of the bottom lighting module 6 through threaded connection, the bottom lighting module 6 can be adjusted to be high or low, and a plurality of ground feet 42, such as three ground feet 42, act in a coordinated manner to replace the Z-direction adjusting assembly 41 to support the bottom lighting module 6.

Further, it is preferable that the bottom mounting member 412 has a square plate structure.

Further, it is preferable that the adapter member 417 has a zigzag shape.

In this embodiment, preferably, as shown in fig. 6 to 10, the Z-direction adjustment mechanism 4 further includes a first marking assembly 43 and a second marking assembly 44, the first marking assembly 43 and the second marking assembly 44 being provided on the mounting block 11 of the support member 1;

The first marking assembly 43 includes an upper marking member 431, a second idler wheel 432, a planar engagement member 433, a lower marking member 434, and a second adjustment bolt 435;

wherein the upper marking member 431 is arranged at the bottom lighting module 6; the second idler 432 is rotatably disposed on the upper marking member 431; the lower marking member 434 is provided to the support member 1; the plane fitting member 433 is disposed above the lower marking member 434 in the height direction of the support member 1, and an upper surface of the plane fitting member 433 in the height direction of the support member 1 is a plane; wherein the second idler 432 on the right is capable of abutting against the upper surface of the planar engagement member 433;

the plane fitting member 433 and the supporting member 1 have a plurality of connection positions along the Z direction, for example, the plane fitting member 433 is formed with a kidney-shaped hole, which is mainly provided for adapting to the bolt locking after the height adjustment, that is, after the height adjustment of the plane fitting member 433 is completed, the connection between the plane fitting member 433 and the supporting member 1 is achieved by the bolt penetrating through the kidney-shaped hole, that is, after the height adjustment of the plane fitting member 433 is completed, the locking of the plane fitting member 433 after the adjustment is completed can be achieved by using the structure;

the second adjusting bolt 435 is screwed on the lower marking member 434, and the end part of the second adjusting bolt passes through the lower marking member 434 and is propped against the bottom of the plane matching member 433;

The second marking assembly 44 includes an upper marking member 431, a second idle gear 432, a V-shaped surface engaging member 441, a lower marking member 434, and a second adjusting bolt 435, the V-shaped surface engaging member 441 having a V-shape on an upper surface thereof in the height direction of the support member 1, for example, a V-shape at a center position of the upper surface; wherein the second idler 432 on the left is capable of abutting against the upper surface of the V-face engaging member 441;

the V-shaped surface engaging member 441 and the support member 1 have a plurality of connection positions along the Z direction, for example, the V-shaped surface engaging member 441 is formed with a kidney-shaped hole, connection of the V-shaped surface engaging member 441 and the support member 1 is achieved by a bolt penetrating through the kidney-shaped hole, and with this structure, locking after adjustment of the V-shaped surface engaging member 441 is achieved.

As is apparent from the above-described structure, the adjustment of the heights of the corresponding planar engagement member 433 and V-shaped surface engagement member 441 with respect to the ground is achieved by adjusting the heights of the two adjustment bolts 435.

In addition, kidney-shaped holes formed in the flat fitting member 433 and the V-shaped surface fitting member 441 are provided to accommodate the locking of the bolts after adjustment.

In addition, the 4 corners of any lower marking member 434 are provided with kidney-shaped holes for installing bolts, and a kidney-shaped hole is provided between two kidney-shaped holes on the same side for installing pins, which plays a role in guiding in the X-direction and restricting in the Z-direction, and the above-mentioned 6 holes are provided with kidney-shaped holes for adapting to the adjustment of the bottom lighting module in the X-direction.

As will be appreciated in light of the above detailed description, the first marking assembly 43 and the second marking assembly 44 are mainly used to determine the height of the Z-direction adjustment assembly 41 when the bottom lighting module 6 is repositioned after maintenance is removed, so as to ensure the repeated positioning accuracy of the bottom lighting module 6 in the Z, rx, ry directions.

Specifically, the heights of the corresponding planar fitting member 433 and V-shaped surface fitting member 441 are adjusted by using the two second adjusting bolts 435, so that the second idle gears 432 in the two upper marking members 431 mounted on the bottom lighting module 6 are stably seated on the corresponding planar fitting member 433 and V-shaped surface fitting member 441, thereby realizing repositioning of the bottom lighting module 6 after maintenance and repair, and ensuring repeatability accuracy.

In summary, the workflow of installing and adjusting the bottom lighting module 6 with the background lighting module adjusting device is as follows:

(101) Except for the locking assembly 213 and the second X-direction adjusting assembly 22 in the first X-direction adjusting assembly 21, other adjusting and positioning assemblies are mounted on the supporting member 1 and the bottom lighting module 6;

(102) The Z-direction adjusting component 41 is adjusted to be high, so that the three feet 42 leave the ground, only the casters 411 in the Z-direction adjusting component 41 fall on the ground, and the lower surface of the second idler wheel 432 in the second marking component 44 is required to be adjusted to be high, and the lower surface of the second idler wheel 432 is higher than the upper surface of the V-shaped surface matching component 441;

(103) Pushing the bottom lighting module 6 in the X-direction to contact the shock absorbing assembly 212, and then decelerating the X-direction connecting member 23 moving to the right side of the bottom lighting module 6 to contact the first idler pulley 2114 of the first X-direction adjusting assembly 21 for X-direction rough positioning;

(104) Pushing the bottom lighting module 6 along the negative direction of Y until the grinding gaskets 313 are contacted with the Y-direction jacking member 315, and changing the thickness of the left grinding gasket 313 and the right grinding gasket 313 through machining to realize fine adjustment of the bottom lighting module 6 in the Y direction and the Rz direction, and screwing the second locking bolt 314, but taking care of incomplete locking, so that the bottom lighting module 6 adjusts the X direction and the Z direction, as shown in fig. 7-10;

(105) Installing an X-direction positioning component 211 and a compressing component 221 in the second X-direction adjusting component 22, adjusting a first adjusting bolt 2113 in the X-direction positioning component 211 on the left side and the right side, finely adjusting the X-direction, and then adjusting the compressing component 221 to ensure that the X-direction position is unchanged;

(106) The heights of the three Z-direction adjusting mechanisms 41 are adjusted, so that the bottom lighting module 6 is finely adjusted in Z, rx and Ry directions, then the heights of the plane matching component 433 in the first marking component 43 and the V-shaped surface matching component 441 in the second marking component 44 are adjusted, so that the second idler wheels 432 mounted on the two upper marking blocks are stably located on the corresponding plane matching component 433 and the V-shaped surface matching component 441, and the bottom lighting module 6 is repositioned after maintenance and repair, and the repeatability precision is ensured;

(107) Tightening the second lock bolt 314 of the Y-direction adjustment assembly 31, locking the Y and Rz directions;

(108) Mounting locking assemblies 213 at the left and right sides of the support member 1, tightening the corresponding first locking bolts 2132, locking X, rx and Ry;

(109) The three feet 42 are lowered to replace the three Z-direction adjusting assemblies 41, so that the bottom lighting module 6 is stably landed, and the three Z-direction adjusting assemblies 41 are removed.

When the bottom lighting module 6 needs cleaning, maintenance and repair, the bottom lighting module 6 needs to be removed, and the specific working procedure is as follows:

(201) Removing the locking assembly 213 and the second X-direction adjustment assembly 22 of the first X-direction adjustment assembly 21;

(202) Releasing second lock bolt 314 in Y-direction adjustment assembly 31;

(203) Three Z-direction adjusting assemblies 41 are installed on the bottom lighting module 6, then the Z-direction adjusting assemblies 41 are adjusted, the casters 411 are landed, the three feet 42 leave the ground, and the lower surfaces of the second idler wheels 432 in the Z-direction adjusting assemblies 41 to the second marking assemblies 44 are adjusted to be higher than the upper surfaces of the V-shaped surface matching members 441;

(204) The bottom lighting module 6 is removed along the X-direction.

When the bottom lighting module 6 needs to be reset, the bottom lighting module 6 needs to be moved in, and the specific workflow is as follows:

(205) Pushing the bottom lighting module 6 in the X-direction to contact the shock absorbing assembly 212 and then decelerating the X-direction connecting member 23 moving to the right side of the bottom lighting module 6 to contact the first idler 2114 of the first X-direction adjustment assembly 21;

(206) Pushing the bottom lighting module 6 in the negative Y direction until the coping shim 313 contacts the Y-direction propping member 315, tightening the second locking bolt 314, but taking care of incomplete locking;

(207) Installing an X-direction positioning component 211 and a compressing component 221 in the second X-direction adjusting component 22, adjusting a first adjusting bolt 2113 in the X-direction positioning component 211 on the left side and the right side, finely adjusting the X-direction, and then adjusting the compressing component 221 to ensure that the X-direction position is unchanged;

(208) The heights of the three Z-direction adjusting mechanisms 41 are adjusted so that the second idler gears 432 mounted on the two upper marking blocks are stably seated on the corresponding planar fitting members 433 and V-shaped surface fitting members 441;

(209) Tightening the second lock bolt 314 of the Y-direction adjustment assembly 31, locking the Y and Rz directions;

(210) Mounting locking assemblies 213 at the left and right sides of the support member 1, tightening the corresponding first locking bolts 2132, locking X, rx and Ry;

(211) The three feet 42 are lowered to replace the three Z-direction adjusting components 41, so that the bottom lighting module 6 stably lands, and the three Z-direction adjusting components 41 are removed.

It can be seen that the bottom lighting module adjusting device provided by the application is installed between the bottom lighting module 6 and the base frame 5 by using the supporting member 1, compensates the distance between the base frame 5 and the bottom lighting module 6, adjusts the movement of the bottom lighting module 6 in the X, Y, Z direction and the rotation around the X axis, the Y axis and the Z axis, namely, adjusts the directions of Rx, ry and Rz, and provides higher resetting precision for cleaning and maintenance of the bottom lighting module 6. In addition, the background illumination module adjusting device is composed of simple parts, the parts are convenient and quick to install and replace, and the bottom illumination module 6 can be easily moved in and out by using the casters 411, so that time and labor are saved.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A bottom lighting module adjustment device for use in semiconductor manufacturing and mounted between a base frame and a bottom lighting module, the bottom lighting module adjustment device comprising: a support member, an X-direction adjusting mechanism, a Y-direction adjusting mechanism and a Z-direction adjusting mechanism;

2. The bottom lighting module adjustment device of claim 1, wherein the X-direction positioning assembly comprises an X-direction auxiliary mounting member, an X-direction positioning member, a first adjustment bolt, and a first idler; wherein the X-direction auxiliary mounting member is connected with one side portion of the supporting member; the X-direction positioning member is positioned on one side of the X-direction auxiliary installation member, which is far away from the supporting member, and the X-direction positioning member is connected with the X-direction auxiliary installation member through a connecting bolt;

3. The bottom lighting module adjusting apparatus according to claim 1, wherein the damper assembly includes a damper mounting member connected to one side of the support member, and a damper penetrating the damper mounting member;

4. The bottom lighting module adjustment device of claim 1, wherein the locking assembly comprises a locking mounting member and a first locking bolt, the locking mounting member being connected to one side of the support member, and the locking mounting member and the support member having a plurality of connection positions along the Y-direction;

5. The bottom lighting module adjustment device of claim 2, wherein the second X-direction adjustment assembly comprises the X-direction positioning assembly, the locking assembly, and a compression assembly disposed in sequence along a height direction of the support member, and the compression assembly of the second X-direction adjustment assembly comprises a compression shaft, a washer, a spring, a nut, and a spring positioning member;

6. The bottom lighting module adjustment device of claim 1, wherein the Y-direction adjustment mechanism comprises two Y-direction adjustment assemblies, and wherein the two Y-direction adjustment assemblies are disposed on opposite sides of the mounting surface of the bottom lighting module;

7. The bottom lighting module adjustment device of claim 6, wherein the Y-direction adjustment assembly comprises a Y-direction connection member, an adjustment shim, a coping shim, and a second locking bolt; wherein the Y-direction connecting member is disposed at one side of the mounting surface of the bottom lighting module;

grooves are formed in two opposite side parts of the Y-direction connecting member, the two grooves are communicated through a through hole, the adjusting gasket is arranged in the groove close to one side of the bottom lighting module, and the grinding gasket is arranged in the groove close to one side of the supporting member;

8. The bottom lighting module adjustment device of claim 1, wherein the Z-direction adjustment mechanism comprises at least three Z-direction adjustment assemblies, any of which comprises casters, a bottom mounting member, a stud, a contour bolt, a belleville spring, a lock nut, and an adapter member;

9. The bottom lighting module adjustment device of claim 8, wherein the Z-direction adjustment mechanism further comprises a first marker assembly and a second marker assembly disposed on opposite sides of the mounting surface of the support member; the first marking assembly comprises an upper marking member, a second idler wheel, a plane matching member, a lower marking member and a second adjusting bolt;