CN105097572B - A kind of multi-functional thermal station mechanism of modularized design - Google Patents
A kind of multi-functional thermal station mechanism of modularized design Download PDFInfo
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- CN105097572B CN105097572B CN201510405034.3A CN201510405034A CN105097572B CN 105097572 B CN105097572 B CN 105097572B CN 201510405034 A CN201510405034 A CN 201510405034A CN 105097572 B CN105097572 B CN 105097572B
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Abstract
The present invention relates to a kind of multi-functional thermal station mechanism of modularized design, including motion base station (1) and the tool (4) being arranged on motion base station (1), the workpiece matched with it is placed on tool (4), moving base station (1) includes fixed bottom plate (11), it is arranged on fixed bottom plate (11) and makees θ axle slide units (12) of the θ to rotary motion around z-axis, and the first carrying platform (13) on θ axles slide unit (12) is successively set on from top to bottom, the second carrying platform (15) moved along y-axis and the 3rd carrying platform (18) moved along x-axis；During work, θ axles slide unit (12), the second carrying platform (15) and the 3rd carrying platform (18) are adjusted respectively, tool (4) is moved on specified station, the workpiece on tool is processed.Compared with prior art, the present invention has a tractor serves several purposes, machining accuracy height, the low advantage of manufacturing cost.
Description
Technical field
The present invention relates to the high-end sealed in unit field of semiconductor, more particularly, to a kind of multi-functional thermal station of modularized design
Mechanism.
Background technology
Modular design concept is derived from the 1960s, in the scientific and technical overall background developed rapidly over nearly 30 years
Under, theory of modular design obtains constantly improve.With the high speed development of national economy, plant equipment is being just in basic manufacturing industry
To small lot, multi-functional and high-precision trend development.This variation tendency causes traditional design method and design concept discomfort
The demand for answering modern enterprise quick to product, efficient and economic.Modularized design is cost-effective, improves efficiency and shorten production
The effective ways in cycle, the application of this design method will be more and more.Flight as disclosed in patent 201310662161.2
Device, smart mobile phone and tablet personal computer disclosed in patent 201410077905.9, the sand processed disclosed in patent 201410070678
Equipment.Equipment disclosed in these patents has used modular design concept or part to use modular design concept, but
All do not make the statement of complete display to modularized design, the core of modularized design is not stated from global angle：Work(
Can the abstract separation with implementing.Thus, use for reference reference value less.
Above patent has following inevitable shortcoming：
(1) not from profound level, the function to equipment is subject to abstract overview, makes function modeling with implementing phase point
From；
(2) general process and thinking of modularized design are stated without complete display, reference value is less；
(3) the connection element question in modularized design is not accounted for, narrowly the variant machine of a certain mechanism of equipment
Structure replaces the whole that mechanism is considered modularized design.
The content of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of modularized design
Multi-functional thermal station mechanism.
The purpose of the present invention can be achieved through the following technical solutions：
A kind of multi-functional thermal station mechanism of modularized design, the thermal station mechanism includes motion base station and is arranged on motion base station
On tool, the workpiece matched with it is placed on described tool, described motion base station includes fixed bottom plate, is arranged on and consolidates
Determine to make θ axle slide units of the θ to rotary motion on bottom plate and around z-axis, and first be successively set on from top to bottom on θ axle slide units is taken
Carrying platform, the second carrying platform moved along y-axis and the 3rd carrying platform moved along x-axis；
During work, θ axles slide unit, the second carrying platform and the 3rd carrying platform are adjusted respectively, tool is moved to specified work
On position, the workpiece on tool is processed.
Described thermal station mechanism also includes the depth of parallelism and adjusts component and heating component, and described heating component and the depth of parallelism are adjusted
Whole group part is arranged on motion base station from top to bottom, and tool is set in described heating component.
Described depth of parallelism adjustment component includes the first U-shaped bearing, the second U-shaped bearing and the first cooling platform, described
Open Side Down is arranged in the first U-shaped bearing for second U-shaped bearing, and moving block is provided with the second U-shaped bearing, and the moving block passes through edge
X-axis to the second rotary shaft through the two side of the second U-shaped bearing of connection, the top of moving block and the second U-shaped bearing should have one
Set a distance, to ensure that the second U-shaped bearing can be rotated along x-axis, described moving block also by along y-axis to the first rotary shaft run through
The two side of the first U-shaped bearing is connected, moving block and the second U-shaped bearing also should be at regular intervals with the first U-shaped rest base, with
Ensure moving block can along y-axis rotation, the first described cooling platform is arranged on the second U-shaped bearing, the second described U-shaped branch
Multiple the 3rd micrometer knobs being connected with the first U-shaped bearing are additionally provided with seat；
Described heating component includes the second cooling platform and the 4th carrying platform set gradually from top to bottom, described
Second cooling platform is arranged on the first cooling platform, and the 4th described carrying platform is provided with thermocouple；
During work, θ axles slide unit, the second carrying platform and the 3rd carrying platform are adjusted respectively, tool is moved to specified work
On position, the 3rd micrometer knob is adjusted, the second U-shaped bearing is rotated rotating around the second rotary shaft and the first rotary shaft, so as to adjust
The depth of parallelism of tool is saved, thermocouple is opened by workpiece heat on tool to processing temperature, then starts to be processed workpiece.
At least one spacing slotted eye, the stopper slot are equipped with the first described U-shaped bearing and the side wall of the second U-shaped bearing
Hole is provided with the spacer pin being fixed on moving block, and the second U-shaped bearing can be limited along x-axis and y by spacing slotted eye and spacer pin
The free degree that axle is rotated, meanwhile, moving block can be allowed to have certain adjustment space along the z-axis direction；
The second described U-shaped bearing is provided with multiple 3rd L-shaped contiguous blocks, and the 3rd described micrometer knob is arranged on the
On three L-shaped contiguous blocks, and it is connected with the first U-shaped bearing；
The first described cooling platform leads to provided with a plurality of first radiating groove, and for the radiating of radiating cold air turnover
Road；
The second described cooling platform lower surface is provided with a plurality of second radiating groove, the second radiating groove and the first radiating
Texturearunaperpendicular is set, and the first temperature sensor is additionally provided with the second cooling platform, first temperature sensor connection warning device,
The temperature of the second cooling platform can be detected, if temperature is too high, equipment alarm then stops heating immediately, to prevent radiating too late
When or radiate it is unfavorable damage other mechanisms；
The 4th described carrying platform is provided with the second temperature sensor of Real-time Feedback heating-up temperature, the 4th carrying platform
Surrounding be additionally provided with thermal insulation board, can prevent heat diffusion and scatter and disappear, to ensure the heating to tool.
The vacuum port of connection vacuum plant is provided with the second described cooling platform, the 4th described carrying platform is provided with
With the vacuum suction groove of vacuum port insertion, described tool is provided with the vacuum absorption holes corresponding with vacuum suction groove, work
When, vacuum plant is opened, absorption vacuum is formed so that the adsorbed positioning of workpiece on tool.
Described vacuum port is made up of the first vacuum port, the second vacuum port and the 3rd vacuum port；Described vacuum suction groove
By be connected respectively with the first vacuum port, the second vacuum port and the 3rd vacuum port insertion the first vacuum suction groove, the second vacuum inhale
Attached groove and the 3rd vacuum suction groove composition；Described vacuum absorption holes by respectively with the first vacuum suction groove, the second vacuum suction
The first vacuum absorption holes, the second vacuum absorption holes and the 3rd vacuum absorption holes that groove and the 3rd vacuum suction groove are correspondingly arranged.
The first described carrying platform is described provided with the first guide rail along the x-axis direction, and the first micrometer knob
Second carrying platform is arranged on the first guide rail and is connected with the first micrometer knob；
The second described carrying platform is described provided with the second guide rail along the y-axis direction, and the second micrometer knob
3rd carrying platform is arranged on the second guide rail and is connected with the second micrometer knob；
During work, the first micrometer knob is adjusted, the second carrying platform is made x-axis to moving along the first guide rail, regulation the
Two micrometer knobs, make the 3rd carrying platform make y-axis to moving along the second guide rail.
The first described carrying platform is provided with the first L-shaped contiguous block, the first described micrometer knob be arranged on this
On one L-shaped contiguous block, and it is connected with the second carrying platform；
The second described carrying platform is provided with the second L-shaped contiguous block, the second described micrometer knob be arranged on this
On two L-shaped contiguous blocks, and it is connected with the 3rd carrying platform.
The first groups of springs is provided with along the first guide rail direction between the first described carrying platform and the second carrying platform, it is described
The second carrying platform and the 3rd carrying platform between along the second guide rail direction be provided with second spring group, when motion base station move to
Behind the operating position specified, the first micrometer knob of locking and the second micrometer knob, the second carrying platform and the 3rd carry flat
Platform realizes self-locking under the tension force effect of the first groups of springs and second spring group respectively.
The multi-functional thermal station mechanism of the present invention uses theory of modular design, the detachable restructural of mechanism, so as to constitute not
With combination to realize different functions.For example, motion base station and tool combination, can be achieved the work that need to be only moved in xy θ directions
It is required；Base station, depth of parallelism adjustment component and tool combination are moved, then is moved suitable for xy θ directions and needs to adjust the depth of parallelism
Processing operation；The combination for moving base station, heating component and tool is applied to the processing operation that xy θ directions are moved, needs are heated；
Motion base station, depth of parallelism adjustment component, the combination of heating component and tool are applied to the motion of xy θ directions, have depth of parallelism adjustment will
The processing operation of summation heating requirements.
Compared with prior art, the present invention has advantages below：
(1) thermal station mechanism of the invention adjusts component, heating component and the part of module of tool four by motion base station, the depth of parallelism
Composition, realizes function modeling with specifically separating, separate between each module, and interactivity and interchangeability are strong, are easy to standard
Change management；
(2) thermal station mechanism of the invention is detachable recombinates, and the combination of disparate modules can realize different functions, so that full
The different job requirement of foot, realizes a tractor serves several purposes, substantially reduces manufacturing cost；
(3) motion base station of the invention can realize xy θ three-degree-of-freedom motions simultaneously, and depth of parallelism adjustment component can adjust thermal station
The depth of parallelism of mechanism working face, so as to be accurately controlled the condition of work of processing so that the machining accuracy of workpiece is significantly
Improve.
Brief description of the drawings
Fig. 1 is divided and design 3D illustratons of model for the thermal station mechanism module of the present invention；
Fig. 2 is the normal axomometric drawing for moving base station of the invention；
Fig. 3 is the main structure diagram for moving base station of the invention；
Fig. 4 waits shaft side figure for the depth of parallelism adjustment component of the present invention；
Fig. 5 adjusts the main structure diagram of component for the depth of parallelism of the present invention；
Fig. 6 waits shaft side figure for the heating component of the present invention；
Fig. 7 is the main structure diagram of the heating component of the present invention；
Fig. 8 is the main structure diagram of the tool of the present invention；
In figure, 1- motion base stations, 11- fixes bottom plate, 12- θ axle slide units, the carrying platforms of 13- first, the micrometers of 141- first
Knob, 142- the second micrometer knobs, the carrying platforms of 15- second, the guide rails of 161- first, the guide rails of 162- second, the L-shaped of 171- first
Contiguous block, 172- the second L-shaped contiguous blocks, the carrying platforms of 18- the 3rd, the groups of springs of 191- first, 192- second spring groups, 2- is parallel
Degree adjustment component, the U-shaped bearings of 21- first, 22- moving blocks, the rotary shafts of 23- first, the rotary shafts of 24- second, the U-shaped branch of 25- second
Seat, the L-shaped contiguous blocks of 26- the 3rd, the micrometer knobs of 27- the 3rd, the cooling platforms of 28- first, 29- spacer pins, the spacing slotted eyes of 211-,
The first U-type grooves of 212- hole, the second U-type grooves of 251- hole, the radiating grooves of 281- first, 282- air admission holes, 283- ventholes, 3- heating
Component, the cooling platforms of 31- second, the temperature sensors of 32- first, the carrying platforms of 33- the 4th, 34- thermocouples, 35- second temperatures
Sensor, 36- thermal insulation boards, the radiating grooves of 311- second, the vacuum ports of 331- first, 332- the first vacuum suction grooves, 333- second
Vacuum port, 334- the second vacuum suction grooves, the vacuum ports of 335- the 3rd, the vacuum suction grooves of 336- the 3rd, 4- tools, 41- first is true
Empty adsorption hole, the vacuum absorption holes of 42- second, the vacuum absorption holes of 43- the 3rd.
Embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present embodiment is with technical solution of the present invention
Premised on implemented, give detailed embodiment and specific operating process, but protection scope of the present invention is not limited to
Following embodiments.
Embodiment 1
A kind of multi-functional thermal station mechanism of modularized design, its structure as shown in figure 1, the thermal station mechanism from top to bottom successively
Set：
Base station 1 is moved, its structure is as shown in Figures 2 and 3：Including fixed bottom plate 11, it is arranged on fixed bottom plate 11 and around z
Axle makees θ axle slide units 12 of the θ to rotary motion, and be successively set on from top to bottom on θ axles slide unit 12 the first carrying platform 13,
The second carrying platform 15 moved along y-axis and the 3rd carrying platform 18 moved along x-axis, the first carrying platform 13 are provided with along x
First guide rail 161 of direction of principal axis, and the first L-shaped contiguous block 171, the first micrometer knob 141 are arranged on first L-shaped connection
On block 171, the second carrying platform 15 is arranged on the first guide rail 161 and is connected with the first micrometer knob 141, and second carries
Platform 15 is set provided with the second guide rail 162 along the y-axis direction, and the second L-shaped contiguous block 172, the second micrometer knob 142
On the second L-shaped contiguous block 172, the 3rd carrying platform 18 be arranged on the second guide rail 162 and with the second micrometer knob 142
It is connected, the first groups of springs 191 is provided with along the direction of the first guide rail 161 between the first carrying platform 13 and the second carrying platform 15,
Between second carrying platform 15 and the 3rd carrying platform 18 second spring group 192 is provided with along the direction of the second guide rail 162；
The depth of parallelism adjusts component 2, and its structure is as shown in Figure 4 and Figure 5：Including the first U-shaped bearing 21, the second U-shaped bearing 25
With the first cooling platform 28, the first U-shaped bearing 21 is arranged on the 3rd carrying platform 18, and Open Side Down sets for the second U-shaped bearing 25
Put in the first U-shaped bearing 21, be provided with moving block 22 in the second U-shaped bearing 25, the moving block 22 by along x-axis to second turn
Moving axis 24 is through the two side of the second U-shaped bearing 25 of connection, and the top of the U-shaped bearing 25 of moving block 22 and second should have a spacing
From, to ensure that the second U-shaped bearing 25 can be rotated along x-axis, moving block 22 also by along y-axis to the first rotary shaft 23 through connection
The two side of first U-shaped bearing 21, between the U-shaped bottom of bearing 21 of the U-shaped bearing 25 and first of moving block 22 and second should also have necessarily
Away from, with ensure moving block 22 can along y-axis rotation, the first cooling platform 28 is arranged on the second U-shaped bearing 25, the second U-shaped branch
25 4 ends of seat are equipped with the 3rd L-shaped contiguous block 26, and the 3rd L-shaped contiguous block 26 is provided with what is be connected with the first U-shaped bearing 21
Two spacing slotted eyes 211 are equipped with 3rd micrometer knob 27, the side wall of the first U-shaped bearing 25 of U-shaped bearing 21 and second, should
Spacing slotted eye 211, which is provided with, is fixed on spacer pin 29 on moving block 22, and the can be limited by spacing slotted eye 211 and spacer pin 29
The free degree that two U-shaped bearings 25 are rotated along x-axis and y-axis, meanwhile, moving block 22 can be allowed to have certain adjustment space along the z-axis direction,
First cooling platform 28 is arranged on the second U-shaped bearing 25, and the first cooling platform 28 is provided with six group of first radiating groove 281,
And for the heat dissipation channel of radiating cold air turnover, radiating cold air enters from air admission hole 282, then is discharged from venthole 283, from
And help the first cooling platform 28 to radiate；
Tool 4, its structure is as shown in Figure 8：Tool 4 is arranged in heating component 3, and tool 4 is provided with matched work
Part；
Heating component 3, its structure is as shown in Figure 6 and Figure 7：Including the He of the second cooling platform 31 set gradually from top to bottom
4th carrying platform 33, the second cooling platform 31 is arranged on the first cooling platform 28, and the 4th carrying platform 33 is provided with thermoelectricity
Even 34, the lower surface of the second cooling platform 31 radiates provided with six group of second radiating groove 311, the second radiating groove 311 and first
Groove 281 is vertically arranged, and the first temperature sensor 32 is additionally provided with the second cooling platform 31, and first temperature sensor 32 is connected
Warning device, can detect the temperature of the second cooling platform 31, if temperature is too high, equipment alarm, then stops heating immediately, to prevent
Only radiate not in time or radiate unfavorable other mechanisms of damage, the 4th carrying platform 33 provided with Real-time Feedback heating-up temperature the
Two temperature sensors 35, the surrounding of the 4th carrying platform 33 is additionally provided with thermal insulation board 36, can prevent heat diffusion and scatter and disappear, to ensure
Heating to tool 4,
The first vacuum port 331, the second vacuum port 333 and the 3rd that connection vacuum plant is provided with second cooling platform 31 are true
Eat dishes without rice or wine 335, the 4th carrying platform 33 provided with respectively with the first vacuum port 331, the second vacuum port 333 and the 3rd vacuum port 335
The first vacuum suction groove 332, the second vacuum suction groove 334 and the 3rd vacuum suction groove 336 of insertion connection, tool 4 are provided with
First be correspondingly arranged respectively with the first vacuum suction groove 332, the second vacuum suction groove 334 and the 3rd vacuum suction groove 336 is true
Empty adsorption hole 41, the second vacuum absorption holes 42 and the 3rd vacuum absorption holes 43, during work, open vacuum plant, form absorption true
It is empty so that the adsorbed positioning of workpiece on tool 4；
During work, workpiece is placed on tool 4, regulation θ axles slide unit 12, the first micrometer knob 141 and the rotation of the second micrometer
Button 142, driving thermal station mechanism rotates along z-axis, moves and move along the x-axis direction along the y-axis direction respectively, so that workpiece be moved to
Operating position, then adjusts the 3rd micrometer knob 27, the second U-shaped bearing 25 of driving is rotating around the second rotary shaft 24 and first turn
Moving axis 23 is rotated, so as to adjust the depth of parallelism of workpiece, thermocouple 34 is opened, by workpiece heat to operating temperature, then again to work
Part is processed.
Embodiment 2
A kind of multi-functional thermal station mechanism of modularized design, the thermal station mechanism is set gradually from top to bottom：
Base station 1 is moved, its structure is as shown in Figures 2 and 3：Including fixed bottom plate 11, it is arranged on fixed bottom plate 11 and around z
Axle makees θ axle slide units 12 of the θ to rotary motion, and be successively set on from top to bottom on θ axles slide unit 12 the first carrying platform 13,
The second carrying platform 15 moved along y-axis and the 3rd carrying platform 18 moved along x-axis, the first carrying platform 13 are provided with along x
First guide rail 161 of direction of principal axis, and the first L-shaped contiguous block 171, the first micrometer knob 141 are arranged on first L-shaped connection
On block 171, the second carrying platform 15 is arranged on the first guide rail 161 and is connected with the first micrometer knob 141, and second carries
Platform 15 is set provided with the second guide rail 162 along the y-axis direction, and the second L-shaped contiguous block 172, the second micrometer knob 142
On the second L-shaped contiguous block 172, the 3rd carrying platform 18 be arranged on the second guide rail 162 and with the second micrometer knob 142
It is connected, the first groups of springs 191 is provided with along the direction of the first guide rail 161 between the first carrying platform 13 and the second carrying platform 15,
Between second carrying platform 15 and the 3rd carrying platform 18 second spring group 192 is provided with along the direction of the second guide rail 162；
Tool 4, its structure is as shown in Figure 8：Tool 4 is arranged on the 3rd carrying platform 18, and tool 4 is provided with matched
Workpiece；
During work, workpiece is placed on tool 4, regulation θ axles slide unit 12, the first micrometer knob 141 and the rotation of the second micrometer
Button 142, driving thermal station mechanism rotates along z-axis, moves and move along the x-axis direction along the y-axis direction respectively, so that workpiece be moved to
Operating position, is then processed to workpiece.
Embodiment 3
A kind of multi-functional thermal station mechanism of modularized design, the thermal station mechanism is set gradually from top to bottom：
Base station 1 is moved, its structure is as shown in Figures 2 and 3：Including fixed bottom plate 11, it is arranged on fixed bottom plate 11 and around z
Axle makees θ axle slide units 12 of the θ to rotary motion, and be successively set on from top to bottom on θ axles slide unit 12 the first carrying platform 13,
The second carrying platform 15 moved along y-axis and the 3rd carrying platform 18 moved along x-axis, the first carrying platform 13 are provided with along x
First guide rail 161 of direction of principal axis, and the first L-shaped contiguous block 171, the first micrometer knob 141 are arranged on first L-shaped connection
On block 171, the second carrying platform 15 is arranged on the first guide rail 161 and is connected with the first micrometer knob 141, and second carries
Platform 15 is set provided with the second guide rail 162 along the y-axis direction, and the second L-shaped contiguous block 172, the second micrometer knob 142
On the second L-shaped contiguous block 172, the 3rd carrying platform 18 be arranged on the second guide rail 162 and with the second micrometer knob 142
It is connected, the first groups of springs 191 is provided with along the direction of the first guide rail 161 between the first carrying platform 13 and the second carrying platform 15,
Between second carrying platform 15 and the 3rd carrying platform 18 second spring group 192 is provided with along the direction of the second guide rail 162；
The depth of parallelism adjusts component 2, and its structure is as shown in Figure 4 and Figure 5：Including the first U-shaped bearing 21, the second U-shaped bearing 25
With the first cooling platform 28, the first U-shaped bearing 21 is arranged on the 3rd carrying platform 18, and Open Side Down sets for the second U-shaped bearing 25
Put in the first U-shaped bearing 21, be provided with moving block 22 in the second U-shaped bearing 25, the moving block 22 by along x-axis to second turn
Moving axis 24 is through the two side of the second U-shaped bearing 25 of connection, and the top of the U-shaped bearing 25 of moving block 22 and second should have a spacing
From, to ensure that the second U-shaped bearing 25 can be rotated along x-axis, moving block 22 also by along y-axis to the first rotary shaft 23 through connection
The two side of first U-shaped bearing 21, between the U-shaped bottom of bearing 21 of the U-shaped bearing 25 and first of moving block 22 and second should also have necessarily
Away from, with ensure moving block 22 can along y-axis rotation, the first cooling platform 28 is arranged on the second U-shaped bearing 25, the second U-shaped branch
25 4 ends of seat are equipped with the 3rd L-shaped contiguous block 26, and the 3rd L-shaped contiguous block 26 is provided with what is be connected with the first U-shaped bearing 21
Two spacing slotted eyes 211 are equipped with 3rd micrometer knob 27, the side wall of the first U-shaped bearing 25 of U-shaped bearing 21 and second, should
Spacing slotted eye 211, which is provided with, is fixed on spacer pin 29 on moving block 22, and the can be limited by spacing slotted eye 211 and spacer pin 29
The free degree that two U-shaped bearings 25 are rotated along x-axis and y-axis, meanwhile, moving block 22 can be allowed to have certain adjustment space along the z-axis direction,
First cooling platform 28 is arranged on the second U-shaped bearing 25；
Tool 4, its structure is as shown in Figure 8：Tool 4 is arranged on the first cooling platform 28, and tool 4 is provided with matched
Workpiece；
During work, workpiece is placed on tool 4, regulation θ axles slide unit 12, the first micrometer knob 141 and the rotation of the second micrometer
Button 142, driving thermal station mechanism rotates along z-axis, moves and move along the x-axis direction along the y-axis direction respectively, so that workpiece be moved to
Operating position, then adjusts the 3rd micrometer knob 27, the second U-shaped bearing 25 of driving is rotating around the second rotary shaft 24 and first turn
Moving axis 23 is rotated, so as to adjust to the depth of parallelism of work pieces process, then workpiece is processed.
Claims (9)
1. the multi-functional thermal station mechanism of a kind of modularized design, it is characterised in that the thermal station mechanism includes motion base station (1) and set
Put the workpiece placed and matched with it on the tool (4) on motion base station (1), described tool (4), described motion base station
(1) include fixed bottom plate (11), be arranged on fixed bottom plate (11) and make θ axle slide units (12) of the θ to rotary motion around z-axis, with
And the first carrying platform (13), the second carrying platform that is moved along x-axis being successively set on from top to bottom on θ axles slide unit (12)
(15) the 3rd carrying platform (18) and along y-axis moved；
During work, θ axles slide unit (12), the second carrying platform (15) and the 3rd carrying platform (18) are adjusted respectively, and tool (4) is moved
Move to specified station, the workpiece on tool is processed.
2. a kind of multi-functional thermal station mechanism of modularized design according to claim 1, it is characterised in that described thermal station
Mechanism also includes depth of parallelism adjustment component (2) and heating component (3), described heating component (3) and depth of parallelism adjustment component (2)
It is arranged on from top to bottom on motion base station (1), tool (4) is set in described heating component (3).
3. the multi-functional thermal station mechanism of a kind of modularized design according to claim 2, it is characterised in that described is parallel
Degree adjustment component (2) includes the first U-shaped bearing (21), the second U-shaped bearing (25) and the first cooling platform (28), described second
Open Side Down is arranged in the first U-shaped bearing (21) for U-shaped bearing (25), and moving block (22) is provided with the second U-shaped bearing (25), should
Moving block (22) by along x-axis to the second rotary shaft (24) through the two side of the second U-shaped bearing (25) of connection, it is described to turn
Motion block (22) also by along y-axis to the first rotary shaft (23) through the two side of the first U-shaped bearing (21) of connection, described the
One cooling platform (28) is arranged on the second U-shaped bearing (25), is additionally provided with the second described U-shaped bearing (25) multiple with first
The 3rd micrometer knob (27) that U-shaped bearing (21) is connected；
Described heating component (3) includes the second cooling platform (31) and the 4th carrying platform set gradually from top to bottom
(33), described the second cooling platform (31) is arranged on the first cooling platform (28), on the 4th described carrying platform (33)
Provided with thermocouple (34)；
During work, θ axles slide unit (12), the second carrying platform (15) and the 3rd carrying platform (18) are adjusted respectively, and tool (4) is moved
Move to specified station, adjust the 3rd micrometer knob (27), make the second U-shaped bearing (25) rotating around the second rotary shaft (24) and
First rotary shaft (23) is rotated, so that the depth of parallelism of regulating jig (4), opens thermocouple (34) by workpiece heat on tool (4)
To processing temperature, then start to be processed workpiece.
4. a kind of multi-functional thermal station mechanism of modularized design according to claim 3, it is characterised in that described first
At least one spacing slotted eye (211), the spacing slotted eye are equipped with the side wall of U-shaped bearing (21) and the second U-shaped bearing (25)
(211) provided with the spacer pin (29) being fixed on moving block (22)；
The second described U-shaped bearing (25) is provided with multiple 3rd L-shaped contiguous blocks (26), the 3rd described micrometer knob (27)
It is arranged on the 3rd L-shaped contiguous block (26), and is connected with the first U-shaped bearing (21)；
Described the first cooling platform (28) is provided with a plurality of first radiating groove (281), and supplies radiating cold air turnover
Heat dissipation channel；
Described the second cooling platform (31) lower surface is provided with a plurality of second radiating groove (311), the second radiating groove (311)
It is vertically arranged with the first radiating groove (281), the first temperature sensor (32) is additionally provided with the second cooling platform (31)；
The 4th described carrying platform (33) is provided with second temperature sensor (35), and the surrounding of the 4th carrying platform (33) is also set
There is thermal insulation board (36).
5. a kind of multi-functional thermal station mechanism of modularized design according to claim 3, it is characterised in that described second
The vacuum port of connection vacuum plant is provided with cooling platform (31), the 4th described carrying platform (33) is provided with to be passed through with vacuum port
Logical vacuum suction groove, described tool (4) is provided with the vacuum absorption holes corresponding with vacuum suction groove, during work, opens
Vacuum plant, forms absorption vacuum so that the adsorbed positioning of workpiece on tool (4).
6. a kind of multi-functional thermal station mechanism of modularized design according to claim 5, it is characterised in that described vacuum
Mouth is made up of the first vacuum port (331), the second vacuum port (333) and the 3rd vacuum port (335)；Described vacuum suction groove is by dividing
The first vacuum suction groove not being connected with the first vacuum port (331), the second vacuum port (333) and the 3rd vacuum port (335) insertion
(332), the second vacuum suction groove (334) and the 3rd vacuum suction groove (336) composition；Described vacuum absorption holes are by respectively with
The first vacuum that one vacuum suction groove (332), the second vacuum suction groove (334) and the 3rd vacuum suction groove (336) are correspondingly arranged
Adsorption hole (41), the second vacuum absorption holes (42) and the 3rd vacuum absorption holes (43) composition.
7. a kind of multi-functional thermal station mechanism of modularized design according to claim 1, it is characterised in that described first
Carrying platform (13) is provided with the first guide rail (161) along the x-axis direction, and the first micrometer knob (141), described second
Carrying platform (15) is arranged on the first guide rail (161) and is connected with the first micrometer knob (141)；
Described the second carrying platform (15) is provided with the second guide rail (162) along the y-axis direction, and the second micrometer knob
(142), the 3rd described carrying platform (18) is arranged on the second guide rail (162) and is connected with the second micrometer knob (142)
Connect；
During work, the first micrometer knob (141) is adjusted, the second carrying platform (15) is made x-axis to fortune along the first guide rail (161)
It is dynamic, the second micrometer knob (142) is adjusted, the 3rd carrying platform (18) is made y-axis to motion along the second guide rail (162).
8. a kind of multi-functional thermal station mechanism of modularized design according to claim 7, it is characterised in that described first
Carrying platform (13) is provided with the first L-shaped contiguous block (171), and the first described micrometer knob (141) is arranged on first L-shaped
On contiguous block (171), and it is connected with the second carrying platform (15)；
Described the second carrying platform (15) is provided with the second L-shaped contiguous block (172), the second described micrometer knob (142)
It is arranged on the second L-shaped contiguous block (172), and be connected with the 3rd carrying platform (18).
9. a kind of multi-functional thermal station mechanism of modularized design according to claim 7, it is characterised in that described first
The first groups of springs (191) is provided with along the first guide rail (161) direction between carrying platform (13) and the second carrying platform (15), it is described
The second carrying platform (15) and the 3rd carrying platform (18) between along the second guide rail (162) direction be provided with second spring group
(192)。
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| CN107791045A (en) * | 2017-11-17 | 2018-03-13 | 鹤山市信佳自动化机械设备有限公司 | A kind of horizontal displacement mould |
| CN107953056A (en) * | 2017-12-25 | 2018-04-24 | 苏州明氏自动化技术有限公司 | The welding fixture of conductive bar in sound-producing device |
| CN108196589A (en) * | 2017-12-26 | 2018-06-22 | 深圳市诺峰光电设备有限公司 | A kind of novel adjusting depth of parallelism mechanism arrangement |
| CN108436768B (en) * | 2018-05-17 | 2024-03-29 | 昆山市恒达精密机械工业有限公司 | Adjustable accurate positioning device |
| CN114562709B (en) * | 2022-03-14 | 2023-04-25 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Bottom lighting module adjusting device |
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| JP2005081476A (en) * | 2003-09-08 | 2005-03-31 | Okamoto Machine Tool Works Ltd | Processing device for optical waveguide mold and method of cutting arcuate groove on workpiece |
| CN202238797U (en) * | 2011-09-15 | 2012-05-30 | 漳州宝发光电科技有限公司 | Structure of overflowing glue cleaning device of touch control screen |
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