CN105092016B - A kind of MOEMS vector hydrophones - Google Patents
A kind of MOEMS vector hydrophones Download PDFInfo
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- CN105092016B CN105092016B CN201510411902.9A CN201510411902A CN105092016B CN 105092016 B CN105092016 B CN 105092016B CN 201510411902 A CN201510411902 A CN 201510411902A CN 105092016 B CN105092016 B CN 105092016B
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Abstract
A kind of MOEMS vector hydrophones, including：Optical fiber (1), optical fiber collimator (2), pedestal (3), silicon substrate framework (4), cantilever beam (5) and miniature circular cylinder (6)；Silicon substrate framework (4) center sets up cantilever beam (5), in pedestal (3)；Optical fiber collimator (2) is arranged in the mounting hole (32) of pedestal (3), and F P chambers (16) are formed between platform (51) corresponding with cantilever beam (5)；Miniature circular cylinder (6) is arranged on the platform (51) of cantilever beam (5) " ten " word infall, and optical fiber (1) one end is connected with optical fiber collimator (2), other end access external circuits demodulating equipment.The present invention is changed by F P chamber carry out sound machines light, MEMS technology and optical fiber sensing technology are combined using MOEMS technologies, meet miniaturization, low-power consumption, the requirement of electromagnetism interference, realize that hydrophone front end is passive, realize the high sensitivity to weak acoustic signal, high resolution detection.
Description
Technical field
The present invention relates to a kind of vector hydrophone in MOEMS sensory fields.
Background technology
Vector hydrophone as one kind can time synchronized, space concurrent measures the sensor of underwateracoustic field vector information,
Had a wide range of applications in ocean engineering and ocean development.Current vector hydrophone is more common with the same vibration shape, such as
Patent No. ZL200910072009.2 Chinese invention patent discloses a kind of " three-dimensional arrow based on piezoelectric velocity sensor
Measure hydrophone ", the hydrophone is sequentially connected by connecting rod by three piezoelectric velocity sensors and formed, by same with water particle
Shake pickup acoustic signals.Find that with vibration shape piezoelectric vector hydrophone be guarantee low-frequency sensitive in the application process of vector hydrophone
Degree, with the reduction of frequency, volume is increasing, and this brings very big inconvenience in terms of Cheng Zhen to hydrophone with low frequency applications,
And rigidity must be fixed on using resilient suspension element (such as rubber rope or metal spring) with vibration shape piezoelectric vector hydrophone
On frame, the mechanical property for hanging original paper directly affects the electroacoustic performance of hydrophone.Vector water based on micro-nano electronic technology development
Listen device just gradually to miniaturization, integrated development, using MEMS (MEMS) technology development single vector hydrophone
Target positioning can be carried out, such as one kind disclosed in Patent No. ZL200610012991.0 Chinese invention patent " satisfy by resonance
Wear bionic vector underwaster sensor ", realize the vector detection to underwater sound signal.But no matter listened with vibration shape piezoelectricity vector water
Device, or the single vector hydrophone using MEMS technology development, are active device, need to power during use, are easily done by electromagnetism
Disturb, particularly electric signal is decayed seriously in remote Long line transmission, and electromagnetic noise causes water to the serious interference of signal
Listen device signal to noise ratio low, the defects of poor anti-interference.
The content of the invention
The technical problem to be solved in the present invention is：Overcome the shortcomings of existing MEMS vector hydrophone technology, there is provided a kind of
MOEMS vector hydrophones, the hydrophone uses F-P (Fabry-Perot) principle of interference, by high reflectivity film and optical fiber
The mode carry out sound-machine-light conversion of F-P cavity is formed between collimater, using MOEMS technologies by MEMS technology and optical fiber sensing technology
It is combined, meets miniaturization, low-power consumption, the requirement of electromagnetism interference, realize that hydrophone front end is passive, realize to weak acoustic signal
High sensitivity, high resolution detection.
The technical solution adopted in the present invention is：A kind of MOEMS vector hydrophones, including：Optical fiber, optical fiber collimator, base
Seat, silicon substrate framework, cantilever beam and miniature circular cylinder；Silicon substrate framework center sets up cantilever beam；Cantilever beam is cross-shaped configuration, " ten "
The side midpoint of word four and " ten " word infall are respectively equipped with platform, and the platform back side is coated with reflectance coating；Base central is provided with size and silicon
The mounting groove of base frame outline matching, it is corresponding in mounting groove described in the side midpoint of " ten " word four be provided with mounting hole, silicon substrate framework
In mounting groove；Optical fiber collimator is arranged in mounting hole, end face platform parallel corresponding with top and leaves gap, often
F-P cavity is formed between individual optical fiber collimator and corresponding platform；Optical fiber one end is connected with optical fiber collimator, other end access exterior light
In the demodulating equipment of road, optical fiber is vertical with platform；Miniature circular cylinder for receiving external acoustic waves is fixed on the friendship of cantilever beam " ten " word
It is on platform at fork and vertical with platform.
The reflectivity of the reflectance coating is not less than 95%.Platform on the cantilever beam is square.The silicon substrate framework
Or cantilever beam uses SOI materials.Described silicon substrate framework is square frame structure, and size dimension is not more than 2600 μm.It is described
Pedestal be square structure, size dimension is not more than 4000 μm.The material of the pedestal is ceramics.
The present invention compared with prior art the advantages of be：
(1) present invention compared with prior art, by with physics sensitive structure be miniaturized ability MEMS technology and with
High precisely characteristic, electromagnetism interference, the optical fiber sensing technology of anti-radio frequency are combined, and are made hydrophone front end passive, can be done in electromagnetism
Disturb under rugged environment, realize the high sensitivity to weak acoustic signal, high resolution detection.
(2) present invention into battle array in use, using optical fiber sensing technology it is passive the characteristics of, before realizing vector hydrophone
Hold passive, the transmission of signal is carried out using light wave, signal attenuation is small.
(3) present invention compared with prior art, overcome active device in the prior art needs to power when in use, easily by
The defects of electromagnetic interference, the acoustic signals for particularly overcoming output are easily decayed seriously by electromagnetic environment and Long line transmission
Defect, in practical implementation, there is more preferable stability.
(4) reflectance coating reflectivity is plated more than 95% in the platform back side on cantilever beam of the invention so that light was reflecting
Energy expenditure is minimum in journey.
(5) of the invention silicon substrate framework and cantilever beam use SOI materials, and the material is easily processed into type.
(6) size of silicon substrate framework of the invention and pedestal is smaller so that overall dimensions of the present invention are smaller, is easy to integrate.
Brief description of the drawings
Fig. 1 is the structural representation of vector hydrophone of the present invention；
Fig. 2 is the pedestal schematic diagram of vector hydrophone of the present invention；
Fig. 3 is the operation principle schematic diagram of vector hydrophone of the present invention.
Embodiment
A kind of MOEMS vector hydrophones, including：Optical fiber 1, optical fiber collimator 2, pedestal 3, silicon substrate framework 4, cantilever beam 5 and
Miniature circular cylinder 6；As shown in figure 1, silicon substrate framework 4 is square frame structure, center sets up cantilever beam 5；Cantilever beam 5 is cross
Type structure, the side midpoint of " ten " word four and " ten " word infall are respectively equipped with platform 51, and platform 51 is square, and the back side of platform 51 is plated
There is the reflectance coating 7 that reflectivity is not less than 95%；Pedestal 3 is square structure, as shown in Fig. 2 center is provided with size and silicon substrate frame
The mounting groove 31 of the outline of frame 4 matching, the center of the side upper mounting plate 51 of " ten " word four of cantilever beam 5 corresponds to phase in mounting groove 31
Opening position is answered to be provided with mounting hole 32, silicon substrate framework 4 is arranged in mounting groove 31；Optical fiber collimator 2 is arranged in mounting hole 32, end
Face is parallel with the platform 51 on the side of " ten " word four of corresponding cantilever beam 5 and gap, each fiber optic collimator are left between platform 51
F-P cavity 16 is formed between device 2 and corresponding platform 51, forms F-P (Fabry-Perot) interferometer；The one end of optical fiber 1 and fiber optic collimator
Device 2 connects, and in other end access external circuits demodulating equipment, optical fiber 1 is vertical with platform 51；Miniature circular cylinder 6 is arranged on cantilever
On the platform 51 of beam 5 " ten " word infall and vertical with platform 51, miniature circular cylinder 6 receives external acoustic waves, drives cantilever beam 5 to send out
It is raw to reverse.
Silicon substrate framework 4, cantilever beam 5 are using SOI materials (novel silicon base integrated circuit material), by existing MEMS microcomputers
Tool technique is process, and the size dimension of silicon substrate framework 4 is not more than 2600 μm, the length of side chi of pedestal 3 of MOEMS vector hydrophones
It is very little to be not more than 4000 μm.
MOEMS (MOEMS) technology of the present invention combines the miniaturization of MEMS technology
(miniaturization), microelectronics technology (micro electronics) and the passive of optical fiber sensing technology, high sensitivity, anti-
The characteristics of electromagnetic interference, long-distance transmissions, the passive high sensitivity vector hydrophone in front end can be realized using MOEMS technologies.
During work, sound wave P is picked up by miniature circular cylinder 6, and miniature circular cylinder 6 moves, and drives cantilever beam 5 to move,
Twisted deformation in collinear beam on the cantilever beam 5 of " ten " font, torsional deflection to be on the same straight line
The chamber length of two F-P cavities 16 that is formed of two platforms 51 change, and the both sides of miniature circular cylinder 6 are in same straight line
Beam torsional direction on the contrary, this feature make positioned at the both sides of miniature circular cylinder 6 F-P cavity 16 change of cavity length amount on the contrary, form
Differential type double F-P chambers, the operation principle of the double F-P chambers are as shown in Figure 3.Light source 8 sends monochromatic light by optoisolator 9, light decay
After subtracting device 10,2 × 2 couplers 11, become two beam intensities and the equal light of phase, this two-beam passes through 2 × 2 couplers respectively again
12 and 2 × 2 couplers 13 inject two F-P cavities, and after F-P cavity is handled, the reflected light of this two-beam passes through 2 × 2 couplings respectively
The coupler 13 of clutch 12 and 2 × 2 is incident upon on detector 14 and detector 15, and then obtains two current signal I1And I2, two
Current signal becomes two-way voltage signal V after preamplifier1And V2, its difference V1-V2Just the change of cavity length amount with being surveyed
It is linear, and the change of cavity length quantitative response situation of change of extraneous acoustical signal, subsequently through to hydrophone carry out school
Quasi- experiment can obtain difference V1-V2Corresponding acoustical signal characteristic information, the structure are existed using the benefit of differential type double F-P chambers
In the sensitivity for improving output useful signal, and when there is same sex noise contributions in hydrophone, differential sense mode can be effective
Suppress isotropic noise output.
Unspecified part of the present invention belongs to technology as well known to those skilled in the art.
Claims (7)
- A kind of 1. MOEMS vector hydrophones, it is characterised in that including：Optical fiber (1), optical fiber collimator (2), pedestal (3), silicon substrate Framework (4), cantilever beam (5) and miniature circular cylinder (6)；Silicon substrate framework (4) center sets up cantilever beam (5)；Cantilever beam (5) is cross Type structure, the side midpoint of " ten " word four and " ten " word infall are respectively equipped with platform (51), and platform (51) back side is coated with reflectance coating (7)；Pedestal (3) center is provided with the mounting groove (31) that size matches with silicon substrate framework (4) outline, and mounting groove corresponds to institute in (31) State the side midpoint of " ten " word four and be provided with mounting hole (32), silicon substrate framework (4) is arranged in mounting groove (31)；Optical fiber collimator (2) In mounting hole (32), end face with platform (51) is parallel corresponding to top and leaves gap, each optical fiber collimator (2) with F-P cavity (16) is formed between corresponding platform (51)；Optical fiber (1) one end is connected with optical fiber collimator (2), other end access exterior light In the demodulating equipment of road, optical fiber (1) is vertical with platform (51)；Miniature circular cylinder (6) for receiving external acoustic waves is fixed on cantilever It is on the platform (51) of beam (5) " ten " word infall and vertical with platform (51).
- A kind of 2. MOEMS vector hydrophones according to claim 1, it is characterised in that：The reflectivity of the reflectance coating (7) Not less than 95%.
- A kind of 3. MOEMS vector hydrophones according to claim 1 or 2, it is characterised in that：On the cantilever beam (5) Platform (51) is square.
- A kind of 4. MOEMS vector hydrophones according to claim 3, it is characterised in that：The silicon substrate framework (4) or cantilever Beam (5) uses SOI materials.
- A kind of 5. MOEMS vector hydrophones according to claim 4, it is characterised in that：Described silicon substrate framework (4) is just Quadra structure, size dimension are not more than 2600 μm.
- A kind of 6. MOEMS vector hydrophones according to claim 1 or 2, it is characterised in that：Described pedestal (3) is just Square structure, size dimension are not more than 4000 μm.
- A kind of 7. MOEMS vector hydrophones according to claim 1 or 2, it is characterised in that：The material of the pedestal (3) For ceramics.
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| CN201510411902.9A CN105092016B (en) | 2015-07-14 | 2015-07-14 | A kind of MOEMS vector hydrophones |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107271546B (en) * | 2017-07-04 | 2023-07-21 | 滨州学院 | Photoacoustic spectrum gas detection system based on silicon cantilever beam and matched resonance tube thereof |
| CN107990971A (en) * | 2017-12-27 | 2018-05-04 | 长沙深之瞳信息科技有限公司 | A kind of three-dimensional differential optical fiber vector hydrophone |
| CN110332981A (en) * | 2019-07-10 | 2019-10-15 | 西北工业大学 | A kind of MEMS fibre optic hydrophone and preparation method thereof |
| CN110346030B (en) * | 2019-07-24 | 2021-05-28 | 南昌航空大学 | All-optical network hydrophone |
| CN110261894A (en) * | 2019-07-29 | 2019-09-20 | 南昌航空大学 | A kind of two dimension bionic vector hydrophone |
| CN111735530A (en) * | 2020-07-01 | 2020-10-02 | 中国人民解放军国防科技大学 | SOI (silicon on insulator) sensing chip and resonant MOMES (metal-oxide-semiconductor field effect transistor) vector hydrophone |
| CN114001814B (en) * | 2021-11-18 | 2023-08-15 | 湖北工业大学 | F-P interference-based composite MEMS vector hydrophone |
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| CN1912554A (en) * | 2006-07-26 | 2007-02-14 | 中北大学 | Resonant tunnelling bionic vector underwaster sensor |
| CN101354283A (en) * | 2008-09-08 | 2009-01-28 | 中北大学 | Encapsulation structure of micro-nano bionic vector water sound sensor |
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