CN105092016A - MOEMS vector hydrophone - Google Patents
MOEMS vector hydrophone Download PDFInfo
- Publication number
- CN105092016A CN105092016A CN201510411902.9A CN201510411902A CN105092016A CN 105092016 A CN105092016 A CN 105092016A CN 201510411902 A CN201510411902 A CN 201510411902A CN 105092016 A CN105092016 A CN 105092016A
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- Prior art keywords
- moems
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- optical fiber
- vector hydrophone
- girder
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 40
- 239000013307 optical fiber Substances 0.000 claims description 26
- 239000000377 silicon dioxide Substances 0.000 claims description 20
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 238000002310 reflectometry Methods 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 abstract description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 abstract description 3
- 229910052710 silicon Inorganic materials 0.000 abstract description 3
- 239000010703 silicon Substances 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 239000000835 fiber Substances 0.000 abstract 7
- 230000002265 prevention Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention relates to an MOEMS vector hydrophone comprising a fiber (1), fiber collimators (2), a base (3), a silicon-based framework (4), a cantilever beam (5), and a micro cylinder (6). The cantilever beam (5) is erected at the center of the silicon-based framework (4) and is installed in the base (3). The fiber collimators (2) is installed in mounting holes (32) of the base (3); and the fiber collimators (2) and a corresponding platform (51) arranged on the cantilever beam (5) form an F-P cavity (16). The micro cylinder (6) is installed on the corresponding platform (51) at the cross-shaped intersection position of the cantilever beam (5). One end of the fiber (1) is connected with the fiber collimators (2) and the other end is connected to an external optical path demodulation device. According to the invention, acoustic-mechanical-optical conversion is carried out by the F-P cavity. With combination of the MEMS technology and the fiber sensing technology by the MOEMS technology, requirements of miniaturization, low power consumption, and electromagnetic interference prevention can be realized; and the front-side power-free state of the hydrophone as well as high-sensitivity high-resolution detection of a weak acoustic signal can be realized.
Description
Technical field
The present invention relates to a kind of vector hydrophone in MOEMS sensory field.
Background technology
Vector hydrophone can time synchronized as one, and space concurrent records the sensor of underwateracoustic field vector information, has a wide range of applications in oceanographic engineering and ocean development.Current vector nautical receiving set is comparatively common with the same vibration shape, the such as patent No. is that the Chinese invention patent of ZL200910072009.2 discloses one " trivector hydrophone based on piezoelectric velocity sensor ", this nautical receiving set is connected and composed by connecting link successively by three piezoelectric velocity sensors, by shake pickup acoustic signals same with water particle.In the application process of vector hydrophone, find that same vibration shape piezoelectric vector hydrophone is for ensureing low frequency sensitivity, along with the reduction of frequency, volume is increasing, this gives nautical receiving set in one-tenth battle array and low frequency applications brings very big inconvenience, and resilient suspension element (as rubber rope or metal spring etc.) must be used to be fixed on rigid mount with vibration shape piezoelectric vector hydrophone, the mechanical property hanging original paper directly affects the electroacoustic performance of nautical receiving set.Based on the vector hydrophone of micro-nano electronic technology development just gradually to microminiaturized, integrated development, the single vector hydrophone utilizing MEMS (micro electro mechanical system) (MEMS) technology to develop can carry out target localization, the such as patent No. is the Chinese invention patent disclosed a kind of " resonant-tunneling bionic vector underwaster sensor " of ZL200610012991.0, achieves and detects the vector of underwater sound signal.But, no matter with vibration shape piezoelectric vector hydrophone, or adopt the single vector hydrophone of MEMS technology development, be active device, need power supply during use, be subject to electromagnetic interference (EMI), particularly electric signal is decayed seriously in remote Long line transmission, and electromagnetic noise is to the serious interference of signal, cause nautical receiving set signal to noise ratio (S/N ratio) low, the defects such as poor anti-interference.
Summary of the invention
The technical problem to be solved in the present invention is: the deficiency overcoming existing MEMS vector hydrophone technology, provide a kind of MOEMS vector hydrophone, this nautical receiving set adopts F-P (Fabry-Perot) principle of interference, sound-machine-light conversion is carried out by the mode forming F-P cavity between high reflectivity film and optical fiber collimator, MOEMS technology is utilized MEMS technology and optical fiber sensing technology to be combined, meet the requirement of microminiaturization, low-power consumption, electromagnetism interference, realize nautical receiving set front end passive, realize the high sensitivity to weak acoustic signal, high resolution detection.
The technical solution adopted in the present invention is: a kind of MOEMS vector hydrophone, comprising: optical fiber, optical fiber collimator, pedestal, silica-based framework, semi-girder and miniature circular cylinder; Silica-based framework central authorities erection semi-girder; Semi-girder is cross-shaped configuration, and " ten " word four limit mid point and " ten " word infall are respectively equipped with platform, and the platform back side is coated with reflectance coating; Base central has the mounting groove that size is mated with silica-based framework outline, and in mounting groove, corresponding described " ten " word four limit midpoint is provided with mounting hole, and silica-based frame installation is in mounting groove; Optical fiber collimator is arranged in mounting hole, the platform parallel that end face is corresponding with top and leave gap, forms F-P cavity between each optical fiber collimator with corresponding platform; Optical fiber one end is connected with optical fiber collimator, and in other end access external circuits demodulating equipment, optical fiber is vertical with platform; Vertical with platform on the platform that miniature circular cylinder for receiving external acoustic waves is fixed on semi-girder " ten " word infall.
The reflectivity of described reflectance coating is not less than 95%.Platform on described semi-girder is square.Described silica-based framework or semi-girder adopt SOI material.Described silica-based framework is square-shaped frame shelf structure, and size dimension is not more than 2600 μm.Described pedestal is square structure, and size dimension is not more than 4000 μm.The material of described pedestal is pottery.
The present invention's advantage is compared with prior art:
(1) the present invention compared with prior art, the MEMS technology with the microminiaturized ability of physics sensitive structure is combined with the optical fiber sensing technology with high precisely characteristic, electromagnetism interference, anti-radio frequency, make nautical receiving set front end passive, under electromagnetic interference (EMI) rugged environment, the high sensitivity to weak acoustic signal, high resolution detection can be realized.
(2) the present invention is when becoming battle array to use, and utilizes the passive feature of optical fiber sensing technology, achieves vector hydrophone front end passive, and adopt light wave to carry out the transmission of signal, signal attenuation is little.
(3) the present invention compared with prior art, overcome active device in prior art and need power supply in use, be subject to the defect of electromagnetic interference (EMI), the acoustic signals particularly overcoming output is easily subject to electromagnetic environment and Long line transmission and decays serious defect, in practical implementation, there is better stability.
(4) the platform back side on semi-girder of the present invention is plated reflecting film reflects rate and is greater than 95%, makes light energy ezpenditure in reflection process minimum.
(5) silica-based framework of the present invention and semi-girder adopt SOI material, and this material is easy to machine-shaping.
(6) size of silica-based framework of the present invention and pedestal is less makes overall dimensions of the present invention less, is convenient to integrated.
Accompanying drawing explanation
Fig. 1 is the structural representation of vector hydrophone of the present invention;
Fig. 2 is the pedestal schematic diagram of vector hydrophone of the present invention;
Fig. 3 is the principle of work schematic diagram of vector hydrophone of the present invention.
Embodiment
A kind of MOEMS vector hydrophone, comprising: optical fiber 1, optical fiber collimator 2, pedestal 3, silica-based framework 4, semi-girder 5 and miniature circular cylinder 6; As shown in Figure 1, silica-based framework 4 is square-shaped frame shelf structure, central authorities' erection semi-girder 5; Semi-girder 5 is cross-shaped configuration, and " ten " word four limit mid point and " ten " word infall are respectively equipped with platform 51, and platform 51 is square, and platform 51 back side is coated with the reflectance coating 7 that reflectivity is not less than 95%; Pedestal 3 is square structure, as shown in Figure 2, central authorities have the mounting groove 31 that size is mated with silica-based framework 4 outline, and in the corresponding mounting groove 31 in center of " ten " word four limit upper mounting plate 51 of semi-girder 5, corresponding position is provided with mounting hole 32, and silica-based framework 4 is arranged in mounting groove 31; Optical fiber collimator 2 is arranged in mounting hole 32, end face parallel with the platform 51 on " ten " word four limit of corresponding semi-girder 5 and and leave gap between platform 51, form F-P cavity 16 between each optical fiber collimator 2 with corresponding platform 51, form F-P (Fabry-Perot) interferometer; Optical fiber 1 one end is connected with optical fiber collimator 2, and in other end access external circuits demodulating equipment, optical fiber 1 is vertical with platform 51; Vertical with platform 51 on the platform 51 that miniature circular cylinder 6 is arranged on semi-girder 5 " ten " word infall, miniature circular cylinder 6 receives external acoustic waves, drive semi-girder 5 to twist.
Silica-based framework 4, semi-girder 5 adopt SOI material (novel silicon base integrated circuit material), process through existing MEMS micromechanical process, the size dimension of silica-based framework 4 is not more than 2600 μm, and pedestal 3 size dimension of MOEMS vector hydrophone is not more than 4000 μm.
The feature of passive, high sensitivity, electromagnetism interference, the long-distance transmissions of MOEMS of the present invention (Micro-Opto-Electro-Mechanical Systems) the combine with technique microminiaturization of MEMS technology (miniaturization), microelectronics technology (microelectronics) and optical fiber sensing technology, adopts MOEMS technology can realize the passive high sensitivity vector hydrophone in front end.
During work, sound wave P is picked up by miniature circular cylinder 6, miniature circular cylinder 6 moves, semi-girder 5 is driven to move, the semi-girder 5 of " ten " font is in collinear beam to twist distortion, torsional deflection makes the chamber length being in two F-P cavity 16 that two platforms 51 on this same straight line are formed change, and the torsional direction being in collinear beam of miniature circular cylinder 6 both sides is contrary, this feature makes the change of cavity length amount of the F-P cavity 16 being positioned at miniature circular cylinder 6 both sides contrary, form differential type double F-P chambers, the principle of work of this double F-P chambers as shown in Figure 3.Light source 8 sends monochromatic light after optoisolator 9, optical attenuator 10,2 × 2 coupling mechanism 11, become the light that two beam intensities are equal with phase place, this two-beam injects two F-P cavity respectively through 2 × 2 coupling mechanism 12 and 2 × 2 coupling mechanisms 13 again, after F-P cavity process, the reflected light of this two-beam is incident upon on detector 14 and detector 15 respectively through 2 × 2 coupling mechanism 12 and 2 × 2 coupling mechanisms 13, and then obtains two current signal I
1and I
2, two current signals become two-way voltage signal V after prime amplifier
1and V
2, its difference V
1-V
2just linear with the change of cavity length amount surveyed, and this change of cavity length quantitative response situation of change of extraneous acoustical signal, can difference V be obtained subsequently through carrying out calibration test to nautical receiving set
1-V
2corresponding acoustical signal characteristic information, this structure adopts the benefit of differential type double F-P chambers to be to improve the sensitivity exporting useful signal, and when there being same sex noise contributions at nautical receiving set, differential sense mode can effectively suppress isotropic noise to export.
The unspecified part of the present invention belongs to technology as well known to those skilled in the art.
Claims (7)
1. a MOEMS vector hydrophone, it is characterized in that, comprising: optical fiber (1), optical fiber collimator (2), pedestal (3), silica-based framework (4), semi-girder (5) and miniature circular cylinder (6); Silica-based framework (4) central authorities' erection semi-girder (5); Semi-girder (5) is cross-shaped configuration, and " ten " word four limit mid point and " ten " word infall are respectively equipped with platform (51), and platform (51) back side is coated with reflectance coating (7); Pedestal (3) central authorities have the mounting groove (31) that size is mated with silica-based framework (4) outline, in mounting groove (31), corresponding described " ten " word four limit midpoint is provided with mounting hole (32), and silica-based framework (4) is arranged in mounting groove (31); Optical fiber collimator (2) is arranged in mounting hole (32), the platform (51) that end face is corresponding with top is parallel and leave gap, forms F-P cavity (16) between each optical fiber collimator (2) with corresponding platform (51); Optical fiber (1) one end is connected with optical fiber collimator (2), and in other end access external circuits demodulating equipment, optical fiber (1) is vertical with platform (51); The platform (51) that miniature circular cylinder (6) for receiving external acoustic waves is fixed on semi-girder (5) " ten " word infall is upper and vertical with platform (51).
2. a kind of MOEMS vector hydrophone according to claim 1, is characterized in that: the reflectivity of described reflectance coating (7) is not less than 95%.
3. a kind of MOEMS vector hydrophone according to claim 1 and 2, is characterized in that: the platform (51) on described semi-girder (5) is square.
4. a kind of MOEMS vector hydrophone according to claim 3, is characterized in that: described silica-based framework (4) or semi-girder (5) adopt SOI material.
5. a kind of MOEMS vector hydrophone according to claim 4, is characterized in that: described silica-based framework (4) is square-shaped frame shelf structure, and size dimension is not more than 2600 μm.
6. a kind of MOEMS vector hydrophone according to claim 1 and 2, is characterized in that: described pedestal (3) is square structure, and size dimension is not more than 4000 μm.
7. a kind of MOEMS vector hydrophone according to claim 1 and 2, is characterized in that: the material of described pedestal (3) is pottery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510411902.9A CN105092016B (en) | 2015-07-14 | 2015-07-14 | A kind of MOEMS vector hydrophones |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510411902.9A CN105092016B (en) | 2015-07-14 | 2015-07-14 | A kind of MOEMS vector hydrophones |
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| Publication Number | Publication Date |
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| CN105092016A true CN105092016A (en) | 2015-11-25 |
| CN105092016B CN105092016B (en) | 2017-12-22 |
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| CN201510411902.9A Expired - Fee Related CN105092016B (en) | 2015-07-14 | 2015-07-14 | A kind of MOEMS vector hydrophones |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107271546A (en) * | 2017-07-04 | 2017-10-20 | 滨州学院 | Photoacoustic spectroscopy gas detecting system based on silicon cantilever and its matching resonantron |
| CN107990971A (en) * | 2017-12-27 | 2018-05-04 | 长沙深之瞳信息科技有限公司 | A kind of three-dimensional differential optical fiber vector hydrophone |
| CN110261894A (en) * | 2019-07-29 | 2019-09-20 | 南昌航空大学 | A kind of two dimension bionic vector hydrophone |
| CN110332981A (en) * | 2019-07-10 | 2019-10-15 | 西北工业大学 | A kind of MEMS fibre optic hydrophone and preparation method thereof |
| CN110346030A (en) * | 2019-07-24 | 2019-10-18 | 南昌航空大学 | A kind of all-optical network hydrophone |
| CN111735530A (en) * | 2020-07-01 | 2020-10-02 | 中国人民解放军国防科技大学 | SOI (silicon on insulator) sensing chip and resonant MOMES (metal-oxide-semiconductor field effect transistor) vector hydrophone |
| CN114001814A (en) * | 2021-11-18 | 2022-02-01 | 湖北工业大学 | F-P interference-based composite MEMS vector hydrophone |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107271546A (en) * | 2017-07-04 | 2017-10-20 | 滨州学院 | Photoacoustic spectroscopy gas detecting system based on silicon cantilever and its matching resonantron |
| CN107271546B (en) * | 2017-07-04 | 2023-07-21 | 滨州学院 | Photoacoustic spectrum gas detection system based on silicon cantilever beam and matched resonance tube thereof |
| CN107990971A (en) * | 2017-12-27 | 2018-05-04 | 长沙深之瞳信息科技有限公司 | A kind of three-dimensional differential optical fiber vector hydrophone |
| CN110332981A (en) * | 2019-07-10 | 2019-10-15 | 西北工业大学 | A kind of MEMS fibre optic hydrophone and preparation method thereof |
| CN110346030A (en) * | 2019-07-24 | 2019-10-18 | 南昌航空大学 | A kind of all-optical network hydrophone |
| CN110346030B (en) * | 2019-07-24 | 2021-05-28 | 南昌航空大学 | All-optical network hydrophone |
| CN110261894A (en) * | 2019-07-29 | 2019-09-20 | 南昌航空大学 | A kind of two dimension bionic vector hydrophone |
| CN111735530A (en) * | 2020-07-01 | 2020-10-02 | 中国人民解放军国防科技大学 | SOI (silicon on insulator) sensing chip and resonant MOMES (metal-oxide-semiconductor field effect transistor) vector hydrophone |
| CN114001814A (en) * | 2021-11-18 | 2022-02-01 | 湖北工业大学 | F-P interference-based composite MEMS vector hydrophone |
| CN114001814B (en) * | 2021-11-18 | 2023-08-15 | 湖北工业大学 | F-P interference-based composite MEMS vector hydrophone |
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| CN105092016B (en) | 2017-12-22 |
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