CN105088165B - A kind of bearing inner race raceway strengthening and processing device and processing method - Google Patents
A kind of bearing inner race raceway strengthening and processing device and processing method Download PDFInfo
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- CN105088165B CN105088165B CN201510493670.6A CN201510493670A CN105088165B CN 105088165 B CN105088165 B CN 105088165B CN 201510493670 A CN201510493670 A CN 201510493670A CN 105088165 B CN105088165 B CN 105088165B
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- 238000012545 processing Methods 0.000 title claims abstract description 33
- 238000005728 strengthening Methods 0.000 title claims abstract description 13
- 238000003672 processing method Methods 0.000 title claims abstract description 7
- 230000005540 biological transmission Effects 0.000 claims abstract description 24
- 239000002826 coolant Substances 0.000 claims abstract description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 18
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 16
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 230000008569 process Effects 0.000 claims abstract description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 9
- 229910052786 argon Inorganic materials 0.000 claims abstract description 8
- 238000005086 pumping Methods 0.000 claims abstract description 8
- 238000002513 implantation Methods 0.000 claims abstract description 7
- 238000000427 thin-film deposition Methods 0.000 claims abstract description 6
- 230000000694 effects Effects 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 22
- 238000009826 distribution Methods 0.000 claims description 21
- 238000001816 cooling Methods 0.000 claims description 12
- 229910000831 Steel Inorganic materials 0.000 claims description 11
- 239000010959 steel Substances 0.000 claims description 11
- 230000007704 transition Effects 0.000 claims description 9
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 239000003574 free electron Substances 0.000 claims description 4
- 230000000977 initiatory effect Effects 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000003208 petroleum Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 210000001367 artery Anatomy 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
Landscapes
- Rolling Contact Bearings (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a kind of bearing inner race raceway strengthening and processing device, and it includes vacuum processing chamber, high pressure target platform, rotating mechanism, transmission mechanism, plasma generator, large power high voltage pulse power supply, air supply system and fine pumping system.Also disclose processing method.By apparatus of the present invention, the bearing inner race raceway ion implanting processing equipment of complete set is formed.Radio-frequency power supply establishes radio frequency discharge nitrogen, carbon, argon plasma, and large power high voltage pulse power supply provides negative high voltage pulsed bias to processed inner ring raceway, to implement ion implanting or thin film deposition process.Bearing inner race on coolant jacket is slowly rotating, and surface obtains more uniform implantation dosage so that bearing inner race raceway obtains more uniform implantation dosage；Intensive treatment effect is more preferable.
Description
Technical field
The present invention relates to a kind of bearing inner race raceway strengthening and processing device and processing method, belong to bearing inner race raceway face
Intensive treatment production equipment and its manufacturing field.
Background technology
China is that Production of bearing big country, bearing outlet quantity account for first place in the world, but domestic bearing be mostly in, low-grade axle
Hold, added value is relatively low, very low plus the disorderly competition between enterprise, profit margin；But military enterprise of China, Aeronautics and Astronautics
Long-life high end bearing, the special type for being badly in need of wanting etc. new and high technology and scientific research, atomic power station, bullet train etc. industry
Bearing needs import mostly.
Because domestic bearing steel metallurgical quality and external bearing steel gap are larger, and because domestic bearing is in design, system
Make, lubricate, assembling etc. and the gap of foreign countries, make domestic bearing compared with state's outer bearing, and its is wear-resistant, anticorrosive, anti-tired
Labor poor-performing, service life are relatively low.
The spallation problems of similar film are not present in plasma immersion ion injection technology, can accurately control injection from
Quantum count, its control method are the quantity and energy of detection injection electric charge, can keep specimen surface roughness, do not influence size essence
Degree.
Because ion implantation technology feature is applicable the surface modification treatment of bearing very much, it does not have to change the material of bearing, set
Meter and mechanical processing technique just can reach the purpose of bearing extension.
Plasma immersion ion injects（PIII）It is a kind of novel ion implantation technique, it eliminates beamline ion implanters note
Enter the intrinsic direct projection limitation of technology, equipment it is relatively low compared with simple, investment cost but can only small lot parts processed, cannot get
Develop rapidly.
The content of the invention
It is an object of the present invention to provide a kind of strengthening and processing device and processing that plasma injection can be carried out to bearing inner race
Method.
The solution of the present invention is as follows：A kind of bearing inner race raceway strengthening and processing device, including vacuum processing chamber, high pressure target
Platform, rotating mechanism, transmission mechanism, plasma generator, large power high voltage pulse power supply, air supply system and fine pumping system
System；
Described vacuum processing chamber includes bell jar, bottom plate, and described bell jar is placed in above bottom plate；
Described high pressure target platform includes target platform disk and insulated leg, and described insulated leg one end is fixed on bottom plate,
The other end is fixed on target platform disk bottom and is supported fixation；Coolant jacket is set on described target platform disk, the coolant jacket one end
Through target platform disk；
Described rotating mechanism includes power transmission shaft and gear train；Described power transmission shaft one end passes through bottom plate, other end activity
It is fixed on high pressure target platform bottom wall（；Described gear train includes torque distribution gear, inner ring rotation gear and transition gear, institute
The torque distribution gear stated is socketed in power transmission shaft, and its periphery coordinates the inner ring rotation gear of four cooled set one end sockets；Institute
Inner ring rotation gear of the transition gear stated for the distant place end that is connected.
Described plasma generator includes radio-frequency power supply and bar state arc-shaped electrode, and radio-frequency power supply one end is true with being arranged at
The indoor bar state arc-shaped electrode connection of vacancy reason, the other end are connected with bell jar；
Described fine pumping system includes turbomolecular pump and rotary-vane vaccum pump, described vavuum pump and turbine point
Sub- pump connection, described turbomolecular pump suction inlet connect through bottom plate with vacuum processing chamber；
Described air supply system includes steel cylinder, gas mass flow gauge, magnetic valve, mixing chamber and gas distribution pipe, described gas
Weight flowmeter both ends connect magnetic valve respectively, and the magnetic valve at both ends is connected with steel cylinder, mixing chamber respectively；Described mixing chamber
It is connected with the gas distribution pipe in application of vacuum room；
Described large power high voltage pulse power cathode is connected with target platform disk, and positive pole is connected and is grounded with bottom plate.
Further, described transmission mechanism includes reducing motor, driving gear and driven gear, reducing motor and driving tooth
Wheel connection, driving gear coordinate with driven gear, and described driven gear is socketed on power transmission shaft.
Further, described vacuum processing chamber also includes form and sheet lead cover, and described sheet lead cover is placed in outside bell jar and will
Bell jar surrounds；Described form passes through sheet lead cover and bell jar.
Further, half range formula water channel cooling tube is set outside described bell jar.
Further, described gas distribution pipe one end is closed, and is distributed several through holes on tube wall.
A kind of bearing inner race raceway intensive treatment fills processing method：
A, the bearing inner race cleaned through ultrasonic wave is put and be inserted on coolant jacket, with target platform disk contact, cover bell jar；
B, start rotary-vane vaccum pump, the atmospheric condition in application of vacuum room is extracted into 30Pa, turbomolecular pump starts work
Make, the vacuum degree control in application of vacuum room is arrived（2-3）×10-4Pa；
C, according to handling process needs, the ratio of the gas in steel cylinder on demand is sent into mixing chamber, sent again after mixing
Enter gas distribution pipe；
D, radio-frequency power supply establishes radio frequency discharge nitrogen, carbon, argon plasma, and free electron, which fully absorbs, in application of vacuum room penetrates
The energy of frequency electric field, radio frequency discharge nitrogen, carbon, argon plasma are encouraged；
E, cooling is started；
F, large power high voltage pulse power initiation, for providing negative high voltage pulsed bias to processed bearing inner race, with reality
Apply ion implanting or thin film deposition process；
G, reducing motor is started, driving gear drives power transmission shaft and then successively band dynamic torque distribution gear, inner ring rotary teeth
Wheel and transition gear so that the bearing inner race on coolant jacket slowly rotates, and surface obtains more uniform implantation dosage；
H, vacuum chamber recovers normal pressure, cooling
Vacuum processing chamber, high pressure target platform, rotating mechanism, transmission mechanism, plasma generator, large power high voltage pulse electricity
Source, air supply system and fine pumping system, form the bearing inner race raceway ion implanting processing equipment of complete set.Radio frequency electrical
Radio frequency discharge nitrogen, carbon, argon plasma are established in source, and large power high voltage pulse power supply provides negative height to processed bearing inner race raceway
Pulsed bias is pressed, to implement ion implanting or thin film deposition process.Bearing inner race on coolant jacket is slowly rotating, and surface obtains
More uniform implantation dosage so that bearing inner race raceway obtains more uniform implantation dosage；Intensive treatment effect is more preferable.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the attachment structure schematic diagram of coolant jacket of the present invention and bearing inner race.
Fig. 3 is the structural representation of coolant jacket of the present invention.
Fig. 4 is the structural representation of gear train of the present invention.
Embodiment
The present invention will be further described below in conjunction with the accompanying drawings.
A kind of bearing inner race strengthening and processing device, including vacuum processing chamber, high pressure target platform, rotating mechanism, transmission mechanism, etc.
Gas ions generator, large power high voltage pulse power supply, air supply system and fine pumping system.
Vacuum processing chamber includes bell jar 1, bottom plate 2, and bell jar 1 is placed in the top of bottom plate 2；The present invention is provided with sheet lead cover 30 and is placed in
Bell jar is outer and surrounds bell jar；Form 31 passes through sheet lead cover and bell jar.In equipment running process simultaneously can produce grenz ray and
RF electromagnetic radiation, they have damage to human body, it is necessary to appropriate protection.In a device, because injecting voltage is less high, only
For 20-35kV, therefore the secondary electron energy knocked out by Ions Bombardment piece surface is not very high, soft X caused by wall
Ray also will not be too strong, but still may injure the health of staff.Vacuum is tightly wrapped up with the thick high-purity protection sheet leads of 3mm
Processing processing outdoor face, can effectively shield caused grenz ray, make the grenz ray dosage of vacuum processing chamber external leakage
The lowest dose level allowed far below on-radiation worker.
High pressure target platform includes target platform disk 8 and insulated leg 6, and the one end of insulated leg 6 is fixed on bottom plate, and the other end is fixed
Fixation is supported in the bottom of target platform disk 3；Coolant jacket 5 is set on target platform disk 8, and the one end of coolant jacket 5 passes through target platform disk
8.Coolant jacket is made up of body 51, block set 52 and external part 53；Body is hollow, is passed through coolant；Block set is used in spring bearing
Circle；External part passes through target platform disk, and sliding bearing is set between external part and target platform disk so that coolant jacket can be in target platform disk
Upper rotation.Petroleum pipeline is passed through in coolant jacket, petroleum pipeline bottom is provided with swivel joint 9, the He of oil inlet 35 is set on swivel joint
Oil-out 36, it is defeated through bottom plate and outside by wall-passing device into and out of oil-piping into and out of the connection of hydraulic fluid port 35,36 into and out of oil-piping
Oil discharging device connects.
Rotating mechanism includes power transmission shaft 13 and gear train；The one end of power transmission shaft 13 passes through bottom plate 2, sets high vacuum between the two
Magnetic seal part 37；The other end sets insulating barrier 38 and is movably fixed on the bottom wall of high pressure target platform 8；Gear train includes torque distribution tooth
Wheel 39, inner ring rotation gear 40 and transition gear 41, torque distribution gear 39 are socketed on power transmission shaft, and its periphery coordinates four quilts
The inner ring rotation gear 40 that coolant jacket external part 53 is socketed；Inner ring rotary teeth of the transition gear 41 for the distant place end that is connected
Wheel.Meanwhile the also rotation direct geared of part distant place end inner ring and the inner ring rotation gear of torque distribution gear surrounding coordinates company
Connect.
Plasma generator includes radio-frequency power supply 32 and bar state arc-shaped electrode 3, and radio-frequency power supply has two output ends, one end
Bottom plate connection strap state arc-shaped electrode is passed through by radio-frequency cable wall-passing device 39 by radio-frequency cable（Radio-frequency antenna）3, the other end leads to
Cross cable connection bell jar 1 and be grounded and form radio frequency discharge loop.Bar state arc-shaped electrode 3 is fixed on bell jar by electrode insulation post 34
Inwall top.
Fine pumping system includes turbomolecular pump 10 and rotary-vane vaccum pump 11, vavuum pump 11 and turbomolecular pump 10
Connection, the suction inlet of turbomolecular pump 10 connect through bottom plate 2 with vacuum processing chamber.
Air supply system includes steel cylinder 20,24,28, gas mass flow gauge 18,22,26, magnetic valve 17,19,21,23,25,
27 and mixing chamber 16, gas mass flow gauge both ends connect magnetic valve respectively, and the magnetic valve at both ends connects with steel cylinder, mixing chamber respectively
Connect；Mixing chamber is connected with the gas distribution pipe in application of vacuum room.Mixing chamber connecting gas transmission pipe passes through bottom plate and vacuum by wall-passing device
Gas distribution pipe 42 in process chamber connects.Gas distribution pipe one end is closed, and is distributed several through holes on tube wall.
The negative pole of large power high voltage pulse power supply 33 is connected by wall-passing device by cable through bottom plate with target platform disk, positive pole
It is connected with bottom plate 2 and is grounded to form ion speed-up loop.The pulse-modulator being made up of high-voltage DC power supply and pulse-modulator
It is the core of high-voltage pulse power source, for providing negative high voltage pulsed bias to processed part, to implement ion implanting to part
Or thin film deposition process.
Transmission mechanism includes reducing motor 14, driving gear 15 and driven gear 12, reducing motor 14 and driving gear 15
Connection, driving gear 15 coordinate with driven gear 12, and driven gear 12 is socketed on power transmission shaft 13.
The consumption of pulsed high voltage generator portion of energy causes their temperature to raise, in bearing on processed bearing inner race
About 150 DEG C or so of maximum temperature rise is enclosed, therefore, to processed bearing inner race by leading to transformer oil in bearing inner race coolant jacket 5
Make cooling matchmaker, cooling matchmaker flows into bearing inner race coolant jacket intracavitary, flowed out after heat absorption.In ion implanting processing procedure, pulse is high
The energy of most of high-voltage pulse power source of voltage source is deposited on vacuum-chamber wall, causes vacuum-chamber wall temperature to raise, therefore cold
But water carries out forced water cooling by half range formula water channel cooling tube 29 to application of vacuum locular wall.
The processing method of bearing inner race of the present invention is：
A, the bearing inner race 4 cleaned through ultrasonic wave is put on coolant jacket, with target platform disk contact, covers bell jar；
B, start rotary-vane vaccum pump, the atmospheric condition in application of vacuum room is extracted into 30Pa, turbomolecular pump starts work
Make, the vacuum degree control in application of vacuum room is arrived（2-3）×10-4Pa；
C, according to handling process needs, the ratio of the gas in steel cylinder on demand is sent into mixing chamber, sent again after mixing
Enter gas distribution pipe；
D, radio-frequency power supply establishes radio frequency discharge nitrogen, carbon, argon plasma, and free electron, which fully absorbs, in application of vacuum room penetrates
The energy of frequency electric field, radio frequency discharge nitrogen, carbon, argon plasma are encouraged；In this course, the regulation impedance in radio-frequency power supply
The trimmer of adaptation, it can reduce the reflection power in circuit, the energy efficient of rf electric field is coupled to vacuum chamber
Interior, free electron fully absorbs the energy of rf electric field in vacuum chamber, has encouraged radio frequency discharge nitrogen or carbon plasma；
E, cooling is started；
F, large power high voltage pulse power initiation, for providing negative high voltage arteries and veins to processed inner ring raceway bearing inner race raceway
Punching bias, to implement ion implanting or thin film deposition process；
G, reducing motor is started, driving gear drives power transmission shaft and then successively band dynamic torque distribution gear, inner ring rotary teeth
Wheel and transition gear so that the bearing inner race on coolant jacket slowly rotates, and surface obtains more uniform implantation dosage；
H, vacuum chamber recovers normal pressure, cooling.
Although giving detailed description and explanation to the embodiment of the present invention above, it should be noted that
We can carry out various equivalent changes and modification to above-mentioned embodiment according to the conception of the present invention, and its caused function is made
, all should be within protection scope of the present invention during with the spirit still covered without departing from specification.
Claims (6)
1. a kind of bearing inner race raceway strengthening and processing device, it is characterised in that including vacuum processing chamber, high pressure target platform, whirler
Structure, transmission mechanism, plasma generator, large power high voltage pulse power supply, air supply system and fine pumping system；
Described vacuum processing chamber includes bell jar, bottom plate, and described bell jar is placed in above bottom plate；
Described high pressure target platform includes target platform disk and insulated leg, and described insulated leg one end is fixed on bottom plate, another
End is fixed on target platform disk bottom and is supported fixation；Coolant jacket is set on described target platform disk, the coolant jacket one end passes through
Target platform disk；
Described rotating mechanism includes power transmission shaft and gear train；Described power transmission shaft one end passes through bottom plate, and other end activity is fixed
On high pressure target platform bottom wall；Described gear train includes torque distribution gear, inner ring rotation gear and transition gear, and described turns
Square distribution gear is socketed on power transmission shaft, and its periphery coordinates the inner ring rotation gear of four cooled set one end sockets；Described
Inner ring rotation gear of the transition gear for the distant place end that is connected；
Described plasma generator includes radio-frequency power supply and bar state arc-shaped electrode, and radio-frequency power supply one end is with being arranged at vacuum
The indoor bar state arc-shaped electrode connection of reason, the other end are connected with bell jar；
Described fine pumping system includes turbomolecular pump and rotary-vane vaccum pump, described vavuum pump and turbomolecular pump
Connection, described turbomolecular pump suction inlet connect through bottom plate with vacuum processing chamber；
Described air supply system includes steel cylinder, gas mass flow gauge, magnetic valve, mixing chamber and gas distribution pipe, described gas matter
Amount flowmeter both ends connect magnetic valve respectively, and the magnetic valve at both ends is connected with steel cylinder, mixing chamber respectively；Described mixing chamber with it is true
The indoor gas distribution pipe connection of vacancy reason；
Described large power high voltage pulse power cathode is connected with target platform disk, and positive pole is connected and is grounded with bottom plate.
A kind of 2. bearing inner race raceway strengthening and processing device according to claim 1, it is characterized in that described transmission mechanism
Including reducing motor, driving gear and driven gear, reducing motor is connected with driving gear, and driving gear is matched somebody with somebody with driven gear
Close, described driven gear is socketed on power transmission shaft.
A kind of 3. bearing inner race raceway strengthening and processing device according to claim 2, it is characterized in that described application of vacuum
Room also includes form and sheet lead cover, and described sheet lead cover is placed in outside bell jar and surrounds bell jar；Described form passes through sheet lead cover
And bell jar.
A kind of 4. bearing inner race raceway strengthening and processing device according to claim 1, it is characterized in that described bell jar peripheral hardware
Put half range formula water channel cooling tube.
A kind of 5. bearing inner race raceway strengthening and processing device according to claim 1, it is characterized in that described gas distribution pipe
One end is closed, and is distributed several through holes on tube wall.
6. a kind of inner ring raceway strengthening and processing device according to any claim in claim 1-5, its processing method
For：
A, the bearing inner race cleaned through ultrasonic wave is put and be inserted on coolant jacket, with target platform disk contact, cover bell jar；
B, starting rotary-vane vaccum pump, the atmospheric condition in application of vacuum room is extracted into 30Pa, turbomolecular pump is started working,
Vacuum degree control in application of vacuum room is arrived（2-3）×10-4Pa；
C, according to handling process needs, the ratio of the gas in steel cylinder on demand is sent into mixing chamber, is re-fed into cloth after mixing
Tracheae；
D, radio-frequency power supply establishes radio frequency discharge nitrogen, carbon, argon plasma, and free electron fully absorbs radio frequency electrical in application of vacuum room
The energy of field, has encouraged radio frequency discharge nitrogen, carbon, argon plasma；
E, cooling is started；
F, large power high voltage pulse power initiation, for providing negative high voltage pulsed bias to processed bearing inner race, with implement from
Son injection or thin film deposition process；
G, start reducing motor, driving gear drive power transmission shaft so that successively band dynamic torque distribution gear, inner ring rotation gear and
Transition gear so that the bearing inner race on coolant jacket slowly rotates, and surface obtains more uniform implantation dosage；
H, vacuum chamber recovers normal pressure, cooling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510493670.6A CN105088165B (en) | 2015-08-13 | 2015-08-13 | A kind of bearing inner race raceway strengthening and processing device and processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510493670.6A CN105088165B (en) | 2015-08-13 | 2015-08-13 | A kind of bearing inner race raceway strengthening and processing device and processing method |
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| Publication Number | Publication Date |
|---|---|
| CN105088165A CN105088165A (en) | 2015-11-25 |
| CN105088165B true CN105088165B (en) | 2017-12-22 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851041A (en) * | 2006-05-19 | 2006-10-25 | 哈尔滨工业大学 | Bearing outer ring ball track ion injection and deposition combined treatment method |
| CN101365289A (en) * | 2008-09-28 | 2009-02-11 | 哈尔滨工业大学 | Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube |
| CN101525738A (en) * | 2009-04-23 | 2009-09-09 | 哈尔滨工业大学 | Internal surface ion implantation modification device and method of inductively coupled plasmatube barrel |
| CN205011831U (en) * | 2015-08-13 | 2016-02-03 | 黄山迈瑞机械设备科技有限公司 | Bearing inner race raceway strengthening treatment device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3555928B2 (en) * | 1999-07-12 | 2004-08-18 | 独立行政法人産業技術総合研究所 | Surface modification method and surface modification device |
| JP3834617B2 (en) * | 2002-02-14 | 2006-10-18 | 独立行政法人産業技術総合研究所 | Bearing ball coating method |
-
2015
- 2015-08-13 CN CN201510493670.6A patent/CN105088165B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851041A (en) * | 2006-05-19 | 2006-10-25 | 哈尔滨工业大学 | Bearing outer ring ball track ion injection and deposition combined treatment method |
| CN101365289A (en) * | 2008-09-28 | 2009-02-11 | 哈尔滨工业大学 | Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube |
| CN101525738A (en) * | 2009-04-23 | 2009-09-09 | 哈尔滨工业大学 | Internal surface ion implantation modification device and method of inductively coupled plasmatube barrel |
| CN205011831U (en) * | 2015-08-13 | 2016-02-03 | 黄山迈瑞机械设备科技有限公司 | Bearing inner race raceway strengthening treatment device |
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| CN105088165A (en) | 2015-11-25 |
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Effective date of registration: 20171123 Address after: 245200 J06 block, Shexian Economic Development Zone, Anhui, Huangshan City, China Applicant after: HUANGSHAN MINGMINGDE BEARING Co.,Ltd. Address before: 245200 Shexian Economic Development Zone, Anhui, Huangshan City Applicant before: HUANGSHAN MAIRUI MACHINERY EQUIPMENT TECHNOLOGY Co.,Ltd. |
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Address after: 245200 J06 block, Shexian Economic Development Zone, Anhui, Huangshan City Patentee after: Huangshan mingmingde Group Co.,Ltd. Address before: 245200 J06 block, Shexian Economic Development Zone, Anhui, Huangshan City Patentee before: HUANGSHAN MINGMINGDE BEARING Co.,Ltd. |
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Denomination of invention: A strengthening treatment device and method for bearing inner ring raceway Effective date of registration: 20200903 Granted publication date: 20171222 Pledgee: Shexian Anhui rural commercial bank Limited by Share Ltd. Pledgor: Huangshan mingmingde Group Co.,Ltd. Registration number: Y2020980005659 |
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Date of cancellation: 20230818 Granted publication date: 20171222 Pledgee: Shexian Anhui rural commercial bank Limited by Share Ltd. Pledgor: Huangshan mingmingde Group Co.,Ltd. Registration number: Y2020980005659 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A device and method for strengthening the raceway of bearing inner ring Effective date of registration: 20230825 Granted publication date: 20171222 Pledgee: Shexian Anhui rural commercial bank Limited by Share Ltd. Pledgor: Huangshan mingmingde Group Co.,Ltd. Registration number: Y2023980053568 |