CN105088164B - A kind of bearing outer ring ball track strengthening and processing device and processing method - Google Patents

A kind of bearing outer ring ball track strengthening and processing device and processing method Download PDF

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Publication number
CN105088164B
CN105088164B CN201510493669.3A CN201510493669A CN105088164B CN 105088164 B CN105088164 B CN 105088164B CN 201510493669 A CN201510493669 A CN 201510493669A CN 105088164 B CN105088164 B CN 105088164B
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outer ring
bearing outer
target platform
bottom plate
vacuum
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CN105088164A (en
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傅小林
洪学江
孙新民
翁慧成
柴林
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Huangshan Mingmingde Group Co ltd
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HUANGSHAN MINGMINGDE BEARING CO Ltd
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Abstract

The invention discloses a kind of bearing outer ring ball track strengthening and processing device and processing method, including vacuum processing chamber, fine pumping system, high pressure target platform, plasma generator, ion acceleration component and air supply system.Also disclose the processing method of the device.Cooperation of the invention by vacuum processing chamber, fine pumping system, high pressure target platform, plasma generator, ion acceleration component and air supply system, form the ion implanting processing equipment of complete set.Radio-frequency power supply establishes radio frequency discharge nitrogen, carbon, argon plasma, and large power high voltage pulse power supply provides negative high voltage pulsed bias to processed steel ball, to implement ion implanting or thin film deposition process.Bearing outer ring is enclosed on grid electrode and central electrode so that the raceway of the outer outer ring of bearing obtains more uniform implantation dosage;Intensive treatment effect is more preferable.

Description

A kind of bearing outer ring ball track strengthening and processing device and processing method
Technical field
The present invention relates to a kind of bearing outer ring ball track strengthening and processing device and processing method, belongs to the production of bearing intensive treatment Equipment and its manufacturing field.
Background technology
China is that Production of bearing big country, bearing outlet quantity account for first place in the world, but domestic bearing be mostly in, low-grade axle Hold, added value is relatively low, very low plus the disorderly competition between enterprise, profit margin;But military enterprise of China, Aeronautics and Astronautics Long-life high end bearing, the special type for being badly in need of wanting etc. new and high technology and scientific research, atomic power station, bullet train etc. industry Bearing needs import mostly.
Because domestic bearing steel metallurgical quality and external bearing steel gap are larger, and because domestic bearing is in design, system Make, lubricate, assembling etc. and the gap of foreign countries, make domestic bearing compared with state's outer bearing, and its is wear-resistant, anticorrosive, anti-tired Labor poor-performing, service life are relatively low.
The spallation problems of similar film are not present in plasma immersion ion injection technology, can accurately control injection from Quantum count, its control method are the quantity and energy of detection injection electric charge, can keep specimen surface roughness, do not influence size essence Degree.
Because ion implantation technology feature is applicable the surface modification treatment of bearing very much, it does not have to change the material of bearing, set Meter and mechanical processing technique just can reach the purpose of bearing extension.
Plasma immersion ion injects(PIII)It is a kind of novel ion implantation technique, it eliminates beamline ion implanters note Enter the intrinsic direct projection limitation of technology, equipment it is relatively low compared with simple, investment cost but can only small lot parts processed, cannot get Develop rapidly.
The content of the invention
To overcome above-mentioned deficiency, it is an object of the present invention to provide a kind of simple in construction to strengthen to bearing outer ring ball track The device and processing method of processing.
The solution of the present invention is as follows:A kind of bearing outer ring ball track strengthening and processing device, including vacuum processing chamber, high vacuum are taken out Gas system, high pressure target platform, plasma generator, ion acceleration component and air supply system;
Described vacuum processing chamber includes bell jar, bottom plate, and described bell jar is placed in above bottom plate;
Described fine pumping system includes turbomolecular pump and rotary-vane vaccum pump, described vavuum pump and turbine point Sub- pump connection, described turbomolecular pump suction inlet connect through bottom plate with vacuum processing chamber;
Described high pressure target platform includes target platform disk and insulating supporting seat, and described support base one end is fixed on bottom plate On, the other end is fixed on target platform disk bottom and is supported fixation;
Described plasma generator includes radio-frequency power supply, central electrode and grid electrode;Set on described bottom plate Some groups of bearing outer ring coolant jackets, described bearing outer ring coolant jacket is interior to set aperture plate, and hollow tube is set in described aperture plate;Institute The hollow tube stated passes through target platform disk and bottom plate, and described aperture plate is connected through target platform disk and with bottom plate;Described radio frequency electrical Source one end connecting bottom board, is connected to form grid electrode with aperture plate indirectly, if the other end is provided with the hollow tube phase of dry hole with tube wall Company forms central electrode;
Described ion acceleration component includes large power high voltage pulse power supply and target platform electrode, is fixed on target platform disk lower end Target platform electrode be connected through bottom plate with large power high voltage pulse power supply, the large power high voltage pulse power supply other end is connected with bottom plate And it is grounded.
Further, described air supply system includes steel cylinder, gas mass flow gauge, magnetic valve and mixing chamber, if described A dry gas mass flow gauge both ends connect magnetic valve respectively, and the magnetic valve at both ends is connected with steel cylinder, mixing chamber respectively;Described Mixing chamber is connected with the central electrode in application of vacuum room.
Further, described vacuum processing chamber also includes form and sheet lead cover, and described sheet lead cover is placed in outside bell jar and will Bell jar surrounds;Described form passes through sheet lead cover and bell jar.
Further, half range formula water channel cooling tube is set outside described bell jar.
Further, cooling oil inlet is provided with described bottom plate, cooling oil-out connects with coolant jacket.
A kind of processing method of bearing outer ring ball track strengthening and processing device is:
A, the bearing outer ring cleaned through ultrasonic wave is put into coolant jacket, is grid electrode and center in bearing outer ring Electrode;
B, start rotary-vane vaccum pump, the atmospheric condition in application of vacuum room is extracted into 30Pa, turbomolecular pump starts work Make, the vacuum degree control in application of vacuum room is arrived(2-3)×10-4Pa;
C, by the gas in steel cylinder, the ratio needed for is sent into mixing chamber, is re-fed into central electrode after mixing;Pass through center Mixed gas is sent into hole on electrode to bearing outer ring inner side;
D, radio-frequency power supply establishes radio frequency discharge nitrogen, carbon, argon plasma, and free electron, which fully absorbs, in application of vacuum room penetrates The energy of frequency electric field, radio frequency discharge nitrogen, carbon, argon plasma are encouraged;
E, cooling is started;
F, large power high voltage pulse power initiation, for providing negative high voltage pulsed bias to processed bearing outer ring, with reality Apply ion implanting or thin film deposition process;
F, reducing motor is started, driving gear drives power transmission shaft and then drives driver plate rotation, and bearing outer ring is in target platform disk Upper slowly to roll, bearing outer ring surface obtains more uniform implantation dosage;
G, vacuum chamber recovers normal pressure, cooling.
The present invention is accelerated by vacuum processing chamber, fine pumping system, high pressure target platform, plasma generator, ion The cooperation of component and air supply system, form the ion implanting processing equipment of complete set.Radio-frequency power supply establish radio frequency discharge nitrogen, Carbon, argon plasma, large power high voltage pulse power supply provides negative high voltage pulsed bias to processed bearing outer ring, to implement ion Injection or thin film deposition process.Bearing outer ring is enclosed on grid electrode and central electrode so that the raceway of bearing outer ring obtain compared with It is uniformly injected into dosage;Intensive treatment effect is more preferable.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation in present invention cooling adapter sleeve.
Connection diagrams of the Fig. 3 between bearing outer ring of the present invention and radio-frequency power supply, large power high voltage pulse power supply.
Embodiment
The present invention will be further described below in conjunction with the accompanying drawings.
A kind of bearing outer ring ball track strengthening and processing device, including vacuum processing chamber, fine pumping system, high pressure target platform, Plasma generator, ion acceleration component and air supply system.
Vacuum processing chamber includes bell jar 1, bottom plate 2, and bell jar 1 is placed in the top of bottom plate 2;The present invention is provided with sheet lead cover 28 and is placed in Bell jar is outer and surrounds bell jar;Form 29 passes through sheet lead cover and bell jar.In equipment running process simultaneously can produce grenz ray and RF electromagnetic radiation, they have damage to human body, it is necessary to appropriate protection.In a device, because injecting voltage is less high, only For 20-35kV, therefore the secondary electron energy knocked out by Ions Bombardment piece surface is not very high, soft X caused by wall Ray also will not be too strong, but still may injure the health of staff.Vacuum is tightly wrapped up with the thick high-purity protection sheet leads of 3mm Processing processing outdoor face, can effectively shield caused grenz ray, make the grenz ray dosage of vacuum processing chamber external leakage The lowest dose level allowed far below on-radiation worker.
Fine pumping system includes turbomolecular pump 10 and rotary-vane vaccum pump 11, vavuum pump 11 and turbomolecular pump 10 Connection, the suction inlet of turbomolecular pump 10 connect through bottom plate 2 with vacuum processing chamber.
High pressure target platform includes target platform disk 31 and insulating supporting seat 30, and the one end of support base 30 is fixed on a base plate 2, the other end It is fixed on the bottom of target platform disk 31 and is supported fixation.
Plasma generator includes radio-frequency power supply 12, central electrode and grid electrode;Some groups of bearings are set on bottom plate 2 Outer ring coolant jacket 6, aperture plate 3 is radially arranged in bearing outer ring coolant jacket 6, hollow tube 4, the upper end of hollow tube 4 are radially arranged in aperture plate 3 Closing;Hollow tube 4 passes through target platform disk 31 and bottom plate 2, and aperture plate 3 is connected through target platform disk 31 and with bottom plate;Radio-frequency power supply 12 One end is connected to form grid electrode, the other end is provided with by cable and tube wall with aperture plate 3 indirectly by cable connecting bottom board 2 If the hollow tube 4 of dry hole is connected to form central electrode.Hollow tube and back plate connections are provided with electrode insulation seal, aperture plate with Target platform disk junction is provided with grid electrode insulating part, and both of which plays a part of insulated enclosure.
Ion acceleration component includes large power high voltage pulse power supply 26 and target platform electrode 8, is fixed on the lower end of target platform disk 31 Target platform electrode 8 be connected through bottom plate 2 by cable with large power high voltage pulse power supply 26, large power high voltage pulse power supply 26 is another One end is connected and is grounded with bottom plate 2 by cable.Target platform electrode is provided with insulating sealer with back plate connections.
Air supply system includes steel cylinder 25,21,17, gas mass flow gauge 23,19,15, magnetic valve 22,24,18,20,14, 16 and mixing chamber 13, gas mass flow gauge both ends connect magnetic valve respectively, and the magnetic valve at both ends connects with steel cylinder, mixing chamber respectively Connect;Mixing chamber is connected with the central electrode in application of vacuum room.Mixing chamber passes through the middle electrocardio in appendix and application of vacuum room Pole connects.
Cooling oil inlet 7 is provided with the bottom plate of the present invention, cooling oil-out 9 connects with coolant jacket 6.Bearing outer ring cools down Lead to transformer oil in set and make cooling matchmaker, flowed into through cooling down oil inlet, cooling oil-out outflow.Cool down oil inlet, cooling oil-out Petroleum pipeline is connected, petroleum pipeline is connected by wall-passing device through bottom plate with outside fuel delivery device.
A kind of processing method of bearing outer ring ball track strengthening and processing device is:
A, the bearing outer ring cleaned through ultrasonic wave is put into coolant jacket, is grid electrode and center in bearing outer ring Electrode;
B, start rotary-vane vaccum pump, the atmospheric condition in application of vacuum room is extracted into 30Pa, turbomolecular pump starts work Make, the vacuum degree control in application of vacuum room is arrived(2-3)×10-4Pa;
C, by the gas in steel cylinder, the ratio needed for is sent into mixing chamber, is re-fed into central electrode after mixing;Pass through center Mixed gas is sent into hole on electrode to bearing outer ring inner side;
D, radio-frequency power supply establishes radio frequency discharge nitrogen, carbon, argon plasma, and free electron, which fully absorbs, in application of vacuum room penetrates The energy of frequency electric field, radio frequency discharge nitrogen, carbon, argon plasma are encouraged;In this course, the regulation impedance in radio-frequency power supply The trimmer of adaptation, it can reduce the reflection power in circuit, the energy efficient of rf electric field is coupled to vacuum chamber Interior, free electron fully absorbs the energy of rf electric field in vacuum chamber, has encouraged radio frequency discharge nitrogen or carbon plasma;
E, cooling is started;
F, large power high voltage pulse power initiation, for providing negative high voltage pulsed bias to processed bearing outer ring, with reality Apply ion implanting or thin film deposition process;
G, reducing motor is started, driving gear drives power transmission shaft and then drives driver plate rotation, and bearing outer ring is in target platform disk Upper slowly to roll, bearing outer ring surface obtains more uniform implantation dosage;
H, vacuum chamber recovers normal pressure, cooling.
Although giving detailed description and explanation to the embodiment of the present invention above, it should be noted that We can carry out various equivalent changes and modification to above-mentioned embodiment according to the conception of the present invention, and its caused function is made , all should be within protection scope of the present invention during with the spirit still covered without departing from specification.

Claims (6)

  1. A kind of 1. bearing outer ring ball track strengthening and processing device, it is characterised in that including vacuum processing chamber, fine pumping system, High pressure target platform, plasma generator, ion acceleration component and air supply system;
    Described vacuum processing chamber includes bell jar, bottom plate, and described bell jar is placed in above bottom plate;
    Described fine pumping system includes turbomolecular pump and rotary-vane vaccum pump, described vavuum pump and turbomolecular pump Connection, described turbomolecular pump suction inlet connect through bottom plate with vacuum processing chamber;
    Described high pressure target platform includes target platform disk and insulating supporting seat, and described support base one end is fixed on bottom plate, separately One end is fixed on target platform disk bottom and is supported fixation;
    Described plasma generator includes radio-frequency power supply, central electrode and grid electrode;Set on described bottom plate some Group bearing outer ring coolant jacket, described bearing outer ring coolant jacket is interior to set aperture plate, and hollow tube is set in described aperture plate;Described Hollow tube passes through target platform disk and bottom plate, and described aperture plate is connected through target platform disk and with bottom plate;Described radio-frequency power supply one Connecting bottom board is held, is connected to form grid electrode with aperture plate indirectly, the shape if other end is connected with hollow tube of the tube wall provided with dry hole Into central electrode;
    Described ion acceleration component includes large power high voltage pulse power supply and target platform electrode, is fixed on the target of target platform disk lower end Platform electrode is connected through bottom plate with large power high voltage pulse power supply, and the large power high voltage pulse power supply other end is connected and connect with bottom plate Ground;
    Described air supply system is connected with the central electrode in application of vacuum room.
  2. A kind of 2. bearing outer ring ball track strengthening and processing device according to claim 1, it is characterised in that described supply system System includes steel cylinder, gas mass flow gauge, magnetic valve and mixing chamber, and several described gas mass flow gauge both ends connect respectively Magnetic valve is connect, the magnetic valve at both ends is connected with steel cylinder, mixing chamber respectively;Described mixing chamber and the middle electrocardio in application of vacuum room Pole connects.
  3. 3. a kind of bearing outer ring ball track strengthening and processing device according to claim 1, it is characterised in that at described vacuum Reason room also includes form and sheet lead cover, and described sheet lead cover is placed in outside bell jar and surrounds bell jar;Described form passes through sheet lead Cover and bell jar.
  4. 4. a kind of bearing outer ring ball track strengthening and processing device according to claim 1, it is characterised in that outside described bell jar Half range formula water channel cooling tube is set.
  5. 5. a kind of bearing outer ring ball track strengthening and processing device according to claim 1, it is characterised in that on described bottom plate It is provided with cooling oil inlet, cooling oil-out connects with coolant jacket.
  6. 6. a kind of bearing outer ring ball track strengthening and processing device according to any claim in claim 1 to 5, it is handled Method is:
    A, the bearing outer ring cleaned through ultrasonic wave is put into coolant jacket, is grid electrode and central electrode in bearing outer ring;
    B, starting rotary-vane vaccum pump, the atmospheric condition in application of vacuum room is extracted into 30Pa, turbomolecular pump is started working, Vacuum degree control in application of vacuum room is arrived(2-3)×10-4Pa;
    C, by the gas in steel cylinder, the ratio needed for is sent into mixing chamber, is re-fed into central electrode after mixing;Pass through central electrode On hole to being sent into mixed gas on the inside of bearing outer ring;
    D, radio-frequency power supply establishes radio frequency discharge nitrogen, carbon, argon plasma, and free electron fully absorbs radio frequency electrical in application of vacuum room The energy of field, has encouraged radio frequency discharge nitrogen, carbon, argon plasma;
    E, cooling is started;
    F, large power high voltage pulse power initiation, for providing negative high voltage pulsed bias to processed bearing outer ring, with implement from Son injection or thin film deposition process;
    G, reducing motor is started, driving gear drives power transmission shaft and then drives driver plate rotation, and bearing outer ring delays on target platform disk Slow to roll, bearing outer ring surface obtains more uniform implantation dosage;
    H, vacuum chamber recovers normal pressure, cooling.
CN201510493669.3A 2015-08-13 2015-08-13 A kind of bearing outer ring ball track strengthening and processing device and processing method Active CN105088164B (en)

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Publication number Priority date Publication date Assignee Title
CN106180079B (en) * 2016-07-07 2018-08-28 南京楚卿电子科技有限公司 A kind of Nitrogen trifluoride plasma washing equipment
CN110605668B (en) * 2019-09-29 2020-11-13 广州大学 Reinforced machining mechanism and equipment for machining bearing outer ring roller path

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CN1851041A (en) * 2006-05-19 2006-10-25 哈尔滨工业大学 Bearing outer ring ball track ion injection and deposition combined treatment method
CN101302606A (en) * 2007-05-11 2008-11-12 北京石油化工学院 Magnesium alloy surface strengthening method and apparatus
CN101365289A (en) * 2008-09-28 2009-02-11 哈尔滨工业大学 Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube
CN101525738A (en) * 2009-04-23 2009-09-09 哈尔滨工业大学 Internal surface ion implantation modification device and method of inductively coupled plasmatube barrel
CN205011830U (en) * 2015-08-13 2016-02-03 黄山迈瑞机械设备科技有限公司 Bearing inner race raceway strengthening treatment device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3555928B2 (en) * 1999-07-12 2004-08-18 独立行政法人産業技術総合研究所 Surface modification method and surface modification device
JP3834617B2 (en) * 2002-02-14 2006-10-18 独立行政法人産業技術総合研究所 Bearing ball coating method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1851041A (en) * 2006-05-19 2006-10-25 哈尔滨工业大学 Bearing outer ring ball track ion injection and deposition combined treatment method
CN101302606A (en) * 2007-05-11 2008-11-12 北京石油化工学院 Magnesium alloy surface strengthening method and apparatus
CN101365289A (en) * 2008-09-28 2009-02-11 哈尔滨工业大学 Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube
CN101525738A (en) * 2009-04-23 2009-09-09 哈尔滨工业大学 Internal surface ion implantation modification device and method of inductively coupled plasmatube barrel
CN205011830U (en) * 2015-08-13 2016-02-03 黄山迈瑞机械设备科技有限公司 Bearing inner race raceway strengthening treatment device

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Effective date of registration: 20171215

Address after: 245200 J06 block, Shexian Economic Development Zone, Anhui, Huangshan City, China

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