CN105088164B - A kind of bearing outer ring ball track strengthening and processing device and processing method - Google Patents
A kind of bearing outer ring ball track strengthening and processing device and processing method Download PDFInfo
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- CN105088164B CN105088164B CN201510493669.3A CN201510493669A CN105088164B CN 105088164 B CN105088164 B CN 105088164B CN 201510493669 A CN201510493669 A CN 201510493669A CN 105088164 B CN105088164 B CN 105088164B
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- outer ring
- bearing outer
- target platform
- bottom plate
- vacuum
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- 238000012545 processing Methods 0.000 title claims abstract description 34
- 238000005728 strengthening Methods 0.000 title claims abstract description 14
- 238000003672 processing method Methods 0.000 title abstract description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 18
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 12
- 239000010959 steel Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 9
- 230000001133 acceleration Effects 0.000 claims abstract description 8
- 229910052786 argon Inorganic materials 0.000 claims abstract description 8
- 238000005086 pumping Methods 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 6
- 238000000427 thin-film deposition Methods 0.000 claims abstract description 5
- 238000002513 implantation Methods 0.000 claims abstract description 4
- 238000001816 cooling Methods 0.000 claims description 19
- 239000007789 gas Substances 0.000 claims description 13
- 239000002826 coolant Substances 0.000 claims description 12
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 239000003574 free electron Substances 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000000977 initiatory effect Effects 0.000 claims description 3
- 230000001934 delay Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000003208 petroleum Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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- Plasma Technology (AREA)
Abstract
Description
Claims (6)
- A kind of 1. bearing outer ring ball track strengthening and processing device, it is characterised in that including vacuum processing chamber, fine pumping system, High pressure target platform, plasma generator, ion acceleration component and air supply system;Described vacuum processing chamber includes bell jar, bottom plate, and described bell jar is placed in above bottom plate;Described fine pumping system includes turbomolecular pump and rotary-vane vaccum pump, described vavuum pump and turbomolecular pump Connection, described turbomolecular pump suction inlet connect through bottom plate with vacuum processing chamber;Described high pressure target platform includes target platform disk and insulating supporting seat, and described support base one end is fixed on bottom plate, separately One end is fixed on target platform disk bottom and is supported fixation;Described plasma generator includes radio-frequency power supply, central electrode and grid electrode;Set on described bottom plate some Group bearing outer ring coolant jacket, described bearing outer ring coolant jacket is interior to set aperture plate, and hollow tube is set in described aperture plate;Described Hollow tube passes through target platform disk and bottom plate, and described aperture plate is connected through target platform disk and with bottom plate;Described radio-frequency power supply one Connecting bottom board is held, is connected to form grid electrode with aperture plate indirectly, the shape if other end is connected with hollow tube of the tube wall provided with dry hole Into central electrode;Described ion acceleration component includes large power high voltage pulse power supply and target platform electrode, is fixed on the target of target platform disk lower end Platform electrode is connected through bottom plate with large power high voltage pulse power supply, and the large power high voltage pulse power supply other end is connected and connect with bottom plate Ground;Described air supply system is connected with the central electrode in application of vacuum room.
- A kind of 2. bearing outer ring ball track strengthening and processing device according to claim 1, it is characterised in that described supply system System includes steel cylinder, gas mass flow gauge, magnetic valve and mixing chamber, and several described gas mass flow gauge both ends connect respectively Magnetic valve is connect, the magnetic valve at both ends is connected with steel cylinder, mixing chamber respectively;Described mixing chamber and the middle electrocardio in application of vacuum room Pole connects.
- 3. a kind of bearing outer ring ball track strengthening and processing device according to claim 1, it is characterised in that at described vacuum Reason room also includes form and sheet lead cover, and described sheet lead cover is placed in outside bell jar and surrounds bell jar;Described form passes through sheet lead Cover and bell jar.
- 4. a kind of bearing outer ring ball track strengthening and processing device according to claim 1, it is characterised in that outside described bell jar Half range formula water channel cooling tube is set.
- 5. a kind of bearing outer ring ball track strengthening and processing device according to claim 1, it is characterised in that on described bottom plate It is provided with cooling oil inlet, cooling oil-out connects with coolant jacket.
- 6. a kind of bearing outer ring ball track strengthening and processing device according to any claim in claim 1 to 5, it is handled Method is:A, the bearing outer ring cleaned through ultrasonic wave is put into coolant jacket, is grid electrode and central electrode in bearing outer ring;B, starting rotary-vane vaccum pump, the atmospheric condition in application of vacuum room is extracted into 30Pa, turbomolecular pump is started working, Vacuum degree control in application of vacuum room is arrived(2-3)×10-4Pa;C, by the gas in steel cylinder, the ratio needed for is sent into mixing chamber, is re-fed into central electrode after mixing;Pass through central electrode On hole to being sent into mixed gas on the inside of bearing outer ring;D, radio-frequency power supply establishes radio frequency discharge nitrogen, carbon, argon plasma, and free electron fully absorbs radio frequency electrical in application of vacuum room The energy of field, has encouraged radio frequency discharge nitrogen, carbon, argon plasma;E, cooling is started;F, large power high voltage pulse power initiation, for providing negative high voltage pulsed bias to processed bearing outer ring, with implement from Son injection or thin film deposition process;G, reducing motor is started, driving gear drives power transmission shaft and then drives driver plate rotation, and bearing outer ring delays on target platform disk Slow to roll, bearing outer ring surface obtains more uniform implantation dosage;H, vacuum chamber recovers normal pressure, cooling.
Priority Applications (1)
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CN201510493669.3A CN105088164B (en) | 2015-08-13 | 2015-08-13 | A kind of bearing outer ring ball track strengthening and processing device and processing method |
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CN201510493669.3A CN105088164B (en) | 2015-08-13 | 2015-08-13 | A kind of bearing outer ring ball track strengthening and processing device and processing method |
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CN105088164A CN105088164A (en) | 2015-11-25 |
CN105088164B true CN105088164B (en) | 2018-01-26 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106180079B (en) * | 2016-07-07 | 2018-08-28 | 南京楚卿电子科技有限公司 | A kind of Nitrogen trifluoride plasma washing equipment |
CN110605668B (en) * | 2019-09-29 | 2020-11-13 | 广州大学 | Reinforced machining mechanism and equipment for machining bearing outer ring roller path |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1851041A (en) * | 2006-05-19 | 2006-10-25 | 哈尔滨工业大学 | Bearing outer ring ball track ion injection and deposition combined treatment method |
CN101302606A (en) * | 2007-05-11 | 2008-11-12 | 北京石油化工学院 | Magnesium alloy surface strengthening method and apparatus |
CN101365289A (en) * | 2008-09-28 | 2009-02-11 | 哈尔滨工业大学 | Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube |
CN101525738A (en) * | 2009-04-23 | 2009-09-09 | 哈尔滨工业大学 | Internal surface ion implantation modification device and method of inductively coupled plasmatube barrel |
CN205011830U (en) * | 2015-08-13 | 2016-02-03 | 黄山迈瑞机械设备科技有限公司 | Bearing inner race raceway strengthening treatment device |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3555928B2 (en) * | 1999-07-12 | 2004-08-18 | 独立行政法人産業技術総合研究所 | Surface modification method and surface modification device |
JP3834617B2 (en) * | 2002-02-14 | 2006-10-18 | 独立行政法人産業技術総合研究所 | Bearing ball coating method |
-
2015
- 2015-08-13 CN CN201510493669.3A patent/CN105088164B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1851041A (en) * | 2006-05-19 | 2006-10-25 | 哈尔滨工业大学 | Bearing outer ring ball track ion injection and deposition combined treatment method |
CN101302606A (en) * | 2007-05-11 | 2008-11-12 | 北京石油化工学院 | Magnesium alloy surface strengthening method and apparatus |
CN101365289A (en) * | 2008-09-28 | 2009-02-11 | 哈尔滨工业大学 | Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube |
CN101525738A (en) * | 2009-04-23 | 2009-09-09 | 哈尔滨工业大学 | Internal surface ion implantation modification device and method of inductively coupled plasmatube barrel |
CN205011830U (en) * | 2015-08-13 | 2016-02-03 | 黄山迈瑞机械设备科技有限公司 | Bearing inner race raceway strengthening treatment device |
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Effective date of registration: 20171215 Address after: 245200 J06 block, Shexian Economic Development Zone, Anhui, Huangshan City, China Applicant after: HUANGSHAN MINGMINGDE BEARING Co.,Ltd. Address before: 245200 Shexian Economic Development Zone, Anhui, Huangshan City Applicant before: HUANGSHAN MAIRUI MACHINERY EQUIPMENT TECHNOLOGY Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
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Address after: 245200 J06 block, Shexian Economic Development Zone, Anhui, Huangshan City Patentee after: Huangshan mingmingde Group Co.,Ltd. Address before: 245200 J06 block, Shexian Economic Development Zone, Anhui, Huangshan City Patentee before: HUANGSHAN MINGMINGDE BEARING Co.,Ltd. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
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Denomination of invention: A device and method for strengthening raceway of bearing outer ring Effective date of registration: 20200903 Granted publication date: 20180126 Pledgee: Shexian Anhui rural commercial bank Limited by Share Ltd. Pledgor: Huangshan mingmingde Group Co.,Ltd. Registration number: Y2020980005659 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230818 Granted publication date: 20180126 Pledgee: Shexian Anhui rural commercial bank Limited by Share Ltd. Pledgor: Huangshan mingmingde Group Co.,Ltd. Registration number: Y2020980005659 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A device and method for strengthening the raceway of bearing outer ring Effective date of registration: 20230825 Granted publication date: 20180126 Pledgee: Shexian Anhui rural commercial bank Limited by Share Ltd. Pledgor: Huangshan mingmingde Group Co.,Ltd. Registration number: Y2023980053568 |