CN105070654A - 一种提高晶体硅太阳能电池效率的扩散工艺 - Google Patents
一种提高晶体硅太阳能电池效率的扩散工艺 Download PDFInfo
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- CN105070654A CN105070654A CN201510401290.5A CN201510401290A CN105070654A CN 105070654 A CN105070654 A CN 105070654A CN 201510401290 A CN201510401290 A CN 201510401290A CN 105070654 A CN105070654 A CN 105070654A
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 56
- 238000005516 engineering process Methods 0.000 title claims abstract description 21
- 229910021419 crystalline silicon Inorganic materials 0.000 title abstract 2
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 24
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 6
- 239000001301 oxygen Substances 0.000 claims abstract description 6
- 230000003647 oxidation Effects 0.000 claims description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 239000013078 crystal Substances 0.000 claims description 12
- 238000001816 cooling Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 230000000052 comparative effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 235000008216 herbs Nutrition 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 125000004437 phosphorous atom Chemical group 0.000 description 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910019213 POCl3 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000010307 cell transformation Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000013083 solar photovoltaic technology Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510401290.5A CN105070654B (zh) | 2015-07-10 | 2015-07-10 | 一种提高晶体硅太阳能电池效率的扩散工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510401290.5A CN105070654B (zh) | 2015-07-10 | 2015-07-10 | 一种提高晶体硅太阳能电池效率的扩散工艺 |
Publications (2)
Publication Number | Publication Date |
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CN105070654A true CN105070654A (zh) | 2015-11-18 |
CN105070654B CN105070654B (zh) | 2018-02-13 |
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CN201510401290.5A Active CN105070654B (zh) | 2015-07-10 | 2015-07-10 | 一种提高晶体硅太阳能电池效率的扩散工艺 |
Country Status (1)
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CN (1) | CN105070654B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107681018A (zh) * | 2017-09-14 | 2018-02-09 | 横店集团东磁股份有限公司 | 一种太阳能电池片的低压氧化工艺 |
CN112582499A (zh) * | 2020-11-30 | 2021-03-30 | 中建材浚鑫科技有限公司 | 一种适用于多主栅搭配大尺寸硅片的扩散工艺 |
CN115172518A (zh) * | 2022-07-08 | 2022-10-11 | 酒泉正泰新能源科技有限公司 | 一种太阳能电池的多次氧化扩散方法、制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4589191A (en) * | 1983-10-20 | 1986-05-20 | Unisearch Limited | Manufacture of high efficiency solar cells |
CN102732967A (zh) * | 2012-06-01 | 2012-10-17 | 上饶光电高科技有限公司 | 一种选择性发射极晶体硅太阳电池的磷浆扩散工艺 |
CN104299896A (zh) * | 2013-07-18 | 2015-01-21 | 北京中科信电子装备有限公司 | 一种多步推进扩散工艺 |
CN104319308A (zh) * | 2014-09-16 | 2015-01-28 | 上饶光电高科技有限公司 | 一种提高晶体硅太阳能电池扩散均匀性的方法 |
-
2015
- 2015-07-10 CN CN201510401290.5A patent/CN105070654B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4589191A (en) * | 1983-10-20 | 1986-05-20 | Unisearch Limited | Manufacture of high efficiency solar cells |
CN102732967A (zh) * | 2012-06-01 | 2012-10-17 | 上饶光电高科技有限公司 | 一种选择性发射极晶体硅太阳电池的磷浆扩散工艺 |
CN104299896A (zh) * | 2013-07-18 | 2015-01-21 | 北京中科信电子装备有限公司 | 一种多步推进扩散工艺 |
CN104319308A (zh) * | 2014-09-16 | 2015-01-28 | 上饶光电高科技有限公司 | 一种提高晶体硅太阳能电池扩散均匀性的方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107681018A (zh) * | 2017-09-14 | 2018-02-09 | 横店集团东磁股份有限公司 | 一种太阳能电池片的低压氧化工艺 |
CN112582499A (zh) * | 2020-11-30 | 2021-03-30 | 中建材浚鑫科技有限公司 | 一种适用于多主栅搭配大尺寸硅片的扩散工艺 |
CN112582499B (zh) * | 2020-11-30 | 2022-09-23 | 中建材浚鑫科技有限公司 | 一种适用于多主栅搭配大尺寸硅片的扩散工艺 |
CN115172518A (zh) * | 2022-07-08 | 2022-10-11 | 酒泉正泰新能源科技有限公司 | 一种太阳能电池的多次氧化扩散方法、制备方法 |
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Publication number | Publication date |
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CN105070654B (zh) | 2018-02-13 |
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Address after: 334100 Shangrao City Economic Development Zone, Jiangxi Patentee after: JIANGXI ZHANYU NEW ENERGY CO., LTD. Address before: 334100 Shangrao City Economic Development Zone, Jiangxi Patentee before: SRPV High-tech Co.,Ltd. |
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Denomination of invention: Diffusion technology capable of improving the efficiency of a crystalline silicon solar cell Effective date of registration: 20190822 Granted publication date: 20180213 Pledgee: Shangrao Branch of Jiujiang Bank Co., Ltd. Pledgor: JIANGXI ZHANYU NEW ENERGY CO., LTD. Registration number: Y2019360000006 |
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Date of cancellation: 20200724 Granted publication date: 20180213 Pledgee: Shangrao Branch of Jiujiang Bank Co.,Ltd. Pledgor: JIANGXI UNIEX NEW ENERGY Co.,Ltd. Registration number: Y2019360000006 |
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Effective date of registration: 20210120 Address after: No.8 Xingye Avenue, Shangrao economic and Technological Development Zone, Jiangxi Province 334100 Patentee after: Shangrao Jietai New Energy Technology Co., Ltd Address before: 334100 Shangrao City Economic Development Zone, Jiangxi Patentee before: JIANGXI UNIEX NEW ENERGY Co.,Ltd. |