CN104992922B - One kind diffuses into automatic push-pull boat system and device of coming out of the stove - Google Patents
One kind diffuses into automatic push-pull boat system and device of coming out of the stove Download PDFInfo
- Publication number
- CN104992922B CN104992922B CN201510455274.4A CN201510455274A CN104992922B CN 104992922 B CN104992922 B CN 104992922B CN 201510455274 A CN201510455274 A CN 201510455274A CN 104992922 B CN104992922 B CN 104992922B
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- Prior art keywords
- slide
- pull bar
- mechanical arm
- sliding block
- stove
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
Automatic push-pull boat system and device of coming out of the stove is diffused into the present invention relates to one kind.It includes diffusion furnace, slide, buncher, sliding block, screw mandrel, mechanical arm, pull bar, manipulator, diffusion furnace side is equipped with slide, slide is built with sliding block, sliding block is built with screw mandrel, screw mandrel one end is equipped with buncher, pull bar is housed on the outside of slide, pull bar one end passes through round pin connection sliding block upper end, for the pull bar other end through guide wheel support connection mechanical arm, mechanical arm lower end connects manipulator；Slide upper end left side senses light idol equipped with the first stopping, and slide upper end right side senses light idol equipped with the second stopping, and the first stopping sensing light occasionally answers light idol at the 10cm of right side equipped with sense of slowing down, and pull bar right-hand member is fitted with sensor block.Advantage is simple and convenient, at the uniform velocity controls article to enter diffusion furnace by the present apparatus, ensures that chip internal-external temperature difference during entering to come out of the stove is smaller, reduces thermal stress, silicon chip fragment is few after diffusion, and junction is linearly good, and junction depth uniformity is good.
Description
Technical field
The present invention relates to chip in diffusion furnace to enter field of locating technology of coming out of the stove automatically, and in particular to one kind, which diffuses into, comes out of the stove certainly
Dynamic push-and-pull boat system and device.
Background technology
The chip for having applied impurity source is that can not form the PN junction needed for semiconductor devices at normal temperatures, it is necessary to is placed in diffusion
Stove is diffused at high temperature.Chip quartz hooked hand is moved and delivers to diffusion furnace flat-temperature zone, chip rate travel is uneven, silicon chip
Deformation is also easy to produce, causes after diffusion that fragment is more during silicon chip flake, while silicon chip junction out-of-flatness after spreading, junction depth are uneven
One.
The content of the invention
In order to solve the above problems, the present invention proposes one kind and diffuses into automatic push-pull boat system and device of coming out of the stove, design letter
It is single, it is easy to use, ensure that chip internal-external temperature difference during entering to come out of the stove is smaller, be advantageous to reduce thermal stress, silicon chip is broken after diffusion
Piece is few, and junction is linearly good, and junction depth uniformity is good.
In order to reach foregoing invention purpose, the present invention proposes following technical scheme：
One kind diffuses into automatic push-pull boat system and device of coming out of the stove, and it includes diffusion furnace, slide, buncher, sliding block, silk
Bar, mechanical arm, pull bar, manipulator, it is characterized in that diffusion furnace side is equipped with slide, slide built with sliding block, sliding block built with
Screw mandrel, screw mandrel one end are equipped with buncher, and pull bar is housed on the outside of slide, pull bar one end by round pin connection sliding block upper end,
For the pull bar other end through guide wheel support connection mechanical arm, mechanical arm lower end connects manipulator；First is equipped with the left of slide upper end
Stop sensing light idol, stop sensing light idol equipped with second on the right side of slide upper end, first stops being equipped with the even right side 10cm of sensing light
Sense of slowing down answers light even, and pull bar right-hand member is fitted with sensor block.
Described guide wheel support includes support and guide wheel, and support is located on the left of slide mounted in diffusion furnace side, internal stent
Oblong channel is designed, channel interior top and bottom are respectively provided with guide wheel, V-type annular groove is provided among guide wheel.
Described pull bar is square steel pole.
Described manipulator includes pin rod, lock-screw, geometrical clamp, activity folder, screw and rubber blanket, pin rod one end and run through
Mechanical arm lower end, lock-screw, which screws, is fixed and clamped pin rod mounted in mechanical arm bottom, pin rod other end connection fixing clamp, fixed
Folder is L-type shape, and geometrical clamp upper end presss from both sides equipped with activity, and screw runs through from geometrical clamp lower end and in upper end screw-in activity folder, activity folder
V-type jaws is all provided with geometrical clamp inner side, rubber blanket is housed on the inside of V-type jaws.
It is an advantage of the invention that design is simple, and it is easy to use, it can at the uniform velocity control article to enter diffusion furnace by the present apparatus,
Ensure that chip internal-external temperature difference during entering to come out of the stove is smaller, be advantageous to reduce thermal stress, silicon chip fragment is few after diffusion, and junction line
Property is good, and junction depth uniformity is good.
Brief description of the drawings
Fig. 1 is the schematic elevation view of the present invention.
Fig. 2 is the schematic side view of the present invention.
Embodiment
In order to further instruction of the present invention, be introduced with reference to Figure of description：
Referring to the drawings, one kind diffuses into automatic push-pull boat system and device of coming out of the stove, and it includes diffusion furnace 1, slide 2, speed governing electricity
Machine 3, sliding block 4, screw mandrel 5, mechanical arm 6, pull bar 7, manipulator 8, the side of diffusion furnace 1 are equipped with slide 2, and slide 2 is built with sliding block
4, for sliding block 4 built with screw mandrel 5, the one end of screw mandrel 5 is equipped with buncher 3, and the outside of slide 2 is equipped with pull bar 7, and the one end of pull bar 7 leads to
The upper end of 9 connection sliding block of round pin 4 is crossed, for the other end of pull bar 7 through the connection mechanical arm 6 of guide wheel support 10, the lower end of mechanical arm 6 connects machine
Tool hand 8；First stopping sensing light even 11 is housed on the left of the upper end of slide 2, the second stopping sensing light is housed even on the right side of the upper end of slide 2
13, first stops answering light even 12 equipped with sense of slowing down at the even 11 right side 10cm of sensing light, and the right-hand member of pull bar 7 is fitted with sensor block
14。
Described guide wheel support 10 includes support and guide wheel 15, and support is located at the left side of slide 2, branch mounted in the side of diffusion furnace 1
Frame indoor design oblong channel, channel interior top and bottom are respectively provided with guide wheel 15, V-type annular groove are provided among guide wheel 15.
Described pull bar 7 is square steel pole.
Described manipulator 8 includes pin rod 81, lock-screw 82, geometrical clamp 83, activity folder 84, screw 85 and rubber blanket,
The lower end of mechanical arm 6 is run through in the one end of pin rod 81, and lock-screw 82, which screws, is fixed and clamped pin rod 81 mounted in the bottom of mechanical arm 6, pin rod
81 other end connection fixing clamps 83, geometrical clamp 83 are L-type shapes, and the upper end of geometrical clamp 83 is equipped with activity folder 84, and screw 85 is from geometrical clamp
83 lower ends are run through and in upper end screw-in activity folders 84, and activity is pressed from both sides and V-type jaws is all provided with the inside of 84 and geometrical clamp 83, in V-type jaws
Side is equipped with rubber blanket.
The present invention's clamps in use, quartz is hooked by manipulator, and quartz hooks the other end and just catches on push-and-pull boat, starts this
Device, run in buncher and drive screw mandrel rotation, screw mandrel rotating band movable slider moves in slide, and sliding block drives pull bar to move
It is dynamic, pull bar driving mechanical arm, mechanical arm driving mechanical hand, spread so as to which manipulator at the uniform velocity enters according to the speed of service of design
In stove, when the sensor block of pull bar outboard end, which reaches second, stops sensing light idol lower end, buncher stops, and at this moment illustrates
Product has also been completed to spread in push-and-pull boat, and buncher reversion, first quick rotation, makes push-and-pull boat quickly toward pulling back, work as push-and-pull
Bar outboard end sensor block is decelerated sensing light and occasionally senses that buncher reduces speed now operation, and push-and-pull boat then reduces speed now drawing
Go out, when the sensor block on pull bar by first stop sense light occasionally detect that buncher will stop, now push-and-pull boat also by
Pull out；The present apparatus is installed on diffusion furnace side, manipulator (be used to clamp into hearthstone English and hook), the other end are loaded onto by fire door one end
Buncher is connected, adjustment motor lead-out wire connects speed setting controller (controlling into speed of coming out of the stove), and speed setting controller is installed on diffusion
On furnace controller panel.Then two light idols are fixed in present apparatus correspondence position, sticks on a square magnet, magnet is suddenly felt with light
Should, with control machinery arm stroke, ensure that silicon boat is placed in into flat-temperature zone center when mechanical arm pushes away boat.PN spreads fragment number by every
Batch (total amount 500) 3.5 is reduced to 1.2；Silicon chip junction is more smooth homogeneous after aobvious knot.Enter the δ xj=xj that come out of the stove manuallymax-
xjmin=4.5 μm；Automatic manipulator enters to come out of the stove, and (XJ tests take at 3 points to δ xj=xjmax-xjmin=1.6 μm, and δ xj are maximums
Subtract minimum value.
Claims (3)
1. one kind diffuses into automatic push-pull boat system and device of coming out of the stove, it include diffusion furnace, slide, buncher, sliding block, screw mandrel,
Mechanical arm, pull bar, manipulator, it is characterized in that diffusion furnace side is equipped with slide, slide is built with sliding block, and sliding block is built with silk
Bar, screw mandrel one end are equipped with buncher, pull bar are housed on the outside of slide, pull bar one end is pushed away by round pin connection sliding block upper end
For the pull bar other end through guide wheel support connection mechanical arm, mechanical arm lower end connects manipulator；Stop on the left of slide upper end equipped with first
Only sense light idol, slide upper end right side stops sensing light idol equipped with second, is equipped with and subtracts at the first even right side 10cm of stopping sensing light
Speed sensing light is even, and pull bar right-hand member is fitted with sensor block；Described manipulator includes pin rod, lock-screw, geometrical clamp, activity
Mechanical arm lower end is run through in folder, screw and rubber blanket, pin rod one end, and lock-screw is screwed to fix pin rod mounted in mechanical arm bottom and pressed
Tightly, pin rod other end connection fixing clamp, geometrical clamp are L-type shapes, and geometrical clamp upper end presss from both sides equipped with activity, and screw passes through from geometrical clamp lower end
Wear and in upper end screw-in activity folder, V-type jaws is all provided with the inside of activity folder and geometrical clamp, rubber blanket is housed on the inside of V-type jaws.
2. one kind according to claim 1 diffuses into automatic push-pull boat system and device of coming out of the stove, it is characterized in that described guide wheel
Support includes support and guide wheel, and support is located on the left of slide mounted in diffusion furnace side, internal stent design oblong channel, passage
Inner upper end and lower end are respectively provided with guide wheel, and V-type annular groove is provided among guide wheel.
3. one kind according to claim 1 diffuses into automatic push-pull boat system and device of coming out of the stove, it is characterized in that described push-and-pull
Bar is square steel pole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510455274.4A CN104992922B (en) | 2015-07-30 | 2015-07-30 | One kind diffuses into automatic push-pull boat system and device of coming out of the stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510455274.4A CN104992922B (en) | 2015-07-30 | 2015-07-30 | One kind diffuses into automatic push-pull boat system and device of coming out of the stove |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104992922A CN104992922A (en) | 2015-10-21 |
| CN104992922B true CN104992922B (en) | 2018-03-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510455274.4A Active CN104992922B (en) | 2015-07-30 | 2015-07-30 | One kind diffuses into automatic push-pull boat system and device of coming out of the stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104992922B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102061456A (en) * | 2010-10-29 | 2011-05-18 | 华南理工大学 | Cantilever-type push-pull boat system for plasma enhanced chemical vapor deposition (PECVD) device |
| CN202380132U (en) * | 2011-12-07 | 2012-08-15 | 深圳市捷佳伟创新能源装备股份有限公司 | Automatic lateral in-out boat device of diffusion furnace |
| CN103231898A (en) * | 2012-08-21 | 2013-08-07 | 深圳市捷佳伟创新能源装备股份有限公司 | Lateral embark and disembark device |
| CN104538328A (en) * | 2014-11-26 | 2015-04-22 | 北京七星华创电子股份有限公司 | Silicon wafer vacuum adsorption manipulator |
| CN204966475U (en) * | 2015-07-30 | 2016-01-13 | 南通皋鑫电子股份有限公司 | Automatic push -and -pull boat system device of diffusion business turn over stove |
-
2015
- 2015-07-30 CN CN201510455274.4A patent/CN104992922B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102061456A (en) * | 2010-10-29 | 2011-05-18 | 华南理工大学 | Cantilever-type push-pull boat system for plasma enhanced chemical vapor deposition (PECVD) device |
| CN202380132U (en) * | 2011-12-07 | 2012-08-15 | 深圳市捷佳伟创新能源装备股份有限公司 | Automatic lateral in-out boat device of diffusion furnace |
| CN103231898A (en) * | 2012-08-21 | 2013-08-07 | 深圳市捷佳伟创新能源装备股份有限公司 | Lateral embark and disembark device |
| CN104538328A (en) * | 2014-11-26 | 2015-04-22 | 北京七星华创电子股份有限公司 | Silicon wafer vacuum adsorption manipulator |
| CN204966475U (en) * | 2015-07-30 | 2016-01-13 | 南通皋鑫电子股份有限公司 | Automatic push -and -pull boat system device of diffusion business turn over stove |
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| Publication number | Publication date |
|---|---|
| CN104992922A (en) | 2015-10-21 |
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Effective date of registration: 20210903 Address after: 226503 No. 82, Zhongshan West Road, Rucheng street, Rugao City, Nantong City, Jiangsu Province Patentee after: Jiangsu Gaoxin Electronics Co.,Ltd. Address before: 226500 No.82, Zhongshan West Road, Rucheng, Rugao, Nantong, Jiangsu Province Patentee before: NANTONG GAOXIN ELECTRONICS Co.,Ltd. |
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