CN202380132U - Automatic lateral in-out boat device of diffusion furnace - Google Patents
Automatic lateral in-out boat device of diffusion furnace Download PDFInfo
- Publication number
- CN202380132U CN202380132U CN2011205037841U CN201120503784U CN202380132U CN 202380132 U CN202380132 U CN 202380132U CN 2011205037841 U CN2011205037841 U CN 2011205037841U CN 201120503784 U CN201120503784 U CN 201120503784U CN 202380132 U CN202380132 U CN 202380132U
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- permanent seat
- boat device
- carriage
- slide block
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses an automatic lateral in-out boat device of a diffusion furnace. The automatic lateral in-out boat device comprises a support frame (1), a linear guide rail (2) fixed on the support frame, a slide block (4) sleeved on the linear guide rail, a bracket fixing seat (6) fixed above the slide block, a stepping motor (3) fixed on the support frame, a transmission belt (5) connected with the bracket fixing seat and the stepping motor, a railboat bracket (7) fixed above the bracket fixing seat, spacing sensors fixed on the bracket fixing seat and the support frame, and a controller for receiving position signals of the spacing sensors to control the on/off of the stepping motor. The automatic lateral in-out boat device has the advantages as follows: the conveying is accurate and has a small error; the degree of automation is high; personnel only needs to monitor and control the working process rather than directly touch silicon chips, so that the health and the safety of the personnel are protected; and various failure alarming modes are set to monitor the automatic running state of the equipment and protect the safety of the equipment. The automatic lateral in-out boat device fills a gap in technology, leads the industry trend, and has a wide market prospect.
Description
Technical field
The utility model relates to the solar battery sheet production equipment, relates in particular to the side direction turnover boat device that transmits solar battery sheet to diffusion furnace.
Background technology
Because the progressively attention that countries in the world utilize renewable and clean energy resource, the photovoltaic industry has obtained develop rapidly.According to the prediction of European JRC, to the year two thousand thirty renewable energy source in the total energy structure, account for more than 3 0%, solar energy power generating reaches more than 10% in the supply of world's total electricity; The year two thousand forty, renewable energy source accounted for total energy consumption more than 50%, and solar energy power generating will account for more than 20% of total electricity; To 21 century Mo renewable energy source in energy structure, account for more than 80%, solar electrical energy generation accounts for more than 60%.
Diffuseing to form the P-N knot is the critical process of solar battery sheet.Diffusion furnace is one of substantial equipment of solar battery sheet production.In diffusion technique, introduce the gas that toxic elements in human body is done harm to and produce toxic tail gas, can cause great harm human body.Under the condition that guarantees technology, set up the solar battery sheet automatic production line, improve automation degree of equipment, reduce artificial intervention to equipment, be the major objective of device fabrication producer.
The diffusion furnace that present domestic solar battery sheet producer uses mainly is an import equipment, all is furnished with automatic side direction turnover boat device, and just structure and mode are different.Home equipment does not have relevant configuration at present, and import equipment exists complete machine and parts price high, problems such as inconvenient maintenance.Break the technology barriers of overseas equipment, development and production are with low cost, and are reliable, and side direction turnover boat device easy to maintenance is the technical problem that needs to be resolved hurrily in the industry.
The utility model content
The utility model is the problems referred to above that will solve prior art, and it is high to propose a kind of level of automation, safe and reliable, the automatic side direction turnover of the diffusion furnace of being convenient to safeguard with low cost boat device.
For solving the problems of the technologies described above; The technical scheme that the utility model proposes is the automatic side direction turnover of a kind of diffusion furnace of a design boat device, and it comprises: bracing frame, be fixed on line slideway on the supporting rack, be enclosed within slide block on the line slideway, be fixed on the slide block top the carriage permanent seat, be fixed on the bracing frame and be in line slideway one end stepper-motor, connect the unit of transmission belt, the quartz boat carriage that is fixed on carriage permanent seat top, the limit sensors that is fixed on the perception carriage permanent seat moving limit position on carriage permanent seat and the bracing frame, reception limit sensors position signal and the start and stop of control step motor that move back and forth along line slideway in order to driven bracket permanent seat and slide block of carriage permanent seat and stepper-motor.
Described transmitter comprises the shade that is fixed on the carriage permanent seat, first photo-sensor that is separately fixed at the bracing frame two ends and second photo-sensor, and the shading when shade closes on of first and second photo-sensor triggers to said unit sends position signal.
It is little that the utility model transmits accurate error, and level of automation is high, and working process only needs personnel to keep watch on control, need not directly to contact silicon chip, has protected personnel health's safety; The various faults alarm mode is set, the automatic running status of watch-dog, the safety of protection equipment.The utility model is filled up technological vacancy and is led industry dynamics, has vast market prospect.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is made detailed explanation, wherein:
Fig. 1 is the use synoptic diagram of the utility model preferred embodiment;
Fig. 2 is the side-view of the utility model preferred embodiment;
Fig. 3 is the vertical view of the utility model preferred embodiment.
Embodiment
The utility model has disclosed the automatic side direction turnover of a kind of diffusion furnace boat device, needs to get the supporting use of sheet machine with automatic inserted sheet, and be to send the robotization of getting boat connecting device for the diffusion furnace loading and unloading automatically.Fig. 1 shows the position relation of diffusion furnace and side direction turnover boat device; Whole process flow is: inserted sheet is got the sheet machine and is the quartz boat inserted sheet automatically; Quartz boat behind the inserted sheet is placed on the side direction turnover boat device automatically, and side direction turnover boat device grasps the position with the mechanical manipulator that quartz boat is sent to diffusion furnace (icon 10 indications); Battery sheet in 10 pairs of quartz boats of diffusion furnace carries out DIFFUSION TREATMENT, and the mechanical manipulator of the back diffusion furnace 10 that disposes is placed on quartz boat and grasps on the position; Side direction turnover boat device shifts out quartz boat, and inserted sheet is got the sheet machine and got sheet automatically.So far, side direction turnover boat device is accomplished the work of one-period.
Referring to Fig. 2, the utility model comprises: bracing frame 1, be fixed on line slideway 2 on the supporting rack, be enclosed within slide block 4 on the line slideway, be fixed on the slide block top carriage permanent seat 6, be fixed on the bracing frame and be in line slideway one end stepper-motor 3, connect carriage permanent seat and stepper-motor transmission belt 5, be fixed on carriage permanent seat top quartz boat carriage 7, be fixed on the limit sensors of the perception carriage permanent seat moving limit position on carriage permanent seat and the bracing frame, the unit that enforcement is controlled to this device.Getting the advance stove process of sheet machine after the quartz boat inserted sheet finishes when automatic inserted sheet is: the unit drive stepping motor is just changeed; Stepper-motor drives transmission belt 5 and is moved to the left; Transmission belt 5 drives the carriage permanent seat and slide block is moved to the left along line slideway, and when arriving predeterminated position (mechanical manipulator grasps the position), limit sensors sends the position signal that expression arrives the stove position to unit; The stall of unit drive stepping motor, the material loading action is accomplished.The process of coming out of the stove after battery sheet in 10 pairs of quartz boats of diffusion furnace disposes is: the counter-rotating of unit drive stepping motor; Stepper-motor drives transmission belt 5 and moves right; Transmission belt 5 drives the carriage permanent seat and slide block moves right along line slideway, and when arriving predeterminated position (inserted sheet is got sheet machine working position automatically), limit sensors sends the position signal that expression arrives the position of coming out of the stove to unit; The stall of unit drive stepping motor, blanking action is accomplished.
Vertical view referring to the preferred embodiment shown in Fig. 3; Transmitter comprises the shade 8 that is fixed on the carriage permanent seat 6, first photo-sensor 9 and second photo-sensor that is separately fixed at the bracing frame two ends; Photo-sensor has emitting head and receives head; When shade inserted emitting head and receives between the head, photo-sensor triggered, and sends position signal to unit.In this example, first photo-sensor 9 is installed in the position of coming out of the stove, and second photo-sensor is installed in into stove position (not drawing among the figure); In this example, about shade 8 is divided into two, the shade 8 on the left side is in order to trigger second photo-sensor, and the shade 8 on the right is in order to trigger first photo-sensor 9.
Through detecting, detected result is following:
1. use size quartz boat less than normal, turnover boat continuous movement 120 times, boat bit error ± 0.07mm;
2. use size quartz boat bigger than normal, subjective error ± 0.08mm is sent in turnover boat continuous movement 120 times;
3. the continuous movement of turnover boat is 10000 times: do not break down, and report to the police;
4. fault test: accident is blocked; Unusual in the safety zone; The boat position is not just; Driving member is thrown off; Warning all to be detected, and open protection on request.
This shows that the control accuracy and the failure rate of device operation reach design requirements basically, satisfy the production needs, the stabilization of equipment performance safety is higher, meets the requirement of level of automation.Equipment failure protection response is sensitive, effectively guarantor person and device security.Get the sheet machine with automatic inserted sheet and dock well, form automatic production line.
Above embodiment is merely and illustrates, non-providing constraints.Anyly do not break away from the application's spirit and category, and, all should be contained among the application's the claim scope its equivalent modifications of carrying out or change.
Claims (2)
1. the automatic side direction turnover of diffusion furnace boat device is characterized in that comprising: bracing frame (1), be fixed on line slideway (2) on the supporting rack, be enclosed within slide block (4) on the line slideway, be fixed on the slide block top carriage permanent seat (6), be fixed on the bracing frame and be in line slideway one end stepper-motor (3), connect the unit of transmission belt (5), the quartz boat carriage (7) that is fixed on carriage permanent seat top, the limit sensors that is fixed on the perception carriage permanent seat moving limit position on carriage permanent seat and the bracing frame, reception limit sensors position signal and the start and stop of control step motor that move back and forth along line slideway in order to driven bracket permanent seat and slide block of carriage permanent seat and stepper-motor.
2. the automatic side direction turnover of diffusion furnace as claimed in claim 1 boat device; It is characterized in that: described transmitter comprises the shade (8) that is fixed on the carriage permanent seat (6), first photo-sensor (9) and second photo-sensor that is separately fixed at the bracing frame two ends, and the shading when shade closes on of first and second photo-sensor triggers to said unit sends position signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205037841U CN202380132U (en) | 2011-12-07 | 2011-12-07 | Automatic lateral in-out boat device of diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205037841U CN202380132U (en) | 2011-12-07 | 2011-12-07 | Automatic lateral in-out boat device of diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202380132U true CN202380132U (en) | 2012-08-15 |
Family
ID=46628649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205037841U Expired - Lifetime CN202380132U (en) | 2011-12-07 | 2011-12-07 | Automatic lateral in-out boat device of diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202380132U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257209A (en) * | 2013-05-13 | 2013-08-21 | 中国电子科技集团公司第四十八研究所 | Air flow uniformity detection device of diffusion furnace |
| CN103451740A (en) * | 2013-08-30 | 2013-12-18 | 深圳市捷佳伟创新能源装备股份有限公司 | Boat feeding mechanism of LED (Light Emitting Diode) alloy furnace |
| CN104992922A (en) * | 2015-07-30 | 2015-10-21 | 南通皋鑫电子股份有限公司 | Diffusion entry-exit furnace automatic push-and-pull boat system apparatus |
| WO2018036488A1 (en) * | 2016-08-25 | 2018-03-01 | 深圳市捷佳伟创新能源装备股份有限公司 | Graphite boat transport mechanism used in pecvd apparatus |
-
2011
- 2011-12-07 CN CN2011205037841U patent/CN202380132U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257209A (en) * | 2013-05-13 | 2013-08-21 | 中国电子科技集团公司第四十八研究所 | Air flow uniformity detection device of diffusion furnace |
| CN103257209B (en) * | 2013-05-13 | 2015-07-01 | 中国电子科技集团公司第四十八研究所 | Air flow uniformity detection device of diffusion furnace |
| CN103451740A (en) * | 2013-08-30 | 2013-12-18 | 深圳市捷佳伟创新能源装备股份有限公司 | Boat feeding mechanism of LED (Light Emitting Diode) alloy furnace |
| CN103451740B (en) * | 2013-08-30 | 2016-02-17 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of LED alloying furnace Jin Zhou mechanism |
| CN104992922A (en) * | 2015-07-30 | 2015-10-21 | 南通皋鑫电子股份有限公司 | Diffusion entry-exit furnace automatic push-and-pull boat system apparatus |
| CN104992922B (en) * | 2015-07-30 | 2018-03-13 | 南通皋鑫电子股份有限公司 | One kind diffuses into automatic push-pull boat system and device of coming out of the stove |
| WO2018036488A1 (en) * | 2016-08-25 | 2018-03-01 | 深圳市捷佳伟创新能源装备股份有限公司 | Graphite boat transport mechanism used in pecvd apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120815 |
|
| CX01 | Expiry of patent term |