CN104985241B - A kind of one-dimensional vibrating device based on piezoelectric ceramic piece inverse piezoelectric effect - Google Patents
A kind of one-dimensional vibrating device based on piezoelectric ceramic piece inverse piezoelectric effect Download PDFInfo
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- CN104985241B CN104985241B CN201510248325.6A CN201510248325A CN104985241B CN 104985241 B CN104985241 B CN 104985241B CN 201510248325 A CN201510248325 A CN 201510248325A CN 104985241 B CN104985241 B CN 104985241B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C9/00—Details or accessories so far as specially adapted to milling machines or cutter
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2250/00—Compensating adverse effects during milling
- B23C2250/16—Damping vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
- B23C3/13—Surface milling of plates, sheets or strips
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Abstract
A kind of one-dimensional vibrating device based on piezoelectric ceramic piece inverse piezoelectric effect, it belongs to the technical field of energy Aided Machine processing.It is that frequency is non-adjustable that it is the characteristics of one-dimensional vibrating device used has resonance type vibration in order to solve during thin-walled micro structures processing in existing High Accuracy Inertial sensor, and the problem that knife mark is mixed and disorderly, deep mixed and residual stress is big.Its first bolt be connected with the screwed hole screw threads for fastening of workbench right plate through after the through hole of workbench left plate, left side the first piezoelectric ceramics ring group, the through hole of vibration table, right side the first piezoelectric ceramics ring group and the first spheric washer, and the second bolt is connected with the screwed hole screw threads for fastening of workbench right plate after passing through through hole, left side the second piezoelectric ceramics ring group, the through hole of vibration table, right side the second piezoelectric ceramics ring group and second spheric washer of workbench left plate.Present invention utilizes the inverse piezoelectric effect of piezoelectric ceramics, promotes vibration table to move to a direction, and the frequency vibrated can be adjusted.
Description
Technical field
The invention belongs to the technical field of energy Aided Machine processing.
Background technology
Thin-walled micro structures are the core components in High Accuracy Inertial sensor, and its crudy directly affects navigation accuracy,
As its characteristic size is micron order, reasonable method is exactly to be processed using the processing mode of minuteness milling at present, but
It is that due to minuteness milling process, the rigidity of cutting tool is very low in the actual course of processing, working angles are complicated, it is conventional micro-
In the processing mode of milling, tool wear is serious, directly contributes that machined surface quality is poor, and yield rate ground is low, and vibration aids in micro- milling
Can the regeneration chatter that produced in working angles can be very good to suppress, prolongation of the vibrocutting to cutter life in addition
Also there is certain effect, have good improvement result to machined surface quality and residual stress, thus there is important research meaning.
Existing one-dimensional vibrating device mainly includes that resonance type vibration and disresonance type vibrate.The characteristics of resonance type vibration is
Frequency is non-adjustable, and the change of vibration processes medium velocity moment, therefore use occasion is very limited, and being applied to, vibration is auxiliary
When helping cutting, machined surface quality is poor, and the knife mark of formation is mixed and disorderly, and deep mixed, residual stress is big.
The content of the invention
It is an object of the invention to provide a kind of one-dimensional vibrating device based on piezoelectric ceramic piece inverse piezoelectric effect, is to understand
When in certainly existing High Accuracy Inertial sensor, thin-walled micro structures are processed, there is the spy of resonance type vibration in one-dimensional vibrating device used
Point is that frequency is non-adjustable, and the change of vibration processes medium velocity moment, and knife mark is mixed and disorderly, deep mixed and residual stress is big asks
Topic.
Described purpose is realized by below scheme：It is described it is a kind of based on piezoelectric ceramic piece inverse piezoelectric effect one
Dimension vibrating device, it includes the first piezoelectric ceramics ring group 1 of left side, left side the second piezoelectric ceramics ring group 2, the first piezoelectric ceramics of right side
Ring group 3, right side the second piezoelectric ceramics ring group 4, the first spheric washer 5, the second spheric washer 6, vibration table 7, the first bolt 8,
Two bolts 9, wedge motion block 10, workbench left plate 11, workbench right plate 12, workbench base plate 13, wedge determine block 14；
Between on the left surface of workbench left plate 11 and on right flank, horizontal row shows two 11- of one 11-1 of through hole and through hole
2, on the left surface of workbench right plate 12 and on right flank between horizontal row show two 12-2 of two 12-1 of screwed hole and screwed hole,
Between on the left surface of vibration table 7 and on right flank, horizontal row shows through hole 7-1 and through hole 7-2, and the upper surface of vibration table 7 is provided with
For the groove 7-3 of clamping workpiece to be machined 15, through hole one 11-1, left side first of first bolt 8 through workbench left plate 11
With workbench after piezoelectric ceramics ring group 1, the through hole 7-1 of vibration table 7, right side the first piezoelectric ceramics ring group 3 and the first spheric washer 5
Two 12-1 screw threads for fastening of the screwed hole connection of right plate 12, through hole two 11-2, a left side of second bolt 9 through workbench left plate 11
After the through hole 7-2 of side the second piezoelectric ceramics ring group 2, vibration table 7, right side the second piezoelectric ceramics ring group 4 and the second spheric washer 6 with
Two 12-2 screw threads for fastening of the screwed hole connection of workbench right plate 12, workbench left plate 11 and workbench right plate 12 are all installed
In workbench base plate 13, workbench left plate 11 is parallel to each other with workbench right plate 12, makes the axial line and of the first bolt 8
The axial line of two bolts 9 is parallel to each other and is in same horizontal plane, wedge determine the angle of the low-angle acute angle of block 14 with
The angle of the low-angle acute angle of wedge motion block 10 is identical, and wedge determines the length of the length less than wedge motion block 10 of block 14,
Wedge determines block 14 and wedge motion block 10 is all disposed within the groove 7-3 of vibration table 7, and wedge is determined the long right-angle surface of block 14 and shaken
Left surface in the groove 7-3 of dynamic platform 7 is fixedly connected, and the inclined-plane on inclined-plane and wedge motion block 10 that wedge determines block 14 slides and connects
Connect, and make wedge determine block 14 long right-angle surface it is parallel with the long right-angle surface of wedge motion block 10, when the length of wedge motion block 10
Right-angle surface is parallel to clamp the right side being arranged in the groove 7-3 of the long right-angle surface Yu vibration table 7 of wedge motion block 10 when moving right
Workpiece to be machined 15 between side, wherein the first piezoelectric ceramics ring group 1 of left side and left side the second piezoelectric ceramics ring group 2 and right side
180 ° of the alternating electric field phase that first piezoelectric ceramics ring group 3 and 4 two ends of right side the second piezoelectric ceramics ring group apply.
Hinge structure of the present invention has the advantages that：
1st, present invention utilizes the phase place phase of the inverse piezoelectric effect of piezoelectric ceramics, vibration table or so two ends piezoelectric ceramics applying
180 ° of alternating voltages are differed from, makes left and right two ends produce the stress of equidirectional, promoted vibration table to move to a direction, and vibrate
Frequency can adjust；
2nd, the present invention can adjust the amplitude of one-dimensional platform by adjusting alternating voltage amplitude, by adjusting alternating voltage
Frequency can adjust the frequency of vibration of vibration platen；
3rd, self-locking clamping device is provided with the present invention, releasing for workpiece on vibration table will not be caused because of vibration,
Alignment error can also be reduced simultaneously；
4th, spheric washer is mounted with the middle of the piezoelectric ceramics and workbench side plate in the present invention, so can both utilize sphere
The elasticity of packing ring absorbs processing and the alignment error of side plate, while and frictional force can be increased, in bolt by axial stress it is
Prevent bolt from releasing.
Description of the drawings
Fig. 1 is the overall structure diagram of the present invention；
Fig. 2 is the overlooking the structure diagram of Fig. 1.
Specific embodiment
Specific embodiment one：With reference to shown in Fig. 1, Fig. 2, it includes that the first piezoelectric ceramics ring group 1, left side second of left side is pressed
Electroceramics ring group 2, right side the first piezoelectric ceramics ring group 3, right side the second piezoelectric ceramics ring group 4, the first spheric washer 5, the second ball
Face packing ring 6, vibration table 7, the first bolt 8, the second bolt 9, wedge motion block 10, workbench left plate 11, workbench right plate
12nd, workbench base plate 13, wedge determines block 14；
Between on the left surface of workbench left plate 11 and on right flank, horizontal row shows two 11- of one 11-1 of through hole and through hole
2, on the left surface of workbench right plate 12 and on right flank between horizontal row show two 12-2 of two 12-1 of screwed hole and screwed hole,
Between on the left surface of vibration table 7 and on right flank, horizontal row shows through hole 7-1 and through hole 7-2, and the upper surface of vibration table 7 is provided with
For the groove 7-3 of clamping workpiece to be machined 15, through hole one 11-1, left side first of first bolt 8 through workbench left plate 11
With workbench after piezoelectric ceramics ring group 1, the through hole 7-1 of vibration table 7, right side the first piezoelectric ceramics ring group 3 and the first spheric washer 5
Two 12-1 screw threads for fastening of the screwed hole connection of right plate 12, through hole two 11-2, a left side of second bolt 9 through workbench left plate 11
After the through hole 7-2 of side the second piezoelectric ceramics ring group 2, vibration table 7, right side the second piezoelectric ceramics ring group 4 and the second spheric washer 6 with
Two 12-2 screw threads for fastening of the screwed hole connection of workbench right plate 12, workbench left plate 11 and workbench right plate 12 are all installed
In workbench base plate 13, workbench left plate 11 is parallel to each other with workbench right plate 12, makes the axial line and of the first bolt 8
The axial line of two bolts 9 is parallel to each other and is in same horizontal plane, wedge determine the angle of the low-angle acute angle of block 14 with
The angle of the low-angle acute angle of wedge motion block 10 is identical, and wedge determines the length of the length less than wedge motion block 10 of block 14,
Wedge determines block 14 and wedge motion block 10 is all disposed within the groove 7-3 of vibration table 7, and wedge is determined the long right-angle surface of block 14 and shaken
Left surface in the groove 7-3 of dynamic platform 7 is fixedly connected, and the inclined-plane on inclined-plane and wedge motion block 10 that wedge determines block 14 slides and connects
Connect, and make wedge determine block 14 long right-angle surface it is parallel with the long right-angle surface of wedge motion block 10, when the length of wedge motion block 10
Right-angle surface is parallel to clamp the right side being arranged in the groove 7-3 of the long right-angle surface Yu vibration table 7 of wedge motion block 10 when moving right
Workpiece to be machined 15 between side, wherein the first piezoelectric ceramics ring group 1 of left side and left side the second piezoelectric ceramics ring group 2 and right side
180 ° of the alternating electric field phase that first piezoelectric ceramics ring group 3 and 4 two ends of right side the second piezoelectric ceramics ring group apply.
The left side the first piezoelectric ceramics ring group 1, left side the second piezoelectric ceramics ring group 2, right side the first piezoelectric ceramics ring group 3
All it is made up of the superposition of multi-disc ring-shaped piezo ceramic piece with right side the second piezoelectric ceramics ring group 4.The type of the ring-shaped piezo ceramic piece
Number be P51.The operating frequency of the ring-shaped piezo ceramic piece is in 500Hz ~ 20KHz.
Operation principle：Workpiece to be machined 15 is clamped in the long right-angle surface of wedge motion block 10 and the groove 7-3 of vibration table 7
Right flank between, then apply alternating electric field at left side piezoelectric ceramics and right side piezoelectric ceramics two ends, wherein left side first is pressed
Electroceramics ring group 1 and left side the second piezoelectric ceramics ring group 2 and right side the first piezoelectric ceramics ring group 3 and the second piezoelectric ceramic ring of right side
180 ° of the alternating electric field phase that 4 two ends of group apply, a meeting elongation in the piezoelectric ceramics of such both sides（Shorten）, another
Can then shorten（Elongation）, to connect equivalent to piezoelectric ceramics, the two drives clamping device jointly to the direction parallel to bolt axis
Motion, will produce regular periodic vibration after alternating voltage is applied, and as piezoelectric ceramics is a kind of elastomer, it takes
From Hooke's law：" in elastic limits, stress and strain is directly proportional ".In electric field it isEEffect pushes the elongation of electroceramics
Amount S=dE, whereindIt is piezoelectric constant.During non-Simple harmonic electric vibration auxiliary milling, cutter is vibrated according to normal milling mode milling
Platform clamping can make Tool in Cutting vestige unlike rail during common micro- milling due to vibrating the addition for aiding in on horizontal movement platform
Mark is neat like that, but is that non-Simple harmonic electric vibration applications Cutting trajectory when vibrating in assisted machining interferes and produces repetition and cut
The effect of cutting, makes Tool in Cutting vestige shoal, and so as to reduce participation stress, this kind of method measurement range is wider, whole for evaluating
The working plasticity deformation of material for individual finished surface, is reduced, metamorphic layer thickness is reduced, so as to improve table to a great extent
Face crudy.
Specific embodiment two：With reference to shown in Fig. 1, Fig. 2, this specific embodiment is on the basis of specific embodiment one
Increase has locking jackscrew 16 and unblock jackscrew 17；Locking jackscrew 16 is threadedly coupled the side wall apical grafting through vibration table 7 in wedge
In the short right-angle surface of motion block 10, loosen for holding out against wedge motion block 10 and preventing wedge motion block 10 from falling back；Unblock jackscrew 17
Be threadedly coupled through vibration table 7 another side side wall apical grafting on the low-angle acute angle of wedge motion block 10, for making wedge
Motion block 10.
Claims (2)
1. a kind of one-dimensional vibrating device based on piezoelectric ceramic piece inverse piezoelectric effect, it is characterised in that it includes the first piezoelectricity of left side
Ceramic ring group（1）, left side the second piezoelectric ceramics ring group（2）, right side the first piezoelectric ceramics ring group（3）, the second piezoelectric ceramics of right side
Ring group（4）, the first spheric washer（5）, the second spheric washer（6）, vibration table（7）, the first bolt（8）, the second bolt（9）, wedge
Shape block motion block（10）, workbench left plate（11）, workbench right plate（12）, workbench base plate（13）, wedge determine block（14）；
Workbench left plate（11）Left surface on and right flank between horizontal row show through hole one（11-1）With through hole two
（11-2）, workbench right plate（12）Left surface on and right flank between horizontal row show screwed hole one（12-1）And screw thread
Hole two（12-2）, vibration table（7）Left surface on and right flank between horizontal row show first through hole（7-1）With the second through hole
（7-2）, vibration table（7）Upper surface be provided with for clamping workpiece to be machined（15）Groove（7-3）, the first bolt（8）Through work
Make platform left plate（11）Through hole one（11-1）, left side the first piezoelectric ceramics ring group（1）, vibration table（7）First through hole（7-
1）, right side the first piezoelectric ceramics ring group（3）With the first spheric washer（5）Afterwards with workbench right plate（12）Screwed hole one（12-
1）Screw threads for fastening connects, the second bolt（9）Through workbench left plate（11）Through hole two（11-2）, the second piezoelectric ceramics of left side
Ring group（2）, vibration table（7）The second through hole（7-2）, right side the second piezoelectric ceramics ring group（4）With the second spheric washer（6）Afterwards with
Workbench right plate（12）Screwed hole two（12-2）Screw threads for fastening connects, workbench left plate（11）With workbench right plate
（12）Workbench base plate is arranged on all（13）On, workbench left plate（11）With workbench right plate（12）It is parallel to each other, makes
One bolt（8）Axial line and the second bolt（9）Axial line it is parallel to each other and be in same horizontal plane, wedge determines block
（14）Low-angle acute angle angle and wedge motion block（10）Low-angle acute angle angle it is identical, wedge determines block（14）'s
Length is less than wedge motion block（10）Length, wedge determines block（14）With wedge motion block（10）It is all disposed within vibration table（7）
Groove（7-3）Interior, wedge determines block（14）Long right-angle surface and vibration table（7）Groove（7-3）Interior left surface is fixedly connected, wedge
Shape block determines block（14）Inclined-plane and wedge motion block（10）Inclined-plane be slidably connected, and make wedge determine block（14）Long right-angle surface
With wedge motion block（10）Long right-angle surface it is parallel, when wedge motion block（10）Long right-angle surface parallel can clamp when moving right
It is arranged on wedge motion block（10）Long right-angle surface and vibration table（7）Groove（7-3）Workpiece to be machined between interior right flank
（15）, wherein the first piezoelectric ceramics ring group of left side（1）With left side the second piezoelectric ceramics ring group（2）With the first piezoelectric ceramic ring of right side
Group（3）With right side the second piezoelectric ceramics ring group（4）180 ° of the alternating electric field phase that two ends apply.
2. a kind of one-dimensional vibrating device based on piezoelectric ceramic piece inverse piezoelectric effect according to claim 1, its feature exist
Increasing in it has locking jackscrew（16）With unblock jackscrew（17）；Locking jackscrew（16）Threaded connection is through vibration table（7）Side wall
Apical grafting is in wedge motion block（10）Short right-angle surface on, for holding out against wedge motion block（10）And prevent wedge motion block（10）
Move back loosening；Unblock jackscrew（17）Threaded connection is through vibration table（7）Another side side wall apical grafting in wedge motion block（10）Little angle
On degree acute angle, for ejecting wedge motion block（10）.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510248325.6A CN104985241B (en) | 2015-05-16 | 2015-05-16 | A kind of one-dimensional vibrating device based on piezoelectric ceramic piece inverse piezoelectric effect |
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| CN201510248325.6A CN104985241B (en) | 2015-05-16 | 2015-05-16 | A kind of one-dimensional vibrating device based on piezoelectric ceramic piece inverse piezoelectric effect |
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| CN104985241B true CN104985241B (en) | 2017-04-05 |
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| US4764244A (en) * | 1985-06-11 | 1988-08-16 | The Foxboro Company | Resonant sensor and method of making same |
| US7280435B2 (en) * | 2003-03-06 | 2007-10-09 | General Electric Company | Switching circuitry for reconfigurable arrays of sensor elements |
| US8765512B2 (en) * | 2011-12-07 | 2014-07-01 | Georgia Tech Research Corporation | Packaging compatible wafer level capping of MEMS devices |
| CN102873019B (en) * | 2012-09-29 | 2014-10-15 | 中北大学 | High-speed rotary ultrasonic torsional processing device |
| KR20140118399A (en) * | 2013-03-29 | 2014-10-08 | 부산대학교 산학협력단 | Micro machining apparatus |
| CN104440140A (en) * | 2014-12-09 | 2015-03-25 | 苏州科技学院 | Single electrical signal excitation ultrasonic elliptic vibration micro-machining working platform |
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