CN104976297B - The mechanical driving device of full automatic standard ellipsometer - Google Patents
The mechanical driving device of full automatic standard ellipsometer Download PDFInfo
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- CN104976297B CN104976297B CN201410147778.5A CN201410147778A CN104976297B CN 104976297 B CN104976297 B CN 104976297B CN 201410147778 A CN201410147778 A CN 201410147778A CN 104976297 B CN104976297 B CN 104976297B
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- 238000006073 displacement reaction Methods 0.000 claims description 6
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- 239000003638 chemical reducing agent Substances 0.000 claims 1
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- 238000005259 measurement Methods 0.000 abstract description 16
- 239000004065 semiconductor Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 6
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- 230000003749 cleanliness Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Abstract
The present invention provides a kind of mechanical driving device of full automatic standard ellipsometer, and it includes pedestal, guide rail kinematic pair, incidence end and receiving terminal linear motion pair, incidence end and receiving terminal rotary motion pair, three-dimensional movement platform.Incidence end and receiving terminal linear motion pair are installed on guide rail kinematic pair and provide linear motion；Incidence end and receiving terminal rotary motion pair are overleaf respectively connecting to incidence end and receiving terminal linear motion pair is above being separately installed with the incidence end of ellipsometer and receiving terminal measuring arm, so that incidence end and receiving terminal measuring arm by drives edge linear translation or can rotate around the axis；Three-dimensional movement platform can realize the three-dimensional motion of chip to be measured, its midplane two-dimensional motion helps incidence end and receiving terminal measuring arm to realize the scanning to the tested point on chip to be measured, is moved along the third dimension of chip film thickness direction and coordinates above-mentioned linear translation and rotation around the shaft realizes that freely converting for measurement angle is adjusted and angle precision is controllable.
Description
Technical field
The present invention relates to ellipsometer, more particularly to the mechanical driving device of full automatic standard ellipsometer and passed including the machinery
The full automatic standard ellipsometer of dynamic device.
Background technology
On manufacture of semiconductor production line, it usually needs the thing of the film of semiconductor wafer surface is measured using ellipsometer
Manage parameter, such as thickness, dispersion curve etc..In measurement process, a branch of polarised light oblique illumination is had to semiconductor wafer table
On the film in face, it can be changed by film reflector rear polarizer state, and the physical parameter of the film can be obtained by calculating.
Sensitivity of the different semiconductor wafers to the incidence angle of light can be otherwise varied, therefore, for different chips, it is necessary to set not
Same incidence angle.
However, the incidence angle for being applied to most of standard ellipsometer in semiconductor measurement technology in the market is fixed
, if necessary to translation-angle, then use and manually adjust, such as the incidence end measuring arm and receiving terminal of standard ellipsometer are measured
Arm is positioned by along the circumferential direction different pin holes, but this mode is only applicable to the measurement of particular wafer.External city
Also there is the standard ellipsometer of full rotation type on field, its incidence end measuring arm and receiving terminal measuring arm all have multiple joints, these
Moved similar to the joint of the arm of people in joint.The standard ellipsometer of this full rotation type uses multiple electric rotating machines and encoder
Driving mechanical transmission system works.However, this machine driven system is because its cantilever mechanism is more, and without fixed guide, because
This long-time stability is poor.
The content of the invention
It is an object of the invention to provide a kind of mechanical driving device of full automatic standard ellipsometer, its can effectively adjust into
Firing angle and angle of reflection, greatly improve the measurement efficiency of ellipsometer.
Therefore, according to an aspect of the present invention, there is provided a kind of mechanical driving device of full automatic standard ellipsometer, it is described
Full automatic standard ellipsometer includes control device, mechanical driving device, incidence end measuring arm and receiving terminal measuring arm, and its feature exists
In the mechanical driving device includes：
Pedestal, the pedestal include support platform and the portal frame being fixed in support platform；
Guide rail kinematic pair, it is fixed on portal frame and with upper rail, lower guideway and positioned at upper rail and lower guideway
Between central channel；
Incidence end linear motion is secondary and receiving terminal linear motion is secondary, and it is respectively arranged in central channel and by respective the
One motor can drive to be moved with allowing to provide along the opposite or reverse linear of central channel；
Incidence end rotary motion pair and receiving terminal rotary motion pair, it is all slidably attached to upper rail and lower guideway,
The incidence end rotary motion pair and receiving terminal rotary motion pair are overleaf respectively connecting to incidence end linear motion pair and received
End linear motion is secondary, incidence end measuring arm and receiving terminal measuring arm is above being separately installed with, so that incidence end measuring arm
With receiving terminal measuring arm in the secondary opposite or reverse linear motion provided with receiving terminal linear motion pair of incidence end linear motion
Drive under carry out opposite or reverse linear along central channel direction and move, incidence end rotary motion pair and receiving terminal rotary motion
It is secondary also to be driven by respective second motor to allow to provide the rotation fortune along the linear motion institute in vertical plane respectively
It is dynamic that so as to drive incidence end measuring arm and receiving terminal measuring arm, in the vertical plane interior edge, its respective rotating shaft work is opposite or reverse
Rotate；
Three-dimensional movement platform, the third dimension that it includes plane two-dimensional motion device and horizontal support has chip to be measured thereon are transported
Dynamic device, its midplane two-dimensional motion device are located in support platform and carry third dimension telecontrol equipment, the maintenance and operation of plane two
Dynamic device is configured to that third dimension telecontrol equipment can be driven to carry out the movement of plane bidimensional so as to allow incidence end measuring arm and receiving terminal
Measuring arm scans any tested point on chip to be measured, and third dimension motion device constructions move into permission chip to be measured along film thickness direction
It is dynamic that so as to coordinate, the linear motion is secondary and common realize of rotary motion pair is surveyed to the incidence angle and receiving terminal of incidence end measuring arm
Measure the regulation of the angle of reflection of arm.
In this aspect of the invention, by the motion of the opposite or reverse linear of incidence end measuring arm and receiving terminal measuring arm and
Rotate and chip coordinates along the motion for moving this three aspect of film thickness direction, incidence end measurement angle is that incidence angle and receiving terminal are surveyed
Angulation is that angle of reflection can realize free conversion, and angle precision is controllable.
Preferably, incidence end linear motion is secondary and receiving terminal linear motion pair is all guide screw movement pair, the leading screw
The leading screw of kinematic pair is driven by first motor and rotated in the central channel, the secondary nut of the guide screw movement
By leading screw drives edge central channel translation.
It is further preferred that the incidence end rotary motion pair and receiving terminal rotary motion pair are overleaf respectively connecting to respectively
On the secondary nut of self-corresponding guide screw movement.
Still further preferably, the control device includes the linear sensing for being used to sense the straight-line displacement of the nut
Device.
Preferably, the incidence end rotary motion pair and receiving terminal rotary motion pair are all perpendicular type precision speed reduction device.
It is further preferred that the perpendicular type precision speed reduction device is worm type of reduction gearing, wherein, the worm screw with it is described
Second motor driveably connects and is arranged to drive the worm gear to rotate in the vertical plane.
Still further preferably, the incidence end measuring arm and receiving terminal measuring arm are respectively connecting to the respective worm gear
So as to be rotated under the drive of the worm gear in the vertical plane.
Again still further preferably, the control device also includes the rotation for being used to sense the speed displacement of second motor
Turn encoder, the rotary encoder is mounted to and second motor coaxle.
Still still further preferably, each worm type of reduction gearing is via a top shoe on the upper rail
Upper rail and lower guideway are slidably attached to a sliding block on the lower guideway.
According to another aspect of the present invention, there is provided a kind of full automatic standard ellipsometer, it includes machinery as described above
Transmission device, wherein, the incidence end move along a straight line secondary, described incidence end rotary motion pair and the third dimension telecontrol equipment by
Control device control carrys out the incidence angle of incidence end measuring arm described in synergic adjustment, and receiving terminal linear motion it is secondary,
The receiving terminal rotary motion pair and the third dimension telecontrol equipment are controlled come reception described in synergic adjustment by the control device
Hold the angle of reflection of measuring arm.
By reference to embodiment disclosed below, these and other aspects of the present invention will obtain clearly
Illustrate.
Brief description of the drawings
The structurally and operationally mode and further objects and advantages of the present invention will pass through description below in conjunction with the accompanying drawings
It is better understood, wherein, identical reference marker mark identical element：
Fig. 1 schematically shows the machinery of the full automatic standard ellipsometer according to a preferred embodiment of the present invention
The stereogram of transmission device；
Fig. 2 shows the enlarged drawing of another angle of the mechanical driving device of full automatic standard ellipsometer in Fig. 1；
Fig. 3 schematically shows in Fig. 1 relative position before the adjustment of incidence end measuring arm, receiving terminal measuring arm and chip
Put, wherein incidence angle and angle of reflection are all θ；
Fig. 4 schematically shows in Fig. 1 relative position after the adjustment of incidence end measuring arm, receiving terminal measuring arm and chip
Put, wherein incidence angle and angle of reflection are all θ '.
Description of reference numerals
100 mechanical driving devices
101 pedestals
The portal frame of 111 support platform 121
102 guide rail kinematic pairs
The lower guideway of 112 upper rail 122
The sliding block of 1120 top shoe 1220
132 central channels
The secondary 104 receiving terminals linear motion of 103 incidence ends linear motion is secondary
The nut of 113 leading screw 123
The receiving terminal rotary motion pair of 105 incidence end rotary motion pair 106
107 three-dimensional movement platforms
The third dimension telecontrol equipment of 117 two-dimensional motion device 127
The receiving terminal measuring arm of 201 incidence end measuring arm 203
The rotating shaft of 211 rotating shaft 213
The motor of 301 first motor 303 second
400 chips
Embodiment
As requested, the embodiment of the present invention will be disclosed here.It is it is to be understood, however, that described herein
Embodiment be only the present invention exemplary, it can be presented as various forms.Therefore, what is disclosed here is specific thin
Section is not to be considered as limiting, and is merely possible to the basis of claim and is used as be used to instruct those skilled in the art
By in practice it is any it is appropriate in a manner of differently using the representational basis of the present invention, including using described herein various
Feature simultaneously combines the feature that may do not disclosed clearly here.
As shown in figure 1, provide a kind of machine driving of full automatic standard ellipsometer according to the preferred embodiment of the present invention
Device, wherein, full automatic standard ellipsometer includes control device (not shown), mechanical driving device 100, incidence end measuring arm
201 and receiving terminal measuring arm 203.Mechanical driving device 100 includes pedestal 101, guide rail kinematic pair 102, incidence end linear motion
Pair 103 and receiving terminal linear motion pair 104, incidence end rotary motion pair 105 and receiving terminal rotary motion pair 106 and three-dimensional
Motion platform 107.
Generally speaking, incidence end measuring arm 201 and receiving terminal measuring arm 203 of the mechanical driving device 100 including light is straight
Line movement mechanism and rotational motion mechanism, and feed arrangement of the semiconductor wafer along film thickness direction.Control device uses
Autocontrol method controls the motion of above-mentioned three classes mechanism, may finally realize that incidence end measurement angle and receiving terminal measurement angle are accurate
It is equal.
Specifically, as shown in Figure 1 and combine Fig. 2, support 101 includes support platform 111 and is fixed in support platform
Portal frame 121；Guide rail kinematic pair 102 is fixed on portal frame 121, and with upper rail 112, lower guideway 122 and positioned at upper
Central channel 132 between guide rail and lower guideway；Incidence end linear motion pair 103 and receiving terminal linear motion pair 104 are pacified respectively
Loaded in central channel 132, and can be driven by respective first motor 301, to allow to provide along the opposite of central channel 132 or
Reverse linear is moved；Incidence end rotary motion pair 105 and receiving terminal rotary motion pair 106 are all slideably connected to simultaneously leads
Rail 112 and lower guideway 122, it is preferable that all via one on the top shoe 1120 and lower guideway 122 on upper rail 112
Sliding block 1220 is slidably attached to upper rail 112 and lower guideway 122.
As shown in Figure 2 and Fig. 3 is combined, it is secondary that incidence end rotary motion pair 105 is overleaf connected to incidence end linear motion
103, incidence end measuring arm 201 is above being installed, so as to the band for secondary 103 linear motions provided that moved along a straight line in incidence end
Under dynamic, incidence end measuring arm 201 can be moved along a straight line along the direction of central channel 132；Equally, receiving terminal rotary motion pair
106 are overleaf connected to receiving terminal linear motion pair 104, receiving terminal measuring arm 203 are above being provided with, so as to straight in receiving terminal
Line kinematic pair 104 is provided under the drive of linear motion, and receiving terminal measuring arm 203 can carry out straight along the direction of central channel 132
Line moves.Preferably, control device controls the linear motion of incidence end measuring arm 201 and receiving terminal measuring arm 203 respectively, so as to
The two measuring arms can be achieved and make the motion of opposite or reverse linear simultaneously, and can realize respectively to the straight line of the two measuring arms
Motion is finely adjusted.
As shown in Figure 2 and Fig. 3 is combined, incidence end rotary motion pair 105 can also be by the second corresponding motor 303 (i.e.
Second motor 303 in left side in Fig. 2) driving, with allow to provide along above-mentioned linear motion rotation in vertical plane
Motion, so as to drive incidence end measuring arm 201, in the vertical plane interior edge, its rotating shaft 211 rotates；Equally, receiving terminal rotary motion
Pair 106 can also be by second corresponding motor 303 (second motor 303 on right side i.e. in Fig. 2) driving, to allow to provide
Along above-mentioned linear motion rotary motion in vertical plane, so as to drive receiving terminal measuring arm 203 in the vertical plane
Rotated along its rotating shaft 213.Preferably, control device controls the rotation of incidence end measuring arm 201 and receiving terminal measuring arm 203 respectively
Motion, so that the two measuring arms can be realized while make opposite or rotate backward, and it can realize respectively to the two measuring arms
Rotary motion be finely adjusted.
Back to as shown in figure 1, and combine Fig. 3, three-dimensional movement platform 107 includes the He of plane two-dimensional motion device 117
Horizontal support has the third dimension telecontrol equipment 127 of chip 400 to be measured thereon, and its midplane two-dimensional motion device 117 is positioned at support
On platform 111 and carry third dimension telecontrol equipment 127.The plane two-dimensional motion device 117 is configured to the third dimension can be driven to move
Device 127 carries out plane bidimensional movement, so as to allow incidence end measuring arm 201 and receiving terminal measuring arm 203 to scan chip to be measured
Any tested point on 400.Third dimension telecontrol equipment 127 is configured to allow for chip 400 to be measured along film thickness direction chip i.e. to be measured
400 thickness direction movement, so as to coordinate, above-mentioned linear motion is secondary and rotary motion pair is realized to incidence end measuring arm jointly
The regulation of incidence angle θ and the angle of reflection θ of receiving terminal measuring arm.
It should be appreciated that above-mentioned plane two-dimensional motion device 117 can arbitrarily provide plane two-dimensional motion
Device, as long as enabling the third dimension telecontrol equipment 127 that carries thereon with chip 400 to be measured left and right, front and rear along the horizontal plane
The scanning to chip 400 to be measured is realized in ground movement；And above-mentioned third dimension telecontrol equipment 127 can also any can be provided
The device that chip to be measured moves along its film thickness direction, for example, it can have hoistable platform or the floating device of vapour to be measured so as to drive
Chip moves along film thickness direction.
In this aspect of the invention, by the motion of the opposite or reverse linear of incidence end measuring arm and receiving terminal measuring arm and
Rotate and chip to be measured coordinates along the motion for moving this three aspect of film thickness direction, incidence end measurement angle is incidence angle and reception
It is that angle of reflection can realize free conversion to hold measurement angle, and angle precision is controllable.
In addition, it is to be understood that due to the said structure of mechanical driving device of the present invention, cause can also be by two
Measuring arm is designed as non-cantilever girder construction, and non-cantilever girder construction long-time stability are good, and cleanliness factor is high, suitable for measuring various sizes
With the standard ellipsometer of the semiconductor wafer of susceptibility.
Preferably, above-mentioned incidence end linear motion pair 103 and receiving terminal linear motion pair 104 are all including leading screw and nut
Guide screw movement pair, the leading screw 113 of incidence end linear motion pair 103 is by corresponding first motor 301 (i.e. positioned at Fig. 1, figure
In 2 left side the first motor 301) driving rotated in central channel 132, nut 123 is by the drives edge center of leading screw 113
The translation of conduit 132；Equally, the leading screw of receiving terminal linear motion pair 104 by corresponding first motor 301 (i.e. positioned at Fig. 1,
In Fig. 2 right side the first motor 301) driving rotated in central channel 132, receiving terminal linear motion pair 104 spiral shell
Mother is by the translation of leading screw drives edge central channel 132.So, incidence end rotary motion pair 105 and receiving terminal rotary motion pair 106 exist
The back side is respectively connecting on the secondary nut of each self-corresponding guide screw movement, incident so as to when nut is along during 132 translation of central channel
Rotary motion pair 105 and receiving terminal rotary motion pair 106 is held to be driven by the nut of each auto correlation so as to flat along central channel 132
It is dynamic.It is further preferred that above-mentioned control device includes two linear transducer (not shown), it is respectively used to sense a nut
Straight-line displacement so that control device can accurately control above-mentioned translation.
Preferably, above-mentioned incidence end rotary motion pair 105 and receiving terminal rotary motion pair 106 are all the accurate deceleration of perpendicular type
Device, such as the worm type of reduction gearing including worm screw and turbine (not shown), wherein, two worm screws are respectively with each self-corresponding
Two motors 303 driveably connect and are arranged to drive corresponding worm gear to rotate in vertical plane.Under this configuration,
Incidence end measuring arm 201 and receiving terminal measuring arm 203 be respectively connecting to respective worm gear so as under the drive of worm gear
Rotated in vertical plane.It is further preferred that above-mentioned control device also includes rotary encoder (not shown), its be mounted to respectively
Self-corresponding second motor 303 is coaxial, and they are used for the speed displacement for sensing corresponding second motor 303, so that control dress
The rotary motion of incidence end measuring arm 201 and receiving terminal measuring arm 203 can be accurately controlled by putting.Still further preferably, often
Individual worm type of reduction gearing is all via a sliding block on the top shoe 1120 and lower guideway 122 on upper rail 112
1220 are slidably attached to upper rail 112 and lower guideway 122.
The incidence angle and receiving terminal measuring arm for how adjusting incidence end measuring arm 201 are introduced below with reference to Fig. 3 and Fig. 4
203 angle of reflection.
The incidence end measurement angle of light shown in Fig. 3 is that incidence angle and receiving terminal measurement angle i.e. angle of reflection should be equal, is θ,
Incident light and the focus F of reflected light are on chip 400 to be measured.If the variety exchanging of chip 400 to be measured, its measurement angle is θ ',
Then need to increase the θ ' angles shown in measurement angle to Fig. 4 on the basis of θ angles shown in Fig. 3.Therefore, chip 400 to be measured need to be transported upwards
It is dynamic；Incidence end measuring arm 201 and receiving terminal measuring arm 203 need to do to the left and right sides respectively along linear translation；Incidence end measuring arm
201 and receiving terminal measuring arm 203 also need to do opposite circle rotation along its respective rotating shaft 211,213 and move, i.e. the former inverse time
Pin rotates, and the latter rotates clockwise.In a word, for incidence end measuring arm 201 and receiving terminal measuring arm 203, only need respectively
Bidimensional translation and one-dimensional rotary motion are done, so, under the cooperation moved of the chip to be measured along film thickness direction, you can realize and survey
The regulation of angulation.
It should be appreciated that in the application, above-mentioned linear motion pair can also be linear electric motors.In addition, it should be noted that
Incidence end measuring arm 201 and receiving terminal measuring arm 203, which are separately controlled, is advantageous to vernier angle, and the guide rail of the two measuring arms is transported
Dynamic pair is same set of, then can ensure that the two measuring arms are moved in the same plane；Rotary motion uses two perpendicular type essences
Close decelerator makes two measuring arms help to realize fine setting incidence angle or angle of reflection along respective axis of rotation respectively；It is above-mentioned
The movement of film thickness direction can be such that chip to be measured is moved along its thickness direction, so that the focus of measuring arm falls on chip to be measured.
It should be noted that the stroke range of two measuring arm is related to the length of measuring arm, the distance of measuring arm focal point is shorter, stroke
It is shorter.In, control device can use the transverse direction of automatic control program control incidence end measuring arm and receiving terminal measuring arm straight
Line motion is that the distance of translation is equal, controls the motion non-angular pitching along its film thickness direction of chip to be measured so that crystalline substance to be measured
The each position of piece is all parallel, and the angle that two measuring arms of control rotate around the shaft is equal.After incident angle determines during measurement,
Each point on chip to be measured can be scanned with the two-dimensional motion device in moving three dimension motion platform.
Standard ellipsometer is enabled to using the machine driven system that can change incidence angle and angle of reflection of the present invention
Measurement efficiency greatly improves, and it can realize that incidence end measuring arm and receiving terminal measuring arm do the circumference of precision along approximately the same plane
Motion, while their center of circle is that focus is overlapped and fallen all the time in the measured region on chip to be measured.
According to another aspect of the present invention, there is provided a kind of full automatic standard ellipsometer, it includes machinery as described above
Transmission device, wherein, the incidence end move along a straight line secondary, described incidence end rotary motion pair and the third dimension telecontrol equipment by
Control device control carrys out the incidence angle of incidence end measuring arm described in synergic adjustment, and receiving terminal linear motion it is secondary,
The receiving terminal rotary motion pair and the third dimension telecontrol equipment are controlled come reception described in synergic adjustment by the control device
Hold the angle of reflection of measuring arm.
The technology contents and technical characterstic of the present invention have revealed that as above, it being understood, however, that in the creative ideas of the present invention
Under, those skilled in the art can make various changes and improve to said structure and shape, including individually discloses or want here
Ask the combination of the technical characteristic of protection, it will be apparent that other combinations including these features.These deformations and/or combination each fall within this
In the involved technical field of invention, and fall into the protection domain of the claims in the present invention.It should be noted that by convention,
It is intended to using discrete component include element as one or more in claim.In addition, should not be by claims
Any reference marker be constructed as limiting the scope of the present invention.
Claims (10)
1. the mechanical driving device of full automatic standard ellipsometer, the full automatic standard ellipsometer includes control device, machinery passes
Dynamic device, incidence end measuring arm and receiving terminal measuring arm, it is characterised in that the mechanical driving device includes：
Pedestal, the pedestal include support platform and the portal frame being fixed in support platform；
Guide rail kinematic pair, it is fixed on portal frame and with upper rail, lower guideway and between upper rail and lower guideway
Central channel；
Incidence end linear motion is secondary and receiving terminal linear motion is secondary, and it is respectively arranged in central channel and by the respective first electricity
Machine can drive to be moved with allowing to provide along the opposite or reverse linear of central channel；
Incidence end rotary motion pair and receiving terminal rotary motion pair, it is all slidably attached to upper rail and lower guideway, described
It is secondary straight with receiving terminal that incidence end rotary motion pair and receiving terminal rotary motion pair are overleaf respectively connecting to incidence end linear motion
Line kinematic pair, above it is being respectively used to install for incidence end measuring arm and receiving terminal measuring arm, so that incidence end measuring arm
With receiving terminal measuring arm in the secondary opposite or reverse linear motion provided with receiving terminal linear motion pair of incidence end linear motion
Drive under carry out opposite or reverse linear along central channel direction and move, incidence end rotary motion pair and receiving terminal rotary motion
It is secondary also to be driven by respective second motor to allow to provide the rotation fortune along the linear motion institute in vertical plane respectively
It is dynamic that so as to drive incidence end measuring arm and receiving terminal measuring arm, in the vertical plane interior edge, its respective rotating shaft work is opposite or reverse
Rotate；
Three-dimensional movement platform, it includes plane two-dimensional motion device and horizontal support has the third dimension sportswear of chip to be measured thereon
Put, its midplane two-dimensional motion device is located in support platform and carries third dimension telecontrol equipment, the plane two-dimensional motion dress
Put and be configured to that third dimension telecontrol equipment can be driven to carry out the movement of plane bidimensional so as to allow incidence end measuring arm and receiving terminal to measure
Arm scans any tested point on chip to be measured, third dimension motion device constructions into allow chip to be measured along film thickness direction move from
And coordinate the secondary incidence angle and receiving terminal measuring arm realized jointly with rotary motion pair to incidence end measuring arm of the linear motion
Angle of reflection regulation.
2. the mechanical driving device of full automatic standard ellipsometer as claimed in claim 1, it is characterised in that the incidence end is straight
Line kinematic pair and receiving terminal linear motion pair are all guide screw movement pair, and the secondary leading screw of the guide screw movement is driven by first motor
Move and rotated in the central channel, the secondary nut of the guide screw movement is by leading screw drives edge central channel translation.
3. the mechanical driving device of full automatic standard ellipsometer as claimed in claim 2, it is characterised in that the incidence end rotation
Turn kinematic pair and receiving terminal rotary motion pair is overleaf respectively connecting on the secondary nut of each self-corresponding guide screw movement.
4. the mechanical driving device of full automatic standard ellipsometer as claimed in claim 3, it is characterised in that the incidence end rotation
It is all perpendicular type precision speed reduction device to turn kinematic pair and receiving terminal rotary motion pair.
5. the mechanical driving device of full automatic standard ellipsometer as claimed in claim 4, it is characterised in that the perpendicular type essence
Close decelerator is worm type of reduction gearing, wherein, the worm screw is driveably connected and is arranged to second motor
The worm gear is driven to be rotated in the vertical plane.
6. the mechanical driving device of full automatic standard ellipsometer as claimed in claim 5, it is characterised in that each worm gear
Worm reducer all slideably connects via a sliding block on the top shoe and the lower guideway on the upper rail
It is connected to upper rail and lower guideway.
7. a kind of full automatic standard ellipsometer, it includes the mechanical driving device as described in any one of claim 1 to 6, described
Incidence end move along a straight line secondary, described incidence end rotary motion pair and the third dimension telecontrol equipment by the control device control Lai
The incidence angle of incidence end measuring arm described in synergic adjustment, and secondary, the described receiving terminal rotary motion of receiving terminal linear motion
Secondary and described third dimension telecontrol equipment is controlled come the angle of reflection of receiving terminal measuring arm described in synergic adjustment by the control device.
8. full automatic standard ellipsometer as claimed in claim 7, it is characterised in that it is included such as any one of claim 3 to 6
Described mechanical driving device, the control device include the linear transducer for being used to sense the straight-line displacement of the nut.
9. full automatic standard ellipsometer as claimed in claim 7, it is characterised in that it is included as described in claim 5 or 6
Mechanical driving device, the incidence end measuring arm and receiving terminal measuring arm be respectively connecting to the respective worm gear so as to
Rotated under the drive of the worm gear in the vertical plane.
10. full automatic standard ellipsometer as claimed in claim 7, it is characterised in that it is included as described in claim 5 or 6
Mechanical driving device, the control device also include be used for sense second motor speed displacement rotary encoder,
The rotary encoder is mounted to and second motor coaxle.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410147778.5A CN104976297B (en) | 2014-04-14 | 2014-04-14 | The mechanical driving device of full automatic standard ellipsometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410147778.5A CN104976297B (en) | 2014-04-14 | 2014-04-14 | The mechanical driving device of full automatic standard ellipsometer |
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| CN104976297A CN104976297A (en) | 2015-10-14 |
| CN104976297B true CN104976297B (en) | 2017-12-05 |
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|---|---|---|---|---|
| CN113155745A (en) * | 2020-01-07 | 2021-07-23 | 江苏鲁汶仪器有限公司 | Wafer parameter measuring device based on ellipsometer |
| CN113035762A (en) * | 2021-03-08 | 2021-06-25 | 苏州长光华芯光电技术股份有限公司 | Wafer conveying system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202119404U (en) * | 2011-06-09 | 2012-01-18 | 中节能太阳能科技（镇江）有限公司 | Laser ellipsometer |
| CN102375247A (en) * | 2011-10-26 | 2012-03-14 | 福建福晶科技股份有限公司 | Polarized coupling system |
| CN103163078A (en) * | 2013-03-12 | 2013-06-19 | 复旦大学 | Method for improving measurement precision of ellipsometer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US20110290175A1 (en) * | 2009-06-07 | 2011-12-01 | Veeco Instruments, Inc. | Multi-Chamber CVD Processing System |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202119404U (en) * | 2011-06-09 | 2012-01-18 | 中节能太阳能科技（镇江）有限公司 | Laser ellipsometer |
| CN102375247A (en) * | 2011-10-26 | 2012-03-14 | 福建福晶科技股份有限公司 | Polarized coupling system |
| CN103163078A (en) * | 2013-03-12 | 2013-06-19 | 复旦大学 | Method for improving measurement precision of ellipsometer |
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