CN104950393B - A kind of mode converter based on asymmetric Bragg grating - Google Patents
A kind of mode converter based on asymmetric Bragg grating Download PDFInfo
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- CN104950393B CN104950393B CN201510381769.7A CN201510381769A CN104950393B CN 104950393 B CN104950393 B CN 104950393B CN 201510381769 A CN201510381769 A CN 201510381769A CN 104950393 B CN104950393 B CN 104950393B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12107—Grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12152—Mode converter
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a kind of mode converter based on asymmetric Bragg waveguide grating, including a Symmetric Y-branch waveguide, one section of singlemode input waveguide, one section of asymmetric Bragg waveguide grating, one section of single-mode output waveguide, the Bragg waveguide grating is designed on a side of ridge waveguide, because the Periodic Perturbation of its refractive index acts on, so that coupled between TE and TM patterns in waveguide, the present invention realizes the transformation function between TE patterns and TM patterns, has the characteristics that design structure is simple, big with roomy, compact dimensions and making tolerance；Device making technics have CMOS technology compatible so that device is easily integrated and extended, and convenient low cost manufacture, can be widely applied to the high speed optical communication system of High Density Integration on piece.
Description
Technical field
The present invention relates to a kind of patten transformation integrated device of light, and asymmetric Bragg grating is based on more particularly to one kind
Mode converter.
Background technology
With the continuous development of today's society, people constantly increase to the demand of web database technology, to improving communication network
The requirement of speed is more and more urgent.Optical communication network is just bearing this historic mission at present, towards low cost, Large Copacity and high speed
The target of degree is advanced.Nowadays 40Gb/s optical transfer network extensive utilization, and 100Gb/s optical-fiber network be in it is booming
Stage.Reached common understanding in optical-fiber network of the speed more than 100Gb/s using the code encoding/decoding mode of standardization, this coding staff
Formula is the dual-polarization QPSK modulation technique (PM-QPSK) based on coherent reception.Needed in PM-QPSK to optical signal
Polarization conversion, separation and synthesis are carried out, Polarization Controller is the Primary Component for forming coherent receiver.
Mode converter is an important component of mode controller, and it can be in the polarization direction of transmitting light wave guide
It is rotated by 90 °, that is, the transverse electric pattern (TE) in waveguide can be rotated to be E mode (TM), TM patterns can also be rotated
For TE patterns.The mode converter proposed at present is mainly based upon three kinds of structures：The first is to use L-type waveguiding structure, its energy
The mutual conversion of both of which is realized, but its weak point is strict bat length be present, it is necessary to be controlled meticulously to the length of device
System；Second is the structure based on directional coupler, and the structure can only realize the conversion of single-mode, such as from TE patterns to TM moulds
Formula, or TM patterns are to TE patterns, and there is also strict coupling length, process allowance are small；The third is to be based on gradation type ripple
The structure led, the structure can mutually be changed with implementation pattern, but the height of waveguide is undergone mutation, and be unfavorable for the input or defeated of light
Go out.
Therefore, the patten transformation integrated device that simple in construction, power consumption is lower, is easily integrated and makes is developed, is from now on
Develop the important and significant work of integrated optical communication technology on piece.
The content of the invention
It is an object of the invention to provide a kind of mode converter based on asymmetric Bragg grating, simple in construction, work(
Consumption is lower, is easily integrated and makes.
A kind of mode converter based on asymmetric Bragg grating of the present invention, including singlemode input waveguide, Symmetric Y-branch
Waveguide, single-mode output waveguide, asymmetric Bragg waveguide grating；Singlemode input waveguide and single-mode output waveguide respectively with Symmetric Y
Two branch-waveguides connection of bifurcated waveguide, the trunk waveguide of Symmetric Y-branch waveguide are connected with asymmetric Bragg waveguide grating,
TE/TM patterns are input in asymmetric Bragg waveguide grating by singlemode input waveguide by Symmetric Y-branch waveguide, and described is non-
Symmetrical Bragg waveguide grating is formed by etching One Dimension Periodic unit on the side of waveguide one, and the cycle meets single mode ripple
The phase-matching condition coupled between TE and TM moulds is led, the asymmetric Bragg waveguide grating will transmit wherein
TE/TM patterns are rotated by 90 °, and are converted to TM/TE patterns, and are reflected back towards, by Symmetric Y-branch waveguide from single-mode output
Waveguide exports.
Described singlemode input waveguide, Symmetric Y-branch waveguide, single-mode output waveguide and asymmetric Bragg waveguide grating be
Support the ridge waveguide of TE and TM moulds.
The periodic unit shape of the described asymmetric Bragg waveguide grating of composition is rectangle.
The invention has the advantages that：
1st, changed with reference to asymmetric Bragg grating between TE patterns and TM patterns with realizing in single mode waveguide,
It is no to clap the features such as long and tolerance is big with high conversion efficiency.
2nd, device design structure is simple, compact dimensions.
3rd, device making technics have CMOS technology compatible so that device is easily integrated and extended, convenient low cost system
Make, can be widely applied to the light network communication system of High Density Integration on piece.
Brief description of the drawings
Fig. 1 is the structure chart of the mode converter of the invention based on asymmetric Bragg waveguide grating；
Fig. 2 is the profile of ridge waveguide in Fig. 1；
Fig. 3 is that the periodic unit of Bragg grating in Fig. 1 is shaped as the implementation illustration of rectangle；
Fig. 4 is the top view of asymmetric Bragg waveguide grating in Fig. 1.
The present invention is further described below in conjunction with drawings and examples.
Icon explanation：1st, singlemode input waveguide
2nd, Symmetric Y-branch waveguide
3rd, single-mode output waveguide
4th, asymmetric Bragg waveguide grating
Embodiment
As shown in figure 1, a kind of mode converter based on asymmetric Bragg grating of the present invention, including a single mode input
Waveguide 1, Symmetric Y-branch waveguide 2, single-mode output waveguide 3 and asymmetric Bragg waveguide grating 4, the wherein He of singlemode input waveguide 1
Single-mode output waveguide 3 is connected with two branch-waveguides of Symmetric Y-branch waveguide 2 respectively；Asymmetric Bragg waveguide grating and right
Claim the trunk waveguide connection of Y bifurcated waveguides 2.
As shown in figure 1, TE (TM) pattern is input to asymmetric Bradley by singlemode input waveguide 1 by Symmetric Y-branch waveguide 2
In lattice wave guide grating 4, the TE transmitted wherein (TM) pattern is rotated by 90 ° by asymmetric Bragg waveguide grating 4, that is, is converted to
TM (TE) pattern, and be reflected back towards, exported by Symmetric Y-branch waveguide 2 from single-mode output waveguide 3.
Shown as shown in Figure 1, Figure 3 and Figure 4, described asymmetric Bragg waveguide grating 4 is by being carved on the side of waveguide one
What etching one-dimensional rectangular Periodic unit was formed, the cycle of Bragg waveguide grating 4 meets TE patterns and TM patterns in single mode waveguide
Between the phase-matching condition that couples, because the Periodic Perturbation of the refractive index of Bragg waveguide grating 4 acts on so that waveguide
Coupled between interior TE and TM patterns.
To meet the requirement of TE and TM patten transformations in various sizes of single mode waveguide, it is necessary to design different Prague light
Grid cycle, it can be obtained by below equation：
In formula Λ be grating cycle, βTEFor the propagation constant of single mode waveguide TE patterns, βTMFor the biography of single mode waveguide TM moulds
Broadcast constant.
A kind of embodiment as shown in Figure 1, the mode converter based on asymmetric Bragg waveguide grating that the present invention refers to
It is made up of traditional single mode waveguide, Symmetric Y-branch waveguide and asymmetric Bragg waveguide grating, the device all constituents are all
In being generally aligned in the same plane.All single mode waveguides 1,3 in Fig. 1, Symmetric Y-branch waveguide 2 and asymmetric Bragg waveguide grating 4,
All using the ridge waveguide shown in Fig. 2.
Embodiment：
As shown in Figure 1 and Figure 4, use top layer silicon thickness for 340nm, 2 μm of buried layer of silicon dioxide insulating barrier on silicon (SOI) material
Material, after crystal column surface cleaning is completed, carry out deep-UV lithography or e-beam direct write lithography obtains silicon etching mask, by twice
Silicon dry etching, produce the silicon ridge waveguide of the wide 450nm of interior ridge and wide 5 μm of ectoloph, a height of 120nm of ectoloph.Described is non-right
The grating tooth for claiming Bragg waveguide grating is designed on a side of waveguide, i.e. the side etching Bragg waveguide of waveguide
Grating, rectangular raster tooth are 150nm, and the depth of grating tooth is 220nm, and the cycle of grating is 300nm.
Screen periods parameter in above-described embodiment is that the ridge waveguide for being directed to 450nm width designs, and device also is adapted for it
The ridge waveguide of its width, the ridge waveguide of different top layer silicon thicknesses is also applied for, only need to change different screen periods parameters, mould
Formula translation function can be achieved.Whole device, which need to only pass through twice etching, can complete to make.
Above-mentioned embodiment is used for illustrating the present invention, rather than limits the invention, the present invention's
In spirit and scope of the claims, to any modifications and changes of the invention made, protection model of the invention is both fallen within
Enclose.
Claims (3)
- A kind of 1. mode converter based on asymmetric Bragg waveguide grating, it is characterised in that：Including singlemode input waveguide, right Claim Y bifurcated waveguides, single-mode output waveguide, asymmetric Bragg waveguide grating；Singlemode input waveguide and single-mode output waveguide difference It is connected with two branch-waveguides of Symmetric Y-branch waveguide, the trunk waveguide of Symmetric Y-branch waveguide and asymmetric Bragg waveguide light Grid are connected, and TE ∕ TM patterns are input in asymmetric Bragg waveguide grating by singlemode input waveguide by Symmetric Y-branch waveguide, Described asymmetric Bragg waveguide grating is formed by etching One Dimension Periodic unit on the side of waveguide one, and this week expires The phase-matching condition coupled in sufficient single mode waveguide between TE and TM patterns, the asymmetric Bragg waveguide grating will be at it The TE ∕ TM patterns of middle transmission are rotated by 90 °, and are converted to TM ∕ TE patterns, and are reflected back towards, by Symmetric Y-branch waveguide from Single-mode output waveguide exports.
- A kind of 2. mode converter based on asymmetric Bragg waveguide grating according to claim 1, it is characterised in that： Described singlemode input waveguide, Symmetric Y-branch waveguide, single-mode output waveguide and asymmetric Bragg waveguide grating for support TE and The ridge waveguide of TM patterns.
- 3. a kind of mode converter based on asymmetric Bragg waveguide grating according to claim 2, its feature exist In：The periodic unit shape of the described asymmetric Bragg waveguide grating of composition is rectangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510381769.7A CN104950393B (en) | 2015-07-02 | 2015-07-02 | A kind of mode converter based on asymmetric Bragg grating |
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| CN201510381769.7A CN104950393B (en) | 2015-07-02 | 2015-07-02 | A kind of mode converter based on asymmetric Bragg grating |
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| CN104950393A CN104950393A (en) | 2015-09-30 |
| CN104950393B true CN104950393B (en) | 2018-02-27 |
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Families Citing this family (7)
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| CN105572796B (en) * | 2016-03-07 | 2018-08-21 | 龙岩学院 | A kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating |
| CN107167873A (en) * | 2017-06-12 | 2017-09-15 | 南京大学 | A kind of annular reflection formula waveguide optical grating wave filter and preparation method |
| CN107687907B (en) * | 2017-07-17 | 2020-03-24 | 东北大学 | Temperature sensing method based on liquid-filled hollow annular fiber bragg grating |
| JP6476265B1 (en) * | 2017-11-07 | 2019-02-27 | 沖電気工業株式会社 | Optical waveguide device |
| CN109061799B (en) * | 2018-08-20 | 2020-04-03 | 西北大学 | Mode converter based on fine core fiber Bragg grating |
| CN111366337A (en) * | 2018-12-26 | 2020-07-03 | 中兴光电子技术有限公司 | On-chip polarization rotation testing device and method |
| CN111999913A (en) * | 2020-08-05 | 2020-11-27 | 联合微电子中心有限责任公司 | Thermo-optic phase shifter |
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| CN1175001A (en) * | 1996-07-23 | 1998-03-04 | 三星电子株式会社 | Polarization device of integrated optics |
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| CN103217738A (en) * | 2013-03-27 | 2013-07-24 | 浙江大学 | Mode add-drop multiplexing and demultiplexing device based on grating-assisting type coupler |
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| WO2010030251A2 (en) * | 2008-09-15 | 2010-03-18 | Agency For Science, Technology And Research | Integrated optical sensors operating in the frequency domain |
| US8227178B2 (en) * | 2009-08-25 | 2012-07-24 | Fujikura Ltd. | Manufacturing method of planar optical waveguide device with grating structure |
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2015
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| CN1175001A (en) * | 1996-07-23 | 1998-03-04 | 三星电子株式会社 | Polarization device of integrated optics |
| CN101320113A (en) * | 2008-07-15 | 2008-12-10 | 浙江大学 | Waveguide type polarization mode converter |
| CN103217738A (en) * | 2013-03-27 | 2013-07-24 | 浙江大学 | Mode add-drop multiplexing and demultiplexing device based on grating-assisting type coupler |
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