CN104949614A - System and apparatus for providing real-time wavelength correction for laser displacement interferometer - Google Patents
System and apparatus for providing real-time wavelength correction for laser displacement interferometer Download PDFInfo
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- CN104949614A CN104949614A CN201410288889.8A CN201410288889A CN104949614A CN 104949614 A CN104949614 A CN 104949614A CN 201410288889 A CN201410288889 A CN 201410288889A CN 104949614 A CN104949614 A CN 104949614A
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- laser
- wavelength
- laser displacement
- real
- displacement interferometer
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Abstract
The invention relates to a system and apparatus for providing real-time wavelength correction for a laser displacement interferometer. The apparatus comprises a diffraction type grating, a focusing lens, and a laser spot position sensor. The diffraction type grating is used for generating a specific diffraction angle for laser light with a specific wavelength according to an optical diffraction principle; a combination unit of the focusing lens and the position sensor is used for sensing a diffraction angle change being a real-time changing value based on the environmental factor influence on the laser wavelength, thereby providing real-time correction of the actual wavelength value. The system having real-time self-wavelength-correction function has advantages of simple structure and low cost and is suitable for any laser displacement interferometer. A laser diode can be used as a light source, thereby reducing the overall dimension of the laser displacement interferometer; and the system is suitable for a displacement sensor as a short-stroke nanometer positioning platform.
Description
[technical field belonging to invention]
The invention relates to the optical system that a kind of tool optical maser wavelength is revised in real time and device, being suitable for being applied to any take wavelength as the laser displacement interferometer of digit, belongs to precise measure and precision machinery technology field.
[background technology]
The principle of work of general laser utilizes the standing wave in optical cavity and luminophor to resonate, the electronics on high energy rank in the beam excitation luminophor that its repetitiousness shuttles back and forth, finally form the high light beam of an energy density with straight ahead, it has high brightness, monochromaticity is good good with same tone.Because still possess good luminosity under each environment, therefore be widely used in various industrial aspect, the laser displacement interferometer that the elementary cell calculated for displacement with wavelength value forms has been the displacement correction instrument that industry member is conventional, and the positioning precision as numerically-controlled tool machine and linear orientation transfer table corrects.But when laser is in different temperatures, the rising-heat contracting-cold phenomenon because of resonant cavity length makes wavelength produce drift.Existing laser displacement interferometer all adopts different laser steady frequency technologies Wavelength stabilized to make, but the system complex of laser frequency stabilization mode, cost are high and cannot reach the function of absolute frequency stabilization, and wavelength value is still subject to environmental change to be needed to do suitable correction.Therefore, how can direct the real time measure wavelength value and do not consider to be feature of the present invention from frequency-stabilizing method.Optical maser wavelength amending unit proposed by the invention is applicable to any laser displacement interferometer, real-time wavelength value is accurately provided, also the little diode laser of volume can be used for light source is significantly to reduce the overall volume of laser displacement interferometer, be suitable for the displacement transducer as short stroke how rice locating platform.
[summary of the invention]
The present invention proposes one and utilizes light beam to penetrate after a lenticular lenses produces diffraction, as wavelength value changes, the principle that namely diffraction angle changes, the real-time wavelength update the system of design one innovation, can revise the wavelength variable quantity of any laser displacement interferometer in real time, displacement be measured more accurate.
The invention provides the optical system of a kind of tool real-time wavelength correction, it has the advantage of low-cost and high-precision.
The present invention proposes a kind of system and the device that laser displacement interferometer are provided to real-time wavelength correction, and it is suitable for measuring real time laser wavelength variable quantity to revise the wavelength variable quantity of laser displacement interferometer, displacement is measured more accurate.The system of this tool real-time wavelength correction and device, it comprises a diffraction mode grating, a condenser lens and a laser spot positions sensor.As shown in Figure 1, separate when the light beam (1) of laser displacement interference instrument penetrates one diffraction mode grating (2), this grating (2) is suitable for the first rank diffraction light (3) of the specific diffraction angle of generation one for the laser light of specific wavelength according to optical diffraction principle, generation one focused beam (5) is focused on optical position sensor (6) through condenser lens (4) by this diffraction light.Condenser lens (4) and optical position sensor (6) are all fixed on a brace table (7).This condenser lens (4) is suitable for according to autocollimator principle the angle variable quantity sensing diffraction light (3) with the combination of optical position sensor (6).The change of this diffraction angle is mainly because optical maser wavelength is subject to the real-time change value of such environmental effects.The original wavelength of laser light when a certain fixed temperature can correct in advance and obtain in constant temperature enclosure, and the diffraction angle that this wavelength is corresponding can store in advance.When laser displacement interferometer operates under various circumstances, its wavelength can change, and apparatus of the present invention can sense the variable quantity of this wavelength in real time, provides the real-time correction of actual wavelength value.The optical system of this tool real-time wavelength correction has that structure is simple, low cost and can improve the advantage of laser displacement interferometer measurement accuracy in real time.
[accompanying drawing explanation]
Fig. 1 is main application figure
Fig. 2 implements illustration
[embodiment]
One of the present invention embodiment as shown in Figure 2, to any laser displacement interferometer be made up of LASER Light Source, displacement interferometer module and mobile mirror, as long as laser light is isolated through a spectroscope real-time wavelength that a light beam (1) the i.e. device of available the present invention senses laser, to provide the wavelength correction of laser displacement interferometer.
Specify representative graph:
(1) this case appointment representative graph is: Fig. 1.
(2) the component symbol simple declaration of this representative graph:
1: separate the light beam from laser displacement interference instrument
2: penetration lenticular lenses
3: diffracted beam
4: condenser lens
5: focused beam
6: optical position sensor
7: brace table
Claims (3)
1. tool provides system and a device for real-time wavelength correction to laser displacement interferometer, comprising:
One diffraction mode grating, accepts from the isolated light source of laser displacement interferometer
One condenser lens
One laser spot positions sensor
One brace table.
2. the tool as described in claim the 1st provides system and the device of real-time wavelength correction to laser displacement interferometer, wherein this diffraction mode grating can be penetration or reflecting light grid.
3. the tool as described in claim the 1st provides system and the device of real-time wavelength correction to laser displacement interferometer, its laser displacement interferometer implemented can be any LASER Light Source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410288889.8A CN104949614A (en) | 2014-06-24 | 2014-06-24 | System and apparatus for providing real-time wavelength correction for laser displacement interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410288889.8A CN104949614A (en) | 2014-06-24 | 2014-06-24 | System and apparatus for providing real-time wavelength correction for laser displacement interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104949614A true CN104949614A (en) | 2015-09-30 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410288889.8A Pending CN104949614A (en) | 2014-06-24 | 2014-06-24 | System and apparatus for providing real-time wavelength correction for laser displacement interferometer |
Country Status (1)
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| CN (1) | CN104949614A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105277118A (en) * | 2015-11-27 | 2016-01-27 | 成都信息工程大学 | Laser wavelength correction-type corner reflector laser interferometer and wavelength correction method |
Citations (6)
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| JPH08101120A (en) * | 1994-09-30 | 1996-04-16 | Hitachi Ltd | Wavelength dispersion correcting optical device for evanescent wave intrusion length |
| EP1133034A2 (en) * | 2000-03-10 | 2001-09-12 | Nec Corporation | Wavelength stabilized laser module |
| TW475304B (en) * | 2000-02-09 | 2002-02-01 | Cymer Inc | Fast wavelength correction technique for a laser |
| US6774368B2 (en) * | 2001-03-08 | 2004-08-10 | Baylor University | Dispersive near-infrared spectrometer with automatic wavelength calibration |
| CN1796975A (en) * | 2004-12-28 | 2006-07-05 | 财团法人工业技术研究院 | Device for measuring spectrum image |
| US20100314534A1 (en) * | 2006-12-16 | 2010-12-16 | David Campion | Refined optical system |
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2014
- 2014-06-24 CN CN201410288889.8A patent/CN104949614A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08101120A (en) * | 1994-09-30 | 1996-04-16 | Hitachi Ltd | Wavelength dispersion correcting optical device for evanescent wave intrusion length |
| TW475304B (en) * | 2000-02-09 | 2002-02-01 | Cymer Inc | Fast wavelength correction technique for a laser |
| EP1133034A2 (en) * | 2000-03-10 | 2001-09-12 | Nec Corporation | Wavelength stabilized laser module |
| US6774368B2 (en) * | 2001-03-08 | 2004-08-10 | Baylor University | Dispersive near-infrared spectrometer with automatic wavelength calibration |
| CN1796975A (en) * | 2004-12-28 | 2006-07-05 | 财团法人工业技术研究院 | Device for measuring spectrum image |
| US20100314534A1 (en) * | 2006-12-16 | 2010-12-16 | David Campion | Refined optical system |
Non-Patent Citations (1)
| Title |
|---|
| 薛梅等: "激光干涉仪波长的自动实时补偿", 《工具技术》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105277118A (en) * | 2015-11-27 | 2016-01-27 | 成都信息工程大学 | Laser wavelength correction-type corner reflector laser interferometer and wavelength correction method |
| CN105277118B (en) * | 2015-11-27 | 2018-03-27 | 成都信息工程大学 | A kind of optical maser wavelength modification method using optical maser wavelength amendment type corner reflector laser interferometer |
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| DD01 | Delivery of document by public notice |
Addressee: CHANGZHOU HEYUE PHOTOELECTRIC SCIENCE & TECHNOLOGY Co.,Ltd. Document name: Notification of Passing Preliminary Examination of the Application for Invention |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| CB02 | Change of applicant information |
Address after: 213000 innovation room, North building, A309, Xinbei District, Jiangsu, Changzhou Applicant after: CHANGZHOU HEYUE PHOTOELECTRIC SCIENCE & TECHNOLOGY Co.,Ltd. Address before: 213000 room A101, building 2, Xinbei business center, Changzhou, Jiangsu Applicant before: CHANGZHOU HEYUE PHOTOELECTRIC SCIENCE & TECHNOLOGY Co.,Ltd. |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150930 |