CN104949540A - Gas condensing device - Google Patents
Gas condensing device Download PDFInfo
- Publication number
- CN104949540A CN104949540A CN201410117964.4A CN201410117964A CN104949540A CN 104949540 A CN104949540 A CN 104949540A CN 201410117964 A CN201410117964 A CN 201410117964A CN 104949540 A CN104949540 A CN 104949540A
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- CN
- China
- Prior art keywords
- water
- cooled
- outer tube
- condensation
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 47
- 238000001816 cooling Methods 0.000 claims abstract description 41
- 238000009833 condensation Methods 0.000 claims abstract description 35
- 230000005494 condensation Effects 0.000 claims abstract description 35
- 230000000694 effects Effects 0.000 abstract description 6
- 229920006395 saturated elastomer Polymers 0.000 abstract description 4
- 238000004140 cleaning Methods 0.000 abstract description 2
- 238000001914 filtration Methods 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000013067 intermediate product Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Abstract
The invention relates to a gas condensing device which comprises a water-cooling outer tube, a water-cooling inner tube arranged in the water-cooling outer tube, and the upper end and the lower end of the water-cooling outer tube are provided with a water outlet and a water inlet respectively; the two ends of the water-cooling inner tube are not closed; the gas condensing device further comprises a condensation column inserted into the water-cooling inner tube; water-cooling rings are arranged on the outer circle of the water-cooling inner tube in a sleeving mode at equal intervals, the water-cooling inner tube and a cavity of the water-cooling outer tube are sealed through the water-cooling rings, and each water-cooling ring is provided with a notch which can make condensate water pass through. Compared with the prior art, the water cooling effect is even, after a filter drum is saturated for absorption and filtration, cleaning or replacing can be conducted on the filter drum, and the operation is easy.
Description
Technical field
The present invention relates to a kind of condensation of gas device, particularly a kind of condensing unit for residual gas after atomic layer deposition system reaction.
Background technology
Ald (ALD) is for forming the technique of thin-film material on substrate such as silicon chip in semiconductor industry.Ald is a kind of steam reaction deposition, wherein forms film by the reactive deposition of multiple superthin layer.The source material of current atom layer deposition can divide three classes by form: gas, liquid and solid, and in atomic layer deposition, one or more compounds (source material) of the material be deposited will be provided to substrate with gaseous molecular form, generate in order to reaction on substrate the thin-film material needed.
Because liquid and solid are compared with gaseous material, there is low saturated vapor pressure, so they are usually heated to reach enough vapour pressures.When temperature rises, make the pressure in source exceed pressure in reactor, source can be transported to reactor and be used under differential pressure action.In order to prevent material condensation of vaporizing, with all devices surface that source material contacts, all there is identical with the source space that source material is vaporized or higher than it temperature wherein.In addition, the temperature conditions that different technique needs is different, and reative cell heats simultaneously, to avoid the residual of the precursor of such as water and ammonia and so in atomic layer deposition cycles process.
Atomic layer deposition process, residual gas and the intermediate product of the rear saturated surplus of reaction just need to do condensation process, could discharge after harmless process.
Summary of the invention
The object of the present invention is to provide a kind of water-cooled uniform in effect, after cartridge filter absorbing and filtering is saturated, can carry out cleaning or replacing, and condensation of gas device simple to operate.
To achieve these goals, the present invention devises a kind of condensation of gas device, comprises water-cooled outer tube, is arranged on water-cooled inner tube in described water-cooled outer tube, and the two ends up and down of described water-cooled outer tube have a delivery port and a water inlet respectively;
The two ends of described water-cooled inner tube are what do not close;
Described condensation of gas device also comprises: insert the condensation column in described water-cooled inner tube;
The cylindrical of described water-cooled inner tube is equidistantly arranged with water-cooling ring, is sealed by the cavity of described water-cooling ring and described water-cooled outer tube, and often organize on water-cooling ring there is the breach that condensed water can be allowed to pass through.
Embodiments of the present invention in terms of existing technologies, have after such as ald reaction, liquid source and Solid Source reaction residual matter and intermediate product carry out cooling condensation by the condensation column in water-cooled inner tube, become liquid or solid particle, when the gas temperature of heat reduces, through entering corresponding emission-control equipment to the pipeline that water-cooled inner tube end is connected, enter in air after harmless process.Wherein, because delivery port is the top being arranged on water inlet, and equidistantly water-cooling ring is arranged with on the tube wall of water-cooled inner tube, sealed by the cavity of each water-cooling ring and water-cooled outer tube, often organize breach water-cooling ring also having the water that can be condensed and pass through in addition, thus make condensed water from after water inlet enters the cavity of water-cooled outer tube be progressively risen by the breach of every layer of cold water ring after discharge from delivery port again, thus ensure that the effect of whole water-cooled is very even.
Further, the position of the breach on two adjacent groups water-cooling ring is contrary.Thus make condensed water only behind the cavity area formed close to the full adjacent two layers water-cooling ring of punching, just can overflow from the breach of the water-cooling ring of last layer and rise to in the cavity area that last layer water-cooling ring is formed again.Flow through multilayer water-cooling ring step by step, extend water stream channel, thus improve the water-cooled effect of whole condensation of gas device.
Further, described condensation of gas device also comprises: carry out with the two ends of described water-cooled inner tube being respectively connected the suction flange for fixing described condensation column and outlet(discharge) flange; Wherein, the delivery port of the corresponding described water-cooled outer tube of described suction flange, the water inlet of the corresponding described water-cooled outer tube of described outlet(discharge) flange.And the water inlet of described water-cooled outer tube connects a water supply connector, the delivery port of described water-cooled outer tube connects a water out adapter.
Further, the end of described water-cooled inner tube is also provided with a water cooled seal ring, is sealed by described water cooled seal ring and described water-cooled outer tube.Thus the sealing property that further enhancing between water-cooled inner tube and water-cooled outer tube.
Further, described outlet(discharge) flange is fastenedly connected by described clip and described water-cooled outer tube.Thus ensure that the tightness of the connection of outlet(discharge) flange and water-cooled inner tube.
Accompanying drawing explanation
Fig. 1 is the structural representation of the condensation of gas device of first embodiment of the invention;
Fig. 2 is the installation diagram of the condensation of gas device of first embodiment of the invention;
Fig. 3 is the structural representation of the condensation of gas device of second embodiment of the invention.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearly, below in conjunction with accompanying drawing, the embodiments of the present invention are explained in detail.But, persons of ordinary skill in the art may appreciate that in each embodiment of the present invention, proposing many ins and outs to make reader understand the application better.But, even without these ins and outs with based on the many variations of following embodiment and amendment, each claim of the application technical scheme required for protection also can be realized.
First embodiment of the present invention relates to a kind of condensation of gas device, comprises water-cooled outer tube 1, is arranged on water-cooled inner tube 2 in water-cooled outer tube 1.Wherein, the two ends up and down of water-cooled outer tube 1 have delivery port 3 and a water inlet 4 respectively, and the two ends of water-cooled inner tube 2 are what do not close, and inside is a hollow structure.
In addition, in the present embodiment, the cylindrical of water-cooled inner tube 2 is equidistantly arranged with water-cooling ring 5, water-cooled inner tube 2 is sealed by the cavity of each water-cooling ring 5 with water-cooled outer tube 1, and often organizes on water-cooling ring 5 and have the breach 6 that condensed water can be allowed to pass through.
The condensation of gas device of present embodiment also comprises: insert the condensation column 7 in water-cooled inner tube 2.
As shown in the above, after there is such as ald reaction, liquid source and Solid Source reaction residual matter and intermediate product carry out cooling condensation by the condensation column 7 in water-cooled inner tube 2, become liquid or solid particle, when the gas temperature of heat reduces, and enter corresponding emission-control equipment through the pipeline be connected to water-cooled inner tube 2 end, enter in air after harmless process.Wherein, because delivery port 4 is the tops being arranged on water inlet 3, and equidistantly water-cooling ring 5 is arranged with on the tube wall of water-cooled inner tube 2, sealed with the cavity of water-cooled outer tube 1 by each water-cooling ring 5, often organize the breach 8 water-cooling ring also having the water that can be condensed and pass through in addition, thus make condensed water from after water inlet 3 enters the cavity of water-cooled outer tube 1 be progressively risen by the breach of every layer of cold water ring 5 after discharge from delivery port 4 again, thus ensure that the effect of whole water-cooled is very even.
Specifically, in the present embodiment, the two ends of water-cooled inner tube are connected to suction flange 8 for fixing condensation column 7 and outlet(discharge) flange 9, and water-cooled inner tube 2 is sent into material by suction flange 8 and outlet(discharge) flange 9 and discharged material.Wherein, the installation position of suction flange 8 is delivery ports 3 of corresponding water-cooled outer tube 1, and the installation position of outlet(discharge) flange 9 is water inlets 4 of corresponding water-cooled outer tube 1.In addition, in the present embodiment, the water inlet 4 of water-cooled outer tube 1 also connects a water supply connector 10, and the delivery port 3 of water-cooled outer tube 1 connects a water out adapter 11, and water-cooled outer tube 1 is introduced condensed water by water supply connector 10 and water out adapter 11 and discharged condensed water.
In addition, it is worth mentioning that, in the present embodiment, the end of water-cooled inner tube 2 is also provided with a water cooled seal ring 12, is sealed by water cooled seal ring 12 and water-cooled outer tube 1.Thus the sealing property further increased between water-cooled inner tube 2 and water-cooled outer tube 1.
In addition, in the present embodiment, outlet(discharge) flange 8 is fastenedly connected by clip 13 and water-cooled outer tube 1.Thus ensure that the tightness of the connection of outlet(discharge) flange 9 and water-cooled inner tube 2.
Second embodiment of the present invention relates to a kind of condensation of gas device, second embodiment is on the basis of the first embodiment, done further improvement, it mainly improves and is: as shown in Figure 3, and in the present embodiment, the position of the breach 6 on two adjacent groups water-cooling ring 5 is contrary.Thus make condensed water only behind the cavity area formed close to the full adjacent two layers water-cooling ring 5 of punching, just can overflow from the breach 6 of the water-cooling ring 5 of last layer and rise to in the cavity area that last layer water-cooling ring 5 is formed again, flow through multilayer water-cooling ring step by step, extend water stream channel, thus further increase the water-cooled effect of whole condensation of gas device.
Persons of ordinary skill in the art may appreciate that the respective embodiments described above realize specific embodiments of the invention, and in actual applications, various change can be done to it in the form and details, and without departing from the spirit and scope of the present invention.
Claims (6)
1. a condensation of gas device, comprises water-cooled outer tube, is arranged on water-cooled inner tube in described water-cooled outer tube, and the two ends up and down of described water-cooled outer tube have a delivery port and a water inlet respectively;
The two ends of described water-cooled inner tube are what do not close;
Described condensation of gas device also comprises: insert the condensation column in described water-cooled inner tube, it is characterized in that:
The cylindrical of described water-cooled inner tube is equidistantly arranged with water-cooling ring, is sealed by the cavity of described water-cooling ring and described water-cooled outer tube, and often organize on water-cooling ring there is the breach that condensed water can be allowed to pass through.
2. condensation of gas device according to claim 1, is characterized in that: the position of the breach on two adjacent groups water-cooling ring is contrary.
3. condensation of gas device according to claim 1, is characterized in that: described condensation of gas device also comprises: carry out with the two ends of described water-cooled inner tube being respectively connected the suction flange for fixing described condensation column and outlet(discharge) flange;
Wherein, the delivery port of the corresponding described water-cooled outer tube of described suction flange, the water inlet of the corresponding described water-cooled outer tube of described outlet(discharge) flange.
4. condensation of gas device according to claim 1, is characterized in that: the end of described water-cooled inner tube is also provided with a water cooled seal ring, is sealed by described water cooled seal ring and described water-cooled outer tube.
5. condensation of gas device according to claim 1, is characterized in that: the water inlet of described water-cooled outer tube connects a water supply connector, and the delivery port of described water-cooled outer tube connects a water out adapter.
6. condensation of gas device as claimed in any of claims 1 to 5, is characterized in that: described outlet(discharge) flange is fastenedly connected by described clip and described water-cooled outer tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410117964.4A CN104949540B (en) | 2014-03-26 | 2014-03-26 | Gas condensing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410117964.4A CN104949540B (en) | 2014-03-26 | 2014-03-26 | Gas condensing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104949540A true CN104949540A (en) | 2015-09-30 |
| CN104949540B CN104949540B (en) | 2017-02-08 |
Family
ID=54164400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410117964.4A Active CN104949540B (en) | 2014-03-26 | 2014-03-26 | Gas condensing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104949540B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106591803A (en) * | 2017-02-10 | 2017-04-26 | 上海微世半导体有限公司 | Cold trap device of LPCVD system |
| CN112790704A (en) * | 2019-11-14 | 2021-05-14 | 宁波方太厨具有限公司 | Cleaning machine with drying function |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2510817Y (en) * | 2001-12-07 | 2002-09-11 | 重庆大学 | Underground double-pipe heat exchanger |
| JP3879302B2 (en) * | 1999-02-03 | 2007-02-14 | 株式会社日立製作所 | Condenser |
| CN1977139A (en) * | 2004-08-06 | 2007-06-06 | 昭和电工株式会社 | Heat exchanger, intermediate heat exchanger, and regrigeration cycle |
| JP2010270925A (en) * | 2009-05-19 | 2010-12-02 | Toshiba Corp | Direct-contact type condenser |
| CN203772050U (en) * | 2014-03-26 | 2014-08-13 | 上海福宜真空设备有限公司 | Gas condensing device |
-
2014
- 2014-03-26 CN CN201410117964.4A patent/CN104949540B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3879302B2 (en) * | 1999-02-03 | 2007-02-14 | 株式会社日立製作所 | Condenser |
| CN2510817Y (en) * | 2001-12-07 | 2002-09-11 | 重庆大学 | Underground double-pipe heat exchanger |
| CN1977139A (en) * | 2004-08-06 | 2007-06-06 | 昭和电工株式会社 | Heat exchanger, intermediate heat exchanger, and regrigeration cycle |
| JP2010270925A (en) * | 2009-05-19 | 2010-12-02 | Toshiba Corp | Direct-contact type condenser |
| CN203772050U (en) * | 2014-03-26 | 2014-08-13 | 上海福宜真空设备有限公司 | Gas condensing device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106591803A (en) * | 2017-02-10 | 2017-04-26 | 上海微世半导体有限公司 | Cold trap device of LPCVD system |
| CN106591803B (en) * | 2017-02-10 | 2019-06-14 | 上海微世半导体有限公司 | A kind of LPCVD system cold-trap device |
| CN112790704A (en) * | 2019-11-14 | 2021-05-14 | 宁波方太厨具有限公司 | Cleaning machine with drying function |
| CN112790704B (en) * | 2019-11-14 | 2022-05-17 | 宁波方太厨具有限公司 | Cleaning machine with drying function |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104949540B (en) | 2017-02-08 |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: gas condensing unit Effective date of registration: 20220801 Granted publication date: 20170208 Pledgee: Industrial Bank Co.,Ltd. Shanghai Nanxiang sub branch Pledgor: SHANGHAI FUYI VACUUM EQUIPMENT Co.,Ltd. Registration number: Y2022310000153 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20231123 Granted publication date: 20170208 Pledgee: Industrial Bank Co.,Ltd. Shanghai Nanxiang sub branch Pledgor: SHANGHAI FUYI VACUUM EQUIPMENT Co.,Ltd. Registration number: Y2022310000153 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right |