TWI755296B - gas condensing unit - Google Patents

Abstract

A gas condensing device includes an outer cylinder structure and a condensing structure. The outer cylinder structure includes an outer cylinder body and a cylinder cover. One end of the outer cylinder away from the cylinder cover forms an exhaust outlet. The cylinder cover forms an air inlet opening through to the outer cylinder. The condensing structure includes an inner tube extending from the inner side of the tube cover toward the exhaust outlet, an inflow pipe and an outflow pipe respectively connected to the inner barrel, and a plurality of pipes connected to the outside of the inner barrel and along the inner barrel. Condensing panels arranged at intervals in the extension direction. Each condenser plate has a communication hole. The communication holes of the adjacent condensing plates are staggered to each other. The intake inlet, the communication holes and the exhaust outlet can guide the gas to pass through in sequence, so that the gas can exchange heat with the inner cylinder and the condensing plates with the largest contact area, and let some components in the gas cool down and condense, The purpose of improving the efficiency of the gas condensing device for filtering gas is achieved.

Description

gas condensing unit

The present invention relates to a gas condensing device, in particular to a gas condensing device suitable for condensing and retaining volatile gas.

During the heating process of the existing wafer in the heat treatment process, the coating applied on the wafer will volatilize gas due to heating, so that the heating equipment of the heat treatment process is filled with volatile gas. In order to prevent volatile gas from polluting the external environment after being discharged from the heating equipment, a gas condensing device is usually installed on the exhaust device of the heating equipment to filter the volatile gas and avoid environmental pollution. Therefore, how to efficiently filter volatile gases has become a topic worthy of study.

Therefore, the object of the present invention is to provide a gas condensing device with improved efficiency of filtering gas.

Therefore, the gas condensing device of the present invention includes an outer cylinder structure and a condensing structure.

The outer cylinder structure includes an outer cylinder body and a cylinder cover closing one end of the outer cylinder body. One end of the outer cylinder away from the cylinder cover forms an exhaust outlet. The cylinder cover forms an air inlet opening through to the outer cylinder.

The condensation structure includes an inner tube extending from the inner side of the tube cover toward the exhaust outlet, an inflow pipe and an outflow pipe respectively connected to the inner tube, and a plurality of pipes connected to the outside of the inner tube and extending along the inner tube Condensing plates arranged at intervals in the extending direction. Each condenser plate has a communication hole. The communication holes of the adjacent condensing plates are staggered to each other.

Wherein, the inner tube and the condensing plates are made of materials with high heat transfer properties, and the inflow pipe, the inner tube and the outflow conduit can guide the hot fluid to pass through in sequence, so that the inner tube and the condensing plates are separated from each other. Thermal energy is conducted through the heat transfer fluid. In addition, the air inlet, the communication holes and the exhaust outlet can guide the gas to pass through in sequence, so that the gas can exchange heat with the inner cylinder and the condensing plates, so that some components in the gas can be cooled and condensed.

In some embodiments, the communication holes of the adjacent condensing plates are respectively symmetrically formed on the condensing plates with the axis of the inner cylinder as the center.

In some embodiments, the air inlet and the adjacent communication hole are respectively symmetrically formed on the cylinder cover and the corresponding condenser plate with the axis of the inner cylinder as the center.

In some embodiments, the side edges of the condensation plates are in close contact with the inner surface of the outer cylinder, so that the gas can only pass through the communication holes in sequence to the exhaust outlet.

In some embodiments, both the inflow conduit and the outflow conduit pass through the cylinder cover, the inflow conduit extends from the cap to the bottom of the inner cylinder, and the distance from the inflow conduit to the bottom of the inner cylinder is smaller than the outflow conduit The distance to the bottom of the inner cylinder enables the heat transfer fluid to flow from the bottom of the inner cylinder to the top of the inner cylinder.

In some embodiments, the cap is detachably locked to the outer cylinder, and when the cap is separated from the outer cylinder, the condensation structure can be removed from the outer cylinder along with the movement of the cap.

In some embodiments, the cylinder cover also forms a detection port which is always connected to the outer cylinder, the The gas condensing device also includes a pressure detector, which is arranged at the detection port to measure the pressure value in the outer cylinder.

In some embodiments, the outer diameter of the inner cylinder is larger than the outer diameters of the inflow conduit and the outflow conduit.

In some embodiments, each condenser plate has only one communication hole.

In some embodiments, the diameter of each communication hole is larger than the thickness of each of the condensation plates.

The effect of the present invention lies in that the number of the communication holes of each of the condensing plates is only one, and the positions formed by the through holes and the side edges of the condensing plates are attached to the outer cylinder, so that the outer The gas in the cylinder circulates along the longest path, thereby prolonging the heat exchange time between the gas in the outer cylinder and the condensing structure, so that some components in the gas in the outer cylinder are easier to cool down and condense, so as to achieve the efficiency of the gas condensing device for filtering gas purpose of promotion. In addition, because the length of the inflow pipe extending into the bottom of the inner cylinder is greater than the length of the outflow pipe, and the outer diameter of the inner cylinder is larger than the outer diameters of the inflow pipe and the outflow pipe, the heat exchange efficiency of the condensing structure can be increased. , can also achieve the purpose of improving the efficiency of filtering gas.

3: Gas condensing device

31: Outer cylinder structure

311: outer cylinder

312: Cylinder cover

313: Exhaust outlet

314: Intake inlet

315: detection port

32: Condensation structure

321: inner cylinder

322: Inflow Pipe

323: Outflow Pipe

324: Condensation plate

325: Connecting hole

9: Processing equipment

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: FIG. 1 is a three-dimensional schematic diagram illustrating an embodiment of a gas condensing device; FIG. 2 is a cross-sectional schematic diagram illustrating The detailed structure of the gas condensing device; and FIG. 3 is a schematic cross-sectional view from another perspective.

Referring to FIG. 1 to FIG. 3 , it is an embodiment of a gas condensing device 3 . The gas condensing device 3 is suitable for condensing and recycling volatile gas, and the gas condensing device 3 can be installed in a modularized manner in any equipment that needs to condense the gas. Wherein, the gas condensing device 3 is installed in a processing equipment 9 as an example, the gas condensing device 3 includes an outer cylinder structure 31 connected to the processing equipment 9, a condensing structure 32 with high heat transfer characteristics, and a pressure detection meter (not shown).

The outer cylinder structure 31 includes an outer cylinder body 311 and a cylinder cover 312 detachably locked to the outer cylinder body 311 . An exhaust outlet 313 is formed at one end of the outer cylinder 311 away from the cylinder cover 312 . In this embodiment, the outer cylinder 311 is a cylindrical cylinder with openings on both sides. Of course, the opening of the outer cylinder 311 can be adjusted correspondingly according to the position of the processing equipment 9 and the factory environment, so as to find a suitable set position and achieve better condensation recovery effect. In addition, the cylinder cover 312 covers the top of the outer cylinder 311 to close the opening of the top of the outer cylinder 311 . The exhaust outlet 313 is formed at the bottom of the outer cylinder 311 to be away from the opening at the top of the outer cylinder 311 . The cylinder cover 312 forms an air inlet 314 which communicates with the outer cylinder 311 and a detection port 315 which communicates with the outer cylinder 311 . The air inlet 314 is communicated with the processing equipment 9 , so that the gas in the processing equipment 9 can flow into the outer cylinder 311 . The detection port 315 is for the pressure detector to be inserted into the outer cylinder 311 from the outside, so as to monitor the pressure of the gas circulating in the outer cylinder 311 . Since the air pressure in the outer cylinder 311 is not exactly the same, in this embodiment, the pressure detector is used to measure the air pressure adjacent to the air inlet 314. In other embodiments, the pressure detector can also be It is to measure the air pressure adjacent to the exhaust outlet 313, or to measure both together to achieve the best monitoring effect.

The condensation structure 32 includes an inner cylinder 321 extending from the inner side of the cylinder cover 312 toward the exhaust outlet 313 , an inflow pipe 322 and an outflow pipe 323 respectively connected to the inner cylinder 321 , and a plurality of pipes connected to the inner cylinder Condensing plates 324 are arranged at intervals along the extending direction of the inner cylinder 321 outside the 321 . More specifically, the inner cylinder 321 and the condensing plates 324 are both accommodated in the outer cylinder 311 for the gas from the processing equipment 9 to borrow from the outer wall of the inner cylinder 321 and the condensing plates 324 . The condensing treatment of the unclean components in the gas is carried out by heat conduction. In this embodiment, the inner tube 321 and the condensing plates 324 are made of materials with high heat transfer characteristics. Both the inflow pipe 322 and the outflow pipe 323 penetrate through the cylinder cover 312, and guide the thermal fluid to flow into the inner cylinder 321 and the outflow of the thermal fluid from the inner cylinder 321 respectively to conduct the inner cylinder 321 and the condensation The thermal energy of the plate 324 is conducted through the heat transfer fluid. In this embodiment, the inflow pipe 322 extends from the cylinder cover 312 toward the bottom of the inner cylinder 321 . More specifically, the distance from the inflow pipe 322 to the bottom of the inner cylinder 321 is smaller than the distance from the outflow pipe 323 to the bottom of the inner cylinder 321 . In this way, the heat-conducting fluid can directly flow into the bottom of the inner cylinder 321 and flow toward the top of the inner cylinder 321 to ensure that the heat-conducting fluid fully flows through the inner cylinder 321 and increase the heat exchange efficiency of the condensing structure 32 . In addition, the outer diameter of the inner cylinder 321 is larger than the outer diameters of the inflow pipe 322 and the outflow pipe 323 to increase the overall surface area of the condensing structure 32 , thereby improving the heat exchange efficiency of the condensing structure 32 .

In the present embodiment, each condensing plate 324 forms a communication hole 325 penetrating two opposite plate surfaces of the condensing plate 324 , and the communication holes 325 of two adjacent condensing plates 324 are offset from each other. In this embodiment, the air inlet 314 and the communication hole 325 of the adjacent condenser plate 324 are symmetrically formed on the cylinder cover 312 and the corresponding condenser plate 324 with the axis of the inner cylinder 321 as the center. In addition, the communication holes 325 of the adjacent condensing plates 324 are symmetrically formed in the condensing plates 324 with the axis of the inner cylinder 321 as the center. At the same time, the number of communication holes 325 of each condensation plate 324 is only one, and only small gaps remain between the side edges of the condensation plates 324 and the inner surface of the outer cylinder 311, so that the outer cylinder can be Most of the gas in the body 311 passes through the communication holes 325 and finally flows out from the exhaust outlet 313 . In other words, the gas in the outer cylinder 311 can flow through the outer cylinder 311 along the longest path, so as to increase the heat exchange time between the gas in the outer cylinder 311 and the condensation structure 32 . Of course, the number of the communication holes 325 of each of the condensation plates 324 is preferably one but not limited to one, and the positions are not limited to be completely symmetrical, and slight differences are also within the scope of the claim of this case. In addition, the side edges of the condensing plates 324 and the inner surface of the outer cylinder 311 can also be in close contact without leaving any gaps, so as to achieve 100% tightness. In this embodiment, the diameter of each communication hole 325 is larger than the thickness of each condensation plate 324 , that is to say, the gas in the outer cylinder 311 has not been compressed and cooled by the hole wall of each communication hole 325 and has Through the communication holes 325, some components in the gas in the outer cylinder 311 (unclean components caused by volatilization on the workpiece) are cooled and condensed by heat exchange with the condensation structure 32, so as to achieve the effect of cooling and condensing the gas. Purification treatment.

The volatile gas in the processing equipment 9 is guided through the intake inlet 314 , the communication holes 325 and the exhaust outlet 313 in sequence, and exchanges heat with the inner cylinder 321 and the condensing plates 324 to generate heat. After cooling and condensing, liquid or colloidal organic substances are formed and remain in the outer cylinder 311 . At the same time, the inflow pipe 322 , the inner cylinder 321 and the outflow pipe 323 can sequentially guide the thermal fluid to pass through, so that the thermal energy of the inner cylinder 321 and the condensing plates 324 can be exported through the heat conduction fluid, so that the condensing structure 32 can be maintained below the temperature of volatile gases. It is worth mentioning that the organic matter remaining in the outer cylinder 311 may be attached to the plate surfaces of the condensation plates 324 and the walls of the communication holes 325 , causing the communication holes 325 to be blocked. At this time, the pressure detector will show that the pressure value in the outer cylinder 311 is too high, thus prompting the use of Otherwise, the cylinder cover 312 is separated from the outer cylinder body 311, so that the condensation structure 32 connected to the cylinder cover 312 can be taken out from the outer cylinder body 311 along with the movement of the cylinder cover 312, so as to facilitate subsequent cleaning of the condensation structure 32.

To sum up, because the number of the communication holes 325 of each condensation plate 324 is only one, and the positions formed by the through holes 325 and the side edges of the condensation plates 324 are fitted to the outer cylinder 311, The gas in the outer cylinder 311 can be circulated along the longest path, thereby prolonging the heat exchange time between the gas in the outer cylinder 311 and the condensing structure 32, so that the volatile impurities in the gas in the outer cylinder 311 are reduced. It is easy to cool down and condense, so as to achieve the purpose of improving the efficiency of the gas condensing device 3 for filtering gas. In addition, since the length of the inflow pipe 322 extending into the bottom of the inner cylinder 321 is greater than the length of the outflow pipe 323, and the outer diameter of the inner cylinder 321 is larger than the outer diameters of the inflow pipe 322 and the outflow pipe 323, the The heat exchange efficiency of the condensing structure 32 can also achieve the purpose of improving the efficiency of filtering gas, so it can indeed achieve the purpose of the present invention.

However, the above are only examples of the present invention, and should not limit the scope of implementation of the present invention. Any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the contents of the patent specification are still included in the scope of the present invention. within the scope of the invention patent.

3: Gas condensing device

31: Outer cylinder structure

311: outer cylinder

312: Cylinder cover

313: Exhaust outlet

314: Intake inlet

315: detection port

32: Condensation structure

321: inner cylinder

322: Inflow Pipe

323: Outflow Pipe

324: Condensation plate

325: Connecting hole

Claims (10)

A gas condensing device, comprising: an outer cylinder structure, including an outer cylinder body, and a cylinder cover closing one end of the outer cylinder body, the end of the outer cylinder body away from the cylinder cover forms an exhaust outlet, the cylinder The cover is formed with an air inlet leading to the outer cylinder body; and a condensation structure, including an inner cylinder extending from the inner side of the cylinder cover towards the exhaust outlet, an inflow pipe and an outflow pipe respectively communicating with the inner cylinder , and several condensing plates connected to the outside of the inner cylinder and arranged at intervals along the extending direction of the inner cylinder, each condensing plate has a communication hole, and the communication holes of two adjacent condensing plates are staggered with each other, wherein the The inner cylinder and the condensing plates are made of materials with high heat transfer characteristics, and the inflow pipe, the inner cylinder and the outflow pipe can guide the hot fluid to pass through in sequence, so that the heat energy of the inner cylinder and the condensing plates can pass through the heat conduction The fluid is led out, and the intake inlet, the communication holes and the exhaust outlet can guide the gas to pass through in sequence, so that the gas exchanges heat with the inner cylinder and the condensing plates, so that some components in the gas are cooled and condensed. The gas condensing device according to claim 1, wherein the communication holes of the adjacent condensing plates are symmetrically formed on the condensing plates respectively with the axis of the inner cylinder as the center. The gas condensing device according to claim 1, wherein the intake inlet and the adjacent communication hole are symmetrically formed on the cylinder cover and the corresponding condenser plate with the axis of the inner cylinder as the center, respectively. The gas condensing device of claim 1, wherein the side edges of the condensing plates are in close contact with the inner surface of the outer cylinder, so that the gas can only pass through the communication holes in sequence to the exhaust outlet. The gas condensing device as claimed in claim 1, wherein both the inflow pipe and the outflow pipe pass through the cylinder cover, and the inflow pipe extends from the cylinder cover toward the bottom of the inner cylinder, and The distance from the inflow pipe to the bottom of the inner cylinder is smaller than the distance from the outflow pipe to the bottom of the inner cylinder, so that the heat transfer fluid can flow from the bottom of the inner cylinder to the top of the inner cylinder. The gas condensing device as claimed in claim 1, wherein the cylinder cover is detachably locked to the outer cylinder body, and when the cylinder cover is separated from the outer cylinder body, the condensation structure can be freed as the cylinder cover moves. The outer cylinder is taken out. The gas condensing device as claimed in claim 1, wherein the cylinder cover further forms a detection port leading to the outer cylinder body, the gas condensing device further comprises a pressure detector, and the pressure detector is arranged at the detection port to measure the pressure value in the outer cylinder. The gas condensing device according to claim 1, wherein the outer diameter of the inner cylinder is larger than the outer diameters of the inflow pipe and the outflow pipe. The gas condensing device according to claim 1, wherein each condensing plate has only one communication hole. The gas condensing device according to claim 1, wherein the diameter of each communication hole is larger than the thickness of each condensing plate.

Images