TW201701935A - Cold trap - Google Patents
Cold trap Download PDFInfo
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- TW201701935A TW201701935A TW105111473A TW105111473A TW201701935A TW 201701935 A TW201701935 A TW 201701935A TW 105111473 A TW105111473 A TW 105111473A TW 105111473 A TW105111473 A TW 105111473A TW 201701935 A TW201701935 A TW 201701935A
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- gas
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- housing
- coolant
- cooling
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
- B01D5/0003—Condensation of vapours; Recovering volatile solvents by condensation by using heat-exchange surfaces for indirect contact between gases or vapours and the cooling medium
- B01D5/0012—Vertical tubes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
- B01D5/0003—Condensation of vapours; Recovering volatile solvents by condensation by using heat-exchange surfaces for indirect contact between gases or vapours and the cooling medium
- B01D5/0015—Plates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
Description
本發明係有關於一種用於冷凝移除氣流之揮發性組分的清潔裝置，該清潔裝置在CVD塗佈設備特別是MOCVD設備之反應器的下游使用。在CVD塗佈裝置中，氣態起始材料被導入反應器並於該處相互發生化學反應或者與包含於反應器中之基板發生化學反應。起始材料或反應產物為離開該反應器之氣流中的揮發性組分。該氣流穿過冷阱，該冷阱被冷卻介質冷卻，因而當壁溫低於該揮發性組分之冷凝溫度時，該等揮發性組分在該冷阱之表面冷凝。此種冷阱之作用在於移除氣流中之殘餘製程氣體或反應產物，該氣流接下來被進一步清潔及/或穿過真空泵。 The present invention relates to a cleaning apparatus for condensing volatile components of a gas stream, which is used downstream of a reactor of a CVD coating apparatus, particularly an MOCVD apparatus. In a CVD coating apparatus, a gaseous starting material is introduced into a reactor where it chemically reacts with each other or with a substrate contained in the reactor. The starting material or reaction product is the volatile component of the gas stream exiting the reactor. The gas stream passes through a cold trap which is cooled by a cooling medium such that when the wall temperature is below the condensation temperature of the volatile component, the volatile components condense on the surface of the cold trap. The function of such a cold trap is to remove residual process gases or reaction products from the gas stream which are then further cleaned and/or passed through a vacuum pump.
DE 299 04 465 U1描述一種具有相互平行佈置之冷卻元件的冷阱，該等冷卻元件可被冷卻液穿過且相互平行佈置。冷卻液自第一充氣部(Plenum)被送入冷卻元件。冷卻液自冷卻元件進入第二充氣部。DE 86 25 127 U1描述一種冷阱，氣流在該冷阱中發生多次偏轉。DE 697 36 124 T2描述一種具有殼體之冷阱，在該殼體中安裝有螺旋線狀冷卻旋管並且待冷卻之介質必須從經冷卻之導氣板旁邊流過。 DE 299 04 465 U1 describes a cold trap having cooling elements arranged parallel to one another, which can be passed through by a coolant and arranged parallel to each other. The coolant is sent to the cooling element from the first plenum (Plenum). The coolant enters the second inflator from the cooling element. DE 86 25 127 U1 describes a cold trap in which a gas flow is deflected multiple times. DE 697 36 124 T2 describes a cold trap with a housing in which a spiral cooling coil is mounted and the medium to be cooled must flow past the cooled air deflector.
由US 4,142,580及US 3,681,936已知熱交換器。 Heat exchangers are known from US 4,142,580 and US Pat. No. 3,681,936.
DE 2 537 639 A1描述一種用於自蒸汽-氣體混合物中 凍結分離固態組分之裝置，其中冷卻劑經導引而穿過數個並置冷卻元件。該等構建為管子之冷卻元件自下充氣部延伸至上充氣部。透過中央進料管實現下充氣部之進料。 DE 2 537 639 A1 describes a use in a steam-gas mixture A device for freezing a solid component, wherein the coolant is directed through a plurality of juxtaposed cooling elements. The cooling elements constructed as tubes extend from the lower plenum to the upper plenum. The feed of the lower plenum is achieved through a central feed tube.
DE 1 203 226同樣描述一種用於分離可昇華物質之裝置，其中在冷卻管上固定有若干側面，該等側面之間距沿流向減小。 DE 1 203 226 likewise describes a device for separating sublimable substances, in which a number of sides are fixed on the cooling tube, the distance between the sides decreasing along the flow direction.
FR 2 146 100描述一種具有容器之冷阱，該容器向外隔離且在該容器中插設有內部容器，該內部容器中儲存有冷卻液。該冷卻液穿過數個呈環形佈置之冷卻通道。 FR 2 146 100 describes a cold trap with a container which is isolated from the outside and in which an inner container is inserted, in which the cooling liquid is stored. The coolant passes through a plurality of cooling passages arranged in a ring shape.
US 7,067,088 B2描述一種具有數個等距佈置之熱交換面元件的聚合反應器。 US 7,067,088 B2 describes a polymerization reactor having a plurality of equidistantly arranged heat exchange face elements.
由US 4,538,423已知一種冷阱，其中以氮為冷卻劑並且導熱元件載有數個導氣板，使得氣流可蜿蜒穿過冷卻裝置。由導氣板形成之氣體流道的間距沿流向減小。 No. 4,538,423 discloses a cold trap in which nitrogen is used as a coolant and the heat conducting element carries a plurality of air guiding plates so that the air flow can pass through the cooling device. The spacing of the gas flow paths formed by the gas guide plates decreases in the flow direction.
此外，由US 3,226,936及WO 2011/135333 A2以及US 4,142,580及US 3,681,936已知具有相互平行佈置之傳熱元件的熱交換器。 In addition, a heat exchanger having heat transfer elements arranged parallel to each other is known from US Pat. No. 3,226,936 and WO 2011/135333 A2 and US Pat. No. 4,142,580 and US Pat. No. 3,681,936.
本發明之目的在於提供一種適合用於MOCVD塗佈裝置之冷阱，該冷阱具有較小之氣體流道堵塞風險。 It is an object of the present invention to provide a cold trap suitable for use in an MOCVD coating apparatus that has a reduced risk of gas flow clogging.
該目的透過請求項所給予之發明而達成，其中附屬項不僅為請求項1中所給予之解決方案的進一步有益方案，亦為該目的之獨立解決方案。 This object is achieved by the invention given by the claim, wherein the subsidiary item is not only a further beneficial solution to the solution given in claim 1, but also an independent solution to the purpose.
首先且主要提出一種用於冷凝移除氣流之揮發性組分的裝置，該裝置具有殼體。該殼體具有包含開口之筒形下部及氣 密封閉該開口之蓋子。該蓋子可藉由密封件氣密貼靠於該下部之開口邊緣上且與邊緣夾緊。設有特定言之可穿過該開口而插入該下部之腔內的嵌件。此嵌件可固定連接蓋子，從而在蓋子與殼體下部分離後，可藉由抬升蓋子來自殼體下部取出嵌件。本發明亦提出，該嵌件可拆卸地連接蓋子。該嵌件具有數個冷卻元件。該等冷卻元件經佈置而與一由數個區段組成之氣體通道相交。為此，該氣體通道由數個沿流向依次佈置之氣體流道組成。該等氣體流道可相互平行延伸。該等冷卻元件同樣可相互平行延伸且較佳橫向於該等氣體流道延伸。設有上充氣部及下充氣部。其中一充氣部被供應冷卻劑。另一充氣部具有冷卻劑排出管。該等冷卻元件自一充氣部延伸至另一充氣部，較佳自上充氣部延伸至下充氣部。該殼體為一容器且具有進氣口及排氣口。該進氣口可由鄰近該開口佈置之管接頭形成。該排氣口可由鄰近殼體底部佈置之管接頭形成。藉由該等管接頭，氣態介質可穿過容器壁上之開口而進入容器並透過容器壁而再度離開容器。在殼體內部設有導氣元件，該等導氣元件使得氣流自進氣口至排氣口發生多次偏轉。其中特別提出，該發生多次偏轉之氣流與冷卻元件多次相交。該等冷卻元件可由呈直線延伸之管子形成，該等管子以其相對末端保持在分別形成上充氣部或下充氣部之壁之板體的開口中。該等導氣板可為平的板形物體，該等板形物體平行於該等保持冷卻元件之自由端的板體佈置。該等導氣板可具有交替相對設置之通氣孔，該等通氣孔分別設於殼體邊緣。由此，氣流可逐層偏轉並且蜿蜒地在較佳呈柱形之殼體的兩個相對壁段間穿過。該氣流總是沿橫向於殼體之柱體軸線的方向越過一導板，而後透過與殼體壁相鄰佈置之通氣孔進入一軸向偏移之平面，接著在 該導氣板下方以相反方向流向另一通氣孔。在一尤佳技術方案中，該等氣體流道具有不同之自由橫截面積。自由橫截面積係指其中未設導流元件或冷卻元件之面積，即例如由兩個相對導氣板及兩個相鄰冷卻元件界定之面積。由於數個冷卻元件與該氣體流道相交，該自由橫截面積比氣體流道之總橫截面積小數倍。根據本發明之一態樣，該等自由橫截面積應當沿流向變小。此點在結構上可透過以下方案而實現，即，相互平行佈置之導氣板的間距沿流向減小。為達此目的，冷卻元件之間距同樣沿流向減小。具體而言，兩個相鄰冷卻元件及兩個相鄰導氣板沿橫向於流向之方向相互間具有最小間距。此最小間距沿流向減小，使得由冷卻元件表面及導氣元件表面所形成的用於冷凝揮發性組分之作用面沿流向增大。特定言之，該嵌件或該容器之冷卻體積具有兩個體積段，其中在上游段中設有第一冷卻元件，並且在下游段中設有第二冷卻元件。第二冷卻元件之間距小於第一冷卻元件。該冷阱之上游區域的冷卻面積-通流體積比小於下游區域，故上游區域之冷卻效率低於下游區域。然而，更大的自由橫截面積具有以下優點，即，在冷卻元件之自由表面及導氣板上能沉積比下游區域更厚之冷凝物層，且不會堵塞氣體流道，而下游區域已發生揮發性組分之氣相耗盡，故該處之沉積率低於上游區域。本發明進一步提出，該冷卻劑反向於氣流穿過容器腔。若冷卻劑入口位於殼體蓋上，則冷卻劑入口連接一將冷卻劑導向下充氣部之冷卻劑管道。下充氣部透過數個相互平行分佈之管子連接上充氣部。由此，冷卻劑自下向上穿過管形冷卻元件流向連接冷卻劑出口之上充氣部。待清潔之氣體則自上向下穿過冷阱，其中該氣體發生多次偏轉並在此過程中與冷卻元件多次相交。在下游段中，該 氣體被第二冷卻元件進一步冷卻。第二冷卻元件同樣可為可被冷卻液穿過之管子或腔室。本發明亦提出，第二段中之該等冷卻元件為較佳具有良好傳導性能之實心體，特別是良好地導熱連接充氣部之棒體。上充氣部及下充氣部可佔據相同體積；但上游段較佳佔據比下游段更大之體積。體積比較佳為四分之三比四分之一。本發明之冷阱特別用於MOCVD設備之排氣系統，其中在該冷阱內部凍結分離乾式蝕刻所使用之氣體或進行乾式蝕刻時所產生之反應產物。因此，本發明之冷阱係應用於就地清潔步驟。藉由本發明之冷阱尤其能凍結分離第三主族之氯化物，即GaClx及AlClx。 First and primarily a device for condensing a volatile component of a gas stream is removed, the device having a housing. The housing has a cylindrical lower portion including an opening and a lid that hermetically seals the opening. The cover can be airtightly attached to the open edge of the lower portion by the seal and clamped to the edge. An insert is provided that is specifically inserted through the opening into the cavity of the lower portion. The insert can be fixedly attached to the cover so that after the cover is separated from the lower portion of the housing, the insert can be removed from the lower portion of the housing by lifting the cover. The invention also proposes that the insert detachably connects the cover. The insert has a number of cooling elements. The cooling elements are arranged to intersect a gas passage formed by a plurality of sections. To this end, the gas channel consists of several gas flow paths arranged in sequence along the flow direction. The gas flow paths may extend parallel to each other. The cooling elements can likewise extend parallel to each other and preferably extend transversely to the gas channels. An upper inflator and a lower inflator are provided. One of the plenums is supplied with a coolant. The other plenum has a coolant discharge pipe. The cooling elements extend from one inflator to the other inflator, preferably from the upper inflator to the lower inflator. The housing is a container and has an air inlet and an air outlet. The air inlet may be formed by a pipe joint disposed adjacent to the opening. The vent may be formed by a pipe joint disposed adjacent the bottom of the housing. With the pipe joints, the gaseous medium can pass through the opening in the wall of the vessel and enter the vessel and pass through the vessel wall to exit the vessel again. Air guiding elements are provided inside the housing, and the air guiding elements cause the airflow to be deflected multiple times from the air inlet to the air outlet. In particular, it is proposed that the airflow that has undergone multiple deflections intersects the cooling element multiple times. The cooling elements may be formed by tubes extending in a straight line, the tubes being held at their opposite ends in openings in the plates of the walls forming the upper or lower plenum, respectively. The air deflectors may be flat plate-shaped objects arranged parallel to the plates that hold the free ends of the cooling elements. The air guiding plates may have vent holes arranged alternately oppositely, and the vent holes are respectively disposed at the edge of the casing. Thereby, the air flow can be deflected layer by layer and pass between the two opposing wall sections of the preferably cylindrical housing. The airflow always passes over a guide plate in a direction transverse to the cylinder axis of the housing, and then enters an axially offset plane through a venting aperture disposed adjacent the housing wall, and then reverses below the air deflector The direction flows to the other vent. In a preferred embodiment, the gas flow paths have different free cross-sectional areas. The free cross-sectional area refers to the area in which no flow guiding element or cooling element is provided, that is, for example, an area defined by two opposing air guiding plates and two adjacent cooling elements. Since the plurality of cooling elements intersect the gas flow path, the free cross-sectional area is several times smaller than the total cross-sectional area of the gas flow path. According to one aspect of the invention, the free cross-sectional areas should be reduced in the direction of flow. This can be achieved structurally by the fact that the spacing of the air deflectors arranged parallel to one another decreases in the direction of flow. To this end, the distance between the cooling elements is also reduced in the direction of flow. Specifically, two adjacent cooling elements and two adjacent air guiding plates have a minimum spacing from each other in a direction transverse to the flow direction. This minimum spacing is reduced in the flow direction such that the active surface for condensing the volatile components formed by the surface of the cooling element and the surface of the gas guiding member increases in the flow direction. In particular, the insert or the cooling volume of the container has two volume segments, wherein a first cooling element is provided in the upstream section and a second cooling element is provided in the downstream section. The distance between the second cooling elements is less than the first cooling element. The cooling area-flow volume ratio of the upstream region of the cold trap is smaller than the downstream region, so the cooling efficiency of the upstream region is lower than that of the downstream region. However, a larger free cross-sectional area has the advantage that a condensate layer thicker than the downstream region can be deposited on the free surface of the cooling element and on the gas guide plate without clogging the gas flow path, while the downstream region has The gas phase of the volatile component is depleted, so the deposition rate there is lower than the upstream region. The invention further provides that the coolant passes through the container chamber against the gas flow. If the coolant inlet is located on the housing cover, the coolant inlet is connected to a coolant conduit that directs the coolant to the lower plenum. The lower plenum is connected to the plenum through a plurality of tubes that are parallel to each other. Thereby, the coolant flows from the bottom up through the tubular cooling element to the plenum above the connecting coolant outlet. The gas to be cleaned passes through the cold trap from top to bottom, wherein the gas is deflected multiple times and intersects the cooling element multiple times during the process. In the downstream section, the gas is further cooled by the second cooling element. The second cooling element can likewise be a tube or chamber through which the coolant can pass. The invention also proposes that the cooling elements in the second paragraph are solid bodies which preferably have good electrical conductivity, in particular rods which are thermally conductively connected to the plenum. The upper plenum and the lower plenum may occupy the same volume; however, the upstream section preferably occupies a larger volume than the downstream section. The volume is better than three quarters to one quarter. The cold trap of the present invention is particularly useful in an exhaust system of an MOCVD apparatus in which a gas used in dry etching or a reaction product produced by dry etching is frozen and frozen inside the cold trap. Therefore, the cold trap of the present invention is applied to the in-situ cleaning step. In particular, the cold trap of the present invention can freeze and separate the chloride of the third main group, namely GaCl x and AlCl x .
1‧‧‧殼體下部 1‧‧‧ Lower part of the casing
2‧‧‧殼體蓋、蓋子 2‧‧‧Shell cover, cover
3‧‧‧嵌件 3‧‧‧Inlays
4‧‧‧冷卻元件 4‧‧‧Cooling elements
4'‧‧‧出口段 4'‧‧‧Exit section
4"‧‧‧出口端 4"‧‧‧export end
5‧‧‧上充氣部 5‧‧‧Upper Inflator
6‧‧‧下充氣部 6‧‧‧ Under the inflation department
7‧‧‧開口邊緣 7‧‧‧Open edge
8‧‧‧蓋板 8‧‧‧ Cover
9‧‧‧充氣部壁 9‧‧‧Inflatable wall
10‧‧‧導氣板 10‧‧‧Air guide plate
10'‧‧‧導氣板 10'‧‧‧ air guide plate
11‧‧‧通氣孔 11‧‧‧Ventinel
12‧‧‧氣體流道 12‧‧‧ gas flow path
12'‧‧‧氣體流道 12'‧‧‧ gas flow path
13‧‧‧冷卻劑入口 13‧‧‧ coolant inlet
14‧‧‧冷卻劑出口 14‧‧‧ coolant outlet
15‧‧‧冷卻劑連接管 15‧‧‧ coolant connecting pipe
16‧‧‧進氣口 16‧‧‧air inlet
17‧‧‧排氣口 17‧‧‧Exhaust port
18‧‧‧底板 18‧‧‧floor
19‧‧‧底板 19‧‧‧floor
20‧‧‧冷卻元件 20‧‧‧ Cooling element
21‧‧‧導氣板、冷卻板 21‧‧‧Air guide plate, cooling plate
22‧‧‧通氣孔 22‧‧‧Ventinel
23‧‧‧底部 23‧‧‧ bottom
24‧‧‧容器壁、側壁 24‧‧‧ container wall, side wall
25‧‧‧密封件 25‧‧‧Seal
26‧‧‧夾緊元件 26‧‧‧Clamping elements
27‧‧‧通氣孔 27‧‧‧Ventinel
以下結合實施例詳細闡述本發明。 The invention is explained in detail below in connection with the examples.
圖1為冷阱立體圖；圖2為冷阱俯視圖；圖3為沿圖2中III-III線所截取之剖面圖；圖4為沿圖3中IV-IV線所截取之剖面圖；圖5為沿圖3中V-V線所截取之剖面圖；圖6為立體剖面圖；圖7為根據圖1之視圖，其中固定於蓋子2上之嵌件3自殼體下部1取出後之第一立體圖；及圖8為自殼體下部1取出之嵌件3的第二立體圖。 1 is a perspective view of a cold trap; FIG. 2 is a top view of the cold trap; FIG. 3 is a cross-sectional view taken along line III-III of FIG. 2; and FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 3; 3 is a cross-sectional view taken along line VV of FIG. 3; FIG. 6 is a perspective sectional view of FIG. 1, and FIG. 7 is a first perspective view of the insert 3 fixed to the cover 2 after being taken out from the lower portion 1 of the casing 1 according to the view of FIG. And FIG. 8 is a second perspective view of the insert 3 taken out from the lower portion 1 of the housing.
圖式中所示出之實施例為一應用於塗佈設備(例如MOCVD塗佈設備)之廢氣通道的清潔裝置，其用於自載氣流中凍結分離在沉積層或就地清潔塗佈設備之反應器時被運出該反應器之 氣態反應產物或起始材料。該裝置具有殼體，該殼體由殼體下部1及殼體蓋2組成。殼體下部1為一具有圓形底部23及柱形側壁24之筒形體。該側壁在其開口區域具有固定連接該側壁之開口邊緣7，該開口邊緣徑向凸出。開口邊緣7正下方設有管接頭形式之進氣口16，待清潔之廢氣可經該進氣口流入容器之柱形內體積。靠近底部23處設有形式同樣為管接頭之排氣口17，氣體可經該排氣口離開容器。容器壁24在進氣口16區域具有較大之通氣孔。排氣口17之壁24的通氣孔27小於該排氣接頭之橫截面，故通氣孔27與底部23隔開。由此形成近底部怠體積，自氣體中凍結分離出來之冷凝物可積聚於此冷凝物收集體積中。 The embodiment shown in the drawings is a cleaning device for an exhaust passage applied to a coating apparatus (for example, an MOCVD coating apparatus) for freezing separation in a carrier gas stream in a deposition layer or in situ cleaning coating apparatus. The reactor is shipped out of the reactor Gaseous reaction product or starting material. The device has a housing consisting of a lower part 1 of the housing and a cover 2 of the housing. The lower portion 1 of the housing is a cylindrical body having a circular bottom portion 23 and a cylindrical side wall 24. The side wall has, in its open area, an opening edge 7 fixedly connected to the side wall, the opening edge projecting radially. An air inlet 16 in the form of a pipe joint is provided directly below the opening edge 7, through which the exhaust gas to be cleaned can flow into the cylindrical inner volume of the container. An exhaust port 17 in the form of a pipe joint is also provided near the bottom 23 through which the gas can exit the container. The vessel wall 24 has a larger venting opening in the region of the inlet 16 . The venting opening 27 of the wall 24 of the venting opening 17 is smaller than the cross section of the venting joint, so that the venting opening 27 is spaced apart from the bottom portion 23. As a result, a near-bottom volume is formed, and the condensate separated from the freezing in the gas can accumulate in the condensate collection volume.
殼體下部1之被開口邊緣7包圍的開口由殼體蓋2封閉。殼體蓋2具有蓋板8，該蓋板在夾設密封件25之情況下貼靠於開口邊緣7上。設有數個夾緊元件26，該等夾緊元件在夾設密封件25之情況下將蓋板8壓抵於開口邊緣7，使得殼體下部1被殼體蓋2氣密封閉。 The opening of the lower part 1 of the housing which is surrounded by the open edge 7 is closed by the housing cover 2. The housing cover 2 has a cover 8 which bears against the opening edge 7 with the sealing element 25 interposed. A plurality of clamping elements 26 are provided, which clamp the cover 8 against the opening edge 7 with the sealing member 25 interposed, so that the lower housing part 1 is hermetically sealed by the housing cover 2.
在殼體下部1之殼體腔內部設有嵌件3。在實施例中，嵌件3固定連接蓋子2。但該嵌件亦可固定連接殼體下部。嵌件3主要由數個相互平行分佈之冷卻元件4組成，該等冷卻元件分別由管子形成。冷卻元件4之上出口段4'插在蓋板8之開口中，使得管形冷卻元件4通入設於蓋板8上方之上充氣部5內。上充氣部5形成收集體積，以便收集自冷卻元件4排出之冷卻介質並透過冷卻劑出口14排出該冷卻介質。為此，冷卻劑出口14安裝在平行於蓋板8延伸之充氣部壁9上。 An insert 3 is provided inside the housing cavity of the lower part 1 of the housing. In an embodiment, the insert 3 is fixedly attached to the lid 2. However, the insert can also be fixedly attached to the lower portion of the housing. The insert 3 consists essentially of a plurality of cooling elements 4 arranged parallel to one another, which are each formed by a tube. The outlet section 4' above the cooling element 4 is inserted into the opening of the cover 8 such that the tubular cooling element 4 opens into the inflator 5 above the cover 8. The upper plenum 5 forms a collection volume for collecting the cooling medium discharged from the cooling element 4 and discharging the cooling medium through the coolant outlet 14. To this end, the coolant outlet 14 is mounted on the plenum wall 9 extending parallel to the cover plate 8.
特定言之由金屬構成之冷卻元件4以其第二出口端 4"連接下充氣部6。為此，該等冷卻元件插在底板18之開口中，該底板平行於蓋板8延伸且形成下充氣部6之壁，該下充氣部為一分配體積。另一底板19向下界定下充氣部6。設於蓋子區域之冷卻劑入口13透過冷卻劑連接管15連接下充氣部6，使得透過冷卻劑入口13所送入之冷卻介質可流入下充氣部6，而後經由相互平行分佈之冷卻元件4進入上充氣部5並經由冷卻劑出口14離開上充氣部，該冷卻介質例如為冷卻液，如液氮、乙醇、乙二醇或水。 In particular, the cooling element 4 made of metal has its second outlet end 4" is connected to the lower plenum 6. For this purpose, the cooling elements are inserted in the opening of the bottom plate 18 which extends parallel to the cover 8 and forms the wall of the lower plenum 6, which is a dispensing volume. A bottom plate 19 defines a lower inflating portion 6. The coolant inlet 13 provided in the cover region is connected to the lower inflating portion 6 through a coolant connecting pipe 15, so that the cooling medium fed through the coolant inlet 13 can flow into the lower inflating portion 6. The upper plenum 5 is then passed through the cooling elements 4 which are distributed parallel to one another and exits the upper plenum via a coolant outlet 14, for example a cooling liquid such as liquid nitrogen, ethanol, ethylene glycol or water.
冷卻元件4為數個相互平行佈置之導氣板10的支撐件。導氣板10在兩充氣部5、6之間延伸且具有大致呈圓形之輪廓，故該等導氣板之邊緣延伸至壁24之內側。導氣板10、10'具有一大約延伸60°至90°之邊緣段，該邊緣段與壁24隔開，使得該處形成通氣孔11，流入上流道12、12'之氣流可穿過該通氣孔而進入設於下方之流道12。通氣孔11交替相對設置，使得氣流呈之字形自進氣口16流向排氣口17。 The cooling element 4 is a support of a plurality of air guiding plates 10 arranged in parallel with each other. The air guide plate 10 extends between the two plenums 5, 6 and has a substantially circular contour so that the edges of the air guide plates extend to the inner side of the wall 24. The air guide plates 10, 10' have an edge section extending approximately 60° to 90°, the edge section being spaced from the wall 24 such that a venting opening 11 is formed therein through which the airflow flowing into the upper flow passages 12, 12' can pass The vent hole enters the flow path 12 provided below. The vent holes 11 are alternately disposed such that the air flow flows in a zigzag shape from the air inlet port 16 to the exhaust port 17.
位於最上方之導氣板10'到蓋板8之距離大於第二導氣板10到位於最上方之導氣板10'的距離。此外，導氣板10、10'之間距沿氣流之流向(即沿自上向下之容器軸向)減小，使得氣體流道12、12'之自由通流橫截面沿流向減小。 The distance from the uppermost air guide plate 10' to the cover plate 8 is greater than the distance from the second air guide plate 10 to the uppermost air guide plate 10'. Furthermore, the distance between the air guiding plates 10, 10' decreases in the direction of the air flow (i.e., in the axial direction from the top to the bottom of the container), so that the free flow cross section of the gas flow paths 12, 12' decreases in the flow direction.
下充氣部6位於排氣口17上方並向下界定約四分之三之容器體積。在下部的四分之一之容器體積中設有包含第二冷卻元件20之第二冷卻段，在實施例中，該等冷卻元件由傳導性能良好之柱形棒形成。第二冷卻元件20之間距小於第一冷卻元件4，使得下部區段中之流道具有更小的自由橫截面積。本發明亦提出，第二冷卻元件20構建為管子並且被冷卻介質穿過。在實施例中，冷 卻棒20以一末端連接底板19，該底板被流入之冷卻介質冷卻。冷卻棒20之自由端延伸至鄰近殼體底部23。 The lower plenum 6 is located above the vent 17 and defines approximately three-quarters of the container volume downward. A second cooling section comprising a second cooling element 20 is provided in the lower quarter of the container volume, which in the embodiment is formed by a cylindrical rod of good conductivity. The distance between the second cooling elements 20 is smaller than the first cooling elements 4 such that the flow passages in the lower section have a smaller free cross-sectional area. The invention also proposes that the second cooling element 20 is constructed as a tube and is passed through by a cooling medium. In an embodiment, cold However, the rod 20 is connected to the bottom plate 19 at one end, and the bottom plate is cooled by the inflowing cooling medium. The free end of the cooling rod 20 extends adjacent to the bottom 23 of the housing.
兩個冷卻板21在排氣口17上方延伸，該等冷卻板相互間之距離及其到底板19之距離小於上部區段之導氣板10相互間的距離及其到底板18或蓋板8之距離。 Two cooling plates 21 extend above the exhaust opening 17, the distance between the cooling plates and their distance from the bottom plate 19 being smaller than the distance between the air guiding plates 10 of the upper section and their connection to the bottom plate 18 or the cover plate 8 The distance.
下充氣部6形成邊緣通氣孔22，待清潔之氣體可透過該通氣孔自第一區段流入第二區段。該氣體以橫向於容器軸向之方向環繞導氣板21及導氣板10流動並且沿徑向穿過通氣孔22。 The lower plenum 6 forms an edge vent 22 through which gas to be cleaned can flow from the first section into the second section. The gas flows around the air guide plate 21 and the air guide plate 10 in a direction transverse to the axial direction of the container and passes through the vent hole 22 in the radial direction.
前述實施方案係用於說明本申請整體所包含之發明，該等發明至少透過以下特徵組合分別獨立構成相對於先前技術之進一步方案：一種裝置，其特徵在於冷凝移除氣流之揮發性組分，該裝置具有：殼體，該殼體具有筒形下部1及封閉該下部之開口的蓋子2；及設於該下部1之腔內的嵌件3，該嵌件具有數個冷卻元件4，該等冷卻元件與一或數個氣體流道12相交且在平行佈置之情況下自上充氣部5延伸至下充氣部6，其中該二充氣部5、6分別流體連接冷卻劑入口13或冷卻劑出口14，其中該嵌件3具有導氣元件10、10'、21，以便使該氣流自進氣口16至排氣口17發生多次偏轉。 The foregoing embodiments are intended to illustrate the invention as embodied in the present application, and the inventions are each independently constructed at least separately from the prior art by a combination of the following features: a device characterized by condensing to remove volatile components of the gas stream, The device has a housing having a cylindrical lower portion 1 and a cover 2 closing the opening of the lower portion; and an insert 3 disposed in the cavity of the lower portion 1, the insert having a plurality of cooling elements 4, The equal cooling element intersects one or several gas flow passages 12 and extends from the upper plenum 5 to the lower plenum 6 in a parallel arrangement, wherein the two plenums 5, 6 are fluidly connected to the coolant inlet 13 or the coolant, respectively An outlet 14, wherein the insert 3 has air guiding elements 10, 10', 21 to cause the air flow to deflect multiple times from the air inlet 16 to the air outlet 17.
一種裝置，其特徵在於，該等沿該氣體之流向依次佈置的氣體流道12、12'具有沿流向變小之自由橫截面積。 A device characterized in that the gas flow paths 12, 12' arranged in sequence along the flow direction of the gas have a free cross-sectional area that becomes smaller in the flow direction.
一種裝置，其特徵在於，該等氣體流道12、12'由相互平行佈置之導氣板10、10'、21界定。 A device characterized in that the gas channels 12, 12' are defined by air guiding plates 10, 10', 21 arranged parallel to one another.
一種裝置，其特徵在於，該等導氣板10、10'、21之 間距沿流向變小。 A device characterized by the gas guide plates 10, 10', 21 The pitch becomes smaller along the flow direction.
一種裝置，其特徵在於，該嵌件3之第一上游段具有第一冷卻元件4，該等第一冷卻元件相互間以第一間距佈置，且該嵌件3之下游第二段具有第二冷卻元件20，該等第二冷卻元件相互間具有第二間距，其中該第二間距小於該第一間距。 A device, characterized in that the first upstream section of the insert 3 has a first cooling element 4, the first cooling elements are arranged at a first spacing, and the second section downstream of the insert 3 has a second a cooling element 20 having a second spacing from each other, wherein the second spacing is less than the first spacing.
一種裝置，其特徵在於，該等第一冷卻元件4可被冷卻劑穿過，並且該等第二冷卻元件20可被冷卻劑穿過或者導熱連接充氣部6。 A device characterized in that the first cooling elements 4 are passable by a coolant and the second cooling elements 20 can be passed through or thermally connected to the plenum 6.
一種裝置，其特徵在於，該第一段約占該殼體之總體積的四分之三，且該第二段約占該殼體之總體積的四分之一。 A device wherein the first segment occupies about three-quarters of the total volume of the housing and the second segment occupies about one-quarter of the total volume of the housing.
一種裝置，其特徵在於，該嵌件3固定連接該蓋子2，並且蓋板8形成該上充氣部5之壁。 A device characterized in that the insert 3 is fixedly connected to the lid 2 and the cover 8 forms the wall of the upper plenum 5.
一種裝置，其特徵在於，該等導氣板10、10'、21具有通氣孔11、22以使得於該導氣板10、10'、21上方流入之氣體在該導氣板10、10'、21下方偏轉成相反流向，使得該氣流蜿蜒地發生多次偏轉且在與該等冷卻元件4、20多次相交之情況下穿過該冷阱。 A device characterized in that the gas guiding plates 10, 10', 21 have vent holes 11, 22 such that gas flowing in above the gas guiding plates 10, 10', 21 is at the gas guiding plates 10, 10' The lower portion 21 is deflected into the opposite flow direction such that the air flow is deflected multiple times and passes through the cold trap with multiple intersections with the cooling elements 4, 20.
一種裝置，其特徵在於，該進氣口16鄰近該殼體下部1之開口佈置，且該排氣口17鄰近該殼體下部1之底部23佈置。 A device characterized in that the air inlet 16 is arranged adjacent to the opening of the lower portion 1 of the housing, and the air outlet 17 is arranged adjacent to the bottom 23 of the lower portion 1 of the housing.
一種裝置，其特徵在於用於將該氣流排出該冷阱之通氣孔27，其中該通氣孔27與該殼體下部1之底部23隔開。 A device is characterized by a venting opening 27 for discharging the gas stream out of the cold trap, wherein the venting opening 27 is spaced from the bottom 23 of the lower portion 1 of the housing.
一種裝置，其特徵在於，該穿過該等冷卻元件4之冷卻介質的流動與該氣流之流向相反。 A device characterized in that the flow of the cooling medium passing through the cooling elements 4 is opposite to the flow of the gas stream.
所有已揭露特徵(作為單項特徵或特徵組合)皆為發 明本質所在。故本申請之揭露內容亦包含相關/所附優先權檔案(在先申請副本)所揭露之全部內容，該等檔案所述特徵亦一併納入本申請之請求項。附屬項以其特徵對本發明針對先前技術之改良方案的特徵予以說明，其目的主要在於在該等請求項基礎上進行分案申請。 All exposed features (as a single feature or combination of features) are The essence of the Ming. Therefore, the disclosure of the present application also contains all the contents disclosed in the related/attached priority file (copy of the prior application), and the features described in the files are also included in the claims of the present application. The subsidiary item is characterized by its characteristics for the features of the prior art improvement of the prior art, and its purpose is mainly to carry out a divisional application on the basis of the claims.
1‧‧‧殼體下部 1‧‧‧ Lower part of the casing
2‧‧‧殼體蓋、蓋子 2‧‧‧Shell cover, cover
3‧‧‧嵌件 3‧‧‧Inlays
4‧‧‧冷卻元件 4‧‧‧Cooling elements
4'‧‧‧出口段 4'‧‧‧Exit section
4"‧‧‧出口端 4"‧‧‧export end
5‧‧‧上充氣部 5‧‧‧Upper Inflator
6‧‧‧下充氣部 6‧‧‧ Under the inflation department
7‧‧‧開口邊緣 7‧‧‧Open edge
8‧‧‧蓋板 8‧‧‧ Cover
9‧‧‧充氣部壁 9‧‧‧Inflatable wall
10‧‧‧導氣板 10‧‧‧Air guide plate
10'‧‧‧導氣板 10'‧‧‧ air guide plate
11‧‧‧通氣孔 11‧‧‧Ventinel
12‧‧‧氣體流道 12‧‧‧ gas flow path
13‧‧‧冷卻劑入口 13‧‧‧ coolant inlet
15‧‧‧冷卻劑連接管 15‧‧‧ coolant connecting pipe
16‧‧‧進氣口 16‧‧‧air inlet
17‧‧‧排氣口 17‧‧‧Exhaust port
18‧‧‧底板 18‧‧‧floor
19‧‧‧底板 19‧‧‧floor
20‧‧‧冷卻元件 20‧‧‧ Cooling element
21‧‧‧導氣板、冷卻板 21‧‧‧Air guide plate, cooling plate
22‧‧‧通氣孔 22‧‧‧Ventinel
23‧‧‧底部 23‧‧‧ bottom
24‧‧‧容器壁、側壁 24‧‧‧ container wall, side wall
25‧‧‧密封件 25‧‧‧Seal
26‧‧‧夾緊元件 26‧‧‧Clamping elements
27‧‧‧通氣孔 27‧‧‧Ventinel
Claims (10)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE202015101792.8 | 2015-04-13 | ||
| DE202015101792.8U DE202015101792U1 (en) | 2015-04-13 | 2015-04-13 | cold trap |
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| Publication Number | Publication Date |
|---|---|
| TW201701935A true TW201701935A (en) | 2017-01-16 |
| TWI685376B TWI685376B (en) | 2020-02-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105111473A TWI685376B (en) | 2015-04-13 | 2016-04-13 | Cold trap |
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| Country | Link |
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| DE (1) | DE202015101792U1 (en) |
| TW (1) | TWI685376B (en) |
| WO (1) | WO2016166079A1 (en) |
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| GB2479866A (en) | 2010-04-26 | 2011-11-02 | Dumitru Fetcu | A Heat Pipe Heat Exchanger Which Includes a Baffle |
| US8999028B2 (en) * | 2013-03-15 | 2015-04-07 | Macronix International Co., Ltd. | Apparatus and method for collecting powder generated during film deposition process |
| TWI555961B (en) * | 2013-04-22 | 2016-11-01 | Adpv Technology Ltd | Condensation device for vacuum coating equipment |
-
2015
- 2015-04-13 DE DE202015101792.8U patent/DE202015101792U1/en active Active
-
2016
- 2016-04-12 WO PCT/EP2016/057964 patent/WO2016166079A1/en active Application Filing
- 2016-04-13 TW TW105111473A patent/TWI685376B/en active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI818081B (en) * | 2018-10-17 | 2023-10-11 | 美商伊利諾工具工程公司 | An exhaust gas purification device |
| TWI755296B (en) * | 2021-03-05 | 2022-02-11 | 志聖工業股份有限公司 | gas condensing unit |
Also Published As
| Publication number | Publication date |
|---|---|
| DE202015101792U1 (en) | 2015-04-28 |
| WO2016166079A1 (en) | 2016-10-20 |
| TWI685376B (en) | 2020-02-21 |
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