CN203772050U - Gas condensing device - Google Patents
Gas condensing device Download PDFInfo
- Publication number
- CN203772050U CN203772050U CN201420140999.5U CN201420140999U CN203772050U CN 203772050 U CN203772050 U CN 203772050U CN 201420140999 U CN201420140999 U CN 201420140999U CN 203772050 U CN203772050 U CN 203772050U
- Authority
- CN
- China
- Prior art keywords
- water
- cooled
- condensation
- outer tube
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 46
- 238000001816 cooling Methods 0.000 claims abstract description 38
- 238000009833 condensation Methods 0.000 claims description 34
- 230000005494 condensation Effects 0.000 claims description 34
- 230000000694 effects Effects 0.000 abstract description 6
- 229920006395 saturated elastomer Polymers 0.000 abstract description 4
- 238000001914 filtration Methods 0.000 abstract description 3
- 238000007789 sealing Methods 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 11
- 239000007788 liquid Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000013067 intermediate product Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Abstract
The utility model relates to a gas condensing device which comprises a water-cooling outer pipe, a water-cooling inner pipe arranged in the water-cooling outer pipe, and a condensing column inserted into the water-cooling inner pipe. A water outlet and a water inlet are arranged at the upper end and the right end of the water-cooling outer pipe respectively, two ends of the water-cooling inner pipe are not closed, water-cooling rings are arranged on the excircle of the water-cooling inner pipe equidistantly in a sleeved manner, sealing is realized through the water-cooling rings and a cavity of the water-cooling outer pipe, and a notch allowing condensate water to pass is arranged on each water-cooling ring. Compared with the prior art, the gas condensing device has the advantages that the gas condensing device is uniform in water-cooling effect and simple to operate, and a filtering barrel can be washed or replaced after saturated absorption filtering.
Description
Technical field
The utility model relates to a kind of condensation of gas device, particularly a kind of condensing unit for residual gas after atomic layer deposition system reaction.
Background technology
Ald (ALD) is for form the technique of thin-film material on such as silicon chip at substrate in semiconductor industry.Ald is a kind of steam reaction deposition, and wherein the reactive deposition by multiple superthin layer forms film.The source material of current atom layer deposition can divide three classes by form: gas, liquid and solid, and in atom layer deposition process, one or more compounds of the material being deposited (source material) will be provided for substrate with gaseous molecular form, in order to reaction on substrate, generate the thin-film material needing.
Because liquid is compared with gaseous material with solid, there is low saturated vapor pressure, so they are usually heated the vapour pressure that reaches enough.When temperature rises, make the pressure in source surpass the pressure in reactor, source can be transported to reactor and be used under differential pressure action.In order to prevent the material condensation of vaporizing, it is identical or than its high temperature that all devices surface contacting with source material all has the source space being vaporized therein with source material.In addition, the temperature conditions that different technique needs is different, and reative cell heats simultaneously, to avoid the residual of in the atomic layer deposition cycles process precursor such as water and ammonia.
Atomic layer deposition process, after reaction, residual gas and the intermediate product of saturated surplus just need to be done condensation process, could after harmless processing, discharge.
Utility model content
The purpose of this utility model is to provide a kind of water-cooled effect even, after cartridge filter absorbing and filtering is saturated, can clean or replace, and condensation of gas device simple to operate.
To achieve these goals, the utility model has designed a kind of condensation of gas device, comprises water-cooled outer tube, is arranged on water-cooled inner tube in described water-cooled outer tube, and the two ends up and down of described water-cooled outer tube have respectively a delivery port and a water inlet;
The two ends of described water-cooled inner tube are what do not seal;
Described condensation of gas device also comprises: insert the condensation column in described water-cooled inner tube;
On the cylindrical of described water-cooled inner tube, be equidistantly arranged with water-cooling ring, the cavity by described water-cooling ring and described water-cooled outer tube seals, and has the breach that can allow condensed water pass through on every group of water-cooling ring.
Embodiment of the present utility model in terms of existing technologies, have after such as ald reaction, liquid source and Solid Source reaction residual matter and intermediate product are by the condensation of lowering the temperature of the condensation column in water-cooled inner tube, become liquid or solid particle, when hot gas temperature reduces, through the pipeline being connected with water-cooled inner tube end, enter corresponding emission-control equipment, after harmless processing, enter in atmosphere.Wherein, because delivery port is arranged on the top of water inlet, and on the tube wall of water-cooled inner tube, be equidistantly arranged with water-cooling ring, cavity by each water-cooling ring and water-cooled outer tube seals, on every group of water-cooling ring, also there is in addition the breach that the water that can be condensed passes through, thereby make condensed water is from delivery port, to discharge after breach by every layer of cold water ring progressively rises from water inlet enters the cavity of water-cooled outer tube again, thereby has guaranteed that the effect of whole water-cooled is very even.
Further, the position opposite of the breach on two adjacent groups water-cooling ring.Thereby make condensed water only after approaching the cavity region that the full adjacent two layers water-cooling ring of punching forms, just understand from the breach of the water-cooling ring of last layer overflow and rise to last layer water-cooling ring forms again cavity region in.Flow through step by step multilayer water-cooling ring, extend water stream channel, thereby improved the water-cooled effect of whole condensation of gas device.
Further, described condensation of gas device also comprises: be connected respectively suction flange and outlet(discharge) flange for fixing described condensation column with the two ends of described water-cooled inner tube; Wherein, the delivery port of the corresponding described water-cooled outer tube of described suction flange, the water inlet of the corresponding described water-cooled outer tube of described outlet(discharge) flange.And the water inlet of described water-cooled outer tube connects a water supply connector, the delivery port of described water-cooled outer tube connects a water out adapter.
Further, the end of described water-cooled inner tube is also provided with a water cooled seal ring, by described water cooled seal ring and described water-cooled outer tube, seals.Thereby further strengthened the sealing property between water-cooled inner tube and water-cooled outer tube.
Further, described outlet(discharge) flange is fastenedly connected by described clip and described water-cooled outer tube.Thereby guaranteed the tightness that be connected of outlet(discharge) flange with water-cooled inner tube.
Accompanying drawing explanation
Fig. 1 is the structural representation of the condensation of gas device of the utility model the first embodiment;
Fig. 2 is the installation diagram of the condensation of gas device of the utility model the first embodiment;
Fig. 3 is the structural representation of the condensation of gas device of the utility model the second embodiment.
The specific embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing, each embodiment of the present utility model is explained in detail.Yet, persons of ordinary skill in the art may appreciate that in each embodiment of the utility model, in order to make reader understand the application better, many ins and outs have been proposed.But, even without these ins and outs and the many variations based on following embodiment and modification, also can realize each claim of the application technical scheme required for protection.
The first embodiment of the present utility model relates to a kind of condensation of gas device, comprises water-cooled outer tube 1, is arranged on the interior water-cooled inner tube 2 of water-cooled outer tube 1.Wherein, the two ends up and down of water-cooled outer tube 1 have respectively a delivery port 3 and a water inlet 4, and the two ends of water-cooled inner tube 2 are what do not seal, and inside is a hollow structure.
In addition, in the present embodiment, be equidistantly arranged with water-cooling ring 5 on the cylindrical of water-cooled inner tube 2, water-cooled inner tube 2 seals by each water-cooling ring 5 and the cavity of water-cooled outer tube 1, and has the breach 6 that can allow condensed water pass through on every group of water-cooling ring 5.
The condensation of gas device of present embodiment also comprises: insert the condensation column 7 in water-cooled inner tube 2.
As shown in the above, after having such as ald reaction, liquid source and Solid Source reaction residual matter and intermediate product are by the condensation of lowering the temperature of the condensation column 7 in water-cooled inner tube 2, become liquid or solid particle, when hot gas temperature reduces, and enter corresponding emission-control equipment through the pipeline being connected with water-cooled inner tube 2 ends, after harmless processing, enter in atmosphere.Wherein, because delivery port 4 is arranged on the top of water inlet 3, and on the tube wall of water-cooled inner tube 2, be equidistantly arranged with water-cooling ring 5, by each water-cooling ring 5 and the cavity of water-cooled outer tube 1, seal, on every group of water-cooling ring, also there is in addition the breach 8 that the water that can be condensed passes through, thereby make condensed water is from delivery port 4, to discharge after breach by every layer of cold water ring 5 progressively rises from water inlet 3 enters the cavity of water-cooled outer tube 1 again, thereby has guaranteed that the effect of whole water-cooled is very even.
Specifically, in the present embodiment, the two ends of water-cooled inner tube are to be connected with respectively for fixedly suction flange 8 and the outlet(discharge) flange 9 of condensation column 7, and water-cooled inner tube 2 is sent into material and discharged material by suction flange 8 and outlet(discharge) flange 9.Wherein, the installation position of suction flange 8 is delivery ports 3 of corresponding water-cooled outer tube 1, and the installation position of outlet(discharge) flange 9 is water inlets 4 of corresponding water-cooled outer tube 1.In addition, in the present embodiment, the water inlet 4 of water-cooled outer tube 1 also connects a water supply connector 10, and the delivery port 3 of water-cooled outer tube 1 connects a water out adapter 11, and water-cooled outer tube 1 is introduced condensed water and discharged condensed water by water supply connector 10 and water out adapter 11.
In addition, it is worth mentioning that, in the present embodiment, the end of water-cooled inner tube 2 is also provided with a water cooled seal ring 12, by water cooled seal ring 12 and water-cooled outer tube 1, seals.Thereby further improved the sealing property between water-cooled inner tube 2 and water-cooled outer tube 1.
In addition, in the present embodiment, outlet(discharge) flange 8 is fastenedly connected by clip 13 and water-cooled outer tube 1.Thereby guaranteed the tightness that be connected of outlet(discharge) flange 9 with water-cooled inner tube 2.
The second embodiment of the present utility model relates to a kind of condensation of gas device, the second embodiment is on the basis of the first embodiment, to have done further improvement, it mainly improves and is: as shown in Figure 3, in the present embodiment, the position opposite of the breach 6 on two adjacent groups water-cooling ring 5.Thereby make condensed water only after approaching the punching cavity region that completely adjacent two layers water-cooling ring 5 forms, just can from the breach 6 of the water-cooling ring 5 of last layer, overflow and rise to last layer water-cooling ring 5 forms again cavity region in, flow through step by step multilayer water-cooling ring, extend water stream channel, thereby further improved the water-cooled effect of whole condensation of gas device.
Persons of ordinary skill in the art may appreciate that the respective embodiments described above are to realize specific embodiment of the utility model, and in actual applications, can to it, do various changes in the form and details, and do not depart from spirit and scope of the present utility model.
Claims (6)
1. a condensation of gas device, comprises water-cooled outer tube, is arranged on water-cooled inner tube in described water-cooled outer tube, and the two ends up and down of described water-cooled outer tube have respectively a delivery port and a water inlet;
The two ends of described water-cooled inner tube are what do not seal;
Described condensation of gas device also comprises: insert the condensation column in described water-cooled inner tube, it is characterized in that:
On the cylindrical of described water-cooled inner tube, be equidistantly arranged with water-cooling ring, the cavity by described water-cooling ring and described water-cooled outer tube seals, and has the breach that can allow condensed water pass through on every group of water-cooling ring.
2. condensation of gas device according to claim 1, is characterized in that: the position opposite of the breach on two adjacent groups water-cooling ring.
3. condensation of gas device according to claim 1, is characterized in that: described condensation of gas device also comprises: be connected respectively suction flange and outlet(discharge) flange for fixing described condensation column with the two ends of described water-cooled inner tube;
Wherein, the delivery port of the corresponding described water-cooled outer tube of described suction flange, the water inlet of the corresponding described water-cooled outer tube of described outlet(discharge) flange.
4. condensation of gas device according to claim 1, is characterized in that: the end of described water-cooled inner tube is also provided with a water cooled seal ring, by described water cooled seal ring and described water-cooled outer tube, seals.
5. condensation of gas device according to claim 1, is characterized in that: the water inlet of described water-cooled outer tube connects a water supply connector, and the delivery port of described water-cooled outer tube connects a water out adapter.
6. according to the condensation of gas device described in any one in claim 1 to 5, it is characterized in that: described outlet(discharge) flange is fastenedly connected by clip and described water-cooled outer tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420140999.5U CN203772050U (en) | 2014-03-26 | 2014-03-26 | Gas condensing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420140999.5U CN203772050U (en) | 2014-03-26 | 2014-03-26 | Gas condensing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203772050U true CN203772050U (en) | 2014-08-13 |
Family
ID=51289235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420140999.5U Expired - Lifetime CN203772050U (en) | 2014-03-26 | 2014-03-26 | Gas condensing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203772050U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104832462A (en) * | 2015-01-14 | 2015-08-12 | 上海核工程研究设计院 | Ejector system for vacuum-pumping of reactor coolant system |
| CN104949540A (en) * | 2014-03-26 | 2015-09-30 | 上海福宜真空设备有限公司 | Gas condensing device |
-
2014
- 2014-03-26 CN CN201420140999.5U patent/CN203772050U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104949540A (en) * | 2014-03-26 | 2015-09-30 | 上海福宜真空设备有限公司 | Gas condensing device |
| CN104832462A (en) * | 2015-01-14 | 2015-08-12 | 上海核工程研究设计院 | Ejector system for vacuum-pumping of reactor coolant system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |