CN104897049B - 一种磁性微位移平台式平面反射镜激光干涉仪的标定方法和测量方法 - Google Patents
一种磁性微位移平台式平面反射镜激光干涉仪的标定方法和测量方法 Download PDFInfo
- Publication number
- CN104897049B CN104897049B CN201510365983.3A CN201510365983A CN104897049B CN 104897049 B CN104897049 B CN 104897049B CN 201510365983 A CN201510365983 A CN 201510365983A CN 104897049 B CN104897049 B CN 104897049B
- Authority
- CN
- China
- Prior art keywords
- displacement
- photodetector
- interference
- laser beam
- directive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 222
- 238000000034 method Methods 0.000 title claims abstract description 45
- 238000005259 measurement Methods 0.000 claims abstract description 110
- 230000033001 locomotion Effects 0.000 claims abstract description 87
- 238000005305 interferometry Methods 0.000 claims abstract description 73
- 230000001066 destructive effect Effects 0.000 claims description 17
- 230000002452 interceptive effect Effects 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 6
- 230000005622 photoelectricity Effects 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000013461 design Methods 0.000 claims description 3
- 238000007689 inspection Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 22
- 230000003287 optical effect Effects 0.000 description 6
- 230000007613 environmental effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000004556 laser interferometry Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510365983.3A CN104897049B (zh) | 2015-06-29 | 2015-06-29 | 一种磁性微位移平台式平面反射镜激光干涉仪的标定方法和测量方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510365983.3A CN104897049B (zh) | 2015-06-29 | 2015-06-29 | 一种磁性微位移平台式平面反射镜激光干涉仪的标定方法和测量方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104897049A CN104897049A (zh) | 2015-09-09 |
CN104897049B true CN104897049B (zh) | 2017-07-28 |
Family
ID=54029865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510365983.3A Active CN104897049B (zh) | 2015-06-29 | 2015-06-29 | 一种磁性微位移平台式平面反射镜激光干涉仪的标定方法和测量方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104897049B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105783740B (zh) * | 2016-05-19 | 2019-02-22 | 北方民族大学 | 一种交替增量式测量微位移传感器的测量方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4886363A (en) * | 1988-09-06 | 1989-12-12 | Eastman Kodak Company | Quadratic frequency modulated absolute distance measuring interferometry |
JPH07260584A (ja) * | 1994-03-16 | 1995-10-13 | Toshiba Corp | マイケルソン干渉計 |
CN1280293A (zh) * | 2000-08-03 | 2001-01-17 | 中国科学院上海光学精密机械研究所 | 物体位移的纳米精度的测量方法 |
EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
CN101590605A (zh) * | 2009-04-21 | 2009-12-02 | 寿震森 | 可微调垂直平台 |
CN102490027A (zh) * | 2011-12-16 | 2012-06-13 | 深圳市大族激光科技股份有限公司 | 升降平台 |
CN204705316U (zh) * | 2015-06-29 | 2015-10-14 | 北方民族大学 | 一种磁性微位移平台式平面反射镜激光干涉仪 |
-
2015
- 2015-06-29 CN CN201510365983.3A patent/CN104897049B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4886363A (en) * | 1988-09-06 | 1989-12-12 | Eastman Kodak Company | Quadratic frequency modulated absolute distance measuring interferometry |
JPH07260584A (ja) * | 1994-03-16 | 1995-10-13 | Toshiba Corp | マイケルソン干渉計 |
CN1280293A (zh) * | 2000-08-03 | 2001-01-17 | 中国科学院上海光学精密机械研究所 | 物体位移的纳米精度的测量方法 |
EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
CN101590605A (zh) * | 2009-04-21 | 2009-12-02 | 寿震森 | 可微调垂直平台 |
CN102490027A (zh) * | 2011-12-16 | 2012-06-13 | 深圳市大族激光科技股份有限公司 | 升降平台 |
CN204705316U (zh) * | 2015-06-29 | 2015-10-14 | 北方民族大学 | 一种磁性微位移平台式平面反射镜激光干涉仪 |
Also Published As
Publication number | Publication date |
---|---|
CN104897049A (zh) | 2015-09-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105043242B (zh) | 一种对比式抗干扰阶梯平面反射镜激光干涉仪及标定方法和测量方法 | |
CN104964641B (zh) | 一种磁性微位移平台式级联阶梯角反射镜激光干涉仪及标定方法和测量方法 | |
CN104697438B (zh) | 一种移动补偿式角反射镜激光干涉仪的使用方法 | |
CN104697443B (zh) | 一种移动补偿式级联阶梯型角反射镜激光干涉仪及测量方法 | |
CN104880147B (zh) | 一种磁性微位移平台式角反射镜激光干涉仪的标定方法和测量方法 | |
CN102878933B (zh) | 一种基于白光干涉定位原理的比较仪及其检测方法 | |
CN104697442B (zh) | 一种移动补偿式平面反射镜激光干涉仪及使用方法 | |
CN105371755B (zh) | 一种采用波长修正式多光束阶梯平面反射镜激光干涉仪的激光波长修正方法 | |
CN104897049B (zh) | 一种磁性微位移平台式平面反射镜激光干涉仪的标定方法和测量方法 | |
CN204705316U (zh) | 一种磁性微位移平台式平面反射镜激光干涉仪 | |
CN105004263B (zh) | 一种对比式抗干扰微动平面反射镜激光干涉仪及标定方法和测量方法 | |
CN104930968B (zh) | 一种磁性微位移平台式阶梯平面反射镜激光干涉仪及标定方法和测量方法 | |
CN205120038U (zh) | 一种激光波长修正式平面反射镜激光干涉仪 | |
CN204718549U (zh) | 一种磁性微位移平台式阶梯角反射镜激光干涉仪 | |
CN105043241B (zh) | 一种对比式抗干扰角反射镜激光干涉仪及标定方法和测量方法 | |
CN204705317U (zh) | 一种磁性微位移平台式阶梯平面反射镜激光干涉仪 | |
CN204705318U (zh) | 一种磁性微位移平台式角反射镜激光干涉仪 | |
CN204705319U (zh) | 一种磁性微位移平台式级联阶梯角反射镜激光干涉仪 | |
CN205619874U (zh) | 一种激光波长修正式角反射镜激光干涉仪 | |
CN104964642B (zh) | 一种磁性微位移平台式阶梯角反射镜激光干涉仪的标定方法和测量方法 | |
CN104848782B (zh) | 一种对比式抗干扰微动级联阶梯角反射镜激光干涉仪及标定方法和测量方法 | |
CN105180801B (zh) | 一种对比式抗干扰阶梯型角反射镜激光干涉仪及标定方法和测量方法 | |
CN105157559B (zh) | 一种对比式抗干扰级联阶梯角反射镜激光干涉仪及标定方法和测量方法 | |
CN205879110U (zh) | 一种激光波长修正式平面反射镜激光干涉仪 | |
CN105043245B (zh) | 一种对比式抗干扰平面反射镜激光干涉仪及标定方法和测量方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210105 Address after: 251800 no.377, Gongye 2nd Road, economic development zone, Yangxin County, Binzhou City, Shandong Province Patentee after: Shandong xinkaiyuan Technology Innovation Development Co.,Ltd. Address before: 1607, building 49, No.3, Queshan Yunfeng Road, Gaofeng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Hongyue Information Technology Co.,Ltd. Effective date of registration: 20210105 Address after: 1607, building 49, No.3, Queshan Yunfeng Road, Gaofeng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Hongyue Information Technology Co.,Ltd. Address before: 750021 No. 204, Wenchang North Street, Xixia District, the Ningxia Hui Autonomous Region, Yinchuan Patentee before: BEIFANG MINZU University |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240227 Address after: 251800 no.377, Gongye 2nd Road, economic development zone, Yangxin County, Binzhou City, Shandong Province Patentee after: Shandong xinkaiyuan Technology Innovation Development Co.,Ltd. Country or region after: China Patentee after: Shandong Haotai New Building Materials Co.,Ltd. Address before: 251800 no.377, Gongye 2nd Road, economic development zone, Yangxin County, Binzhou City, Shandong Province Patentee before: Shandong xinkaiyuan Technology Innovation Development Co.,Ltd. Country or region before: China |