CN104697442B - 一种移动补偿式平面反射镜激光干涉仪及使用方法 - Google Patents
一种移动补偿式平面反射镜激光干涉仪及使用方法 Download PDFInfo
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- CN104697442B CN104697442B CN201510144017.9A CN201510144017A CN104697442B CN 104697442 B CN104697442 B CN 104697442B CN 201510144017 A CN201510144017 A CN 201510144017A CN 104697442 B CN104697442 B CN 104697442B
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Publication number | Priority date | Publication date | Assignee | Title |
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CN105509637B (zh) * | 2015-11-27 | 2018-02-06 | 成都信息工程大学 | 一种采用激光波长修正式平面反射镜激光干涉仪的激光波长修正方法 |
CN105333817B (zh) * | 2015-11-27 | 2018-06-01 | 成都信息工程大学 | 采用激光波长修正式平面反射镜激光干涉仪的测量方法 |
CN106197259B (zh) * | 2016-08-22 | 2019-01-04 | 中国科学技术大学 | 一种高精度大量程实时单点离面位移的测量方法 |
CN112857207B (zh) * | 2021-03-09 | 2022-12-16 | 哈尔滨工业大学 | 基于阵列式探测器的单光束三自由度零差激光干涉仪 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH095018A (ja) * | 1995-06-26 | 1997-01-10 | Olympus Optical Co Ltd | 移動量測長装置 |
JPH09280827A (ja) * | 1996-04-17 | 1997-10-31 | Toshiba Corp | レーザ干渉測長器 |
CN101532880A (zh) * | 2008-03-12 | 2009-09-16 | 中国科学院西安光学精密机械研究所 | 双动镜干涉仪 |
CN102023050A (zh) * | 2010-11-09 | 2011-04-20 | 山东省科学院海洋仪器仪表研究所 | 激光干涉式水听器 |
CN102645269A (zh) * | 2012-05-18 | 2012-08-22 | 山东省科学院海洋仪器仪表研究所 | 一种海洋背景噪声的声压监测装置 |
CN203190940U (zh) * | 2013-04-17 | 2013-09-11 | 南京信息工程大学 | 一种迈克尔逊干涉仪 |
CN103674220A (zh) * | 2013-12-30 | 2014-03-26 | 上海理工大学 | 测振系统 |
CN103885179A (zh) * | 2012-12-21 | 2014-06-25 | 安捷伦科技有限公司 | 具有多个扫描架的干涉仪 |
CN204439009U (zh) * | 2015-03-30 | 2015-07-01 | 北方民族大学 | 一种改进型平面反射镜激光干涉仪 |
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Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH095018A (ja) * | 1995-06-26 | 1997-01-10 | Olympus Optical Co Ltd | 移動量測長装置 |
JPH09280827A (ja) * | 1996-04-17 | 1997-10-31 | Toshiba Corp | レーザ干渉測長器 |
CN101532880A (zh) * | 2008-03-12 | 2009-09-16 | 中国科学院西安光学精密机械研究所 | 双动镜干涉仪 |
CN102023050A (zh) * | 2010-11-09 | 2011-04-20 | 山东省科学院海洋仪器仪表研究所 | 激光干涉式水听器 |
CN102645269A (zh) * | 2012-05-18 | 2012-08-22 | 山东省科学院海洋仪器仪表研究所 | 一种海洋背景噪声的声压监测装置 |
CN103885179A (zh) * | 2012-12-21 | 2014-06-25 | 安捷伦科技有限公司 | 具有多个扫描架的干涉仪 |
CN203190940U (zh) * | 2013-04-17 | 2013-09-11 | 南京信息工程大学 | 一种迈克尔逊干涉仪 |
CN103674220A (zh) * | 2013-12-30 | 2014-03-26 | 上海理工大学 | 测振系统 |
CN204439009U (zh) * | 2015-03-30 | 2015-07-01 | 北方民族大学 | 一种改进型平面反射镜激光干涉仪 |
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