CN104880253B - A kind of fast illuminated formation method of high spatial resolution based on polarizing beam splitter - Google Patents

A kind of fast illuminated formation method of high spatial resolution based on polarizing beam splitter Download PDF

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CN104880253B
CN104880253B CN201510333220.0A CN201510333220A CN104880253B CN 104880253 B CN104880253 B CN 104880253B CN 201510333220 A CN201510333220 A CN 201510333220A CN 104880253 B CN104880253 B CN 104880253B
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arm
spectrum
light
beam splitter
polarizing beam
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CN104880253A (en
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金鹏
朱帅帅
张宇
林杰
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/447Polarisation spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • G01J3/453Interferometric spectrometry by correlation of the amplitudes

Abstract

A kind of fast illuminated formation method of high spatial resolution based on polarizing beam splitter belongs to fast illuminated imaging spectral technology field;On the basis of tradition imaging spectrometer, between collimating mirror and microlens array, it is provided with polarizing beam splitter one, adds An imaging arm light path;In spectrum arm light path, by arranging polarizing beam splitter two, tradition monochromatic light line structure is changed into balance spectral arm and the bifocal path structure of non-equilibrium spectrum arm;Based on above-mentioned spectrogrph, the interference signal that the interference signal utilizing balance spectral arm photodetector and Signal Processing Element to obtain deducts non-equilibrium spectrum arm photodetector and Signal Processing Element obtains, process through Fourier transformation again, obtain image and the spectral information of target;The present invention fast illuminated formation method is possible not only to catch rapidly image and the spectral information of moving target, and spatial resolution and the signal to noise ratio of system can be greatly improved, and is conducive to applying in fine fields of measurement.

Description

A kind of fast illuminated formation method of high spatial resolution based on polarizing beam splitter
The application is filing date: on February 18th, 2014, Application No.: 201410053286.X, invention entitled: one Plant the divisional application of the fast illuminated imaging spectrometer of high spatial resolution based on polarizing beam splitter and formation method.
Technical field
A kind of fast illuminated formation method of high spatial resolution based on polarizing beam splitter belongs to fast illuminated imaging spectral technology Field.
Background technology
Spectrogrph is the instrument that can obtain input spectrum density function, at agricultural, astronomy, biology, chemistry, Chromaticity metering etc. Field has a wide range of applications.Spectrogrph principle is broadly divided into two kinds: a kind of is the dispersion as dispersion element with prism and grating Type spectrogrph, can directly obtain the spectrum of target;Another kind is The interference type spectral instrument of core, can directly obtain the interference strength distribution of target, need to obtain mesh through Fourier transformation Mark spectrum.
Color dispersion-type spectrogrph uses prism or grating to obtain target optical spectrum as dispersion element, has technology maturation, performance The advantage such as stable, but structure is relative complex, it is achieved and high spatial resolution or high spectral resolution are both needed to little entrance slit, limit Luminous flux and signal to noise ratio.Interference type spectral instrument utilizes the interferogram of two-beam interference as Fourier transformation to obtain spectrum number According to, there is the advantages such as luminous flux is big, spectral resolution is high, Free Spectral Range width.Interference type spectral instrument structure in early days is most Based on Michelson's interferometer, under same spectra resolution, luminous flux is about 190 times of grating type spectrogrph.But its work Time, need precision, stable index glass to scan, therefore target optical spectrum information cannot be carried out real-time detection, to applied environment and condition Require the harshest.
Along with the development of spectral technique, in fields such as biological detection, environmental monitoring, military surveillances, spectrogrph is proposed Obtain image and the requirement of spectral information the most in real time.To this end, Chinese scholars has carried out substantial amounts of research.In last century nine Paper " the Application of Multiple-Image that the ten's were delivered by Japanese scholars Akiko Hirai et al. Fourier Transform Spectral Imaging to Measurement of Fast Phenomena, OPTICAL REVIEW Vol.1, No.2 (1994) 205-207 " in a kind of fast illuminated imaging spectrum based on lens arra is proposed first System, can catch image and the spectral information being in 30r/m rotating speed object, but this system bulk is huger, capacity of resisting disturbance Difference.Hereafter, Michael W.Kudenov of Arizona, USA university et al. is at paper " the Compact real-time delivered Birefringent imaging spectrometer, OPTICS EXPRESS 17973/Vol.20, No.16/30July 2012 " the fast illuminated imaging spectrometer of a kind of miniaturization based on microlens array and promise MAERSK prism is proposed in, permissible Quickly catch image and the spectral information of moving object.
Spectrogrph disclosed for Michael W.Kudenov et al. includes imaging lens, incident diaphragm, collimating mirror, lenticule Array, the polarizer, promise MAERSK prism one, half-wave plate, promise MAERSK prism two, analyzer, photodetector and signal processing Parts, the light from target converges on incident diaphragm through imaging lens, then arrives lenticule battle array after collimating mirror collimates Row, light injects the polarizer after microlens array, is polarized and becomes line polarized light, and polarization direction and x-axis, y-axis are the most at 45 °, There is birefringence through promise MAERSK prism in this line polarized light, is divided into two bundle polarization directions for the moment respectively along x-axis and the line of y-axis Polarized light, this two bunch polarized light is after half-wave plate, and linear polarization is exchanged, and reflects through promise MAERSK prism two afterwards, Eventually passing analyzer, two-beam will have an identical polarization direction, finally arrive on photodetector and Signal Processing Element also Interfere.
If the sub-lens number of microlens array is M × N, then obtaining M × N number of subimage, each subimage has identical Profile and different pixel gray scales, owing to each subimage is different through the position of promise MAERSK prism, so every height The optical path difference of the pixel of image same position is different, takes on each subimage the gray value of same position point as an ordered series of numbers And make Fourier transformation, i.e. can obtain the spectral information of this pixel, in like manner can obtain the light of all pixels on subimage Spectrum information, thus this system completes within time of integration of photodetector, obtains containing target image and spectral information " data cube ".
But in this system, owing to original image is divided into M × N number of subimage by this system, therefore its target figure finally obtained Image space resolution is the lowest, it is impossible to be applied to require the occasion of high spatial resolution;In addition, target light source is through the polarizer And analyzer, therefore its preferable optical efficiency is only 25%, the signal to noise ratio causing system is the lowest, it is impossible to meet wanting of fine measurement Ask.
Summary of the invention
In order to solve the problems referred to above, the present invention devises a kind of fast illuminated of high spatial resolution based on polarizing beam splitter As spectrogrph and formation method, compared with the existing technology, the present invention is possible not only to catch rapidly image and the light of moving target Spectrum information, and spatial resolution and the signal to noise ratio of system can be greatly improved, be conducive to applying in fine fields of measurement.
The object of the present invention is achieved like this:
A kind of fast illuminated imaging spectrometer of high spatial resolution based on polarizing beam splitter, sets successively along the light direction of propagation Put imaging lens, incident diaphragm, collimating mirror, microlens array, also include the polarization being arranged between collimating mirror and microlens array Beam splitter one, An imaging arm imaging lens and An imaging arm photodetector and Signal Processing Element;It is arranged on microlens array below Spectrum arm half-wave plate one, spectrum arm promise MAERSK prism one, spectrum arm half-wave plate two, spectrum arm promise MAERSK prism two, spectrum Arm half-wave plate three, polarizing beam splitter two, balance spectral arm photodetector and Signal Processing Element and non-equilibrium spectrum arm photoelectricity Detector and Signal Processing Element;
Light from object converges on incident diaphragm through imaging lens, then arrives polarizing beam splitter through collimating mirror One, the reflection light after polarizing beam splitter one is imaged onto An imaging arm photodetector and signal processing through An imaging arm imaging lens Parts;Transmitted ray after polarizing beam splitter one arrives microlens array, then sequentially passes through spectrum arm half-wave plate one, spectrum arm Promise MAERSK prism one, spectrum arm half-wave plate two, spectrum arm promise MAERSK prism two, spectrum arm half-wave plate three, arrival polarization point Light device two, the transmitted ray after polarizing beam splitter two occurs at balance spectral arm photodetector and Signal Processing Element surface Interfere;Reflection light after polarizing beam splitter two occurs at non-equilibrium spectrum arm photodetector and Signal Processing Element surface Interfere.
A kind of formation method based on above-mentioned difference fast illuminated imaging spectrometer, with balance spectral arm photodetector and letter The interference letter that number interference signal that processing component obtains deducts non-equilibrium spectrum arm photodetector and Signal Processing Element obtains Number, then process through past direct current, apodization, phasing and Fourier transformation, obtain image and the spectral information of target.
The present invention is from the different of prior art, in the structure of imaging spectrometer, and first, at collimating mirror and lenticule It is provided with polarizing beam splitter one between array, adds An imaging arm light path;The second, in spectrum arm light path, by arranging polarization Beam splitter two, changes into balance spectral arm and the bifocal path structure of non-equilibrium spectrum arm by tradition monochromatic light line structure;In imaging side In method, the interference signal utilizing balance spectral arm photodetector and Signal Processing Element to obtain deducts non-equilibrium spectrum arm photoelectricity The interference signal that detector and Signal Processing Element obtain;Above difference is had advantageous effect in that: the first, in An imaging arm Obtain the RGB color image of high spatial resolution, the low spatial resolution that obtains in conjunction with spectrum arm, high spectral resolution figure Picture, finally obtains high spatial resolution, high spectral resolution image, the spatial resolution of system is greatly improved;The second, utilization is flat The difference of weighing apparatus spectrum arm interferogram and non-equilibrium spectrum arm interferogram, as total interferogram, is possible not only to minimizing system in theory Common-mode error, and the optical loss of system 50% can be reduced, make the theoretical optics efficiency of system rise to from 25% 50%, the signal to noise ratio of system is greatly improved, makes the present invention be conducive in fine fields of measurement and apply.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention fast illuminated imaging spectrometer of high spatial resolution based on polarizing beam splitter.
Fig. 2 is that system spectrum arm optical path difference produces partial schematic diagram.
Fig. 3 is the distribution schematic diagram of optical path difference.
Fig. 4 is microlens array, balance spectral arm section axonometric drawing.
Fig. 5 is the optical path difference distribution schematic diagram of subimage on balance spectral arm photodetector.
Fig. 6 is the interferogram cube schematic diagram that balance spectral arm obtains.
Fig. 7 is single fresnel's zone plate structural representation.
Fig. 8 is 4 × 4 Fresnel zone chip arrays schematic diagrams.
In figure: 1 imaging lens, 2 incident diaphragms, 3 collimating mirrors, 4 microlens arrays, 51 polarizing beam splitter one, 52 An imaging arm become As mirror, 53 An imaging arm photodetector and Signal Processing Elements;61 spectrum arm half-wave plate one, 62 spectrum arm promise MAERSK prisms One, 63 spectrum arm half-wave plate two, 64 spectrum arm promise MAERSK prism two, 65 spectrum arm half-wave plate three, 71 polarizing beam splitter two, 72 Balance spectral arm photodetector and Signal Processing Element, 73 non-equilibrium spectrum arm photodetector and Signal Processing Elements.
Detailed description of the invention
Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.
Specific embodiment one
The structural representation of the fast illuminated imaging spectrometer of high spatial resolution based on polarizing beam splitter of the present embodiment is such as Shown in Fig. 1.This spectrogrph includes imaging lens 1;Incident diaphragm 2;Collimating mirror 3;Polarizing beam splitter 1;An imaging arm imaging lens 52 He An imaging arm photodetector and Signal Processing Element 53;Microlens array 4;Spectrum arm half-wave plate 1;Spectrum arm promise MAERSK Prism 1;Spectrum arm half-wave plate 2 63;Spectrum arm promise MAERSK prism 2 64;Spectrum arm half-wave plate 3 65;Polarizing beam splitter 2 71;Balance spectral arm photodetector and Signal Processing Element 72 and non-equilibrium spectrum arm photodetector and signal processing part Part 73;
Light from object converges on incident diaphragm 2 through imaging lens 1, then arrives polarization point through collimating mirror 3 Light device 1, is nature light inciding the light before polarizing beam splitter 1, natural light p after polarizing beam splitter 1 Component continues along the original direction of propagation, and referred to as spectrum arm light, the s component of light is at the cemented surface of polarizing beam splitter 1 Upper reflect, referred to as An imaging arm light.Through An imaging arm imaging lens 52 after An imaging arm light line reflection, finally inject An imaging arm Photodetector and Signal Processing Element 53, it is thus achieved that the high spatial resolution RGB color image of object.
Spectrum arm light arrives spectrum arm half-wave plate 1, light through microlens array 4 after leaving polarizing beam splitter 1 The fast axle of spectrum arm half-wave plate 1 is positioned in xoy plane, becomes 22.5 ° with x-axis, and spectrum arm light is through spectrum arm half-wave plate 1 Rear polarizer direction is from becoming the most at 45 ° with x-axis and y-axis along the x-axis direction, and hereafter light enters spectrum arm promise MAERSK prism 1 First wedge after be divided into p-polarization light and s polarized light, according to the first of the promise MAERSK prism of spectrum arm shown in Fig. 21 The optical axis direction of wedge may determine that p-polarization light is ordinary light o light, and s polarized light is extraordinary ray e light.Light is through spectrum arm After the cemented surface of promise MAERSK prism 1, according to the optical axis direction of second wedge of spectrum arm promise MAERSK prism 1, May determine that p-polarization light is e light, s polarized light is o light.Two bunch polarized light continue to propagate across forward spectrum arm half-wave plate two 63, the fast axle of spectrum arm half-wave plate 2 63 is positioned at xoy plane, the most at 45 ° with x-axis and y-axis, and spectrum arm half-wave plate 2 63 makes light P-polarization light component and the s polarized light component of spectrum arm light are rotated both clockwise and counterclockwise 90 ° with z-axis for axle center respectively, i.e. p is inclined The light that shakes becomes s polarized light, and s polarized light becomes p-polarization light.Two bundle polarized light continue to spread into forward spectrum arm promise MAERSK rib The first wedge of mirror 2 64, according to the optical axis direction of the spectrum arm promise MAERSK prism 2 64 first wedge shown in Fig. 2, can With judge p-polarization light as o light, s polarized light is e light.Light after the cemented surface of spectrum arm promise MAERSK prism 2 64, according to The optical axis direction of second wedge of spectrum arm promise MAERSK prism 2 64, it can be determined that p-polarization light is e light, and s polarized light is o Light.Promise MAERSK prism owing to using in the present embodiment is calcite material, its ordinary refraction index noAnd extraordinary ray Refractive index neVary in size, and two bundle polarized light are different with the distance that e light is passed by as o light, therefore produce between two bundle polarized light One optical path difference.Hereafter two bundle polarized light inject spectrum arm half-wave plate 3 65, and the fast axle of spectrum arm half-wave plate 3 65 is positioned at xoy In plane, becoming 22.5 ° with x-axis, light deflects through spectrum arm half-wave plate 3 65 rear polarizer direction, by respectively along x-axis and y Direction of principal axis, becomes at 45 ° with y-axis respectively and 135 °, and hereafter, light injects polarizing beam splitter 2 71, and two bunch polarized light are respectively Being divided into the p-component along x-axis and the s component along y-axis, wherein the p-component of two light continues along the original direction of propagation, finally exists Interfering at balance spectral arm photodetector and Signal Processing Element 72, the s component of two light is at polarizing beam splitter 2 71 Cemented surface at reflect, finally interfere at non-equilibrium spectrum arm photodetector and Signal Processing Element 73.
Assuming that spectrum arm light is monochromatic light, wave number is σ, and it is after spectrum arm promise MAERSK prism 2 64, certain There is optical path difference Δ between p-component and the s component of some spectrum arm light, namely the Jones vector of now spectrum arm light be:
A = 2 2 1 e - i 2 π σ Δ
The Jones matrix of spectrum arm half-wave plate 3 65 is:
G = 2 2 1 1 1 - 1
The balance spectral arm road of polarizing beam splitter 2 71 and the Jones matrix on non-equilibrium spectrum arm road are respectively as follows:
P 1 = 1 0 0 0
P 2 = 0 0 0 1
The Jones vector of final balance spectral arm and non-equilibrium spectrum arm light is:
C 1 = P 1 · G · A = 1 2 1 + c o s ( 2 π σ Δ ) - i s i n ( 2 π σ Δ ) 0
C 2 = P 2 · G · A = 1 2 0 1 - c o s ( 2 π σ Δ ) + i s i n ( 2 π σ Δ )
If considering further that spectrum arm light light intensity B ignored because using light Jones vectorσ, then two-arm interference light intensity is:
I 1 = 1 2 B σ [ 1 + c o s ( 2 π σ Δ ) ]
I 2 = 1 2 B σ [ 1 - c o s ( 2 π σ Δ ) ]
Subtract non-equilibrium spectrum arm interference light intensity with balance spectral arm interference light intensity and obtain final interference light intensity:
I (Δ)=I1-I2=Bσcos(2πσΔ)
Spectrum arm light is extended to polychromatic light by monochromatic light, then has:
I ( Δ ) = ∫ - ∞ + ∞ B ( σ ) e 2 π σ Δ d σ
Above formula can turn to:
B ( σ ) = 1 2 π ∫ - ∞ + ∞ I ( Δ ) e - 2 π σ Δ d Δ
I.e. spectrum arm light light intensity B (σ) is the Fourier transformation of interference light intensity I (Δ).
Promise MAERSK prism owing to using in the present embodiment be the different calcite wedges of two panels optical axis direction glued and Become, if therefore spectrum arm light is different through the position of promise MAERSK prism, then o light is different with the distance that e light is passed by, and last two restraint Interfering the optical path difference between light different, light is through the relation position and optical path difference size as it is shown on figure 3, x ' in Fig. 3 Axle changes the fastest direction along prism wedge thickness.
The axonometric drawing of the balance spectral arm section of the present embodiment as shown in Figure 4, wherein spectrum arm half-wave plate 1, spectrum arm Promise MAERSK prism 1, spectrum arm half-wave plate 2 63, spectrum arm promise MAERSK prism 2 64, spectrum arm half-wave plate 3 65 5 Overall one the angle δ the least of axle rotation centered by z-axis of parts.The optical path difference of subimage on balance spectral arm photodetector Distribution, as it is shown in figure 5, lined up from small to large by the label in Fig. 5 by subimage, obtains interferogram as shown in Figure 6 and stands Side, wherein xiAnd yiIt it is the local coordinate system of every width subimage.The number of microlens array is designated as M × N, and wherein M and N is respectively Lens number along x-axis and y-axis direction.Control the anglec of rotationThen can get same position on every subimage Point optical path difference becomes arithmetic progression.
The most non-equilibrium spectrum arm section can also obtain one group of same position point optical path difference and become the subimage of arithmetic progression, The final interference image that then balance spectral arm image obtains after subtracting each other with non-equilibrium spectrum arm image corresponding point be also one group identical Location point optical path difference becomes the subimage of arithmetic progression.The gray scale taking same position point on each subimage constitutes an array, should Array is interference light intensity I (Δ), I (Δ) carries out Fourier transformation and i.e. can obtain the spectral density function B (σ) of this point.So Take the gray scale of all pixels on the subimage constitute array and make Fourier transformation and i.e. can get all pixels on subimage Spectral density function.
The An imaging arm of the present embodiment obtains the RGB color image of an object high spatial resolution, and spectrum arm obtains one On the low spatial resolution image of individual object and image " data cube " of each pixel spectral density function.By two-arm Image registration, and the RGB image that An imaging arm is obtained by the spectral density function using spectrum arm to obtain carries out interpolation, obtains high spatial The spectral density function of each pixel on image in different resolution, the final high spatial resolution images obtaining an object and image " data cube " of upper each pixel spectral density function.
Specific embodiment two
The present embodiment is from the different of specific embodiment one, and described microlens array 4 becomes micro-fresnel's zone plate battle array Row, wherein, single Fresnel zone chip architecture as it is shown in fig. 7,4 × 4 Fresnel zone chip arrays as shown in Figure 8.
The present invention is not limited to above-mentioned preferred forms, and anyone should learn the knot made under the enlightenment of the present invention Structure change or method are improved, and every have same or like technical scheme with the present invention, each falls within protection scope of the present invention Within.

Claims (2)

1. the fast illuminated formation method of high spatial resolution based on polarizing beam splitter,
The imaging spectrometer used is: set gradually imaging lens (1), incident diaphragm (2), collimating mirror along the light direction of propagation (3), microlens array (4), and be arranged between collimating mirror (3) and microlens array (4) polarizing beam splitter one (51), become As arm imaging mirror (52) and An imaging arm photodetector and Signal Processing Element (53);It is arranged on microlens array (4) below Spectrum arm half-wave plate one (61), spectrum arm promise MAERSK prism one (62), spectrum arm half-wave plate two (63), spectrum arm promise MAERSK Prism two (64), spectrum arm half-wave plate three (65), polarizing beam splitter two (71), balance spectral arm photodetector and signal processing Parts (72) and non-equilibrium spectrum arm photodetector and Signal Processing Element (73);
Light from object converges on incident diaphragm (2) through imaging lens (1), then arrives polarization through collimating mirror (3) Beam splitter one (51), the reflection light after polarizing beam splitter one (51) is imaged onto An imaging arm light through An imaging arm imaging lens (52) Electric explorer and Signal Processing Element (53);Transmitted ray after polarizing beam splitter one (51) arrives microlens array (4), then Sequentially pass through spectrum arm half-wave plate one (61), spectrum arm promise MAERSK prism one (62), spectrum arm half-wave plate two (63), spectrum arm Promise MAERSK prism two (64), spectrum arm half-wave plate three (65), arrival polarizing beam splitter two (71), through polarizing beam splitter two (71) After transmitted ray interfere at balance spectral arm photodetector and Signal Processing Element (72) surface;Through polarizing beam splitter Reflection light after two (71) interferes at non-equilibrium spectrum arm photodetector and Signal Processing Element (73) surface;
The method used is: the interference signal obtained with balance spectral arm photodetector and Signal Processing Element (72) deducts The interference signal that non-equilibrium spectrum arm photodetector and Signal Processing Element (73) obtain, then process through Fourier transformation, Obtain image and the spectral information of target;
It is characterized in that,
The interference signal that described balance spectral arm photodetector and Signal Processing Element (72) obtain deducts non-equilibrium spectrum The interference signal that arm photodetector and Signal Processing Element (73) obtain, particularly as follows:
Spectrum arm light wave number is σ, after spectrum arm promise MAERSK prism two (64), and the p-component of spectrum arm light and s There is optical path difference Δ between component, now the Jones vector of spectrum arm light is:
A = 2 2 1 e - i 2 π σ Δ
The Jones matrix of spectrum arm half-wave plate three (65) is:
G = 2 2 1 1 1 - 1
The balance spectral arm road of polarizing beam splitter two (71) and the Jones matrix on non-equilibrium spectrum arm road are respectively as follows:
P 1 = 1 0 0 0
P 2 = 0 0 0 1
The Jones vector of balance spectral arm and non-equilibrium spectrum arm light is:
C 1 = P 1 · G · A = 1 2 1 + c o s ( 2 π σ Δ ) - i s i n ( 2 π σ Δ ) 0
C 2 = P 2 · G · A = 1 2 0 1 - c o s ( 2 π σ Δ ) + i s i n ( 2 π σ Δ )
Consider spectrum arm light light intensity B ignored because using light Jones vectorσ, balance spectral arm and non-equilibrium spectrum arm Interference light intensity is:
I 1 = 1 2 B σ [ 1 + c o s ( 2 π σ Δ ) ]
I 2 = 1 2 B σ [ 1 - c o s ( 2 π σ Δ ) ]
Subtract non-equilibrium spectrum arm interference light intensity with balance spectral arm interference light intensity, obtain final interference light intensity:
I (Δ)=I1-I2=Bσcos(2πσΔ)
Spectrum arm light is extended to polychromatic light by monochromatic light, then has:
I ( Δ ) = ∫ - ∞ + ∞ B σ e 2 π σ Δ d σ
Described Fourier transformation processes, particularly as follows:
B σ = 1 2 π ∫ - ∞ + ∞ I ( Δ ) e - 2 π σ Δ d Δ
I.e. spectrum arm light light intensity BσIt it is the Fourier transformation of interference light intensity I (Δ).
The fast illuminated formation method of high spatial resolution based on polarizing beam splitter the most according to claim 1, its feature exists In, deduct non-equilibrium spectrum arm light at the interference signal obtained with balance spectral arm photodetector and Signal Processing Element (72) Between the interference signal that electric explorer and Signal Processing Element (73) obtain, and Fourier transformation two steps of process, also wrap Include direct current, apodization, phasing computing.
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