CN104867801A - Inductively coupled plasma spray gun and plasma device - Google Patents
Inductively coupled plasma spray gun and plasma device Download PDFInfo
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- CN104867801A CN104867801A CN201510259687.5A CN201510259687A CN104867801A CN 104867801 A CN104867801 A CN 104867801A CN 201510259687 A CN201510259687 A CN 201510259687A CN 104867801 A CN104867801 A CN 104867801A
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Abstract
The invention discloses an inductively coupled plasma spray gun and a plasma device, wherein the inductively coupled plasma spray gun comprises a discharge chamber, a gas introduction apparatus, a cooling device and an inductance coil. The discharge chamber is formed by enclosing of a first hollow tube which is a silicon nitride pipe or a silicon carbide pipe, and the gas introduction apparatus is communicated with the discharge chamber. The cooling device comprises a second hollow tube, a coolant introducing assembly and a coolant lead-out assembly, the second hollow tube encloses the first hollow tube, and a first gap is arranged between the inner wall of the second hollow tube and the outer wall of the first hollow tube. The coolant introducing assembly and the coolant lead-out assembly are communicated with the first gap, and the inductance coil is arranged outside of the second hollow tube. The stability of the inductively coupled plasma spray gun during a use process is improved, rapture due to high temperature is effectively prevented, needs for continuous production is satisfied, and safety risk is lowered.
Description
Technical field
The present invention relates to technical field of plasma, particularly relate to a kind of inductively coupled plasma spray gun and apply its plasma apparatus.
Background technology
Plasma is a kind of is the physical form of main component by free electron and charged ion, is called as the 4th state of material, is widely used in the technical fields such as smelting, plated film, crystal growth, spraying and welding.
Plasma by natural generation (as northern lights and lightning), also by artificial generation.The mode of artificial generation plasma mainly comprises: DC arc discharge method, AC power frequency electric discharge, high-frequency induction electric discharge, electric glow discharge method and combustion method.
Wherein, the equipment utilizing high-frequency induction electric discharge to generate plasma used is generally inductively coupled plasma spray gun.Current inductively coupled plasma spray gun thermal endurance is poor, in use easily breaks, not only can not meet quantity-produced needs, and there is very large potential safety hazard.
Summary of the invention
The invention provides the good inductively coupled plasma spray gun of a kind of heat resistance and plasma apparatus.
For achieving the above object, the present invention adopts following technical scheme:
A kind of inductively coupled plasma spray gun, comprises
Arc chamber, described arc chamber is enclosed by the first hollow tube and forms, and described first hollow tube is nitrogenize silicone tube or carborundum tube;
Gas leading-in device, described gas leading-in device is communicated with described arc chamber;
Cooling device, described cooling device comprises the second hollow tube, cooling agent imports assembly and assembly derived by cooling agent, described second hollow tube is around in the outside of described first hollow tube, and there is the first gap between the lateral wall of the madial wall of described second hollow tube and described first hollow tube, described cooling agent imports assembly and is all communicated with described first gap with described cooling agent derivation assembly;
Inductance coil, described inductance coil is arranged on the outside of described second hollow tube.
Wherein in an embodiment, described gas leading-in device comprises reacting gas ingress pipe, be provided with inlet channel and coolant flow channel in described reacting gas ingress pipe, described coolant flow channel is arranged around described inlet channel, and described inlet channel is communicated with described arc chamber.
Wherein in an embodiment, described coolant flow channel comprises the first cooling duct and the second cooling duct that are interconnected;
Described first cooling duct, described second cooling duct and described inlet channel are coaxially arranged, and described first cooling duct is around in the outside of described inlet channel, and described second cooling duct is around in the outside of described first cooling duct;
Described first cooling duct is provided with coolant entrance, described second cooling duct is provided with coolant outlet.
Wherein in an embodiment, the cross-sectional area of described first cooling duct is 2:1 ~ 4:1 with the ratio of the cross-sectional area of described inlet channel, and the cross-sectional area of described first cooling duct is equal with the cross-sectional area of described second cooling duct.
Wherein in an embodiment, described gas leading-in device also comprises plasma gas and imports assembly, described plasma gas imports on assembly and is provided with radial guiding gas port and tangential air guide port, and described radial guiding gas port is all communicated with described arc chamber with described tangential air guide port.
Wherein in an embodiment, one end of described reacting gas ingress pipe is sleeved in described first hollow tube, there is the second gap between the lateral wall of described reacting gas ingress pipe and the madial wall of described first hollow tube, described radial guiding gas port is all communicated with described arc chamber by described second gap with described tangential air guide port.
Wherein in an embodiment, the size in described second gap is 1mm ~ 5mm.
Wherein in an embodiment, the size in described first gap is 1mm ~ 10mm.
Wherein in an embodiment, the internal diameter of described first hollow tube is 40mm ~ 80mm, and the thickness of described first hollow tube is 1mm ~ 3mm.
Wherein in an embodiment, the internal diameter of described second hollow tube is 48mm ~ 90mm, and the thickness of described second hollow tube is 2mm ~ 4mm.
Wherein in an embodiment, described cooling agent imports assembly and described cooling agent derivation assembly is all fixed on the lateral wall of described second hollow tube, and described cooling agent imports the bottom that assembly is positioned at described second hollow tube, the top that assembly is positioned at described second hollow tube derived by described cooling agent.
Wherein in an embodiment, described inductively coupled plasma spray gun also comprises fixed part and adjustable ring;
Described reacting gas ingress pipe is fixed by described fixed part;
The top of described reacting gas ingress pipe has been disposed radially protuberance, and described adjustable ring is arranged between described protuberance and described fixed part, and described reacting gas ingress pipe carries out the adjustment of axial location by described adjustable ring.
A kind of plasma apparatus, comprises described inductively coupled plasma spray gun.
Beneficial effect of the present invention is as follows:
In inductively coupled plasma spray gun of the present invention and plasma apparatus, arc chamber is made up of silicon nitride or carbofrax material, this kind of material has good thermal conductivity and excellent resistance to elevated temperatures, substantially increase inductively coupled plasma spray gun stability in use, effectively prevent breaking of causing due to high temperature, thus meet quantity-produced needs, reduce potential safety hazard; Further, cooling device is set in all sides of the first hollow tube and lowers the temperature, prevent burning out or breaking of the first hollow tube 110 further, improve security performance; In addition, this inductively coupled plasma spray gun adopts inductance coil to carry out inductively, avoids the use of electrode, reduces material cost and material contamination.
Accompanying drawing explanation
Fig. 1 is the structural representation of inductively coupled plasma spray gun one embodiment of the present invention;
Fig. 2 is the enlarged drawing of part A in Fig. 1.
Embodiment
Below the specific embodiment of the present invention is described in detail.Should be understood that, embodiment described herein, only for instruction and explanation of the present invention, is not limited to the present invention.It should be noted that, the noun of locality in the present invention, as bottom, top etc. all with the putting position in Fig. 1 for reference.
See Fig. 1 and Fig. 2, the invention provides a kind of inductively coupled plasma spray gun, comprise arc chamber 100, gas leading-in device 200, cooling device 300 and inductance coil 400.This plasma torch mainly for generation of plasma, usually and other devices with the use of, to complete the technical processs such as smelting, plated film, crystal growth, spraying or welding.
Wherein, arc chamber 100 is the chamber generating plasma, and it is enclosed by the first hollow tube 110 and forms, and the first hollow tube 110 is nitrogenize silicone tube or carborundum tube, one end of gas leading-in device 200 is communicated with arc chamber 100, during work, the other end of gas leading-in device 200 is communicated with source of the gas, for importing gas in arc chamber 100, the gas imported generally includes reacting gas and plasma gas, and concrete kind is depending on process requirements, cooling device 300 comprises the second hollow tube 310, cooling agent imports assembly 320 and assembly 330 derived by cooling agent, second hollow tube 310 is around in the outside of the first hollow tube 110, and there is the first gap 340 between the lateral wall of the madial wall of the second hollow tube 310 and the first hollow tube 110, cooling agent imports assembly 320 and is all communicated with the first gap 340 with cooling agent derivation assembly 330, during work, first cooling agent imports assembly 320 from cooling agent and flow into the first gap 340, with the tube wall generation exchange heat of arc chamber 100, take away the partial heat produced in arc chamber 100, then derive assembly 330 from cooling agent to flow out, inductance coil 400 is arranged on the outside of the second hollow tube 310, can directly be wrapped on the lateral wall of the second hollow tube 310, inductance coil 400 is communicated with radio-frequency power supply in the course of the work, larger induced voltage is produced by inductance coupling high, the plasma gas discharge in arc chamber 100 is made to produce plasma, preferably, inductance coil 400 is made up of copper pipe, and the number of turn is preferably 3 ~ 6 circles.
It should be noted that, the cooling agent in the present invention can be cooling water or other cooling liquids, also can be refrigerating gas, is preferably cooling water; Plasma gas in the present invention refers to process gas, is ionized as plasma in arc chamber 100, is generally argon gas or helium; Reacting gas refers to the substantive gas played a role in technical process, is ionized as ion in arc chamber 100, finally forms ion current and flow out spray gun together with plasma.
Inductively coupled plasma spray gun of the present invention, arc chamber 100 is made up of silicon nitride or carbofrax material, silicon nitride or carbofrax material itself have good thermal conductivity and excellent resistance to elevated temperatures, thus substantially increase inductively coupled plasma spray gun stability in use, effectively prevent breaking of causing due to high temperature, and then meet quantity-produced needs, reduce potential safety hazard; Further, cooling device 300 is set in all sides of the first hollow tube 110 and lowers the temperature, prevent burning out or breaking of the first hollow tube 110 further, improve security performance, meanwhile, cooling device 300 can also be lowered the temperature to inductance coil 400, thus improves inductive coupling efficiency; In addition, this inductively coupled plasma spray gun adopts inductance coil 400 to carry out inductively, avoids the use of electrode, reduces material cost and material contamination.
As preferably, in above-mentioned inductively coupled plasma spray gun, the size in the first gap 340 is 1mm ~ 10mm.In this interstice coverage, the circulation of cooling agent is comparatively large, effectively can carry out exchange heat, give full play to the cooling effect of cooling agent.
Material due to the first hollow tube 110 is silicon nitride or carborundum, the Production conditions of the conductive coefficient of compound material, the coefficient of expansion and plasma, the internal diameter of the first hollow tube 110 is preferably 40mm ~ 80mm, thickness is preferably 1mm ~ 3mm, in this number range, first hollow tube 110 has more excellent heat-resisting and heat conductivility, effectively prevent breaking of the first hollow tube 110, improves security performance.
The internal diameter of the second hollow tube 310 is arranged according to the internal diameter of the first hollow tube 110, and be preferably 48mm ~ 90mm, the thickness of the second hollow tube 310 is preferably 2mm ~ 4mm.The present invention is for the material of the second hollow tube 310 without particular/special requirement, and be preferably quartz ampoule, it has lower price and higher chemical stability.
As a kind of embodiment, gas leading-in device 200 in the present invention comprises reacting gas ingress pipe 210, the inlet channel 212 for passing into gas and the coolant flow channel 214 for reducing passed into gas temperature is provided with in reacting gas ingress pipe 210, coolant flow channel 214 is arranged around inlet channel 212, and inlet channel 212 is communicated with arc chamber 100.During work, gas is passed in inlet channel 212, cooling agent is passed in coolant flow channel 214, gas temperature under the cooling effect of cooling agent reduces, the temperature in arc chamber 100 can be reduced after entering arc chamber 100, prevent the damage that the first hollow tube 110 causes due to high temperature further; Meanwhile, the cooling agent in coolant flow channel 214 avoids reacting gas ingress pipe 210 infringement at high temperature itself, ensure that the smooth importing of gas.In the present invention, inlet channel 212 is generally used for and passes into reacting gas.
More preferably, coolant flow channel 214 comprises the first cooling duct 2142 and the second cooling duct 2144 be interconnected; First cooling duct 2144, cooling duct 2142, second and inlet channel 212 are coaxially arranged, and the first cooling duct 2142 is around in the outside of inlet channel 212, and the second cooling duct 2144 is around in the outside of the first cooling duct 2142; First cooling duct 2142 is provided with coolant entrance, the second cooling duct 2144 is provided with coolant outlet.In this embodiment, by the setting of two-layer cooling duct, add the cooling agent currency in the channel, extend the circulation path of cooling agent, thus improve cooling effectiveness, effectively prevent the infringement of the too high gas leading-in device 200 caused of temperature; Simultaneously, first cooling duct 2142 of next-door neighbour's inlet channel 212 arranges coolant entrance, second cooling duct 2144 in outside arranges coolant outlet, which can not only improve the cooling effect of cooling agent to gas in inlet channel 212, and effectively reduce the heat exchange that cooling agent and external environment occur, thus improve the efficient heat exchange rate of cooling agent.
It should be noted that, above-mentioned coolant flow channel 214 is not limited to the first cooling duct 2142 and the second cooling duct 2144, in other embodiments, can also comprise more cooling duct.
More preferably, the cross-sectional area of the first cooling duct 2142 is 2:1 ~ 4:1 with the ratio of the cross-sectional area of inlet channel 212.In which, cooling agent can carry out exchange heat by the reacting gas fully and in inlet channel 212, has lower temperature, be beneficial to the protection of arc chamber 100 and the control of ionization rate when making reacting gas enter arc chamber 100.Further, the cross-sectional area of the first cooling duct 2142 is equal with the cross-sectional area of the second cooling duct 2144.Which is convenient to the control of coolant flow speed, enhances the uniformity of overall cooling-down effect.
As a kind of embodiment, gas leading-in device 200 also comprises plasma gas and imports assembly 220, plasma gas imports on assembly 220 and is provided with radial guiding gas port 222 and tangential air guide port 224, radial guiding gas port 222 is all communicated with arc chamber 100 with tangential air guide port 224, and plasma gas enters into arc chamber 100 by radial guiding gas port 222 and tangential air guide port 224.Wherein, plasma gas is linear running in radial guiding gas port 222, and traffic direction is parallel with radial (radial direction of the first hollow tube 110); Plasma gas is that helix (right-handed screw or backpitch) runs in tangential air guide port 224, and traffic direction and radial direction at an angle, are preferably 30 ° ~ 90 °.The plasma gas passed in the present embodiment can play cooling and protective effect to the first hollow tube 110; Simultaneously, the mode that the present embodiment adopts radial air inlet and tangential air guide to combine passes into plasma gas, not only increase overall feed rate, and different airintake directions can form little cyclone, be conducive to the convection current between gas, thus make reacting gas and plasma gas mixing evenly.
Preferably, radial guiding gas port 222 is arranged on the top of tangential air guide port 224, and this setting position can improve the uniformity of gas and vapor permeation further.
It should be noted that, in other embodiments, inductively coupled plasma spray gun of the present invention also can not comprise plasma gas and import assembly 220, and plasma gas passes into arc chamber 100 by reacting gas ingress pipe 210.
As shown in Figure 2, one end of reacting gas ingress pipe 210 is sleeved in the first hollow tube 110, there is the second gap 230 between the lateral wall of reacting gas ingress pipe 210 and the madial wall of the first hollow tube 110, radial guiding gas port 222 is all communicated with arc chamber 100 by the second gap 230 with tangential air guide port 224.Plasma gas enters into arc chamber 100 by the second gap 230, both sides due to the second gap 230 are respectively arranged with reacting gas ingress pipe 210 and cooling device 300, therefore, in the second gap 230, the plasma gas of circulation carries out dual cooling by the cooling agent in the cooling agent in reacting gas ingress pipe 210 and cooling device 300, the plasma gas that temperature is lower can cool to the inwall of the first hollow tube 110 again, thus substantially increases the security performance of spray gun.As preferably, the size in the second gap 230 is 1mm ~ 5mm.
Preferably, as a kind of embodiment, cooling agent imports assembly 320 and cooling agent derivation assembly 330 is all fixed on the lateral wall of the second hollow tube 310, and cooling agent imports the bottom that assembly 320 is positioned at the second hollow tube 310, the top that assembly 330 is positioned at the second hollow tube 310 derived by cooling agent.In present embodiment, cooling agent imports assembly 320 by the cooling agent being positioned at bottom and flow to the first gap 340, derive assembly 330 by the cooling agent being positioned at top to flow out, the flow direction due to the ion current in arc chamber 100 is from top to bottom, and the circulating direction of cooling agent is from the bottom to top, the mode of this convection current is conducive to the raising of heat exchanger effectiveness.Preferably, cooling agent imports between assembly 320 and cooling agent derivation assembly 330 and is provided with support bar 500, and cooling agent imports assembly 320 and cooling agent derivation assembly 330 is fixed by support bar 500.
Continue see Fig. 1, inductively coupled plasma spray gun also comprises fixed part 600 and adjustable ring 700.Wherein, fixed part 600 is for fixation reaction gas introduction tube 210, and play the effect of the upper end of sealing arc chamber 100, under normal circumstances, fixed part 600 is positioned at the central region of reacting gas ingress pipe 210 simultaneously; The top of reacting gas ingress pipe 210 has been disposed radially protuberance, adjustable ring 700 is arranged between protuberance and fixed part 600, reacting gas ingress pipe 210 carries out the adjustment of axial location by adjustable ring 700, such as, height and quantity by changing adjustable ring 700 carry out the adjustment of reacting gas ingress pipe 210 axial location.
In addition, inductively coupled plasma spray gun of the present invention also comprises fixed head 800, and when carrying out the assembling of spray gun, the first hollow tube 110 is installed by the bottom of spray gun, and is fixed by fixed head 800.Which is convenient to the installation and removal of the first hollow tube 110, can change fast when the first hollow tube 110 damages.
Invention increases inductively coupled plasma spray gun stability in use, effectively prevent breaking of causing due to high temperature, meet quantity-produced needs, reduce potential safety hazard; Meanwhile, the discrete installation of all parts in inductively coupled plasma spray gun, facilitates maintenance and the replacing of parts.
In addition, present invention also offers a kind of plasma apparatus, comprise above-mentioned inductively coupled plasma spray gun.Wherein, this plasma apparatus can be vacuum coating equipment, crystal growth equipment etc.Owing to adopting above-mentioned inductively coupled plasma spray gun, plasma apparatus of the present invention is made to have stronger thermal endurance, stability and higher operating efficiency; Further, in the process engineering such as plated film or crystal growth, ion current enters the arc column diameter formed in deposition chambers after leaving spray gun comparatively large, and reactant is long in the high-temperature region time of staying, and reaction can be made more abundant.
The above embodiment only have expressed several execution mode of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection range of patent of the present invention should be as the criterion with claims.
Claims (10)
1. an inductively coupled plasma spray gun, is characterized in that, comprises
Arc chamber, described arc chamber is enclosed by the first hollow tube and forms, and described first hollow tube is nitrogenize silicone tube or carborundum tube;
Gas leading-in device, described gas leading-in device is communicated with described arc chamber;
Cooling device, described cooling device comprises the second hollow tube, cooling agent imports assembly and assembly derived by cooling agent, described second hollow tube is around in the outside of described first hollow tube, and there is the first gap between the lateral wall of the madial wall of described second hollow tube and described first hollow tube, described cooling agent imports assembly and is all communicated with described first gap with described cooling agent derivation assembly;
Inductance coil, described inductance coil is arranged on the outside of described second hollow tube.
2. inductively coupled plasma spray gun according to claim 1, it is characterized in that, described gas leading-in device comprises reacting gas ingress pipe, inlet channel and coolant flow channel is provided with in described reacting gas ingress pipe, described coolant flow channel is arranged around described inlet channel, and described inlet channel is communicated with described arc chamber.
3. inductively coupled plasma spray gun according to claim 2, is characterized in that, described coolant flow channel comprises the first cooling duct and the second cooling duct that are interconnected;
Described first cooling duct, described second cooling duct and described inlet channel are coaxially arranged, and described first cooling duct is around in the outside of described inlet channel, and described second cooling duct is around in the outside of described first cooling duct;
Described first cooling duct is provided with coolant entrance, described second cooling duct is provided with coolant outlet.
4. inductively coupled plasma spray gun according to claim 3, it is characterized in that, the cross-sectional area of described first cooling duct is 2:1 ~ 4:1 with the ratio of the cross-sectional area of described inlet channel, and the cross-sectional area of described first cooling duct is equal with the cross-sectional area of described second cooling duct.
5. inductively coupled plasma spray gun according to claim 2, it is characterized in that, described gas leading-in device also comprises plasma gas and imports assembly, described plasma gas imports on assembly and is provided with radial guiding gas port and tangential air guide port, and described radial guiding gas port is all communicated with described arc chamber with described tangential air guide port.
6. inductively coupled plasma spray gun according to claim 5, it is characterized in that, one end of described reacting gas ingress pipe is sleeved in described first hollow tube, there is the second gap between the lateral wall of described reacting gas ingress pipe and the madial wall of described first hollow tube, described radial guiding gas port is all communicated with described arc chamber by described second gap with described tangential air guide port.
7. inductively coupled plasma spray gun according to claim 6, is characterized in that, the size in described second gap is 1mm ~ 5mm.
8. the inductively coupled plasma spray gun according to any one of claim 1 ~ 7, it is characterized in that, described cooling agent imports assembly and described cooling agent derivation assembly is all fixed on the lateral wall of described second hollow tube, and described cooling agent imports the bottom that assembly is positioned at described second hollow tube, the top that assembly is positioned at described second hollow tube derived by described cooling agent.
9. the inductively coupled plasma spray gun according to any one of claim 2 ~ 7, is characterized in that, described inductively coupled plasma spray gun also comprises fixed part and adjustable ring;
Described reacting gas ingress pipe is fixed by described fixed part;
The top of described reacting gas ingress pipe has been disposed radially protuberance, and described adjustable ring is arranged between described protuberance and described fixed part, and described reacting gas ingress pipe carries out the adjustment of axial location by described adjustable ring.
10. a plasma apparatus, is characterized in that, comprises the inductively coupled plasma spray gun described in any one of claim 1 ~ 9.
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| CN106896136A (en) * | 2017-04-19 | 2017-06-27 | 中国人民解放军装甲兵工程学院 | A kind of magnetized plasma heat-insulated effect regulation detection means and its detection method |
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