CN206977778U - A kind of water cooling cage high-frequency induction coupled plasma reactor - Google Patents
A kind of water cooling cage high-frequency induction coupled plasma reactor Download PDFInfo
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- CN206977778U CN206977778U CN201720756993.4U CN201720756993U CN206977778U CN 206977778 U CN206977778 U CN 206977778U CN 201720756993 U CN201720756993 U CN 201720756993U CN 206977778 U CN206977778 U CN 206977778U
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- electric discharge
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Abstract
The utility model discloses a kind of water cooling cage high-frequency induction coupled plasma reactor, including electric discharge constraint outer tube layer, electric discharge constraint inner tube layer, upper fastener, cooling water adapter, lower fastener, air inlet adapter and spiral copper coil, the utility model electric discharge constraint inner tube layer enters row constraint to region of discharge, while constraint inner tube layer upper end of discharging is slotted downwards, electric discharge confinement tube is formed non-close cyclic structure in addition to the fraction region of lower end, avoid the formation of shielding of the faraday cup to electromagnetic field；The hollow space of thin-walled is cooling-water duct, the region of electric discharge constraint inner tube layer and annex is cooled down by cooling water, discharge space part periphery high temperature gas flow by notch to outer layer quartz ampoule wall when be cooled, improve electric discharge confinement tube work when security, stability and long-term effect.
Description
Technical field
A kind of water cooling cage high-frequency induction coupled plasma reactor is the utility model is related to, belongs to high-temperature plasma
Technical field.
Background technology
Inductively hot plasma is due to its frequency height, also known as radio frequency induction coupled plasma.Inductively heat etc.
Gas ions have following features：(1) temperature is high, and the heat of plasma is mainly produced by Joule heat, plasma flame stream
Temperature can reach 10000~3000K, be more than 5 times of traditional chemical burning；(2) activity is high, inductively coupled plasma weight
A variety of particles such as electronics, ion, atom be present, some are chemically or physically changed with providing active reaction condition, accelerate anti-
The progress answered；(3) atmosphere is pure controllable, and inductively coupled plasma relies primarily on strong electromagnetic coupled and produced, it is not necessary to electricity
Pole, therefore the problem of producing impurity is evaporated in the absence of electrode, caused plasma atmosphere is pure, and atmosphere can pass through work gas
Body species is controlled；(4) inductively coupled plasma volume is larger, and flame flow velocity degree is low, and uniformity of temperature profile is flat.Therefore,
Inductively coupled plasma is and right especially suitable for the processing (such as prepared by nodularization, solid slope technology, superfine powder) of refractory particle
Ground Heating Experiment research of the higher deep space probe thermally protective materials of thermal environment atmosphere requirements etc..
High-frequency induction coupled plasma reactor is the equipment for producing inductively hot plasma, mainly including following
Part：Discharge confinement tube, working gas, radio-frequency power supply and the spiral winding of generation plasma.Its principle is spiral copper coil
It is wrapped in electric discharge confinement tube, spiral winding end connection radio-frequency power supply, when the radio-frequency current of alternation passes through spiral winding, sense
The electric current of alternation in coil is answered to produce the magnetic field of change, the magnetic field changed according to Faraday's law in discharge tube induces electricity again
, gas ionizes under the magnetic fields of change.Cause electric current in ionized gas and produce Joule heat, and appropriate
Control electric current and work gas scale, which can be formed, stablizes lasting high-temperature plasma stream.Therefore, the effect for confinement tube of discharging is
The working gas of confined space, about bundle reactor is provided, forms high-temperature plasma flame stream wherein.
Inductively coupled plasma reactor is mainly used as electric discharge confinement tube using individual layer quartz ampoule at present, discharge tube
Intensity is relatively low, and the installing of discharge tube, fixed and sealing difficulty are larger, simultaneously, discharge tube by electric discharge inside pipe wall near
One layer of cold work gas air-flow is cooled down, and this just proposes higher requirement to the gas flow for the inside pipe wall annex that discharges, and reduces
The enthalpy of plasma flame stream and the stability of a whole set of reactor operation, the confinement tube of metal material are easily achieved installation, fixed
And sealing, but be difficult to because the metal structure of closing has shielding action to electromagnetic induction in inductively coupled plasma reactor
It is middle to realize application.
Utility model content
Technology of the present utility model solves problem：For overcome the deficiencies in the prior art, the utility model provides a kind of water
Cold cage high-frequency induction coupled plasma reactor, improve the safety and stability of electric discharge confinement tube and reactor.
Technical solution of the present utility model is：
A kind of water cooling cage high-frequency induction coupled plasma reactor, including electric discharge constraint outer tube layer, electric discharge confinement tube
Internal layer, upper fastener, cooling water adapter, lower fastener, air inlet adapter and spiral copper coil, electric discharge constraint outer tube layer, put
The top and bottom of electricity constraint inner tube layer are fixed and coordinated by upper fastener and lower fastener respectively, double-deck inside and outside formation
Electric discharge constraint tubular construction, electric discharge constraint outer tube layer be quartzy tubular structure, with electric discharge constraint inner tube layer cooperation and in the circumferential
Form closing space；
Upper fastener upper end coordinates installation cooling water adapter, and air inlet adapter is placed on cooling water adapter, and electric discharge is about
Beam tube internal layer is the cage construction with water-cooling channel, is slotted in its upper end, and notch is uniformly distributed circumferentially and from upper end edge axle
Extend to lower end, notch lower edge retains certain distance away from electric discharge constraint inner tube layer lower surface, makes electric discharge constraint inner tube layer lower end
Part keeps complete cyclic structure, and the hollow space of electric discharge constraint inner tube layer thin-walled is cooling-water duct, cooling water from upper and
Lower flowing is cooled down to electric discharge constraint inner tube layer and neighbouring plasma stream to protect the constraint outer tube layer that discharges,
Spiral copper coil is wrapped in electric discharge constraint outer tube layer periphery, and spiral copper coil and electric discharge constraint inner tube layer are coaxial, and
It is arranged in and is provided with notched areas, spiral copper cash coil end connection radio-frequency power supply；
The notch quantity of electric discharge constraint inner tube layer is 6~12.
Distance of the notch lower edge away from electric discharge constraint inner tube layer lower end is 5~10mm.
Width of rebate is 1~3mm, magnetic field is effectively penetrated, and and can effectively reduces electric discharge constraint outer tube layer and constrained with electric discharge
The contact area of high-temperature plasma air-flow inside inner tube layer.
Coil bottom is not less than 10mm apart from notch lower edge, and coil is topmost located positioned at less than the 1/3 of whole notch.
Upper fastener and insulated non-metal material is respectively adopted for lower fastener and metal material is made.
Electric discharge constraint inner tube layer is the metal material that thermal conductivity factor is not less than 300W/ (mK).
The beneficial effects of the utility model are：
(1) the utility model electric discharge constraint inner tube layer enters row constraint to region of discharge, while constraint inner tube layer upper end of discharging
Fluting downwards, makes electric discharge confinement tube form non-close cyclic structure in addition to the fraction region of lower end, avoids the formation of faraday cup pair
The shielding of electromagnetic field；The hollow space of thin-walled is cooling-water duct, the area by cooling water to electric discharge constraint inner tube layer and annex
Domain is cooled down, the high temperature gas flow of the part of discharge space periphery by notch to outer layer quartz ampoule wall when be cooled, carry
Security, stability and long-term effect during high electric discharge confinement tube work；
(2) the utility model electric discharge confinement tube is mainly cooled down by the cooling water of internal layer cooling-water duct, is reduced
Requirement to confinement tube inner wall area air conditioning quantity of discharging, the work gas scale in reactor center region can be properly increased, senses coupling
The enthalpy for closing plasma flame stream is improved to some extent；
(3) the utility model electric discharge confinement tube is double-decker, and outer layer is quartz ampoule, ensures the seal of discharge space,
Internal layer is high thermal conductive metallic water cooling cage construction, improves the overall intensity of electric discharge confinement tube, is easily installed, is fixed and close
Envelope.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the utility model Fig. 1 A-A to sectional view；
Fig. 3 is the structural representation of electric discharge constraint inner tube layer.
Embodiment
Utility model is described in further detail below in conjunction with accompanying drawing.
A kind of water cooling cage high-frequency induction coupled plasma reactor, as shown in Figure 1 and Figure 2, including outside electric discharge confinement tube
Layer 4, electric discharge constraint inner tube layer 5, upper fastener 3, cooling water adapter 2, lower fastener 6, air inlet adapter 1 and spiral copper cash
Circle, electric discharge constraint outer tube layer 4, the top and bottom of electric discharge constraint inner tube layer 5 are entered by upper fastener 3 and lower fastener 6 respectively
Row is fixed and coordinates, double-deck electric discharge constraint tubular construction inside and outside formation, and it is non-that insulation is respectively adopted in upper fastener 3 and lower fastener 6
Metal material and metal material are made, and electric discharge constraint outer tube layer 4 is quartzy tubular structure, match somebody with somebody with electric discharge constraint inner tube layer 5 and merge
Closing space is formed in the circumferential；
Spiral copper coil is wrapped in the periphery of electric discharge constraint outer tube layer 4, and spiral copper coil and electric discharge constraint inner tube layer 5 are coaxial,
And be arranged in and be provided with notched areas, spiral copper cash coil end connection radio-frequency power supply, spiral copper coil, which is arranged in, is provided with notch
Region is to prevent that induced field from being shielded；
The upper upper end of fastener 3 coordinates installation cooling water adapter 2, and air inlet adapter 1 is placed on cooling water adapter 2, is put
Electricity constraint inner tube layer 5 is the cage construction with water-cooling channel, as shown in figure 3, being slotted in its upper end, notch circumferentially uniformly divides
Cloth simultaneously holds extension from upper end axially downward, and notch lower edge retains certain distance away from electric discharge constraint inner tube layer 5 lower surface, makes electric discharge
Constrain the end portion of inner tube layer 5 and keep complete cyclic structure, the hollow space of the electric discharge constraint thin-walled of inner tube layer 5 leads to for cooling water
Road, cooling water flows from top to bottom to be cooled down to electric discharge constraint inner tube layer 5 and neighbouring plasma stream to protect electric discharge about
Beam tube outer layer 4, electric discharge constraint inner tube layer 5 are the metal material that thermal conductivity factor is not less than 300W/ (mK), and discharge constraint inner tube layer
5 notch quantity is 6~12, and distance of the notch lower edge away from electric discharge constraint inner tube layer 5 lower end is 5~10mm, width of rebate 1
~3mm, makes magnetic field effectively penetrate, and and can effectively reduces high temperature inside electric discharge constraint outer tube layer 4 and electric discharge constraint inner tube layer 5 etc.
The contact area of gas ions air-flow, coil bottom are not less than 10mm apart from notch lower edge, and coil is topmost located at whole notch
Less than 1/3 locate.
Working gas is entered in electric discharge constraint inner tube layer 5 by air inlet adapter 1, ionizes to form plasma in induction zone
Body, then sprayed by the lower center gas outlet of fastener 6；
The annular equal water cavity that cooling water is entered on cooling water adapter 2 by the water inlet on cooling water adapter 2, then
In the even each cooling-water duct being assigned on constraint inner tube layer 5, cooling water after the constraint inner tube layer 5 that discharges by flowing to lower fastening
In collect cavity in part 6, and flowed out by the delivery port on lower fastener 6.
The utility model electric discharge constraint inner tube layer 5 coordinates with the quartz ampoule of outer layer 4, and the design had both realized the close of discharge space
Closing property, constraint of the metal sleeve structure to region of discharge is realized again, can be by cooling water to electric discharge in this design basis
Constraint inner tube layer 5 and enclosure region are effectively cooled down, and are improved while the intensity of electric discharge confinement tube entirety is enhanced
Confinement tube of discharging and security, stability and the long-term effect of the work of whole reactor, at the same time, this design reduces to electric discharge
The requirement of confinement tube inner wall area air conditioning quantity, the work gas scale in reactor center region can be properly increased, inductively wait from
The enthalpy of daughter flame stream is improved to some extent.
Operation principle of the present utility model is：Spiral copper coil is wrapped in the periphery of electric discharge constraint outer tube layer 4, spiral copper cash line
End connection radio-frequency power supply is enclosed, when the radio-frequency current of alternation passes through spiral winding, the electric current of alternation produces change in induction coil
The magnetic field of change, gas are ionized under the magnetic fields of change, and electric current is caused in ionized gas and produces Joule heat, is passed through
Electric current and work gas scale are controlled, lasting high-temperature plasma stream is stablized in formation, and in the course of the work, cooling water leads to
Cooling-water duct in overdischarge constraint inner tube layer 5 cools down to electric discharge confinement tube and near zone, protection electric discharge confinement tube
Internal layer and outer layer be not by the high temperature gas flow scaling loss of inside.
The utility model electric discharge constraint inner tube layer enters row constraint to region of discharge, while constraint inner tube layer upper end of discharging is downward
Fluting, makes electric discharge confinement tube form non-close cyclic structure in addition to the fraction region of lower end, avoids the formation of faraday cup to electromagnetism
The shielding of field；The hollow space of thin-walled is cooling-water duct, and the region of electric discharge constraint inner tube layer and annex is entered by cooling water
Row cooling, discharge space part periphery high temperature gas flow by notch to outer layer quartz ampoule wall when be cooled, improve
Security, stability and long-term effect during confinement tube of discharging work.
The undisclosed technology of the utility model belongs to general knowledge as well known to those skilled in the art.
Claims (7)
1. a kind of water cooling cage high-frequency induction coupled plasma reactor, it is characterised in that constrain outer tube layer including electric discharge
(4), electric discharge constraint inner tube layer (5), upper fastener (3), cooling water adapter (2), lower fastener (6), air inlet adapter (1) and
Spiral copper coil, electric discharge constraint outer tube layer (4), the top and bottom of electric discharge constraint inner tube layer (5) pass through upper fastener (3) respectively
It is fixed and coordinates with lower fastener (6), double-deck electric discharge constraint tubular construction, electric discharge constraint outer tube layer (4) is inside and outside formation
Quartzy tubular structure, closing space is formed in the circumferential with merging with electric discharge constraint inner tube layer (5)；
Upper fastener (3) upper end coordinates installation cooling water adapter (2), and air inlet adapter (1) is placed in cooling water adapter (2)
On, electric discharge constraint inner tube layer (5) is the cage construction with water-cooling channel, is slotted in its upper end, and notch is uniformly distributed circumferentially
And hold extension axially downward from upper end, notch lower edge retains certain distance away from electric discharge constraint inner tube layer (5) lower surface, makes electric discharge
Constrain inner tube layer (5) end portion and keep complete cyclic structure, the hollow space of electric discharge constraint inner tube layer (5) thin-walled is cooling
Aquaporin, cooling water flows from top to bottom to be cooled down to electric discharge constraint inner tube layer (5) and neighbouring plasma stream to protect
Electric discharge constraint outer tube layer (4),
Spiral copper coil is wrapped in constraint outer tube layer (4) periphery of discharging, and spiral copper coil constrains inner tube layer (5) coaxially with electric discharge,
And be arranged in and be provided with notched areas, spiral copper cash coil end connection radio-frequency power supply.
2. a kind of water cooling cage high-frequency induction coupled plasma reactor according to claim 1, it is characterised in that put
The notch quantity of electricity constraint inner tube layer (5) is 6~12.
A kind of 3. water cooling cage high-frequency induction coupled plasma reactor according to claim 1, it is characterised in that groove
Distance of the mouth lower edge away from electric discharge constraint inner tube layer (5) lower end is 5~10mm.
A kind of 4. water cooling cage high-frequency induction coupled plasma reactor according to claim 1, it is characterised in that groove
Mouth width is 1~3mm, magnetic field is effectively penetrated, and and can effectively reduces electric discharge constraint outer tube layer (4) and constrains inner tube layer with electric discharge
(5) contact area of internal high-temperature plasma air-flow.
A kind of 5. water cooling cage high-frequency induction coupled plasma reactor according to claim 1, it is characterised in that line
Circle bottom is not less than 10mm apart from notch lower edge, and coil is topmost located positioned at less than the 1/3 of whole notch.
A kind of 6. water cooling cage high-frequency induction coupled plasma reactor according to claim 1, it is characterised in that on
Fastener (3) and insulated non-metal material is respectively adopted for lower fastener (6) and metal material is made.
7. a kind of water cooling cage high-frequency induction coupled plasma reactor according to claim 1, it is characterised in that put
Electricity constraint inner tube layer (5) is the metal material that thermal conductivity factor is not less than 300W/ (mK).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720756993.4U CN206977778U (en) | 2017-06-27 | 2017-06-27 | A kind of water cooling cage high-frequency induction coupled plasma reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720756993.4U CN206977778U (en) | 2017-06-27 | 2017-06-27 | A kind of water cooling cage high-frequency induction coupled plasma reactor |
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| Publication Number | Publication Date |
|---|---|
| CN206977778U true CN206977778U (en) | 2018-02-06 |
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| CN201720756993.4U Active CN206977778U (en) | 2017-06-27 | 2017-06-27 | A kind of water cooling cage high-frequency induction coupled plasma reactor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109769335A (en) * | 2019-03-06 | 2019-05-17 | 大连理工大学 | A kind of long scale plasma generating device of radio frequency micro discharge and method |
| CN112638023A (en) * | 2020-12-11 | 2021-04-09 | 中国人民解放军战略支援部队航天工程大学 | Coaxial double-coil radio-frequency driving gas discharge device |
| CN113634759A (en) * | 2021-07-26 | 2021-11-12 | 西安理工大学 | High-frequency induction plasma device for preparing nano molybdenum powder |
-
2017
- 2017-06-27 CN CN201720756993.4U patent/CN206977778U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109769335A (en) * | 2019-03-06 | 2019-05-17 | 大连理工大学 | A kind of long scale plasma generating device of radio frequency micro discharge and method |
| CN112638023A (en) * | 2020-12-11 | 2021-04-09 | 中国人民解放军战略支援部队航天工程大学 | Coaxial double-coil radio-frequency driving gas discharge device |
| CN113634759A (en) * | 2021-07-26 | 2021-11-12 | 西安理工大学 | High-frequency induction plasma device for preparing nano molybdenum powder |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210430 Address after: 618 Liangjiang Avenue, Yubei District, Chongqing Patentee after: Yunhang times (Chongqing) Technology Co.,Ltd. Address before: 17 Yungang West Road, Fengtai District, Beijing 100074 Patentee before: CHINA ACADEMY OF AEROSPACE AERODYNAMICS |