CN104867801B - Inductively coupled plasma spray gun and plasma device - Google Patents
Inductively coupled plasma spray gun and plasma device Download PDFInfo
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- CN104867801B CN104867801B CN201510259687.5A CN201510259687A CN104867801B CN 104867801 B CN104867801 B CN 104867801B CN 201510259687 A CN201510259687 A CN 201510259687A CN 104867801 B CN104867801 B CN 104867801B
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Abstract
The invention discloses an inductively coupled plasma spray gun and a plasma device, wherein the inductively coupled plasma spray gun comprises a discharge chamber, a gas introduction apparatus, a cooling device and an inductance coil. The discharge chamber is formed by enclosing of a first hollow tube which is a silicon nitride pipe or a silicon carbide pipe, and the gas introduction apparatus is communicated with the discharge chamber. The cooling device comprises a second hollow tube, a coolant introducing assembly and a coolant lead-out assembly, the second hollow tube encloses the first hollow tube, and a first gap is arranged between the inner wall of the second hollow tube and the outer wall of the first hollow tube. The coolant introducing assembly and the coolant lead-out assembly are communicated with the first gap, and the inductance coil is arranged outside of the second hollow tube. The stability of the inductively coupled plasma spray gun during a use process is improved, rapture due to high temperature is effectively prevented, needs for continuous production is satisfied, and safety risk is lowered.
Description
Technical field
The present invention relates to technical field of plasma, more particularly to a kind of inductively coupled plasma spray gun and apply it
Plasma apparatus.
Background technology
Plasma be a kind of be the physical form of main component by free electron and charged ion, be referred to as the of material
Four states, are widely used in the technical fields such as smelting, plated film, crystal growth, spraying and welding.
Plasma also can be able to pass through artificially generated by naturally producing (as northern lights and lightning).Artificially generated grade from
The mode of daughter specifically include that DC arc discharge method, AC power frequency electric discharge, high-frequency induction electric discharge, electric glow discharge method and
Combustion method.
Wherein, the equipment used by plasma that generated using high-frequency induction electric discharge is usually inductively coupled plasma spray
Rifle.Current inductively coupled plasma spray gun heat resistance is poor, is susceptible in use rupture, not only can not meet
Quantity-produced needs, and there is very big potential safety hazard.
Content of the invention
The invention provides a kind of good inductively coupled plasma spray gun of heat resistance and plasma apparatus.
For reaching above-mentioned purpose, the present invention adopts the following technical scheme that
A kind of inductively coupled plasma spray gun, including
Arc chamber, described arc chamber is enclosed to set by the first hollow tube and forms, described first hollow tube be nitridation silicone tube or
Carborundum tube；
Gas leading-in device, described gas leading-in device is connected with described arc chamber；
Cooling device, described cooling device includes the second hollow tube, cooling agent imports assembly and assembly derived by cooling agent,
Described second hollow tube encloses the outside being located at described first hollow tube, and the madial wall of described second hollow tube with described
There is the first gap, described cooling agent imports assembly and described cooling agent derivation assembly is equal between the lateral wall of the first hollow tube
Connect with described first gap；
Inductance coil, described inductance coil is arranged on the outside of described second hollow tube.
Wherein in an embodiment, described gas leading-in device includes reacting gas ingress pipe, and described reacting gas is led
Enter to be provided with inlet channel and coolant flow channel in pipe, described coolant flow channel is set around described inlet channel
Put, described inlet channel is connected with described arc chamber.
Wherein in an embodiment, described coolant flow channel includes the first cooling duct and second being interconnected
Cooling duct；
Described first cooling duct, described second cooling duct are coaxially disposed with described inlet channel, described first cooling
Passage encloses the outside being located at described inlet channel, and the outside being located at described first cooling duct is enclosed in described second cooling duct；
It is provided with coolant entrance on described first cooling duct, described second cooling duct is provided with cooling agent and goes out
Mouthful.
Wherein in an embodiment, the cross-sectional area of described first cooling duct and the cross-sectional area of described inlet channel
Ratio be 2:1～4:1, the cross-sectional area of described first cooling duct is equal with the cross-sectional area of described second cooling duct.
Wherein in an embodiment, described gas leading-in device also includes plasma gas and imports assembly, described etc.
Plasma gas import and are provided with radial direction air guide port and tangential air guide port, described radial direction air guide port and described tangential air guide on assembly
Mouth is all connected with described arc chamber.
Wherein in an embodiment, one end of described reacting gas ingress pipe is sleeved in described first hollow tube,
There is the second gap, described radial direction between the madial wall of the lateral wall of described reacting gas ingress pipe and described first hollow tube
Air guide port is all connected with described arc chamber by described second gap with described tangential air guide port.
Wherein in an embodiment, the size in described second gap is 1mm～5mm.
Wherein in an embodiment, the size in described first gap is 1mm～10mm.
Wherein in an embodiment, the internal diameter of described first hollow tube is 40mm～80mm, described first hollow pipe
The thickness of material is 1mm～3mm.
Wherein in an embodiment, the internal diameter of described second hollow tube is 48mm～90mm, described second hollow pipe
The thickness of material is 2mm～4mm.
Wherein in an embodiment, described cooling agent imports assembly and described cooling agent derive assembly be each attached to described
On the lateral wall of the second hollow tube, and described cooling agent imports the bottom that assembly is located at described second hollow tube, described cold
But the top that assembly is located at described second hollow tube is derived in agent.
Wherein in an embodiment, described inductively coupled plasma spray gun also includes fixed component and regulation ring；
Described reacting gas ingress pipe is fixed by described fixed component；
The top of described reacting gas ingress pipe has been disposed radially protuberance, and described regulation ring is arranged on described protuberance
And described fixed component between, described reacting gas ingress pipe carries out the regulation of axial location by described regulation ring.
A kind of plasma apparatus, including described inductively coupled plasma spray gun.
Beneficial effects of the present invention are as follows:
In the inductively coupled plasma spray gun of the present invention and plasma apparatus, arc chamber is by silicon nitride or carborundum material
Material is made, and this kind of material has good thermal conductivity and excellent resistance to elevated temperatures, substantially increases inductively coupled plasma
Spray gun stability in use, effectively prevent the rupture causing due to high temperature, thus meet quantity-produced needing
Will, reduce potential safety hazard；And, lowered the temperature in the week side of boss setting cooling device of the first hollow tube, prevented further
Burning out or rupturing of first hollow tube 110, improves security performance；In addition, this inductively coupled plasma spray gun is using electricity
Sense coil carries out inductively, it is to avoid the use of electrode, reduces material cost and material contamination.
Brief description
Fig. 1 is the structural representation of inductively coupled plasma spray gun one embodiment of the present invention；
Fig. 2 is the enlarged drawing of a part in Fig. 1.
Specific embodiment
Hereinafter the specific embodiment of the present invention is described in detail.It should be appreciated that it is described herein concrete
Embodiment is merely to illustrate and explains the present invention, is not limited to the present invention.It should be noted that the orientation in the present invention
Word, such as bottom, top etc. are all with the putting position in Fig. 1 as reference.
Referring to Fig. 1 and Fig. 2, the invention provides a kind of inductively coupled plasma spray gun, including arc chamber 100, gas
Gatherer 200, cooling device 300 and inductance coil 400.This plasma torch mainly for generation of plasma, generally
Use cooperatively with other devices, to complete the technical process such as smelting, plated film, crystal growth, spraying or welding.
Wherein, arc chamber 100 is the chamber generating plasma, and it is enclosed to set by the first hollow tube 110 and forms, and first is empty
Heart tubing 110 is nitridation silicone tube or carborundum tube；One end of gas leading-in device 200 is connected with arc chamber 100, during work, gas
The other end of body gatherer 200 is connected with source of the gas, and for importing gas in arc chamber 100, the gas of importing generally includes
Reacting gas and plasma gas, concrete species is depending on process requirements；Cooling device 300 include the second hollow tube 310,
Cooling agent imports assembly 320 and assembly 330 derived by cooling agent, and the second hollow tube 310 encloses and is located at the outer of the first hollow tube 110
There is the first gap 340, cooling between side, and the lateral wall of the madial wall of the second hollow tube 310 and the first hollow tube 110
Agent is imported assembly 320 and is all connected with the first gap 340 with cooling agent derivation assembly 330, and during work, cooling agent is first from cooling agent
Import assembly 320 and be flowed into the first gap 340, with the tube wall of arc chamber 100, heat exchange occurs, take away in arc chamber 100 and produce
Raw partial heat, then derives assembly 330 from cooling agent and flows out；Inductance coil 400 is arranged on the outer of the second hollow tube 310
Side, can be directly wound on the lateral wall of the second hollow tube 310, and inductance coil 400 and radio-frequency power supply connect in the course of the work
Logical, larger induced voltage is produced by inductive, makes the plasma gas discharge in arc chamber 100 produce plasma
Body, it is preferred that inductance coil 400 is made up of copper pipe, the number of turn is preferably 3～6 circles.
It should be noted that the cooling agent in the present invention can be cooling water or other cooling liquids, alternatively cool down gas
Body, preferably cooling water；Plasma gas in the present invention refers to process gas, be ionized in arc chamber 100 for wait from
Daughter, usually argon gas or helium；Reacting gas refers to the gas that in technical process, substance plays a role, in arc chamber 100
Inside it is ionized as ion, finally form ion stream together with plasma and flow out spray gun.
The inductively coupled plasma spray gun of the present invention, arc chamber 100 is made up of silicon nitride or carbofrax material, silicon nitride
Or carbofrax material has good thermal conductivity and excellent resistance to elevated temperatures in itself, thus substantially increase inductive etc. from
Daughter spray gun stability in use, effectively prevent the rupture causing due to high temperature, and then meets continuous production
Needs, reduce potential safety hazard；And, lowered the temperature in the week side of boss setting cooling device 300 of the first hollow tube 110, entered
One step prevents burning out or rupturing of the first hollow tube 110, improves security performance, meanwhile, cooling device 300 can also be right
Inductance coil 400 is lowered the temperature, thus improve inductive coupling efficiency；In addition, this inductively coupled plasma spray gun is using electricity
Sense coil 400 carries out inductively, it is to avoid the use of electrode, reduces material cost and material contamination.
Preferably, in above-mentioned inductively coupled plasma spray gun, the size in the first gap 340 is 1mm～10mm.Should
In interstice coverage, the circulation of cooling agent is larger, can effectively carry out heat exchange, give full play to the cooling effect of cooling agent.
Because the material of the first hollow tube 110 is silicon nitride or carborundum, the thermal conductivity factor of compound material, the coefficient of expansion
And the Production conditions of plasma, the internal diameter preferably 40mm～80mm of the first hollow tube 110, thickness preferably 1mm～
3mm, in this number range, the first hollow tube 110 has more excellent heat-resisting and heat conductivility, effectively prevent first hollow
The rupture of tubing 110, improves security performance.
The internal diameter of the second hollow tube 310 is configured according to the internal diameter of the first hollow tube 110, and preferably 48mm～
90mm, the thickness of the second hollow tube 310 is preferably 2mm～4mm.The present invention is no special for the material of the second hollow tube 310
Different requirement, preferably quartz ampoule, it has relatively low price and higher chemical stability.
As a kind of embodiment, the gas leading-in device 200 in the present invention includes reacting gas ingress pipe 210, instead
Answer the inlet channel 212 being provided with gas introduction tube 210 for being passed through gas and be used for reducing be passed through gas temperature
Coolant flow channel 214, coolant flow channel 214 is configured around inlet channel 212, inlet channel 212 and electric discharge
Room 100 connects.During work, in inlet channel 212, it is passed through gas, coolant flow channel 214 is passed through cooling agent, gas
Under the cooling effect of cooling agent, temperature reduces, and can reduce the temperature in arc chamber 100, enter one after entering arc chamber 100
Step prevents the damage that the first hollow tube 110 is caused due to high temperature；Meanwhile, the cooling agent in coolant flow channel 214 is kept away
Exempt from reacting gas ingress pipe 210 infringement at high temperature itself it is ensured that the smooth importing of gas.In the present invention, air inlet is led to
Road 212 is generally used for being passed through reacting gas.
More preferably, coolant flow channel 214 includes the first cooling duct 2142 being interconnected and the second cooling duct
2144；First cooling duct 2142, the second cooling duct 2144 and inlet channel 212 are coaxially disposed, the first cooling duct 2142
Enclose the outside being located at inlet channel 212, the outside being located at the first cooling duct 2142 is enclosed in the second cooling duct 2144；First cooling
It is provided with coolant entrance on passage 2142, the second cooling duct 2144 is provided with coolant outlet.In this embodiment, pass through
The setting of two-layer cooling duct, increased the cooling agent currency in the channel, extends the circulation path of cooling agent, thus
Improve cooling effectiveness, effectively prevent the infringement of the too high gas leading-in device 200 causing of temperature；Meanwhile, in next-door neighbour's air inlet
On first cooling duct 2142 of passage 212, coolant entrance is set, setting cooling on second cooling duct 2144 in outside
Agent exports, and which can not only improve the cooling effect to gas in inlet channel 212 for the cooling agent, and effectively reduces cold
But the heat exchange that agent is occurred with external environment, thus improve the efficient heat exchange rate of cooling agent.
It should be noted that above-mentioned coolant flow channel 214 to be not limited to the first cooling duct 2142 and second cold
But passage 2144, in other embodiments, can also comprise more cooling ducts.
More preferably, the cross-sectional area of the first cooling duct 2142 and the ratio of the cross-sectional area of inlet channel 212 are 2:1～4:
1.In which, cooling agent can carry out heat exchange by the reacting gas fully and in inlet channel 212, so that reacting gas is entered
There is relatively low temperature, the protection beneficial to arc chamber 100 and the control of ionization rate during arc chamber 100.Further, first is cold
But the cross-sectional area of passage 2142 is equal with the cross-sectional area of the second cooling duct 2144.Which is easy to the control of coolant flow speed
System, enhances the uniformity of overall cooling-down effect.
As a kind of embodiment, gas leading-in device 200 also include plasma gas import assembly 220, wait from
Daughter gas imports and is provided with radial direction air guide port 222 and tangential air guide port 224 on assembly 220, radial direction air guide port 222 and tangentially leading
Gas port 224 is all connected with arc chamber 100, and plasma gas passes through radial direction air guide port 222 and tangential air guide port 224 enters into and puts
Electric room 100.Wherein, plasma gas is linear running in radial direction air guide port 222, and traffic direction is with radially (first is hollow
The radial direction of tubing 110) parallel；Plasma gas is that helix (right-handed screw or backpitch) runs in tangential air guide port 224,
Traffic direction with radially at an angle, preferably 30 °～90 °.The plasma gas being passed through in the present embodiment can be to first
Hollow tube 110 plays cooling and protective effect；Meanwhile, the present embodiment is by the way of radial air inlet and tangential air guide combine
It is passed through plasma gas, not only increase overall feed rate, and different airintake directions can form little cyclone, has
Beneficial to the convection current between gas, so that the mixing of reacting gas and plasma gas is evenly.
It is preferred that radial direction air guide port 222 is arranged on the top of tangential air guide port 224, this set location can carry further
The uniformity of high gas mixing.
It should be noted that in other embodiments, the inductively coupled plasma spray gun of the present invention can not also include
Plasma gas imports assembly 220, and plasma gas can be passed through to arc chamber 100 by reacting gas ingress pipe 210.
As shown in Fig. 2 one end of reacting gas ingress pipe 210 is sleeved in the first hollow tube 110, reacting gas imports
There is the second gap 230, radial direction air guide port 222 and tangential between the madial wall of the lateral wall of pipe 210 and the first hollow tube 110
Air guide port 224 is all connected with arc chamber 100 by the second gap 230.Plasma gas is entered into by the second gap 230 and puts
In electric room 100, because the both sides in the second gap 230 are respectively arranged with reacting gas ingress pipe 210 and cooling device 300, therefore,
In the second gap 230, the plasma gas of circulation can be by the cooling agent in reacting gas ingress pipe 210 and cooling dress
The cooling agent put in 300 carries out dual cooling, and the relatively low plasma gas of temperature again can be in the first hollow tube 110
Wall is cooled, thus substantially increasing the security performance of spray gun.Preferably, the size in the second gap 230 be 1mm～
5mm.
It is preferred that as a kind of embodiment, cooling agent imports assembly 320 and cooling agent derivation assembly 330 is all fixing
On the lateral wall of the second hollow tube 310, and cooling agent imports the bottom that assembly 320 is located at the second hollow tube 310, cooling
The top that assembly 330 is located at the second hollow tube 310 is derived in agent.In present embodiment, cooling agent is by the cooling positioned at bottom
Agent imports assembly 320 and flow to the first gap 340, derives assembly 330 by the cooling agent positioned at top and flows out, due to arc chamber
The flow direction of the ion stream in 100 is from top to bottom, and the circulating direction of cooling agent is from the bottom to top, and the mode of this convection current is conducive to
The raising of heat exchanger effectiveness.It is preferred that cooling agent imports assembly 320 and cooling agent is derived and is provided with support bar between assembly 330
500, cooling agent imports assembly 320 and cooling agent is derived assembly 330 and is fixed by support bar 500.
With continued reference to Fig. 1, inductively coupled plasma spray gun also includes fixed component 600 and regulation ring 700.Wherein, Gu
Determine part 600 to be used for fixing reacting gas ingress pipe 210, simultaneously work as sealing the effect of the upper end of arc chamber 100, usual feelings
Under condition, fixed component 600 is located at the central region of reacting gas ingress pipe 210；The top of reacting gas ingress pipe 210 is radially
It is provided with protuberance, regulation ring 700 is arranged between protuberance and fixed component 600, reacting gas ingress pipe 210 passes through to adjust
Ring 700 carries out the regulation of axial location, for example, can carry out reacting gas importing by the height and quantity that change regulation ring 700
The regulation of pipe 210 axial location.
Additionally, the inductively coupled plasma spray gun of the present invention also includes fixed plate 800, when carrying out the assembling of spray gun,
First hollow tube 110 is installed by the bottom of spray gun, and is fixed by fixed plate 800.It is empty which is easy to first
The installation and removal of heart tubing 110, can quickly be changed when the first hollow tube 110 damages.
The present invention improves inductively coupled plasma spray gun stability in use, effectively prevent due to height
The rupture that temperature causes, meets quantity-produced needs, reduces potential safety hazard；Meanwhile, in inductively coupled plasma spray gun
The discrete installation of all parts, facilitate maintenance and the replacing of part.
Additionally, present invention also offers a kind of plasma apparatus, including above-mentioned inductively coupled plasma spray gun.Its
In, this plasma apparatus can be vacuum coating equipment, crystal growth equipment etc..Due to using above-mentioned inductive etc. from
Daughter spray gun is so that the plasma apparatus of the present invention have stronger heat resistance, stability and higher operating efficiency；And
And, in the process engineering such as plated film or crystal growth, the arc column that ion stream enters formed in deposition chambers after leaving spray gun is straight
Footpath is larger, and reactant is long in the high-temperature region time of staying, and reaction can be made more abundant.
Embodiment described above only have expressed the several embodiments of the present invention, and its description is more concrete and detailed, but simultaneously
Therefore the restriction to the scope of the claims of the present invention can not be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, some deformation can also be made and improve, these broadly fall into the guarantor of the present invention
Shield scope.Therefore, the protection domain of patent of the present invention should be defined by claims.
Claims (11)
1. a kind of inductively coupled plasma spray gun is it is characterised in that include
Arc chamber, described arc chamber is enclosed to set by the first hollow tube and forms, and described first hollow tube is nitridation silicone tube or carbonization
Silicone tube；
Gas leading-in device, described gas leading-in device is connected with described arc chamber, and described gas leading-in device includes reaction gas
Body ingress pipe and plasma gas import assembly, are provided with inlet channel and cooling agent circulation in described reacting gas ingress pipe
Passage, described coolant flow channel is configured around described inlet channel, and described inlet channel is connected with described arc chamber,
Described plasma gas imports and is provided with radial direction air guide port and tangential air guide port on assembly, described radial direction air guide port and described cut
All connect with described arc chamber to air guide port；
Cooling device, described cooling device includes the second hollow tube, cooling agent imports assembly and assembly derived by cooling agent, described
Second hollow tube encloses the outside being located at described first hollow tube, and the madial wall of described second hollow tube and described first
There is the first gap, described cooling agent imports assembly and described cooling agent derives assembly all and institute between the lateral wall of hollow tube
State the first gap connection；
Inductance coil, described inductance coil is arranged on the outside of described second hollow tube.
2. inductively coupled plasma spray gun according to claim 1 is it is characterised in that described coolant flow channel bag
Include the first cooling duct being interconnected and the second cooling duct；
Described first cooling duct, described second cooling duct are coaxially disposed with described inlet channel, described first cooling duct
Enclose the outside being located at described inlet channel, the outside being located at described first cooling duct is enclosed in described second cooling duct；
It is provided with coolant entrance on described first cooling duct, described second cooling duct is provided with coolant outlet.
3. inductively coupled plasma spray gun according to claim 2 is it is characterised in that the horizontal stroke of described first cooling duct
The ratio of sectional area and the cross-sectional area of described inlet channel is 2:1～4:1, the cross-sectional area of described first cooling duct with described
The cross-sectional area of the second cooling duct is equal.
4. inductively coupled plasma spray gun according to claim 1 is it is characterised in that described reacting gas ingress pipe
One end is sleeved in described first hollow tube, and the lateral wall of described reacting gas ingress pipe is interior with described first hollow tube
There is the second gap, described radial direction air guide port and described tangential air guide port are all put with described by described second gap between the wall of side
The connection of electric room.
5. inductively coupled plasma spray gun according to claim 4 is it is characterised in that the size in described second gap is
1mm～5mm.
6. inductively coupled plasma spray gun according to claim 1 is it is characterised in that the size in described first gap is
1mm～10mm.
7. inductively coupled plasma spray gun according to claim 1 it is characterised in that described first hollow tube interior
Footpath is 40mm～80mm, and the thickness of described first hollow tube is 1mm～3mm.
8. inductively coupled plasma spray gun according to claim 1 it is characterised in that described second hollow tube interior
Footpath is 48mm～90mm, and the thickness of described second hollow tube is 2mm～4mm.
9. the inductively coupled plasma spray gun according to any one of claim 1～8 is it is characterised in that described cooling agent
Import assembly and described cooling agent is derived assembly and is each attached on the lateral wall of described second hollow tube, and described cooling agent is led
Enter the bottom that assembly is located at described second hollow tube, the top that assembly is located at described second hollow tube derived by described cooling agent
End.
10. the inductively coupled plasma spray gun according to any one of claim 1～8 is it is characterised in that described inductance coupling
Close plasma torch and also include fixed component and regulation ring；
Described reacting gas ingress pipe is fixed by described fixed component；
The top of described reacting gas ingress pipe has been disposed radially protuberance, and described regulation ring is arranged on described protuberance and institute
State between fixed component, described reacting gas ingress pipe carries out the regulation of axial location by described regulation ring.
A kind of 11. plasma apparatus it is characterised in that include inductive etc. described in any one of claim 1～10 from
Daughter spray gun.
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| CN106068054A (en) * | 2016-05-24 | 2016-11-02 | 中国人民解放军装备学院 | A kind of fluid-cooled gas Metastable atomic beam stream generation apparatus |
| CN107680915B (en) | 2016-08-02 | 2020-11-10 | 北京北方华创微电子装备有限公司 | Plasma source cooling mechanism and semiconductor processing equipment |
| CN106817834A (en) * | 2017-02-24 | 2017-06-09 | 中国航天空气动力技术研究院 | A kind of double water-cooled inductance coils of high-frequency induction plasma generator |
| CN106896136B (en) * | 2017-04-19 | 2023-11-17 | 中国人民解放军装甲兵工程学院 | Magnetization plasma heat insulation effect adjustment detection device and detection method thereof |
| CN108901115B (en) * | 2018-09-19 | 2019-06-07 | 中国空气动力研究与发展中心超高速空气动力研究所 | A kind of plasma generator |
| CN109041395B (en) * | 2018-09-19 | 2019-07-23 | 中国空气动力研究与发展中心超高速空气动力研究所 | A kind of air-cooling apparatus and plasma generator for plasma generator |
| CN109743832B (en) * | 2018-11-30 | 2021-03-23 | 西安航天动力研究所 | High-power long-life plasma torch composite cooling device and design method |
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| CN101391306B (en) * | 2008-11-20 | 2012-01-25 | 核工业西南物理研究院 | Device and method for preparing globular titanium micro-powder or ultra-micro powder |
| CN201316616Y (en) * | 2008-11-20 | 2009-09-30 | 核工业西南物理研究院 | Water cooling radio frequency plasma reactor with ignition tunnel |
| CN103503579B (en) * | 2011-02-03 | 2017-02-22 | 泰克纳等离子系统公司 | High performance induction plasma torch |
| JP2014055785A (en) * | 2012-09-11 | 2014-03-27 | Shimadzu Corp | High frequency power source for plasma and icp emission spectrophotometric analyzer using the same |
| CN104152869B (en) * | 2014-08-22 | 2017-02-08 | 中国科学院宁波材料技术与工程研究所 | Plasma thin film deposition device and deposition method |
| CN204614759U (en) * | 2015-05-20 | 2015-09-02 | 中国科学院宁波材料技术与工程研究所 | Inductively coupled plasma spray gun and plasma apparatus |
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