TWI700462B - Radiant burner and method of treating an effluent gas stream - Google Patents

Abstract

A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing processing tool and comprises: a porous sleeve at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber; and an electrical energy device coupled with the porous sleeve and operable to provide electrical energy to heat the porous sleeve which heats the treatment materials as they pass through the porous sleeve into the treatment chamber. In this way, electrical energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This provides for greater flexibility in the use of such burners since the burner can be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber, enables significantly more energy to be imparted into the treatment materials as they transit through the porous sleeve.

Description

Radiation burner and method for treating an exhaust gas stream

The invention relates to a radiant burner and method.

Radiant burners are known to us and are commonly used to treat exhaust streams from one of the manufacturing process tools used in the semiconductor or flat panel display manufacturing industry, for example. During this manufacturing period, residual perfluorinated compounds (PFC) and other compounds are present in the exhaust gas stream pumped from the process tool. PFCs are difficult to remove from exhaust gas and release them into the environment is undesirable because they are known to have a relatively high greenhouse effect.

Known radiant burners use combustion to remove PFC and other compounds from the exhaust gas stream. Generally, the exhaust gas stream is a nitrogen stream containing PFC and one of other compounds. A fuel gas is mixed with an exhaust gas stream and the gas stream mixture is delivered to a combustion chamber that is laterally surrounded by the outlet surface of a gas burner with small holes. Fuel gas and air are simultaneously supplied to the burner with small holes to affect flameless combustion at the outlet surface, wherein the amount of air passing through the burner with small holes is not only sufficient to consume the fuel gas supplied to the burner, but also It also consumes all combustibles in the airflow mixture injected into the combustion chamber.

Although there are technologies for treating exhaust gas streams, each of them has its own shortcomings. Therefore, it is desirable to provide an improved technique for treating an exhaust gas stream.

According to a first aspect, there is provided a radiant burner for processing an exhaust gas stream from a manufacturing process tool. The radiant burner includes: a porous sleeve, which is A small part of the processing chamber is defined and the processing material passes through the porous sleeve for introduction into the processing chamber; and an electrical power device coupled with the porous sleeve and operable to provide electrical energy to heat the porous sleeve, the porous sleeve The sleeve heats the processing material as it passes through the porous sleeve into the processing chamber.

The first aspect recognizes that known radiant burners generally use fuel gas and air to provide combustion in the treatment chamber to sufficiently raise the temperature in the treatment chamber to remove compounds from the exhaust gas stream. This requires the supply of a fuel gas, which may not be readily available or may be undesirable in some processing environments.

Accordingly, a radiation burner or radiation treatment device is provided. The burner can process an exhaust gas stream provided by a manufacturing process tool. The combustor may include a porous or perforated sleeve which defines at least part of a processing chamber. The porous sleeve may allow processing material to pass therethrough and into the processing chamber. The burner may also include an electrical device. The electrical energy device can be coupled with the porous sleeve. The electrical energy device can provide electrical energy for heating the porous sleeve. The heated porous sleeve can heat the processed material as it passes through the porous sleeve or is transported through the porous sleeve into the processing chamber. In this way, electric energy can be used instead of combustion to raise the temperature in the treatment chamber in order to treat the exhaust gas stream. Since the burner can be used in an environment where there is no fuel gas or the supply of fuel gas is considered undesirable, this provides greater flexibility in the use of the burner. In addition, instead of heating the processing chamber only by using radiant heat when the processing material passes through the porous sleeve, more energy is given to the processing material when the processing material passes through the porous sleeve.

In one embodiment, the porous sleeve has a porosity between 80% and 90%.

In one embodiment, the porous sleeve has a pore size between 200 μm and 800 μm.

In one embodiment, the porous sleeve includes an annular sleeve defining a cylindrical processing chamber therein. Accordingly, the radiant burner can have a processing chamber whose internal geometry is configured to be the same as that of the existing combustion chamber.

In one embodiment, the porous sleeve includes at least one of a conductive material, a ceramic material, or a dielectric material. The material used for the porous sleeve can vary depending on the mechanism used to heat the porous sleeve.

In one embodiment, the porous sleeve includes a sintered metal.

In one embodiment, the sintered metal includes at least one of fiber, powder, and particles.

In one embodiment, the porous sleeve includes a woven metallic fabric.

In one embodiment, the power device includes at least one of a radio frequency power supply, a power supply, and a microwave generator. Accordingly, the electrical device can be changed depending on the mechanism used to heat the material selected for the porous sleeve.

In one embodiment, the electrical energy device includes a coupling element coupled to the porous sleeve, and the coupling element includes at least one of a radio frequency conductor, an electrical conductor, and a waveguide. Accordingly, the coupling between the electrical device and the porous sleeve can be changed depending on the form of energy delivered from the electrical device to the porous sleeve.

In one embodiment, at least one of the radio frequency conductor, the electrical conductor, and the waveguide is positioned in one of the plenums through which the processing material passes, the plenum surrounding the porous sleeve. According to this, the coupling can be positioned in the plenum surrounding the porous sleeve and provided with processing material from the plenum. This conveniently reuses an existing gap to locate the coupling adjacent to the porous sleeve in order to maximize the energy transferred to the porous sleeve.

In one embodiment, at least one of the radio frequency conductor, electrical conductor, and waveguide extends across the porous sleeve to heat the area across it. Accordingly, the coupling member can cover or extend all over the porous sleeve to heat the entire or required part of its area.

In one embodiment, the radio frequency power supply uses radio frequency conductors to provide radio frequency power to inductively heat conductive materials. Accordingly, induction heating can be used to heat the porous sleeve.

In one embodiment, the radio frequency power has a frequency of one of between 500 Hz and 500 KHz, between 20 KHz and 50 KHz, and approximately 30 KHz.

In one embodiment, the radio frequency conductor is positioned close to the conductive material. Therefore, the conductor can be positioned adjacent to the conductive material to facilitate induction heating.

In one embodiment, the porous sleeve is cylindrical and the radio frequency conductor is coiled around the porous sleeve. Accordingly, the conductor can be wrapped around the porous sleeve.

In one embodiment, the radio frequency conductor is hollow to receive a cooling fluid to cool the radio frequency conductor. The use of a hollow conductor enables the cooling fluid to be received in the conductor in order to control its temperature and thus reduce losses, which improves the efficiency of induction heating.

In one embodiment, the cooling fluid has a conductivity not greater than 100 μS.

In one embodiment, the burner includes a humidifier operable to provide humidified air as one of the processing materials, and wherein a cooling fluid circulates through the humidifier to heat the water provided to the humidifier. Accordingly, the heat extracted by the cooling fluid can be reused to heat the water supplied to the humidifier in order to reduce the energy consumption of the humidifier.

In one embodiment, the water provided to the humidifier includes at least some cooling fluid. Reusing the cooling fluid as water further improves the heating efficiency and reduces the power consumption of the humidifier.

In one embodiment, the temperature of the cooling fluid is maintained higher than the surrounding temperature. Maintaining the temperature of the cooling fluid above the surrounding temperature helps minimize the possibility of condensation in the plenum.

In one embodiment, the power supply uses electrical conductors to provide electrical energy to heat the ceramic material. Accordingly, resistance heating can be used to heat the porous sleeve.

In one embodiment, the microwave generator uses a waveguide to provide microwave energy to heat the dielectric material. Accordingly, microwave energy can be used to heat the porous sleeve.

In one embodiment, the dielectric material includes silicon carbide.

In one embodiment, the microwave energy has a frequency of one of 915 MHz and 2.45 GHz. Although operating in the approximately 2.45 GHz range is less energy efficient than operating in the 915 MHz range, it provides a smaller configuration.

In one embodiment, the burner includes a porous thermal insulation The edge body provides a porous thermal insulator in the plenum between the porous sleeve and the electrical device. Placing a thermal insulator around the porous sleeve helps to insulate the porous sleeve, which reduces the surrounding temperature in the inflatable chamber, helps protect the coupling and increases the temperature in the processing chamber.

In one embodiment, the burner includes a thermal insulator surrounding the plenum. Providing a thermal insulator surrounding the plenum also helps to minimize condensation.

In one embodiment, the plenum is defined by a non-ferromagnetic material. Providing a structure made of a non-ferromagnetic material that defines the plenum helps to reduce the inductive coupling away from the porous sleeve material and into the material providing the plenum, thereby improving the heating efficiency of the porous sleeve.

According to a second aspect, there is provided a method of treating an exhaust gas stream from a manufacturing process tool, the method comprising: passing material through a porous sleeve for introduction into a processing chamber, the porous sleeve at least partially Ground defines the processing chamber; and heats the porous sleeve by using electrical energy from an electrical device coupled with the porous sleeve to heat the processing material as the processing material passes through the porous sleeve into the processing chamber.

In one embodiment, the porous sleeve has at least one of a porosity between 80% and 90% and a pore size between 200 μm and 800 μm.

In one embodiment, the porous sleeve includes an annular sleeve defining a cylindrical processing chamber therein.

In one embodiment, the porous sleeve includes at least one of a conductive material, a ceramic material, and a dielectric material.

In one embodiment, the porous sleeve includes a sintered metal.

In one embodiment, the sintered metal includes at least one of fiber, powder, and particles.

In one embodiment, the porous sleeve includes a woven metallic fabric.

In one embodiment, the power device includes at least one of a radio frequency power supply, a power supply, and a microwave generator.

In one embodiment, the method includes using at least one of a radio frequency conductor, an electrical conductor, and a waveguide to couple the electrical energy device and the porous sleeve.

In one embodiment, the method includes positioning at least one of a radio frequency conductor, an electrical conductor, and a waveguide in one of the plenums where the processing material passes, the plenum surrounding the porous sleeve.

In one embodiment, at least one of the radio frequency conductor, electrical conductor, and waveguide extends across the porous sleeve to heat the area across it.

In one embodiment, heating includes using a radio frequency conductor to provide radio frequency power from a radio frequency power supply to inductively heat the conductive material.

In one embodiment, the radio frequency power has a frequency of one of between 500 Hz and 500 KHz, between 20 KHz and 50 KHz, and approximately 30 KHz.

In one embodiment, the method includes positioning the radio frequency conductor proximate the conductive material.

In one embodiment, the porous sleeve is cylindrical and the radio frequency conductor is coiled around the porous sleeve.

In one embodiment, the radio frequency conductive system is hollow and the method includes receiving a cooling fluid in the radio frequency conductor to cool the radio frequency conductor.

In one embodiment, the cooling fluid has a conductivity not greater than 100 μS.

In one embodiment, the method includes providing humidified air as the treatment material from a humidifier and circulating a cooling fluid through the humidifier to heat the water provided to the humidifier.

In one embodiment, the method includes providing at least some cooling fluid, such as water, to the humidifier.

In one embodiment, the method includes maintaining the temperature of the cooling fluid above the ambient temperature.

In one embodiment, heating includes using an electrical conductor to provide electrical energy from a power supply to heat the ceramic material.

In one embodiment, heating includes using a waveguide to provide microwave energy from a microwave generator to heat the dielectric material.

In one embodiment, the dielectric material includes silicon carbide.

In one embodiment, the microwave energy has a frequency of one of 915 MHz and 2.45 GHz.

In one embodiment, the method includes passing the treatment material through a porous thermal insulator, and providing the porous thermal insulator in a plenum between the porous sleeve and the electrical device.

In one embodiment, the method includes surrounding the plenum with a thermal insulator.

In one embodiment, the method includes using a non-ferromagnetic material to define the plenum.

Specific and better aspects are further stated in the attached independent claims and subsidiary claims. The features of the subsidiary claim can be appropriately combined with the features of the independent claim, except for the combination of the combination explicitly stated in the claim.

When a device feature is described as being operable to provide a function, it should be understood that this includes a device feature that provides the function or is adapted or configured to provide the function.

8‧‧‧Radiant burner assembly

10‧‧‧Entrance

12‧‧‧Nozzle

14‧‧‧Processing room

15‧‧‧Exhaust port

16‧‧‧hole

18‧‧‧Top plate

20‧‧‧Sleeve with small holes/porous casing

21‧‧‧Exit surface

22‧‧‧Inflation volume/inflation chamber

23‧‧‧Entrance surface

24‧‧‧Shell

30‧‧‧Inlet nozzle

40‧‧‧Insulating sleeve

43‧‧‧Entrance surface

50‧‧‧Working coil

60‧‧‧External insulation sleeve

80‧‧‧Radiant burner assembly

118‧‧‧Top plate

200‧‧‧Seal

220‧‧‧Upper part of casing 20

The embodiments of the present invention will now be further described with reference to the accompanying drawings, in which: Fig. 1 is a cross-sectional view of a radiant burner assembly according to an embodiment; Fig. 2 is an inlet assembly removed A detailed cross-sectional perspective view of a feature of a radiant burner; and FIG. 3 is a cross-sectional view through a radiant burner according to another embodiment.

Before discussing the embodiments in more detail, an overview is provided first. The embodiment provides an electric-powered radiant burner which enables an exhaust gas stream from a manufacturing process tool to be processed when it is undesirable or impossible to provide a fuel gas to raise the temperature of the processing chamber. Unlike traditional radiant heaters that cannot obtain the required power density, it provides electrical energy to heat the processing material by heating the porous sleeve when the processing material passes through the porous sleeve and enters the processing chamber. The heating of the porous sleeve increases significantly Power density and processing room Achieve temperature.

Figure 1 is a cross-section through a radiant burner assembly (indicated by 8 as a whole) according to an embodiment. Figure 2 shows in more detail the features of the radiant burner with an inlet assembly removed. In this embodiment, induction heating is used to supply electrical energy, but it should be understood that other heating mechanisms such as microwave heating or resistance heating are possible. Figure 3 is a cross-section through a radiant burner assembly (indicated at 80 as a whole) according to another embodiment with an inlet assembly in place. In this embodiment, induction heating is used to supply electrical energy again, but alternative heating mechanisms (such as microwave heating or resistance heating) are possible.

The radiant burner assemblies 8 and 80 process an exhaust gas stream that is usually pumped from a manufacturing process tool (such as a semiconductor or flat panel display process tool) by a vacuum pumping system. The exhaust gas flow is received at the inlet 10. The exhaust gas flow is delivered from the inlet 10 to a nozzle 12, and the nozzle 12 injects the exhaust gas flow into a cylindrical processing chamber 14. In this embodiment, the radiant burner assembly 8, 80 includes four circumferentially arranged inlets 10, each of the four inlets conveying an exhaust gas stream pumped by a respective vacuum pumping system from a respective tool . Alternatively, the exhaust stream from a single process tool may be separated into a plurality of streams, each of which is delivered to a respective inlet. Each nozzle 12 is positioned in a respective hole 16 formed in a ceramic top plate 18, 118 that defines an upper surface or inlet surface of the processing chamber 14.

The processing chamber 14 has a side wall bounded by an outlet surface 21 of a sleeve 20 with small holes in the form of a cylindrical tube. The sleeve 20 with small holes is made of a material suitable for the selected heating mode. In this embodiment, the sleeve 20 that uses induction heating and therefore has small holes includes a porous metal, for example, such as Fecralloy® (20% to 22% chromium; 5% aluminum; 0.3% silicon; 0.2% To 0.8% manganese; 0.1% iridium; 0.1% zirconium; 0.02% to 0.03% carbon; and remaining iron); stainless steel grade 314 (maximum 0.25% carbon; maximum 2% manganese; 1.5% to 3% silicon; maximum 0.045% phosphorus; maximum 0.03% sulfur; 23.0% to 26.0% chromium; 19.0% to 22.0% nickel; and remaining iron); or Inconel 600® (minimum 72.0% Ni; 15.5% Cr; 8.0% Fe; 1.0% Mn; 0.15% C; 0.5% Cu; 0.5% Si; 0.015% S) is a sintered metal fiber of a heat-resistant alloy.

The small hole sleeve 20 is cylindrical and coaxially fixed in an insulating sleeve 40. The insulating sleeve 40 is a porous ceramic tube, for example, an alumina tube is formed by sintering an alumina glaze that has been used to coat a reticulated polyurethane foam. Alternatively, the insulating sleeve 40 may be a wound layer of ceramic fiber. The insulating sleeve 40 helps to increase the temperature in the processing chamber 14 by reducing heat loss and also helps to reduce the temperature in the plenum 22, which in turn reduces the temperature of the components used for induction heating to improve their efficiency .

The porous ceramic tube and the small-pore sleeve 20 are generally porous with 80% to 90% of a pore size between 200 μm and 800 μm.

An inflatable volume 22 is defined between an inlet surface 43 of the insulating sleeve 40 and the cylindrical housing 24. The use of non-ferromagnetic materials advantageously encloses the inflation volume 22 in order to reduce inductive coupling. In addition, the cylindrical casing 24 is coaxially enclosed within an outer insulating sleeve 60 to reduce the external surface temperature to a safe level. Due to, for example, stray heating, the temperature of the cylindrical casing 24 should be raised to this safe level .

A gas is introduced into the charging volume 22 via an inlet nozzle 30. The gas can be air, or a blend of air and other types of gases such as water vapor and CO ₂ . In this example, the humidified air is introduced and the humidified air passes from the inlet surface 23 of the insulating sleeve 40 to the outlet surface 21 of the sleeve 20 with small holes.

In this embodiment, an induction heating mechanism is used and therefore the inflatable volume 22 also contains one of the radio frequency (RF) power supplies (not shown) connected to the sleeve 20 with small holes for heating by RF induction Working coil 50. The working coil 50 is usually cooled by the circulation of a cooling fluid such as water with a low conductivity (eg, <100 μS) to cool a spiral copper hollow tube. If the supplied air is rich in water vapor, it is beneficial to operate the cooling flow system at an elevated temperature in order to avoid condensation on the working coil 50. This is conveniently achieved by using a closed loop circuit. As mentioned above, the insulating sleeve 40 acts as a thermal insulator to protect the working coil 50.

The electric energy supplied to the small-hole sleeve 20 heats the small-hole sleeve 20. This in turn heats the humidified air as the humidified air passes from one of the inlet surface 23 of the orifice sleeve 20 to the outlet surface 21 of the orifice sleeve 20. In addition, the heat generated by the sleeve 20 with small holes increases the temperature in the processing chamber 14. The amount of electrical energy supplied to the orifice sleeve 20 is changed to change the nominal temperature in the processing chamber 14 to be suitable for the exhaust gas flow to be processed. For example, a small hole sleeve 20 (having an exemplary diameter of 150 mm and an exemplary length of 300 mm) is heated to between 800°C and 1200°C and the humidified air is similarly heated to this temperature. This is achieved by generally supplying electrical energy at a level between approximately 10 kW and 20 kW applied to the perforated bushing 20 having the above exemplary dimensions. This provides π x 0.15 x 0.3=0.14 m ² of a small perforated sleeve 20 surface area and an equivalent power density between approximately 70 kWm ^-2 and 140 kWm ^-2 . The applied power is related to the flow rate of air passing through the sleeve 20 with small holes. In this example, the air flow will be on the order of between about 300 l/min and 600 l/min. Those familiar with this technology will recognize that other conditions of power, air flow, and temperature are possible. Generally, the radio frequency power has a frequency between 500 Hz and 500 KHz, preferably between 20 KHz and 50 KHz, and more preferably about 30 KHz. The waste gas stream containing harmful substances to be treated is mixed with the hot gas in the treatment chamber 14 in a known manner. The exhaust port 15 of the processing chamber 14 is opened so that the combustion products can be output from the radiant combustor assembly 8 and can be received by a nozzle (not shown) according to a known technology.

Another embodiment shown in FIG. 3 has an elongated top plate 118 extending to a volume defined by a non-porous, non-ferromagnetic upper wall portion 220 of the sleeve 20. In this embodiment, the working coil 50 and the porous part of the sleeve 20 are positioned at the distal end of the sealing ring 200. By positioning the working coil at a suitable distance from the sealing surface including the sealing ring 200, the working coil is protected from the heat generated by the working coil in the porous sleeve 20 from being transferred to the working coil and weakening the working coil. The gas inlet 30 is positioned close to the surface including the sealing ring 200 to the portion of the plenum 22 defined by the upper part 220 of the sleeve 20, and due to the gas passage across the surface of the housing 24, the housing 24 is also sealed The loop 200 provides an additional degree of protection.

From this, it can be seen that the exhaust gas received through the inlet 10 and supplied to the processing chamber 14 by the nozzle 12 is processed in the processing chamber 14 heated by the sleeve 20 with small holes. Depending on whether oxygen enrichment occurs and the humidity of the air, the humidified air will be such as oxygen (usually having a nominal range of 7.5% to 10.5%), and water (usually having 10% to 14%, and preferably 12% of the nominal range) is supplied to the processing chamber 14. The waste gas flow and/or products in the thermal decomposition treatment chamber 14 react with the waste gas flow in the treatment chamber 14 to remove the waste gas flow. For example, SiH ₄ and NH ₃ can be provided in the exhaust gas stream, which react with O _{2 in the} processing chamber 14 to produce SiO ₂ , N ₂ , H ₂ O, and NO _x . Similarly, N ₂ , CH ₄ , C ₂ F ₆ can be provided in the exhaust gas stream, which react with O _{2 in the} processing chamber 14 to produce CO ₂ , HF, and H ₂ O. Similarly, F ₂ can be provided in the exhaust gas stream, which reacts with H ₂ O in the processing chamber 14 to produce HF, H ₂ O.

Accordingly, the embodiment provides a method and device to use an RF induction heating porous-walled combustion chamber to combust and remove waste gas from semiconductor processes.

Direct heating with high power is possible by induction heating. Providing the base as a porous metal tube allows the possibility of imitating a radiant burner combustion system by allowing gas to pass through and be heated to a high temperature. This uses an electric system to develop a way to give the efficiency of a burner.

The embodiment can be changed to reflect various nozzles and injection strategies used in existing burners. The radiant burner element can be unsintered ceramic fiber, or advantageously, sintered metallic fiber.

In one embodiment, microwave heating or resistance heating is used to heat the sleeve 20 with small holes. In the case of microwave heating, a microwave generator is provided that is coupled to a waveguide positioned in an inflated volume 22 that delivers microwave energy to a perforated sleeve 20 formed of a dielectric material. In the case of resistance heating, a power supply is provided that is coupled to a conductor located in a gas-filled volume 22 that delivers electrical energy to a perforated sleeve 20 formed of a ceramic material.

Although reference has been made to the accompanying drawings, the illustrative implementation of the present invention is disclosed in detail in the text However, it should be understood that the present invention is not limited to precise embodiments and those skilled in the art can be used in the embodiments without departing from the scope of the present invention as defined by the scope of additional patent applications and their equivalents. Achieve various changes and modifications.

15‧‧‧Exhaust port

20‧‧‧Sleeve with small holes/porous casing

21‧‧‧Exit surface

22‧‧‧Inflation volume/inflation chamber

30‧‧‧Inlet nozzle

43‧‧‧Entrance surface

50‧‧‧Working coil

60‧‧‧External insulation sleeve

Claims (12)

A radiant burner for treating an exhaust gas stream from a manufacturing process tool, comprising: a porous sleeve at least partially defining a processing chamber and processing material passing through the porous sleeve for introduction into In the processing chamber; an electric power device coupled with the porous sleeve and operable to provide electrical energy to heat the porous sleeve, the porous sleeve enters the processing chamber when the processing materials pass through the porous sleeve The processing materials are heated while heating; wherein the electrical energy device includes a coupling element coupled with the porous sleeve, the coupling element includes at least one of a radio frequency conductor, a conductor and a waveguide; wherein the radio frequency conductive system is hollow To receive a cooling fluid to cool the radio frequency conductor; and operable to provide humidified air as a humidifier of the processing materials, and wherein the cooling fluid circulates through the humidifier to provide heating to the humidifier Water from the humidifier. The radiant burner of claim 1, wherein the porous sleeve includes at least one of a conductive material, a ceramic material, and a dielectric material. The radiation burner of claim 1, wherein the porous sleeve includes one of a sintered metal and a woven metallic fabric. Such as the radiant burner of claim 1, wherein the electrical energy device includes at least one of a radio frequency power supply, a power supply, and a microwave generator. The radiation burner of claim 1, wherein the at least one of the radio frequency conductor, the electrical conductor and the waveguide is positioned in one of the plenums where the processing materials pass through, and the plenum surrounds the porous sleeve. Such as the radiant burner of claim 1, wherein the radio frequency conductor, the conductor and the wave The at least one of the conduits extends throughout the porous sleeve to heat the area across it. Such as the radiation burner of claim 4, wherein the radio frequency power supply uses the radio frequency conductor to provide radio frequency electric energy to inductively heat the conductive material. Such as the radiation burner of claim 7, wherein the radio frequency electric energy has a frequency of one of between 500 Hz and 500 KHz, between 20 KHz and 50 KHz, and about 30 KHz. Such as the radiation burner of claim 1, wherein the porous sleeve is cylindrical and the radio frequency conductor is coiled around the porous sleeve. The radiant burner of claim 1, wherein the water provided to the humidifier includes at least some of the cooling fluid. The radiant burner of claim 1, which includes the processing material passing through one of the porous thermal insulators, and the porous thermal insulator is provided in a plenum between the porous sleeve and the electrical energy device. A method of processing an exhaust gas stream from a manufacturing process tool, comprising: passing processing material through a porous sleeve for introduction into a processing chamber, the porous sleeve at least partially defining the processing chamber; and Heating the porous sleeve by using electrical energy from an electrical device coupled with the porous sleeve, and heating the processing materials when the processing materials pass through the porous sleeve and into the processing chamber; wherein the The electrical power device includes a coupling element coupled to the porous sleeve, the coupling element including at least one of a radio frequency conductor, a conductor, and a wave guide; wherein the radio frequency guide system is hollow to receive a cooling fluid to cool the radio frequency Conductor; and the treatment materials are humidified air provided by a humidifier, and wherein the cooling fluid circulates through the humidifier to heat the water provided to the humidifier.

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