CN104865410A - Conductor surface potential measuring instrument based on static controlled twist pendulum - Google Patents
Conductor surface potential measuring instrument based on static controlled twist pendulum Download PDFInfo
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Abstract
The invention provides a conductor surface potential measuring instrument based on static controlled twist pendulum, which comprises the components of a suspension wire, a probe bracket, a scanning probe, a multi-freedom micro-displacement translation platform, an angle sensor, a control system and a feedback executor. The scanning probe is arranged on a random end surface of the probe bracket. The suspension wire and the probe bracket form a twist pendulum. In operation, a to-be-measured sample is arranged on the multi-freedom micro-displacement translation platform. The to-be-measured surface of the to-be-measured sample right opposes and is parallel with the end surface of the scanning probe. The end surface of the scanning probe does not contact with the to-be-measured surface. When an interaction exists between the scanning probe and the to-be-measured sample, the angle sensor transmits the detected torsion information of the twist pendulum to the control system; after a PID calculation is performed, an acquired feedback control voltage is transmitted to the feedback executor; a feedback control torque which is equivalent with an outer torque is generated and applied to the probe bracket, so that the probe bracket is kept stationary relatively; The micro-displacement translation platform is driven for making the to-be-measured sample move relative to the scanning probe, thereby realizing scanning and measurement for different areas on the sample surface.
Description
Technical field
The invention belongs to field of precision measurement, more specifically, relate to a kind of conductive surface potential measurement instrument rocked based on Electrostatic Control.
Background technology
Along with the reach of science and progress, more and more higher to the requirement of experimental precision in the various low force experiments of measuring in ground and space, therefore higher requirement be it is also proposed to the pattern on quality inspection surface and the Potential Distributing etc. on its surface.In order to process the quality inspection meeting requirement of experiment, first need the instrument of very high degree of precision to measure the Potential Distributing on quality inspection surface, the feature such as electromagnetic parameter and surface topography.Then corresponding feature difference is controlled in process and later stage process of surface treatment according to the measurement result of the various feature in quality inspection surface.
As far back as the eighties in 20th century, based on the invention of the Kevin probe measurement instrument of atomic force microscope platform, achieve the measurement to the pattern of sample surfaces and surface potential distribution under small scale.The principle of work of the two is also quite similar, is all to utilize minute sized probe under in-plant condition by studying the surface appearance feature of conductor or the Potential Distributing of conductive surface with the interaction of sample room.This kind of microscope probe test platform has high spatial resolution in the measurement to sample surfaces feature, and uses this kind of microscope probe not need described testing sample to be changed, also without the need to destroying sample.
The method is the one end (as shown in Figure 1) probe being arranged on elasticity micro-cantilever, measures its surface characteristics by probe in sample surfaces scanning.In Kelvin probe measurement process, by the voltage of the change of load-modulate on the probe of semi-girder one end, and extract the fundamental component of probe and sample room electrostatic force.By changing the bucking voltage be loaded on probe, it is zero that the fundamental component of electrostatic force is exported, and then obtains the size of conductor diverse location surface potential.
At present, atomic force microscope and Kelvin probe technique are successfully applied to every field, but improving constantly along with experimental precision in precision measurement experiment, and the continuous progress of science mode.The weak point of this kind of measuring instrument also manifests gradually.Such as, atomic force microscope and the size of Kelvin probe to sample have larger restriction, are usually difficult to directly measure quality inspection actual in experiment.And the structure of this kind of surveying instrument also more complicated, build cost higher, and the thermonoise of semi-girder also limit the measuring accuracy of this quasi-instrument, the precision of current Kelvin probe measurement surface potential is only at 1mV/Hz
1/2.
Torsion balance, due to its highly sensitive characteristic, is widely used in all kinds of low force and measures, and is one of measurement means commonly used in field of precision measurement.In latter stage in 18th century, English physicist all one's life has invented torsion balance, and apply torsion balance first time in laboratory measurement Newton constant G.Nowadays, torsion balance is applied to during gravity experiment and other low force detect more and more, such as closely Non-newtonian Gravity experimental check, and equivalence principle test, high-precision sensor ground resolution is checked, and the various remnants of sensor are around Dynamic testing etc.
Traditional torsion balance system is hung by quality inspection suspension, and with the disturbing force (or moment) carrying out response external, then utilize high-precision sensor to detect the yaw motion rocking quality inspection.Size and the change thereof of input torque is recorded by measuring its windup-degree or cycle.Traditional torsion balance system can only be measured the average potential of conductive surface and cannot measure the Potential Distributing of conductive surface.
Summary of the invention
For the defect of prior art, the object of the present invention is to provide a kind of conductive surface potential measurement instrument rocked based on Electrostatic Control, be intended to solve conductive surface potential measurement resolution problem on the low side.
The invention provides a kind of conductive surface potential measurement instrument rocked based on Electrostatic Control, comprise suspension, probe support, scan-probe, multiple degrees of freedom micrometric displacement translational platform, angular transducer, control system and feedback execution machine; Described probe support is I-shaped structure, has four end faces, and described scan-probe is arranged on any one end face of described probe support; Described suspension hangs described probe support formation and rocks; During work, testing sample is arranged in described multiple degrees of freedom micrometric displacement translational platform, the surface to be measured of testing sample just to and be parallel to the end face of described scan-probe; The end face of described scan-probe does not contact with described surface to be measured; Exist when interacting between described scan-probe and described testing sample, the torsion information of rocking described in detecting is passed to described control system by described angular transducer; The feedback control voltage that described control system obtains after described torsion information is carried out PID arithmetic passes to described feedback execution machine, described feedback execution machine produces a FEEDBACK CONTROL moment large with moment of face etc. according to described feedback control voltage and is applied to described probe support, makes described probe support keep geo-stationary; By driving described micrometric displacement translational platform to make described testing sample move relative to described scan-probe, thus realize the scanning survey to sample surfaces zones of different.
Wherein, the distance between the end face of described scan-probe and described surface to be measured is that tens microns are to several millimeter; Can ensure that the resolution of whole surveying instrument is higher.
Wherein, angular transducer can be optical sensor or capacitive transducer.
Wherein, described feedback execution machine can be electrostatic actuation machine or magnetic feedback execution machine.
Wherein, the potential value V of sample surfaces position to be measured
tMwith feedback control voltage V
fmeet following relation:
wherein H
afor the sensitivity coefficient of electrostatic actuation machine in closed-loop control system, C
pfor the electric capacity between probe and sample, d
pfor the spacing of probe end face and sample surfaces, l
pfor probe core is to the distance of suspension, V
sfor loading electromotive force on probe.
The sensitivity of semi-girder is limited to, so electromotive force resolution is on the low side in Kelvin probe system.Therefore in the present invention we select sensitivity higher torsion balance system to respond electrostatic force to be measured, thus improve the detection resolution of system.Advantage of the present invention is mainly reflected in: (1) utilize rock system to respond low force change, than traditional probe means there is higher sensitivity, higher detection level.(2) feedback-controlled torsion pendulum technology and micrometric displacement translation system are combined, the scanning survey of sample surfaces multidimensional can be realized.(3) this device can provide a pervasive platform to measure and study different samples, and does not need to modify to apparatus structure and recombinate when changing testing sample.
Accompanying drawing explanation
Fig. 1 is the Kelvin probe system fundamental diagram based on atomic force microscope that prior art provides;
Fig. 2 is that the electrostatic feedback that the embodiment of the present invention provides controls the microscopical principle schematic of torsion pendulum weak force scanning.
In figure, 1 is suspension, 2 is probe support, 3 is scan-probe, 4 is testing sample, 5 is multiple degrees of freedom micrometric displacement translational platform, 6 is angular transducer (can be optical sensor or capacitive transducer), and 7 is control system, and 8 is feedback execution machine (electrostatic actuation machine or magnetic feedback execution machine).
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
The torsion pendulum weak force scanning sniffer (as shown in Figure 2) that electrostatic feedback provided by the invention controls.The difference of this device and traditional torsion balance device is, we will be no longer quality inspections to be measured with torsion wire suspension, but with torsion balance system hangs probe unit, and the yaw motion of detector probe device is carried out by high accuracy displacement sensor, then by corresponding control algolithm and FEEDBACK CONTROL execution machine, by laboratory quality controls in its equilibrium position, utilize FEEDBACK CONTROL moment to weigh the moment of face size suffered by probe unit.In whole apparatus system, sample is placed on multivariant micrometric displacement translating device, drive this device that described testing sample can be made to move relative to probe, thus obtain interactional change between the diverse location and probe unit of sample surfaces, finally provide relevant parameter to be measured and distribution situation.
High precision system of rocking is utilized to detect to replace micro-cantilever to be used as low force in the present invention, there is higher sensitivity and lower mechanical thermal noise, effectively can improve precision to sample surfaces parameter measurement to be measured and spatial resolution in conjunction with micrometric displacement translation system.Because sample is installed on separately on micro-displacement platform, make to change sample easily in an experiment, different initial conditions is arranged to sample and measures.This has great significance for the various surface effect measuring sample and the Physical Mechanism of studying various effect.
The present invention can be applied to high-precision low force measuring study, and for the distribution of study sample surface charge, electromagnetic parameter, surface topography, mechanical parameter etc. have important application prospect.
The object of the present invention is to provide a kind of conductive surface potential measurement instrument rocked based on Electrostatic Control, this instrument can be used for measuring the faint interaction between sample and probe, can realize carrying out scanning survey to the sample surfaces of macro-scale.This device can be used for CHARGE DISTRIBUTION, the character of surface such as electromagnetic parameter and shape characteristic on study sample surface.
Based on the conductive surface potential measurement instrument that Electrostatic Control is rocked, as shown in Figure 2, probe support is the structure of one " work " font; Suspension 1 hangs and should rock the Structure composing of " work " font, and in order to make the electrostatic interaction effect of rocking between testing sample maximum, scan-probe 3 is installed on the end face (any one end of the end face of four ends) that " work " font is rocked by us.Testing sample 4 is arranged in multiple degrees of freedom micrometric displacement translational platform 5, allow the surface to be measured of sample just to being parallel to probe end face, in order to ensure the resolution of whole surveying instrument, sample surface to be measured and the spacing of probe end face are generally tens microns to several millimeter (actual pitch should be optimized selected according to different scientific goal); 6 is angular transducer, in order to measure the motion of rocking on torsional freedom direction, the angular displacement information rocked is converted into voltage signal, feedback control voltage is obtained by PID arithmetic link 7, and be loaded into and capacitor plate 8 make it produce the classical feedback moment equal with input torque, make to rock and be controlled in its equilibrium position.Exist when interacting between scan-probe 3 and testing sample 4, the torsion information of rocking detected can be passed to control system 7 by angular transducer 6.Control system 7 obtains feedback control voltage and passes to feeding back execution machine 8 according to angle information according to pid control algorithm, to produce a FEEDBACK CONTROL moment large with moment of face etc. and to be applied to probe support 2, object is to make probe support 2 keep geo-stationary.Drive micrometric displacement translational platform 5 that described testing sample can be made to move relative to probe thus realize the scanning survey to sample surfaces zones of different.In concrete research, we can change the sample be placed in multiple degrees of freedom micrometric displacement translational platform 5 easily, carry out measuring and studying for different initial conditions.
The surface potential of testing sample 4 is made to be V
tM, probe loads electromotive force V
s, the electrostatic moment now produced due to electrostatic interaction between probe and testing sample 4
c in formula
pfor the electric capacity between probe and sample, d
pfor the spacing of probe end face and sample surfaces, l
pfor probe core is to the distance (arm of force of electrostatic moment) of suspension.In measuring process, torsional pendulum device is at feedback static electric moment τ
feffect under be in relative static conditions, can obtain according to equalising torque relation
V in above formula
ffor feedback control voltage (by data acquisition system (DAS) record), H
afor the sensitivity coefficient (carrying out demarcation by experiment to obtain) of electrostatic actuation machine in closed-loop control system.Known according to formula (2), when the geometric relationship of the accurate dimension of known probe and probe and sample, the potential value of sample surfaces position to be measured just can be obtained by the feedback control voltage of record.Then by driving the relative position (along dotted arrow direction in Fig. 2) between mobile micrometric displacement translational platform change probe and testing sample, just can record the surface potential value at sample surfaces diverse location place, thus learn the Potential Distributing situation of sample surfaces.
Conductive surface potential measurement instrument provided by the invention is compared to atomic force microscope, have and present invention employs the high-sensitive system that is twisted into there is higher potential measurement resolution, present invention incorporates micrometric displacement translation system and there is larger scanning survey scope, more high-precision weak force scanning measurement demand can be met.For the torsion balance system of FEEDBACK CONTROL, its moment detection level can reach 10
-14nm/Hz
1/2.If be that this device of 10cm can reach 2 × 10 to the detection level of power by the Design of length of the arm beam of steelyard
-13nm/Hz
1/2, higher than the accuracy of detection of the Kelvin probe designs based on atomic force microscope platform 1 order of magnitude.
In system building process, we can design the probe of different size to change the measurement area of probe to meet different scientific goal.For the surface characteristics of the practice examining quality of scanning research large scale, can also add in the position relative to suspension symmetry in an experiment and the object gravitation come between compensated scanning measuring process middle probe and sample of the quality such as sample to change testing sample in due to this device be placed in the micrometric displacement translational platform on probe system side, therefore, we can change sample easily, set different initial conditions carrys out study sample surface characteristics deep physical mechanism by series of experiments.
Advantage of the present invention is mainly reflected in: (1) utilize rock system to respond low force change, than traditional probe means there is higher sensitivity, higher detection level.(2) feedback-controlled torsion pendulum technology and micrometric displacement translation system are combined, the scanning survey of sample surfaces multidimensional can be realized.(3) this device can provide a pervasive platform to measure and study different samples, and does not need to modify to apparatus structure and recombinate when changing testing sample.The spatial resolution of this device scanning survey is estimated to reach nm magnitude, and low force measuring accuracy reaches 10
-13nm/Hz
1/2, the weak force scanning achieving high precision and high spatial resolution is measured.
Based on the conductive surface potential measurement instrument that Electrostatic Control is rocked, as shown in Figure 2, suspension 1 hangs probe support 2 formation and rocks, and scan-probe 3 is installed on the one end of rocking.Testing sample 4 is arranged in multiple degrees of freedom micrometric displacement translational platform 5, is positioned over by probe.6 is angular transducer, and exist when interacting between scan-probe 3 and testing sample 4, the torsion information of rocking detected can be passed to control system 7 by angular transducer.Control system 7 obtains corresponding result and passes to feeding back execution machine 8 according to angle information according to corresponding control algolithm, to produce a FEEDBACK CONTROL moment large with moment of face etc. and to be applied to probe support 2, object is to make probe support 2 keep geo-stationary.Drive micrometric displacement translational platform 5 that described testing sample can be made to move relative to probe thus realize the scanning survey to sample surfaces zones of different.In concrete research, we can change the sample be placed in multiple degrees of freedom micrometric displacement translational platform 5 easily, carry out measuring and studying for different initial conditions.
The probe that end face is 5mm × 5mm if choose, and the spacing setting between probe and testing sample is 50 μm, arm beam of steelyard length gets 10cm, and choosing measuring accuracy is 6 × 10
-6pF/Hz
1/2capacitive displacement sensing circuit, choosing angle-measurement accuracy is 10
-8the surveying instrument of rad, the measuring accuracy of conductive surface electromotive force can reach 10 μ V/Hz
1/2.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. the conductive surface potential measurement instrument rocked based on Electrostatic Control, it is characterized in that, comprise suspension (1), probe support (2), scan-probe (3), multiple degrees of freedom micrometric displacement translational platform (5), angular transducer (6), control system (7) and feedback execution machine (8);
Described probe support (2) is I-shaped structure, has four end faces, and described scan-probe (3) is arranged on any one end face of described probe support (2); Described suspension (1) hangs described probe support (2) formation and rocks;
During work, testing sample (4) is arranged on described multiple degrees of freedom micrometric displacement translational platform (5), the surface to be measured of testing sample (4) just to and be parallel to the end face of described scan-probe (3); The end face of described scan-probe does not contact with described surface to be measured;
Exist when interacting between described scan-probe (3) and described testing sample (4), the torsion information of rocking described in detecting is passed to described control system (7) by described angular transducer (6); The feedback control voltage that described control system (7) obtains after described torsion information is carried out PID arithmetic passes to described feedback execution machine (8), described feedback execution machine (8) produces a FEEDBACK CONTROL moment large with moment of face etc. according to described feedback control voltage and is applied to described probe support (2), makes described probe support (2) keep geo-stationary; By driving described micrometric displacement translational platform (5) to make described testing sample (4) mobile relative to described scan-probe (3), thus realize the scanning survey to sample surfaces zones of different.
2. conductive surface potential measurement instrument as claimed in claim 1, it is characterized in that, the distance between the end face of described scan-probe and described surface to be measured is that tens microns are to several millimeter.
3. conductive surface potential measurement instrument as claimed in claim 1 or 2, it is characterized in that, described angular transducer (6) is optical sensor or capacitive transducer.
4. the conductive surface potential measurement instrument as described in any one of claim 1-3, is characterized in that, described feedback execution machine (8) is electrostatic actuation machine or magnetic feedback execution machine.
5. the conductive surface potential measurement instrument as described in any one of claim 1-4, is characterized in that, the potential value V of sample surfaces position to be measured
tMwith feedback control voltage V
fmeet following relation:
wherein H
afor the sensitivity coefficient of electrostatic actuation machine in closed-loop control system, C
pfor the electric capacity between probe and sample, d
pfor the spacing of probe end face and sample surfaces, l
pfor probe core is to the distance of suspension, V
sfor loading electromotive force on probe.
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Cited By (7)
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| CN106199759A (en) * | 2016-03-29 | 2016-12-07 | 中国地震局地震研究所 | Electrostatic feedback dipmeter assembling and setting platform and method thereof |
| CN113447180A (en) * | 2021-05-10 | 2021-09-28 | 中山大学 | Torsion pendulum testing device based on differential capacitor and torsion pendulum decoupling reading method |
| CN114322745A (en) * | 2021-12-31 | 2022-04-12 | 华中科技大学 | Method for simultaneously measuring surface potential and surface morphology of conductor |
| CN114397352A (en) * | 2021-12-31 | 2022-04-26 | 华中科技大学 | Potential measurement method insensitive to probe and sample spacing change |
| CN116908519A (en) * | 2023-07-17 | 2023-10-20 | 中国科学院长春光学精密机械与物理研究所 | Inertial sensor surface potential measuring device and measuring method thereof |
| CN117471195A (en) * | 2023-10-30 | 2024-01-30 | 中国科学院长春光学精密机械与物理研究所 | Method for resolving surface charge fluctuations of test quality |
| CN118275791A (en) * | 2024-06-04 | 2024-07-02 | 华中科技大学 | Conductor surface charge and charge distribution measuring device and method based on suspension microsphere |
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| CN106199759A (en) * | 2016-03-29 | 2016-12-07 | 中国地震局地震研究所 | Electrostatic feedback dipmeter assembling and setting platform and method thereof |
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| CN117471195A (en) * | 2023-10-30 | 2024-01-30 | 中国科学院长春光学精密机械与物理研究所 | Method for resolving surface charge fluctuations of test quality |
| CN118275791A (en) * | 2024-06-04 | 2024-07-02 | 华中科技大学 | Conductor surface charge and charge distribution measuring device and method based on suspension microsphere |
| CN118275791B (en) * | 2024-06-04 | 2024-08-27 | 华中科技大学 | Conductor surface charge and charge distribution measuring device and method based on suspension microsphere |
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