CN104865410B - Conductor surface potential measuring instrument based on static controlled twist pendulum - Google Patents
Conductor surface potential measuring instrument based on static controlled twist pendulum Download PDFInfo
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Abstract
The invention provides a conductor surface potential measuring instrument based on static controlled twist pendulum, which comprises the components of a suspension wire, a probe bracket, a scanning probe, a multi-freedom micro-displacement translation platform, an angle sensor, a control system and a feedback executor. The scanning probe is arranged on a random end surface of the probe bracket. The suspension wire and the probe bracket form a twist pendulum. In operation, a to-be-measured sample is arranged on the multi-freedom micro-displacement translation platform. The to-be-measured surface of the to-be-measured sample right opposes and is parallel with the end surface of the scanning probe. The end surface of the scanning probe does not contact with the to-be-measured surface. When an interaction exists between the scanning probe and the to-be-measured sample, the angle sensor transmits the detected torsion information of the twist pendulum to the control system; after a PID calculation is performed, an acquired feedback control voltage is transmitted to the feedback executor; a feedback control torque which is equivalent with an outer torque is generated and applied to the probe bracket, so that the probe bracket is kept stationary relatively; The micro-displacement translation platform is driven for making the to-be-measured sample move relative to the scanning probe, thereby realizing scanning and measurement for different areas on the sample surface.
Description
Technical field
The invention belongs to field of precision measurement, more particularly, to a kind of conductive surface electricity rocked based on Electrostatic Control
Gesture measuring instrument.
Background technology
With the reach of science and progress, the requirement in the various low force measurement experiment in ground and space to experimental precision
More and more higher, therefore the Potential Distributing on the pattern to quality inspection surface and its surface etc. it is also proposed higher requirement.For
Process the quality inspection for meeting requirement of experiment, it is necessary first to which the instrument of very high degree of precision is measuring the electricity on quality inspection surface
Gesture is distributed, the feature such as electromagnetic parameter and surface topography.Then added according to the measurement result of quality inspection surface various features
Corresponding feature difference is controlled in work process and later stage process of surface treatment.
Early in the eighties in 20th century, based on the invention of the Kevin probe measurement instruments of AFM platform, realize
The measurement of the pattern and surface potential distribution under little yardstick to sample surfaces.The operation principle of the two is also quite similar, all
Be using minute sized probe under the conditions of in-plant by studying the surface shape of conductor with the interaction of sample room
The Potential Distributing of looks feature or conductive surface.This kind of microscope probe test platform has in the measurement to sample surfaces feature
High spatial resolution, and using this kind of microscope probe the testing sample need not be made to change, without to sample
Product are destroyed.
The method is that probe is arranged on one end (as shown in Figure 1) of elastic micro-cantilever, by probe in sample surfaces
Scan to measure its surface characteristics.During Kelvin probe measurements, by the load-modulate on the probe of cantilever beam one end
The voltage of change, and extract the fundamental component of probe and sample room electrostatic force.By changing the compensation being loaded on probe
Voltage so that the fundamental component of electrostatic force is output as zero, and then obtains the size of conductor diverse location surface potential.
At present, AFM has been applied successfully to every field with Kelvin probe techniques, but with essence
The continuous improvement of experimental precision in close measurement experiment, and the continuous progress of science mode.The weak point of this kind of measuring instrument
Gradually manifest.For example, AFM and Kelvin probes have than larger restriction to the size of sample, it is generally difficult to directly
Quality inspection actual in experiment is measured.And the structure of this kind of measuring instrument is also more complicated, build it is relatively costly,
And the thermal noise of cantilever beam also limit the measuring accuracy of this quasi-instrument, the precision of current Kelvin probe measurements surface potential is only
In 1mV/Hz1/2。
Torsion balance is widely used in all kinds of low force measurements due to its highly sensitive characteristic, is commonly used in field of precision measurement
One of measurement means.In latter stage in 18th century, English physicist all one's life has invented torsion balance, and exists for the first time using torsion balance
Laboratory measurement Newton constant G.Nowadays, torsion balance is applied to more and more gravity experiment and other low force
In detection, such as closely Non-newtonian Gravity experimental check, equivalence principle test, the inspection of high-precision sensor ground resolution,
And the various remnants of sensor are around Dynamic testing etc..
Traditional torsion balance system is to hang quality inspection suspension, and with it come perturbed force (or the power of response external
Square), the yaw motion for rocking quality inspection is then detected using high-precision sensor.By measure its windup-degree or
Cycle measures the size of input torque and its change.Traditional torsion balance system can only measure the average potential of conductive surface and nothing
Method measures the Potential Distributing of conductive surface.
The content of the invention
For the defect of prior art, it is an object of the invention to provide a kind of conductive surface rocked based on Electrostatic Control
Potential measurement instrument, it is intended to solve the problems, such as that conductive surface potential measurement resolution ratio is low.
The invention provides a kind of conductive surface potential measurement instrument rocked based on Electrostatic Control, including suspension, probe
Frame, scans probe, multiple degrees of freedom micrometric displacement translational platform, angular transducer, control system and feedback execution machine；The probe support
For I-shaped structure, with four end faces, the scanning probe is arranged on any one end face of the probe support；It is described
Suspension hangs the probe support composition and rocks；During work, testing sample is arranged in the multiple degrees of freedom micrometric displacement translational platform,
The surface to be measured of testing sample is just pair and parallel to the end face of the scanning probe；The end face of the scanning probe is to be measured with described
Surface does not contact；When there is interaction between the scanning probe and the testing sample, the angular transducer will be examined
The torsion information rocked surveyed passes to the control system；The torsion information is carried out PID arithmetic by the control system
The feedback control voltage for obtaining afterwards passes to the feedback execution machine, and the feedback performs machine and produced according to the feedback control voltage
The one feedback control torque big with moment of face etc. is simultaneously applied to the probe support so that the probe support keeps relatively quiet
Only；The testing sample is made relative to the scanning probe movement, by driving the micrometric displacement translational platform so as to realize to sample
The scanning survey of product surface zones of different.
Wherein, the distance between end face and described surface to be measured of the scanning probe are tens microns to several millis
Rice；Can ensure that the resolution ratio of whole measuring instrument is higher.
Wherein, angular transducer can be optical pickocff or capacitance sensor.
Wherein, the feedback execution machine can be electrostatic actuation machine or magnetic feedback execution machine.
Wherein, the potential value V at sample surfaces position to be measuredTMWith feedback control voltage VfMeet following relation：Wherein HaFor the sensitivity coefficient of electrostatic actuation machine in closed-loop control system, CpFor probe with
Electric capacity between sample, dpFor probe end face and the spacing of sample surfaces, lpFor the distance of probe core to suspension, VsIt is to visit
Potential is loaded on pin.
The sensitivity of cantilever beam is limited in Kelvin probe systems, so potential resolution ratio is low.Therefore at this
We respond electrostatic force to be measured from the higher torsion balance system of sensitivity in bright, so as to improve the detection resolution of system.
Advantages of the present invention is mainly reflected in：(1) responded using the system of rocking low force change, than traditional probe means have more
High sensitivity, higher detection level.(2) feedback-controlled torsion pendulum technology and micrometric displacement translation system are combined, Ke Yishi
The scanning survey of existing sample surfaces multidimensional.(3) device can provide a pervasive platform to measure and study different samples
Product, and apparatus structure need not be modified and be recombinated when changing testing sample.
Description of the drawings
Fig. 1 is the Kelvin probe system fundamental diagrams based on AFM that prior art is provided；
Fig. 2 is the microscopical principle schematic of electrostatic feedback control torsion pendulum weak force scanning provided in an embodiment of the present invention.
1 is suspension in figure, and 2 is probe support, and 3 are scanning probe, and 4 is testing sample, and 5 are the translation of multiple degrees of freedom micrometric displacement
Platform, 6 is angular transducer (can be optical pickocff or capacitance sensor), and 7 is control system, and 8 is (quiet for feedback execution machine
Electric execution machine or magnetic feedback execution machine).
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, and
It is not used in the restriction present invention.
The torsion pendulum weak force scanning detection device (as shown in Figure 2) of the electrostatic feedback control that the present invention is provided.The device and biography
The difference of system torsion balance device is that we will no longer be quality inspection to be measured with torsion wire suspension, but use torsion balance system
Probe unit is hung, and by high accuracy displacement sensor come the yaw motion of detection probe device, then by corresponding control
Algorithm processed and feedback control perform machine, by laboratory quality controls in its equilbrium position, using feedback control torque probe are weighed
Moment of face size suffered by device.In whole device system, sample is placed on multivariant micrometric displacement translating device, is driven
The device can be such that the testing sample moves relative to probe, so as to obtain diverse location and probe unit in sample surfaces
Interphase interaction change, finally provide related parameter to be measured and distribution situation.
Rock system to replace micro-cantilever to be used as low force detection using high accuracy in the present invention, with higher sensitive
Degree and lower mechanical thermal noise, with reference to micrometric displacement translation system parameter measurement to be measured to sample surfaces can be effectively improved
Precision and spatial resolution.Because sample is separately installed on micro-displacement platform so that in an experiment can be easily
Sample is changed, different input conditions is arranged to sample and is measured.This is for the various skin effects for measuring sample and grinds
The Physical Mechanism for studying carefully various effects has great significance.
Present invention could apply to high-precision low force measuring study, for study sample surface charge distribution, electromagnetism ginseng
Amount, surface topography, mechanical parameter etc. have important application prospect.
It is an object of the invention to provide a kind of conductive surface potential measurement instrument rocked based on Electrostatic Control, the instrument can
For measuring the faint interaction between sample and probe, can realize being scanned the sample surfaces of macro-scale survey
Amount.The device can be used to the surfaces characteristic such as distribution of charges, electromagnetic parameter and the shape characteristic on study sample surface.
The conductive surface potential measurement instrument rocked based on Electrostatic Control, as shown in Fig. 2 probe support is " work " font
Structure；The suspension of suspension 1 is somebody's turn to do the structure composition of " work " font and is rocked, in order that rocking the electrostatic phase interaction between testing sample
Maximum with effect, scanning probe 3 is installed on the end face (any one end of the end face at four ends) that " work " font is rocked by us.It is to be measured
Sample 4 be arranged on multiple degrees of freedom micrometric displacement translational platform 5 on, allow sample surface to be measured just to parallel to probe end face, in order to protect
The resolution ratio of whole measuring instrument is demonstrate,proved, sample surface to be measured is usually tens microns to several millimeters with the spacing of probe end face
(actual pitch should be optimized selected according to different scientific goals)；6 is angular transducer, is being reversed to measure to rock
Motion on free degree direction, by the angular displacement information for rocking voltage signal is converted into, and is fed back by PID arithmetic link 7
Control voltage, and be loaded on capacitor plate 8 being allowed to producing the classical feedback moment equal with input torque, make to rock by
Control is in its equilbrium position.When presence interaction between probe 3 and testing sample 4 is scanned, angular transducer 6 will can be detected
To the torsion information rocked pass to control system 7.Control system 7 is fed back according to pid control algorithm according to angle information
Control voltage simultaneously passes to feedback execution machine 8, to produce a feedback control torque big with moment of face etc. and be applied to probe
Frame 2, in order to so that probe support 2 keeps geo-stationary.Micrometric displacement translational platform 5 is driven to make the testing sample phase
For probe movement is so as to realizing the scanning survey to sample surfaces zones of different.We can easily more in concrete research
The sample being placed in multiple degrees of freedom micrometric displacement translational platform 5 is changed, is measured and is studied for different input conditions.
The surface potential for making testing sample 4 is VTM, potential V is loaded on probes, now between probe and testing sample 4
The electrostatic torque produced due to electrostatic interaction C in formulapFor probe and sample
Electric capacity between product, dpFor probe end face and the spacing of sample surfaces, lpFor probe core to suspension distance (electrostatic torque
The arm of force).Torsional pendulum device is in feedback static electric moment τ in measurement processfIn the presence of be in relative static conditions, it is flat according to torque
Weighing apparatus relation can be obtainedV in above formulaf(can pass through for feedback control voltage
Data collecting system is recorded), HaSensitivity coefficient for electrostatic actuation machine in closed-loop control system (can be demarcated by experiment
Obtain).Understood according to formula (2), in the case of the accurate dimension and probe of known probe and the geometrical relationship of sample, passed through
The feedback control voltage of record is just obtained the potential value at sample surfaces position to be measured.Then put down by driving mobile micrometric displacement
Moving stage changes the relative position (the dotted arrow direction along Fig. 2) between probe and testing sample, just can measure sample surfaces not
With the surface potential value at position, so as to learn the Potential Distributing situation of sample surfaces.
The conductive surface potential measurement instrument that the present invention is provided for AFM, with present invention employs
The high-sensitive system that is twisted into has higher potential measurement resolution ratio, present invention incorporates micrometric displacement translation system is with bigger
Scanning survey scope, disclosure satisfy that the weak force scanning measurement demand of higher precision.For the torsion balance system of feedback control, its torque
Detection level can reach 10-14Nm/Hz1/2.If being that the 10cm devices can be with to the detection level of power by the Design of length of the arm beam of steelyard
Reach 2 × 10-13Nm/Hz1/2, 1 number higher than the accuracy of detection of the Kelvin probe designs based on AFM platform
Magnitude.
We can design various sizes of probe to change the measurement area of probe to meet not during system building
Same scientific goal.For the surface characteristics of the practice examining quality of scanning research large scale, in an experiment can be with relative
The object of the quality such as addition and sample comes between compensated scanning measurement process middle probe and sample at the symmetrical position of suspension
Gravitation changes because testing sample is placed in the micrometric displacement translational platform beside probe system in the device, therefore, we
Sample can be easily changed, different input conditions is set by series of experiments come the deep layer of study sample surface characteristics
Physical Mechanism.
Advantages of the present invention is mainly reflected in：(1) responded using the system of rocking low force change, than traditional probe hand
Section has higher sensitivity, higher detection level.(2) feedback-controlled torsion pendulum technology is mutually tied with micrometric displacement translation system
Close, it is possible to achieve the scanning survey of sample surfaces multidimensional.(3) device can provide a pervasive platform to measure and study
Different samples, and apparatus structure need not be modified and be recombinated when changing testing sample.The sky of the device scanning survey
Between resolution ratio is estimated reaches nm magnitudes, low force certainty of measurement reaches 10-13Nm/Hz1/2, realize high accuracy and high spatial resolution
Weak force scanning measurement.
The conductive surface potential measurement instrument rocked based on Electrostatic Control, as shown in Fig. 2 suspension 1 hangs probe support 2 constituting
Rock, scanning probe 3 is installed on the one end rocked.Testing sample 4 is arranged in multiple degrees of freedom micrometric displacement translational platform 5, is positioned over
By probe.6 is angular transducer, when scan exist between probe 3 and testing sample 4 interact when, angular transducer can be by
The torsion information rocked for detecting passes to control system 7.Control system 7 is obtained according to corresponding control algolithm according to angle information
To corresponding result and feedback execution machine 8 is passed to, to produce a feedback control torque big with moment of face etc. and be applied to spy
Needle rack 2, in order to so that probe support 2 keeps geo-stationary.Driving micrometric displacement translational platform 5 treats test sample described in can making
Condition is for probe movement is so as to realizing the scanning survey to sample surfaces zones of different.We can be very convenient in concrete research
The sample being placed in multiple degrees of freedom micrometric displacement translational platform 5 is changed on ground, is measured and is studied for different input conditions.
If probe of the end face for 5mm × 5mm is chosen, and the spacing between probe and testing sample is set as 50 μm, the arm beam of steelyard
Length takes 10cm, and it is 6 × 10 to choose certainty of measurement-6pF/Hz1/2Capacitive displacement sensing circuit, it is 10 to choose angle-measurement accuracy- 8The measuring instrument of rad, the certainty of measurement of conductive surface potential can reach 10 μ V/Hz1/2。
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, not to
The present invention, all any modification, equivalent and improvement made within the spirit and principles in the present invention etc. are limited, all should be included
Within protection scope of the present invention.
Claims (5)
1. a kind of conductive surface potential measurement instrument rocked based on Electrostatic Control, it is characterised in that including suspension (1), probe
Frame (2), scanning probe (3), multiple degrees of freedom micrometric displacement translational platform (5), angular transducer (6), control system (7) and feedback are performed
Machine (8)；
The probe support (2) is I-shaped structure, and with four end faces, the scanning probe (3) is arranged on the probe
On any one end face of frame (2)；The suspension (1) is hung probe support (2) composition and is rocked；
During work, testing sample (4) is arranged on the multiple degrees of freedom micrometric displacement translational platform (5), the table to be measured of testing sample (4)
Face is just pair and parallel to the end face of scanning probe (3)；The end face of the scanning probe is not contacted with the surface to be measured；
When there is interaction between scanning probe (3) and the testing sample (4), the angular transducer (6) will
The torsion information rocked of detection passes to the control system (7)；The control system (7) carries out the torsion information
The feedback control voltage obtained after PID arithmetic passes to feedback execution machine (8), and feedback execution machine (8) is according to described anti-
Feedback control voltage produces a feedback control torque big with moment of face etc. and is applied to the probe support (2) so that described
Probe support (2) keeps geo-stationary；By driving the micrometric displacement translational platform (5) testing sample (4) is made relative to institute
Scanning probe (3) is stated mobile, so as to realize the scanning survey to sample surfaces zones of different；Feedback execution machine (8) is quiet
Electric execution machine.
2. conductive surface potential measurement instrument as claimed in claim 1, it is characterised in that the end face of the scanning probe with it is described
The distance between surface to be measured is tens microns to several millimeters.
3. conductive surface potential measurement instrument as claimed in claim 1, it is characterised in that the angular transducer (6) is optics
Sensor or capacitance sensor.
4. conductive surface potential measurement instrument as claimed in claim 1, it is characterised in that replace described using magnetic feedback execution machine
Electrostatic actuation machine.
5. the conductive surface potential measurement instrument as described in any one of claim 1-4, it is characterised in that sample surfaces position to be measured
The potential value V at placeTMWith feedback control voltage VfMeet following relation：Wherein HaFor closed loop control
The sensitivity coefficient of electrostatic actuation machine, C in system processedpFor the electric capacity between probe and sample, dpFor probe end face and sample surfaces
Spacing, lpFor the distance of probe core to suspension, VsIt is that potential is loaded on probe.
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| CN106199759B (en) * | 2016-03-29 | 2018-10-12 | 中国地震局地震研究所 | Electrostatic feedback dipmeter assembling and setting platform and its method |
| CN113447180B (en) * | 2021-05-10 | 2022-03-22 | 中山大学 | Torsion pendulum testing device based on differential capacitor and torsion pendulum decoupling reading method |
| CN114322745B (en) * | 2021-12-31 | 2022-09-30 | 华中科技大学 | Method for simultaneously measuring surface potential and surface morphology of conductor |
| CN114397352B (en) * | 2021-12-31 | 2024-02-20 | 华中科技大学 | Potential measurement method insensitive to probe and sample interval change |
| CN116908519B (en) * | 2023-07-17 | 2024-05-07 | 中国科学院长春光学精密机械与物理研究所 | Inertial sensor surface potential measuring device and measuring method thereof |
| CN117471195B (en) * | 2023-10-30 | 2024-06-25 | 中国科学院长春光学精密机械与物理研究所 | Method for resolving surface charge fluctuations of test quality |
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| JPH06258014A (en) * | 1993-03-05 | 1994-09-16 | Canon Inc | Scanning probe microscope and recorder and/or reproducer employing it |
| CN1243354C (en) * | 2003-04-09 | 2006-02-22 | 浙江大学 | Horizontal type detector of atom force microscope |
| US9977050B2 (en) * | 2009-11-06 | 2018-05-22 | Swisslitho Ag | Wear-less operation of a material surface with a scanning probe microscope |
| CN101915858B (en) * | 2010-07-02 | 2013-02-13 | 华中科技大学 | Feedback-controlled torsion pendulum weak force scanning and detecting instrument |
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