CN118275791A - Conductor surface charge and charge distribution measuring device and method based on suspension microsphere - Google Patents
Conductor surface charge and charge distribution measuring device and method based on suspension microsphere Download PDFInfo
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Abstract
The application belongs to the field of electrostatic field measurement, and particularly discloses a conductor surface charge and charge distribution measurement device and method based on suspension microspheres. According to the application, micron-sized charged microspheres are used as detection sensitive units, the electrostatic quantity of the charged microspheres is calibrated according to the drift detection electric field strength of the charged microspheres in a pure background field and a background field superposition alternating electric field, and the electrostatic force at the intrinsic frequency of the movement of the suspended charged microspheres near the isolated conductor is synthesized, so that the charge quantity and charge distribution of a certain area on the surface of the isolated conductor are inverted. The application adopts micron-sized charged microspheres as probes, can precisely detect static charges in a very small local area range, and realizes spatial resolution superior to micron-sized. In addition, the charged microspheres are suspended by the gradient force of the optical trap, the eigenfrequency is higher, and the sensitivity to electrostatic force caused by electric charge is higher. The suspended charged microsphere only interacts with photons, so that the mechanical contact between the microsphere and other objects is reduced, the friction effect is reduced, and the potential sensitivity is extremely high.
Description
Technical Field
The application belongs to the field of electrostatic field measurement, and in particular relates to a device and a method for measuring conductor surface charge and charge distribution based on suspension microspheres.
Background
With the development of science and technology, higher requirements are put on weak force measurement. In weak force measurement, a multi-purpose torsion balance is used as a detection unit, the electric charge and the distribution condition of the surface of the torsion balance can influence the measurement, and in order to improve the precision of the measurement device, the electric charge and the electric charge distribution of the surface of the torsion balance are measured.
Aiming at the measurement of the surface charge distribution condition of the torsion balance, at present, a plurality of sensitive elements such as Hall elements, MEMS, capacitors and the like can be used as probes to firstly measure the electric field intensity of an electrostatic field, and then the charge distribution for generating the electric field intensity is obtained through calculation; the charge distribution of the electrostatic field can also be measured with a kelvin probe and an electrostatically controlled torsion scale. Their ability to measure changes in electric fields has yet to be improved and is not satisfactory for micrometer-scale charge measurement. In addition, electronic components are required to be introduced, and the electric field on the surface of the object to be detected is influenced to a certain extent.
Therefore, there is a need to develop a device and a method for evaluating electrostatic fields with small influence on the surface charge of an object to be tested and high spatial resolution, so as to meet the requirement of increasing technological development.
Disclosure of Invention
Aiming at the defects of the prior art, the application aims to provide a conductor surface charge and charge distribution measuring device and method based on suspension microspheres, and aims to solve the problems of low measurement accuracy and low charge resolution sensitivity caused by low spatial resolution and large influence of a probe on the surface charge of a conductor to be measured in the prior measuring technology.
To achieve the above object, in a first aspect, the present application provides a device for measuring surface charge and charge distribution of a conductor based on suspended microspheres, comprising: charged microspheres, optical modules and displacement tables;
the charged microsphere is used as a detection sensitive unit, the diameter of the charged microsphere is not more than micron order, and the charged microsphere is used for generating electrostatic interaction with the surface charge of an isolated conductor to be detected, so that the surface charge information of the isolated conductor is coupled in a motion power spectrum of the charged microsphere;
the optical module is used for providing optical trap gradient force for suspending the charged microspheres, transmitting motion information of the suspended charged microspheres to an optical signal, transmitting a motion power spectrum of the suspended charged microspheres to the processing unit, calibrating the static quantity of the suspended charged microspheres according to a first motion power spectrum under the action of static environment and a second motion power spectrum under the drive of alternating electric field force when no isolated conductor exists, and calculating the surface charge and charge distribution of the isolated conductor according to a third motion power spectrum under the action of static environment around the suspended charged microspheres and combining the static quantity of the suspended charged microspheres;
The displacement table is used for fixing the isolated conductor to be detected, enabling the center of the displacement table to be aligned with the suspended charged microspheres, driving the isolated conductor to move, and changing the position of the isolated conductor opposite to the suspended charged microspheres.
Preferably, the charged microsphere has a charge of no more than 60 electrons.
It should be noted that, the interaction between the suspended microsphere as the probe and the test mass to be tested is electrostatic force, and the control accuracy of the microsphere charge directly affects the accuracy of the effect to be tested. The application preferably has the charge quantity of the charged microsphere not more than 60 electrons, and the charge quantity is relatively small, so that the influence on the electrostatic field distribution of the original device is small, and the measurement accuracy is improved.
Preferably, the support frame of the displacement table is replaceable to accommodate isolated conductors of different shapes and sizes.
It should be noted that the above design is preferred in the present application so that the entire measuring device is suitable for isolated conductors of arbitrary shape and size.
Preferably, the distance between the suspended charged microspheres and the isolated conductors is in the order of microns.
Preferably, the length of the vacuum optical trap in the optical module is not less than twice the side length of the isolated conductor.
It should be noted that the above design is preferable in the present application, so that enough space is ensured for the isolated conductor to be tested to move, and the influence on the charge distribution on the surface of the conductor is prevented.
Preferably, the processing unit is embedded in the measuring device or independent of the measuring device.
In order to achieve the above object, in a second aspect, the present application provides a method for measuring surface charge and charge distribution of a conductor based on suspension microspheres, comprising:
s1, acquiring a first motion power spectrum of a suspension charged microsphere under the action of an electrostatic environment when no isolated conductor to be detected exists, wherein the motion power spectrum comprises power intensities of the suspension charged microsphere at different motion frequencies;
S2, applying simple harmonic sinusoidal alternating voltage to an electrostatic environment without an isolated conductor to be detected, and obtaining a second motion power spectrum of the suspended charged microsphere under the driving of alternating electric field force;
s3, calculating the ratio of the two motion power spectrums at the driving frequency of the alternating electric field, and further calculating the static quantity of the suspended charged microspheres;
S4, canceling application of simple harmonic sine alternating voltage, and enabling the isolated conductor to be detected to be positioned near the suspension charged microsphere and not to shield light transmission of the optical module;
S5, obtaining a third motion power spectrum of the suspension charged microspheres;
S6, according to the intensity of the third motion power spectrum at the motion eigenfrequency of the suspended charged microsphere, and combining a motion equation, calculating the electrostatic force of the suspended charged microsphere at the position;
S7, according to a plate-ball electrostatic force action theoretical model, synthesizing the electrostatic quantity of the suspension charged microspheres and the electrostatic force of the suspension charged microspheres at the motion eigenfrequency, and inverting the electrostatic quantity of a certain area on the surface of the isolated conductor;
S8, changing the position of the isolated conductor opposite to the suspended charged microsphere, and repeating the steps S5-S7 to obtain the surface charge distribution of the isolated conductor to be detected.
Preferably, the electrostatic quantity of the suspended charged microspheresThe calculation formula is as follows:
Wherein, Representing the boltzmann constant,Indicating the temperature of the environment and,Indicating the velocity damping of the charged microspheres,Representing the ratio of the two motion power spectra at the alternating electric field drive frequency,Indicating the mass of the suspended charged microspheres,Representing the amplitude of the alternating electric field,Representing the time of sampling.
Preferably, the inversion formula of the charge quantity of a certain area of the isolated conductor surface is as follows:
Wherein, Representing the electrostatic force of the suspended charged microsphere at the eigenfrequency of motion,The number of blocks of the surface segmentation of the isolated conductor to be measured is represented,Representing the suspension charged microsphere and the surface of the isolated conductor to be measuredThe capacitance between certain areas of the block,Representing the distance between the suspended charged microsphere and the surface of the isolated conductor to be tested,Representing the surface of the isolated conductor to be measuredThe charge amount of a certain area of the block,The static electricity amount of the suspended charged microspheres is shown.
In general, the above technical solutions conceived by the present application have the following beneficial effects compared with the prior art:
The application provides a conductor surface charge and charge distribution measuring device and method based on suspension microspheres, which takes micron-sized charged microspheres as detection sensitive units, and marks the electrostatic quantity of the charged microspheres according to the drift detection electric field strength of the charged microspheres in a pure background field and a background field superposition alternating electric field, and the electrostatic force of the motion eigenfrequency of the suspension charged microspheres near an isolated conductor is synthesized to invert the charge quantity of a certain area on the surface of the isolated conductor and the charge distribution situation among the areas. Compared with a large probe in a measuring device of a probe or a torsion balance, the application adopts the micron-sized charged microsphere as the probe, can precisely detect static charges in a very small local range, and realizes spatial resolution superior to micron-sized. In addition, the charged microspheres are suspended by optical trap gradient force, so that the intrinsic frequency is higher and the sensitivity to electrostatic force caused by charges is higher compared with a suspension mode of wire suspension and mechanical arm support. The suspended charged microsphere only interacts with photons, so that the mechanical contact between the microsphere and other objects is reduced, the friction effect is reduced, and the potential sensitivity is extremely high.
Drawings
Fig. 1 is a schematic diagram of a conductor surface charge and charge distribution measuring device based on suspension microspheres according to the present application.
Fig. 2 is a flow chart of a method for measuring surface charge and charge distribution of a conductor based on suspension microspheres.
Fig. 3 is a schematic structural diagram of an electronic device according to an embodiment of the present application.
The same reference numbers are used throughout the drawings to reference like elements or structures, wherein:
1-an isolated conductor to be tested; 2-charged microspheres; 3-an optical module; 4-displacement stage.
Detailed Description
The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
The term "and/or" herein is an association relationship describing an associated object, and means that there may be three relationships, for example, a and/or B may mean: a exists alone, A and B exist together, and B exists alone. The symbol "/" herein indicates that the associated object is or is a relationship, e.g., A/B indicates A or B.
The terms "first" and "second" and the like in the description and in the claims are used for distinguishing between different objects and not for describing a particular sequential order of objects. For example, the first response message and the second response message, etc. are used to distinguish between different response messages, and are not used to describe a particular order of response messages.
In embodiments of the application, words such as "exemplary" or "such as" are used to mean serving as an example, instance, or illustration. Any embodiment or design described herein as "exemplary" or "e.g." in an embodiment should not be taken as preferred or advantageous over other embodiments or designs. Rather, the use of words such as "exemplary" or "such as" is intended to present related concepts in a concrete fashion.
In the description of the embodiments of the present application, unless otherwise specified, the meaning of "plurality" means two or more, for example, the meaning of a plurality of processing units means two or more, or the like; the plurality of elements means two or more elements and the like.
Next, the technical scheme provided in the embodiment of the present application is described.
As shown in fig. 1, the present application provides a device for measuring surface charge and charge distribution of a conductor based on suspended microspheres, comprising: charged microsphere 2, optical module 3 and displacement table 4;
The charged microsphere 2 is used as a detection sensitive unit, the diameter of the charged microsphere is not more than micron order, and the charged microsphere is used for generating electrostatic interaction with the surface charge of the isolated conductor 1 to be detected, so that the surface charge information of the isolated conductor is coupled in a motion power spectrum of the charged microsphere 2;
The optical module 3 is used for providing optical trap gradient force for suspending the charged microspheres 2, transmitting motion information of the suspended charged microspheres 2 to an optical signal, transmitting a motion power spectrum of the suspended charged microspheres 2 to the processing unit, calibrating the electrostatic quantity of the suspended charged microspheres according to a first motion power spectrum under the action of electrostatic environment without an isolated conductor and a second motion power spectrum under the drive of alternating electric field force, and calculating the surface charge and charge distribution of the isolated conductor according to a third motion power spectrum under the action of electrostatic environment around the suspended charged microspheres and combined with the electrostatic quantity of the suspended charged microspheres;
The displacement table 4 is used for fixing the isolated conductor 1 to be detected, enabling the center of the isolated conductor to be aligned with the suspended charged microsphere 2, driving the isolated conductor to move, and changing the position of the isolated conductor opposite to the suspended charged microsphere.
The whole measuring device is positioned in an environment capable of applying a modulation electric field and is used for calibrating the microsphere electric charge quantity. The charged microsphere and the optical module together form an optical suspension auxiliary system. In the suspension micro-auxiliary system, except for the microspheres which are positioned near the isolated conductor to be tested, other optical components are positioned at the far position of the isolated conductor to be tested.
The application precisely detects the charge distribution of a conductor to be detected around particles based on particles suspended in a vacuum optical trap. The suspended particles in the optical trap are acted by the electric field of the electric charge, and the balance position is shifted, so that the resonance frequency of the particles is shifted compared with that of the particles without an electrostatic field. By detecting the shift in the resonance frequency of the aerosol particles, detection of the surface charge of the conductor that has this effect can be achieved.
Specifically, the microparticles are charged microspheres. Because the resonance peak of the suspended charged microsphere in the high vacuum environment has extremely narrow line width, the system has unique advantages in detecting resonance frequency shift, and therefore, high-sensitivity charge measurement can be realized. Meanwhile, as the suspended charged microsphere volume is small and the charged quantity is small, the method and the device can precisely detect the charge distribution in a very small local area range, and realize high spatial resolution.
Preferably, the charged microsphere has a charge of no more than 60 electrons.
Preferably, the support frame of the displacement table is replaceable to accommodate isolated conductors of different shapes and sizes.
Preferably, the distance between the suspended charged microspheres and the isolated conductors is in the order of microns.
Preferably, the length of the vacuum optical trap in the optical module is not less than twice the side length of the isolated conductor.
Preferably, the processing unit is embedded in the measuring device or independent of the measuring device.
As shown in fig. 2, the present application provides a method for measuring surface charge and charge distribution of a conductor based on suspension microspheres, comprising:
S1, acquiring a first motion power spectrum of the suspension charged microsphere under the action of static electricity environment when no isolated conductor to be detected is arranged, wherein the motion power spectrum comprises power intensities of the suspension charged microsphere at different motion frequencies.
The movement of the microspheres under the action of the background field of the electrostatic environment is recorded and used for comparison under the action of the alternating electric field.
S2, applying simple harmonic sinusoidal alternating voltage to an electrostatic environment without an isolated conductor to be detected, and obtaining a second motion power spectrum of the suspended charged microsphere under the driving of alternating electric field force.
Equation of motion of charged microspheres driven by alternating electric field force:
Wherein, Indicating the displacement of the charged microsphere, superscriptAndRepresenting a first derivative and a second derivative of time respectively,Indicating the velocity damping of the charged microspheres,Indicating the eigenfrequency of the charged microsphere,Representing the background field force of the electrostatic environment,Indicating the time of the movement of the microspheres,Indicating the mass of the charged microspheres,Indicating the electrostatic quantity of charged microsphere and alternating electric field，Representing the amplitude of the alternating electric field,Representing the driving frequency of the alternating electric field.
Converting the above formula into a displacement power spectral density expression:
Wherein, Indicating the total power spectral density of the charged microspheres,Represents the angular frequency of the charged microsphere,Representing the boltzmann constant,Indicating the temperature of the environment and,The time of the sampling is indicated and,The function of the sine is represented by a sine function,Representing the random thermal noise power spectral density in an electrostatic environment,Representing the power spectral density caused by the electric field drive.
S3, calculating the ratio of the two motion power spectrums at the driving frequency of the alternating electric field, and further calculating the static quantity of the suspended charged microspheres.
Recording deviceFor the magnitude of the random noise power spectral density at the drive frequency,The above equation can be converted into:
Preferably, the electrostatic quantity of the suspended charged microspheres The calculation formula is as follows:
Wherein, Representing the boltzmann constant,Indicating the temperature of the environment and,The speed damping of the charged microsphere is represented and is obtained by fitting a power spectral density equation under the driving of no electric field force,Representing the ratio of the two motion power spectra at the alternating electric field drive frequency,Indicating the mass of the suspended charged microspheres,Representing the amplitude of the alternating electric field,Representing the time of sampling.
S4, canceling application of simple harmonic sine alternating voltage, and enabling the isolated conductor to be detected to be positioned near the suspension charged microsphere and not to shield light transmission of the optical module.
Specifically, after light captured by the optical trap emitted by the light source enters the vacuum cavity, the light is focused by the focusing lens, and an optical trap is formed near the focal point position to stably capture the charged microsphere. The optical trap structure in this embodiment may be a vertical optical trap or a horizontal optical trap. In order to reduce the influence of environmental thermal noise on detection, the air pressure in the vacuum chamber needs to be reduced. The shape of the captured charged microsphere is spherical, and the material is silicon dioxide.
S5, obtaining a third motion power spectrum of the suspension charged microspheres.
S6, according to the intensity of the third motion power spectrum at the motion eigenfrequency of the suspended charged microsphere, and combining with a motion equation, calculating the electrostatic force of the suspended charged microsphere at the position.
The equation of motion of the charged microspheres at this time becomes:
Wherein, Representing the electrostatic force of the isolated conductor on the microsphere.
The voltage-displacement conversion relation is obtained through the transformation of the motion equation:
wherein the voltage-displacement conversion coefficient Each parameter in the formula is obtained through experimental calibration,For the rigidity of the optical trap,For actually measuring the voltage power spectrum of the photoelectric detector at the eigenfrequencyA peak value at which the peak value,Representing the voltage of a detector in the optical suspension assistance system for detecting the microsphere movement information.
The displacement-force conversion relation is obtained through the transformation of the motion equation:
Wherein, 。
The application converts the power spectrum signal into the force signal received by the microsphere through the two conversions。
S7, according to a plate-ball electrostatic force action theoretical model, the electrostatic quantity of the suspension charged microspheres and the electrostatic force of the suspension charged microspheres at the motion eigenfrequency are synthesized, and the electrostatic quantity of a certain area on the surface of the isolated conductor is inverted.
Preferably, the inversion formula of the charge quantity of a certain area of the isolated conductor surface is as follows:
Wherein, Representing the electrostatic force of the suspended charged microsphere at the eigenfrequency of motion,The number of blocks of the surface segmentation of the isolated conductor to be measured is represented,Representing the suspension charged microsphere and the surface of the isolated conductor to be measuredThe capacitance between certain areas of the block,Representing the distance between the suspended charged microsphere and the surface of the isolated conductor to be tested,Representing the surface of the isolated conductor to be measuredThe charge amount of a certain area of the block,The static electricity amount of the suspended charged microspheres is shown.
By parameters of vacuum environment and set spacing between microsphere and isolated conductor to be testedCalculated to obtainThe expression is:
Wherein, Indicating the dielectric constant of the material,Indicating radius of charged microsphere, intermediate parameter。
S8, changing the position of the isolated conductor opposite to the suspended charged microsphere, and repeating the steps S5-S7 to obtain the surface charge distribution of the isolated conductor to be detected.
Charge measurement over a large dynamic range is achieved by moving the position of the microspheres.
Wherein,The distribution of the surface charges of the conductor to be measured is shown,Representing the surface of the isolated conductor to be measuredThe charge quantity of a certain area of the block and the surface of the isolated conductor to be testedThe difference in charge amount of a certain block area of the block,Representing the displacement between two small areas.
It should be understood that the detailed functional implementation of each unit/module may be referred to the description of the foregoing method embodiment, and will not be repeated herein.
It should be understood that, the foregoing apparatus is used to perform the method in the foregoing embodiment, and corresponding program modules in the apparatus implement principles and technical effects similar to those described in the foregoing method, and reference may be made to corresponding processes in the foregoing method for the working process of the apparatus, which are not repeated herein.
Based on the method in the foregoing embodiment, an embodiment of the present application provides an electronic device, as shown in fig. 3, where the electronic device may include: the electronic device may include: a processor (processor), a communication interface (Communications Interface), a memory (memory), and a communication bus, wherein the processor, the communication interface, and the memory communicate with each other through the communication bus. The processor may invoke logic instructions in the memory to perform the methods of the embodiments described above.
Further, the logic instructions in the memory described above may be implemented in the form of software functional units and stored in a computer-readable storage medium when sold or used as a stand-alone product. Based on this understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution, in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present application.
Based on the method in the above embodiment, the embodiment of the present application provides a computer-readable storage medium storing a computer program, which when executed on a processor, causes the processor to perform the method in the above embodiment.
Based on the method in the above embodiments, an embodiment of the present application provides a computer program product, which when run on a processor causes the processor to perform the method in the above embodiments.
It is to be appreciated that the processor in embodiments of the present application may be a central processing unit (central processing unit, CPU), other general purpose processor, digital signal processor (DIGITAL SIGNAL processor, DSP), application Specific Integrated Circuit (ASIC), field programmable gate array (field programmable GATE ARRAY, FPGA) or other programmable logic device, transistor logic device, hardware components, or any combination thereof. The general purpose processor may be a microprocessor, but in the alternative, it may be any conventional processor.
The steps of the method in the embodiment of the present application may be implemented by hardware, or may be implemented by executing software instructions by a processor. The software instructions may be comprised of corresponding software modules that may be stored in random access memory (random access memory, RAM), flash memory, read-only memory (ROM), programmable ROM (PROM), erasable programmable ROM (erasable PROM, EPROM), electrically Erasable Programmable ROM (EEPROM), registers, hard disk, removable disk, CD-ROM, or any other form of storage medium known in the art. An exemplary storage medium is coupled to the processor such the processor can read information from, and write information to, the storage medium. In the alternative, the storage medium may be integral to the processor. The processor and the storage medium may reside in an ASIC.
In the above embodiments, it may be implemented in whole or in part by software, hardware, firmware, or any combination thereof. When implemented in software, may be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When loaded and executed on a computer, produces a flow or function in accordance with embodiments of the present application, in whole or in part. The computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable apparatus. The computer instructions may be stored in or transmitted across a computer-readable storage medium. The computer instructions may be transmitted from one website, computer, server, or data center to another website, computer, server, or data center by a wired (e.g., coaxial cable, fiber optic, digital Subscriber Line (DSL)), or wireless (e.g., infrared, wireless, microwave, etc.). The computer readable storage medium may be any available medium that can be accessed by a computer or a data storage device such as a server, data center, etc. that contains an integration of one or more available media. The usable medium may be a magnetic medium (e.g., floppy disk, hard disk, tape), an optical medium (e.g., DVD), or a semiconductor medium (e.g., solid State Drive (SSD)), etc.
It will be appreciated that the various numerical numbers referred to in the embodiments of the present application are merely for ease of description and are not intended to limit the scope of the embodiments of the present application.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the application and is not intended to limit the application, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the application are intended to be included within the scope of the application.
Claims (9)
1. Conductor surface charge and charge distribution measuring device based on suspension microballon, characterized by including: charged microspheres, optical modules and displacement tables;
the charged microsphere is used as a detection sensitive unit, the diameter of the charged microsphere is not more than micron order, and the charged microsphere is used for generating electrostatic interaction with the surface charge of an isolated conductor to be detected, so that the surface charge information of the isolated conductor is coupled in a motion power spectrum of the charged microsphere;
the optical module is used for providing optical trap gradient force for suspending the charged microspheres, transmitting motion information of the suspended charged microspheres to an optical signal, transmitting a motion power spectrum of the suspended charged microspheres to the processing unit, calibrating the static quantity of the suspended charged microspheres according to a first motion power spectrum under the action of static environment and a second motion power spectrum under the drive of alternating electric field force when no isolated conductor exists, and calculating the surface charge and charge distribution of the isolated conductor according to a third motion power spectrum under the action of static environment around the suspended charged microspheres and combining the static quantity of the suspended charged microspheres;
The displacement table is used for fixing the isolated conductor to be detected, enabling the center of the displacement table to be aligned with the suspended charged microspheres, driving the isolated conductor to move, and changing the position of the isolated conductor opposite to the suspended charged microspheres.
2. The measurement device of claim 1, wherein the charged microsphere has a charge of no more than 60 electrons.
3. The measurement device of claim 1 wherein the support frame of the displacement stage is replaceable to accommodate isolated conductors of different shapes and sizes.
4. The measurement device of claim 1, wherein the distance between the suspended charged microspheres and the isolated conductors is on the order of microns.
5. The measurement device of claim 1 wherein the optical module produces a vacuum optical trap having a length no less than twice the length of an isolated conductor side.
6. The measurement device of claim 1, wherein the processing unit is embedded in the measurement device or independent of the measurement device.
7. The method for measuring the surface charge and the charge distribution of the conductor based on the suspension microsphere is characterized by comprising the following steps of:
s1, acquiring a first motion power spectrum of a suspension charged microsphere under the action of an electrostatic environment when no isolated conductor to be detected exists, wherein the motion power spectrum comprises power intensities of the suspension charged microsphere at different motion frequencies;
S2, applying simple harmonic sinusoidal alternating voltage to an electrostatic environment without an isolated conductor to be detected, and obtaining a second motion power spectrum of the suspended charged microsphere under the driving of alternating electric field force;
s3, calculating the ratio of the two motion power spectrums at the driving frequency of the alternating electric field, and further calculating the static quantity of the suspended charged microspheres;
S4, canceling application of simple harmonic sine alternating voltage, and enabling the isolated conductor to be detected to be positioned near the suspension charged microsphere and not to shield light transmission of the optical module;
S5, obtaining a third motion power spectrum of the suspension charged microspheres;
S6, according to the intensity of the third motion power spectrum at the motion eigenfrequency of the suspended charged microsphere, and combining a motion equation, calculating the electrostatic force of the suspended charged microsphere at the position;
S7, according to a plate-ball electrostatic force action theoretical model, synthesizing the electrostatic quantity of the suspension charged microspheres and the electrostatic force of the suspension charged microspheres at the motion eigenfrequency, and inverting the electrostatic quantity of a certain area on the surface of the isolated conductor;
S8, changing the position of the isolated conductor opposite to the suspended charged microsphere, and repeating the steps S5-S7 to obtain the surface charge distribution of the isolated conductor to be detected.
8. The method of measuring according to claim 7, wherein the amount of static electricity suspending the charged microspheresThe calculation formula is as follows:
Wherein, Representing the boltzmann constant,Indicating the temperature of the environment and,Indicating the velocity damping of the charged microspheres,Representing the ratio of the two motion power spectra at the alternating electric field drive frequency,Indicating the mass of the suspended charged microspheres,Representing the amplitude of the alternating electric field,Representing the time of sampling.
9. The method of measuring of claim 7, wherein the inversion formula of the charge in a certain area of the isolated conductor surface is as follows:
Wherein, Representing the electrostatic force of the suspended charged microsphere at the eigenfrequency of motion,The number of blocks of the surface segmentation of the isolated conductor to be measured is represented,Representing the suspension charged microsphere and the surface of the isolated conductor to be measuredThe capacitance between certain areas of the block,Representing the distance between the suspended charged microsphere and the surface of the isolated conductor to be tested,Representing the surface of the isolated conductor to be measuredThe charge amount of a certain area of the block,The static electricity amount of the suspended charged microspheres is shown.
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