CN118275791A - Conductor surface charge and charge distribution measurement device and method based on suspended microspheres - Google Patents
Conductor surface charge and charge distribution measurement device and method based on suspended microspheres Download PDFInfo
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Abstract
Description
技术领域Technical Field
本申请属于静电场测量领域,更具体地,涉及基于悬浮微球的导体表面电荷及电荷分布测量装置和方法。The present application belongs to the field of electrostatic field measurement, and more specifically, to a device and method for measuring conductor surface charge and charge distribution based on suspended microspheres.
背景技术Background technique
随着科学技术的发展,对弱力测量提出了更高的要求。在弱力测量中多用扭秤作为探测单元,扭秤表面的电荷及其分布情况会对测量产生影响,为了提高这一测量装置的精度,就要对扭秤表面电荷及电荷分布进行测量。With the development of science and technology, higher requirements are put forward for weak force measurement. In weak force measurement, a torsion balance is often used as a detection unit. The charge and distribution on the surface of the torsion balance will affect the measurement. In order to improve the accuracy of this measurement device, the charge and charge distribution on the surface of the torsion balance must be measured.
针对于扭秤表面电荷分布情况的测量,目前可以用霍尔元件、MEMS、电容等一些敏感元件作为探头先来测量静电场的电场强度,再通过计算得到产生这一电场强度的电荷分布;也可以用开尔文探针和静电控制扭秤来测量静电场的电荷分布。但它们对于电场变化的测量能力还有待提高,不能满足微米尺度的电荷测量的需求。另外,它们都需要引入电子元器件,对待测物体表面的电场有一定的影响。For the measurement of charge distribution on the surface of a torsion balance, Hall elements, MEMS, capacitors and other sensitive elements can be used as probes to first measure the electric field strength of the electrostatic field, and then calculate the charge distribution that produces this electric field strength; Kelvin probes and electrostatically controlled torsion balances can also be used to measure the charge distribution of the electrostatic field. However, their ability to measure electric field changes needs to be improved and cannot meet the needs of charge measurement at the micrometer scale. In addition, they all require the introduction of electronic components, which have a certain impact on the electric field on the surface of the object to be measured.
因此需要研究一种对待测物体表面电荷影响小且空间分辨率高的静电场评估的装置及方法,用来满足日益增长的科技发展的需求。Therefore, it is necessary to study a device and method for evaluating the electrostatic field with little influence on the surface charge of the object to be measured and high spatial resolution, so as to meet the needs of the growing scientific and technological development.
发明内容Summary of the invention
针对现有技术的缺陷,本申请的目的在于提供基于悬浮微球的导体表面电荷及电荷分布测量装置和方法,旨在解决现有测量技术空间分辨率低、探头对待测导体表面电荷影响大导致测量准确率低和电荷分辨灵敏度低的问题。In view of the defects of the prior art, the purpose of this application is to provide a device and method for measuring the surface charge and charge distribution of a conductor based on suspended microspheres, aiming to solve the problems of low spatial resolution of the existing measurement technology, large influence of the probe on the surface charge of the conductor to be measured, resulting in low measurement accuracy and low charge resolution sensitivity.
为实现上述目的,第一方面,本申请提供了基于悬浮微球的导体表面电荷及电荷分布测量装置,包括:带电微球、光学模组和位移台;To achieve the above objectives, in a first aspect, the present application provides a conductor surface charge and charge distribution measurement device based on suspended microspheres, comprising: a charged microsphere, an optical module and a translation stage;
所述带电微球作为探测敏感单元,直径不超过微米量级,用于与待测孤立导体表面电荷发生静电相互作用,使得孤立导体表面电荷信息耦合在带电微球的运动功率谱中;The charged microspheres are used as detection sensitive units, with a diameter not exceeding the micrometer level, and are used to electrostatically interact with the surface charges of the isolated conductor to be detected, so that the surface charge information of the isolated conductor is coupled to the motion power spectrum of the charged microspheres;
所述光学模组,用于提供使带电微球悬浮的光阱梯度力,将悬浮带电微球的运动信息传递到光信号,将悬浮带电微球的运动功率谱发送给处理单元,以使其根据无孤立导体时静电环境作用下第一运动功率谱和交变电场力驱动下的第二运动功率谱,标定悬浮带电微球的静电量,根据孤立导体位于悬浮带电微球周围静电环境作用下第三运动功率谱,结合悬浮带电微球的静电量,计算孤立导体表面电荷及电荷分布;The optical module is used to provide a light trap gradient force to suspend the charged microspheres, transmit the motion information of the suspended charged microspheres to an optical signal, and send the motion power spectrum of the suspended charged microspheres to a processing unit, so that the processing unit can calibrate the static electricity of the suspended charged microspheres according to the first motion power spectrum under the action of the electrostatic environment when there is no isolated conductor and the second motion power spectrum driven by the alternating electric field force, and calculate the surface charge and charge distribution of the isolated conductor according to the third motion power spectrum under the action of the electrostatic environment when the isolated conductor is located around the suspended charged microspheres, combined with the static electricity of the suspended charged microspheres;
所述位移台,用于固定待测孤立导体,使其中心对准悬浮带电微球,带动孤立导体移动,改变其正对悬浮带电微球的位置。The displacement stage is used to fix the isolated conductor to be measured so that its center is aligned with the suspended charged microsphere, and to drive the isolated conductor to move and change its position facing the suspended charged microsphere.
优选地,所述带电微球带电量不超过60个电子。Preferably, the charged microspheres have a charge of no more than 60 electrons.
需要说明的是,作为探针的悬浮微球与待测检验质量之间的相互作用为静电力,微球带电量的控制精度将直接影响待测效应的精度。本申请优选带电微球带电量不超过60个电子,由于电荷量比较少,对原来装置静电场分布的影响小,提高测量准确率。It should be noted that the interaction between the suspended microspheres as probes and the test mass to be measured is electrostatic force, and the control accuracy of the microsphere charge will directly affect the accuracy of the effect to be measured. The present application preferably has a charged microsphere charge of no more than 60 electrons. Since the charge is relatively small, the impact on the electrostatic field distribution of the original device is small, thereby improving the measurement accuracy.
优选地,所述位移台的支撑架可替换,以适应不同形状和大小的孤立导体。Preferably, the support frame of the translation stage is replaceable to accommodate isolated conductors of different shapes and sizes.
需要说明的是,本申请优选上述设计,使得整个测量装置适用于任意形状和大小的孤立导体。It should be noted that the present application prefers the above design so that the entire measuring device is applicable to isolated conductors of any shape and size.
优选地,所述悬浮带电微球与孤立导体之间的距离为微米量级。Preferably, the distance between the suspended charged microspheres and the isolated conductor is in the micrometer order.
优选地,所述光学模组中真空光阱的长度不低于孤立导体边长的两倍。Preferably, the length of the vacuum light trap in the optical module is not less than twice the side length of the isolated conductor.
需要说明的是,本申请优选上述设计,保证有足够的空间给待测孤立导体移动,防止对导体表面的电荷分布产生影响。It should be noted that the present application prefers the above design to ensure that there is enough space for the isolated conductor to be measured to move and to prevent the charge distribution on the conductor surface from being affected.
优选地,所述处理单元内嵌于测量装置,或者,独立于测量装置。Preferably, the processing unit is embedded in the measuring device, or is independent of the measuring device.
为实现上述目的,第二方面,本申请提供了基于悬浮微球的导体表面电荷及电荷分布测量方法,包括:To achieve the above objectives, in a second aspect, the present application provides a method for measuring surface charge and charge distribution of a conductor based on suspended microspheres, comprising:
S1.获取无待测孤立导体时静电环境作用下悬浮带电微球的第一运动功率谱,所述运动功率谱包含悬浮带电微球处于不同运动频率处的功率强度;S1. Obtaining a first motion power spectrum of a suspended charged microsphere under the action of an electrostatic environment when there is no isolated conductor to be measured, wherein the motion power spectrum includes power intensities of the suspended charged microsphere at different motion frequencies;
S2.对无待测孤立导体时的静电环境施加简谐正弦交变电压,获取交变电场力驱动下悬浮带电微球的第二运动功率谱;S2. applying a simple harmonic sinusoidal alternating voltage to an electrostatic environment without an isolated conductor to be measured, and obtaining a second motion power spectrum of the suspended charged microsphere driven by the alternating electric field force;
S3.计算两个运动功率谱在交变电场驱动频率处的比值,进一步计算悬浮带电微球的静电量;S3. Calculate the ratio of the two motion power spectra at the driving frequency of the alternating electric field, and further calculate the static electricity of the suspended charged microspheres;
S4.取消简谐正弦交变电压的施加,将待测孤立导体位于悬浮带电微球附近且不遮挡光学模组的光传递;S4. cancel the application of the simple harmonic sinusoidal alternating voltage, and place the isolated conductor to be tested near the suspended charged microsphere without blocking the light transmission of the optical module;
S5.获取悬浮带电微球的第三运动功率谱;S5. Obtaining the third motion power spectrum of the suspended charged microspheres;
S6.根据第三运动功率谱在悬浮带电微球运动本征频率处的强度,结合运动方程,计算悬浮带电微球在该处的静电力;S6. Calculate the electrostatic force of the suspended charged microsphere at the location according to the intensity of the third motion power spectrum at the eigenfrequency of the suspended charged microsphere motion and the motion equation;
S7.根据板-球的静电力作用理论模型,综合悬浮带电微球的静电量和悬浮带电微球在运动本征频率处的静电力,反演出孤立导体表面的某一块区域带电量;S7. Based on the theoretical model of plate-ball electrostatic force, the static electricity of the suspended charged microspheres and the electrostatic force of the suspended charged microspheres at the eigenfrequency of motion are combined to invert the charge of a certain area on the surface of the isolated conductor;
S8.改变孤立导体正对悬浮带电微球的位置,重复步骤S5-S7,得到待测孤立导体表面电荷分布。S8. Change the position of the isolated conductor facing the suspended charged microspheres, and repeat steps S5-S7 to obtain the surface charge distribution of the isolated conductor to be measured.
优选地,悬浮带电微球的静电量计算公式如下:Preferably, the electrostatic charge of the suspended charged microspheres Calculated as follows:
其中,表示玻尔兹曼常数,表示环境温度,表示带电微球的速度阻尼,表示两个运动功率谱在交变电场驱动频率处的比值,表示悬浮带电微球的质量,表示交变电场的振幅,表示采样的时间。in, represents the Boltzmann constant, Indicates the ambient temperature, represents the velocity damping of the charged microsphere, represents the ratio of the two motion power spectra at the driving frequency of the alternating electric field, represents the mass of the suspended charged microspheres, represents the amplitude of the alternating electric field, Indicates the sampling time.
优选地,孤立导体表面的某一块区域带电量的反演公式如下:Preferably, the inversion formula for the charge of a certain area on the surface of an isolated conductor is as follows:
其中,表示悬浮带电微球在运动本征频率处的静电力,表示待测孤立导体表面分割的块数,表示悬浮带电微球和待测孤立导体表面第块的某一块区域间的电容,表示悬浮带电微球和待测孤立导体表面之间的距离,表示待测孤立导体表面第块的某一块区域带电量,表示悬浮带电微球的静电量。in, represents the electrostatic force of the suspended charged microsphere at the eigenfrequency of motion, Indicates the number of blocks divided on the surface of the isolated conductor to be measured, The suspended charged microsphere and the isolated conductor surface to be measured The capacitance between a certain area of the block, It represents the distance between the suspended charged microsphere and the surface of the isolated conductor to be measured. Indicates the surface of the isolated conductor to be measured. A certain area of the block is charged. Indicates the static electricity of suspended charged microspheres.
总体而言,通过本申请所构思的以上技术方案与现有技术相比,具有以下有益效果:In general, the above technical solutions conceived by this application have the following beneficial effects compared with the prior art:
本申请提出一种基于悬浮微球的导体表面电荷及电荷分布测量装置和方法,以微米级带电微球作为探测敏感单元,根据带电微球在纯背景场下和背景场叠加交变电场下的漂移探测电场强度,进而标定带电微球的静电量,综合悬浮带电微球在孤立导体附近时运动本征频率处的静电力,反演出孤立导体表面的某一块区域带电量及各区域间电荷分布情况。相较于探针或扭秤的测量装置中的大探头,本申请采用微米量级带电微球作为探头,能够精密探测极小局域范围内静电荷,实现优于微米量级空间分辨率。此外,带电微球是通过光阱梯度力悬浮,相对于丝线悬挂和机械臂支撑的悬浮方式来说,本征频率更高,对于电荷造成的静电力灵敏度更高。悬浮带电微球仅与光子相互作用,减少微球与其它物体的机械接触,降低摩擦效应,具有极高的潜在灵敏度。The present application proposes a conductor surface charge and charge distribution measurement device and method based on suspended microspheres, using micron-sized charged microspheres as detection sensitive units, detecting the electric field strength according to the drift of the charged microspheres under pure background fields and background fields superimposed on alternating electric fields, and then calibrating the static electricity of the charged microspheres, and comprehensively analyzing the electrostatic force at the eigenfrequency of the motion of the suspended charged microspheres near the isolated conductor, and inverting the charge of a certain area on the surface of the isolated conductor and the charge distribution between the areas. Compared with the large probe in the measuring device of the probe or torsion balance, the present application uses micron-sized charged microspheres as probes, which can accurately detect static charges in a very small local area and achieve a spatial resolution better than the micron-sized level. In addition, the charged microspheres are suspended by light trap gradient forces, which have a higher eigenfrequency and a higher sensitivity to the electrostatic force caused by the charge than the suspension methods of wire suspension and mechanical arm support. The suspended charged microspheres only interact with photons, reducing the mechanical contact between the microspheres and other objects, reducing the friction effect, and have extremely high potential sensitivity.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本申请提供的基于悬浮微球的导体表面电荷及电荷分布测量装置结构示意图。FIG1 is a schematic diagram of the structure of a conductor surface charge and charge distribution measurement device based on suspended microspheres provided in the present application.
图2是本申请提供的基于悬浮微球的导体表面电荷及电荷分布测量方法流程图。FIG2 is a flow chart of a method for measuring conductor surface charge and charge distribution based on suspended microspheres provided in the present application.
图3是本申请实施例提供的一种电子设备结构示意图。FIG3 is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application.
在所有附图中,相同的附图标记用来表示相同的元件或结构,其中:Throughout the drawings, the same reference numerals are used to denote the same elements or structures, wherein:
1-待测孤立导体;2-带电微球;3-光学模组;4-位移台。1-isolated conductor to be measured; 2-charged microsphere; 3-optical module; 4-translation stage.
具体实施方式Detailed ways
为了使本申请的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本申请进行进一步详细说明。应当理解,此处所描述的具体实施例仅用以解释本申请,并不用于限定本申请。In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.
本文中术语“和/或”,是一种描述关联对象的关联关系,表示可以存在三种关系,例如,A和/或B,可以表示:单独存在A,同时存在A和B,单独存在B这三种情况。本文中符号“/”表示关联对象是或者的关系,例如A/B表示A或者B。The term "and/or" in this article is a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and/or B can represent: A exists alone, A and B exist at the same time, and B exists alone. The symbol "/" in this article indicates that the associated objects are in an or relationship, for example, A/B means A or B.
本文中的说明书和权利要求书中的术语“第一”和“第二”等是用于区别不同的对象,而不是用于描述对象的特定顺序。例如,第一响应消息和第二响应消息等是用于区别不同的响应消息,而不是用于描述响应消息的特定顺序。The terms "first" and "second" in the specification and claims herein are used to distinguish different objects rather than to describe a specific order of the objects. For example, a first response message and a second response message are used to distinguish different response messages rather than to describe a specific order of the response messages.
在本申请实施例中,“示例性的”或者“例如”等词用于表示作例子、例证或说明。本申请实施例中被描述为“示例性的”或者“例如”的任何实施例或设计方案不应被解释为比其它实施例或设计方案更优选或更具优势。确切而言,使用“示例性的”或者“例如”等词旨在以具体方式呈现相关概念。In the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.
在本申请实施例的描述中,除非另有说明,“多个”的含义是指两个或者两个以上,例如,多个处理单元是指两个或者两个以上的处理单元等;多个元件是指两个或者两个以上的元件等。In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more than two. For example, multiple processing units refer to two or more processing units, etc.; multiple elements refer to two or more elements, etc.
接下来,对本申请实施例中提供的技术方案进行介绍。Next, the technical solutions provided in the embodiments of the present application are introduced.
如图1所示,本申请提供了基于悬浮微球的导体表面电荷及电荷分布测量装置,包括:带电微球2、光学模组3和位移台4;As shown in FIG1 , the present application provides a conductor surface charge and charge distribution measurement device based on suspended microspheres, comprising: a charged microsphere 2, an optical module 3 and a translation stage 4;
所述带电微球2作为探测敏感单元,直径不超过微米量级,用于与待测孤立导体1表面电荷发生静电相互作用,使得孤立导体表面电荷信息耦合在带电微球2的运动功率谱中;The charged microsphere 2 is used as a detection sensitive unit, and its diameter does not exceed the micrometer level, and is used to electrostatically interact with the surface charge of the isolated conductor 1 to be detected, so that the surface charge information of the isolated conductor is coupled to the motion power spectrum of the charged microsphere 2;
所述光学模组3,用于提供使带电微球2悬浮的光阱梯度力,将悬浮带电微球2的运动信息传递到光信号,将悬浮带电微球2的运动功率谱发送给处理单元,以使其根据无孤立导体时静电环境作用下第一运动功率谱和交变电场力驱动下的第二运动功率谱,标定悬浮带电微球的静电量,根据孤立导体位于悬浮带电微球周围静电环境作用下第三运动功率谱,结合悬浮带电微球的静电量,计算孤立导体表面电荷及电荷分布;The optical module 3 is used to provide a light trap gradient force to suspend the charged microsphere 2, transmit the motion information of the suspended charged microsphere 2 to the optical signal, and send the motion power spectrum of the suspended charged microsphere 2 to the processing unit, so that the processing unit can calibrate the static electricity of the suspended charged microsphere according to the first motion power spectrum under the action of the electrostatic environment when there is no isolated conductor and the second motion power spectrum driven by the alternating electric field force, and calculate the surface charge and charge distribution of the isolated conductor according to the third motion power spectrum under the action of the electrostatic environment around the isolated conductor and the suspended charged microsphere;
所述位移台4,用于固定待测孤立导体1,使其中心对准悬浮带电微球2,带动孤立导体移动,改变其正对悬浮带电微球的位置。The displacement stage 4 is used to fix the isolated conductor 1 to be measured so that its center is aligned with the suspended charged microsphere 2, and to drive the isolated conductor to move and change its position facing the suspended charged microsphere.
整个测量装置处在一个可以施加调制电场的环境中,用于对微球电荷量进行标定。带电微球和光学模组共同构成光悬浮辅助系统。所述悬浮微辅助系统中除了微球位于待测孤立导体附近外,其余光学组件均位于待测孤立导体较远的位置。The entire measuring device is in an environment where a modulated electric field can be applied to calibrate the charge of the microsphere. The charged microsphere and the optical module together constitute an optical suspension auxiliary system. In the suspended micro-assisted system, except for the microsphere located near the isolated conductor to be measured, the other optical components are located far away from the isolated conductor to be measured.
本申请基于真空光阱中悬浮的微粒,精密探测微粒周围待测导体的电荷分布。光阱中悬浮微粒受电荷的电场作用,平衡位置发生偏移,导致微粒谐振频率较无静电场时发生漂移。通过探测悬浮微粒谐振频率漂移,即能够实现对产生这一影响的导体表面电荷探测。This application is based on suspended particles in a vacuum light trap, and precisely detects the charge distribution of the conductor to be tested around the particles. The suspended particles in the light trap are affected by the electric field of the charge, and the equilibrium position shifts, causing the particle resonant frequency to drift compared to when there is no electrostatic field. By detecting the drift of the resonant frequency of the suspended particles, it is possible to detect the surface charge of the conductor that produces this effect.
具体地,微粒为带电微球。由于高真空环境中悬浮带电微球的谐振峰具有极窄线宽,使得这类系统在探测谐振频移时独具优势,因此能够实现高灵敏的电荷测量。同时,由于悬浮带电微球体积小,带电量少,该方法与装置能够精密探测极小局域范围内电荷分布,实现高空间分辨率。Specifically, the microparticles are charged microspheres. Since the resonance peak of the suspended charged microspheres in a high vacuum environment has an extremely narrow line width, this type of system has a unique advantage in detecting the resonance frequency shift, and thus can achieve highly sensitive charge measurement. At the same time, since the suspended charged microspheres are small in size and have a small amount of charge, the method and device can accurately detect the charge distribution in a very small local area and achieve high spatial resolution.
优选地,所述带电微球带电量不超过60个电子。Preferably, the charged microspheres have a charge of no more than 60 electrons.
优选地,所述位移台的支撑架可替换,以适应不同形状和大小的孤立导体。Preferably, the support frame of the translation stage is replaceable to accommodate isolated conductors of different shapes and sizes.
优选地,所述悬浮带电微球与孤立导体之间的距离为微米量级。Preferably, the distance between the suspended charged microspheres and the isolated conductor is in the micrometer order.
优选地,所述光学模组中真空光阱的长度不低于孤立导体边长的两倍。Preferably, the length of the vacuum light trap in the optical module is not less than twice the side length of the isolated conductor.
优选地,所述处理单元内嵌于测量装置,或者,独立于测量装置。Preferably, the processing unit is embedded in the measuring device, or is independent of the measuring device.
如图2所示,本申请提供了基于悬浮微球的导体表面电荷及电荷分布测量方法,包括:As shown in FIG2 , the present application provides a method for measuring the surface charge and charge distribution of a conductor based on suspended microspheres, including:
S1.获取无待测孤立导体时静电环境作用下悬浮带电微球的第一运动功率谱,所述运动功率谱包含悬浮带电微球处于不同运动频率处的功率强度。S1. Obtaining a first motion power spectrum of a suspended charged microsphere under the action of an electrostatic environment when there is no isolated conductor to be measured, wherein the motion power spectrum includes power intensities of the suspended charged microsphere at different motion frequencies.
记录静电环境的背景场作用时微球的运动情况,该情况用于在交变电场作用时作对比。The movement of the microspheres under the background field of the electrostatic environment is recorded, which is used for comparison when the alternating electric field acts.
S2.对无待测孤立导体时的静电环境施加简谐正弦交变电压,获取交变电场力驱动下悬浮带电微球的第二运动功率谱。S2. Apply a simple harmonic sinusoidal alternating voltage to the electrostatic environment without the isolated conductor to be measured, and obtain the second motion power spectrum of the suspended charged microsphere driven by the alternating electric field force.
带电微球在交变电场力驱动下的运动方程:The motion equation of the charged microsphere driven by the alternating electric field force is:
其中,表示带电微球的位移,上标和分别表示对时间的一阶导和二阶导,表示带电微球的速度阻尼,表示带电微球的本征频率,表示静电环境的背景场力,表示微球运动的时间,表示带电微球的质量,表示带电微球的静电量,交变电场,表示交变电场的振幅,表示交变电场的驱动频率。in, represents the displacement of the charged microsphere, and the superscript and denote the first and second derivatives with respect to time, respectively. represents the velocity damping of the charged microsphere, represents the eigenfrequency of the charged microsphere, Represents the background field force of the electrostatic environment, represents the time of microsphere movement, represents the mass of the charged microsphere, Indicates the static electricity of the charged microsphere, alternating electric field , represents the amplitude of the alternating electric field, Represents the driving frequency of the alternating electric field.
将上式转化为位移功率谱密度表达式:Convert the above formula into displacement power spectrum density expression:
其中,表示带电微球总的功率谱密度,表示带电微球的角频率,表示玻尔兹曼常数,表示环境温度,表示采样的时间,表示辛格函数,表示静电环境下随机热噪声功率谱密度,表示电场驱动引起的功率谱密度。in, represents the total power spectral density of the charged microspheres, represents the angular frequency of the charged microsphere, represents the Boltzmann constant, Indicates the ambient temperature, Indicates the sampling time, represents the sine function, represents the power spectral density of random thermal noise in an electrostatic environment, represents the power spectral density caused by electric field driving.
S3.计算两个运动功率谱在交变电场驱动频率处的比值,进一步计算悬浮带电微球的静电量。S3. Calculate the ratio of the two motion power spectra at the driving frequency of the alternating electric field, and further calculate the static electricity of the suspended charged microspheres.
记为随机噪声功率谱密度在驱动频率处的大小,为交变电场力作用下功率谱密度在驱动频率处的大小,可以将上式转化为:remember is the magnitude of the random noise power spectral density at the driving frequency, is the size of the power spectrum density at the driving frequency under the action of the alternating electric field force, the above formula can be converted into:
优选地,悬浮带电微球的静电量计算公式如下:Preferably, the electrostatic charge of the suspended charged microspheres Calculated as follows:
其中,表示玻尔兹曼常数,表示环境温度,表示带电微球的速度阻尼,由无电场力驱动时的功率谱密度方程拟合得到,表示两个运动功率谱在交变电场驱动频率处的比值,表示悬浮带电微球的质量,表示交变电场的振幅,表示采样的时间。in, represents the Boltzmann constant, Indicates the ambient temperature, represents the velocity damping of the charged microsphere, which is obtained by fitting the power spectrum density equation when there is no electric field force driving. represents the ratio of the two motion power spectra at the alternating electric field driving frequency, represents the mass of the suspended charged microspheres, represents the amplitude of the alternating electric field, Indicates the sampling time.
S4.取消简谐正弦交变电压的施加,将待测孤立导体位于悬浮带电微球附近且不遮挡光学模组的光传递。S4. Cancel the application of the simple harmonic sinusoidal alternating voltage, and place the isolated conductor to be tested near the suspended charged microsphere without blocking the light transmission of the optical module.
具体地,光源出射的光阱捕获光入射真空腔后,被聚焦透镜聚焦,在焦点位置附近形成光阱,稳定捕获带电微球。本实施例中光阱结构可以为竖直光阱也可为水平光阱。为了降低环境热噪声对探测的影响,需要降低真空腔内气压。被捕获带电微球形状为球形,材料为二氧化硅。Specifically, after the light trap capture light emitted by the light source enters the vacuum chamber, it is focused by the focusing lens to form a light trap near the focal position to stably capture the charged microspheres. In this embodiment, the light trap structure can be a vertical light trap or a horizontal light trap. In order to reduce the impact of environmental thermal noise on detection, it is necessary to reduce the air pressure in the vacuum chamber. The captured charged microspheres are spherical in shape and made of silicon dioxide.
S5.获取悬浮带电微球的第三运动功率谱。S5. Obtain the third motion power spectrum of the suspended charged microspheres.
S6.根据第三运动功率谱在悬浮带电微球运动本征频率处的强度,结合运动方程,计算悬浮带电微球在该处的静电力。S6. Based on the intensity of the third motion power spectrum at the eigenfrequency of the suspended charged microsphere motion, combined with the motion equation, calculate the electrostatic force of the suspended charged microsphere at that location.
此时带电微球的运动方程变为:At this time, the motion equation of the charged microsphere becomes:
其中,表示孤立导体对于微球的静电力。in, Represents the electrostatic force of an isolated conductor on the microsphere.
通过上述运动方程变换得到,得到电压-位移转换关系式:By transforming the above motion equation, we get the voltage-displacement conversion relationship:
其中,电压-位移转换系数,该公式中各参数通过实验标定得到,为光阱刚度,为实际测量的光电探测器电压功率谱在本征频率处的峰值,表示光悬浮辅助系统中用于探测微球运动信息的探测器的电压。Among them, the voltage-displacement conversion coefficient , each parameter in this formula is obtained through experimental calibration, is the light trap stiffness, is the actual measured photodetector voltage power spectrum at the eigenfrequency The peak value at Represents the voltage of the detector used to detect the motion information of the microsphere in the optical levitation-assisted system.
通过上述运动方程变换得到,得到位移-力转换关系式:By transforming the above motion equation, we get the displacement-force conversion relationship:
其中,。in, .
本申请通过上述两个转换,将功率谱信号转换为微球所受到的力信号。This application converts the power spectrum signal into the force signal exerted on the microsphere through the above two conversions. .
S7.根据板-球的静电力作用理论模型,综合悬浮带电微球的静电量和悬浮带电微球在运动本征频率处的静电力,反演出孤立导体表面的某一块区域带电量。S7. Based on the theoretical model of plate-ball electrostatic force, the static electricity of the suspended charged microspheres and the electrostatic force of the suspended charged microspheres at the eigenfrequency of their motion are combined to invert the charge on a certain area on the surface of an isolated conductor.
优选地,孤立导体表面的某一块区域带电量的反演公式如下:Preferably, the inversion formula for the charge of a certain area on the surface of an isolated conductor is as follows:
其中,表示悬浮带电微球在运动本征频率处的静电力,表示待测孤立导体表面分割的块数,表示悬浮带电微球和待测孤立导体表面第块的某一块区域间的电容,表示悬浮带电微球和待测孤立导体表面之间的距离,表示待测孤立导体表面第块的某一块区域带电量,表示悬浮带电微球的静电量。in, represents the electrostatic force of the suspended charged microsphere at the eigenfrequency of motion, Indicates the number of blocks divided on the surface of the isolated conductor to be measured, The suspended charged microsphere and the isolated conductor surface to be measured The capacitance between a certain area of the block, It represents the distance between the suspended charged microsphere and the surface of the isolated conductor to be measured. Indicates the surface of the isolated conductor to be measured. A certain area of the block is charged. Indicates the static electricity of suspended charged microspheres.
由真空环境的参数以及设定的微球和待测孤立导体之间的间距计算得,其表达式为:The parameters of the vacuum environment and the distance between the microsphere and the isolated conductor to be measured are determined by the Calculated , whose expression is:
其中,表示介电常数,表示带电微球半径,中间参数。in, represents the dielectric constant, represents the radius of the charged microsphere, and the intermediate parameter .
S8.改变孤立导体正对悬浮带电微球的位置,重复步骤S5-S7,得到待测孤立导体表面电荷分布。S8. Change the position of the isolated conductor facing the suspended charged microspheres, and repeat steps S5-S7 to obtain the surface charge distribution of the isolated conductor to be measured.
通过移动微球的位置来实现大动态范围内的电荷测量。The charge measurement in a large dynamic range can be achieved by moving the position of the microsphere.
其中,表示待测导体表面电荷分布情况,表示待测孤立导体表面第块的某一块区域带电量与待测孤立导体表面第块的某一块区域带电量的差值,表示两小区域间的位移。in, Indicates the charge distribution on the surface of the conductor to be measured. Indicates the surface of the isolated conductor to be measured. The charge of a certain area of the block is the same as the charge of the surface of the isolated conductor to be tested. The difference in charge of a certain area of the block, Represents the displacement between two small areas.
可以理解的是,上述各个单元/模块的详细功能实现可参见前述方法实施例中的介绍,在此不做赘述。It can be understood that the detailed functional implementation of each of the above-mentioned units/modules can be found in the introduction of the aforementioned method embodiment, and will not be repeated here.
应当理解的是,上述装置用于执行上述实施例中的方法,装置中相应的程序模块,其实现原理和技术效果与上述方法中的描述类似,该装置的工作过程可参考上述方法中的对应过程,此处不再赘述。It should be understood that the above-mentioned device is used to execute the method in the above-mentioned embodiment. The implementation principle and technical effect of the corresponding program module in the device are similar to those described in the above-mentioned method. The working process of the device can refer to the corresponding process in the above-mentioned method, which will not be repeated here.
基于上述实施例中的方法,本申请实施例提供了一种电子设备,如图3所示,该电子设备可以包括:该电子设备可以包括:处理器(processor)、通信接口(CommunicationsInterface)、存储器(memory)和通信总线,其中,处理器,通信接口,存储器通过通信总线完成相互间的通信。处理器可以调用存储器中的逻辑指令,以执行上述实施例中的方法。Based on the method in the above embodiment, an embodiment of the present application provides an electronic device, as shown in FIG3, the electronic device may include: the electronic device may include: a processor, a communication interface, a memory, and a communication bus, wherein the processor, the communication interface, and the memory communicate with each other through the communication bus. The processor may call the logic instructions in the memory to execute the method in the above embodiment.
此外,上述的存储器中的逻辑指令可以通过软件功能单元的形式实现并作为独立的产品销售或使用时,可以存储在一个计算机可读取存储介质中。基于这样的理解,本申请的技术方案本质上或者说对现有技术做出贡献的部分或者该技术方案的部分可以以软件产品的形式体现出来,该计算机软件产品存储在一个存储介质中,包括若干指令用以使得一台计算机设备(可以是个人计算机,服务器,或者网络设备等)执行本申请各个实施例所述方法的全部或部分步骤。In addition, the logic instructions in the above-mentioned memory can be implemented in the form of software functional units and can be stored in a computer-readable storage medium when sold or used as an independent product. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art, or the part of the technical solution, can be embodied in the form of a software product, which is stored in a storage medium and includes a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the method described in each embodiment of the present application.
基于上述实施例中的方法,本申请实施例提供了一种计算机可读存储介质,计算机可读存储介质存储有计算机程序,当计算机程序在处理器上运行时,使得处理器执行上述实施例中的方法。Based on the method in the above embodiment, an embodiment of the present application provides a computer-readable storage medium, which stores a computer program. When the computer program runs on a processor, the processor executes the method in the above embodiment.
基于上述实施例中的方法,本申请实施例提供了一种计算机程序产品,当计算机程序产品在处理器上运行时,使得处理器执行上述实施例中的方法。Based on the method in the above embodiment, an embodiment of the present application provides a computer program product. When the computer program product runs on a processor, the processor executes the method in the above embodiment.
可以理解的是,本申请实施例中的处理器可以是中央处理单元(centralprocessing unit,CPU),还可以是其他通用处理器、数字信号处理器(digital signalprocessor,DSP)、专用集成电路(application specific integrated circuit,ASIC)、现场可编程门阵列(field programmable gate array,FPGA)或者其他可编程逻辑器件、晶体管逻辑器件,硬件部件或者其任意组合。通用处理器可以是微处理器,也可以是任何常规的处理器。It is understandable that the processor in the embodiment of the present application may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, transistor logic devices, hardware components or any combination thereof. The general-purpose processor may be a microprocessor or any conventional processor.
本申请实施例中的方法步骤可以通过硬件的方式来实现,也可以由处理器执行软件指令的方式来实现。软件指令可以由相应的软件模块组成,软件模块可以被存放于随机存取存储器(random access memory,RAM)、闪存、只读存储器(read-only memory,ROM)、可编程只读存储器(programmable rom,PROM)、可擦除可编程只读存储器(erasable PROM,EPROM)、电可擦除可编程只读存储器(electrically EPROM,EEPROM)、寄存器、硬盘、移动硬盘、CD-ROM或者本领域熟知的任何其它形式的存储介质中。一种示例性的存储介质耦合至处理器,从而使处理器能够从该存储介质读取信息,且可向该存储介质写入信息。当然,存储介质也可以是处理器的组成部分。处理器和存储介质可以位于ASIC中。The method steps in the embodiments of the present application can be implemented by hardware or by a processor executing software instructions. The software instructions can be composed of corresponding software modules, and the software modules can be stored in random access memory (RAM), flash memory, read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), registers, hard disks, mobile hard disks, CD-ROMs, or any other form of storage medium known in the art. An exemplary storage medium is coupled to the processor so that the processor can read information from the storage medium and write information to the storage medium. Of course, the storage medium can also be a component of the processor. The processor and the storage medium can be located in an ASIC.
在上述实施例中,可以全部或部分地通过软件、硬件、固件或者其任意组合来实现。当使用软件实现时,可以全部或部分地以计算机程序产品的形式实现。所述计算机程序产品包括一个或多个计算机指令。在计算机上加载和执行所述计算机程序指令时,全部或部分地产生按照本申请实施例所述的流程或功能。所述计算机可以是通用计算机、专用计算机、计算机网络、或者其他可编程装置。所述计算机指令可以存储在计算机可读存储介质中,或者通过所述计算机可读存储介质进行传输。所述计算机指令可以从一个网站站点、计算机、服务器或数据中心通过有线(例如同轴电缆、光纤、数字用户线(DSL))或无线(例如红外、无线、微波等)方式向另一个网站站点、计算机、服务器或数据中心进行传输。所述计算机可读存储介质可以是计算机能够存取的任何可用介质或者是包含一个或多个可用介质集成的服务器、数据中心等数据存储设备。所述可用介质可以是磁性介质(例如,软盘、硬盘、磁带)、光介质(例如,DVD)、或者半导体介质(例如固态硬盘(solid state disk,SSD))等。In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented by software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions may be stored in a computer-readable storage medium or transmitted through the computer-readable storage medium. The computer instructions may be transmitted from a website site, computer, server or data center to another website site, computer, server or data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium may be any available medium that a computer can access or a data storage device such as a server or data center that includes one or more available media integrated. The available medium may be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid state disk (SSD)), etc.
可以理解的是,在本申请实施例中涉及的各种数字编号仅为描述方便进行的区分,并不用来限制本申请的实施例的范围。It should be understood that the various numerical numbers involved in the embodiments of the present application are only used for the convenience of description and are not used to limit the scope of the embodiments of the present application.
本领域的技术人员容易理解,以上所述仅为本申请的较佳实施例而已,并不用以限制本申请,凡在本申请的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本申请的保护范围之内。It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application shall be included in the scope of protection of the present application.
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