CN104852269A - Device and method for accurately modulating pulse laser phase - Google Patents
Device and method for accurately modulating pulse laser phase Download PDFInfo
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- CN104852269A CN104852269A CN201510273026.8A CN201510273026A CN104852269A CN 104852269 A CN104852269 A CN 104852269A CN 201510273026 A CN201510273026 A CN 201510273026A CN 104852269 A CN104852269 A CN 104852269A
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Abstract
The invention provides a device and a method for accurately modulating pulse laser phases. The device is realized by using the following technical scheme: the device comprises a first holophote, a first isolator, a first half-wave plate, a first polarization beam splitter prism, a first quarter wave plate, a first concave reflecting mirror, a second quarter wave plate, and a first raster on an optical path in sequence. The device also comprises a spatial light modulator, a second half-wave plate, a polarization beam splitter prism, a third quarter wave plate, a second raster, a fourth quarter wave plate, a second concave reflecting mirror, a second isolator, a third holophote, and a fourth holophote on the optical path in sequence. The spatial light modulator is connected with a controller through a BNC line. The device effectively solves problems that at the present stage, accuracy of modulating pulse laser phase is low, dispersion is large, error generated by chirp is large, and efficiency is low. The whole device and the method are advantaged by simple structure, simple operation, easy adjustment, low external interference, good stability, and high accuracy.
Description
Technical field
The present invention relates to pulse laser phase modulation technique, specifically a kind of device and method of accurate modulation pulse laser phase place.
Background technology
Along with the development of science and technology, laser is present in around us widely, and is widely used in the fields such as industrial production, scientific research and national defence and commodity.Such as, in computer and DVD player, for being loaded with semiconductor laser in the CD-ROM drive of fetch program and program.In numerous laser technology, the invention of Ultrashort pulse technology all has profound significance to numerous application and industry, the laser that the laser that ultrashort pulse laser is commonly used with people is launched is different, the time of the laser beam that it sends is very short, and the time interval of opening and closing is only ten million/mono-second.During work, so intensive pulse only can act on several atoms of material, and does not cause the material of surrounding to occur heating up or melting phenomenon.The characteristic of ultra-short pulse laser causes its tool to have been widely used and huge market.At life science, ultra-short pulse laser may be used for correcting defects of vision, detect and precise ablation cancer, cerebral surgery operation, treatment aneurysm, the contour tip of openheart surgery medical science neighborhood; In manufacturing industry, ultra-short pulse laser can be effectively extensive and low cost manufactures composite material.Ultrashort pulse will replace excimer laser in future and implement original position keratomileusis; Following all ophthalmologic operations all complete automatically by under ultrashort pulse finishing tool under software.The accurate use of pulse laser in medical science, scientific research and industry needs the accurate modulation to its phase place.At present, the adjustment of ultrashort pulse is mainly rested in the adjustment of power and pulse duration thereof, but the inevitable scattering produced due to optics can have an impact to the phase place of ultra-short pulse laser.The change of ultrashort pulse phase place can affect the accuracy of basic scientific research, can affect the accuracy of medical surgery what is more.Therefore, the Regulating study for ultrashort pulse phase place becomes extremely urgent.The domestic and international modulation technique for pulse laser phase place mainly following several method at present.
The first is modulated for direct paired pulses laser phase, is inner modulation.The modulating frequency that this method adopts is low, and by different pulse laser to affect modulating frequency, phase and magnitude all different.The power of pulse laser can be made to follow change while inner phase-modulation, and the quality that large dispersion has a strong impact on Output of laser can be produced.The method that this paired pulses laser phase carries out modulating is the modulator approach of initial stage, cannot the phase place of paired pulses laser accurately modulate.
The second modulates based on electrooptic modulator paired pulses laser phase, is external modulation.The cardinal principle of the method is the optical modulator of the electro optic effect work utilizing the crystal such as lithium niobate.Total be exactly the phase angle of phase adjusted light carrier changes along with the Changing Pattern of modulation signal.But during electrooptic modulation, the frequency spectrum of its angle modulated wave is formed by light carrier frequency item and the infinite multipair side frequency symmetrical on its both sides, and frequency spectrum becomes very complicated.Usual needs additionally use accurate Fabry-Perot-type cavity to select required frequency spectrum, and can produce the accuracy that space chirp reduces phase-modulation.The method that this paired pulses laser phase carries out modulating is very complicated and not easily realize.
The third is modulated for using acousto-optic modulator paired pulses laser phase, is external modulation.Acoustooptic modulation technology has high modulating frequency compared with the directly modulation technology to light source; Have higher extinction ratio compared with electrooptic modulation technology, lower driving power, more excellent output facula quality and temperature stability, price is also cheaper.But, laser power after acousto-optic modulator modulation can be lost and also can be changed along with the direction of the change laser propagation of frequency, come and go if adopted the shortcoming that the technology passed through can eliminate the change of laser propagation direction for two times, but the power of laser can be reduced further.The method that this paired pulses laser phase carries out modulating is by the power of very large reduction laser.
Summary of the invention
The technical problems such as the poor stability that pulse laser phase-modulation accuracy in present stage is low in order to solve, generation dispersion is serious, error large in the present invention, modulate, provide a kind of device and method of accurate modulation pulse laser phase place.
The device of a kind of accurate modulation pulse laser phase place of the present invention realizes by the following technical solutions: a kind of device of accurate modulation pulse laser phase place, comprises the first completely reflecting mirror be positioned in turn in pulse laser light path, is positioned at the first isolator, the first half-wave plate, the first polarization beam splitter prism on the first completely reflecting mirror reflected light path in turn; First polarization beam splitter prism is provided with the second quarter-wave plate and the first grating in turn corresponding on the emitting light path of the first completely reflecting mirror reverberation; The reflected light path of the first polarization beam splitter prism corresponding to the reverberation of the first grating is provided with the first quarter-wave plate and the first concave mirror in turn; The transmitted light path that first polarization beam splitter prism corresponds to the first concave mirror reverberation is provided with spatial light modulator; The reflected light path of spatial light modulator is provided with in turn the second half-wave plate and the second polarization beam splitter prism; Second polarization beam splitter prism is provided with the 4th quarter-wave plate and the second concave mirror in turn corresponding on the transmitted light path of spatial light modulator reverberation, second polarization beam splitter prism is provided with the 3rd quarter-wave plate and the second grating in turn corresponding on the reflected light path of the second concave mirror reverberation, second polarization beam splitter prism is provided with the second isolator and the second completely reflecting mirror in turn corresponding on the transmitted light path of the second optical grating reflection light, and the reflected light path of the second completely reflecting mirror is provided with the 3rd completely reflecting mirror; The reflected light path of the first concave mirror and the reflected light path composition of the second concave mirror accurately modulate the two-arm of the shaping light path of pulse laser phase place, and the Distance geometry optics angle of shaping light path two-arm is identical; Spatial light modulator is connected on its controller by BNC line.
Based on the pluses and minuses of existing several modulating pulse laser phase method, present applicant proposes a kind of device of accurate modulation pulse laser phase place.Pulse laser has the advantages such as pulse duration is narrow, peak power is high, repetition frequency range is wide, reliability is high, compact conformation volume is little, can according to the difference of effective object, select the different parameters such as waveform, pulse frequency, retrofit is carried out to material, thus obtains optimal process effect.Pulse laser Precision Machining has two major features.One is cold working.Traditional laser processing art (comprising nanometer laser) often makes metal, glass etc. process raw material melted by heat.The localized hyperthermia that psec (psec equals 1000 femtoseconds) and femtosecond laser produce can reach 6000 degrees Celsius, higher than Solar watch surface temperature, has little time to produce thermal diffusion just by direct boiling by action material surface.Two is hyperfine.Ultrafast laser can focus on superfine area of space, has very high peak power and extremely short laser pulse simultaneously, add man-hour tangent plane neat, non-microcracked, without material damage, without melt region.The accuracy of pulse laser machining can be improved by the precision modulation of paired pulses laser phase.
Utilize spatial light modulator shaped pulse laser not only can carry out frequency modulation(FM), delay pulse, the power of optimization pulse and live width and the phase place of paired pulses can carry out shaping by paired pulses laser.Spatial light modulator based on the micro-Display Technique of liquid crystal, can identical with position to the amplitude of laser time modulation, can as dynamic optics.The image needing to be loaded on liquid crystal panel can by Software for Designs such as Labview, and modulation intelligence can be loaded by video card DVI or USB interface.Spatial light modulator is the Primary Component realizing real-time optical information processing, pulse laser phase-modulation.Can reduce the space chirp of spatial modulation system in conjunction with grating, the focus of regulation and control concave mirror meticulous by micrometer and the distance of spatial light modulator, can obtain the pulse laser that phase place is accurately modulated.
The collimating structure (three completely reflecting mirrors) of light beam is for exporting the femtosecond laser after displacement modulation, and while the pulse that acquisition collimates and hot spot is very little, optimization device taken up space.
Further, a cavity shell having the first light hole and the second light hole is also comprised; Described first completely reflecting mirror, the first isolator, the first half-wave plate, first polarization beam splitter prism, the second quarter-wave plate, the first grating, the first quarter-wave plate, first concave mirror, spatial light modulator, the second half-wave plate, second polarization beam splitter prism, the 3rd quarter-wave plate, the second grating, 4th quarter-wave plate, the second concave mirror, the second isolator, second completely reflecting mirror, the 3rd completely reflecting mirror, BNC line, controller are all positioned at cavity; Pulse laser is entered by the first light hole, and the pulse laser after phase-modulation is exported by the second light hole.
During work, cavity plays the effect of insulation blocking.All parts makes an intensive portable device after can being fixed position in cavity, convenient mobile, eliminates the complicated procedures of forming of assembling simultaneously, has saved the time.
The device and method of a kind of accurate modulation pulse laser phase place of the present invention adopts following technical scheme to realize: a kind of method of accurate modulation pulse laser phase place, comprise the following steps: (a) pulse laser by after the first light hole incidence through by first completely reflecting mirror reflect after through the first half-wave plate and the first polarization beam splitter prism, second quarter-wave plate and the first grating are positioned on the transmitted light path of the first polarization beam splitter prism, light after first optical grating reflection arrives the first concave mirror by the first polarization beam splitter prism reflectance-transmittance first quarter-wave plate after the second quarter-wave plate, pulse laser after first concave mirror reflection arrives spatial light modulator through the first quarter-wave plate transmitted through the first polarization beam splitter prism, b the Transmission light after the reflection of () spatial light modulator arrives the second concave mirror through the second half-wave plate, the second polarization beam splitter prism, the 4th quarter-wave plate, through the second polarization beam splitter prism reflection after laser light the 4th quarter-wave plate of the second concave mirror reflection, reverberation passes the 3rd quarter-wave plate through after the 3rd quarter-wave plate by the second optical grating reflection, and through the second isolator after transmission second polarization beam splitter prism, reflected by the second completely reflecting mirror and the 3rd completely reflecting mirror in turn and collimate, c the Distance geometry optics angle of shaping light path two-arm is transferred to identical by (), d () regulates the gray scale of spatial light modulator by controller, and then realize the accurate modulation to incident pulse laser phase.
Further, the first completely reflecting mirror and vertical direction angle and have the deviation of 3 ~ 5 degree between the first grating and the angle of vertical direction; The angle of the second completely reflecting mirror and vertical direction and have the deviation of 3 ~ 5 degree between the second grating and the angle of vertical direction; Spatial light modulator is placed in the focus of the first concave mirror and the second concave mirror.
Principle, the Distance geometry optics angle of each arm in shaping light path two-arm is transferred to identical, in fact this process is very complicated, and the laser that orthopedic systems exports all can have very large space chirp and stray light usually.Therefore, careful and regulate light path to become very important cleverly, utilize the first total reflective mirror and the first grating to have the little oblique angle that dips down, therefore the first optical grating reflection light beam and the first polarization beam splitter prism have identical angle, prevent to warble.When spatial light modulator is placed in the focus of the first concave mirror and the second concave mirror, now maximum pulse modes and the pixel of spatial light modulator are coincide, and the modulation of paired pulses light is best.
The present invention adopts two-arm light path to carry out the phase place high efficiency shaping of paired pulses laser, has the following advantages: 1; The reflected light path of the first concave mirror and the reflected light path composition of the second concave mirror accurately modulate the two-arm of the shaping light path of pulse laser phase place, and the Distance geometry optics angle of shaping light path two-arm is identical.Shorten half light path by reflection, optimize the size of orthopedic systems.And make to regulate the coincidence between light path to be more prone to, simplify optical path adjusting step.2; By the angle regulating the reflected light path height of the reflected light path of the first grating and the first concave mirror to have 3-5 degree, warbling to the harmful effect of laser phase because of light path coincidence generation can be eliminated.In like manner the reflected light path of the second grating and the reflected light path height of the second concave mirror also have the angle of 3-5 degree.3. vertical optical path two arm system that is combined with grating of concave mirror, make light path can be tuned as x from x, z two dimension, y, z three-dimensional is adjustable, makes the phase-modulation of paired pulses light become meticulousr.
The invention provides a kind of structure based on the shaping of spatial light modulator pulsed light simple, easy and simple to handle, be easy to regulate, external interference is little, stability is strong, accuracy is high experimental provision and method, the problems such as this device and method eliminate the particular advantages of dispersion based on spatial light modulator, and the accuracy efficiently solving present stage internal modulation pulse laser phase place is low, dispersion large, the error that produces of warbling is large, efficiency is low.Whole device and method have structure simple, easy and simple to handle, be easy to regulate, external interference is little, stability is strong, accuracy is high advantage.
Accompanying drawing explanation
Fig. 1 is the structural representation of device of the present invention.In figure: 1-cavity, 2-first completely reflecting mirror, 3-first light hole, 4-first isolator, 5-first half-wave plate, 6-first concave mirror, 7-first quarter-wave plate, 8-first polarization beam splitter prism, 9-second quarter-wave plate, 10-first grating, 11-spatial light modulator, 12-BNC line, 13-controller, 14-second half-wave plate, 15-second grating, 16-the 3rd quarter-wave plate, 17-second concave mirror, 18-the 4th quarter-wave plate, 19-second polarization beam splitter prism, 20-second isolator, 21-second completely reflecting mirror, 22-the 3rd completely reflecting mirror, 23-second light hole.
specific embodiments
A device for accurate modulation pulse laser phase place, comprises the first completely reflecting mirror 2 be positioned in turn in pulse laser light path, is positioned at the first isolator 4, first half-wave plate 5, first polarization beam splitter prism 8 on the first completely reflecting mirror 2 reflected light path in turn; First polarization beam splitter prism 8 is provided with the second quarter-wave plate 9 and the first grating 10 in turn corresponding on the emitting light path of the first completely reflecting mirror 2 reverberation; The reflected light path of the first polarization beam splitter prism 8 corresponding to the reverberation of the first grating 10 is provided with the first quarter-wave plate 7 and the first concave mirror 6 in turn; The transmitted light path that first polarization beam splitter prism 8 corresponds to the first concave mirror 6 reverberation is provided with spatial light modulator 11; The reflected light path of spatial light modulator 11 is provided with in turn the second half-wave plate 14 and the second polarization beam splitter prism 19; Second polarization beam splitter prism 19 is provided with the 4th quarter-wave plate 18 and the second concave mirror 17 in turn corresponding on the transmitted light path of spatial light modulator 11 reverberation, second polarization beam splitter prism 19 is provided with the 3rd quarter-wave plate 16 and the second grating 15 in turn corresponding on the reflected light path of the second concave mirror 17 reverberation, second polarization beam splitter prism 19 is provided with the 3rd completely reflecting mirror 22 corresponding to the reflected light path transmitted light path of the second grating 15 reverberation being provided with in turn the second isolator 20 and the second completely reflecting mirror 21, second completely reflecting mirror 21; The reflected light path of the first concave mirror 6 and the reflected light path composition of the second concave mirror 17 accurately modulate the two-arm of the shaping light path of pulse laser phase place, and the Distance geometry optics angle of shaping light path two-arm is identical; Spatial light modulator 11 is connected on its controller 13 by BNC line 12.
Also comprise the cavity 1 shell having the first light hole 3 and the second light hole 23; Described first completely reflecting mirror 2, first isolator 4, first half-wave plate 5, first polarization beam splitter prism 8, second quarter-wave plate 9, first grating 10, first quarter-wave plate 7, first concave mirror 6, spatial light modulator 11, second half-wave plate 14, second polarization beam splitter prism the 19, three quarter-wave plate 16, second grating 15,4th quarter-wave plate 18, second concave mirror 17, second isolator 20, second completely reflecting mirror the 21, three completely reflecting mirror 22, BNC line 12, controller 13 are all positioned at cavity 1; Pulse laser is entered by the first light hole 3, and the pulse laser after phase-modulation is exported by the second light hole 23.
A kind of method of accurate modulation pulse laser phase place, comprise the following steps: (a) pulse laser by after the first light hole 3 incidence after being reflected by the first completely reflecting mirror 2 through the first half-wave plate 5 and the first polarization beam splitter prism 8, second quarter-wave plate 9 and the first grating 10 are positioned on the transmitted light path of the first polarization beam splitter prism 8, light after first grating 10 reflects arrives the first concave mirror 6 by the first polarization beam splitter prism 8 reflectance-transmittance first quarter-wave plate 7 after the second quarter-wave plate 2, pulse laser after first concave mirror 6 reflects arrives spatial light modulator 11 through the first quarter-wave plate 7 transmitted through the first polarization beam splitter prism 8, Transmission light b () spatial light modulator 11 reflects after arrives the second concave mirror 17 through the second half-wave plate 14, second polarization beam splitter prism 19, the 4th quarter-wave plate 18, reflect through the second polarization beam splitter prism 19 after laser light the 4th quarter-wave plate 18 that second concave mirror 17 reflects, reverberation reflects through the 3rd quarter-wave plate 16 through after the 3rd quarter-wave plate 16 by the second grating 15, and through the second isolator 20 after transmission second polarization beam splitter prism 19, reflect collimation by the second completely reflecting mirror 21 and the 3rd completely reflecting mirror 22 in turn, c the Distance geometry optics angle of shaping light path two-arm is transferred to identical by (), d () regulates the gray scale of spatial light modulator 11 by controller 13, and then realize the accurate modulation to incident pulse laser phase.
The angle of the first completely reflecting mirror 2 and vertical direction and have the deviation of 3 ~ 5 degree between the first grating 10 and the angle of vertical direction; The angle of the second completely reflecting mirror 21 and vertical direction and have the deviation of 3 ~ 5 degree between the second grating 15 and the angle of vertical direction; Spatial light modulator 11 is placed in the focus of the first concave mirror 6 and the second concave mirror 17.The pixel of now maximum pulse modes and spatial light modulator 11 is coincide, and the modulation of paired pulses light is best.
During concrete enforcement.The first described completely reflecting mirror 2, second completely reflecting mirror 21, the 3rd completely reflecting mirror 22 are the completely reflecting mirror of plating high-reflecting film.Described first grating 10, second grating 15 is laser scoring 1200/mm balzed grating.Described spatial light modulator is the SLM LCR 1080 of Holoeye Photonics AG company.
Claims (6)
1. accurately modulate the device of pulse laser phase place for one kind, it is characterized in that, comprise the first completely reflecting mirror (2) be positioned in turn in pulse laser light path, be positioned at the first isolator (4), the first half-wave plate (5), the first polarization beam splitter prism (8) on the first completely reflecting mirror (2) reflected light path in turn, the emitting light path of first polarization beam splitter prism (8) corresponding to the first completely reflecting mirror (2) reverberation is provided with in turn the second quarter-wave plate (9) and the first grating (10), the reflected light path of first polarization beam splitter prism (8) corresponding to the reverberation of the first grating (10) is provided with in turn the first quarter-wave plate (7) and the first concave mirror (6), first polarization beam splitter prism (8) is provided with spatial light modulator (11) corresponding to the transmitted light path of the first concave mirror (6) reverberation, the reflected light path of spatial light modulator (11) is provided with in turn the second half-wave plate (14) and the second polarization beam splitter prism (19), the transmitted light path of second polarization beam splitter prism (19) corresponding to spatial light modulator (11) reverberation is provided with in turn the 4th quarter-wave plate (18) and the second concave mirror (17), the reflected light path of second polarization beam splitter prism (19) corresponding to the second concave mirror (17) reverberation is provided with in turn the 3rd quarter-wave plate (16) and the second grating (15), the transmitted light path of second polarization beam splitter prism (19) corresponding to the second grating (15) reverberation is provided with in turn the second isolator (20) and the second completely reflecting mirror (21), the reflected light path of the second completely reflecting mirror (21) is provided with the 3rd completely reflecting mirror (22), the reflected light path of the first concave mirror (6) and the reflected light path composition of the second concave mirror (17) accurately modulate the two-arm of the shaping light path of pulse laser phase place, and the Distance geometry optics angle of shaping light path two-arm is identical, spatial light modulator (11) is connected on its controller (13) by BNC line (12).
2. the device of a kind of accurate modulation pulse laser phase place as claimed in claim 1, is characterized in that, also comprise the cavity (1) shell having the first light hole (3) and the second light hole (23), described first completely reflecting mirror (2), first isolator (4), first half-wave plate (5), first polarization beam splitter prism (8), second quarter-wave plate (9), first grating (10), first quarter-wave plate (7), first concave mirror (6), spatial light modulator (11), second half-wave plate (14), second polarization beam splitter prism (19), 3rd quarter-wave plate (16), second grating (15), 4th quarter-wave plate (18), second concave mirror (17), second isolator (20), second completely reflecting mirror (21), 3rd completely reflecting mirror (22), BNC line (12), controller (13) is all positioned at cavity (1), pulse laser is entered by the first light hole (3), and the pulse laser after phase-modulation is exported by the second light hole (23).
3. the device of a kind of accurate modulation pulse laser phase place as described in claim 1 or 2, is characterized in that, described the first completely reflecting mirror (2), the second completely reflecting mirror (21), the 3rd completely reflecting mirror (22) are the completely reflecting mirror of plating high-reflecting film; Described first grating (10), the second grating (15) are laser scoring 1200/mm balzed grating; Described spatial light modulator (11) is the SLM LCR 1080 of Holoeye Photonics AG company.
4. one kind adopts device as described in claim 2 accurately to modulate the method for pulse laser phase place, it is characterized in that, comprise the following steps: (a) pulse laser by after the first light hole (3) incidence after being reflected by the first completely reflecting mirror (2) through the first half-wave plate (5) and the first polarization beam splitter prism (8), second quarter-wave plate (9) and the first grating (10) are positioned on the transmitted light path of the first polarization beam splitter prism (8), light after first grating (10) reflection arrives the first concave mirror (6) by the first polarization beam splitter prism (8) reflectance-transmittance first quarter-wave plate (7) after the second quarter-wave plate (2), pulse laser after first concave mirror (6) reflection arrives spatial light modulator (11) through the first quarter-wave plate (7) transmitted through the first polarization beam splitter prism (8), b the Transmission light after () spatial light modulator (11) reflection is through the second half-wave plate (14), second polarization beam splitter prism (19), 4th quarter-wave plate (18) arrives the second concave mirror (17), the laser light the 4th quarter-wave plate (18) that second concave mirror (17) reflects reflects by the second polarization beam splitter prism (19), reverberation reflects through the 3rd quarter-wave plate (16) through after the 3rd quarter-wave plate (16) by the second grating (15), and at transmission second polarization beam splitter prism (19) afterwards through the second isolator (20), reflected by the second completely reflecting mirror (21) and the 3rd completely reflecting mirror (22) in turn and collimate, c the Distance geometry optics angle of shaping light path two-arm is transferred to identical by (), d () regulates the gray scale of the Reflector Panel of spatial light modulator (11) by controller (13), and then realize the accurate modulation to incident pulse laser phase.
5. the method for a kind of accurate modulation pulse laser phase place as claimed in claim 4, is characterized in that, the angle of the first completely reflecting mirror (2) and vertical direction and have the deviation of 3 ~ 5 degree between the first grating (10) and the angle of vertical direction; The angle of the second completely reflecting mirror (21) and vertical direction and have the deviation of 3 ~ 5 degree between the second grating (15) and the angle of vertical direction; Spatial light modulator (11) is placed in the first concave mirror (6) with in the focus of the second concave mirror (17).
6. the method for a kind of accurate modulation pulse laser phase place as described in claim 4 or 5, is characterized in that, described the first completely reflecting mirror (2), the second completely reflecting mirror (21), the 3rd completely reflecting mirror (22) are the completely reflecting mirror of plating high-reflecting film; Described first grating (10), the second grating (15) are laser scoring 1200/mm balzed grating; Described spatial light modulator (11) is the SLM LCR 1080 of Holoeye Photonics AG company.
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| US11872655B2 (en) | 2018-07-05 | 2024-01-16 | Hamamatsu Photonics K.K. | Laser processing device |
| CN115166985A (en) * | 2022-06-28 | 2022-10-11 | 四川大学 | Method for preparing polarization-dependent attenuation element by utilizing ultrafast laser direct writing |
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Application publication date: 20150819 |