CN104848939B - The four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates - Google Patents

The four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates Download PDF

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CN104848939B
CN104848939B CN201510236282.XA CN201510236282A CN104848939B CN 104848939 B CN104848939 B CN 104848939B CN 201510236282 A CN201510236282 A CN 201510236282A CN 104848939 B CN104848939 B CN 104848939B
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yoke
permanent magnet
magnetic
coil
central magnetic
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CN104848939A (en
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谭久彬
何张强
崔俊宁
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates belongs to vibration measurement technical field, the open magnetic field type magnetic structure of a kind of rectangle is proposed, four permanent magnet symmetries are arranged on two outer yoke two ends and positioned opposite with magnetic pole, four symmetrical closed magnetic circuits are formed by yoke, the high-intensity magnetic field distribution of high evenness is produced in air gap, the yoke surfaces adjacent with air gap is provided with the array microstructure of deep trench form, effectively can suppress eddy current loss, central magnetic yoke is provided with compensating coil, form compensating field and synchronized tracking compensation is carried out on the impact of armature reaction, organically blend with static pressure air-bearing guiding technique and design, obtain outstanding Electromagnetic Drive mechanics performance and high motion guide precision simultaneously, the present invention can take into account Long Distances, high thrust, linear electromagnetic driving force specislity and high motion guide precision, for low frequency/superlow frequency vibrating calibration provides the high-performance low-frequency vibration calibration console of a kind of high precision, Long Distances.

Description

The four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates
Technical field
The invention belongs to vibration calibrating device field, relate generally to the four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that a kind of magnetic field tracking compensates.
Background technology
The vibration calibration platform producing standard vibration signal is the nucleus equipment realizing high precision vibration calibration, and high precision vibration calibration platform generally all adopts electromagnetic vibration generator system form.In recent years, Aero-Space, build a bridge, the field such as protection against and mitigation of earthquake disasters all proposes low frequency/demand of superlow frequency vibrating calibration.For improving the signal to noise ratio (S/N ratio) of standard vibration signal, ensureing the calibration accuracy of low frequency/superlow frequency vibrating, requiring that vibration calibration platform is under the prerequisite ensureing thrust and precision, has stroke large as far as possible.In the design process of Long Distances vibration calibration platform, there is amplitude, magnetic field homogeneity, electromagnetic actuation force size, linear electromagnetic driving force specislity, motion guide precision, contradiction between processing and assembly precision, key wherein and difficult point are how by rational Electromagnetic Design and structural design, and by ensureing processing and assembly precision, the strong Magnetic Induction Density Distribution of high evenness is realized in long air gap, and the electromagnetic actuation force size exported in total travel after making coil electricity is directly proportional to the electric current in working coil, and have nothing to do with the position residing for working coil, namely desirable linear electromagnetic driving force specislity is obtained.
The He Wen of Zhejiang University etc. propose a kind of Long Distances vibration calibration platform technical scheme (1. Zhejiang University, " two magnetic route structure of large-stroke electromagnetic vibration ", China Patent No.: ZL200710069095.2; 2. Zhejiang University, " a kind of electromagnetic vibration generator system ", China Patent No.: ZL200820087256.0; 3. Zhejiang University, " there is the shaking table based on linear grating chi feed back control system ", China Patent No.: ZL201110115072.7; 4.WenHe, etal. " Closed-Double-MagneticCircuitforaLong-strokeHorizontalEl ectromagneticVibrationExciter ", IEEETransactionsonMagnetics, 2011,49 (8): 4865-4872).In this technical scheme, cylindrical magnet, central magnetic pole (yoke) and tubular outer magnetic pole coaxial cable assemble, the same magnetic pole of two magnets relatively, be arranged on central magnetic pole two ends, magnet center is provided with through hole, non-magnetic bolt is adopted to be fixed, it is inner that central magnetic pole is coaxially assemblied in tubular outer magnetic pole, tubular mounting coil is arranged in air gap in central magnetic pole, coil is fixedly connected with air supporting cover and is led by air-float guide rail, stressed and produce motion in magnetic field after coil electricity, produce standard vibration signal.This technical scheme adopts two magnet complementary, leakage field is less, magnet utilization factor is high, can realize larger thrust, larger stroke and lower waveform distortion index, is one of vibration calibration platform technical scheme with independent intellectual property right and higher degree of being practical of domestic open report.
The Hans-J.vonMartens etc. of German federal physical technique research institute (PTB) it is also proposed a kind of Long Distances vibration calibration platform technical scheme (1.Hans-J.vonMartens, etal, " TraceabilityofVibrationandShockMeasurementsbyLaserInterf erometry ", Measurement, 2000,28:3-20).This technical scheme adopts cylindrical soft magnetic core, cylindrical permanent-magnet body and cylindrical shape soft magnetic tube, the same magnetic pole of two permanent magnets relatively, be arranged on the two ends of cylindrical shape soft magnetic tube, soft magnetic core is coaxially assemblied in the inside of soft magnetic tube, closed magnetic circuit is formed by the soft magnetic part at two ends, coil rack and working coil are cylindrical shape, coil rack is sleeved in central magnetic yoke, and is fixedly connected with air supporting moving component, is led by air-float guide rail.Adopt the amplitude of the Long Distances vibration calibration platform of this technical scheme comparatively large, coordinate high-performance permanent magnet and yoke material, the technical indicator such as transverse vibration ratio, waveform distortion of higher level can be realized.
The weak point that above-mentioned two kinds of technical schemes exist is: 1) cylindrical shape outer yoke need carry out long inside dimension processing, processing difficulties, and precision is difficult to ensure; 2) when adopting cylindrical permanent magnet, permanent magnet need processing through hole and be bolted in yoke by non-magnetic, assemble complicated and can have an impact to magnetic circuit; When adopting cylindrical permanent-magnet body, the sintering of large scale cylindrical permanent-magnet body, process, magnetize and assemble all comparatively difficulty; 3) cylindrical shape outer yoke need be sleeved in central magnetic yoke, as permanent magnet adopts the mode of assembling afterwards that first magnetizes, assembles very difficult, and assembly precision is difficult to ensure; As adopted the permanent magnet of AlNiCo material, the mode of first assembling and magnetizing afterwards can be adopted, but due to AlNiCo material permanent magnet coercive force lower, poor performance, serious restriction mechanical property and index.
The KennethJosephMetzgar etc. of APS company of the U.S. it is also proposed a kind of Long Distances vibration calibration platform technical scheme (KennethJosephMetzgaretal, " ElectrodynamicForceGenerator ", U.S. Patent number: US3816777).In this technical scheme electromagnetic drive structures is made up of 4 groups of identical sub-assemblies, each sub-assemblies is made up of two wedge-shaped poles sheets, linking block (soft magnetic material), a magnet, be connected block separate and connect the thick end of two wedge-shaped poles sheets, form the pincer structure that has long air gap, magnet to be arranged in air gap and to be fixed on a wedge-shaped poles sheet surface, and magnet can adopt the mode of first assembling and magnetizing afterwards.After 4 groups of sub-assemblies are stacked between two, adopt bolt that two stacked sub-assemblies are fixed formation two mutually isostructural parts, again the vice jaw part of these two parts is docked, and adopt the bolt crouched in wedge-shaped poles sheet to be connected by docking structure fastening, form complete electromagnetic drive structures.Electromagnetic drive structures after docking has two long air gaps, and moving-coil (working coil) is arranged in air gap, and is led by bearing and bearing rod in the axial direction.This technical scheme easily realizes high magnetic flux density in air gap, and has carried out more ripe commercialization and popularization.
This technical scheme exist weak point be: 1) electromagnetic drive structures by multiple textural association, be spliced to form, complex structure; Fritter permanent magnet need adopt gluing or alternate manner to be arranged on wedge-shaped poles sheet, and assembling is complicated, is difficult to ensure assembly precision; 2) in air gap, the static-magnetic induction of a certain position is directly related with the working point of this place's permanent magnet, and the homogeneity of whole air gap internal magnetic field is difficult to ensure, higher to the coherence request of the materials and process of fritter permanent magnet; 3) permanent magnet is directly in the face of air gap, and the complementary field produced after working coil energising can produce pressure to it and magnetize or demagnetizing effect, when passing to larger current in working coil, easily makes permanent magnet produce irreversible demagnetization; 4) during working coil energising, the magnetic flux of coil side increases, opposite side magnetic flux reduces, because permanent magnet is directly in the face of air gap, the magnetic circuit that magnetic flux increases side is easily saturated, the magnetic flux that the magnetic flux that now coil side increases reduces than opposite side is few, cause the average magnetic induction intensity of coil position to reduce, and then make the standard vibration signal of generation produce waveform distortion.
As previously mentioned, in the design process of Long Distances vibration calibration platform, there is amplitude, magnetic field homogeneity, electromagnetic actuation force size, linear electromagnetic driving force specislity, motion guide precision, contradiction between processing and assembly precision, difficult point and the key of design are by rational Electromagnetic Design and structural design, the strong Magnetic Induction Density Distribution of high evenness is realized in long air gap, and the electromagnetic actuation force exported in total travel after making working coil be energized is directly proportional to size of current, and have nothing to do with the position residing for working coil, namely desirable linear electromagnetic driving force specislity is obtained.And prior art all exists various problems and shortcomings, the linearity index exporting electromagnetic actuation force in air gap after the homogeneity of static Magnetic Induction Density Distribution, coil electricity has been difficult to further lifting.Key issue wherein has 3 points:
(1) in long air gap, the homogeneity of main magnetic circuit Magnetic Induction Density Distribution is difficult to ensure.Before coil electricity, permanent magnet excitation forms stable main magnetic circuit Magnetic Induction Density Distribution, and along with the increase of vibration calibration platform stroke, the homogeneity of long air gap internal magnetic field is difficult to ensure, exports the linearity of electromagnetic actuation force after directly affecting coil electricity; Have researchist to attempt compensating by adjusting current waveform, but effect is difficult to ensure, especially not good enough to order magnetic field heterogenicity error compensation effect, not yet propose effectively both at home and abroad at present and the compensation method had compared with high practicability.
(2) armature reaction restriction after working coil energising exports the linearity of electromagnetic actuation force and exports the degree of distortion of vibrational waveform index.Complementary field can be produced after working coil energising, this complementary field superposes with main field and is coupled, produce main field and increase magnetic or demagnetizing effect, make diverse location in air gap, the especially Magnetic Induction Density Distribution of working coil position become uneven, this phenomenon is called armature reaction.Affect by armature reaction, in stroke, diverse location is when added by coil, live current density is identical, and the electromagnetic actuation force of output is inconsistent; And be not directly proportional to current density in the size of same position electromagnetic actuation force, exist certain non-linear.Armature reaction is that vibration calibration platform exports one of key factor of vibrational waveform generation degree of distortion, and its impact increases with the increase of drive current, is a difficult problem in the design of vibration calibration platform.
(3) long yoke and large scale permanent magnet are processed and are difficult to ensure with assembling difficulty, precision.In Long Distances vibration calibration platform, long central magnetic yoke need adopt reasonable manner to fix with two ends supporting way, and for ensureing continuity and the integrality of magnetic flux, the key position that magnetic flux is intensive should avoid the mounting structures such as processing through hole/threaded hole as far as possible; The sintering of large scale permanent magnet, processing are all very difficult with assembling, and yield rate is very low, and permanent magnet is hard brittle material and expensive, and assembly method and unreasonable structure easily cause damage, generally should not process the mounting structure of the forms such as through hole on permanent magnet; Will obtain larger electromagnetic actuation force, the general strong magnetic permanent magnet adopting the materials such as NdFeB, needing to overcome huge magnetic attraction in strong magnetic permanent magnet Assembly of the parts process, is a difficult problem of the art simultaneously.
In addition, eddy current loss is also the difficult problem affecting vibration calibration platform precision and performance.When vibration calibration platform works, what pass in working coil is alternation drive current, current amplitude is maximum reaches tens amperes, coil in long air gap in the axial direction with sinusoidal rule to-and-fro movement, according to Theory of Electromagnetic Field, the alternating magnetic field that exchange current and coil movement produce can in yoke surfaces, and especially adjacent with air gap yoke surfaces can produce current vortex, causes eddy current loss.Eddy current loss can produce the thermal losses that power reaches as high as a few hectowatt on the one hand, and thermal value is surprising, and then brings a series of thermal perturbation and thermal deformation problem; The transient field problem that another aspect alternating magnetic field and current vortex cause, the result that actual performance index can be made relatively to obtain by traditional design theory, analytical approach produces relatively large deviation, has a strong impact on design accuracy and effect.Eddy current loss is a difficult problem in the design of vibration calibration platform, not yet finds effective solution both at home and abroad at present.
To sum up, restrict by the problems referred to above, the standard low frequency vibration difficulty in the indexs such as waveform distortion adopting prior art to produce has further breakthrough, is difficult to the high-precision calibration meeting low frequency/superlow frequency vibrating, the demand with the vibration calibration of very low frequency (VLF) and ultraprecise feature especially of future generation.Therefore, how to pass through the innovation of the links such as method, structure, material and optimal design, propose the vibration calibration platform technical scheme with super large stroke, ultralow frequency of operation and superhigh precision, the development for vibration measurement technology has great importance.One or several in the problems referred to above achieves a solution, and the performance of Long Distances vibration calibration platform all can be made to be significantly improved, and makes low frequency/superlow frequency vibrating collimation technique obtain substantive breakthroughs.
Summary of the invention
The object of the invention is for prior art Problems existing, the four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console technical scheme providing a kind of magnetic field tracking to compensate, in the present invention, key components and parts structure is simple, easy guarantee processing and assembly precision, by Electromagnetic Design and the innovation of structural design and the effective integration of Electromagnetic Drive Technology and static pressure air-bearing guiding technique, Long Distances can be taken into account, high thrust, linear electromagnetic driving force specislity and high motion guide precision, effectively can solve prior art Problems existing with not enough, especially there is the characteristic that outstanding compensation armature reaction affects standard vibration waveform distortion, for low frequency/superlow frequency vibrating calibration provides a kind of high precision, the superlow frequency vibrating calibration console of Long Distances.
Technical solution of the present invention is:
The four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that a kind of magnetic field tracking compensates, by pedestal, electromagnetic drive structures, static pressure air-float guide rail and worktable are formed, electromagnetic drive structures and static pressure air-float guide rail are arranged on pedestal in the mode of axis being parallel, worktable is arranged on the upper surface of sliding sleeve in static pressure air-float guide rail, described pedestal is by base plate, lower rebound, framework, upper cover plate and guide support from bottom to top stacked installation are formed, electromagnetic drive structures is arranged on the upper surface of lower rebound, the inside of framework, the middle part of lower rebound is provided with rectangular aperture, the length of rectangular aperture is greater than the range of movement of electromagnetic drive structures coil skeleton, static pressure air-float guide rail is arranged on framework by two guide support in the mode that two ends support, static pressure air-float guide rail is made up of guide rail, sliding sleeve and sliding sleeve web member, sliding sleeve to be sleeved on slidably on guide rail and mutually to be lubricated and support by static pressure air-bearing effect with guide rail, coil rack in sliding sleeve and electromagnetic drive structures is rigidly connected by sliding sleeve web member, sliding sleeve web member is through two slits of upper cover plate, and the length of slit is greater than the range of movement of coil rack, electromagnetic drive structures is by the permanent magnet of square-section, central magnetic yoke, inner yoke, outer yoke, the coil rack in end yoke and square shape cross section is formed, overall one-tenth axially symmetric structure, four permanent magnet symmetries are arranged between the two ends of two outer yokes and two end yokes, the same magnetic pole of two permanent magnets at same outer yoke two ends is positioned opposite, two outer yokes are identical with the pole orientation of two permanent magnets of one end, two end faces of each permanent magnet respectively with outer yoke, the end face close contact that end yoke is corresponding, two outer yokes, four permanent magnets and two hold yoke to form square shape structure, central magnetic yoke is arranged on the long axis of square shape structure, central magnetic yoke two ends hold yoke to be rigidly connected with two respectively, the length of inner yoke is less than the length of outer yoke, two inner yokes symmetry is arranged on two relative surfaces of two outer yokes, and and separated by the air gap of the width such as two between central magnetic yoke, coil rack is sleeved in central magnetic yoke slidably, coil rack is wound with working coil, accurate controlled drive current is passed in working coil, the central magnetic yoke adjacent with air gap, the surface of inner yoke is provided with the array microstructure of deep trench form, deep trench is along the length direction periodic arrangement of air gap, central magnetic yoke is wound with compensating coil, in compensating coil the electric current that leads to contrary with the direction of current in working coil, phase-locking is followed the tracks of, amplitude becomes to determine ratio.
The mounting means of described permanent magnet is the permanent magnet installing frame of employing four square shape cross sections, non-magnet_conductible material, by the inside of permanent magnet adhesive asserably at permanent magnet installing frame, is fixed by permanent magnet by fixed permanent magnet installing frame; The mounting means of described central magnetic yoke is the yoke installing frame of employing two square shape cross sections, non-magnet_conductible material, two yoke installing frames are sleeved on central magnetic yoke two ends and are rigidly connected with central magnetic yoke, yoke installing frame is fixed on the upper surface of base plate through the rectangular aperture on lower rebound, thus the mode that central magnetic yoke supports with two ends is fixed.
Described permanent magnet adopts multiple fritter permanent magnet to be spliced to form with bonding way.
The good result of technological innovation of the present invention and generation is:
(1) the present invention proposes the open magnetic field type electromagnetic drive structures design of a kind of rectangle, and permanent magnet and yoke part section are rectangle, and structure is simple, and processing, with easy to assembly, is easy to ensure processing and assembly precision; The permanent magnet laggard luggage that can first magnetize is joined, and therefore can adopt the high-performance permanent magnet of the materials such as NdFeB, thus obtain high gap density and large electromagnetic actuation force; The problems such as the long size cylindrical shape yoke solving prior art existence is difficult to processing, and key components and parts processing and assembly precision are difficult to ensure, strong magnetic permanent magnet assembling is difficult, the uniformity index of higher main magnetic circuit Magnetic Induction Density Distribution can be obtained in long air gap.This is one of the present invention's innovative point being different from prior art.
(2), in electromagnetic drive structures of the present invention, permanent magnet is not directly in the face of air gap, and the pressure producing complementary field after not bearing working coil energising is filled, demagnetizing effect; During working coil energising, the magnetic flux of coil side increases, opposite side magnetic flux reduces, and magnetic flux increases and the effect of reduction is cancelled out each other, and the average magnetic induction intensity of coil position is remained unchanged substantially; Solve permanent magnet in prior art and, directly in the face of air gap, when working current is larger in working coil, easily produce irreversible demagnetization, export the problems such as the poor linearity of electromagnetic actuation force; realize the linearity index of higher output electromagnetic actuation force.This is the innovative point two that the present invention is different from prior art.
(3) the present invention adopts yoke installing frame reliably to install fixing by central magnetic yoke with two ends supporting way; Adopt permanent magnet installing frame to carry out installation to permanent magnet to fix, by permanent magnet adhesive asserably behind permanent magnet installing frame inside, integrally can push designated mounting position to from the space between central magnetic yoke and end yoke, under the effect of magnetic attraction component vertically, permanent magnet and permanent magnet installing frame assembly can slip into installation site reposefully, assembling process is simple and reliable, greatly reduces the assembly difficulty of permanent magnet; solve long central magnetic yoke and large scale hard brittle material permanent magnet part and fixing and strong magnetic permanent magnet Assembly of the parts mistake is reliably installed journey need overcome a difficult problem for huge magnetic attraction.This is the innovative point three that the present invention is different from prior art.
(4) the array microstructure of the surface of the present invention in the inner yoke adjacent with air gap, length direction periodic arrangement deep trench form along air gap, theoretical with simulation analysis and test and all show, the method effectively can suppress the generation of current vortex, greatly reduce the impact of eddy current loss, both thermal perturbation and thermal deformation problem that eddy current loss brings had been efficiently solved, make again the actual performance index of electromagnetic drive structures and Theoretical Design result have higher consistance, realize higher design accuracy; solve eddy current loss this a difficult problem in the design of vibration calibration platform.This is the innovative point four that the present invention is different from prior art.
(5) the present invention arranges compensating coil in central magnetic yoke, institute's galvanization is contrary with the direction of current loaded in working coil, phase-locking is followed the tracks of, amplitude is proportional, theoretical research and experimental result all show, synchronized tracking compensation can be carried out to the impact producing complementary field after working coil energising and affect phenomenon, the i.e. armature reaction of main magnetic field distribution in the compensating field that compensating coil is formed: the linear electromagnetic driving force specislity of approximate ideal can be realized, efficiently solve armature reaction and electromagnetic vibration generator system outputting standard is shaken that moves waveform distortion affects problem.This is the innovative point five that the present invention distinguishes prior art.
(6) the present invention is by Electromagnetic Drive Technology and static pressure air-bearing guiding technique effective integration, utilize static pressure air-float guide rail without friction, without characteristics such as wearing and tearing, high motion guide precision, outstanding Electromagnetic Drive mechanics characteristic and high motion guide precision can be obtained simultaneously, further ensure the degree of distortion index of vibration calibration platform outputting standard vibrational waveform.This is the innovative point five that the present invention distinguishes prior art.
Accompanying drawing explanation
Fig. 1 is the detonation configuration schematic diagram of the four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates;
Fig. 2 is the one-piece construction schematic diagram of the four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates;
Fig. 3 is the overall schematic of electromagnetic drive structures;
Fig. 4 is the diagrammatic cross-section of electromagnetic drive structures;
Fig. 5 is the schematic diagram of permanent magnet pole arrangement and main magnetic circuit;
Fig. 6 is the schematic diagram of a deep trench embodiment on the inner yoke surface adjacent with air gap;
Fig. 7 is the schematic diagram of another embodiment of deep trench on the inner yoke surface adjacent with air gap;
Fig. 8 is the array microstructure schematic diagram of deep trench form in inner yoke;
Fig. 9 adopts permanent magnet installing frame, yoke installing frame to install fixing schematic diagram to permanent magnet and central magnetic yoke;
Figure 10 is the structural representation of permanent magnet installing frame;
Figure 11 is the structural representation of yoke installing frame;
Figure 12 is the structural representation of a coil rack embodiment.
In figure, piece number illustrates: 1 permanent magnet, 2 central magnetic yoke, 3 inner yokes, 4 outer yokes, 5 end yokes, 6 coil racks, 7 air gaps, 8 working coils, 9 permanent magnet installing frames, 10 yoke installing frames, 11 first magnetic circuits, 12 second magnetic circuits, 13 electromagnetic drive structures, 14 static pressure air-float guide rails, 15 worktable, 16 pedestals, 17 base plates, 18 times rebounds, 19 frameworks, 20 upper cover plates, 21 guide support, 22 rectangular apertures, 23 guide rails, 24 sliding sleeves, 25 sliding sleeve web members, 26 slits, 27 deep trench, 28 the 3rd magnetic circuits, 29 the 4th magnetic circuits, 30 compensating coils.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail, and provides embodiment.
The four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that a kind of magnetic field tracking compensates, by pedestal 16, electromagnetic drive structures 13, static pressure air-float guide rail 14 and worktable 15 are formed, electromagnetic drive structures 13 and static pressure air-float guide rail 14 are arranged on pedestal 16 in the mode of axis being parallel, worktable 15 is arranged on the upper surface of sliding sleeve 24 in static pressure air-float guide rail 14, described pedestal 16 is by base plate 17, lower rebound 18, framework 19, upper cover plate 20 and guide support 21 from bottom to top stacked installation are formed, electromagnetic drive structures 13 is arranged on the upper surface of lower rebound 18, the inside of framework 19, the middle part of lower rebound 18 is provided with rectangular aperture 22, the length of rectangular aperture 22 is greater than the range of movement of electromagnetic drive structures 13 coil skeleton 6, static pressure air-float guide rail 14 is arranged on framework 19 by two guide support 21 in the mode that two ends support, static pressure air-float guide rail 14 is made up of guide rail 23, sliding sleeve 24 and sliding sleeve web member 25, sliding sleeve 24 to be sleeved on slidably on guide rail 23 and mutually to be lubricated and support by static pressure air-bearing effect with guide rail 23, sliding sleeve 24 is rigidly connected by sliding sleeve web member 25 with the coil rack 6 in electromagnetic drive structures 13, sliding sleeve web member 25 is through two slits 26 of upper cover plate 20, and the length of slit 26 is greater than the range of movement of coil rack 6, electromagnetic drive structures 13 is by the permanent magnet 1 of square-section, central magnetic yoke 2, inner yoke 3, outer yoke 4, the coil rack 6 in end yoke 5 and square shape cross section is formed, overall one-tenth axially symmetric structure, four permanent magnet 1 symmetries are arranged between the two ends of two outer yokes 4 and two end yokes 5, the same magnetic pole of two permanent magnets 1 at same outer yoke 4 two ends is positioned opposite, two outer yokes 4 are identical with the pole orientation of two permanent magnets 1 of one end, two end faces of each permanent magnet 1 respectively with outer yoke 4, the end face close contact of end yoke 5 correspondence, two outer yokes 4, four permanent magnets 1 and two hold yoke 5 to form square shape structure, central magnetic yoke 2 is arranged on the long axis of square shape structure, central magnetic yoke 2 two ends hold yoke 5 to be rigidly connected with two respectively, the length of inner yoke 3 is less than the length of outer yoke 4, two inner yoke 3 symmetries are arranged on two relative surfaces of two outer yokes 4, and and separated by the air gap 7 of the width such as two between central magnetic yoke 2, coil rack 6 is sleeved in central magnetic yoke 2 slidably, coil rack 6 is wound with working coil 8, accurate controlled drive current is passed in working coil 8, the central magnetic yoke 2 adjacent with air gap 7, the surface of inner yoke 3 is provided with the array microstructure of deep trench 27 form, deep trench 27 is along the length direction periodic arrangement of air gap 7, central magnetic yoke 2 is wound with compensating coil 30, in compensating coil 30 the electric current that leads to contrary with the direction of current in working coil 8, phase-locking is followed the tracks of, amplitude becomes to determine ratio.
The mounting means of described permanent magnet 1 is the permanent magnet installing frame 9 of employing four square shape cross sections, non-magnet_conductible material, by permanent magnet 1 adhesive asserably in the inside of permanent magnet installing frame 9, is fixed by permanent magnet 1 by fixed permanent magnet installing frame 9; The mounting means of described central magnetic yoke 2 is yoke installing frames 10 of employing two square shape cross sections, non-magnet_conductible material, two yoke installing frames 10 are sleeved on central magnetic yoke 2 two ends and are rigidly connected with central magnetic yoke 2, yoke installing frame 10 is fixed on the upper surface of base plate 17 through the rectangular aperture 22 on lower rebound 18, thus the mode that central magnetic yoke 2 supports with two ends is fixed.
Described permanent magnet 1 adopts multiple fritter permanent magnet to be spliced to form with bonding way.
One embodiment of the present of invention are provided below in conjunction with Fig. 1 ~ Fig. 5.In the present embodiment, the four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration console that magnetic field tracking compensates vibrates for generation of the standard low frequency of horizontal direction, and peak swing is 1.2m.
In electromagnetic drive structures 13, permanent magnet 1 is the strong magnetic permanent magnet of NdFeB material, and the residual magnetization of material is 1.17T, and coercive force is 890kA/m.Four permanent magnet 1 symmetries are arranged between the two ends of two outer yokes 4 and two end yokes 5, the S of two permanent magnets 1 at same outer yoke 4 two ends is extremely positioned opposite, two outer yokes 4 are identical with two permanent magnet 1 magnetic pole arrangements of one end, such as, in figure the S of two permanent magnets 1 of two outer yoke 4 left ends extremely all to the right, N extremely all left.Two end faces of each permanent magnet 1 and an end face of outer yoke 4 and hold an end face close contact of yoke 5.Two outer yokes, 4, four permanent magnets 1 and two hold yoke 5 to form square shape structure.Central magnetic yoke 2, two inner yokes 3, two outer yokes 4, two end yoke 5 all adopts high magnetic permeability electrical pure iron material DT4C to make, and maximum relative permeability can reach 12000, and saturation flux amount is 2.5T.The cross section of central magnetic yoke 2, four permanent magnets 1, two inner yokes 3, two outer yokes 4, two end yoke 5 is rectangle, and central magnetic yoke 2, two end yoke 5 is coaxially assembled.Separated by a long air gap 7 between each inner yoke 3 and central magnetic yoke 2, the width of air gap 7 is 15mm.Two inner yokes 3 and two outer yokes 4 adopt screw to be rigidly connected respectively, also can adopt other connected mode in actual implementation process, or adopt one piece of complete material that inner yoke 3 is become a part with outer yoke 4 overall processing.The two ends of central magnetic yoke 2 and two hold yoke 5 to adopt screw to be rigidly connected respectively.Four permanent magnets 1 form four closed magnetic circuits by closed magnetic yoke structure, produce the strong Magnetic Induction Density Distribution of high evenness in air gap 7
Static pressure air-float guide rail 14 is fixed on framework 19 by two guide support 21 in the mode that two ends support, the axis of guide rail 23 and the axis of electromagnetic drive structures 13 parallel to each other.Guide rail 23 is T-shaped guide rail, and length is 2 meters, and sliding sleeve 24 is sleeved on guide rail 23 slidably, is lubricated mutually and carrying therebetween by static pressure air-bearing effect.Worktable 15 adopts screw to be fixed on the upper surface of sliding sleeve 24, and upper cover plate 20 has two elongated slits 26, the length of slit 26 is 1.4 meters, and sliding sleeve 24 is by sliding sleeve web member 25, adopt screw to be rigidly connected through slit 26 and coil rack 6.
The effect of pedestal 16 is to provide integral installation basis and framework.Upper cover plate 20 is between static pressure air-float guide rail 14 and electromagnetic drive structures 13.Electromagnetic drive structures 13 is arranged on the inside of framework 19, two guide support 21 adopt screw to be fixed on framework 19 two ends upper surface, framework 19 and lower rebound 18, base plate 17 adopt screw to be rigidly connected and are fixed together, the middle part of lower rebound 18 is provided with rectangular aperture 22, yoke installing frame 10 is fixed on the upper surface of base plate 17 through rectangular aperture 22, thus the mode that central magnetic yoke 2 supports with two ends is fixed,, mechanical interference can not be there is with base plate 17 in therefore coil rack 6 and when the axial-movement of the centrally yoke 2 of working coil 8 thereon.
In the present embodiment, the magnetic line of force of the main magnetic circuit that permanent magnet excitation is formed process path as shown in Figure 5.For the first magnetic circuit 11, the magnetic line of force is from the N pole of a permanent magnet 1, and successively through end yoke 5, central magnetic yoke 2, inner yoke 3, outer yoke 4, the S pole then getting back to permanent magnet 1 forms closed magnetic circuit.First magnetic circuit 11 and the second magnetic circuit 12, the 3rd magnetic circuit 28 and the symmetrical form of the 4th magnetic circuit 29 in figure, the first magnetic circuit 11 and the 3rd magnetic circuit 28, second magnetic circuit 12 and the 4th magnetic circuit 29 are in upper and lower symmetric form.
Coil rack 6 adopts 99 aluminium oxide ceramics to make, and cross section is square shape, and the square aperture at center makes coil rack 6 can be sleeved on slidably in central magnetic yoke 2.Working coil 8 adopts insulated copper enameled wire to be wound at coil rack 6 outside surface, and cross section is also square shape, and winding thickness is 5mm, and logical maximum current density is 5A/mm 2.After electromagnetic vibration generator system electromagnetic drive structures has assembled, coil rack 6 and working coil 8 have two limits to be arranged in air gap 7.During electromagnetic vibration generator system work, control signal is after power amplifier amplifies, the power current that output effective value is up to tens A is loaded in working coil 8, according to Theory of Electromagnetic Field, the working coil 8 be energized in magnetic field is subject to the effect of horizontal direction Lorentz force, thus export accurate controlled electromagnetic actuation force, by control alive size and Orientation can the size and Orientation of precise hard_drawn tuhes electromagnetic actuation force.If control signal adopts standard sine electric signal, working coil 8 and coil rack 6 vibrate producing standard sine under the effect of electromagnetic actuation force vertically, calibrate for low-frequency vibration.
During electromagnetic vibration generator system work, complementary field can be produced after working coil 8 loading current, this magnetic field can affect the distribution of the main field that permanent magnet 1 produces, and this phenomenon is called armature reaction, and armature reaction is the principal element of the waveform distortion affecting the vibration of electromagnetic vibration generator system outputting standard.The present invention is provided with compensating coil 30 in central magnetic yoke 2, and compensating coil 30 adopts insulated copper enameled wire to be wound at central magnetic yoke 2 outside surface, and cross section is also square shape, and thickness is 1.5mm, and logical maximum current density is 4A/mm 2in compensating coil 30 the electric current that leads to contrary with the direction of current in working coil 8, phase-locking is followed the tracks of, amplitude becomes to determine ratio, synchronized tracking compensation can be carried out to the complementary field that working coil 8 produces in the compensating field that compensating coil 30 produces, and effectively can improve the impact of armature reaction on the waveform distortion that electromagnetic vibration generator system outputting standard vibrates.
An embodiment of the deep trench on the inner yoke surface adjacent with air gap is provided below in conjunction with Fig. 6 and Fig. 8.Fig. 6 is the partial enlarged drawing of Fig. 5.Deep trench 27 is distributed in two inner yokes 3, two surfaces adjacent with air gap 7, and in figure, deep trench 27 is processed along the short transverse of inner yoke 3, and along the length direction periodic arrangement of air gap 7.In the present embodiment, the cross section of deep trench 27 is rectangle, and its width is 1mm, and the degree of depth going deep into inner yoke 3 surface is 10mm, and the distance between two adjacent deep trench 27 is 10mm.Theory all shows with simulation analysis and experimental result, and in the present invention, the array microstructure of deep trench form effectively can suppress the generation of current vortex, significantly reduces eddy current loss.
Another embodiment of the deep trench on the inner yoke surface adjacent with air gap is provided below in conjunction with Fig. 7.Fig. 7 is also the partial enlarged drawing of Fig. 5.In the present embodiment, the cross section of deep trench 27 is profile of tooth, and its tooth root width is 1mm, and the degree of depth that crown gos deep into inner yoke 3 surface is 10mm, and the distance between two adjacent deep trench 27 is 10mm.
An embodiment of permanent magnet installing frame is provided below in conjunction with Fig. 9, Figure 10.In the present embodiment, permanent magnet installing frame 9 adopts stupalith to make, cross section is square shape, its thickness is vertically equal with permanent magnet 1, permanent magnet 1 is assemblied in the inside of permanent magnet installing frame 9 with bonding way, then permanent magnet installing frame 9 is fixed by screws in the upper surface of base plate 17 through the rectangular aperture 22 on lower rebound 18, realizes fixing the installation of permanent magnet 1.Also permanent magnet installing frame 9 can be fixed on other parts in actual implementation process.First complete the assembling of other part in assembling process, the component integration then permanent magnet 1 and permanent magnet installing frame 9 formed is along outer yoke 4 and hold the space between yoke 5 to push designated mounting position, finally carries out installation to permanent magnet installing frame 9 and fixes.Adopt mounting means of the present invention greatly can reduce the assembly difficulty of permanent magnet, solve a difficult problem for strong permanent magnet Assembly of the parts.
An embodiment of yoke installing frame is provided below in conjunction with Figure 11.Coil rack 6 and working coil 8 are sleeved in central magnetic yoke 2 and have longer stroke, it is fixing that the mode that long sized central yoke 2 need support with two ends carry out installations.In the present embodiment, yoke installing frame 10 adopts stupalith to make, cross section is square shape, two yoke installing frames 10 are sleeved on the two ends of central magnetic yoke 2 and are rigidly connected by screw and central magnetic yoke 2, central magnetic yoke 2 through the rectangular aperture 22 on lower rebound 18, the upper surface being fixed by screws in base plate 17, thus is fixed with two ends supporting way by two yoke installing frames 10.
Figure 12 gives an embodiment of coil rack.In the present embodiment, coil rack 6 adopts 99 alumina ceramic materials, and cross section is square shape, and wall thickness is 5mm, and the square aperture at its center makes coil rack 6 can be sleeved on slidably in central magnetic yoke 2.Working coil 8 is evenly close, and around on coil rack 6, the two ends of coil rack 6 are processed with small boss, come off for preventing working coil 8.In actual implementation process, the wall of coil rack 6 can arranging various forms of lightening hole, for alleviating the weight of coil rack 6, reducing the dynamic loading of vibration calibration platform.

Claims (3)

1. the four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration consoles of a magnetic field tracking compensation, by pedestal (16), electromagnetic drive structures (13), static pressure air-float guide rail (14) and worktable (15) are formed, electromagnetic drive structures (13) and static pressure air-float guide rail (14) are arranged on pedestal (16) in the mode of axis being parallel, worktable (15) is arranged on the upper surface of sliding sleeve (24) in static pressure air-float guide rail (14), it is characterized in that: described pedestal (16) is by base plate (17), lower rebound (18), framework (19), upper cover plate (20) and guide support (21) from bottom to top stacked installation are formed, electromagnetic drive structures (13) is arranged on the upper surface of lower rebound (18), the inside of framework (19), the middle part of lower rebound (18) is provided with rectangular aperture (22), the length of rectangular aperture (22) is greater than the range of movement of electromagnetic drive structures (13) coil skeleton (6), static pressure air-float guide rail (14) is arranged on framework (19) by two guide support (21) in the mode that two ends support, static pressure air-float guide rail (14) is by guide rail (23), sliding sleeve (24) and sliding sleeve web member (25) are formed, sliding sleeve (24) is sleeved on guide rail (23) slidably and goes up and mutually lubricated and support by static pressure air-bearing effect with guide rail (23), sliding sleeve (24) is rigidly connected by sliding sleeve web member (25) with the coil rack (6) in electromagnetic drive structures (13), sliding sleeve web member (25) is through two slits (26) of upper cover plate (20), the length of slit (26) is greater than the range of movement of coil rack (6), electromagnetic drive structures (13) is by the permanent magnet (1) of square-section, central magnetic yoke (2), inner yoke (3), outer yoke (4), the coil rack (6) in end yoke (5) and square shape cross section is formed, overall one-tenth axially symmetric structure, four permanent magnet (1) symmetries are arranged between the two ends of two outer yokes (4) and two ends yoke (5), the same magnetic pole of two permanent magnets (1) at same outer yoke (4) two ends is positioned opposite, two outer yokes (4) are identical with the pole orientation of two permanent magnets (1) of one end, two end faces of each permanent magnet (1) respectively with outer yoke (4), the end face close contact that end yoke (5) is corresponding, two outer yokes (4), four permanent magnets (1) hold yoke (5) to form square shape structure with two, central magnetic yoke (2) is arranged on the long axis of square shape structure, central magnetic yoke (2) two ends hold yoke (5) to be rigidly connected respectively with two, the length of inner yoke (3) is less than the length of outer yoke (4), two inner yoke (3) symmetries are arranged on two relative surfaces of two outer yokes (4), and and separated by the air gap (7) of the width such as two between central magnetic yoke (2), coil rack (6) is sleeved in central magnetic yoke (2) slidably, coil rack (6) is wound with working coil (8), accurate controlled drive current is passed in working coil (8), the central magnetic yoke (2) adjacent with air gap (7), the surface of inner yoke (3) is provided with the array microstructure of deep trench (27) form, deep trench (27) is along the length direction periodic arrangement of air gap (7), deep trench (27) is processed along the short transverse of inner yoke (3), central magnetic yoke (2) is wound with compensating coil (30), in compensating coil (30) the electric current that leads to contrary with the direction of current in working coil (8), phase-locking is followed the tracks of, amplitude becomes to determine ratio.
2. the four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration consoles of magnetic field tracking compensation according to claim 1, it is characterized in that: the mounting means of described permanent magnet (1) is the permanent magnet installing frame (9) of employing four square shape cross sections, non-magnet_conductible material, by permanent magnet (1) adhesive asserably in the inside of permanent magnet installing frame (9), by fixed permanent magnet installing frame (9), permanent magnet (1) is fixed; The mounting means of described central magnetic yoke (2) is the yoke installing frame (10) of employing two square shape cross sections, non-magnet_conductible material, two yoke installing frames (10) are sleeved on central magnetic yoke (2) two ends and are rigidly connected with central magnetic yoke (2), yoke installing frame (10) is fixed on the upper surface of base plate (17) through the rectangular aperture (22) on lower rebound (18), thus the mode that central magnetic yoke (2) supports with two ends is fixed.
3. the four magnetic circuits symmetrical excitation rectangle low-frequency vibration calibration consoles of magnetic field tracking compensation according to claim 1 and 2, is characterized in that: described permanent magnet (1) adopts multiple fritter permanent magnet to be spliced to form with bonding way.
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