CN104846432B - 一种用于直拉硅单晶炉排气系统的排气管道 - Google Patents
一种用于直拉硅单晶炉排气系统的排气管道 Download PDFInfo
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0156321B1 (ko) * | 1995-12-21 | 1999-02-18 | 김광호 | 반도체용 저압 화학기상증착장치의 가스 배출관 |
CN201572691U (zh) * | 2009-12-15 | 2010-09-08 | 北京京诚瑞信长材工程技术有限公司 | 用于湍流式水冷装置的反扑喷嘴 |
CN102312284A (zh) * | 2011-07-06 | 2012-01-11 | 浙江晶盛机电股份有限公司 | 具有多个均布向下的排气管道的直拉式硅单晶炉热场 |
CN202202015U (zh) * | 2011-07-06 | 2012-04-25 | 浙江晶盛机电股份有限公司 | 具有多个均布向下的排气管道的直拉式硅单晶炉热场 |
CN202369677U (zh) * | 2011-11-16 | 2012-08-08 | 邢台晶龙电子材料有限公司 | 一种下排气单晶炉排气帽 |
CN102745887A (zh) * | 2011-04-21 | 2012-10-24 | 日本电气硝子株式会社 | 排气管及使用其的料片一体型排气管 |
CN204752905U (zh) * | 2015-06-04 | 2015-11-11 | 天津市环欧半导体材料技术有限公司 | 一种用于直拉硅单晶炉排气系统的排气管道 |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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KR0156321B1 (ko) * | 1995-12-21 | 1999-02-18 | 김광호 | 반도체용 저압 화학기상증착장치의 가스 배출관 |
CN201572691U (zh) * | 2009-12-15 | 2010-09-08 | 北京京诚瑞信长材工程技术有限公司 | 用于湍流式水冷装置的反扑喷嘴 |
CN102745887A (zh) * | 2011-04-21 | 2012-10-24 | 日本电气硝子株式会社 | 排气管及使用其的料片一体型排气管 |
CN102312284A (zh) * | 2011-07-06 | 2012-01-11 | 浙江晶盛机电股份有限公司 | 具有多个均布向下的排气管道的直拉式硅单晶炉热场 |
CN202202015U (zh) * | 2011-07-06 | 2012-04-25 | 浙江晶盛机电股份有限公司 | 具有多个均布向下的排气管道的直拉式硅单晶炉热场 |
CN202369677U (zh) * | 2011-11-16 | 2012-08-08 | 邢台晶龙电子材料有限公司 | 一种下排气单晶炉排气帽 |
CN204752905U (zh) * | 2015-06-04 | 2015-11-11 | 天津市环欧半导体材料技术有限公司 | 一种用于直拉硅单晶炉排气系统的排气管道 |
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