CN104826831A - Cryogenic liquid cleaning device - Google Patents
Cryogenic liquid cleaning device Download PDFInfo
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- CN104826831A CN104826831A CN201510249968.2A CN201510249968A CN104826831A CN 104826831 A CN104826831 A CN 104826831A CN 201510249968 A CN201510249968 A CN 201510249968A CN 104826831 A CN104826831 A CN 104826831A
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- liquid
- pipeline
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- temperature
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/041—Cleaning travelling work
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Ventilation (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention provides a cryogenic liquid cleaning device and relates to the technical field of a semiconductor chip technology. Firstly, a gas cooling device cools room-temperature gas, then the cooled gas is conveyed to a liquid cooling device, and the normal-temperature cleaning liquid medicine and the low-temperature cooled gas are subjected to heat exchange, so that the temperature of the cleaning liquid medicine is reduced, the cooled liquid medicine is sprayed on the surface of a chip, cleaning uniformity is improved, and loss of substrate materials is reduced.
Description
Technical field
The invention belongs to technical field of semiconductor wafer technology, be specially a kind of low temperature liquid cleaning device.
Background technology
The deep-submicron stage is being entered into along with integrated circuit feature size, the cleanliness factor of wafer surface required in IC wafer manufacturing process is more and more harsher, in order to ensure the cleanliness factor on wafer material surface, there is hundreds of roads matting in the manufacturing process of integrated circuit, matting account for 30% of whole manufacture process.
In cleaning, the temperature of cleaning liquid directly decides the indexs such as the speed of microcorrosion, the corrosion loss amount of backing material and contaminant removal efficiency.In existing cleaning, the temperature of suitable raising cleaning liquid can improve contaminant removal efficiency significantly, improves wash result, such as, uses the SC1 liquid of 70-80 DEG C to carry out wafer surface cleaning, to remove the particulate pollutant of wafer surface.
But, along with constantly reducing of manufacture of semiconductor size, material unaccounted-for (MUF) for cleaning requires to improve constantly, according to the related request of ITRS (ITRS), below 65nm technology node, the standard that each cleaning step causes logic circuit device silicon to lose is 0.5 dust, below 45nm technology node, each cleaning loss standard is 0.3 dust, and below 32nm technology node, each cleaning loss standard is 0.2 dust.Under this requirement, the larger problem such as substrate losses, poor erosion uniformity that HIGH TEMPERATURE PURGE liquid can bring to wafer, on the other hand, III-V semiconductor compound also exists significantly each to the corrosion opposite sex, higher cleaning fluid temperature can cause the change of wafer surface structure, also can cause the change of III-V semiconductor compound stoichiometric simultaneously.
In order to overcome the above problems, those skilled in the art need badly provides a kind of low temperature liquid cleaning device, reduces the temperature of cleaning liquid, and monitors in real time and adjust the temperature of cleaning liquid, to obtain stable Low-temperature cleaning liquid.
Summary of the invention
For the deficiencies in the prior art part, the object of this invention is to provide a kind of low temperature liquid cleaning device, reduce the temperature of cleaning liquid, and the temperature of cleaning liquid is monitored in real time and adjusted, to obtain stable Low-temperature cleaning liquid.
The object of the invention is realized by following technical proposals: the invention provides a kind of low temperature liquid cleaning device, for cleaning the wafer be carried on rotary body, comprising:
Gas quench system, for cooling gas at normal temperature, and is delivered to liquid medicine cooling device by cooled gas, comprises refrigerating gas pipeline, refrigerating gas pipeline support, liquid nitrogen fluid reservoir and lifting motor; Described refrigerating gas pipeline has U-shaped end, described U-shaped end is held in below the liquid level of described liquid nitrogen fluid reservoir, described refrigerating gas pipeline support is used for fixing described refrigerating gas pipeline, and described lifting motor moves up and down for driving described refrigerating gas pipeline support;
Liquid medicine cooling device, for introducing cooled gas, and cools normal temperature liquid and exports, and comprises the rear liquid pipeline of liquid medicine cooling device shell, refrigerating gas gas exhaust piping, normal temperature liquid pipeline, inner liquid pipeline and cooling; One end of described liquid medicine cooling device shell connects described refrigerating gas pipeline and normal temperature liquid pipeline, the other end of described liquid medicine cooling device connects described refrigerating gas gas exhaust piping and the rear liquid pipeline of cooling, after described normal temperature liquid pipeline, inner liquid pipeline and cooling, liquid pipeline connects, and after described cooling, liquid pipeline is provided with the temperature sensor for sensing the rear fluid temperature of cooling;
Control unit, its one end is connected with described temperature sensor, the other end is connected with described lifting motor, for receiving the temperature value of described temperature sensor detection and controlling described lifting motor, to regulate the length of U-shaped end in liquid nitrogen fluid reservoir of described refrigerating gas pipeline, and then the temperature of liquid pipeline herb liquid after controlled cooling model.
Preferably, described inner liquid pipeline is the combination of lateral wave striated structure, longitudinal wave striated structure, helicoidal structure one or more structures wherein, and one end of described inner liquid pipeline has normal temperature drug liquid tube pipeline connector, the other end has the rear drug liquid tube pipeline connector of cooling.
Preferably, described liquid medicine cooling device shell have normal temperature liquid pipeline BULKHEAD UNION, refrigerating gas pipe joint, the rear liquid pipeline BULKHEAD UNION of cooling and refrigerating gas gas exhaust piping joint, wherein, described normal temperature liquid pipeline BULKHEAD UNION is connected with normal temperature drug liquid tube pipeline connector, and after described cooling, liquid pipeline BULKHEAD UNION is connected with drug liquid tube pipeline connector after cooling.
Preferably, be provided with liquid level sensor and warning device in described liquid nitrogen fluid reservoir, described liquid level sensor is for detecting the liquid level of liquid nitrogen in described liquid nitrogen fluid reservoir, and described warning device gives the alarm lower than during preset value at liquid level.
Preferably, the madial wall of described liquid medicine cooling device shell has heat-insulation layer.
Preferably, described normal temperature liquid pipeline is provided with the fluid flowmeter for detecting cleaning medicinal liquid flow.
Preferably, described refrigerating gas pipeline is provided with the gas flowmeter for detecting gas at normal temperature flow.
Preferably, described refrigerating gas pipeline is metal material or corrosion-resistant material.
Preferably, described liquid medicine cooling device shell is demountable structure.
Preferably, after described cooling, the delivery outlet of liquid pipeline is positioned at the top of wafer.
The invention provides a kind of low temperature liquid cleaning device, first by gas quench system, cooling down is carried out to gas at normal temperature, then cooled gas is delivered in liquid medicine cooling device, normal temperature is cleaned between liquid and sub-cooled gas exchange heat occurs, thus reduce cleaning fluid temperature, finally by cooled medical liquid spraying in wafer surface, improve cleaning uniformity, reduce the loss of backing material simultaneously; The present invention is by the temperature of the temperature sensor continuous acquisition liquid on liquid pipeline after cooling, real-time Transmission is to control unit, control unit controls lifting motor, to regulate the length of U-shaped end in liquid nitrogen fluid reservoir of refrigerating gas pipeline, and then the temperature of liquid pipeline herb liquid after controlled cooling model, ensure the uniformity of the equipped at outlet port fluid temperature of liquid pipeline after cooling.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the preferred embodiment of low temperature liquid cleaning device in the present invention;
Fig. 2 is the section of structure of low temperature liquid cleaning device herb liquid cooling device preferred embodiment;
Fig. 3 is the section of structure of low temperature liquid cleaning device herb liquid cooling device preferred embodiment;
Fig. 4 is the section of structure of low temperature liquid cleaning device herb liquid cooling device preferred embodiment.
Number in the figure is described as follows:
1-liquid medicine cooling device, 2-refrigerating gas gas exhaust piping, liquid pipeline after 3-cooling, 4-temperature sensor, 5-temperature sensor data line, 6-wafer, 7-rotary body, 8-motor, 9-liquid nitrogen fluid reservoir, 10-lifting motor, 11-lifting motor data wire, 12-refrigerating gas pipeline support, 13-refrigerating gas pipeline, 14-gas flowmeter, 15-fluid flowmeter, 16-normal temperature liquid pipeline, 17-liquid medicine cooling device shell, 18-refrigerating gas pipe joint, 19-normal temperature liquid pipeline BULKHEAD UNION, the inner liquid pipeline of 20-, liquid pipeline BULKHEAD UNION after 21-cooling, 22-refrigerating gas gas exhaust piping joint, 23-gas quench system, 24-normal temperature drug liquid tube pipeline connector, drug liquid tube pipeline connector after 25-cooling.
Detailed description of the invention
For making content of the present invention clearly understandable, below in conjunction with Figure of description, content of the present invention is described further.Certain the present invention is not limited to this specific embodiment, and the general replacement known by those skilled in the art is also encompassed in protection scope of the present invention.Secondly, the present invention's detailed statement that utilized schematic diagram to carry out, when describing example of the present invention in detail, for convenience of explanation, schematic diagram, should in this, as limitation of the invention not according to general ratio partial enlargement.
It should be noted that, in following embodiment, utilize the structural representation of Fig. 1 ~ 4 to carry out detailed statement to by the low temperature liquid cleaning device in the present invention.Describe in detail embodiments of the present invention time, for convenience of explanation, each schematic diagram not according to general scale and carried out partial enlargement and omit process, therefore, should avoid in this, as limitation of the invention.
As shown in Figure 1, the invention provides a kind of low temperature liquid cleaning device, for cleaning, in prior art the wafer 6 be carried on rotary body 7, wafer 6 is placed on usually to be had on the rotary body 7 of holder, is rotated to drive wafer 6 by the turn of motor 8 driving rotating bodies 7.Low temperature liquid cleaning device in the present invention comprises gas quench system 23 for cooling gas at normal temperature, for the liquid medicine cooling device 1 that cools normal temperature liquid and the control unit controlling fluid temperature, cooled gas is delivered to liquid medicine cooling device 1 by gas quench system 23, liquid medicine cooling device 1 for cooling normal temperature liquid and export, to realize the jet cleaning to wafer.
Below the structure of gas quench system 23, liquid medicine cooling device 1 and control unit is introduced in detail:
Cooled gas for cooling gas at normal temperature, and is delivered to liquid medicine cooling device 1 by the gas quench system 23 in the present embodiment.Gas quench system 23 comprises refrigerating gas pipeline 13, refrigerating gas pipeline support 12, liquid nitrogen fluid reservoir 9 and lifting motor 10; Refrigerating gas pipeline 13 has U-shaped end, U-shaped end is held in below the liquid level of liquid nitrogen fluid reservoir 9, refrigerating gas pipeline support 12 is for fixing refrigerating gas pipeline 13, lifting motor 10 moves up and down for driving refrigerating gas pipeline support 12, move up and down to drive refrigerating gas pipeline 13, by the length of controlled cooling model gas piping 13 in liquid nitrogen fluid reservoir 9, to regulate the temperature of refrigerating gas.
Concrete, refrigerating gas pipeline 13 is for introducing gas at normal temperature after liquid nitrogen fluid reservoir 9 cools, cooled gas is delivered to liquid medicine cooling device 1, refrigerating gas pipeline 13 can be provided with the gas flowmeter 14 for detecting gas at normal temperature flow, can the flow of refrigerating gas be monitored and be regulated, and refrigerating gas pipeline 13 be preferably metal material or corrosion-resistant material.
What deserves to be explained is; in the present embodiment; refrigerating gas pipeline 13 can have one or more U-shaped end; refrigerating gas pipeline 13 also can be other irregular shapes; namely the part pipeline in refrigerating gas pipeline stretches in liquid nitrogen fluid reservoir; remain on below liquid nitrogen liquid level, to realize the requirement of refrigerating gas all in protection scope of the present invention.
For monitoring the liquid level of liquid nitrogen in liquid nitrogen fluid reservoir 9 further, liquid level sensor and warning device (not shown) is provided with in liquid nitrogen fluid reservoir 9, liquid level sensor is for detecting the liquid level of liquid nitrogen in liquid nitrogen fluid reservoir, and warning device gives the alarm lower than during preset value at liquid level.When the liquid level of liquid nitrogen is lower in liquid nitrogen fluid reservoir, the cooling requirement of liquid cannot be met, then give the alarm, remind staff to change in time or supplementary liquid nitrogen, to ensure the uniformity of process conditions.
Please continue to refer to Fig. 1 and Fig. 2, liquid medicine cooling device 1 in the present embodiment is for introducing cooled gas, and normal temperature liquid is cooled and exported, comprise the rear liquid pipeline 3 of liquid medicine cooling device shell 17, refrigerating gas gas exhaust piping 2, normal temperature liquid pipeline 16, inner liquid pipeline 20 and cooling; One end of liquid medicine cooling device shell 17 connects refrigerating gas pipeline 13 and normal temperature liquid pipeline 16, the other end of liquid medicine cooling device shell 17 connects refrigerating gas gas exhaust piping 2 and the rear liquid pipeline 3 of cooling, after normal temperature liquid pipeline 16, inner liquid pipeline 20 and cooling, liquid pipeline 3 connects, and after cooling, liquid pipeline 3 is provided with for sensing the temperature sensor of fluid temperature after cooling.
Concrete, liquid medicine cooling device shell 17 has a hollow cavity, and for holding inner liquid pipeline 20 and cooled gas, the madial wall of liquid medicine cooling device shell 17 has heat-insulation layer, and liquid medicine cooling device shell 17 is preferably demountable structure.
After normal temperature liquid pipeline 16 in the present embodiment, inner liquid pipeline 20 and cooling, liquid pipeline 3 is mutually through, for importing normal temperature cleaning liquid, and the delivery outlet of cooled cleaning liquid from the rear liquid pipeline of cooling is exported, its delivery outlet position is preferably the top of wafer 6.In order to better control the flow cleaning liquid, normal temperature liquid pipeline 16 is provided with the fluid flowmeter 15 for detecting cleaning medicinal liquid flow.
The gas completing exchange heat is discharged from liquid medicine cooling device inside by the refrigerating gas gas exhaust piping 2 in the present embodiment, and also can recycle it, staff selects according to actual conditions.
In addition, the present embodiment also comprises control unit, one end of control unit is connected with temperature sensor data line 5, the other end is connected with lifting motor data wire 11, for receiving the temperature value of temperature sensor 4 detection and controlling lifting motor 10, to regulate the length of U-shaped end in liquid nitrogen fluid reservoir 9 of refrigerating gas pipeline 13, and then the temperature of liquid pipeline 3 herb liquid after controlled cooling model.
Please refer to Fig. 2 to Fig. 3, Fig. 2 to Fig. 3 is the section of structure of low temperature liquid cleaning device herb liquid cooling device preferred embodiment, wherein, inner liquid pipeline 20 is the combination of lateral wave striated structure (as shown in Figure 2), longitudinal wave striated structure (as shown in Figure 3), helicoidal structure (as shown in Figure 4) one or more structures wherein, and one end of inner liquid pipeline 20 has normal temperature drug liquid tube pipeline connector 24, the other end has the rear drug liquid tube pipeline connector 25 of cooling.
Concrete, liquid medicine cooling device shell 17 have normal temperature liquid pipeline BULKHEAD UNION 19, refrigerating gas pipe joint 18, the rear liquid pipeline BULKHEAD UNION 21 of cooling and refrigerating gas gas exhaust piping joint 22, wherein, normal temperature liquid pipeline BULKHEAD UNION 19 is connected with normal temperature drug liquid tube pipeline connector 24, and after cooling, liquid pipeline BULKHEAD UNION 21 is connected with drug liquid tube pipeline connector 25 after cooling.
Wherein, refrigerating gas pipe joint 18 and refrigerating gas gas exhaust piping joint 22 are welded on liquid medicine cooling device shell 17, and normal temperature liquid pipeline BULKHEAD UNION 19 and the rear liquid pipeline BULKHEAD UNION 21 of cooling are fixed on liquid medicine cooling device shell 17 by nut.
The operation principle of low temperature liquid cleaning device provided by the invention is: wafer 6 is fixed on rotary body 7, rotate with certain speed under the drive of motor 8, set the flow of refrigerating gas and the flow of cleaning liquid respectively by gas flowmeter 14 and fluid flowmeter 15.After cleaning starts, the liquid nitrogen of refrigerating gas in refrigerating gas pipeline 13 with liquid nitrogen fluid reservoir 9 completes exchange heat, cooled gas enters liquid medicine cooling device 1 by refrigerating gas pipeline 13, and is full of whole device, is discharged by refrigerating gas gas exhaust piping 2.Cleaning liquid is entered the inside liquid pipeline 20 in liquid medicine cooling device by normal temperature liquid pipeline 16, complete exchange heat, discharging, being sprayed at wafer 6 surface and completing cleaning by cooling rear liquid pipeline 3 in liquid medicine cooling device 1 inside with refrigerating gas.
The cleaning fluid temperature in rear liquid pipeline 3 exit of cooling measured in real time by temperature sensor 4 in the present invention, and pass through temperature sensor data line 5 by result feedback to control unit, the temperature of the temperature data recorded and setting contrasts by control unit, and according to comparing result, issued the instruction of rising or declining to lifting motor 10 by lifting motor data wire 11, if the temperature that temperature sensor 4 records is higher than design temperature, then order lifting motor 10 drives cold gas pipeline support 12 to decline, the length that refrigerating gas pipeline 13 is immersed in liquid nitrogen increases, further reduction refrigerating gas temperature, thus reduce the temperature of cleaning liquid, if the temperature that temperature sensor 4 records is lower than design temperature, then order lifting motor 10 drives cold gas pipeline support 12 to rise, and makes refrigerating gas pipeline 13 be immersed in contraction in length in liquid nitrogen, improves refrigerating gas temperature, thus improve the temperature of cleaning liquid.In this way, form the closed-loop adjustment of cleaning fluid temperature, ensure the uniformity of cleaning.
In sum, the invention provides a kind of low temperature liquid cleaning device, first by gas quench system, cooling down is carried out to gas at normal temperature, then cooled gas is delivered in liquid medicine cooling device, normal temperature is cleaned between liquid and sub-cooled gas exchange heat occurs, thus reduce cleaning fluid temperature, finally by cooled medical liquid spraying in wafer surface, improve the uniformity of cleaning, reduce the loss of backing material simultaneously; The present invention is by the temperature of the temperature sensor continuous acquisition liquid on liquid pipeline after cooling, real-time Transmission is to control unit, control unit controls lifting motor, to regulate the length of U-shaped end in liquid nitrogen fluid reservoir of refrigerating gas pipeline, and then the temperature of liquid pipeline herb liquid after controlled cooling model, ensure the uniformity of the equipped at outlet port fluid temperature of liquid pipeline after cooling.
Above-mentioned explanation illustrate and describes some preferred embodiments of the present invention, but as previously mentioned, be to be understood that the present invention is not limited to the form disclosed by this paper, should not regard the eliminating to other embodiments as, and can be used for other combinations various, amendment and environment, and can in invention contemplated scope described herein, changed by the technology of above-mentioned instruction or association area or knowledge.And the change that those skilled in the art carry out and change do not depart from the spirit and scope of the present invention, then all should in the protection domain of claims of the present invention.
Claims (10)
1. a low temperature liquid cleaning device, for cleaning the wafer be carried on rotary body, is characterized in that, comprise:
Gas quench system, for cooling gas at normal temperature, and is delivered to liquid medicine cooling device by cooled gas, comprises refrigerating gas pipeline, refrigerating gas pipeline support, liquid nitrogen fluid reservoir and lifting motor; Described refrigerating gas pipeline has U-shaped end, described U-shaped end is held in below the liquid level of described liquid nitrogen fluid reservoir, described refrigerating gas pipeline support is used for fixing described refrigerating gas pipeline, and described lifting motor moves up and down for driving described refrigerating gas pipeline support;
Liquid medicine cooling device, for introducing cooled gas, and cools normal temperature liquid and exports, and comprises the rear liquid pipeline of liquid medicine cooling device shell, refrigerating gas gas exhaust piping, normal temperature liquid pipeline, inner liquid pipeline and cooling; One end of described liquid medicine cooling device shell connects described refrigerating gas pipeline and normal temperature liquid pipeline, the other end of described liquid medicine cooling device shell connects described refrigerating gas gas exhaust piping and the rear liquid pipeline of cooling, after described normal temperature liquid pipeline, inner liquid pipeline and cooling, liquid pipeline connects, and after described cooling, liquid pipeline is provided with the temperature sensor for sensing the rear fluid temperature of cooling;
Control unit, its one end is connected with described temperature sensor, the other end is connected with described lifting motor, for receiving the temperature value of described temperature sensor detection and controlling described lifting motor, to regulate the length of U-shaped end in liquid nitrogen fluid reservoir of described refrigerating gas pipeline, and then the temperature of liquid pipeline herb liquid after controlled cooling model.
2. low temperature liquid cleaning device according to claim 1, it is characterized in that, described inner liquid pipeline is the combination of lateral wave striated structure, longitudinal wave striated structure, helicoidal structure one or more structures wherein, and one end of described inner liquid pipeline has normal temperature drug liquid tube pipeline connector, the other end has the rear drug liquid tube pipeline connector of cooling.
3. low temperature liquid cleaning device according to claim 2, it is characterized in that, described liquid medicine cooling device shell have normal temperature liquid pipeline BULKHEAD UNION, refrigerating gas pipe joint, the rear liquid pipeline BULKHEAD UNION of cooling and refrigerating gas gas exhaust piping joint, wherein, described normal temperature liquid pipeline BULKHEAD UNION is connected with normal temperature drug liquid tube pipeline connector, and after described cooling, liquid pipeline BULKHEAD UNION is connected with drug liquid tube pipeline connector after cooling.
4. low temperature liquid cleaning device according to claim 1, it is characterized in that, liquid level sensor and warning device is provided with in described liquid nitrogen fluid reservoir, described liquid level sensor is for detecting the liquid level of liquid nitrogen in described liquid nitrogen fluid reservoir, and described warning device gives the alarm lower than during preset value at liquid level.
5. low temperature liquid cleaning device according to claim 1, is characterized in that, the madial wall of described liquid medicine cooling device shell has heat-insulation layer.
6. low temperature liquid cleaning device according to claim 1, is characterized in that, described normal temperature liquid pipeline is provided with the fluid flowmeter for detecting cleaning medicinal liquid flow.
7. low temperature liquid cleaning device according to claim 1, is characterized in that, described refrigerating gas pipeline is provided with the gas flowmeter for detecting gas at normal temperature flow.
8., according to the arbitrary described low temperature liquid cleaning device of claim 1 ~ 7, it is characterized in that, described refrigerating gas pipeline is metal material or corrosion-resistant material.
9., according to the arbitrary described low temperature liquid cleaning device of claim 1 ~ 7, it is characterized in that, described liquid medicine cooling device shell is demountable structure.
10., according to the arbitrary described low temperature liquid cleaning device of claim 1 ~ 7, it is characterized in that, after described cooling, the delivery outlet of liquid pipeline is positioned at the top of wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510249968.2A CN104826831B (en) | 2015-05-15 | 2015-05-15 | A kind of low temperature medicinal liquid cleans device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510249968.2A CN104826831B (en) | 2015-05-15 | 2015-05-15 | A kind of low temperature medicinal liquid cleans device |
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| CN104826831A true CN104826831A (en) | 2015-08-12 |
| CN104826831B CN104826831B (en) | 2016-10-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110553240A (en) * | 2018-06-01 | 2019-12-10 | 新疆北方建设集团有限公司 | Rankine cycle device and method thereof |
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| CN204620539U (en) * | 2015-05-15 | 2015-09-09 | 北京七星华创电子股份有限公司 | Low temperature liquid cleaning device |
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2015
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| JPH0878374A (en) * | 1994-09-06 | 1996-03-22 | Ricoh Co Ltd | Wafer carrier cleaning method and its apparatus |
| CN1836799A (en) * | 2005-03-24 | 2006-09-27 | 大日本网目版制造株式会社 | Substrate disposal device |
| JP2009021324A (en) * | 2007-07-11 | 2009-01-29 | Toshiba Corp | Cleaning method and cleaning device |
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| CN110553240A (en) * | 2018-06-01 | 2019-12-10 | 新疆北方建设集团有限公司 | Rankine cycle device and method thereof |
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