CN104822979B - 流体控制装置 - Google Patents

流体控制装置 Download PDF

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Publication number
CN104822979B
CN104822979B CN201380062674.8A CN201380062674A CN104822979B CN 104822979 B CN104822979 B CN 104822979B CN 201380062674 A CN201380062674 A CN 201380062674A CN 104822979 B CN104822979 B CN 104822979B
Authority
CN
China
Prior art keywords
fluid control
control device
mounting member
side walls
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201380062674.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN104822979A (zh
Inventor
堂屋英宏
铃木贵之
藤根和洋
野岛新也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of CN104822979A publication Critical patent/CN104822979A/zh
Application granted granted Critical
Publication of CN104822979B publication Critical patent/CN104822979B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Details Of Valves (AREA)
  • Chemical & Material Sciences (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
CN201380062674.8A 2012-11-29 2013-11-07 流体控制装置 Expired - Fee Related CN104822979B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012260586A JP5753831B2 (ja) 2012-11-29 2012-11-29 流体制御装置
JP2012-260586 2012-11-29
PCT/JP2013/080074 WO2014084014A1 (ja) 2012-11-29 2013-11-07 流体制御装置

Publications (2)

Publication Number Publication Date
CN104822979A CN104822979A (zh) 2015-08-05
CN104822979B true CN104822979B (zh) 2016-12-28

Family

ID=50827660

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380062674.8A Expired - Fee Related CN104822979B (zh) 2012-11-29 2013-11-07 流体控制装置

Country Status (7)

Country Link
US (1) US9869405B2 (https=)
JP (1) JP5753831B2 (https=)
KR (1) KR101674849B1 (https=)
CN (1) CN104822979B (https=)
SG (1) SG11201503890WA (https=)
TW (1) TWI554705B (https=)
WO (1) WO2014084014A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6475950B2 (ja) * 2014-10-29 2019-02-27 株式会社フジキン 流体制御器用加熱装置および流体制御装置
JP6633102B2 (ja) * 2016-01-28 2020-01-22 株式会社フジキン 流体制御装置及びガスライン部の着脱方法
WO2017138077A1 (ja) * 2016-02-08 2017-08-17 富士機械製造株式会社 粘性流体供給装置
WO2020261985A1 (ja) * 2019-06-28 2020-12-30 株式会社フジキン 流体制御装置
US12140241B2 (en) * 2021-05-24 2024-11-12 Festo Se & Co. Kg Fluid control system
TW202346768A (zh) * 2022-05-09 2023-12-01 美商瓦特洛威電子製造公司 用於氣體處理組件之加熱器系統
KR20250093381A (ko) * 2022-11-28 2025-06-24 가부시키가이샤 후지킨 유체 제어장치 및 히터

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1298478A (zh) * 1998-03-05 2001-06-06 斯瓦戈洛克公司 按标准形式设计的表面安装歧管
EP1167846A2 (en) * 2000-06-30 2002-01-02 Tokyo Electron Limited Mounting assembly for valves
CN1742162A (zh) * 2002-11-26 2006-03-01 斯瓦戈洛克公司 模块化表面安装的流体系统
CN1950931A (zh) * 2004-05-10 2007-04-18 喜开理株式会社 气体供给集成单元
CN101147018A (zh) * 2005-03-22 2008-03-19 株式会社富士金 流体控制装置
CN101223393A (zh) * 2005-06-17 2008-07-16 株式会社富士金 流体控制装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3733459A (en) * 1971-02-09 1973-05-15 C Lengstorf Internal heating device for air valves
JPH07122500A (ja) * 1993-10-28 1995-05-12 Fujitsu Ltd ガス機器及びこれを利用したガス供給装置
US7036528B2 (en) * 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP4653358B2 (ja) * 2001-08-28 2011-03-16 シーケーディ株式会社 集積弁
US7604217B2 (en) * 2005-10-07 2009-10-20 Grundfos Pumps Corporation Electrolysis-resistant coupling assembly for valves
JP4355724B2 (ja) * 2006-12-25 2009-11-04 シーケーディ株式会社 ガス集積ユニット
JP2010053907A (ja) * 2008-08-26 2010-03-11 Eagle Ind Co Ltd 流体供給系加熱装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1298478A (zh) * 1998-03-05 2001-06-06 斯瓦戈洛克公司 按标准形式设计的表面安装歧管
EP1167846A2 (en) * 2000-06-30 2002-01-02 Tokyo Electron Limited Mounting assembly for valves
CN1742162A (zh) * 2002-11-26 2006-03-01 斯瓦戈洛克公司 模块化表面安装的流体系统
CN1950931A (zh) * 2004-05-10 2007-04-18 喜开理株式会社 气体供给集成单元
CN101147018A (zh) * 2005-03-22 2008-03-19 株式会社富士金 流体控制装置
CN101223393A (zh) * 2005-06-17 2008-07-16 株式会社富士金 流体控制装置

Also Published As

Publication number Publication date
US9869405B2 (en) 2018-01-16
TW201430259A (zh) 2014-08-01
US20150337985A1 (en) 2015-11-26
JP5753831B2 (ja) 2015-07-22
KR20150059794A (ko) 2015-06-02
JP2014105817A (ja) 2014-06-09
SG11201503890WA (en) 2015-06-29
CN104822979A (zh) 2015-08-05
WO2014084014A1 (ja) 2014-06-05
KR101674849B1 (ko) 2016-11-09
TWI554705B (zh) 2016-10-21

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EXSB Decision made by sipo to initiate substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20161228

Termination date: 20181107

CF01 Termination of patent right due to non-payment of annual fee