CN104820137B - High-frequency and high-voltage fast pulse Timing acquisition apparatus and method - Google Patents
High-frequency and high-voltage fast pulse Timing acquisition apparatus and method Download PDFInfo
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- CN104820137B CN104820137B CN201510173789.5A CN201510173789A CN104820137B CN 104820137 B CN104820137 B CN 104820137B CN 201510173789 A CN201510173789 A CN 201510173789A CN 104820137 B CN104820137 B CN 104820137B
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Abstract
The invention discloses a kind of high-frequency and high-voltage fast pulse Timing acquisition device and acquisition method, the high-frequency and high-voltage fast pulse produced for acquisition pulse sequential emitter.Device includes transformer and signal output interface, transformer includes the first dielectric film and the first sheet metal bonded to each other, first dielectric film is closely connected with the outer surface of pulse sequence emitter, outer surface of the signal output interface by transmission line respectively with the first sheet metal and pulse sequence emitter is connected, and the induced signal obtained is transferred into external device (ED).The present invention is applied in using the quasi-molecule of double cavity structure electric discharge simultaneous techniques, and the energy amplification that can meet double-cavity excimer laser is required.
Description
Technical field
The invention belongs to double-cavity excimer laser technical field, and in particular to a kind of high-frequency and high-voltage fast pulse Timing acquisition
Apparatus and method, and the double-cavity excimer laser including the harvester.
Background technology
Main turbulence cavity (MO chambers) is referred to as using a chamber in the excimer laser of double cavity structure, another is referred to as to put
Big chamber (PA chambers).The seed light that MO chambers are produced needs accurately (to shake in sequential and be less than ± 5ns) to pass to PA chambers, now PA chambers
Discharge excitation amplifies the seed light energy for coming from MO chambers.Therefore this is accomplished by carrying out essence to the electric discharge sequential of two enlarged cavities
Really control.Double-cavity excimer laser electric discharge shake is mainly discharged by the shake of (1) two-chamber power-supply initial discharge voltage, (2)
The intrinsic shake of power supply and the shake of (4) two-chamber power source temperature and intracavitary air pressure fluctuation four when the randomized jitter of intracavitary, (3) electric discharge
It is grouped into.Wherein the solution of (4) subproblem depends on two-chamber quasi-molecule synchronous control technique.That is, for two-chamber
For the power supply of excimer laser, it is necessary to using double-cavity excimer laser simultaneous techniques by two-chamber electric discharge shake control ±
The synchronous discharge of two cavitys can be just realized within 5ns.
The premise for realizing dual-cavity laser electric discharge SECO is the collection to two-chamber optical signals, and a kind of two-chamber sequential is adopted
Diversity method is disclosed in patent US7203216, wherein the sensor collection sequential used such as uses photodiode.But should
The shortcoming of method is to need light path light splitting, so as to have lost output energy.
The content of the invention
(1) technical problem to be solved
The technical problems to be solved by the invention are the synchronizations discharged for two-chamber in existing double-cavity excimer laser
Control needs the energy loss problem that the optical signal for gathering two-chamber outgoing is brought.
(2) technical scheme
In order to solve the above technical problems, one aspect of the present invention proposes a kind of high-frequency and high-voltage fast pulse Timing acquisition dress
Put, the device is used for the high-frequency and high-voltage fast pulse that acquisition pulse sequential emitter is produced, it is characterised in that：Including transformer and
Signal output interface, the transformer include the first dielectric film and the first sheet metal bonded to each other, first dielectric film with
The outer surface of pulse sequence emitter is closely connected, the signal output interface by transmission line respectively with first metal
The outer surface connection of piece and pulse sequence emitter, and the induced signal obtained is transferred to external device (ED).
According to the embodiment of the present invention, the transformer is also made up of including at least one dielectric film and sheet metal
Lamination, each dielectric film and sheet metal be alternately superimposed on, and sheet metal and the signal output interface positioned at the top are connected by transmission line
Connect.
According to the embodiment of the present invention, in addition to impedance matching circuit, its be connected to the sheet metals of the superiors with
Between the outer surface of the pulse sequence emitter.
According to the embodiment of the present invention, the defeated transmission line of institute is the conductor of specific width and thickness, meets following public affairs
Formula：
The ZcIt is design impedance, erFor transmission line and pulse sequence emitter
The relative dielectric constant of megohmite insulant between surface, h is the transmission line to the outer surface of the pulse sequence emitter
Distance, w is the width of the transmission line, and t is the thickness of the transmission line.
According to the embodiment of the present invention, the dielectric film is polymer insulation thin-film material.
Another aspect of the present invention also proposes a kind of high-frequency and high-voltage fast pulse Timing acquisition method, for acquisition pulse sequential
The high-frequency and high-voltage fast pulse that emitter is produced, comprises the following steps：By one end of transformer and and pulse sequence emitter
Outer surface laminating；The other end of transformer is connected with signal output interface by transmission line；By signal output interface and institute
State the outer surface electrical connection of pulse sequence emitter；Place's signal output interface exports the induced signal of acquisition.
According to the embodiment of the present invention, the transformer includes the first dielectric film and the first metal bonded to each other
Piece, first dielectric film is closely connected with the outer surface of pulse sequence emitter, and the signal output interface passes through transmission
Outer surface of the line respectively with first sheet metal and pulse sequence emitter is connected.
According to the embodiment of the present invention, the transformer is also made up of including at least one dielectric film and sheet metal
Lamination, each dielectric film and sheet metal be alternately superimposed on, and sheet metal and the signal output interface positioned at the top are connected by transmission line
Connect.
According to the embodiment of the present invention, in sheet metal and the pulse sequence emitter of the superiors
Between outer surface.
According to the embodiment of the present invention, the transmission line is the conductor of specific width and thickness, meets following public
Formula：
The ZcIt is design impedance, erFor transmission line and pulse sequence emitter
The relative dielectric constant of megohmite insulant between surface, h is the transmission line to the outer surface of the pulse sequence emitter
Distance, w is the width of the transmission line, and t is the thickness of the transmission line.
(3) beneficial effect
The present invention is applied in using the quasi-molecule of double cavity structure electric discharge simultaneous techniques, can meet double-cavity excimer laser
Energy amplification require.
Brief description of the drawings
Figure 1A is the structural representation of one embodiment of the high-frequency and high-voltage fast pulse Timing acquisition device of the present invention；
Figure 1B is the structural representation of the second embodiment of the high-frequency and high-voltage fast pulse Timing acquisition device of the present invention；
Fig. 1 C are the structural representations of the 3rd embodiment of the high-frequency and high-voltage fast pulse Timing acquisition device of the present invention；
Fig. 2 is the schematic view of the mounting position of the transformer in the embodiment of the present invention；
Fig. 3 A are the attached views of the collecting unit of the embodiment of the present invention；
Fig. 3 B are that electrograph is shown in the amplification of the transmission line of the embodiment of the present invention；
Fig. 4 is high-frequency and high-voltage fast pulse Timing acquisition device proposed by the present invention applied in double-cavity excimer laser
The module map as two-chamber line lock control device.
Embodiment
The present invention proposes a kind of high-frequency and high-voltage fast pulse Timing acquisition device and acquisition method, and the apparatus and method are used to adopt
Collect the high-frequency and high-voltage fast pulse that pulse sequence emitter is produced.The present invention can be applicable to the PRK using double cavity structure
In the electric discharge simultaneous techniques of device, its principle is the electric discharge clock signal that discharge cavity is gathered by the high-voltage mutual inductor of particular design,
And replaced gathering optical signal using photodiode in the prior art with this transformer.
The high-frequency and high-voltage fast pulse Timing acquisition method comprises the following steps：By one end of transformer and and pulse sequence
The outer surface laminating of emitter；The other end of transformer is connected with signal output interface by transmission line；By signal output
Interface is electrically connected with the outer surface of the pulse sequence emitter；Place's signal output interface is defeated by the induced signal of acquisition
Go out.
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in further detail.
Figure 1A is the structural representation of one embodiment of the high-frequency and high-voltage fast pulse Timing acquisition device of the present invention.As schemed
Shown in 1, in the embodiment, harvester uses the transformer detection pulse signal of high voltage capacitive coupling, the transformer
Including the first dielectric film 11 and the first sheet metal 12 bonded to each other.Harvester also includes a signal output interface 15.Its
In, the first dielectric film 11 is closely connected with the outer surface of pulse sequence emitter, and signal output interface 15 passes through transmission line point
Outer surface not with first sheet metal 12 and pulse sequence emitter is connected, and the induced signal obtained is transferred to
External device (ED).
First dielectric film 11 can use heat endurance and the superior polymer insulation thin-film material of electric property, such as superelevation
Molecular weight polyethylene or polyimides etc..The material of first sheet metal 12 can be aluminium, copper etc..
In this embodiment, the first dielectric film 11 is polymer insulation thin-film material, and it is attached at two-chamber PRK
The discharge cavity A of device outer surface, discharge cavity A's is external surface grounded.Aluminum or made of copper first are sticked on first dielectric film 11 again
Sheet metal 12.So, discharge cavity A, the first dielectric film 12 and the first sheet metal 11 just constitute a coupled capacitor.
Figure 1B is the structural representation of the second embodiment of the high-frequency and high-voltage fast pulse Timing acquisition device of the present invention.With figure
Unlike the structure that 1A is shown, dielectric film and sheet metal in the second embodiment are respectively provided with two layers and are alternately superimposed on.Specifically
For, it is pasted with the second dielectric film 13 and the second sheet metal 14, signal output interface successively again in the top of the first sheet metal 12
15 one end is connected to second sheet metal.Material selection and the first dielectric film 11 of second dielectric film 13 and the second sheet metal 14
Selection with the first sheet metal 12 is similar.In order to improve the signal to noise ratio of signal, pulse sequence harvester distance high-voltage electric discharge
End is very near, and the harvester of first embodiment has by the danger of high electrical breakdown.The embodiment has compared to first embodiment
There is higher insulaion resistance.
In actually implementing, more layers of superposition that can also be similar with the second embodiment, and keep dielectric film and gold
Category piece is alternately superimposed on, and the sheet metal positioned at the top is connected with signal output interface 15 by transmission line.
Fig. 1 C are the structural representations of the 3rd embodiment of the high-frequency and high-voltage fast pulse Timing acquisition device of the present invention.It is
Improvement in the example structure that Figure 1B is shown, unlike, the harvester of the embodiment also includes an impedance matching
Circuit 16, it is connected between the second sheet metal 14 and discharge cavity A.The matching that impedance matching circuit 16 is used for Fast-Pulse Measuring is passed
Defeated, the match circuit can be matching in parallel, such as signal is transmitted with 50 ohmages, and match circuit 16 can be defeated with signal
50 ohm of the resistance in parallel of outgoing interface 14, is used as parallel termination.Due to the insulating dielectric materials and sheet metal of dielectric film
Area selection it is different, signal pulse pulsewidth is about tens nanoseconds or longer.For this high-speed pulse electric signal, hard
When part is designed, signal integrity, impedance matching loop reasonable in design need to be taken into full account.Obtained again by integration and preposition amplification
Two pulse signals are output to special pulse delay and measure chip or dual channel high speed AD by the pulse square wave signal of standard
In capture card, the final delay value for obtaining two-way pulse.The impedance matching circuit 16 can also be configured at first embodiment or
In the embodiment of other many laminations.
Fig. 2 gives the schematic view of the mounting position of the transformer in above-described embodiment.The figure by taking first embodiment as an example, its
Middle left figure is the front view of single-chamber excimer laser, and power supply 18 is connected with discharge cavity 20 by HV Terminal 21, and 19 be electric discharge
Intracavity electrode.22 be PRK light direction.Right figure is single-chamber excimer laser side view, and 23 be exactly high-frequency and high-voltage arteries and veins
Rush Timing acquisition device.The device is arranged near HV Terminal 21, can be attached on power supply 18 or discharge cavity 20.Wherein mutual inductance
Device is arranged between the power supply of excimer laser and discharge cavity, and close to the position of peaking capacitor.Produced during electric discharge cavity discharging
Space radiation signal be coupled on the first sheet metal 12 of the coupled capacitor of transformer, and this pulse signal is passed through into the first gold medal
Signal output interface 15 on category piece 12 is exported.
Fig. 3 A are the attached views of the collecting unit of above-mentioned first, second, third embodiment.As shown in Figure 3A, signal output
The transmission line 17 that the connection of interface 16 and sheet metal is used can be designed to obtain suitable impedance, so that optimal to obtain
Signal output.
Fig. 3 B are that electrograph is shown in the amplification of the transmission line of the present invention, wherein by taking first embodiment as an example.As shown in Figure 3 B, transmit
Line 17 is a piece of specific width and thickness conductor piece, can be copper sheet, aluminium flake etc..So that 50 ohm are designed impedance as an example, Zc=50
Ω, erFor the relative dielectric constant of megohmite insulant between transmission line and pulse sequence emitter surface, (insulant can be empty
Gas or casting glue etc.), h is by the distance of transmission line to patch surface, and w is the width of transmission line, and t is the thickness of transmission line, will
Above parameter brings formula into.Line width w and thickness t combination can be gone out to transmit with inverse.
Fig. 4 is high-frequency and high-voltage fast pulse Timing acquisition device proposed by the present invention applied in double-cavity excimer laser
The module map as two-chamber line lock control device.As shown in figure 4, laser includes MO chambers and PA chambers, MO chambers and PA chambers
It is respectively provided with the first power supply and second source.Two-chamber line lock control device includes delay measuring unit 28, the and of host computer 24
Slave computer 25, output delay unit 27 and state acquisition unit 26, the first Timing acquisition unit 29a and the second Timing acquisition unit
29b, connects high-frequency and high-voltage fast pulse Timing acquisition device 23a and 23b respectively.The high-frequency and high-voltage fast pulse Timing acquisition device
23a and 23b are the harvester composition in above-described embodiment, for gathering two-chamber discharge waveform and timing information.Delay inspection
The discharge lag value that unit 28 gathers MO chambers and PA chambers by Timing acquisition device 29 is surveyed, control algolithm is realized on slave computer 25,
Fed back according to discharge lag with setting the laser status information parameter that data and state acquisition unit 29 and collector 23 are adopted,
Closed loop control algorithm, and real-time update discharge lag module output valve are performed, so as to eliminate the shake of two-chamber discharge lag.This is
The shake index lifting of two-chamber corona discharge is arrived ± 5ns by system.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, it should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc. should be included in the protection of the present invention
Within the scope of.
Claims (8)
1. a kind of high-frequency and high-voltage fast pulse Timing acquisition device, the device is used for the high frequency that acquisition pulse sequential emitter is produced
High pressure fast pulse, it is characterised in that：Including transformer and signal output interface (15), the transformer includes bonded to each other the
One dielectric film (11) and the first sheet metal (12), first dielectric film (11) and the outer surface of pulse sequence emitter are close
Connection, the signal output interface (15) by transmission line respectively with first sheet metal (12) and pulse sequence emitter
Outer surface connection, and the induced signal obtained is transferred to external device (ED)；
The transformer also includes at least one lamination being made up of dielectric film and sheet metal, and each dielectric film and sheet metal are alternately folded
Put, sheet metal and the signal output interface (15) positioned at the top are connected by transmission line.
2. high-frequency and high-voltage fast pulse Timing acquisition device as claimed in claim 1, it is characterised in that：Also include impedance matching electricity
Road (16), it is connected between the outer surface of the sheet metal of the top and the pulse sequence emitter.
3. high-frequency and high-voltage fast pulse Timing acquisition device as claimed in claim 1, it is characterised in that：The transmission line is specific
The conductor of width and thickness, meets equation below：
The ZcIt is design impedance, erFor the surface of transmission line and pulse sequence emitter
Between megohmite insulant relative dielectric constant, h be the transmission line to the outer surface of the pulse sequence emitter distance,
W is the width of the transmission line, and t is the thickness of the transmission line.
4. high-frequency and high-voltage fast pulse Timing acquisition device as claimed in claim 1, it is characterised in that：The dielectric film is high score
Insulating sublayer thin-film material.
5. a kind of high-frequency and high-voltage fast pulse Timing acquisition method, the high-frequency and high-voltage produced for acquisition pulse sequential emitter is fast
Pulse, it is characterised in that：
By one end of transformer with and the outer surface of pulse sequence emitter fit, the transformer includes bonded to each other the
One dielectric film (11) and the first sheet metal (12), first dielectric film (11) and the outer surface of pulse sequence emitter are close
Connection, the signal output interface (15) by transmission line respectively with first sheet metal (12) and pulse sequence emitter
Outer surface connection；
The other end of transformer is connected with signal output interface (15) by transmission line；
Signal output interface (15) is electrically connected with the outer surface of the pulse sequence emitter；
Signal output interface (15) exports the induced signal of acquisition.
6. high-frequency and high-voltage fast pulse Timing acquisition method as claimed in claim 5, it is characterised in that：The transformer also includes
At least one lamination being made up of dielectric film and sheet metal, each dielectric film and sheet metal are alternately superimposed on, the metal positioned at the top
Piece is connected with signal output interface (15) by transmission line.
7. the high-frequency and high-voltage fast pulse Timing acquisition method as described in claim 5 or 6, it is characterised in that：Gold in the top
Belong between piece and the outer surface of the pulse sequence emitter.
8. the high-frequency and high-voltage fast pulse Timing acquisition method as described in claim 5 or 6, it is characterised in that：The transmission line is
The conductor of specific width and thickness, meets equation below：
The ZcIt is design impedance, erFor transmission line and pulse sequence emitter surface it
Between megohmite insulant relative dielectric constant, h is the transmission line to the distance of the outer surface of the pulse sequence emitter, w
For the width of the transmission line, t is the thickness of the transmission line.
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| CN201510173789.5A CN104820137B (en) | 2015-04-14 | 2015-04-14 | High-frequency and high-voltage fast pulse Timing acquisition apparatus and method |
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| CN201510173789.5A CN104820137B (en) | 2015-04-14 | 2015-04-14 | High-frequency and high-voltage fast pulse Timing acquisition apparatus and method |
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| CN104820137B true CN104820137B (en) | 2017-10-31 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7203216B2 (en) * | 2001-05-03 | 2007-04-10 | Cymer Inc. | Timing control for two-chamber gas discharge laser system |
| CN200993658Y (en) * | 2006-12-28 | 2007-12-19 | 林纪秋 | Contactless transformer-free electronic voltage measuring device |
| CN202652165U (en) * | 2012-05-29 | 2013-01-02 | 孟均 | High-speed pulse generator based on wheel rotating speed |
| CN104267223A (en) * | 2014-10-21 | 2015-01-07 | 云南电网公司普洱供电局 | Low-voltage multi-frequency and amplitude mixed test source generating device |
| CN204834324U (en) * | 2015-07-28 | 2015-12-02 | 重庆创正互感器有限公司 | High -voltage transformer of area shielding tensile arc |
-
2015
- 2015-04-14 CN CN201510173789.5A patent/CN104820137B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7203216B2 (en) * | 2001-05-03 | 2007-04-10 | Cymer Inc. | Timing control for two-chamber gas discharge laser system |
| CN200993658Y (en) * | 2006-12-28 | 2007-12-19 | 林纪秋 | Contactless transformer-free electronic voltage measuring device |
| CN202652165U (en) * | 2012-05-29 | 2013-01-02 | 孟均 | High-speed pulse generator based on wheel rotating speed |
| CN104267223A (en) * | 2014-10-21 | 2015-01-07 | 云南电网公司普洱供电局 | Low-voltage multi-frequency and amplitude mixed test source generating device |
| CN204834324U (en) * | 2015-07-28 | 2015-12-02 | 重庆创正互感器有限公司 | High -voltage transformer of area shielding tensile arc |
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Effective date of registration: 20210310 Address after: 100176 building 10, 156 Jinghai 4th Road, Daxing Economic and Technological Development Zone, Beijing Patentee after: BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |