CN104820137A - High-frequency high-voltage fast pulse sequence acquiring device and method thereof - Google Patents
High-frequency high-voltage fast pulse sequence acquiring device and method thereof Download PDFInfo
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- CN104820137A CN104820137A CN201510173789.5A CN201510173789A CN104820137A CN 104820137 A CN104820137 A CN 104820137A CN 201510173789 A CN201510173789 A CN 201510173789A CN 104820137 A CN104820137 A CN 104820137A
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Abstract
The invention discloses a high-frequency high-voltage fast pulse sequence acquiring device and a method thereof. The high-frequency high-voltage fast-pulse sequence acquiring device and the method are used for acquiring high-frequency high-voltage fast pulses which are generated by a pulse sequence transmitter. The high-frequency high-voltage fast pulse sequence acquiring device comprises a mutual inductor and a signal output interface. The mutual inductor comprises a first insulating film and a first metal sheet which are adhered with each other. The first insulating film is closely connected with the external surface of the pulse sequence transmitter. The signal output interface is connected with the external surface of the first metal sheet and the external surface of the pulse sequence transmitter through transmission lines, and furthermore transmits an acquired induction signal to an external device. The high-frequency high-voltage fast pulse sequence acquiring device and the method are applied in excimer discharge technology with a double-chamber structure, and furthermore can satisfy an energy amplification requirement of a double-chamber excimer laser.
Description
Technical field
The invention belongs to double-cavity excimer laser technical field, be specifically related to a kind of high-frequency and high-voltage fast pulse Timing acquisition apparatus and method, and comprise the double-cavity excimer laser of this harvester.
Background technology
Adopt a chamber in the excimer laser of double cavity structure to be referred to as main turbulence cavity (MO chamber), another is referred to as enlarged cavity (PA chamber).MO chamber produce seed light need in sequential accurately (shake is less than ± 5ns) pass to PA chamber, now PA cavity discharging excitation will come from MO chamber seed light energy amplify.Therefore this accurately controls the electric discharge sequential of two enlarged cavities with regard to needing.When double-cavity excimer laser electric discharge shake is mainly shaken by (1) two-chamber power-supply initial sparking voltage, discharge in the randomized jitter in (2) discharge cavity, (3) power supply intrinsic shake and (4) two-chamber power source temperature is shaken and chamber internal gas pressure fluctuates that four parts form.Wherein the solution of (4) subproblem depends on two-chamber quasi-molecule synchronous control technique.That is, for the power supply of double-cavity excimer laser, need to adopt the shake of being discharged by two-chamber of double-cavity excimer laser simultaneous techniques to control just can realize the synchronous discharge of two cavitys within ± 5ns.
The prerequisite realizing dual-cavity laser electric discharge sequential control is collection to two-chamber optical signals, and a kind of two-chamber Timing acquisition method is disclosed in patent US7203216, and the sensor wherein adopted gathers sequential and such as uses photodiode.But the shortcoming of the method needs light path light splitting, thus have lost output energy.
Summary of the invention
(1) technical matters that will solve
Technical matters to be solved by this invention is for the energy loss problem that the synchro control of two-chamber electric discharge needs the light signal gathering two-chamber outgoing to bring in existing double-cavity excimer laser.
(2) technical scheme
For solving the problems of the technologies described above, one aspect of the present invention proposes a kind of high-frequency and high-voltage fast pulse Timing acquisition device, this device is used for the high-frequency and high-voltage fast pulse that acquisition pulse sequential emitter produces, it is characterized in that: comprise mutual inductor and signal output interface, described mutual inductor comprises the first dielectric film bonded to each other and the first sheet metal, described first dielectric film is connected with the intimate of pulse sequence emitter, described signal output interface is connected with the outside surface of described first sheet metal and pulse sequence emitter respectively by transmission line, and obtained induced signal is transferred to external device (ED).
According to the specific embodiment of the present invention, described mutual inductor also comprises at least one lamination be made up of dielectric film and sheet metal, and each dielectric film and sheet metal are alternately stacked, and the sheet metal being positioned at the top is connected by transmission line with signal output interface.
According to the specific embodiment of the present invention, also comprise impedance matching circuit, it is connected between the sheet metal of the superiors and the outside surface of described pulse sequence emitter.
According to the specific embodiment of the present invention, defeated transmission line be the conductor of specific width and thickness, meet following formula:
described Z
cdesign impedance, e
rfor the relative dielectric constant of megohmite insulant between transmission line and pulse sequence emitter surface, h is the distance of described transmission line to the outside surface of described pulse sequence emitter, and w is the width of described transmission line, and t is the thickness of described transmission line.
According to the specific embodiment of the present invention, described dielectric film is polymer insulation membraneous material.
Another aspect of the present invention also proposes a kind of high-frequency and high-voltage fast pulse Timing acquisition method, for the high-frequency and high-voltage fast pulse that acquisition pulse sequential emitter produces, comprise the steps: one end of mutual inductor and the outside surface with pulse sequence emitter to fit; The other end of mutual inductor is connected by transmission line with signal output interface; The outside surface of signal output interface with described pulse sequence emitter is electrically connected; The induced signal obtained exports by place's signal output interface.
According to the specific embodiment of the present invention, described mutual inductor comprises the first dielectric film bonded to each other and the first sheet metal, described first dielectric film is connected with the intimate of pulse sequence emitter, and described signal output interface is connected with the outside surface of described first sheet metal and pulse sequence emitter respectively by transmission line.
According to the specific embodiment of the present invention, described mutual inductor also comprises at least one lamination be made up of dielectric film and sheet metal, and each dielectric film and sheet metal are alternately stacked, and the sheet metal being positioned at the top is connected by transmission line with signal output interface.
According to the specific embodiment of the present invention, between the sheet metal and the outside surface of described pulse sequence emitter of the described the superiors.
According to the specific embodiment of the present invention, described transmission line is the conductor of specific width and thickness, meets following formula:
described Z
cdesign impedance, e
rfor the relative dielectric constant of megohmite insulant between transmission line and pulse sequence emitter surface, h is the distance of described transmission line to the outside surface of described pulse sequence emitter, and w is the width of described transmission line, and t is the thickness of described transmission line.
(3) beneficial effect
The present invention is applied in the quasi-molecule electric discharge simultaneous techniques adopting double cavity structure, and the energy that can meet double-cavity excimer laser amplifies requirement.
Accompanying drawing explanation
Figure 1A is the structural representation of an embodiment of high-frequency and high-voltage fast pulse Timing acquisition device of the present invention;
Figure 1B is the structural representation of the second embodiment of high-frequency and high-voltage fast pulse Timing acquisition device of the present invention;
Fig. 1 C is the structural representation of the 3rd embodiment of high-frequency and high-voltage fast pulse Timing acquisition device of the present invention;
Fig. 2 is the installation site schematic diagram of the mutual inductor in the embodiment of the present invention;
Fig. 3 A is the attached view of the collecting unit of the embodiment of the present invention;
Fig. 3 B is that electrograph is shown in the amplification of the transmission line of the embodiment of the present invention;
Fig. 4 is the module map as two-chamber line lock control device be applied in double-cavity excimer laser of the high-frequency and high-voltage fast pulse Timing acquisition device that the present invention proposes.
Embodiment
The present invention proposes a kind of high-frequency and high-voltage fast pulse Timing acquisition device and acquisition method, and these apparatus and method are used for the high-frequency and high-voltage fast pulse that acquisition pulse sequential emitter produces.The present invention can be applicable in the electric discharge simultaneous techniques of the excimer laser adopting double cavity structure, its principle is the electric discharge clock signal being gathered discharge cavity by the high-voltage mutual inductor of particular design, and replaces using photodiode to gather light signal in prior art with this mutual inductor.
Described high-frequency and high-voltage fast pulse Timing acquisition method comprises the steps: one end of mutual inductor and the outside surface with pulse sequence emitter to fit; The other end of mutual inductor is connected by transmission line with signal output interface; The outside surface of signal output interface with described pulse sequence emitter is electrically connected; The induced signal obtained exports by place's signal output interface.
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
Figure 1A is the structural representation of an embodiment of high-frequency and high-voltage fast pulse Timing acquisition device of the present invention.As shown in Figure 1, in this embodiment, harvester uses the mutual inductor of high voltage capacitive coupling to detect pulse signal, and this mutual inductor comprises the first dielectric film 11 and the first sheet metal 12 bonded to each other.Harvester also comprises a signal output interface 15.Wherein, first dielectric film 11 is connected with the intimate of pulse sequence emitter, signal output interface 15 is connected with the outside surface of described first sheet metal 12 and pulse sequence emitter respectively by transmission line, and obtained induced signal is transferred to external device (ED).
First dielectric film 11 can adopt thermal stability and the superior polymer insulation membraneous material of electric property, as ultra-high molecular weight polyethylene or polyimide etc.The material of the first sheet metal 12 can be aluminium, copper etc.
In this embodiment, the first dielectric film 11 is polymer insulation membraneous material, and it is attached at the outside surface of the discharge cavity A of double-cavity excimer laser, and discharge cavity A's is external surface grounded.First dielectric film 11 sticks again aluminum or the first sheet metal 12 made of copper.Like this, discharge cavity A, the first dielectric film 12 and the first sheet metal 11 just constitute a coupling capacitance.
Figure 1B is the structural representation of the second embodiment of high-frequency and high-voltage fast pulse Timing acquisition device of the present invention.The structure shown with Figure 1A unlike, the dielectric film in this second embodiment and sheet metal all have two-layer and alternately stacked.Specifically, above the first sheet metal 12, be pasted with the second dielectric film 13 and the second sheet metal 14 more successively, one end of signal output interface 15 is connected to this second sheet metal.The Material selec-tion of the second dielectric film 13 and the second sheet metal 14 and the selection of the first dielectric film 11 and the first sheet metal 12 similar.In order to improve the signal to noise ratio (S/N ratio) of signal, this pulse sequence harvester distance high-voltage discharge end is very near, and the harvester of the first embodiment has by the danger of high electrical breakdown.This embodiment has higher insulation resistance compared to the first embodiment.
In reality is implemented, also can with this second embodiment similar superpose more layer, and keep dielectric film and sheet metal alternately stacked, the sheet metal being positioned at the top is connected by transmission line with signal output interface 15.
Fig. 1 C is the structural representation of the 3rd embodiment of high-frequency and high-voltage fast pulse Timing acquisition device of the present invention.It is the improvement in the example structure of Figure 1B display, unlike, the harvester of this embodiment also comprises an impedance matching circuit 16, and it is connected between the second sheet metal 14 and discharge cavity A.Impedance matching circuit 16 is for the matching transmission of Fast-Pulse Measuring, and this match circuit can be coupling in parallel, and such as signal transmits with 50 ohmages, and match circuit 16 can be the resistance of 50 ohm in parallel with signal output interface 14, as parallel termination.Because the insulating dielectric materials of dielectric film is different with the selection of the area of sheet metal, signal pulse pulsewidth is approximately tens nanoseconds or longer.For this high-speed pulse electric signal, when hardware design, signal integrity need be taken into full account, impedance matching loop reasonable in design.Obtained the pulse square wave signal of standard again by anomalous integral enlarge leadingly, two pulse signals is outputted to special pulse delay and measure in chip or dual channel high speed AD capture card, the final delay value obtaining two-way pulse.Described impedance matching circuit 16 also can be configured in the embodiment of the first embodiment or other many laminations.
Fig. 2 gives the installation site schematic diagram of the mutual inductor in above-described embodiment.This figure is for the first embodiment, and wherein left figure is the front view of single chamber excimer laser, and power supply 18 is connected by HV Terminal 21 with discharge cavity 20, and 19 is electric discharge intracavity electrodes.22 is excimer laser light directions.Right figure is single chamber excimer laser side view, and 23 is exactly hf and hv pulse Timing acquisition device.This device is arranged near HV Terminal 21, can be attached on power supply 18 or discharge cavity 20.Wherein mutual inductor is arranged between the power supply of excimer laser and discharge cavity, and near the position of peaking capacitor.This pulse signal on the first sheet metal 12 of the coupling capacitance of mutual inductor, and is exported by the signal output interface 15 on the first sheet metal 12 by the space radiation signal coupling produced during discharge cavity electric discharge.
Fig. 3 A is the attached view of the collecting unit of above-mentioned first, second, third embodiment.As shown in Figure 3A, the transmission line 17 that signal output interface 16 adopts with the connection of sheet metal can carry out designing to obtain suitable impedance, thus obtains optimum signal output.
Fig. 3 B is that electrograph is shown in the amplification of transmission line of the present invention, wherein for the first embodiment.As shown in Figure 3 B, transmission line 17 is a slice specific width and thickness conductor sheet, can be copper sheet, aluminium flake etc.For 50 ohm of design impedances, Z
c=50 Ω, e
rfor the relative dielectric constant (insulant can be air or casting glue etc.) of megohmite insulant between transmission line and pulse sequence emitter surface, h by transmission line arrive subsides surface distance, w is the width of transmission line, and t is the thickness of transmission line, brings above parameter into formula.The combination of transmission line width w and thickness t can be gone out by inverse.
Fig. 4 is the module map as two-chamber line lock control device be applied in double-cavity excimer laser of the high-frequency and high-voltage fast pulse Timing acquisition device that the present invention proposes.As shown in Figure 4, laser instrument comprises MO chamber and PA chamber, and MO chamber and PA chamber are furnished with the first power supply and second source respectively.Two-chamber line lock control device comprises delay measuring unit 28, host computer 24 and slave computer 25, exports delay unit 27 and state acquisition unit 26, first Timing acquisition unit 29a and the second Timing acquisition unit 29b, connects high-frequency and high-voltage fast pulse Timing acquisition device 23a and 23b respectively.The harvester that described high-frequency and high-voltage fast pulse Timing acquisition device 23a and 23b is in above-described embodiment is formed, for gathering two-chamber discharge waveform and time sequence information.Time delay detecting unit 28 gathers the discharge lag value in MO chamber and PA chamber by Timing acquisition device 29, control algolithm realizes on slave computer 25, according to the laser status information parameter that discharge lag feedback is adopted with setting data and state acquisition unit 29 and collector 23, perform closed loop control algorithm, and real-time update discharge lag module output valve, thus eliminate the shake of two-chamber discharge lag.Two-chamber corona discharge shake index is risen to ± 5ns by this system.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a high-frequency and high-voltage fast pulse Timing acquisition device, this device is used for the high-frequency and high-voltage fast pulse that acquisition pulse sequential emitter produces, it is characterized in that: comprise mutual inductor and signal output interface (15), described mutual inductor comprises the first dielectric film (11) bonded to each other and the first sheet metal (12), described first dielectric film (11) is connected with the intimate of pulse sequence emitter, described signal output interface (15) is connected with the outside surface of described first sheet metal (12) and pulse sequence emitter respectively by transmission line, and obtained induced signal is transferred to external device (ED).
2. high-frequency and high-voltage fast pulse Timing acquisition device as claimed in claim 1, it is characterized in that: described mutual inductor also comprises at least one lamination be made up of dielectric film and sheet metal, each dielectric film and sheet metal are alternately stacked, and the sheet metal being positioned at the top is connected by transmission line with signal output interface (15).
3. high-frequency and high-voltage fast pulse Timing acquisition device as claimed in claim 1 or 2, it is characterized in that: also comprise impedance matching circuit (16), it is connected between the sheet metal of the superiors and the outside surface of described pulse sequence emitter.
4. high-frequency and high-voltage fast pulse Timing acquisition device as claimed in claim 1 or 2, is characterized in that: defeated transmission line be the conductor of specific width and thickness, meet following formula:
described Z
cdesign impedance, e
rfor the relative dielectric constant of megohmite insulant between transmission line and the surface of pulse sequence emitter, h is the distance of described transmission line to the outside surface of described pulse sequence emitter, and w is the width of described transmission line, and t is the thickness of described transmission line.
5. high-frequency and high-voltage fast pulse Timing acquisition device as claimed in claim 1 or 2, is characterized in that: described dielectric film is polymer insulation membraneous material.
6. a high-frequency and high-voltage fast pulse Timing acquisition method, for the high-frequency and high-voltage fast pulse that acquisition pulse sequential emitter produces, is characterized in that:
Fitted in one end of mutual inductor and the outside surface with pulse sequence emitter;
The other end of mutual inductor is connected by transmission line with signal output interface (15);
The outside surface of signal output interface (15) with described pulse sequence emitter is electrically connected;
The induced signal obtained exports by place's signal output interface (15).
7. high-frequency and high-voltage fast pulse Timing acquisition method as claimed in claim 6, is characterized in that:
Described mutual inductor comprises the first dielectric film (11) bonded to each other and the first sheet metal (12), described first dielectric film (11) is connected with the intimate of pulse sequence emitter, and described signal output interface (15) is connected with the outside surface of described first sheet metal (12) and pulse sequence emitter respectively by transmission line.
8. high-frequency and high-voltage fast pulse Timing acquisition method as claimed in claim 7, it is characterized in that: described mutual inductor also comprises at least one lamination be made up of dielectric film and sheet metal, each dielectric film and sheet metal are alternately stacked, and the sheet metal being positioned at the top is connected by transmission line with signal output interface (15).
9. the high-frequency and high-voltage fast pulse Timing acquisition method according to any one of claim 6 to 8, is characterized in that: between the sheet metal and the outside surface of described pulse sequence emitter of the described the superiors.
10. the high-frequency and high-voltage fast pulse Timing acquisition method according to any one of claim 6 to 8, is characterized in that: described transmission line is the conductor of specific width and thickness, meets following formula:
described Z
cdesign impedance, e
rfor the relative dielectric constant of megohmite insulant between transmission line and pulse sequence emitter surface, h is the distance of described transmission line to the outside surface of described pulse sequence emitter, and w is the width of described transmission line, and t is the thickness of described transmission line.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109827477A (en) * | 2019-01-22 | 2019-05-31 | 北京电子工程总体研究所 | A kind of acquisition and recording general-purpose system of the priming system sensitizing pulse timing on bullet |
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|---|---|---|---|---|
| US7203216B2 (en) * | 2001-05-03 | 2007-04-10 | Cymer Inc. | Timing control for two-chamber gas discharge laser system |
| CN200993658Y (en) * | 2006-12-28 | 2007-12-19 | 林纪秋 | Contactless transformer-free electronic voltage measuring device |
| CN202652165U (en) * | 2012-05-29 | 2013-01-02 | 孟均 | High-speed pulse generator based on wheel rotating speed |
| CN104267223A (en) * | 2014-10-21 | 2015-01-07 | 云南电网公司普洱供电局 | Low-voltage multi-frequency and amplitude mixed test source generating device |
| CN204834324U (en) * | 2015-07-28 | 2015-12-02 | 重庆创正互感器有限公司 | High -voltage transformer of area shielding tensile arc |
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2015
- 2015-04-14 CN CN201510173789.5A patent/CN104820137B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7203216B2 (en) * | 2001-05-03 | 2007-04-10 | Cymer Inc. | Timing control for two-chamber gas discharge laser system |
| CN200993658Y (en) * | 2006-12-28 | 2007-12-19 | 林纪秋 | Contactless transformer-free electronic voltage measuring device |
| CN202652165U (en) * | 2012-05-29 | 2013-01-02 | 孟均 | High-speed pulse generator based on wheel rotating speed |
| CN104267223A (en) * | 2014-10-21 | 2015-01-07 | 云南电网公司普洱供电局 | Low-voltage multi-frequency and amplitude mixed test source generating device |
| CN204834324U (en) * | 2015-07-28 | 2015-12-02 | 重庆创正互感器有限公司 | High -voltage transformer of area shielding tensile arc |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109827477A (en) * | 2019-01-22 | 2019-05-31 | 北京电子工程总体研究所 | A kind of acquisition and recording general-purpose system of the priming system sensitizing pulse timing on bullet |
| CN109827477B (en) * | 2019-01-22 | 2021-06-04 | 北京电子工程总体研究所 | A gather record common system for firing on bullet initiating explosive device activation pulse time sequence |
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