CN204720771U - Two-chamber Timing acquisition device and double-cavity excimer laser - Google Patents
Two-chamber Timing acquisition device and double-cavity excimer laser Download PDFInfo
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- CN204720771U CN204720771U CN201520223358.0U CN201520223358U CN204720771U CN 204720771 U CN204720771 U CN 204720771U CN 201520223358 U CN201520223358 U CN 201520223358U CN 204720771 U CN204720771 U CN 204720771U
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Abstract
The utility model discloses and be a kind ofly suitable for the two-chamber Timing acquisition device of high-frequency and high-voltage fast pulse and use its double-cavity excimer laser, two-chamber Timing acquisition device is used for the high-frequency and high-voltage fast pulse that acquisition pulse sequential emitter produces.Device comprises instrument transformer and signal output interface, instrument transformer comprises the first dielectric film bonded to each other and the first sheet metal, first dielectric film is connected with the intimate of pulse sequence emitter, signal output interface is connected with the outer surface of the first sheet metal and pulse sequence emitter respectively by transmission line, and obtained induced signal is transferred to external device (ED).The utility model is applied in the quasi-molecule electric discharge simultaneous techniques adopting double cavity structure, and the energy that can meet double-cavity excimer laser amplifies requirement.
Description
Technical field
The utility model belongs to double-cavity excimer laser technical field, is specifically related to a kind of two-chamber Timing acquisition device being suitable for high-frequency and high-voltage fast pulse, and comprises the double-cavity excimer laser of this two-chamber Timing acquisition device.
Background technology
Adopt a chamber in the excimer laser of double cavity structure to be referred to as main turbulence cavity (MO chamber), another is referred to as enlarged cavity (PA chamber).MO chamber produce seed light need in sequential accurately (shake is less than ± 5ns) pass to PA chamber, now PA cavity discharging excitation will come from MO chamber seed light energy amplify.Therefore this accurately controls the electric discharge sequential of two enlarged cavities with regard to needing.When double-cavity excimer laser electric discharge shake is mainly shaken by (1) two-chamber power-supply initial discharge voltage, discharge in the randomized jitter in (2) discharge cavity, (3) power supply intrinsic shake and (4) two-chamber power source temperature is shaken and chamber internal gas pressure fluctuates that four parts form.Wherein the solution of (4) subproblem depends on two-chamber quasi-molecule synchronous control technique.That is, for the power supply of double-cavity excimer laser, need to adopt the shake of being discharged by two-chamber of double-cavity excimer laser simultaneous techniques to control just can realize the synchronous discharge of two cavitys within ± 5ns.
The prerequisite realizing dual-cavity laser electric discharge sequencing control is collection to two-chamber optical signals, and a kind of two-chamber Timing acquisition method is disclosed in patent US7203216, and the transducer wherein adopted gathers sequential and such as uses photodiode.But the shortcoming of the method needs light path light splitting, thus have lost output energy.
Utility model content
(1) technical problem that will solve
Technical problem to be solved in the utility model is for the energy loss problem that the Synchronization Control of two-chamber electric discharge needs the light signal gathering two-chamber outgoing to bring in existing double-cavity excimer laser.
(2) technical scheme
For solving the problems of the technologies described above, the utility model proposes a kind of two-chamber Timing acquisition device, this device is used for the pulse that acquisition pulse sequential emitter produces, comprise instrument transformer and signal output interface (15), described instrument transformer comprises at least one lamination be made up of dielectric film and sheet metal, and each dielectric film and sheet metal are alternately stacked; Described signal output interface (15) is connected with the sheet metal of the top and the outer surface of pulse sequence emitter respectively by transmission line, and obtained induced signal is transferred to external device (ED).
According to embodiment of the present utility model, described device also comprises impedance matching circuit (16), and it is connected between the sheet metal of the superiors and the outer surface of described pulse sequence emitter.
According to embodiment of the present utility model, described transmission line is conductor, and its width and thickness meet following formula:
described Z
cdesign impedance, e
rfor the relative dielectric constant of megohmite insulant between transmission line and the surface of pulse sequence emitter, h is the distance of described transmission line to the outer surface of described pulse sequence emitter, and w is the width of described transmission line, and t is the thickness of described transmission line.
According to embodiment of the present utility model, described dielectric film is polymer insulation thin-film material.
According to embodiment of the present utility model, described polymer insulation thin-film material is polyethylene or polyimides.
According to embodiment of the present utility model, the material of described sheet metal is copper or aluminium.
The utility model also proposes the double-cavity excimer laser comprising above-mentioned two-chamber Timing acquisition device.
(3) beneficial effect
The utility model is applied in the quasi-molecule electric discharge simultaneous techniques adopting double cavity structure, and the energy that can meet double-cavity excimer laser amplifies requirement.
Accompanying drawing explanation
Figure 1A is the structural representation of an embodiment of two-chamber Timing acquisition device of the present utility model;
Figure 1B is the structural representation of the second embodiment of two-chamber Timing acquisition device of the present utility model;
Fig. 1 C is the structural representation of the 3rd embodiment of two-chamber Timing acquisition device of the present utility model;
Fig. 2 is the installation site schematic diagram of the instrument transformer in the utility model embodiment;
Fig. 3 A is the attached view of the collecting unit of the utility model embodiment;
Fig. 3 B is that electrograph is shown in the amplification of the transmission line of the utility model embodiment;
Fig. 4 is the module map as two-chamber line lock control device be applied in double-cavity excimer laser of the two-chamber Timing acquisition device that the utility model proposes.
Embodiment
The utility model proposes a kind of two-chamber Timing acquisition device, this device is used for the high-frequency and high-voltage fast pulse that acquisition pulse sequential emitter produces.The utility model can be applicable in the electric discharge simultaneous techniques of the excimer laser adopting double cavity structure, its principle is the electric discharge clock signal being gathered discharge cavity by the high-voltage mutual inductor of particular design, and replaces using photodiode to gather light signal in prior art with this instrument transformer.
Described two-chamber Timing acquisition method comprises the steps: one end of instrument transformer and the outer surface with pulse sequence emitter to fit; The other end of instrument transformer is connected by transmission line with signal output interface; The outer surface of signal output interface with described pulse sequence emitter is electrically connected; The induced signal obtained exports by place's signal output interface.
For making the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
Figure 1A is the structural representation of an embodiment of two-chamber Timing acquisition device of the present utility model.As shown in Figure 1A, in this embodiment, harvester uses the instrument transformer of high voltage capacitive coupling to detect pulse signal, and this instrument transformer comprises the first dielectric film 11 and the first sheet metal 12 bonded to each other.Harvester also comprises a signal output interface 15.Wherein, first dielectric film 11 is connected with the intimate of pulse sequence emitter, signal output interface 15 is connected with the outer surface of described first sheet metal 12 and pulse sequence emitter respectively by transmission line, and obtained induced signal is transferred to external device (ED).
First dielectric film 11 can adopt thermal stability and the superior polymer insulation thin-film material of electric property, as ultra-high molecular weight polyethylene or polyimides etc.The material of the first sheet metal 12 can be aluminium, copper etc.
In this embodiment, the first dielectric film 11 is polymer insulation thin-film material, and it is attached at the outer surface of the discharge cavity A of double-cavity excimer laser, and discharge cavity A's is external surface grounded.First dielectric film 11 sticks again aluminum or the first sheet metal 12 made of copper.Like this, discharge cavity A, the first dielectric film 12 and the first sheet metal 11 just constitute a coupling capacitance.
Figure 1B is the structural representation of the second embodiment of two-chamber Timing acquisition device of the present utility model.The structure shown with Figure 1A unlike, the dielectric film in this second embodiment and sheet metal all have two-layer and alternately stacked.Specifically, above the first sheet metal 12, be pasted with the second dielectric film 13 and the second sheet metal 14 more successively, one end of signal output interface 15 is connected to this second sheet metal.The Material selec-tion of the second dielectric film 13 and the second sheet metal 14 and the selection of the first dielectric film 11 and the first sheet metal 12 similar.In order to improve the signal to noise ratio of signal, this pulse sequence harvester distance high-voltage discharge end is very near, and the harvester of the first embodiment has by the danger of high electrical breakdown.This embodiment has higher insulation resistance compared to the first embodiment.
In reality is implemented, also can with this second embodiment similar superpose more layer, and keep dielectric film and sheet metal alternately stacked, the sheet metal being positioned at the top is connected by transmission line with signal output interface 15.
Fig. 1 C is the structural representation of the 3rd embodiment of two-chamber Timing acquisition device of the present utility model.It is the improvement in the example structure of Figure 1B display, unlike, the harvester of this embodiment also comprises an impedance matching circuit 16, and it is connected between the second sheet metal 14 and discharge cavity A.Impedance matching circuit 16 is for the matching transmission of Fast-Pulse Measuring, and this match circuit can be coupling in parallel, and such as signal transmits with 50 ohmages, and match circuit 16 can be the resistance of 50 ohm in parallel with signal output interface 14, as parallel termination.Because the insulating dielectric materials of dielectric film is different with the selection of the area of sheet metal, signal pulse pulsewidth is approximately tens nanoseconds or longer.For this high-speed pulse signal of telecommunication, when hardware designs, signal integrity need be taken into full account, impedance matching loop reasonable in design.Obtained the pulse square wave signal of standard again by anomalous integral enlarge leadingly, two pulse signals is outputted to special pulse delay and measure in chip or dual channel high speed AD capture card, the final delay value obtaining two-way pulse.Described impedance matching circuit 16 also can be configured in the embodiment of the first embodiment or other many laminations.
Fig. 2 gives the installation site schematic diagram of the instrument transformer in above-described embodiment.This figure is for the first embodiment, and wherein left figure is the front view of single chamber excimer laser, and power supply 18 is connected by HV Terminal 21 with discharge cavity 20, and 19 is electric discharge intracavity electrodes.22 is excimer laser light directions.Right figure is single chamber excimer laser end view, and 23 is exactly hf and hv pulse Timing acquisition device.This device is arranged near HV Terminal 21, can be attached on power supply 18 or discharge cavity 20.Wherein instrument transformer is arranged between the power supply of excimer laser and discharge cavity, and near the position of peaking capacitor.This pulse signal on the first sheet metal 12 of the coupling capacitance of instrument transformer, and is exported by the signal output interface 15 on the first sheet metal 12 by the space radiation signal coupling produced during discharge cavity electric discharge.
Fig. 3 A is the attached view of the collecting unit of above-mentioned first, second, third embodiment.As shown in Figure 3A, the transmission line 17 that signal output interface 16 adopts with the connection of sheet metal can carry out designing to obtain suitable impedance, thus obtains optimum signal output.
Fig. 3 B is that electrograph is shown in the amplification of transmission line of the present utility model, wherein for the first embodiment.As shown in Figure 3 B, transmission line 17 is a slice specific width and thickness conductor sheet, can be copper sheet, aluminium flake etc.For 50 ohm of design impedances, Z
c=50 Ω, e
rfor the relative dielectric constant (insulant can be air or casting glue etc.) of megohmite insulant between transmission line and pulse sequence emitter surface, h by transmission line arrive subsides surface distance, w is the width of transmission line, and t is the thickness of transmission line, brings above parameter into formula.The combination of transmission line width w and thickness t can be gone out by inverse.
Fig. 4 is the module map as two-chamber line lock control device be applied in double-cavity excimer laser of the two-chamber Timing acquisition device that the utility model proposes.As shown in Figure 4, laser comprises MO chamber and PA chamber, and MO chamber and PA chamber are furnished with the first power supply and second source respectively.Two-chamber line lock control device comprises delay measuring unit 28, host computer 24 and slave computer 25, exports delay unit 27 and state acquisition unit 26, first Timing acquisition unit 29a and the second Timing acquisition unit 29b, connects two-chamber Timing acquisition device 23a and 23b respectively.The harvester that described two-chamber Timing acquisition device 23a and 23b is in above-described embodiment is formed, for gathering two-chamber discharge waveform and time sequence information.Time delay detecting unit 28 gathers the discharge lag value in MO chamber and PA chamber by Timing acquisition device 29, control algolithm realizes on slave computer 25, according to the laser status information parameter that discharge lag feedback is adopted with setting data and state acquisition unit 29 and collector 23, perform closed loop control algorithm, and real-time update discharge lag module output valve, thus eliminate the shake of two-chamber discharge lag.Two-chamber corona discharge shake index is risen to ± 5ns by this system.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any amendment made, equivalent replacement, improvement etc., all should be included within protection range of the present utility model.
Claims (7)
1. a two-chamber Timing acquisition device, this device is used for the pulse that acquisition pulse sequential emitter produces, and it is characterized in that:
Comprise instrument transformer and signal output interface (15),
Described instrument transformer comprises at least one lamination be made up of dielectric film and sheet metal, and each dielectric film and sheet metal are alternately stacked;
Described signal output interface (15) is connected with the sheet metal of the top and the outer surface of pulse sequence emitter respectively by transmission line, and obtained induced signal is transferred to external device (ED).
2. two-chamber Timing acquisition device as claimed in claim 1, it is characterized in that: also comprise impedance matching circuit (16), it is connected between the sheet metal of the superiors and the outer surface of described pulse sequence emitter.
3. two-chamber Timing acquisition device as claimed in claim 1, it is characterized in that: described transmission line is conductor, its width and thickness meet following formula:
described Z
cdesign impedance, e
rfor the relative dielectric constant of megohmite insulant between transmission line and the surface of pulse sequence emitter, h is the distance of described transmission line to the outer surface of described pulse sequence emitter, and w is the width of described transmission line, and t is the thickness of described transmission line.
4. two-chamber Timing acquisition device as claimed in claim 1, is characterized in that: described dielectric film is polymer insulation thin-film material.
5. two-chamber Timing acquisition device as claimed in claim 4, is characterized in that: described polymer insulation thin-film material is polyethylene or polyimides.
6. two-chamber Timing acquisition device as claimed in claim 1, is characterized in that: the material of described sheet metal is copper or aluminium.
7. a double-cavity excimer laser, comprises the two-chamber Timing acquisition device according to any one of claim 1 to 6.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520223358.0U CN204720771U (en) | 2015-04-14 | 2015-04-14 | Two-chamber Timing acquisition device and double-cavity excimer laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520223358.0U CN204720771U (en) | 2015-04-14 | 2015-04-14 | Two-chamber Timing acquisition device and double-cavity excimer laser |
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| Publication Number | Publication Date |
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| CN204720771U true CN204720771U (en) | 2015-10-21 |
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| CN201520223358.0U Active CN204720771U (en) | 2015-04-14 | 2015-04-14 | Two-chamber Timing acquisition device and double-cavity excimer laser |
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| Country | Link |
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- 2015-04-14 CN CN201520223358.0U patent/CN204720771U/en active Active
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200826 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200826 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210315 Address after: 100176 building 10, 156 Jinghai 4th Road, Daxing Economic and Technological Development Zone, Beijing Patentee after: BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |