CN104776961A - Method for realizing stable reference background index of gas leakage detection system and gas leakage detection system - Google Patents

Method for realizing stable reference background index of gas leakage detection system and gas leakage detection system Download PDF

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Publication number
CN104776961A
CN104776961A CN201410018568.6A CN201410018568A CN104776961A CN 104776961 A CN104776961 A CN 104776961A CN 201410018568 A CN201410018568 A CN 201410018568A CN 104776961 A CN104776961 A CN 104776961A
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gas
checking system
air leakage
valve
leakage checking
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李建和
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Guangzhou And Shanxi Automated Control Technology Co Ltd
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Guangzhou And Shanxi Automated Control Technology Co Ltd
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Abstract

The invention discloses a method for realizing a stable reference background index of a gas leakage detection system and the gas leakage detection system. The method comprises the following steps: A, before performing gas leakage detection work by the gas leakage detection system or after finishing gas leakage detection work by the gas leakage detection system, filling a sampling space of the gas leakage detection system with cleaning gas; B, performing gas exhausting on the sampling space; C, detecting concentration change of tracer gas in the sampling space in real time by a gas leakage detection instrument; D, when monitoring that the concentration of the tracer gas in the sampling space returns to the reference background index by the gas leakage detection instrument, stopping cleaning gas filling of the sampling space and stopping gas exhausting. The method adopts the cleaning gas for cleaning the sampling space and monitoring the concentration of the tracer gas in the sampling space in real time, provides a clean and stable background environment for the gas leakage detection system, and can avoid influence on the running stability of the system due to excessive background noise level of the gas detection system, thereby improving the running efficiency of the system.

Description

Air leakage checking system is stablized benchmark background and is referred to calibration method and this air leakage checking system
Technical field
The present invention relates to a kind of method that air leakage checking system provides stable benchmark background index environment; Meanwhile, the invention still further relates to the device for realizing the method.
Background technology
Gas detection technology range of application is comparatively wide, wherein more typically adopts a kind of air leakage checking system to carry out air-leakage test to workpiece to be checked.Existing air leakage checking system external structure is shown in Fig. 4, it includes frame, trace gas source 1, tracer gas gas filling valve 2, pressure transducer, detection case 3, leak detector valve 4, reverse flow valve 5 and the several critical piece of gas leakage detector 6, two kinds are generally divided into, i.e. box air leakage checking system and gas cover type gas leak detection system by detection method.
Box gas leak detection technology is generally as tracer gas with gases such as halogen gas, hydrogen or helium, tracer gas is filled with workpiece 10 to be checked inner, the concentration of the outside tracer gas of workpiece 10 to be checked is detected with gas leakage detector 6, if the tracer gas signal detected exceedes gas leakage detector 6 setting value, show that workpiece to be checked has leakage.
Box air leakage checking system can be divided into vacuum box type gas leakage detecting system and large air-box type air leakage checking system, large air-box type air leakage checking system principle of work structure diagram as shown in Figure 1,1 be trace gas source, 2 be tracer gas gas filling valve in figure, 3 be detection case, 10 be workpiece to be checked, 4 be leak detector valve, 5 be reverse flow valve, 6 for gas leakage detector, workpiece 10 to be checked is placed in detection case 3, and workpiece 10 to be checked is connected by connecting tube with trace gas source 1, during detection, after the door closedown of detection case 3, the tracer gas gas filling valve 2 connecting workpiece 10 to be checked is opened, tracer gas is charged in workpiece 10 to be checked, after the pressure transducer charge pressure detected in workpiece 10 to be checked reaches certain value, operation tracer gas gas filling valve 2 is closed, leak detector valve 4 and reverse flow valve 5 are opened simultaneously, if workpiece 10 to be checked has leakage, gas in workpiece 10 to be checked can overflow from small opening and enter detection case 3 under the effect of pressure reduction, gas leakage detector 6 samples from detection case 3, and judge whether workpiece leakage exceeds standard according to the tracer gas signal magnitude obtained.
For vacuum box type gas leakage detecting system (see figure 2), there is vacuum pump 7 to be connected with detection case 3 with vacuum valve 8, before tracer gas fills, detection case 3 is vacuumized; For large air-box type air leakage checking system (see figure 1), without the need to vacuumizing detection case.
And gas cover type air leakage checking system is also as tracer gas with gases such as halogen gas, hydrogen or helium, tracer gas is filled with in detection case (i.e. gas hood), the concentration of inside workpiece tracer gas to be checked is detected with gas leakage detector, if the tracer gas index detected exceedes gas leakage detector setting value, show that workpiece to be checked has leakage.
Above-mentioned gas cover type air leakage checking system principle of work as shown in Figure 3, in figure 1 be trace gas source, 2 for tracer gas gas filling valve, 3 for detection case (i.e. gas hood), 10 for workpiece to be checked, 16 for workpiece adapter, 4 for leak detector valve, 5 be reverse flow valve, 6 be gas leakage detector.Workpiece 10 to be checked is placed in detection case 3, and be connected with leak detector valve 4, reverse flow valve 5 and gas leakage detector 6 by workpiece adapter 16, detection case 3 is connected by connecting tube with trace gas source 1; After the door closedown of detection case 3, tracer gas gas filling valve 2 is opened, and tracer gas is charged in detection case 3; After pressure transducer detects that detection case 3 charge pressure reaches certain value, tracer gas gas filling valve 2 is closed, leak detector valve 4 and reverse flow valve 5 are opened, if workpiece 10 to be checked has leakage, detection case 3(and gas hood) in gas overflow into workpiece to be checked from workpiece small opening under the effect of pressure reduction, gas leakage detector 6 samples from the inner space of workpiece 10 to be checked, and judges whether workpiece leakage exceeds standard according to the tracer gas signal magnitude obtained.
Principal feature that is box or gas cover type air leakage checking system is that precision of detecting leak gas is high, and productive temp is fast, simple to operate.
The associated conduit space that the sampler space 9 of box air leakage checking system is detection case 3 space and is connected with gas leakage detector 6, the sampler space 9 of gas cover type air leakage checking system is the inner space of workpiece 10 to be checked, workpiece adapter 16 and the associated conduit space be connected with gas leakage detector thereof, box or gas cover type air leakage checking system is before tracer gas fills, in the clean sampler space 9, gas is benchmark background, and the tracer gas signal remained in the sampler space 9 is called background noise after detecting, tracer gas in background noise may to bleed the sampler space from air leakage checking system self, or the residual accumulation of previous detection, tracer gas background noise can be more long-pending higher along with reruning of system, when background noise exceedes certain level, leak locator can be caused normally to run, even cause the erroneous judgement of testing result, prior art effectively can not eliminate the residual accumulation of tracer gas, usual needs run by empty machine repeatedly the impact eliminating background noise, equipment operating efficiency is low, cause energy dissipation.
Invent novel content
The object of the invention is to for the problems referred to above weak point, provide a kind of effectively can remove the undetected examining system of gas background noise, provide totally, stablize the method for benchmark background index environment for the undetected examining system of gas.It can avoid the background noise level of gas detecting system to exceed standard thus the stability of influential system operation, improves the operational efficiency of system.
In order to achieve the above object, the present invention is by the following technical solutions:
A kind of air leakage checking system is stablized benchmark background and is referred to calibration method, and it comprises the following steps:
A: air leakage checking system carry out gas leak detection work start before or after completing, purge gas is filled with to the sampler space of air leakage checking system;
B: exhaust is implemented to the sampler space;
C: the concentration change detecting tracer gas in the sampler space with gas leakage detector in real time;
D: when gas leakage detector monitors after the concentration of tracer gas in the sampler space returns to benchmark background index, stop being filled with purge gas to the sampler space and stopping exhaust.
Further, described purge gas is pure nitrogen gas, or is pure argon.
When described air leakage checking system be large air-box type air leakage checking system or for gas cover type air leakage checking system time, be exhausted while the sampler space is filled with purge gas.
When air leakage checking system is vacuum box type gas leakage detecting system, purge gas is filled with to sampler space pulse and to sampler space pulse vacuumizing and exhausting, and is filled with purge gas and vacuumizing and exhausting is spaced hockets.
Another object of the present invention is to provide a kind of said method that adopts to realize the air leakage checking system removed background noise.
In order to achieve the above object, the present invention is by the following technical solutions:
A kind of air leakage checking system, comprise trace gas source, tracer gas gas filling valve, pressure transducer, detection case, leak detector valve, reverse flow valve, gas leakage detector and the sampler space, the described sampler space is connected with a purge gas source by pipeline, the pipeline between this purge gas source and sampler space is provided with purge gas gas filling valve; And described detection case is also connected with an exhaust component by pipeline.
Further, this air leakage checking system also comprises a control device, and this control device comprises:
Programmable Logic Controller, it is electrically connected with trace gas source, tracer gas gas filling valve, pressure transducer, leak detector valve, reverse flow valve, gas leakage detector, purge gas source, purge gas gas filling valve and exhaust component respectively;
Operating display, it is electrically connected with Programmable Logic Controller;
External communication interface, it is electrically connected with Programmable Logic Controller.
Concrete further, described purge gas source is purity nitrogen source of the gas, or is straight argon source of the gas.
When described air leakage checking system be large air-box type air leakage checking system or for gas cover type air leakage checking system time, described exhaust component is a vent valve.
When described air leakage checking system is vacuum box type gas leakage detecting system, described exhaust component is the vacuum valve and vacuum pump that are connected in series by pipeline.
The present invention adopts purge gas carry out cleaning to the sampler space of air leakage checking system and monitor the trace gas concentration of the sampler space in real time innovatively, stablize the benchmark background index of the sampler space, for the undetected examining system of gas provides clean, stable benchmark background index, the background noise level of gas detecting system can be avoided to exceed standard thus the stability of influential system operation, improve the operational efficiency of system.
Accompanying drawing explanation
Fig. 1 is the principle of work structure diagram of existing large air-box type air leakage checking system.
Fig. 2 is the principle of work structure diagram of existing vacuum box type gas leakage detecting system.
Fig. 3 is the principle of work structure diagram of existing gas cover type air leakage checking system.
Fig. 4 is existing air leakage checking system external structure schematic perspective view.
Fig. 5 is air leakage checking system external structure schematic perspective view of the present invention.
Fig. 6 is that increase purge gas of the present invention is filled with the principle of work structure diagram of the large air-box type air leakage checking system of stable background.
Fig. 7 is the principle of work structure diagram that increase purge gas of the present invention is filled with the vacuum box type gas leakage detecting system of stable background.
Fig. 8 is that increase purge gas of the present invention is filled with the principle of work structure diagram of the gas cover type air leakage checking system of stable background.
Fig. 9 is the control principle block diagram of large air-box type air leakage checking system of the present invention and gas cover type air leakage checking system.
Figure 10 is the control principle block diagram of vacuum box type gas leakage detecting system of the present invention.
Below by way of the drawings and specific embodiments, the invention will be further described:
Embodiment
Air leakage checking system is divided into box air leakage checking system and gas cover type air leakage checking system, the associated conduit space that the sampler space 9 of box air leakage checking system is detection case 3 space and is connected with gas leakage detector 6, the sampler space 9 of gas cover type air leakage checking system is the inner space of workpiece 10 to be checked, workpiece adapter 16 and the associated conduit space be connected with gas leakage detector 6 thereof, box or gas cover type air leakage checking system is before tracer gas fills, in the clean sampler space 9, gas is benchmark background, and the tracer gas remained in the sampler space 9 is called background noise after detecting, tracer gas in background may to bleed the sampler space 9 from air leakage checking system self, or the residual accumulation of previous detection, tracer gas background noise can be more long-pending higher along with the operation of system, when background noise exceedes certain level, gas leakage detector 6 can be caused normally to run, even cause the erroneous judgement of testing result.And the inventive method is by being filled with purge gas and in real time the concentration of monitoring tracer gas returns to benchmark background index level, thus realizes stabilizing gas leak detection system sampler space background, ensure the object that gas leakage detector normally runs and testing result is correct.
Air leakage checking system of the present invention stablizes the method for background, and it comprises the following steps:
A: air leakage checking system carry out gas leak detection work start before or after completing, purge gas is filled with to the sampler space 9 of air leakage checking system;
B: exhaust is implemented to the sampler space 9;
C: the concentration change detecting tracer gas in the sampler space 9 with gas leakage detector 6 in real time;
D: after the concentration monitoring tracer gas in the sampler space 9 when gas leakage detector 6 returns to benchmark background index, stop being filled with purge gas to the sampler space 9 and stopping exhaust.
Further, described purge gas is pure nitrogen gas, or is pure argon.
When described air leakage checking system be large air-box type air leakage checking system or for gas cover type air leakage checking system time, be exhausted while the sampler space 9 is filled with purge gas.
When air leakage checking system is vacuum box type gas leakage detecting system, purge gas is filled with to the sampler space 9 pulse and to the sampler space 9 pulse vacuumizing and exhausting, and be filled with purge gas and vacuumizing and exhausting is spaced hockets, its process is, stop after being first filled with purge gas a period of time being filled with, then vacuumizing and exhausting is started, after vacuumizing, stop vacuumizing and exhausting, then continue startup and be filled with purge gas, so through repeatedly circulating, monitoring trace gas concentration in real time by gas leakage detector 6 and whether returning to benchmark background index.
In above-mentioned steps A, before or after air leakage checking system carries out gas leak detection work, purge gas is filled with to the sampler space 9 of air leakage checking system.What it illustrated is whenever need clean background at air leakage checking system, no matter is before or after gas leak detection work, as long as can take to be filled with purge gas with stable benchmark background index to the sampler space 9 of air leakage checking system when needing.
As shown in Fig. 5 to 10, remove background noise for realizing foregoing invention method, with stable benchmark background index, air leakage checking system structure of the present invention is as follows:
A kind of air leakage checking system, comprise trace gas source 1, tracer gas gas filling valve 2, pressure transducer 11, detection case 3, leak detector valve 4, reverse flow valve 5, gas leakage detector 6 and the sampler space 9, the described sampler space is connected with a purge gas source 12 by pipeline, and the pipeline between this purge gas source 12 and sampler space 9 is provided with purge gas gas filling valve 13; And described detection case 3 is also connected with an exhaust component 14 by pipeline.
Further, this air leakage checking system also comprises a control device 15, and this control device comprises
Programmable Logic Controller 151, it is electrically connected with trace gas source 1, tracer gas gas filling valve 2, pressure transducer 11, leak detector valve 4, reverse flow valve 5, gas leakage detector 6, purge gas source 12, purge gas gas filling valve 13 and exhaust component 14 respectively;
Operating display 152, it is electrically connected with Programmable Logic Controller 151;
External communication interface 153, it is electrically connected with Programmable Logic Controller 151, for being connected to exchange data with external unit, realizes networking monitoring and management.
Concrete further, described purge gas source is purity nitrogen source of the gas, or is straight argon source of the gas.
Embodiment 1
As Fig. 5,6 and 9, described air leakage checking system is large air-box type air leakage checking system, it comprises trace gas source 1, tracer gas gas filling valve 2, pressure transducer 11, leak detector valve 4, reverse flow valve 5, gas leakage detector 6, detection case 3, the sampler space 9, purge gas source 12, purge gas gas filling valve 13 and exhaust component 14, the associated conduit space that the sampler space 9 of large air-box type air leakage checking system is detection case 3 space and is connected with gas leakage detector 6, described purge gas source 12 is connected to detection case 3 space by purge gas gas filling valve 13 and associated conduit; Described exhaust component 14 is vent valve 141, and it is connected to detection case 3 space by associated conduit, as shown in Figure 6.
Described large air-box type air leakage checking system also comprises a control device 15, and this control device comprises: Programmable Logic Controller 151, operating display 152 and external communication interface 153.
As shown in Figure 9, Programmable Logic Controller 151 is electrically connected with trace gas source 1, tracer gas gas filling valve 2, pressure transducer 11, leak detector valve 4, reverse flow valve 5, gas leakage detector 6, purge gas source 12, purge gas gas filling valve 13, vent valve 141, operating display 152 and external communication interface 153 respectively.Programmable Logic Controller 151 is according to the related data of pressure transducer 11 and gas leakage detector 6, after carrying out contrasting and process in conjunction with the data preset, send executive signal and carry out cooperation work to trace gas source 1, tracer gas gas filling valve 2, leak detector valve 4, reverse flow valve 5, purge gas source 12, purge gas gas filling valve 13 and vent valve 141.
Below by way of specific works principle, large air-box type air leakage checking system of the present invention is described further:
Tracer gas of the present invention is halogen gas, hydrogen or helium, and purge gas is pure nitrogen gas or pure argon.As illustrated in figs. 6 and 10, workpiece 10 to be checked is placed in detection case 3, and workpiece 10 to be checked is connected by joint or fixture with system, and workpiece 10 to be checked is connected by connecting tube with trace gas source 1, tracer gas gas filling valve 2; Detection case 3 is connected by pipeline with purge gas source 12, purge gas gas filling valve 13 and vent valve 141, and detection case 3 is connected with leak detector valve 4, reverse flow valve 5 and gas leakage detector 6 by pipeline.After the door closedown of detection case 3, Programmable Logic Controller 151 sends instruction makes tracer gas gas filling valve 2 open, and tracer gas is charged in workpiece 10 to be checked, after pressure transducer 11 detects that charge pressure reaches certain value, Programmable Logic Controller 151 notifies that tracer gas gas filling valve 2 is closed, leak detector valve 4 and reverse flow valve 5 are opened, if workpiece 10 to be checked has leakage, tracer gas in workpiece 10 to be checked can overflow from small opening and enter detection case 3 under the effect of pressure reduction, gas leakage detector 6 samples from detection case 3, and judge whether workpiece leakage exceeds standard according to the tracer gas signal magnitude obtained, after detection completes, Programmable Logic Controller 151 notifies purge gas source 12, purge gas gas filling valve 13 is opened, purge gas is charged in detection case 3, mixed gas in detection case 3 is discharged to outside case by vent valve 141, trace gas concentration situation of change in gas leakage detector 6 Real-Time Monitoring detection case 3, when trace gas concentration returns to concentration up to standard, flushing process completes, Programmable Logic Controller 151 notifies purge gas source 12, purge gas is inflated, vent valve 141, leak detector valve 4 and reverse flow valve 5 are closed, a working cycle completes.
Embodiment 2
As Fig. 5, 7 and 10, described air leakage checking system is vacuum box type gas leakage detecting system, it comprises trace gas source 1, tracer gas gas filling valve 2, pressure transducer 11, leak detector valve 4, reverse flow valve 5, gas leakage detector 6, detection case 3, the sampler space 9, purge gas source 12, purge gas gas filling valve 13, vacuum valve 8 and vacuum pump 7, the associated conduit space that the sampler space 9 of vacuum box type gas leakage detecting system is detection case 3 space and is connected with gas leakage detector 6, described purge gas source 12 is connected to detection case 3 space by purge gas gas filling valve 13 and associated conduit, described vacuum valve 8 and vacuum pump 7 are that exhaust component 14(is different from embodiment 1, and the exhaust component 14 of embodiment 1 is vent valve 141), it is connected to detection case 3 space by unicom pipeline, as shown in Figure 7.
Described vacuum box type gas leakage detecting system also comprises a control device, and this control device comprises: Programmable Logic Controller 151, operating display and external communication interface.
As shown in Figure 10, Programmable Logic Controller 151 is electrically connected with trace gas source 1, tracer gas gas filling valve 2, pressure transducer 11, leak detector valve 4, reverse flow valve 5, gas leakage detector 6, purge gas source 12, purge gas gas filling valve 13, vacuum valve 8, vacuum pump 7, operating display 152 and external communication interface 153 respectively.Programmable Logic Controller 151 is according to the related data of pressure transducer 11 and gas leakage detector 6, after carrying out contrasting and process in conjunction with the data preset, send executive signal and carry out cooperation work to trace gas source 1, tracer gas gas filling valve 2, leak detector valve 4, reverse flow valve 5, purge gas source 12, purge gas gas filling valve 13, vacuum valve 8 and vacuum pump 7.
Below by way of specific works principle, vacuum box type gas leakage detecting system of the present invention is described further:
Tracer gas of the present invention is halogen gas, hydrogen or helium, and purge gas is pure nitrogen gas or pure argon.As shown in figures 7 and 10, workpiece 10 to be checked is placed in detection case 3, and workpiece 10 to be checked is connected by joint or fixture with system, and workpiece 10 to be checked is connected by connecting tube with trace gas source 1 and tracer gas gas filling valve 2; Detection case 3 is connected by pipeline with purge gas source 12, purge gas gas filling valve 13, and detection case 3 is connected with leak detector valve 4, reverse flow valve 5 and gas leakage detector 6 by pipeline, and detection case 3 is connected with vacuum valve and vacuum pump by pipeline.After the door closedown of detection case 3, Programmable Logic Controller 151 notifies that vacuum valve 8 and vacuum pump 7 are opened and vacuumizes detection case 3, after vacuumizing, Programmable Logic Controller 151 notifies that vacuum valve 8 and vacuum pump 7 are closed and sent instruction makes tracer gas gas filling valve 2 open, and tracer gas is charged in workpiece 10 to be checked, after pressure transducer 11 detects that charge pressure reaches certain value, Programmable Logic Controller 151 notifies that tracer gas gas filling valve 2 is closed, and notify that leak detector valve 4 and reverse flow valve 5 are opened, if workpiece 10 to be checked has leakage, tracer gas in workpiece 10 to be checked can overflow from small opening and enter detection case 3 under the effect of pressure reduction, gas leakage detector 6 samples from detection case 3, and judge whether workpiece leakage exceeds standard according to the tracer gas signal magnitude obtained, after detection completes, Programmable Logic Controller 151 notifies purge gas source 12, purge gas gas filling valve 13 is opened, purge gas is charged in detection case 3, then Programmable Logic Controller 151 notifies that vacuum valve 8 and vacuum pump 7 vacuumize, the mixed gas in detection case 3 by being discharged to outside case, then vacuum valve 8 and vacuum pump 7 are closed, trace gas concentration situation of change in gas leakage detector 6 Real-Time Monitoring detection case 3, wherein be filled with purge gas and vacuumize and be pulse action, be filled with purge gas and vacuumizing and exhausting is spaced hockets, its process is, stop after being first filled with purge gas a period of time being filled with, then vacuumizing and exhausting is started, after vacuumizing, stop vacuumizing and exhausting, then continue startup and be filled with purge gas, so through repeatedly circulating, when trace gas concentration returns to concentration up to standard, flushing process completes, Programmable Logic Controller 151 notifies purge gas source 12, purge gas gas filling valve 13, vacuum valve 8, vacuum pump 7, leak detector valve 4 and reverse flow valve 5 are closed, a working cycle completes.
Embodiment 3
As Fig. 5, shown in 8 and 9, described air leakage checking system is gas cover type air leakage checking system, it comprises trace gas source 1, tracer gas gas filling valve 2, pressure transducer 11, leak detector valve 4, reverse flow valve 5, gas leakage detector 6, detection case 3(and gas hood), the sampler space 9, purge gas source 12, purge gas gas filling valve 13, exhaust component 14 and workpiece adapter 16, the sampler space 9 of gas cover type air leakage checking system is the inner space of workpiece 10 to be checked, workpiece adapter 16 and the associated conduit space be connected with gas leakage detector 6 and system thereof, described purge gas source 12 is connected to workpiece adapter 16 by purge gas gas filling valve 13 and associated conduit, described exhaust component 14 is vent valve 141, and it is connected to detection case 3(and gas hood by unicom pipeline), as shown in Figure 8.
Described gas cover type air leakage checking system also comprises a control device 15, and this control device comprises: Programmable Logic Controller 151, operating display 152 and external communication interface 153.
As shown in Figure 9, Programmable Logic Controller 151 is electrically connected with trace gas source 1, tracer gas gas filling valve 2, pressure transducer 11, leak detector valve 4, reverse flow valve 5, gas leakage detector 6, purge gas source 12, purge gas gas filling valve 13, vent valve 141, operating display 152 and external communication interface 153 respectively.Programmable Logic Controller 151 is according to the related data of pressure transducer 11 and gas leakage detector 6, after carrying out contrasting and process in conjunction with the data preset, send executive signal and carry out cooperation work to trace gas source 1, tracer gas gas filling valve 2, leak detector valve 4, reverse flow valve 5, purge gas source 12, purge gas gas filling valve 13 and vent valve 141.
Below by way of specific works principle, gas cover type air leakage checking system of the present invention is described further:
Tracer gas of the present invention is halogen gas, hydrogen or helium, and purge gas is pure nitrogen gas or pure argon.As shown in FIG. 8 and 9, workpiece 10 to be checked is placed in detection case 3(and gas hood) in, workpiece 10 to be checked is connected by joint or fixture with system, detection case 3(and gas hood) be connected by connecting tube with trace gas source 1 and tracer gas gas filling valve 2; Workpiece 10 inner space to be checked is connected by pipeline with purge gas source 12, purge gas gas filling valve 13, vent valve 141, and workpiece to be checked 10 inner space is connected with gas leakage detector 6 by workpiece adapter 16, associated conduit and leak detector valve 4, reverse flow valve 5.Detection case 3(and gas hood) door close after, Programmable Logic Controller 151 sends instruction makes trace gas source 1 and tracer gas gas filling valve 2 open, and tracer gas is charged to detection case 3(and gas hood) in, after pressure transducer 11 detects that charge pressure reaches certain value, Programmable Logic Controller 151 notifies that tracer gas gas filling valve 2 is closed, leak detector valve 4 and reverse flow valve 5 are opened, if workpiece 10 to be checked has leakage, detection case 3(and gas hood) in tracer gas can overflow from small opening under the effect of pressure reduction and enter workpiece 10 inner space to be checked, gas leakage detector 6 samples from workpiece 10 inner space to be checked, and judge whether workpiece leakage exceeds standard according to the tracer gas signal magnitude obtained, after detection completes, after workpiece is taken out, Programmable Logic Controller 151 notifies purge gas source 12, purge gas gas filling valve 13 is opened, purge gas is charged to workpiece adapter 16, remaining for mixing in workpiece adapter 16 tracer gas is driven out of to detection case 3(and gas hood) in, and be discharged to outside case by vent valve 141, trace gas concentration situation of change in gas leakage detector 6 Real-Time Monitoring workpiece adapter 16, when trace gas concentration returns to concentration up to standard, flushing process completes, Programmable Logic Controller 151 notifies purge gas source 12, purge gas is inflated, vent valve 141, leak detector valve 4 and reverse flow valve 5 are closed, a working cycle completes.
The present invention adopts purge gas carry out cleaning to the sampler space of air leakage checking system and monitor the trace gas concentration of the sampler space in real time innovatively, stablize the background environment of the sampler space, for the undetected examining system of gas provides clean, stable background environment, the background noise level of gas detecting system can be avoided to exceed standard thus the stability of influential system operation, improve the operational efficiency of system.

Claims (9)

1. air leakage checking system is stablized benchmark background and is referred to a calibration method, it is characterized in that comprising the following steps:
A: air leakage checking system carry out gas leak detection work start before or after completing, purge gas is filled with to the sampler space of air leakage checking system;
B: exhaust is implemented to the sampler space;
C: the concentration change detecting tracer gas in the sampler space with gas leakage detector in real time;
D: when gas leakage detector monitors after the concentration of tracer gas in the sampler space returns to benchmark background index, stop being filled with purge gas to the sampler space and stopping exhaust.
2. air leakage checking system according to claim 1 is stablized benchmark background and is referred to calibration method, it is characterized in that: described purge gas is pure nitrogen gas, or is pure argon.
3. air leakage checking system according to claim 1 is stablized benchmark background and is referred to calibration method, it is characterized in that: when described air leakage checking system be large air-box type air leakage checking system or for gas cover type air leakage checking system time, be exhausted while the sampler space is filled with purge gas.
4. air leakage checking system according to claim 1 is stablized benchmark background and is referred to calibration method, it is characterized in that: when air leakage checking system is vacuum box type gas leakage detecting system, purge gas is filled with to sampler space pulse and to sampler space pulse vacuumizing and exhausting, and is filled with purge gas and vacuumizing and exhausting is spaced hockets.
5. an application rights requires the air leakage checking system of 1 method, comprise trace gas source, tracer gas gas filling valve, pressure transducer, detection case, leak detector valve, reverse flow valve, gas leakage detector and the sampler space, it is characterized in that: the described sampler space is connected with a purge gas source by pipeline, the pipeline between this purge gas source and sampler space is provided with purge gas gas filling valve; And described detection case is also connected with an exhaust component by pipeline.
6. air leakage checking system according to claim 5, is characterized in that: also comprise a control device, this control device comprises:
Programmable Logic Controller, it is electrically connected with trace gas source, tracer gas gas filling valve, pressure transducer, leak detector valve, reverse flow valve, gas leakage detector, purge gas source, purge gas gas filling valve and exhaust component respectively;
Operating display, it is electrically connected with Programmable Logic Controller;
External communication interface, it is electrically connected with Programmable Logic Controller.
7. air leakage checking system according to claim 5, is characterized in that: described purge gas source is purity nitrogen source of the gas, or is straight argon source of the gas.
8. air leakage checking system according to claim 5, is characterized in that: when described air leakage checking system be large air-box type air leakage checking system or for gas cover type air leakage checking system time, described exhaust component is a vent valve.
9. air leakage checking system according to claim 5, is characterized in that: when described air leakage checking system is vacuum box type gas leakage detecting system, and described exhaust component is the vacuum valve and vacuum pump that are connected in series by pipeline.
CN201410018568.6A 2014-01-15 2014-01-15 Method for realizing stable reference background index of gas leakage detection system and gas leakage detection system Pending CN104776961A (en)

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CN108956040A (en) * 2018-06-25 2018-12-07 安庆市晶科电子有限公司 A kind of transistor intelligent checking system
CN109001265A (en) * 2018-06-25 2018-12-14 安庆市晶科电子有限公司 A kind of transistor efficient detection method
CN109029849A (en) * 2018-06-25 2018-12-18 安庆市晶科电子有限公司 A kind of system of batch detection transistor sealing leak
CN109163858A (en) * 2018-09-04 2019-01-08 爱发科东方真空(成都)有限公司 A kind of sealing clamp and its method applied to vacuum helium leak test
CN110441005A (en) * 2019-07-29 2019-11-12 国网福建省电力有限公司检修分公司 A kind of SF6 density monitor gas leakage device for fast detecting and method
CN113049196A (en) * 2019-12-27 2021-06-29 上海神力科技有限公司 Method for accurately detecting leakage position of sealed container
CN113176045A (en) * 2021-04-21 2021-07-27 盛吉盛(宁波)半导体科技有限公司 Leak rate detection device and method for semiconductor equipment
CN116465572A (en) * 2023-06-20 2023-07-21 宁德时代新能源科技股份有限公司 Battery detection equipment and method and device for detecting battery
CN117309672A (en) * 2023-11-28 2023-12-29 北京科技大学 Integrated module for precisely controlling gas adsorption and desorption by pulsation and control method

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CN107991029A (en) * 2016-10-26 2018-05-04 广舜检测技术(上海)有限公司 A kind of lithium ion battery leakage detection apparatus and its leak hunting method using general densimeter
CN107806969A (en) * 2017-09-21 2018-03-16 湖南立方新能源科技有限责任公司 A kind of secondary cell leak hunting method
CN108827554A (en) * 2018-06-25 2018-11-16 安庆市晶科电子有限公司 A kind of transistor hermetization testing method
CN108827553A (en) * 2018-06-25 2018-11-16 安庆市晶科电子有限公司 A kind of transistor leakage test equipment
CN108956040A (en) * 2018-06-25 2018-12-07 安庆市晶科电子有限公司 A kind of transistor intelligent checking system
CN109001265A (en) * 2018-06-25 2018-12-14 安庆市晶科电子有限公司 A kind of transistor efficient detection method
CN109029849A (en) * 2018-06-25 2018-12-18 安庆市晶科电子有限公司 A kind of system of batch detection transistor sealing leak
CN108692874A (en) * 2018-08-07 2018-10-23 安徽信息工程学院 Quickly detection filter seals device
CN109163858A (en) * 2018-09-04 2019-01-08 爱发科东方真空(成都)有限公司 A kind of sealing clamp and its method applied to vacuum helium leak test
CN110441005A (en) * 2019-07-29 2019-11-12 国网福建省电力有限公司检修分公司 A kind of SF6 density monitor gas leakage device for fast detecting and method
CN110441005B (en) * 2019-07-29 2021-08-31 国网福建省电力有限公司检修分公司 SF6 density relay air leakage rapid detection device and method
CN113049196A (en) * 2019-12-27 2021-06-29 上海神力科技有限公司 Method for accurately detecting leakage position of sealed container
CN113176045A (en) * 2021-04-21 2021-07-27 盛吉盛(宁波)半导体科技有限公司 Leak rate detection device and method for semiconductor equipment
CN113176045B (en) * 2021-04-21 2022-11-18 盛吉盛(宁波)半导体科技有限公司 Leak rate detection device and method for semiconductor equipment
CN116465572A (en) * 2023-06-20 2023-07-21 宁德时代新能源科技股份有限公司 Battery detection equipment and method and device for detecting battery
CN116465572B (en) * 2023-06-20 2023-12-08 宁德时代新能源科技股份有限公司 Battery detection equipment and method and device for detecting battery
CN117309672A (en) * 2023-11-28 2023-12-29 北京科技大学 Integrated module for precisely controlling gas adsorption and desorption by pulsation and control method
CN117309672B (en) * 2023-11-28 2024-01-26 北京科技大学 Integrated module for precisely controlling gas adsorption and desorption by pulsation and control method

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Application publication date: 20150715