CN104742551B - A kind of organic material printing transferring method in OLED - Google Patents
A kind of organic material printing transferring method in OLED Download PDFInfo
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- CN104742551B CN104742551B CN201310737225.0A CN201310737225A CN104742551B CN 104742551 B CN104742551 B CN 104742551B CN 201310737225 A CN201310737225 A CN 201310737225A CN 104742551 B CN104742551 B CN 104742551B
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Abstract
The invention discloses a kind of printing transferring method of the organic material in OLED, comprise the following steps：1 is positioned at substrate in fixed platform；2 tightly invest film mask on substrate, and film mask is positioned in fixed platform；3 are evenly arranged in the organic material of liquid on the wheel face of roller；4, by the rotation and movement of roller, organic material are transferred on substrate；5 remove the moisture being transferred in the organic material on substrate, organic material is become solid-state；During 6 production monochrome devices structure, repeating said steps 35, by organic material being transferred on substrate in layer, if production polychrome or color device structure, film mask, then being transferred on substrate in layer by organic material are changed according to the selection of the organic material of transfer.The film mask that the present invention is used can improve the machining accuracy of OLED, and during production for large scale OLED screen body and large-size substrate, the printing transferring method can ensure that exception will not occur for OLED screen body, it is ensured that product quality.
Description
Technical field
The present invention relates to OLED manufacturing technology field, in more particularly to a kind of OLED
Organic material printing transferring method.
Background technology
In OLED（OLED, Organic Light-Emitting Diode screen bodies）In production process, mesh
The preceding method for generally using evaporation, then needs to produce the mask with certain graphics shape first during evaporation（MASK）, tradition
MASK be made of stainless steel, and MASK is fixed on support frame by taut network technology and welding technique, with shape
Integral metal MASK, is then deposited in the figure that metal MASK is surrounded.
Screen mesh type evaporation source and the evaporation in a kind of OLED preparation process are disclosed such as Chinese patent literature CN102021517
Method, it includes vacuum chamber and is placed in the thermal source set gradually from top to bottom in vacuum chamber, woven wire crucible, mask plate and base
Plate, organic or metal material is placed in woven wire crucible or thereon, mask plate is close on substrate.In above-mentioned evaporation coating method
Mask plate is typically made up of metal material, in actually evaporation production process, for the evaporation product of small size, due to it
Overall evaporation region very little, metal mask plate deformation is smaller, and the qualification rate of product is ensure that substantially；And once produce large scale
Substrate size is become big by product, then often because metal mask open area is excessive or metal mask overall dimensions increase
Greatly, cause metal mask easily to produce deformation, and then cause evaporation scope to produce deviation, cause the OLED screen body produced
There is exception, defect rate is higher, seriously reduce production efficiency, waste great amount of cost.
The content of the invention
Therefore, the technical problem to be solved in the present invention is the existing side that OLED is manufactured by way of evaporation
Method is suitable only for manufacturing the OLED screen body of small size, and some OLED sizes are larger or the larger production of substrate size in, its gold
Category mask plate easily deforms, and causes the OLED products produced to occur abnormal, defect rate is higher, wastes more serious.
It is an object of the invention to provide a kind of printing transferring method of the organic material in OLED, the printing transferring method
It is combined using film mask with transfer technique, available for OLED when producing large-sized OLED screen body or larger substrate size
Shield body production.
To achieve the above object, the present invention uses following technical scheme：
A kind of printing transferring method of organic material in OLED, it comprises the following steps：
Substrate for transfer of organic material is positioned at fixed platform by step 1-；
Step 2- designs the film mask with hollow out figure shape according to the structure of substrate final molding, and its is tight
On the substrate invested, and the film mask is positioned in fixed platform；
The organic material of liquid is distributed evenly on roller by step 3-；
Relatively moved between roller described in step 4- and the film mask, the organic material on the roller is led to
Cross the transfer of the hollow out position on the film mask on the substrate；
Step 5- removes the moisture in the organic material of transfer on the substrate, Huo Zhetong by way of drying
Crossing the mode of cooling makes the organic material become solid-state from liquid；
If step 6- produces monochrome devices structure, repeating said steps 3-5, by the organic material（5）In layer
Transfer is on the substrate；If producing polychrome or color device structure, according to the selection of the organic material of transfer more
Change the film mask described in step 2, repeating said steps 3-5, by the organic material the being transferred in layer substrate
On.
In the present invention, the film mask refers to thin metal or organic matter layer of the thickness between monatomic to several millimeters.
It is preferred that, the film soft board is diamond thin, stainless steel film, invar alloy film or ferroelectric thin film etc..
The thickness of the film mask is between 10-100um.The film that above-mentioned material is made possesses thickness of thin, hardness height, chemically stable
Property it is high, the features such as thermal coefficient of expansion is small, thermal conductivity coefficient is high.
The relatively described fixed platform positioning of film mask for convenience, the film mask is provided with film telltale mark,
The film telltale mark is the positioning hole that is molded on the film mask, and the relevant position of the fixed platform is provided with recessed
Groove, the positioning hole and the groove insert the first alignment pin and realize determining for the film mask and the fixed platform after aligning
Position.
The relatively described fixed platform positioning of substrate for convenience, the substrate is provided with substrate telltale mark, the substrate
Telltale mark is positioning hole, and the positioning hole is molded over the edge placement of the substrate, and the corresponding positions of the fixed platform are installed
Groove is equipped with, the positioning hole realizes the substrate and the fixed platform with being inserted after groove contraposition after the second alignment pin
Positioning.
In above-mentioned steps 3, the organic material is dissolved in the organic material that liquid is made in solvent.Or, by institute
State the organic material that organic material is warming up to the liquid that melting is formed after fusing point.
After step 1, after the substrate is positioned in the fixed platform, the substrate is close to by way of vacuumizing
In the fixed platform.
It is preferred that, the substrate is glass substrate.
Beneficial effects of the present invention：
1. the present invention produces OLED screen body using transfer technique, by organic material being transferred on substrate in layer,
Used mask plate is film mask plate, and thin-film material refers to thin metal or organic of the thickness between monatomic to several millimeters
Nitride layer, it has thickness of thin, the property, this film such as hardness is high, chemical stability height, thermal coefficient of expansion is small, thermal conductivity coefficient is high
Mask plate can be attached directly on substrate, also, because it has higher hardness and rigidity, it can easily determine simultaneously
In fixed platform.The printing transferring method of above-mentioned film mask plate is applied, deformation is small during production large scale OLED products, product
Machining accuracy it is high；And often one layer of organic material being just transferred on substrate of transfer removes water cure, so in production large scale
Product when, can effectively ensure that exception will not occur for whole OLED screen body, and then ensure that product quality, and the transfer of the present invention
Method is used not only for transferring the production of large-sized OLED screen body, while can also be used to the transfer of large-size substrate.
2. the film mask plate of the present invention selects diamond thin, stainless steel film, invar alloy（INVAR）Film or iron
Conductive film is made, and it has thickness of thin, the advantages of hardness is high, chemical stability is high, thermal coefficient of expansion is small, thermal conductivity coefficient is high, one
Aspect ensure that the positioning accuracy with fixed platform, meanwhile, it is capable to attached with substrate it is preferable, Product Precision after transfer compared with
It is high.
3. because the organic solvent of the present invention first has to be evenly arranged on roller and then is just transferred, compared to traditional
Evaporation mode can improve the utilization rate of organic material, substantially reduce production cost.
4. the substrate of the present invention is crossed vacuum extractor absorption and is positioned in fixed platform, this can not only further be improved pair
The attached effect of substrate patch, improves transfer accuracy, while also allowing for installing, dismantling, simplifies operating procedure.
Brief description of the drawings
In order that the content of invention is more likely to be clearly understood, the specific embodiment below according to the present invention is simultaneously combined attached
Figure, the present invention is further detailed explanation, wherein
Fig. 1 is the structural representation of the organic material printing transferring method in OLED of the present invention；
Fig. 2 is that the film mask, substrate and fixed platform of the present invention coordinate the structural representation of positioning.
Reference is expressed as in figure：
1- film masks；11- film telltale marks；2- substrates；22- substrate telltale marks；3- fixed platforms；4- rollers；
5- organic materials；50- conduits；The alignment pins of 61- first；The alignment pins of 62- second.
Embodiment
Embodiment 1
Referring to the printing transferring method that Fig. 1 is the organic material in a kind of OLED disclosed by the invention, for giving birth to
Monochrome devices structure is produced, the organic material 5 is hole injection layer, hole transmission layer, luminescent layer, electron transfer layer, electronics note
Enter layer, it comprises the following steps：
Substrate 2 for transfer of organic material 5 is positioned at fixed platform 3 by step 1-, and the substrate 2 is glass base
Plate；
Step 2- designs the film mask 1 with hollow out figure shape, by it according to the structure of the final molding of substrate 2
Tightly invest on substrate 2, and the film mask 1 is positioned in fixed platform 3；
Step 3- instills the organic material 5 of liquid on roller 4 by conduit 50；
Step 4- lowers the height of the roller 4, it is had suitable height between the substrate 2, by described
Rotating in a circumferential direction and being moved forward along direction signified arrow A for roller 4, the organic material 5 is passed through on the film mask 1
Hollow out figure is transferred on the substrate 2；The roller 4 can certainly be made fixed, and make the fixed platform 3 and institute
State the relatively described roller 4 of the opposite direction of substrate 2, film mask 1 along the arrow A to move, the organic material is transferred
Onto the substrate 2.
Step 5- removes the moisture in the organic material 5 being transferred on the substrate 2 by way of drying, makes institute
State organic material 5 and become solid-state；
Step 6- repeating said steps 3-5, by hole injection layer, hole transmission layer, luminescent layer, electron transfer layer, electronics
The organic material 5 of implanted layer being transferred on the substrate 2 in layer, to form monochrome devices structure.
Above-mentioned technical proposal is core technology scheme of the invention, and the present invention is using high, chemical steady with thickness of thin, hardness
Qualitative film mask plate high, that thermal coefficient of expansion is small, thermal conductivity coefficient is high is covered on the surface of the substrate, then passes through the side of transfer again
Formula, by organic material being transferred on substrate in layer, for the mode of production being deposited compared to existing use metal mask plate,
The printing transferring method of the present invention can produce large scale OLED products, and the machining accuracy of product is high；And one layer is often transferred just by transfer
Organic material on to substrate removes water cure, so when producing large-sized product, can effectively ensure whole OLED screen body not
Can occur exception, and then ensure that product quality, and the printing transferring method of the present invention is used not only for transferring large-sized OLED
Shield the production of body, while can also be used to the transfer of large-size substrate.
As concrete structure and selection, in the present embodiment, the film mask 1 is diamond thin, and it has hardness
It is high, on the one hand can be conveniently located at the features such as wearability is good, chemical stability is high, thermal coefficient of expansion is small, thermal conductivity coefficient is high
In fixed platform, on the other hand it can be adhered closely on the substrate 2, it is ensured that the machining accuracy of product.
Under conditions of ensureing that coating of organic material thickness and film mask hardness are qualified, the film mask is thinner, applies
Layer film thickness monitoring is more accurate.And in order to take into account the performance of manufacturing cost and product, the thickness of film mask described in the present embodiment 1
Degree is preferably 50um.And for above-mentioned printing transferring method, the thickness of the film mask 1 is selected between 10um~100um,
Formed product precision can be ensure that.
In the present invention, the substrate 2 and the fixed platform 3, and the film mask 1 and the fixed platform 3 it
Between fixed form it is not unique, as long as it can be realized in the course of work, there is no movement can be so that above-mentioned between each part
The OLED screen body precision of printing transferring method production is higher.And preferably, referring to Fig. 2, being positioned at for the ease of the film mask 1
In the fixed platform 3, the film mask 1 in the present embodiment is provided with the film mask 1 and the fixed platform 3
The film telltale mark 11 of positioning, the film telltale mark 11 is the positioning hole being molded on the film mask 1, described solid
The relevant position of fixed platform 3 is provided with groove or hole, and the positioning hole after the groove or hole contraposition with inserting the first alignment pin 61
Realize positioning.For the ease of the positioning between the substrate 2 and the fixed platform 3, on the substrate 2 in this implementation
Provided with telltale mark 22, the substrate telltale mark 22 is positioning hole, and the positioning hole is molded over the edge position of the substrate 2
Put, the relevant position of the fixed platform 3 sets fluted or hole, the positioning hole is with inserting the after the groove or hole contraposition
The positioning of the substrate 2 and the fixed platform 3 is realized after two alignment pins 62.
It is further preferred that in the present embodiment, the fixed platform 3, which is set, some is connected with vacuumizing for vacuum extractor
The substrate 2, after the substrate 2 is positioned in the fixed platform 3, is close to described solid by through hole by way of vacuumizing
On fixed platform 3.The substrate 2 is tightly adsorbed in fixed platform 3 using vacuum pumping method, operation, Er Qie is not only convenient for
After transfer is finished, it is also convenient for removing the substrate 2 from the fixed platform 3, enormously simplify operating procedure, improve work
Make efficiency.
In the present embodiment, the organic material 5 of the liquid in the step 3 is by the way that the organic material 5 is dissolved in
Obtained in solvent, the organic material 5 is hole injection layer, hole transmission layer, luminescent layer, electron transfer layer, electron injection
Layer；The adaptable solvent of the above-mentioned organic material selection of correspondence dissolves to it.
In the above-mentioned steps 5 of the present embodiment, the mode of the drying is heat drying method, for example, pass through the side of IR stove heats
Formula, heating and temperature control is 100~120 DEG C, evaporates the moisture in material.
Embodiment 2
The printing transferring method of organic material in the OLED of the present embodiment, for producing polychrome or colored device
Part structure, the organic material 5 be hole injection layer, hole transmission layer, luminescent layer, electron transfer layer, electron injecting layer, its
In, the multicolor luminous layer is a variety of monochromatic luminescent material combinations, and the color device luminescent layer has red light material, gold-tinted respectively
Material, blue light material forms colour by RGB combination.
Above-mentioned printing transferring method comprises the following steps：
Substrate 2 for transfer of organic material 5 is positioned at fixed platform 3 by step 1-, and the substrate 2 is glass base
Plate；
Step 2- designs the film mask 1 with hollow out figure shape, by it according to the structure of the final molding of substrate 2
Tightly invest on substrate 2, and the film mask 1 is positioned in fixed platform 3；
The roller 4 is directly placed into organic material 5 by step 3-, is rotated by the roller 4 liquid is organic
Material 5 is uniformly distributed on its wheel face；
Step 4- is moved forward by the rotation of the roller 4, by the organic material 5 through engraving on the film mask 1
Empty graphic is transferred on the substrate 2；
Step 5- by condensation method mode by making organic material 5 return to solid-state from liquid；
Step 6- repeating said steps 3-5, by the hole injection layer, hole transmission layer organic material 5 in layer
Be transferred on the substrate 2, because luminescent layer is different from the structure of other layers, thus when transfer luminescent layer organic material
When, the film mask 1 in exchonge step 2, then step 3-5 is carried out, the organic material of luminescent layer is transferred respectively, so
After re-replace the film mask 1, by the transfer in layer of organic material 5 of the electron transfer layer, electron injecting layer
On the substrate 2, to form polychrome or color device structure.
In the present embodiment, the film mask 1 selects INVAR films, its have small thermal coefficient of expansion, intensity, hardness it is high,
Plasticity, toughness, elongation percentage, the contraction percentage of area and impact flexibility all very high advantages.The thickness of the film mask 1 is
100um。
The mode specifically condensed in step 5 is sealed in the dress of recirculated water for the substrate 2 after the completion of organic material 5 is transferred
In putting, heat is absorbed by circulating water flow, organic material is recovered solid-state.
In other embodiment, the film mask 1 can be from films such as stainless steel film, ferroelectric thin films.
In addition, the liquid organic material 5 in the step 3 can also be made of other manner, organic material as will be described
Material 5 is warming up to the organic material 5 that melting is formed after fusing point.
Simply technical scheme is explained in detail for above-mentioned embodiment, the present invention not only only office
Be limited to above-described embodiment, it will be understood by those skilled in the art that it is every according to above-mentioned principle and spirit on the basis of the present invention
Improve, substitute, all should be within protection scope of the present invention.
Claims (9)
1. a kind of printing transferring method of the organic material in OLED, it is characterised in that：Comprise the following steps：
Step 1- will be used for transfer of organic material（5）Substrate（2）It is positioned at fixed platform（3）On；
Step 2- is according to substrate（2）The structure of final molding, designs the film mask with hollow out figure shape（1）, by its
The substrate tightly invested（2）On, and by the film mask（1）It is positioned at fixed platform（3）On；
Step 3- is by the organic material of liquid（5）It is distributed evenly in roller（4）On；
Roller described in step 4-（4）With the film mask（1）Between relatively move, by the roller（4）On it is described organic
Material（5）Pass through the film mask（1）On hollow out position be transferred in the substrate（2）On；
Step 5- is removed by way of drying is transferred in the substrate（2）On the organic material（5）In moisture, or
Make the organic material by way of cooling（5）Become solid-state from liquid；
If step 6- produces monochrome devices structure, repeating said steps 3-5, by the organic material（5）Transfer in layer
In the substrate（2）It is upper；If polychrome or color device structure are produced, according to the organic material of transfer（5）Selection
Film mask described in exchonge step 2（1）, repeating said steps 3-5, by the organic material（5）Being transferred in layer
The substrate（2）On.
2. the printing transferring method of the organic material in a kind of OLED according to claim 1, it is characterised in that：
The film mask（1）For diamond thin, stainless steel film, invar alloy film or ferroelectric thin film.
3. the printing transferring method of the organic material in a kind of OLED according to claim 2, it is characterised in that：
The film mask（1）Thickness be 10um~100um.
4. according to the printing transferring method of the organic material in a kind of any described OLED of claim 1-3, it is special
Levy and be：The film mask（1）It is provided with film telltale mark（11）, the film telltale mark（11）For in the film
Mask（1）The positioning hole of upper shaping, the fixed platform（3）Relevant position set it is fluted, the positioning hole with it is described recessed
The first alignment pin is inserted after groove contraposition（61）Realize the film mask（1）With the fixed platform（3）Positioning.
5. the printing transferring method of the organic material in a kind of OLED according to claim 4, it is characterised in that：
The substrate（2）It is provided with substrate telltale mark（22）, the substrate telltale mark（22）For positioning hole, the positioning hole forming
In the substrate（2）Edge placement, the fixed platform（3）Relevant position set it is fluted, the positioning hole with it is described
The second alignment pin is inserted after groove contraposition（62）After realize the substrate（2）With the fixed platform（3）Positioning.
6. the printing transferring method of the organic material in a kind of OLED according to claim 5, it is characterised in that：
By the organic material in the step 3（5）It is dissolved in the organic material that liquid is made in solvent（5）.
7. the printing transferring method of the organic material in a kind of OLED according to claim 5, it is characterised in that：
By the organic material in the step 3（5）It is warming up to the organic material for the liquid that melting is formed after fusing point（5）.
8. the printing transferring method of the organic material in a kind of OLED according to claim 1, it is characterised in that：
The substrate（2）It is positioned at the fixed platform（3）After upper, by the substrate by way of vacuumizing（2）It is close to described
Fixed platform（3）On.
9. the printing transferring method of the organic material on a kind of machine active display according to claim 1, it is characterised in that：Institute
State substrate（2）For glass substrate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310737225.0A CN104742551B (en) | 2013-12-27 | 2013-12-27 | A kind of organic material printing transferring method in OLED |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310737225.0A CN104742551B (en) | 2013-12-27 | 2013-12-27 | A kind of organic material printing transferring method in OLED |
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| CN104742551B true CN104742551B (en) | 2017-08-04 |
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| CN105304832B (en) | 2015-11-02 | 2017-07-25 | 深圳市华星光电技术有限公司 | The preparation method of electroluminescent device |
| CN105528969B (en) | 2016-03-03 | 2019-03-15 | 京东方科技集团股份有限公司 | Display base plate and preparation method thereof, display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6695030B1 (en) * | 2002-08-20 | 2004-02-24 | Eastman Kodak Company | Apparatus for permitting transfer of organic material from a donor web to form a layer in an OLED device |
| JP2005232474A (en) * | 2004-02-17 | 2005-09-02 | Dainippon Screen Mfg Co Ltd | Mask for vapor deposition |
| KR100699998B1 (en) * | 2004-09-23 | 2007-03-26 | 삼성에스디아이 주식회사 | Organic electroluminescence display device and fabrication method of the same |
| CN102496685A (en) * | 2011-12-12 | 2012-06-13 | 大连一能环保科技有限公司 | Method for coating organic light-emitting diode (OLED) organic layer for illumination |
| CN103022375A (en) * | 2012-12-05 | 2013-04-03 | 昆山维信诺显示技术有限公司 | Organic light-emitting diode (OLED) device and preparation method thereof |
| CN103451598B (en) * | 2013-09-05 | 2016-03-02 | 中山新诺科技有限公司 | A kind of OLED display panel is produced by novel fine metal mask version and making method |
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