CN104733994A - Q-adjustment device for extreme ultraviolet laser and use method of Q-adjustment device - Google Patents
Q-adjustment device for extreme ultraviolet laser and use method of Q-adjustment device Download PDFInfo
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- CN104733994A CN104733994A CN201510143627.7A CN201510143627A CN104733994A CN 104733994 A CN104733994 A CN 104733994A CN 201510143627 A CN201510143627 A CN 201510143627A CN 104733994 A CN104733994 A CN 104733994A
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Abstract
The invention relates to a Q-adjustment device for extreme ultraviolet laser and use method of the Q-adjustment device. The Q-adjustment device comprises a light source, a beam splitting piece is installed on one side of the light source, a first translation platform is installed on one side of a driving light beam, a driving lens is installed in the first translation platform, a first total reflective mirror, a second total reflective mirror and a third total reflective mirror are installed on one side of the first translation platform, and a beam combination piece is installed under the third total reflective mirror; a second translation platform is installed at one side of a Q-adjustment light beam, a Q-adjustment lens is installed in the second translation platform, a fourth total reflective mirror is installed at one side of the second translation platform, an ellipsometry device is installed at one side of the fourth reflective mirror, a gas box is installed at one side of the beam combination piece and filled with inert gas, a Q-adjustment focus and a driving focus are further arranged in the gas box, an aluminum film is installed outside the gas box, and Q-adjustable extreme ultraviolet laser is arranged at one side of the aluminum film. The Q-adjustment device for extreme ultraviolet laser and the use method of the Q-adjustment device are simple in structure, easy to operate and high in applicability, not only provide a novel Q-adjustment measure for extreme ultraviolet laser output, but also promote further development of related fields.
Description
Technical field
The present invention relates to a kind of Q-modulating device and using method thereof of extreme ultraviolet laser, chamber outer lens is utilized to realize Q switching function in chamber and in control chamber, working media (inert gas) and driving light source interact and produce high order harmonic component, thus obtain the controlled extreme ultraviolet laser of Q value, be applicable to the generation of extreme ultraviolet laser (high order harmonic component) and adjust the fields such as Q.
Background technology
Extreme ultraviolet and even x-ray laser are generally difficult to adopt traditional laser crystal to produce, and are easy to by Atmospheric Absorption due to it, usually need laser producing component to be placed in vacuum environment.Therefore, extreme ultraviolet and even x-ray laser generally produce with the form of high order harmonic component, namely high field visible laser and the inert gas high frequency multiplication obtaining fundamental frequency light that interacts exports, this is a kind of extreme ultraviolet laser utilizing higher-order nonlinear system to obtain, but the general inefficiency of extreme ultraviolet laser that produces of this mode and be not easy to realize adjusting Q function.
Q switching is an important optical element in laser system, and it, by block or the reflection channel of not blocking light suppresses or produces laser pulse, divides active Q-switching and passive Q-switch.Active Q-switching by exterior mechanical or electronic signal, Q value is changed; Passive Q-switch is the change being completed Q value by laser self.Their common principle is all reduce the photon numbers initially ejected intentionally, i.e. Q value.Traditional active Q-switching primarily of quartz crystal, piezoelectric transducer, impedance component, the composition such as radio frequency plug and housing.When piezoelectric transducer does not apply radiofrequency signal, quartz crystal keeps original conventional refractive, the parallel light-transmissive quartz crystal that laser bar is emitted after reflective mirror returns again through quartz crystal, thus can return laser light rod again.Once piezoelectric transducer does not apply radiofrequency signal, piezoelectric transducer produces ultrasonic wave immediately in quartz body makes its refractive index change, like this through quartz crystal light occur refraction and depart from reflective mirror, make light cannot return laser light rod.Due to the necessary condition that photon return laser light rod is excitation laser, therefore apply to piezoelectric transducer and remove radiofrequency signal, becoming the control device turning off and discharge laser.
Because high order harmonic component process is different from traditional laser production process, traditional Q switching is not suitable for extreme ultraviolet and even x-ray laser (high order harmonic component) system, therefore, proposes the present invention.
Summary of the invention
For the above-mentioned technical problem of prior art, the object of this invention is to provide a kind of Q-modulating device and using method thereof of extreme ultraviolet laser, this device belongs to active Q-switching type, utilize the adjustment of chamber outer lens to realize Q switching function in chamber and in control chamber, working media (inert gas) and driving light source interact and produce high order harmonic component, thus obtain the controlled extreme ultraviolet laser of Q value.
For achieving the above object, the present invention is achieved by the following technical solutions:
A kind of Q-modulating device of extreme ultraviolet laser, comprise light source, the side of described light source is provided with beam splitting chip, light source is divided into driving light beam and adjusts Q light beam by described beam splitting chip, the side of described driving light beam is provided with the first translation stage, described first translation stage inside is provided with driving lens, the side of the first translation stage is provided with the first total reflective mirror, the below of described first total reflective mirror is provided with the second total reflective mirror, the side of described second total reflective mirror is provided with the 3rd total reflective mirror, and the below of described 3rd total reflective mirror is provided with closes bundle sheet, the side of described tune Q light beam is provided with the second translation stage, described second translation stage inside is provided with adjusts Q lens, the side of the second translation stage is provided with the 4th total reflective mirror, the side of described 4th total reflective mirror is provided with ellipse inclined device, described ellipse inclined device is positioned at the side of closing bundle sheet, the described opposite side closing bundle sheet is provided with gas box, inert gas is had in described gas box, the inside of gas box also has adjusts Q focus and drives focus, the outside of gas box is provided with aluminium film, the side of described aluminium film is the adjustable extreme ultraviolet laser of Q value, described gas box, aluminium film and extreme ultraviolet laser are all placed in vacuum environment.
A using method for the Q-modulating device of extreme ultraviolet laser, comprises the following steps:
(1) driving light source, is divided into tune Q light beam and driving light beam by beam splitting chip by light source;
(2) Q light beam is adjusted to adjust Q focus by adjusting Q lens to be formed in gas box, the position adjustments of described tune Q focus is changed by the second translation stage adjusts the position of Q lens to realize, described tune Q light beam regulates the ellipse degree of bias by ellipse inclined device, suppresses the High-order Harmonic Generation adjusting Q light beam self;
(3) drive light beam to drive focus by driving lens to be formed in gas box, the position adjustments of described driving focus drives the position of lens to realize by the first translation stage change, makes it just in time be positioned at the centre position of gas box;
(4) pulse of described tune Q light beam needs the pulses arrive gas box prior to driving light beam, realize presetting of the operating state of inert gas, the high order harmonic component exported carries out the filtration of fundamental frequency light and stray light by aluminium film, finally obtain the extreme ultraviolet laser that Q value is controlled.So, adjust the operating state of Q light beam by adjusting the manipulation of Q lens to change inert gas, inert gas after driving light beam to be converged by driving lens and in gas box interacts produce and amplify high order harmonic component, thus realizes the controlled extreme ultraviolet laser output of Q value.
The principle of extreme ultraviolet laser Q-modulating device of the present invention is as follows: first, drives the middle place that light beam will drive focus to be preset in gas box by driving the regulation and control of lens; And adjust Q light beam by the position of adjusting the movement of Q lens to change in gas box to adjust Q focus (adjust Q focus position can from the gas box leftmost side be tuned to the rightmost side, can before and after the position of inswept driving focus).But, adjust the diverse location of Q focus driving different operating state states such as () point ground state, excitation state and states of ionization at focus place by causing inert gas.When adjusting Q focus away from driving focus, inert gas operating state is ground state, now can produce High-order Harmonic Generation, but efficiency is very low; When adjusting Q focus close to driving focus, inert gas operating state is excitation state, now produces the ultrahigh in efficiency of high order harmonic component, strengthens with presenting decades of times, and state is best, and being equivalent to Q switching state is "ON"; When adjusting Q focus almost to overlap with driving focus, inert gas operating state is state of ionization, and now the production process of high order harmonic component is destroyed, and almost without any High-order Harmonic Generation, now state is the poorest, and being equivalent to Q switching state is "Off".In addition, in gas box chamber, the air pressure of inert gas also will affect the regulating effect of Q switching, need to select suitable operating air pressure to reaching best q-effect.So, the optimization of operating air pressure in the change of chamber investigation mission outside the city or town Q lens and chamber is utilized just can to realize best Q switching function.
Characteristics and innovation of the present invention is as follows:
1, the present invention utilizes chamber outer lens can realize Q switching function in chamber, compared with traditional Q switching mode, without the need to implanting or destroying laser work chamber;
2, essence of the present invention is the operating state changing inert gas, compared with traditional Q switching mode, without the need to blocking light reflection channel;
3, because inert gas can damage (cancel driving light source and can recover former state) hardly, can unlimitedly reuse, therefore compared with traditional Q switching mode, the life-span is long, resistance to extreme value;
4, Q switching effect of the present invention is determined jointly by the lens position outside chamber and the operating air pressure in chamber;
5, structure of the present invention is simple, operates simple and easy, is applicable to the tune Q process of extreme ultraviolet laser.
The present invention is tune Q (the Q value of a kind of extreme ultraviolet laser (high order harmonic component), i.e. quality factor, Quality factor) device and using method thereof, chamber outer lens is utilized to realize the function of optical switch in chamber (i.e. Q switching), namely in control chamber, inert gas and driving light source interact and produce the output intensity of high order harmonic component, thus obtain the controlled extreme ultraviolet laser of Q value.Driving light source is divided into driving light beam by beam splitting chip and adjusts Q light beam, light beam is driven to produce high order harmonic component by driving lens focus to interact in gas box and with inert gas, adjust the operating state (be equivalent to Q value) of Q light beam by adjusting Q lens to change the inert gas in gas box (being equivalent to laser resonant cavity), thus realize the tune Q function of extreme ultraviolet laser.These apparatus and method not only can realize the tune Q function of extreme ultraviolet laser, make it export controlled.
Compared with traditional Q switching mode, what the present invention changed is the operating state of working media, without the need to blocking light reflection channel; The present invention utilizes chamber outer lens can realize Q switching function in chamber, without the need to implanting laserresonator.Structure of the present invention is simple, operates simple and easy, and applicability is strong, provide not only the tune Q new tool that extreme ultraviolet laser exports, and will promote the deep development of association area.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of extreme ultraviolet laser Q-modulating device of the present invention;
Fig. 2 is the Experimental equipment of the embodiment of the present invention 1;
Fig. 3 is under 20torr air pressure, and high order harmonic component output map during Q lens position is adjusted in scanning;
Fig. 4 is under 30torr air pressure, and high order harmonic component output map during Q lens position is adjusted in scanning;
Fig. 5 and Fig. 6 is the q-effect figure of the embodiment of the present invention 1.
Embodiment
Below in conjunction with specific embodiment, the present invention is further illustrated, but protection scope of the present invention is not limited to this.
As shown in Figure 1, the Q-modulating device of extreme ultraviolet laser of the present invention, comprise light source 13, the side of light source 13 is provided with beam splitting chip 1, light source 13 is divided into driving light beam 15 and adjusts Q light beam 14 by beam splitting chip 1, drive the side of light beam 15 that first translation stage 4 is installed, first translation stage 4 inside is provided with and drives lens 2, the side of the first translation stage 4 is provided with the first total reflective mirror 9, the below of the first total reflective mirror 9 is provided with the second total reflective mirror 10, the below that the side of the second total reflective mirror 10 is provided with the 3rd total reflective mirror the 11, three total reflective mirror 11 is provided with closes bundle sheet 7, adjust the side of Q light beam 14 that second translation stage 5 is installed, second translation stage 5 inside is provided with adjusts Q lens 3, the side of the second translation stage 5 is provided with the 4th total reflective mirror 12, the side of the 4th total reflective mirror 12 is provided with ellipse inclined device 6, ellipse inclined device 6 is positioned at the side of closing bundle sheet 7, the opposite side closing bundle sheet 7 is provided with gas box 8, inert gas is had in gas box 8, the inside of gas box 8 also has adjusts Q focus 18 and drives focus 19, the outside of gas box 8 is provided with aluminium film 16, the side of aluminium film 16 is the adjustable extreme ultraviolet laser 17 of Q value, high order harmonic component due to extreme ultraviolet waveband is easy to by Atmospheric Absorption, interaction process need be put in a vacuum, as shown in Fig. 1 dotted line frame, gas box 8, aluminium film 16 and extreme ultraviolet laser 17 are all placed in vacuum environment.
The using method of the Q-modulating device of extreme ultraviolet laser of the present invention, comprises the following steps:
(1) driving light source 13, is divided into tune Q light beam 14 and driving light beam 15 by beam splitting chip 1 by light source 13;
(2) Q light beam 14 is adjusted to adjust Q focus 18 by adjusting Q lens 3 to be formed in gas box 8, adjusting the position adjustments of Q focus 18 to be changed by the second translation stage 5 adjusts the position of Q lens 3 to realize, and adjust the position of Q focus 18 to change the operating state that directly can affect inert gas in gas box, thus realize adjusting Q function; Adjust Q light beam 14 to regulate the ellipse degree of bias by ellipse inclined device 6, suppress the High-order Harmonic Generation adjusting Q light beam 14 self;
(3) light beam 15 is driven to drive focus 19 by driving lens 2 to be formed in gas box 8, driving the position adjustments of focus 19 to be changed by the first translation stage 4 drives the position of lens 2 to realize, make it just in time be positioned at the centre position of gas box 8, make high order harmonic component drive efficiency the highest;
(4) adjust the pulse needs of Q light beam 14 prior to driving the pulses arrive gas box 8 of light beam 15, realize presetting of the operating state of inert gas, the high order harmonic component exported carries out the filtration of fundamental frequency light and stray light by aluminium film 16, finally obtain the extreme ultraviolet laser that Q value is controlled.So, adjust the operating state of Q light beam 14 by adjusting the manipulation of Q lens 3 to change inert gas, drive light beam 15 to interact produce and amplify high order harmonic component by the inert gas after driving lens 2 to converge and in gas box 8, thus realize the controlled extreme ultraviolet laser of Q value 17 and export.
embodiment 1
As shown in Figure 2, being applied to 800nm femtosecond laser drives the tune Q of argon gas generation 19 ~ 31 grades (i.e. 26 ~ 42nm) high order harmonic components to export: 1 is 800nm laser beam splitter sheet, and energy splitting ratio is about 1:1; 2 is drive lens, and focal length is about 500mm; 3 is adjust Q lens, and focal length is about 500mm; 4 is ranges is first translation stage of 50mm, and 5 is ranges is second translation stage of 50mm, and wherein 4 is manual translation platforms, and 5 is motorized precision translation stages; 6 is ellipse inclined devices, is the quarter wave plate of 800nm; 7 is that 800nm swashs combiner sheet; 8 is gas boxes, and length is 50mm, and inside is filled with argon gas; 9 are 800nm first total reflective mirrors, 10 are 800nm second total reflective mirrors, 11 are 800nm the 3rd total reflective mirrors, 12 is 800nm the 4th total reflective mirrors; 13 is 800nm driving light sources; 14 is adjust Q light beam; 15 is drive light beam; 16 is aluminium films that 500nm is thick; 17 is the extreme ultraviolet lasers finally obtained; 18 is adjust Q focus; 19 is drive focus; 20 be the U.S. be concerned with company produce 800nm Ti∶Sapphire laser femto-second laser, output parameter is 8mJ/40fs/1kHz; 21 is the special CCD of EUV light source; 22 is program control computers; 23 and 24 is program control lines.Second translation stage 5 is connected with program control computer 22 by program control line with special CCD 21, and therefore, Q-switch and data acquisition can have computation to complete.
Specific experiment operating process is as follows: (1) is by connecting device shown in Fig. 2 and starting laser system and computer; (2) control the Energy transmission of driving light source, make the power density about 1.5 × 10 driving light beam 15 and adjust Q light beam 14 focus place in gas box 8
14w/cm
2; (3) control to drive the position of lens 2 to make it drive focus 19 to be positioned at the middle of gas box 8; (4) regulate the ellipse degree of bias of ellipse inclined device 6 quarter wave plate, angle rotates about 10 ~ 20 °, makes it just suppress to adjust the High-order Harmonic Generation of Q light beam 14 self; (5) drive light beam 15 to interact with the argon gas in gas box 8 produce high order harmonic component and record high order harmonic component signal by CCD; (6) optimize the air pressure in gas box 8 and the position of scanning tune Q lens 3, the tune Q realizing high order harmonic component exports.
Application extreme ultraviolet laser as shown in Figure 2 produces and Q-modulating device, the experiment Output rusults obtained as seen in figures 3-6, can be found by Fig. 3 and 4, and q-effect is relevant with the air pressure in gas box 8, when air pressure is 30torr, there is the state significantly opened and close in high order harmonic component signal.In order to more clearly present q-effect, we extract high order harmonic component Output rusults and contrast from Fig. 4.As shown in Figure 5, what extract is the high order harmonic component intensity integration of 19th ~ 31st level time, corresponding wavelength 26 ~ 42nm, can find, along with the scanning of adjusting Q lens 3 position, there is obvious "ON" and "Off" state in output intensity, wherein "On" state appears at and adjusts near Q lens-5mm position, and "Off" state appears near tune Q lens+2mm position.Equally, we are also extracted separately the high order harmonic component Output rusults of 25th level time (corresponding wavelength 32nm), and as shown in Figure 6, have also discovered same q-effect, the tune Q lens position of its "ON" and "Off" state is also more or less the same.Like this, we just can select the tune Q realizing high order harmonic component extreme ultraviolet laser to export by adjusting the position of Q lens.
The present invention is tune Q (the Q value of a kind of extreme ultraviolet laser (high order harmonic component), i.e. quality factor, Quality factor) device and using method thereof, chamber outer lens is utilized to realize the function of optical switch in chamber (i.e. Q switching), namely in control chamber, inert gas and driving light source interact and produce the output intensity of high order harmonic component, thus obtain the controlled extreme ultraviolet laser of Q value.Driving light source is divided into driving light beam by beam splitting chip and adjusts Q light beam, light beam is driven to produce high order harmonic component by driving lens focus to interact in gas box and with inert gas, adjust the operating state (be equivalent to Q value) of Q light beam by adjusting Q lens to change the inert gas in gas box (being equivalent to laser resonant cavity), thus realize the tune Q function of extreme ultraviolet laser.These apparatus and method not only can realize the tune Q function of extreme ultraviolet laser, make it export controlled.
Compared with traditional Q switching mode, what the present invention changed is the operating state of working media, without the need to blocking light reflection channel; The present invention utilizes chamber outer lens can realize Q switching function in chamber, without the need to implanting laserresonator.Structure of the present invention is simple, operates simple and easy, and applicability is strong, provide not only the tune Q new tool that extreme ultraviolet laser exports, and will promote the deep development of association area.
Above-described embodiment only illustrates inventive concept of the present invention for explaining, but not the restriction to rights protection of the present invention, all changes utilizing this design the present invention to be carried out to unsubstantiality, all should fall into protection scope of the present invention.
Claims (2)
1. the Q-modulating device of an extreme ultraviolet laser, it is characterized in that: comprise light source, the side of described light source is provided with beam splitting chip, light source is divided into driving light beam and adjusts Q light beam by described beam splitting chip, the side of described driving light beam is provided with the first translation stage, described first translation stage inside is provided with driving lens, the side of the first translation stage is provided with the first total reflective mirror, the below of described first total reflective mirror is provided with the second total reflective mirror, the side of described second total reflective mirror is provided with the 3rd total reflective mirror, and the below of described 3rd total reflective mirror is provided with closes bundle sheet, the side of described tune Q light beam is provided with the second translation stage, described second translation stage inside is provided with adjusts Q lens, the side of the second translation stage is provided with the 4th total reflective mirror, the side of described 4th total reflective mirror is provided with ellipse inclined device, described ellipse inclined device is positioned at the side of closing bundle sheet, the described opposite side closing bundle sheet is provided with gas box, inert gas is had in described gas box, the inside of gas box also has adjusts Q focus and drives focus, the outside of gas box is provided with aluminium film, the side of described aluminium film is the adjustable extreme ultraviolet laser of Q value, described gas box, aluminium film and extreme ultraviolet laser are all placed in vacuum environment.
2. a using method for the Q-modulating device of extreme ultraviolet laser, is characterized in that comprising the following steps: (1) driving light source, by beam splitting chip, light source is divided into tune Q light beam and driving light beam;
(2) Q light beam is adjusted to adjust Q focus by adjusting Q lens to be formed in gas box, the position adjustments of described tune Q focus is changed by the second translation stage adjusts the position of Q lens to realize, described tune Q light beam regulates the ellipse degree of bias by ellipse inclined device, suppresses the High-order Harmonic Generation adjusting Q light beam self;
(3) drive light beam to drive focus by driving lens to be formed in gas box, the position adjustments of described driving focus drives the position of lens to realize by the first translation stage change, makes it just in time be positioned at the centre position of gas box;
(4) pulse of described tune Q light beam needs the pulses arrive gas box prior to driving light beam, realize presetting of the operating state of inert gas, the high order harmonic component exported carries out the filtration of fundamental frequency light and stray light by aluminium film, finally obtain the extreme ultraviolet laser that Q value is controlled.
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| CN204706764U (en) * | 2015-03-31 | 2015-10-14 | 绍兴文理学院 | A kind of Q-modulating device of extreme ultraviolet laser |
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2015
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| CN102000912A (en) * | 2010-09-21 | 2011-04-06 | 中国科学院理化技术研究所 | Laser micro/nano processing system and method |
| CN102507512A (en) * | 2011-11-07 | 2012-06-20 | 大连理工大学 | On-line in situ detecting method for infrared-ultraviolet double pulse laser induced breakdown spectroscopy |
| CN204706764U (en) * | 2015-03-31 | 2015-10-14 | 绍兴文理学院 | A kind of Q-modulating device of extreme ultraviolet laser |
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Effective date of registration: 20180416 Address after: 312030 room 1603-1604, block B, science and technology building, Keqiao District, Shaoxing, Zhejiang. Applicant after: Shaoxing Tianhong Laser Technology Co., Ltd. Address before: 312000 Shaoxing Province, South City Road, No. 900, Institute of mathematical information Applicant before: Shaoxing University |
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Effective date of registration: 20200327 Address after: 226000 No.165, South Renmin Road, Yudong Town, Haimen City, Nantong City, Jiangsu Province Patentee after: HAIMEN BIWEI INTELLECTUAL PROPERTY SERVICE Co.,Ltd. Address before: 312030 room 1603-1604, block B, science and technology building, Keqiao District, Shaoxing, Zhejiang. Patentee before: SHAOXING TIANHONG LASER TECHNOLOGY Co.,Ltd. |