CN104733994B - A kind of Q-modulating device of extreme ultraviolet laser - Google Patents
A kind of Q-modulating device of extreme ultraviolet laser Download PDFInfo
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- CN104733994B CN104733994B CN201510143627.7A CN201510143627A CN104733994B CN 104733994 B CN104733994 B CN 104733994B CN 201510143627 A CN201510143627 A CN 201510143627A CN 104733994 B CN104733994 B CN 104733994B
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Abstract
The present invention relates to the Q-modulating device and its application method of extreme ultraviolet laser, including light source, the side of light source is provided with beam splitting chip, driving light beam side is provided with the first translation stage, driving lens are installed inside the first translation stage, first translation stage side is provided with the first total reflective mirror, the second total reflective mirror and the 3rd total reflective mirror, is provided with below the 3rd total reflective mirror and closes beam piece；Adjust Q light beams side that the second translation stage is installed, it is provided with inside second translation stage and adjusts Q lens, the side of second translation stage is provided with the 4th total reflective mirror, the side of 4th total reflective mirror is provided with ellipse inclined device, the opposite side for closing beam piece is provided with gas box, there is inert gas in gas box, and the inside of gas box, which also has, adjusts Q focuses and driving focus, the outside of gas box is provided with aluminium film, and the side of aluminium film is the adjustable extreme ultraviolet laser of Q values.The configuration of the present invention is simple, operation is simple, strong applicability, provide not only the tune Q new tools of extreme ultraviolet laser output, and the deep development that will promote association area.
Description
Technical field
The present invention relates to the Q-modulating device and its application method of a kind of extreme ultraviolet laser, realizes that intracavitary Q is opened using chamber outer lens
Close working media in function and control chamber（Inert gas）Higher hamonic wave is produced with driving light source interaction, so as to obtain Q values
Controllable extreme ultraviolet laser, suitable for extreme ultraviolet laser（Higher hamonic wave）Generation and adjust the field such as Q.
Background technology
Extreme ultraviolet or even x-ray laser are generally difficult to produce using traditional laser crystal, and due to its be easy to by
Atmospheric Absorption, it usually needs laser generating element is placed in vacuum environment.Therefore, extreme ultraviolet or even x-ray laser generally with
The form of higher hamonic wave produces, i.e., high field visible laser obtains the high frequency multiplication output of fundamental frequency light with inert gas interaction, this
It is a kind of extreme ultraviolet laser obtained using higher-order nonlinear system, but the general efficiency of extreme ultraviolet laser that this mode produces is low
Descend and be not easily accomplished and adjust Q functions.
Q-switch is an important optical element in laser system, it by block or do not block the reflection channel of light come
Suppress or produce laser pulse, divide active Q-switching and passive Q-switch.Active Q-switching is to make Q by exterior mechanically or electrically subsignal
Value changes；Passive Q-switch is the change that Q values are completed by laser itself.Their common principle is all intentional reduces just
Begin the photon numbers ejected, i.e. Q values.Traditional active Q-switching is mainly by quartz crystal, piezoelectric transducer, impedor,
Radio frequency plug and housing etc. form.When piezoelectric transducer does not apply radiofrequency signal, quartz crystal keeps original conventional refraction
Rate so that the parallel light-transmissive quartz crystal that laser bar emits is then passed through quartz crystal after reflective mirror returns, so that
Laser bar can be again returned to.Once piezoelectric transducer does not apply radiofrequency signal, piezoelectric transducer produces in quartz body immediately
Ultrasonic wave makes its refractive index change, and refraction so occurs through the light of quartz crystal and deviates reflective mirror, makes light
Can not return laser light rod.Since photon return laser light rod is the necessary condition of excitation laser, to piezoelectric transducer apply and
Radiofrequency signal is removed, becomes the control means for turning off and discharging laser.
Process is produced since higher hamonic wave process is different from traditional laser, traditional Q-switch is not suitable for extreme ultraviolet and is
To x-ray laser（Higher hamonic wave）System, it is therefore proposed that of the invention.
The content of the invention
For the above-mentioned technical problem of the prior art, the object of the present invention is to provide a kind of Q-modulating device of extreme ultraviolet laser
And its application method, the device belong to active Q-switching type, intracavitary Q-switch function is realized simultaneously using the adjusting of chamber outer lens
Working media in control chamber（Inert gas）Higher hamonic wave is produced with driving light source interaction, so as to obtain the controllable pole of Q values
Ultra-Violet Laser.
To reach above-mentioned purpose, the present invention is achieved by the following technical solutions：
A kind of Q-modulating device of extreme ultraviolet laser, including light source, the side of the light source are provided with beam splitting chip, the beam splitting
Light source is divided into driving light beam and adjusts Q light beams by piece, and the side of the driving light beam is provided with the first translation stage, first translation
Driving lens are installed, the side of the first translation stage is provided with the first total reflective mirror, the lower section peace of first total reflective mirror inside platform
Equipped with the second total reflective mirror, the side of second total reflective mirror is provided with the 3rd total reflective mirror, the lower section installation of the 3rd total reflective mirror
Have and close beam piece；The side of the tune Q light beams is provided with the second translation stage, is provided with inside second translation stage and adjusts Q lens, the
The side of two translation stages is provided with the 4th total reflective mirror, and the side of the 4th total reflective mirror is provided with ellipse inclined device, the ellipse device position partially
In the side for closing beam piece, the opposite side for closing beam piece is provided with gas box, there is inert gas in the gas box, gas box
Internal also to have tune Q focuses and driving focus, the outside of gas box is provided with aluminium film, and the side of the aluminium film is adjustable for Q values
Extreme ultraviolet laser, the gas box, aluminium film and extreme ultraviolet laser are placed in vacuum environment.
A kind of application method of the Q-modulating device of extreme ultraviolet laser, comprises the following steps：
（1）Light source is driven, light source is divided into by beam splitting chip and adjusts Q light beams and driving light beam；
（2）Q light beams are adjusted to adjust Q focuses by adjusting Q lens to be formed in gas box, the position of the tune Q focuses, which is adjusted, to be passed through
Second translation stage, which changes, adjusts the position of Q lens to realize, the tunes Q light beams adjust the ellipse degree of bias by ellipse device partially, suppress tune Q light
The High-order Harmonic Generation of Shu Zishen；
（3）By driving lens to form driving focus in gas box, the position of the driving focus is adjusted driving light beam
Realized by the position of the first translation stage change driving lens, it is placed exactly in the centre position of gas box；
（4）The pulse of the tune Q light beams needs, prior to driving the pulse of light beam to arrive at gas box, to realize the work of inert gas
Make the default of state, the higher hamonic wave of output is carried out the filtering of fundamental frequency light and veiling glare by aluminium film, it is controllable to finally obtain Q values
Extreme ultraviolet laser.In this way, adjusting Q light beams to change the working status of inert gas by adjusting the manipulation of Q lens, driving light beam passes through
Interact after driving lens convergence with the inert gas in gas box to produce and amplify higher hamonic wave, can so as to fulfill Q values
The extreme ultraviolet laser output of control.
The principle of extreme ultraviolet laser Q-modulating device of the present invention is as follows：First, light beam is driven by driving the regulation and control of lens to drive
Oving foci is preset at the middle of gas box；And Q light beams are adjusted to change tune Q focuses in gas box by adjusting the movement of Q lens
Position（Adjust Q focuses position can from the gas box leftmost side be tuned to the rightmost side, you can it is front and rear it is inswept driving focus position）.
However, different working condition of the inert gas in driving focal point will be caused by adjusting the diverse location of Q focuses（Divide ground state, excitation state
With the state such as state of ionization）.When adjusting Q focuses away from driving focus, inert gas working status is ground state, can produce high order at this time
Harmonic radiation, but efficiency is very low；When adjusting Q focuses close to driving focus, inert gas working status is excitation state, is produced at this time
The ultrahigh in efficiency of higher hamonic wave, strengthens while decades of times is presented, state is optimal, is "ON" equivalent to Q-switch state；When tune Q focuses
When almost being overlapped with driving focus, inert gas working status is state of ionization, and the generation process of higher hamonic wave is destroyed at this time, several
Without any High-order Harmonic Generation, state is worst at this time, is "Off" equivalent to Q-switch state.In addition, gas box intracavitary inertia
The air pressure of gas is also by the regulating effect for influencing Q-switch, it is necessary to select suitable operating air pressure to reach optimal q-effect.
In this way, it can be achieved with optimal Q-switch function using the change of chamber investigation mission outside the city or town Q lens and the optimization of intracavitary operating air pressure.
The characteristic of the present invention and innovation are as follows：
1st, intracavitary Q-switch function can be achieved using chamber outer lens in the present invention, compared with traditional Q-switch mode, without
Implantation destroys laser work chamber；
2nd, essence of the invention is to change the working status of inert gas, compared with traditional Q-switch mode, without blocking
Light reflection passage；
3rd, since inert gas can hardly damage（Revocation driving light source can recover as former state）, can repeat to make infinitely
With, therefore compared with traditional Q-switch mode, long lifespan, resistance to extreme value；
4th, Q-switch effect of the invention by chamber outside lens position and the operating air pressure of intracavitary together decide on；
5th, the configuration of the present invention is simple, operation is simple, suitable for the tune Q processes of extreme ultraviolet laser.
The present invention is a kind of extreme ultraviolet laser（Higher hamonic wave）Tune Q (Q values, i.e. quality factor, Quality factor)
Device and its application method, intracavitary photoswitch is realized using chamber outer lens（That is Q-switch）Function, i.e., inert gas in control chamber
The output intensity of higher hamonic wave is produced with driving light source interaction, so as to obtain the controllable extreme ultraviolet laser of Q values.Drive light source
Driving light beam is divided into by beam splitting chip and adjusts Q light beams, driving light beam is by driving lens focus in gas box and and inert gas
Interaction produces higher hamonic wave, adjusts Q light beams by adjusting Q lens to change gas box（Equivalent to laser resonant cavity）Interior inertia
The working status of gas（Equivalent to Q values）, so as to fulfill the tune Q functions of extreme ultraviolet laser.The apparatus and method can not only be realized
The tune Q functions of extreme ultraviolet laser, make its output controllable.
Compared with traditional Q-switch mode, what the present invention changed is the working status of working media, without blocking light reflection
Passage；Intracavitary Q-switch function can be achieved using chamber outer lens in the present invention, without being implanted into laserresonator.Structure letter of the present invention
Single, operation is simple, strong applicability, provide not only the tune Q new tools of extreme ultraviolet laser output, and will promote association area
Deeply development.
Brief description of the drawings
Fig. 1 is the schematic diagram of the extreme ultraviolet laser Q-modulating device of the present invention；
Fig. 2 is the Experimental equipment of the embodiment of the present invention 1；
Fig. 3 is under 20torr air pressures, and higher hamonic wave output figure during Q lens positions is adjusted in scanning；
Fig. 4 is under 30torr air pressures, and higher hamonic wave output figure during Q lens positions is adjusted in scanning；
Fig. 5 and Fig. 6 is the q-effect figure of the embodiment of the present invention 1.
Embodiment
With reference to specific embodiment, the present invention is further illustrated, but protection scope of the present invention is not limited to
This.
As shown in Figure 1, the Q-modulating device of the extreme ultraviolet laser of the present invention, including light source 13, the side of light source 13 is provided with point
Light source 13 is divided into driving light beam 15 and adjusts Q light beams 14 by beam piece 1, beam splitting chip 1, and the side of driving light beam 15 is provided with the first translation
Platform 4, driving lens 2 are provided with inside the first translation stage 4, and the side of the first translation stage 4 is provided with the first total reflective mirror 9, and first is complete
The lower section of anti-mirror 9 is provided with the second total reflective mirror 10, and the side of the second total reflective mirror 10 is provided with the 3rd total reflective mirror 11, the 3rd total reflective mirror
11 lower section, which is provided with, closes beam piece 7；Adjust the side of Q light beams 14 that second translation stage 5 is installed, be provided with inside the second translation stage 5
Q lens 3 are adjusted, the side of the second translation stage 5 is provided with the 4th total reflective mirror 12, and the side of the 4th total reflective mirror 12 is provided with ellipse device 6 partially,
Positioned at the side for closing beam piece 7, the opposite side for closing beam piece 7 is provided with gas box 8, there is inert gas, gas in gas box 8 ellipse device 6 partially
The inside of body box 8, which also has, adjusts Q focuses 18 and driving focus 19, and the outside of gas box 8 is provided with aluminium film 16, the side of aluminium film 16
For the adjustable extreme ultraviolet laser 17 of Q values, since the higher hamonic wave of extreme ultraviolet waveband is easy to be needed by Atmospheric Absorption, interaction process
Put in a vacuum, as shown in Fig. 1 dotted line frames, gas box 8, aluminium film 16 and extreme ultraviolet laser 17 are placed in vacuum environment.
The application method of the Q-modulating device of extreme ultraviolet laser of the present invention, comprises the following steps：
（1）Light source 13 is driven, light source 13 is divided into by beam splitting chip 1 and adjusts Q light beams 14 and driving light beam 15；
（2）Adjust Q light beams 14 to adjust Q focuses 18 by adjusting Q lens 3 to be formed in gas box 8, adjust the position of Q focuses 18 to adjust
Realized by the position of the second translation stage 5 change tune Q lens 3, and gas box can be directly affected by adjusting the position of Q focuses 18 to change
The working status of interior inert gas, so as to fulfill Q functions are adjusted；Adjust Q light beams 14 to pass through ellipse device 6 partially to adjust the ellipse degree of bias, suppress to adjust Q
The High-order Harmonic Generation of itself of light beam 14；
（3）Driving light beam 15 drives the position of focus 19 by driving lens 2 to form driving focus 19 in gas box 8
Adjust and change the position for driving lens 2 by the first translation stage 4 to realize, it is placed exactly in the centre position of gas box 8, make
Higher hamonic wave drive efficiency highest；
（4）The pulse of Q light beams 14 is adjusted to need, prior to driving the pulse of light beam 15 to arrive at gas box 8, to realize inert gas
Working status is preset, and the higher hamonic wave of output carries out the filtering of fundamental frequency light and veiling glare by aluminium film 16, and finally obtaining Q values can
The extreme ultraviolet laser of control.In this way, Q light beams 14 are adjusted to change the working status of inert gas, driving by adjusting the manipulation of Q lens 3
Light beam 15 interacts with the inert gas in gas box 8 after being converged by driving lens 2 and produces and amplify higher hamonic wave, from
And realize the controllable extreme ultraviolet laser 17 of Q values and export.
Embodiment 1
As shown in Fig. 2, produce 19 ~ 31 levels applied to 800nm femtosecond lasers driving argon gas（That is 26 ~ 42nm）Higher hamonic wave
Tune Q output：1 is 800nm laser beam splitter pieces, energy splitting ratio about 1:1；2 be to drive lens, focal length about 500mm；3 be to adjust Q saturating
Mirror, focal length about 500mm；4 be the first translation stage that range is 50mm, and 5 be the second translation stage that range is 50mm, wherein 4 be hand
Dynamic translation stage, 5 be motorized precision translation stage；6 be ellipse inclined device, is the quarter wave plate of 800nm；7 be that 800nm swashs combiner piece；8 be gas
Box, length 50mm, inside is filled with argon gas；9 it is the first total reflective mirrors of 800nm, 10 be the second total reflective mirrors of 800nm, 11 is 800nm
3rd total reflective mirror, 12 are the 4th total reflective mirrors of 800nm；13 be 800nm driving light sources；14 be to adjust Q light beams；15 be driving light beam；16
It is the aluminium film of 500nm thickness；17 be the extreme ultraviolet laser finally obtained；18 be to adjust Q focuses；19 be driving focus；20 be U.S.'s phase
The 800nm ti∶sapphire laser femto-second lasers of dry company's production, output parameter 8mJ/40fs/1kHz；21 be that EUV light source is special
CCD；22 be program control computer；23 and 24 be program-controlled line.Second translation stage 5 and special CCD 21 pass through program-controlled line and program control computer 22
It is connected, therefore, Q-switch and data acquisition there can be computation completion.
Specific experiment operating process is as follows：（1）Device is connected as shown in Figure 2 and starts laser system and computer；（2）Control
The energy output of system driving light source so that drive light beam 15 and adjust the power density of the focal point in gas box 8 of Q light beams 14 about
1.5×1014 W/cm2；（3）The position of control driving lens 2 makes the middle that it drives focus 19 to be located at gas box 8；（4）Adjust
The ellipse degree of bias of ellipse 6 quarter wave plate of device partially is saved, angle rotates about 10 ~ 20 °, makes it just suppress to adjust 14 high order of itself of Q light beams
Harmonic radiation；（5）Driving light beam 15 produces higher hamonic wave with the argon gas interaction in gas box 8 and records high order by CCD
Harmonic signal；（6）Optimize the air pressure in gas box 8 and scan the position for adjusting Q lens 3, realize the tune Q outputs of higher hamonic wave.
Produced using extreme ultraviolet laser as shown in Figure 2 and Q-modulating device, obtained experiment export result as seen in figures 3-6,
By Fig. 3 and 4 it can be found that q-effect is related with the air pressure in gas box 8, when air pressure is 30torr, higher hamonic wave signal
There is the state of obvious on and off.In order to which q-effect is more clearly presented, we extract higher hamonic wave output from Fig. 4
As a result contrasted.As shown in figure 5, what is extracted is the higher hamonic wave intensity integration of 19th ~ 31st levels, corresponding wavelength 26 ~
42nm, it is found that with the scanning for adjusting 3 position of Q lens, there is obvious "ON" and "Off" state in output intensity, wherein
"On" state, which appears in, to be adjusted near Q lens -5mm positions, and "Off" state is appeared in and adjusted near Q lens+2mm positions.Together
Sample, we are also individually extracted 25th levels（Corresponding wavelength 32nm）Higher hamonic wave output as a result, as shown in Figure 6, it has been found that
The tune Q lens positions of same q-effect, its "ON" and "Off" state are also not much different.In this way, we can pass through tune
The tune Q outputs that the position of Q lens selects to realize higher hamonic wave extreme ultraviolet laser.
The present invention is a kind of extreme ultraviolet laser（Higher hamonic wave）Tune Q (Q values, i.e. quality factor, Quality factor)
Device and its application method, intracavitary photoswitch is realized using chamber outer lens（That is Q-switch）Function, i.e., inert gas in control chamber
The output intensity of higher hamonic wave is produced with driving light source interaction, so as to obtain the controllable extreme ultraviolet laser of Q values.Drive light source
Driving light beam is divided into by beam splitting chip and adjusts Q light beams, driving light beam is by driving lens focus in gas box and and inert gas
Interaction produces higher hamonic wave, adjusts Q light beams by adjusting Q lens to change gas box（Equivalent to laser resonant cavity）Interior inertia
The working status of gas（Equivalent to Q values）, so as to fulfill the tune Q functions of extreme ultraviolet laser.The apparatus and method can not only be realized
The tune Q functions of extreme ultraviolet laser, make its output controllable.
Compared with traditional Q-switch mode, what the present invention changed is the working status of working media, without blocking light reflection
Passage；Intracavitary Q-switch function can be achieved using chamber outer lens in the present invention, without being implanted into laserresonator.Structure letter of the present invention
Single, operation is simple, strong applicability, provide not only the tune Q new tools of extreme ultraviolet laser output, and will promote association area
Deeply development.
Above-described embodiment is only used for illustrating the inventive concept of the present invention, rather than the restriction to rights protection of the present invention,
All changes for carrying out unsubstantiality to the present invention using this design, should all fall into protection scope of the present invention.
Claims (1)
- A kind of 1. Q-modulating device of extreme ultraviolet laser, it is characterised in that：Including light source, the side of the light source is provided with beam splitting chip, Light source is divided into driving light beam and adjusts Q light beams by the beam splitting chip, and the side of the driving light beam is provided with the first translation stage, described Driving lens are installed, the side of the first translation stage is provided with the first total reflective mirror, first total reflective mirror inside the first translation stage Lower section the second total reflective mirror is installed, the side of second total reflective mirror is provided with the 3rd total reflective mirror, the 3rd total reflective mirror Lower section, which is provided with, closes beam piece；The side of the tune Q light beams is provided with the second translation stage, and tune is provided with inside second translation stage Q lens, the side of the second translation stage are provided with the 4th total reflective mirror, and the side of the 4th total reflective mirror is provided with ellipse inclined device, described Ellipse device partially is provided with gas box, has inert gas in the gas box positioned at the side for closing beam piece, the opposite side for closing beam piece, The inside of gas box, which also has, adjusts Q focuses and driving focus, and the outside of gas box is provided with aluminium film, and the side of the aluminium film is Q It is worth adjustable extreme ultraviolet laser, the gas box, aluminium film and extreme ultraviolet laser are placed in vacuum environment；The application method of the Q-modulating device of the extreme ultraviolet laser comprises the following steps：（1）Light source is driven, by beam splitting chip by light Source, which is divided into, adjusts Q light beams and driving light beam；（2）Q light beams are adjusted to adjust Q focuses by adjusting Q lens to be formed in gas box, the position of the tune Q focuses, which is adjusted, passes through second Translation stage, which changes, adjusts the position of Q lens to realize, the tunes Q light beams adjust the ellipse degree of bias by ellipse device partially, suppress to adjust Q light beams certainly The High-order Harmonic Generation of body；（3）By driving lens to form driving focus in gas box, the position of the driving focus is adjusted to be passed through driving light beam The position that first translation stage changes driving lens is realized, it is placed exactly in the centre position of gas box；（4）The pulse of the tune Q light beams needs, prior to driving the pulse of light beam to arrive at gas box, to realize the work shape of inert gas State is preset, and the higher hamonic wave of output carries out the filtering of fundamental frequency light and veiling glare by aluminium film, finally obtains the controllable extremely purple of Q values Outer laser.
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| CN102000912A (en) * | 2010-09-21 | 2011-04-06 | 中国科学院理化技术研究所 | Laser micro/nano processing system and method |
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| CN204706764U (en) * | 2015-03-31 | 2015-10-14 | 绍兴文理学院 | A kind of Q-modulating device of extreme ultraviolet laser |
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2015
- 2015-03-31 CN CN201510143627.7A patent/CN104733994B/en active Active
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| CN102000912A (en) * | 2010-09-21 | 2011-04-06 | 中国科学院理化技术研究所 | Laser micro/nano processing system and method |
| CN102507512A (en) * | 2011-11-07 | 2012-06-20 | 大连理工大学 | On-line in situ detecting method for infrared-ultraviolet double pulse laser induced breakdown spectroscopy |
| CN204706764U (en) * | 2015-03-31 | 2015-10-14 | 绍兴文理学院 | A kind of Q-modulating device of extreme ultraviolet laser |
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Effective date of registration: 20200327 Address after: 226000 No.165, South Renmin Road, Yudong Town, Haimen City, Nantong City, Jiangsu Province Patentee after: HAIMEN BIWEI INTELLECTUAL PROPERTY SERVICE Co.,Ltd. Address before: 312030 room 1603-1604, block B, science and technology building, Keqiao District, Shaoxing, Zhejiang. Patentee before: SHAOXING TIANHONG LASER TECHNOLOGY Co.,Ltd. |
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