CN104677315B - 硅片表面不平整度测量方法 - Google Patents
硅片表面不平整度测量方法 Download PDFInfo
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- CN104677315B CN104677315B CN201510105532.6A CN201510105532A CN104677315B CN 104677315 B CN104677315 B CN 104677315B CN 201510105532 A CN201510105532 A CN 201510105532A CN 104677315 B CN104677315 B CN 104677315B
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- silicon chip
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 58
- 239000010703 silicon Substances 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 17
- 239000002184 metal Substances 0.000 claims abstract description 17
- 239000004411 aluminium Substances 0.000 claims abstract description 15
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000005253 cladding Methods 0.000 claims abstract description 14
- 238000005259 measurement Methods 0.000 claims abstract description 11
- 238000012360 testing method Methods 0.000 claims abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 19
- 239000011521 glass Substances 0.000 claims description 16
- 238000002310 reflectometry Methods 0.000 claims description 11
- 230000005284 excitation Effects 0.000 claims description 9
- 238000009826 distribution Methods 0.000 claims description 7
- 238000005516 engineering process Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 239000004568 cement Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000000053 physical method Methods 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- Investigating Or Analysing Materials By Optical Means (AREA)
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CN201510105532.6A CN104677315B (zh) | 2015-03-05 | 2015-03-05 | 硅片表面不平整度测量方法 |
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CN104677315A CN104677315A (zh) | 2015-06-03 |
CN104677315B true CN104677315B (zh) | 2018-04-17 |
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CN201510105532.6A Active CN104677315B (zh) | 2015-03-05 | 2015-03-05 | 硅片表面不平整度测量方法 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105300325B (zh) | 2015-11-11 | 2018-05-29 | 海信集团有限公司 | 一种激光光源中荧光轮的平整度检测方法和装置 |
CN106403851A (zh) * | 2016-08-31 | 2017-02-15 | 上海华力微电子有限公司 | 一种检测光刻工艺曝光前晶圆背面水平度的方法及装置 |
CN106908017B (zh) * | 2017-02-24 | 2019-03-29 | 哈尔滨工业大学 | 基于金属银增强荧光的自由曲面测量装置及其测量方法 |
CN108807204B (zh) * | 2017-05-05 | 2020-07-07 | 上海新昇半导体科技有限公司 | 晶圆平坦度测量装置及晶圆平坦度测量系统 |
CN107478165A (zh) * | 2017-08-23 | 2017-12-15 | 苏州鑫河镜业有限公司 | 一种镜片表面镀膜厚度均匀度测试装置 |
CN109029742B (zh) * | 2018-07-20 | 2020-07-14 | 华中科技大学 | 一种涡旋激光的检测装置及方法 |
US12005545B2 (en) | 2020-11-17 | 2024-06-11 | Changxin Memory Technologies, Inc. | Fixing device and detection system |
CN112578245A (zh) * | 2020-12-09 | 2021-03-30 | 广西电网有限责任公司电力科学研究院 | 基于光学技术的gis刀闸气室故障诊断的方法及装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH07105424B2 (ja) * | 1991-07-23 | 1995-11-13 | 信越半導体株式会社 | シリコンウェーハの表面の結合状態及び不純物の評価方法 |
CN1173166C (zh) * | 2002-08-22 | 2004-10-27 | 上海交通大学 | 双面金属波导测量方法及其装置 |
CN103884298B (zh) * | 2014-03-20 | 2016-08-17 | 河海大学常州校区 | 基于导模的金属表面粗糙度测量系统及方法 |
CN103969220B (zh) * | 2014-05-20 | 2016-07-13 | 复旦大学 | 一种检测uv胶水固化过程动态光学特性的方法 |
CN104359412B (zh) * | 2014-10-01 | 2017-05-24 | 上海光刻电子科技有限公司 | 光刻掩模版铬膜厚度测量方法 |
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