CN104677290B - Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle - Google Patents

Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle Download PDF

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CN104677290B
CN104677290B CN201510109878.3A CN201510109878A CN104677290B CN 104677290 B CN104677290 B CN 104677290B CN 201510109878 A CN201510109878 A CN 201510109878A CN 104677290 B CN104677290 B CN 104677290B
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fiber
fiber grating
twin
grating
mode
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CN104677290A (en
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崔继文
冯昆鹏
党竑
朱圣琪
谭久彬
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Harbin Institute of Technology
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Harbin Institute of Technology
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Priority to US15/503,836 priority patent/US10481325B2/en
Priority to PCT/CN2016/075270 priority patent/WO2016138853A1/en
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Abstract

Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle belongs to precision instrument manufacturing technology field;This method reduces the diameter of the single-mode fiber after inscribing fiber grating by the way of machining or the treatment of hydrofluoric acid fiber optical corrosive, the single-mode fiber inscribed after fiber grating after two diameters are reduced again is passed through in the tubule with interior cone angle, and lower end is immersed in low viscosity ultraviolet glue, self assembly is carried out to it using capillary force, so as to form most compact parallel construction, the single-mode fiber after the inscription fiber grating after the reduction of two diameters after to self assembly carries out ultraviolet adhesive curing, it is made twin-core fiber grating, end face to twin-core fiber grating on optic fiber polishing machine is ground, one spherical needle point is processed in twin-core fiber grating abrasive tip using fused optic fiber method or microballoon Method for Installation, complete the processing of twin-core fiber light gridded probe;Fiber grating signal of the present invention is without crosstalk, low cost, low-loss.

Description

Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle
Technical field
The invention belongs to precision instrument manufacturing technology field, more particularly to a kind of twin-core fiber light based on self assembly principle Grid micro-scale measurement probe manufacturing method.
Background technology
It is micro- for precision with continuing to develop for aerospace industry, auto industry, electronics industry and sophisticated industry etc. The demand sharp increase of primary structural component.Due to being limited and being measured contact by space scale and micro-member shadowing effect to be measured The influence of power, the accurate measurement of micro-member yardstick is increasingly difficult to, and the depth for especially measuring small inner chamber component is difficult To improve, these already turn into " bottleneck " of restriction industry development.Fathomed to realize smaller szie measurement, increasing, most Widely used method is exactly that the inner chamber for going deep into micro-member using elongated probe is detected, by way of aiming at sender Small inside dimension on measurement different depth.Therefore, the precision measurement method of current micro-member size is main with measurement of coordinates Based on the detection mode of machine combination aiming triggering type probe, due to the development comparative maturity of coordinate measuring machine technology, can be with Accurate three-dimensional space motion is provided, therefore the detection mode of aiming triggering type probe sets as micro-member size detection system The key of meter.And, fiber grating probe can completely overcome masking to imitate with its sensor and the discrete advantage of measuring system Should, the limitation that fathoms to probe of breakthrough, while fiber grating probe have concurrently miniaturization, it is anti-interference the advantages of, be especially suitable for For making micro-scale measurement probe.
At present, the micro-scale measurement probe based on fiber grating design includes following several:
2011, Chinese Harbin Institute of Technology Cui after culture and education award proposed with Yang Fuling et al. it is a kind of based on FBG The pore size measurement apparatus and method of Bending, the method are constituted using fiber grating probe and light source, detection means and aimed at Triggering system, coordinates two-frequency laser interferometer measuring motion, can obtain the micro-pore diameter of different cross section.The optical fiber light of the method Gridded probe is touched when surveying deformation, and the main stress of probe is not acted on fiber grating, and the resolution ratio of system is very low, without three-dimensional Measurement capability, performance is difficult to further raising.
2014, Chinese Harbin Institute of Technology Cui awarded after culture and education and is proposed based on multi-core fiber grating with Feng Kunpeng et al. Micro-scale measurement device and method, the method devises special multi-core fiber grating probe, probe is surveyed being touched with workpiece During produce stress fully act on fiber grating, relatively before based on FBG Bending pore size measurement dress Put and the detection resolving power of method improves a lot;And, different multi-core fiber fibre core distributed architectures can realize two dimension, The decoupling that three-dimensional is surveyed, with good measurement property.But, the method inscribes fiber grating, one on special multi-core fiber Aspect, can bring the inscription cross-interference issue between fibre core and fibre core in multi-core fiber scribing process;On the other hand, the multi-core optical of purchase Fibre makes probe causes probe structure parameter to be unable to autonomous Design.
In sum, it is existing based on fiber grating design micro-scale measurement probe in, multi-core fiber grating probe with The characteristics of its resolving power is high, multidimensional measure is decoupled by extensive concern, with good application prospect, but existing multi-core fiber Light gridded probe is primarily present problems with:
1. the cost of manufacture problem of multi-core fiber grating probe is considered, multi-core fiber can only select the spy of optical fiber production producer There is model, it is impossible to which the multi-core fiber of special construction is designed for making multi-core fiber grating probe according to measurement request.
2. when multi-core fiber grating probe is made, it is necessary to be carved on multi-core fiber using PRK phase masks Write fiber grating, the fibre core of multi-core fiber away from only tens microns, on a fibre core for multi-core fiber inscribe fiber grating when Can influence to close on fibre core, produce and inscribe crosstalk, the multi-core fiber grating probe being finally made, the fiber grating in each fibre core is anti- Penetrate that rate is low and light blending algorithm serious, have a strong impact on the accuracy of measurement.
3. multi-core fiber grating probe is when in use, it is necessary to obtain the every reflection of fibre core inner fiber grating in multi-core fiber Spectrum, therefore each multi-core fiber grating probe needs to install a multi-core fiber and is fanned out to joint and realizes every fibre core of multi-core fiber With the coupling of outside single-mode fiber, but this joint price is high, light loss big, is not suitable for multi-core fiber grating probe micro- Popularization, application in yardstick measurement.
The content of the invention
Limited by manufacturer present invention aim to address multi-core fiber structure in multi-core fiber grating probe application, carved Write crosstalk and be fanned out to the big problem of joint light loss, it is proposed that a kind of twin-core fiber grating minute yardstick based on self assembly principle Measurement probe manufacturing method, twin-core core fibre is made by the way of self assembly by the general single mode fiber after inscribing fiber grating Grating micro-scale measurement probe, and the structure of twin-core fiber grating micro-scale measurement probe according to measurement demand, can be designed, And use this method ensure that twin-core fiber each channel of grating micro-scale measurement probe and a general single mode light for being made Fibre connection, without being fanned out to joint, reaches that structure design is flexible, spectral signal is good, light loss is small, the purpose of low cost.
The technical scheme is that:A kind of twin-core fiber grating micro-scale measurement probe manufacturing based on self assembly principle Method, the described method comprises the following steps:
(1) reduces the single mode fiber diameters after inscribing fiber grating
It is the single-mode fiber after 100~1000mm inscribes fiber grating to take two length, and fiber grating grid region is in inscribes The position of the 30~50mm of one end of the single-mode fiber after fiber grating, fiber grating grid region length is 10~20mm, will inscribe light The tip length that single-mode fiber after fine grating is close to fiber grating grid region is that the coat of 50~80mm parts is divested, and is adopted afterwards The single-mode fiber reduced after inscribing fiber grating with the method for mechanical treatment divests the diameter of coating layer segment:Optical fiber light will be inscribed Single-mode fiber after grid is stretched, two ends be fixed in the fixing device of synchronous rotation motor and make will inscribe fiber grating after The pivot center of single-mode fiber is overlapped with the pivot center of synchronous rotation motor, and the single-mode fiber after fiber grating is inscribed is rotated Axle top is close to and contacts the single mode after inscribing fiber grating equipped with a runner for parcel abrasive sheet, the runner for wrapping up abrasive sheet Optical fiber is simultaneously divesting coating layer segment uniform motion repeatedly along the single-mode fiber inscribed after fiber grating, is ground, while adopting Detect that the single-mode fiber after inscribing fiber grating divests the diameter of coating layer segment with microscopic observation system, when inscription fiber grating When the diameter that single-mode fiber afterwards divests coating layer segment is decreased to 50~100 μm, stop grinding;With optical fiber cutter by diameter The single-mode fiber of 30~50mm cuts after the fiber grating grid region on the single-mode fiber after inscription fiber grating after reduction, makes Fiber grating grid region is in the end for inscribing the single-mode fiber after fiber grating after diameter reduces, and it is long to protect fiber grating grid region It is 5~10mm to spend, and is positioned over afterwards in the supersonic cleaning machine equipped with absolute ethyl alcohol and washs 5~20 minutes;
(2) self assembly for inscribing the single-mode fiber after fiber grating after two diameters of reduce
Prepare the tubule that length 10~30mm, one end have interior cone angle, internal diameter for (50~100 μm) × 3+ (1~5) μm, will The single-mode fiber inscribed after fiber grating after two diameters reduce after the treatment of (1st) step is inserted from the interior cone angle of tubule one end, Ensure the single-mode fiber end inscribed after fiber grating after two diameters reductions concordantly and beyond 5~10mm of tubule one end;It is perpendicular Single-mode fiber after the inscription fiber grating after the reduction of two diameters of tubule one end is simultaneously immersed in dress by straight secure thin tube There is 3~6mm in the glass of ultraviolet glue of the viscosity less than 100cp, low viscosity ultraviolet glue is straight along two under capillary forces Footpath reduce after inscriptions fiber grating after single-mode fiber move upwards, and after making the inscription fiber grating after the reduction of two diameters Single-mode fiber be close to form most compact parallel construction, the single mode inscribed after fiber grating after reducing to two diameters Optical fiber carries out self assembly;After 5~15 minutes, the inscription fiber grating after the reduction of two diameters by tubule and wherein after self assembly Single-mode fiber afterwards takes out from ultraviolet glue, it is ensured that the single mode inscribed after fiber grating after the reduction of two diameters after self assembly Optical fiber does not misplace, and with ultraviolet glue curing light source to the inscription after the two diameters reduction after the self assembly of tubule one end Single-mode fiber irradiation after fiber grating completes ultraviolet adhesive curing for 1~10 minute, forms twin-core fiber grating;Thereafter, in tubule Heat-curable glue is instilled at the interior cone angle of one end and interior cone angle is filled up, the tubule that will be inserted with twin-core fiber grating is placed on 50~180 DEG C Heated 10~60 minutes on constant temperature electric heater, solidify the heat-curable glue in the interior cone angle of tubule one end;
(3) end surface grinding of twin-core fibers grating
The tubule that twin-core fiber grating is inserted with (2nd) step is fixed on optic fiber polishing machine, adjustment tubule highly, makes double Core fibre grating is contacted with the abrasive sheet on optic fiber polishing machine, afterwards according to the lapping mode of FC/PC fibre-optical splices to its end face It is ground, and confirms smooth, flawless and incompleteness with endface viewing device, the end surface grinding for stopping twin-core fiber grating is used in combination Spirituous dust-free paper is dipped in by end face wiped clean;
(4) makes to the twin-core fiber grating end ball needle point after end surface grinding
Fused optic fiber method:The tubule of the twin-core fiber grating upper end after end surface grinding in (3rd) step is fixed vertically, is adjusted Tubule highly makes the twin-core fiber grating lower end after end surface grinding be under two sparking electrode needle point centers of electric discharge machining apparatus Side 0.5~3mm positions, adjust discharge time and the discharge current of electric discharge machining apparatus, the heat produced using spark discharge By the fiber-fuse of the twin-core fiber grating 0.5~3mm of lower end after end surface grinding, using gravity and the surface tension of fused optic fiber A good optical fiber ball is formed, it is spherical to form an optical fiber after the twin-core fiber grating lower end after its cooling after end surface grinding Needle point, completes the processing of the twin-core fiber grating end ball needle point after end surface grinding;It is spherical to optical fiber under an electron microscope Needle point crudy is examined and determine, it is desirable to the axiality of the twin-core fiber grating after optical fiber ball needle point and end surface grinding less than 5 μm, Twin-core fiber grating diameter ratio after optical fiber ball bubble-free and damaged, optical fiber bulb diameter and end surface grinding is more than or equal to 1.2, Qualified twin-core fiber light gridded probe is selected, the making of twin-core fiber light gridded probe is completed.
It is an advantage of the invention that:
1. twin-core fiber light gridded probe is made using the single-mode fiber inscribed after fiber grating, can be set according to measurement demand Count the structural parameters of twin-core fiber light gridded probe, such as twin-core fiber grating probe diameter, length and spherical tip diameter.
2. twin-core fiber light gridded probe is made using the single-mode fiber inscribed after fiber grating, it is to avoid directly in multi-core optical Fiber grating is inscribed on fibre and brings inscription crosstalk, the characteristics of the twin-core fiber light gridded probe for completing has spectral signal good.
3. twin-core fiber light gridded probe, twin-core fiber light gridded probe tail are made using the single-mode fiber inscribed after fiber grating Fibre carries single-mode tail fiber, it is to avoid using joint is fanned out to, reduce cost and light loss in twin-core fiber light gridded probe use.
Brief description of the drawings
Fig. 1 reduces the single mode fiber diameters installation drawing after inscribing fiber grating for the method for mechanical treatment;
Fig. 2 is that the single-mode fiber self assembly installation drawing after fiber grating is inscribed after diameter reduces;
Fig. 3 is the sectional view of the A-A in Fig. 2;
Fig. 4 is capillary structure schematic diagram in Fig. 2;
Fig. 5 is twin-core fiber grating end-face grinder figure;
Fig. 6 forms spherical needle tip device figure for fused optic fiber method;
Fig. 7 is that the method for hydrofluoric acid fiber optical corrosive treatment reduces the single mode fiber diameters installation drawing after inscribing fiber grating;
Fig. 8 is the top view of Fig. 7;
Fig. 9 forms spherical needle point schematic diagram for microballoon Method for Installation;
Figure 10 is B portions structure partial schematic diagram in Fig. 9;
In figure:1. the single-mode fiber after fiber grating is inscribed, 2. fiber grating grid region, 3. wrap up the runner of abrasive sheet, 4. Synchronous rotation motor, 5. fixing device, the single-mode fiber inscribed after fiber grating after 6. diameter reduces, 7. tubule, 8. inner cone Angle, 9. glass, 10. ultraviolet glue, 11. twin-core fiber gratings, 12. optic fiber polishing machines, 13. abrasive sheets, after 14. end surface grindings The electrode of twin-core fiber grating 15., 16. electric discharge machining apparatus, the spherical needle point of 17. optical fiber, 18. plastic drum lids, 19. Plastic Drums, 20. Hydrofluoric acid solution, the spherical needle point of 21. rubies, 22. levelling benches, 23.V shape grooves, 24. six degree of freedom adjusting apparatus.
Specific embodiment
Embodiment of the present invention is described in detail below in conjunction with the accompanying drawings.
A kind of twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle, methods described include with Lower step:
(1) reduces the single mode fiber diameters after inscribing fiber grating
It is the single-mode fiber 1 after 100~1000mm inscribes fiber grating to take two length, and fiber grating grid region 2 is in carves The position of the 30~50mm of one end of the single-mode fiber after fiber grating 1 is write, the length of fiber grating grid region 2 is 10~20mm, will be carved The coat that tip length of the single-mode fiber after fiber grating 1 near fiber grating grid region 2 is 50~80mm parts is write to divest, The single-mode fiber 1 for being reduced after inscribing fiber grating using the method for mechanical treatment afterwards divests the diameter of coating layer segment:To carve Write the single-mode fiber after fiber grating 1 to stretch, two ends are fixed in the fixing device 5 of synchronous rotation motor 4 and make inscription light The pivot center of the single-mode fiber 1 after fine grating overlaps with the pivot center of synchronous rotation motor 4, after fiber grating is inscribed The rotary shaft of single-mode fiber 1 top is close to and contacts inscription equipped with a runner 3 for parcel abrasive sheet, the runner 3 for wrapping up abrasive sheet The single-mode fiber 1 that single-mode fiber 1 and edge after fiber grating are inscribed after fiber grating divests coating layer segment uniform motion repeatedly, It is ground, while divesting the straight of coating layer segment using the single-mode fiber 1 that microscopic observation system detection is inscribed after fiber grating Footpath, when the diameter that the single-mode fiber 1 after inscribing fiber grating divests coating layer segment is decreased to 50~100 μm, stops grinding; 30 after the fiber grating grid region 2 on the single-mode fiber 6 inscribed after fiber grating after diameter is reduced with optical fiber cutter~ The single-mode fiber of 50mm cuts, and fiber grating grid region 2 is in the single-mode fiber 1 inscribed after fiber grating after diameter reduces End, and the length of fiber grating grid region 2 is protected for 5~10mm, it is positioned over afterwards in the supersonic cleaning machine equipped with absolute ethyl alcohol and washs 5 ~20 minutes;
(2) self assembly for inscribing the single-mode fiber after fiber grating after two diameters of reduce
Prepare the tubule 7 that length 10~30mm, one end have interior cone angle 8, internal diameter for (50~100 μm) × 3+ (1~5) μm, Interior cone angle 8 of the single-mode fiber 6 after fiber grating from the one end of tubule 7 is inscribed after two diameters after the treatment of (1st) step are reduced Insertion, it is ensured that two diameters reduce after the end of single-mode fiber 6 inscribed after fiber grating it is concordant and beyond the one end 5 of tubule 7~ 10mm;Vertical secure thin tube 7 simultaneously will be beyond the single-mode fiber inscribed after fiber grating after the reduction of two diameters of the one end of tubule 7 6 be immersed in equipped with viscosity less than 100cp ultraviolet glue 10 glass 9 in 3~6mm, low viscosity is ultraviolet under capillary forces Glue 10 reduce along two diameters after inscriptions fiber grating after single-mode fiber 6 move upwards, and after making two diameters reductions Inscription fiber grating after single-mode fiber 6 be close to form most compact parallel construction, the quarter after reducing to two diameters Writing the single-mode fiber after fiber grating 6 carries out self assembly;After 5~15 minutes, two diameters by tubule 7 and wherein after self assembly The single-mode fiber 6 after inscription fiber grating after reduction takes out from ultraviolet glue, it is ensured that after two diameters after self assembly reduce Inscription fiber grating after single-mode fiber 6 do not misplace, and with the curing light source of ultraviolet glue 10 to beyond one end of tubule 7 from group The irradiation of single-mode fiber 6 after the inscription fiber grating after the reduction of two diameters after dress completes ultraviolet adhesive curing, shape in 1~10 minute Into twin-core fiber grating 11;Thereafter, heat-curable glue is instilled at the interior cone angle 8 of the one end of tubule 7 and interior cone angle 8 is filled up, will be inserted with The tubule 7 of twin-core fiber grating 11 is placed on 50~180 DEG C of constant temperature electric heaters and heats 10~60 minutes, makes the one end of tubule 7 Heat-curable glue solidification in interior cone angle 8;
(3) end surface grinding of twin-core fibers grating
The tubule 7 that twin-core fiber grating 11 is inserted with (2nd) step is fixed on optic fiber polishing machine 12, adjustment tubule 7 is high Degree, makes twin-core fiber grating 11 be contacted with the abrasive sheet 13 on optic fiber polishing machine 12, afterwards according to the grinding of FC/PC fibre-optical splices Mode is ground to its end face, and confirms smooth, flawless and incompleteness with endface viewing device, stops twin-core fiber grating 11 End surface grinding and with dipping in spirituous dust-free paper by end face wiped clean;
(4) processing of the twin-core fiber grating end ball needle point after end surface grindings
Fused optic fiber method:The tubule 7 of the upper end of twin-core fiber grating 14 after end surface grinding in (3rd) step is fixed vertically, The regulation height of tubule 7 makes the lower end of twin-core fiber grating 14 after end surface grinding be in 16 two sparking electrodes 15 of electric discharge machining apparatus Needle point 0.5~3mm of central lower positions, adjust discharge time and the discharge current of electric discharge machining apparatus 16, are put using electric spark Electricity produce heat by the fiber-fuse of the 0.5~3mm of lower end of twin-core fiber grating 14 after end surface grinding, using gravity and melting The surface tension of optical fiber forms a good optical fiber ball, after the lower end of twin-core fiber grating 14 after its cooling after end surface grinding A spherical needle point 17 of optical fiber is formed, the processing of the end ball needle point of twin-core fiber grating 14 after end surface grinding is completed;In electricity The spherical crudy of needle point 17 of optical fiber is examined and determine under sub- microscope, it is desirable to double after the spherical needle point 17 of optical fiber and end surface grinding After the axiality of core fibre grating 14 is less than 5 μm, optical fiber ball bubble-free and breakage, the spherical diameter of needle point 17 of optical fiber and end surface grinding The diameter ratio of twin-core fiber grating 14 be more than or equal to 1.2, select qualified twin-core fiber light gridded probe, complete twin-core fiber The processing of light gridded probe.
In step (1), the diameter for reducing the single-mode fiber 1 after inscribing fiber grating can also be using the place of hydrofluoric acid corrosion Reason mode, the micropore that the single-mode fiber 1 inscribed after fiber grating is passed down through on plastic drum lid 18 is simultaneously fixed, to Plastic Drum 19 Interior addition volume fraction is 10~50% hydrofluoric acid solution 20, and the single-mode fiber 1 after inscription fiber grating is divested coating 60~90mm in the hydrofluoric acid solution 20 that volume fraction is 10~50% is immersed in the end of layer segment, will be inscribed every 2030 minutes Single-mode fiber 1 after fiber grating is taken out from Plastic Drum 7, and the single-mode optics after fiber grating are inscribed in measurement under an electron microscope Fine 1 diameter for divesting coating layer segment;The diameter that single-mode fiber 1 after fiber grating is inscribed divests coating layer segment is corroded When being decreased to 50~100 μm, the single-mode fiber 6 after inscription fiber grating after diameter is reduced takes out and puts from Plastic Drum 19 Enter in the glass tank equipped with acetone, the single-mode fiber 6 after inscription fiber grating after reducing diameter divests coating layer segment 80~90mm in end immersion acetone, does 10~30 minutes sofening treatments;Inscription light after diameter is reduced with optical fiber cutter The single-mode fiber of 30~50mm cuts after the fiber grating grid region 2 on single-mode fiber 6 after fine grating, after reducing diameter Inscribe the fiber grating grid region 2 on the single-mode fiber 6 after fiber grating and be in the list inscribed after fiber grating after diameter reduces The least significant end of mode fiber 6, and ensure to inscribe the length of fiber grating grid region 2 on the single-mode fiber 6 after fiber grating for 5~ 10mm, afterwards, is positioned in the supersonic cleaning machine equipped with absolute ethyl alcohol and washs 5~20 minutes.
In step (2), the material of tubule 7 is quartz or metal.
In step (4), it would however also be possible to employ twin-core fiber grating 14 end processing one of the microballoon Method for Installation after end surface grinding Individual spherical needle point:The tubule 7 of the upper end of twin-core fiber grating 14 after end surface grinding in (3rd) step is horizontally fixed on six degree of freedom In adjusting apparatus 24, and one end dispensing needle head smearing ultraviolet glue 10 after grinding, adjusted manually under visual surveillance system Six degree of freedom adjusting apparatus 24, make twin-core fiber grating 14 after end surface grinding smear one end of ultraviolet glue 10 close to levelling bench 22 The fixed spherical needle point 21 of ruby in upper V-groove 23, twin-core fiber grating 14 after end surface grinding with the spherical pin of ruby After sharp 21 centers alignment, the twin-core fiber grating 14 after propulsion end surface grinding is contacted with the spherical needle point 21 of ruby, afterwards with purple Outer adhesive curing light source butt contact irradiates 1~10 minute, completes the end ball needle point of twin-core fiber grating 14 after end surface grinding Processing, complete twin-core fiber light gridded probe processing.
The spherical diameter of needle point 21 of ruby is more than or equal to the diameter ratio of twin-core fiber grating 14 after end surface grinding 1.2。
The innovation point of the twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle and beneficial Have the technical effect that:Twin-core fiber light gridded probe is made using the single-mode fiber inscribed after fiber grating, it is to avoid directly in multicore Fiber grating is inscribed on optical fiber and brings inscription crosstalk, the twin-core fiber light gridded probe for completing has the good spy of spectral signal Point, can improve the signal to noise ratio of twin-core fiber grating probe output signal;The present invention can design twin-core light according to measurement demand The structural parameters of fine light gridded probe, such as diameter of the diameter of twin-core fiber light gridded probe, length and spherical needle point, with setting The characteristics of counting, make flexible;The twin-core fiber light gridded probe that the present invention makes carries single-mode tail fiber, it is to avoid fanned using multi-core fiber Go out joint, significantly reduce cost and light loss in twin-core fiber light gridded probe use, be conducive to twin-core fiber grating to visit Promotion and application of the pin in micro-scale measurement field.

Claims (5)

1. a kind of twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle, it is characterised in that:It is described Method is comprised the following steps:
(1) reduces the single mode fiber diameters after inscribing fiber grating
It is the single-mode fiber after 100~1000mm inscribes fiber grating to take two length, and fiber grating grid region is in inscribes optical fiber The position of the 30~50mm of one end of the single-mode fiber after grating, fiber grating grid region length is 10~20mm, will inscribe optical fiber light The tip length that single-mode fiber after grid is close to fiber grating grid region is that the coat of 50~80mm parts is divested, afterwards using machine The single-mode fiber that the method for tool treatment reduces after inscribing fiber grating divests the diameter of coating layer segment:After fiber grating being inscribed Single-mode fiber stretch, two ends be fixed in the fixing device of synchronous rotation motor and make will inscribe fiber grating after single mode The pivot center of optical fiber overlaps with the pivot center of synchronous rotation motor, in the single-mode fiber rotary shaft after fiber grating is inscribed Side is close to and contacts the single-mode fiber after inscribing fiber grating equipped with a runner for parcel abrasive sheet, the runner for wrapping up abrasive sheet And coating layer segment uniform motion repeatedly is being divested along the single-mode fiber inscribed after fiber grating, it is ground, while using aobvious The microcosmic single-mode fiber examined after system detectio inscription fiber grating divests the diameter of coating layer segment, after fiber grating is inscribed When the diameter that single-mode fiber divests coating layer segment is decreased to 50~100 μm, stop grinding;Diameter is reduced with optical fiber cutter The single-mode fiber of 30~50mm cuts after the fiber grating grid region on the single-mode fiber after inscription fiber grating afterwards, makes optical fiber Grating grid region is in the end for inscribing the single-mode fiber after fiber grating after diameter reduces, and ensures that fiber grating grid region is long It is 5~10mm to spend, and is positioned over afterwards in the supersonic cleaning machine equipped with absolute ethyl alcohol and washs 5~20 minutes;
(2) self assembly for inscribing the single-mode fiber after fiber grating after two diameters of reduce
Prepare the tubule that length 10~30mm, one end have interior cone angle, internal diameter for (50~100 μm) × 3+ (1~5) μm, by (1st) The single-mode fiber inscribed after fiber grating after two diameters reduce after step treatment is inserted from the interior cone angle of tubule one end, it is ensured that two The single-mode fiber end inscribed after fiber grating after the reduction of root diameter is concordant and beyond 5~10mm of tubule one end;It is fixed vertically Simultaneously be immersed in the single-mode fiber after the inscription fiber grating after the reduction of two diameters of tubule one end equipped with viscosity by tubule 3~6mm in the glass of the ultraviolet glue less than 100cp, under capillary forces low viscosity ultraviolet glue reduce along two diameters The single-mode fiber after inscription fiber grating afterwards is moved upwards, and makes the single mode inscribed after fiber grating after two diameters reductions Optical fiber is close to form most compact parallel construction, and the single-mode fiber after inscription fiber grating after reducing to two diameters enters Row self assembly;After 5~15 minutes, the list inscribed after fiber grating after the reduction of two diameters by tubule and wherein after self assembly Mode fiber takes out from ultraviolet glue, it is ensured that the single-mode fiber inscribed after fiber grating after the reduction of two diameters after self assembly is not Misplace, and with ultraviolet glue curing light source to the inscription optical fiber light after the two diameters reduction after the self assembly of tubule one end Single-mode fiber irradiation after grid completes ultraviolet adhesive curing for 1~10 minute, forms twin-core fiber grating;Thereafter, in tubule one end Heat-curable glue is instilled at interior cone angle and interior cone angle is filled up, the tubule that will be inserted with twin-core fiber grating is placed on 50~180 DEG C of constant temperature electricity Heated 10~60 minutes on heater, solidify the heat-curable glue in the interior cone angle of tubule one end;
(3) end surface grinding of twin-core fibers grating
The tubule that twin-core fiber grating is inserted with (2nd) step is fixed on optic fiber polishing machine, adjustment tubule highly, makes twin-core light Fine grating is contacted with the abrasive sheet on optic fiber polishing machine, and its end face is carried out according to the lapping mode of FC/PC fibre-optical splices afterwards Grinding, and confirm smooth, flawless and incompleteness with endface viewing device, stop the end surface grinding of twin-core fiber grating and with being moistened with The dust-free paper of alcohol is by end face wiped clean;
(4) the twin-core fiber grating end ball needle point after end surface grindings makes
Fused optic fiber method:The tubule of the twin-core fiber grating upper end after end surface grinding in (3rd) step is fixed vertically, tubule is adjusted The twin-core fiber grating lower end after end surface grinding is highly set to be in two sparking electrode needle point central lowers 0.5 of electric discharge machining apparatus ~3mm positions, adjust discharge time and the discharge current of electric discharge machining apparatus, and the heat produced using spark discharge is by end face The fiber-fuse of the twin-core fiber grating 0.5~3mm of lower end after grinding, one is formed using the surface tension of gravity and fused optic fiber Individual good optical fiber ball, a spherical needle point of optical fiber is formed after the twin-core fiber grating lower end after its cooling after end surface grinding, Complete the processing of the twin-core fiber grating end ball needle point after end surface grinding;The spherical needle point of optical fiber is added under an electron microscope Working medium amount is examined and determine, it is desirable to which the axiality of the twin-core fiber grating after optical fiber ball needle point and end surface grinding is less than 5 μm, optical fiber ball Twin-core fiber grating diameter ratio after bubble-free and damaged, optical fiber bulb diameter and end surface grinding is more than or equal to 1.2, selects conjunction The twin-core fiber light gridded probe of lattice, completes the making of twin-core fiber light gridded probe.
2. the twin-core fiber grating micro-scale measurement probe manufacturing method of self assembly principle is based on according to claim 1, its It is characterised by:The step (1) reduces the single mode fiber diameters after inscribing fiber grating can also be using the place of hydrofluoric acid corrosion Reason mode:The single-mode fiber inscribed after fiber grating is passed down through micropore and fixation on plastic drum lid, is added in Plastic Drum Enter hydrofluoric acid solution that volume fraction is 10~50% and the single-mode fiber after inscription fiber grating is divested coating layer segment 60~90mm in the hydrofluoric acid solution that volume fraction is 10~50% is immersed in end, and fiber grating will be inscribed every 20~30 minutes Single-mode fiber afterwards takes out from Plastic Drum, and the single-mode fiber that measurement is inscribed after fiber grating under an electron microscope divests coating The diameter of layer segment;Single-mode fiber after fiber grating is inscribed divest coating layer segment diameter be corroded be decreased to 50~ At 100 μm, the single-mode fiber after inscription fiber grating after diameter is reduced is removed and placed in equipped with acetone from Plastic Drum In glass tank, the single-mode fiber after inscription fiber grating after reducing diameter is divested in the end immersion acetone of coating layer segment 80~90mm, does 10~30 minutes sofening treatments;The single mode inscribed after fiber grating after diameter is reduced with optical fiber cutter The single-mode fiber of 30~50mm cuts after fiber grating grid region on optical fiber, after fiber grating grid region is in diameter reduction The least significant end of the single-mode fiber after fiber grating is inscribed, and ensures that fiber grating grid region length, for 5~10mm, is positioned over dress afterwards Have in the supersonic cleaning machine of absolute ethyl alcohol and wash 5~20 minutes.
3. the twin-core fiber grating micro-scale measurement probe manufacturing method of self assembly principle is based on according to claim 1, its It is characterised by:In step (2), the material of tubule is quartz or metal.
4. the twin-core fiber grating micro-scale measurement probe manufacturing method of self assembly principle is based on according to claim 1, its It is characterised by:In step (4), it would however also be possible to employ twin-core fiber grating end processing one of the microballoon Method for Installation after end surface grinding Individual spherical needle point:The tubule of the twin-core fiber grating upper end after end surface grinding in (3rd) step is horizontally fixed on into six degree of freedom to adjust In engagement positions, and one end dispensing needle head smearing ultraviolet glue after grinding, regulation six is free manually under visual surveillance system Degree adjusting apparatus, make one end fixation in V-groove close on levelling bench of twin-core fiber grating smearing ultraviolet glue after end surface grinding The spherical needle point of ruby, the twin-core fiber grating after end surface grinding after being aligned with the spherical needle point center of ruby, advance end Twin-core fiber grating after the grinding of face is contacted with the spherical needle point of ruby, irradiates 1 with ultraviolet glue curing light source butt contact afterwards ~10 minutes, the processing of the spherical needle point of twin-core fiber grating is completed, be made twin-core fiber light gridded probe.
5. the twin-core fiber grating micro-scale measurement probe manufacturing method of self assembly principle is based on according to claim 4, its It is characterised by:The spherical tip diameter of ruby is more than or equal to 1.2 with the twin-core fiber grating diameter ratio after end surface grinding.
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