CN104677290A - Method for manufacturing double-core fiber grating micro-scale measurement probe based on self-assembly principle - Google Patents

Method for manufacturing double-core fiber grating micro-scale measurement probe based on self-assembly principle Download PDF

Info

Publication number
CN104677290A
CN104677290A CN201510109878.3A CN201510109878A CN104677290A CN 104677290 A CN104677290 A CN 104677290A CN 201510109878 A CN201510109878 A CN 201510109878A CN 104677290 A CN104677290 A CN 104677290A
Authority
CN
China
Prior art keywords
fiber grating
fiber
twin
core
mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510109878.3A
Other languages
Chinese (zh)
Other versions
CN104677290B (en
Inventor
崔继文
冯昆鹏
党竑
朱圣琪
谭久彬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201510109878.3A priority Critical patent/CN104677290B/en
Publication of CN104677290A publication Critical patent/CN104677290A/en
Priority to PCT/CN2016/075270 priority patent/WO2016138853A1/en
Priority to US15/503,836 priority patent/US10481325B2/en
Application granted granted Critical
Publication of CN104677290B publication Critical patent/CN104677290B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)

Abstract

The invention provides a method for manufacturing a double-core fiber grating micro-scale measurement probe based on a self-assembly principle, and belongs to the technical field of precision instrument manufacture. The method is that the diameter of single-die optical fibers subjected to engraving of a fiber grating is reduced by a mechanical processing or hydrofluoric acid fiber corroding method; two diameter-reduced single-mode fibers subjected to engraving of the fiber grating pass through fine tubes with inner taper angles, and the lower ends of the single-mode fibers are immersed into low-viscosity UV gel; self-assembly is performed according to the capillary phenomenon to form the most compact parallel structure; the two diameter-reduced and self-assembled single-mode fibers subjected to engraving of the fiber grating are subjected to UV gel solidifying to obtain a double-core fiber grating; the end surface of the double-core fiber grating is ground through a fiber grinding machine; a spherical needle point is processed at the grinded end of the double-core fiber grating by a fused fiber method or a microsphere installation method, so as to finish the processing of the double-core fiber grating probe. The fiber grating is free of signal crosstalk, low in cost and low in loss.

Description

Based on the twin-core fiber grating micro-scale measurement probe manufacturing method of self assembly principle
Technical field
The invention belongs to exact instrument manufacturing technology field, particularly a kind of twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle.
Background technology
Along with the development of aerospace industry, auto industry, electronics industry and sophisticated industry etc., for the demand sharp increase of accurate micro-member.Owing to being subject to the restriction of space scale and micro-member capture-effect to be measured and measuring the impact of contact force, the precision measurement of micro-member yardstick is more and more difficult to realize, especially the degree of depth measuring small inner chamber component is difficult to improve, and these become " bottleneck " of restriction industry development already.Measuring to realize smaller szie, increasing and fathom, the most widely used way is exactly that the inner chamber using elongated probe to go deep into micro-member detects, and is measured the small inside dimension on different depth by the mode aiming at sender.Therefore, the precision measurement method of current micro-member size is mainly based on the detection mode of coordinate measuring machine in conjunction with aiming triggering type probe, due to the development comparative maturity of measurement of coordinates machine technology, can provide accurate three-dimensional space motion, therefore the detection mode of aiming triggering type probe becomes the key of micro-member size detection system.And, fiber grating probe, with its sensor and the discrete advantage of measuring system, can overcome capture-effect completely, breaks through and fathoms to the restriction of probe, simultaneously fiber grating probe has miniaturization, the advantage such as anti-interference concurrently, is suitable for very much making micro-scale measurement probe.
At present, the micro-scale measurement probe based on fiber grating design comprises following several:
2011, China's Harbin Institute of Technology Cui Ji culture and education is awarded and is proposed a kind of pore size measurement mechanism based on FBG Bending and method with the people such as Yang Fuling, the method utilizes fiber grating probe and light source, pick-up unit to form and aims at triggering system, coordinate two-frequency laser interferometer measuring motion, the micro-pore diameter of different cross section can be obtained.When the fiber grating probe of the method touches and surveys distortion, the main stress of probe does not act on fiber grating, and the resolution of system is very low, do not have three-dimensional measurement ability, and performance is difficult to further raising.
2014, China's Harbin Institute of Technology Cui Ji culture and education awards the micro-scale measurement device and method proposed with the people such as Feng Kunpeng based on multi-core fiber grating, the method devises special multi-core fiber grating probe, probe is fully acted on fiber grating touching with workpiece the stress produced in survey process, improving a lot based on the pore size measurement mechanism of FBG Bending and the detection resolving power of method comparatively; And different multi-core fiber fibre core distributed architectures can realize two dimension, three-dimensional decoupling zero of surveying, and has good measurement character.But the method inscribes fiber grating on special multi-core fiber, on the one hand, the inscription cross-interference issue between fibre core and fibre core can be brought in multi-core fiber scribing process; On the other hand, the multi-core fiber of purchase makes probe and causes probe structure parameter can not autonomous Design.
In sum, in the existing micro-scale measurement probe based on fiber grating design, multi-core fiber grating probe is high with its resolving power, the feature of multidimensional measure decoupling zero by extensive concern, there is good application prospect, but mainly there is following problem in existing multi-core fiber grating probe:
1. consider the cost of manufacture problem of multi-core fiber grating probe, multi-core fiber can only select the peculiar model of optical fiber production producer, can not require that the multi-core fiber of design special construction is to be used for making multi-core fiber grating probe according to measuring.
2. when making multi-core fiber grating probe, need to utilize excimer laser phase masks to inscribe fiber grating on multi-core fiber, the fibre core spacing of multi-core fiber only has tens microns, can affect when the fibre core of a multi-core fiber is inscribed fiber grating and close on fibre core, produce and inscribe crosstalk, the multi-core fiber grating probe finally made, the fiber grating reflectivity in each fibre core is low and spectrum distortion serious, has a strong impact on the accuracy of measurement.
3. multi-core fiber grating probe in use, need to obtain the reflectance spectrum of every root fibre core inner fiber grating in multi-core fiber, therefore each multi-core fiber grating probe needs installation multi-core fiber fan-out joint to realize being coupled of multi-core fiber every root fibre core and outside single-mode fiber, but this joint price is high, light loss large, is not suitable for the popularization of multi-core fiber grating probe in micro-scale measurement, application.
Summary of the invention
The object of the invention is to solve multi-core fiber structure in multi-core fiber grating probe application to limit by manufacturer, inscribe crosstalk and the large problem of fan-out joint light loss, propose a kind of twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle, adopt the mode of self assembly that the general single mode fiber after inscription fiber grating is made twin-core core fibre grating micro-scale measurement probe, and can according to measurement demand, the structure of design twin-core fiber grating micro-scale measurement probe, and employing this method ensure that each channel of twin-core fiber grating micro-scale measurement probe made is connected with a general single mode fiber, without the need to fan-out joint, reach structural design flexible, spectral signal is good, light loss is little, the object that cost is low.
Technical scheme of the present invention is: a kind of twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle, said method comprising the steps of:
(1). reduce the single mode fiber diameters after inscribing fiber grating
Getting two length is that 100 ~ 1000mm inscribes the single-mode fiber after fiber grating, fiber grating grid region is in the position of one end 30 ~ 50mm of the single-mode fiber after inscribing fiber grating, fiber grating grid region length is 10 ~ 20mm, be that 50 ~ 80mm coat partly divests by the tip length of single-mode fiber near fiber grating grid region after inscription fiber grating, single-mode fiber after adopting the method for mechanical treatment to reduce inscription fiber grating afterwards divests the diameter of coat part: by stretching for the single-mode fiber inscribed after fiber grating, the stationary installation that two ends are fixed on synchronous rotation motor makes the pivot center of single-mode fiber after inscribing fiber grating overlap with the pivot center of synchronous rotation motor, the runner of a parcel abrasive sheet is housed above the single-mode fiber rotation axis after inscribing fiber grating, the runner of parcel abrasive sheet is near also contacting the single-mode fiber after inscribing fiber grating and divesting coat part uniform motion repeatedly along the single-mode fiber after inscription fiber grating, carry out grinding, adopt microscopic observation system to detect the diameter that the single-mode fiber after inscribing fiber grating divests coat part simultaneously, when the diameter that the single-mode fiber after inscription fiber grating divests coat part is decreased to 50 ~ 100 μm, stop grinding, after fiber grating grid region on single-mode fiber after inscription fiber grating after being reduced by diameter with optical fiber cutter, the single-mode fiber of 30 ~ 50mm cuts, the end of the single-mode fiber after the inscription fiber grating after making fiber grating grid region be in diameter reduction, and to protect fiber grating grid region length be 5 ~ 10mm, be positioned over afterwards in the supersonic cleaning machine that absolute ethyl alcohol is housed and wash 5 ~ 20 minutes,
(2). the self assembly of the single-mode fiber after the inscription fiber grating after two diameters reduce
Prepare length 10 ~ 30mm, there is interior cone angle one end, internal diameter is the tubule of (50 ~ 100 μm) × 3+ (1 ~ 5) μm, single-mode fiber after inscription fiber grating after being reduced by two diameters after (1) step process inserts from cone angle in tubule one end, ensures that the single-mode fiber end after the inscription fiber grating after two diameters reductions is concordant and exceeds tubule one end 5 ~ 10mm; Vertical secure thin tube single-mode fiber after inscription fiber grating after being reduced by two diameters exceeding tubule one end are immersed in and viscosity is housed is less than 3 ~ 6mm in the glass cylinder of the ultraviolet glue of 100cp, low viscosity ultraviolet glue moves upward along the single-mode fiber after the inscription fiber grating after two diameters reductions under capillary forces, and making the single-mode fiber after the inscription fiber grating after two diameters reductions tightly near forming the compactest parallel construction, the single-mode fiber after the inscription fiber grating after reducing two diameters carries out self assembly; After 5 ~ 15 minutes, single-mode fiber after inscription fiber grating after tubule and two diameters wherein after self assembly being reduced takes out from ultraviolet glue, ensure that the single-mode fiber after the inscription fiber grating after two diameters reductions after self assembly does not misplace, and the single-mode fiber after inscription fiber grating after reducing two diameters after exceeding the self assembly of tubule one end with ultraviolet glue curing light source irradiates and within 1 ~ 10 minute, completes ultraviolet glue solidification, form twin-core fiber grating; Thereafter, cone angle place instillation heat-curable glue in tubule one end also fills up interior cone angle, is placed on by the tubule being inserted with twin-core fiber grating on 50 ~ 180 DEG C of constant temperature electric heaters and heats 10 ~ 60 minutes, the heat-curable glue in the interior cone angle of tubule one end is solidified;
(3). the end surface grinding of twin-core fiber grating
The tubule being inserted with twin-core fiber grating in (2) step is fixed on optic fiber polishing machine, adjustment tubule height, twin-core fiber grating is contacted with the abrasive sheet on optic fiber polishing machine, according to the lapping mode of FC/PC fibre-optical splice, its end face is ground afterwards, and confirm smooth, flawless and incomplete with endface viewing device, stop twin-core fiber grating end surface grinding and with dipping in spirituous dust-free paper by end face wiped clean;
(4). the twin-core fiber grating end ball needle point after end surface grinding is made
Fused optic fiber method: the tubule of the twin-core fiber grating upper end after end surface grinding in (3) step is vertically fixed, twin-core fiber grating lower end after regulating tubule height to make end surface grinding is in electric discharge machining apparatus two sparking electrode needle point central lower 0.5 ~ 3mm positions, regulate discharge time and the discharge current of electric discharge machining apparatus, the heat utilizing spark discharge to produce is by the fiber-fuse of the twin-core fiber grating lower end 0.5 ~ 3mm after end surface grinding, the surface tension of gravity and fused optic fiber is utilized to form a good optical fiber ball, twin-core fiber grating lower end after its cooling after end surface grinding forms a spherical needle point of optical fiber, complete the processing of the twin-core fiber grating end ball needle point after end surface grinding, under an electron microscope the spherical needle point crudy of optical fiber is examined and determine, require that the right alignment of the twin-core fiber grating after optical fiber ball needle point and end surface grinding is less than 5 μm, twin-core fiber grating diameter ratio after optical fiber ball bubble-free and breakage, optical fiber ball diameter and end surface grinding is more than or equal to 1.2, select qualified twin-core fiber grating probe, complete the making of twin-core fiber grating probe.
Advantage of the present invention is:
1. adopt the single-mode fiber after inscribing fiber grating to make twin-core fiber grating probe, the structural parameters of twin-core fiber grating probe can be designed according to measurement demand, as twin-core fiber grating probe diameter, length and spherical tip diameter etc.
2. adopt and inscribe the single-mode fiber after fiber grating and make twin-core fiber grating probe, avoid directly that on multi-core fiber, inscribe fiber grating brings inscription crosstalk, the twin-core fiber grating probe completed has the good feature of spectral signal.
3. adopt the single-mode fiber after inscribing fiber grating to make twin-core fiber grating probe, twin-core fiber grating probe tail optical fiber carries single-mode tail fiber, avoids and uses fan-out joint, reduces the cost in the use of twin-core fiber grating probe and light loss.
Accompanying drawing explanation
Fig. 1 is that the method for mechanical treatment reduces the single mode fiber diameters installation drawing after inscribing fiber grating;
Fig. 2 is the single-mode fiber self assembly installation drawing after inscribing fiber grating after diameter reduces;
Fig. 3 is the cut-open view of the A-A in Fig. 2;
Fig. 4 is capillary structure schematic diagram in Fig. 2;
Fig. 5 is twin-core fiber grating end-face grinder figure;
Fig. 6 is that fused optic fiber method forms spherical needle tip device figure;
Fig. 7 is that the method for hydrofluorite fiber optical corrosive process reduces the single mode fiber diameters installation drawing after inscribing fiber grating;
Fig. 8 is the vertical view of Fig. 7;
Fig. 9 is that microballoon Method for Installation forms spherical needle point schematic diagram;
Figure 10 is B portion structure partial schematic diagram in Fig. 9;
In figure: 1. inscribe the single-mode fiber after fiber grating, 2. fiber grating grid region, 3. wrap up the runner of abrasive sheet, 4. synchronous rotation motor, 5. stationary installation, 6. the single-mode fiber after the inscription fiber grating after diameter reduction, 7. tubule, 8. interior cone angle, 9. glass cylinder, 10. ultraviolet glue, 11. twin-core fiber gratings, 12. optic fiber polishing machines, 13. abrasive sheets, twin-core fiber grating 15. electrode after 14. end surface grindings, 16. electric discharge machining apparatus, the spherical needle point of 17. optical fiber, 18. plastic drum lids, 19. Plastic Drums, 20. hydrofluoric acid solutions, the spherical needle point of 21. ruby, 22. levelling benches, 23.V shape groove, 24. six degree of freedom adjusting gears.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in detail.
Based on a twin-core fiber grating micro-scale measurement probe manufacturing method for self assembly principle, said method comprising the steps of:
(1). reduce the single mode fiber diameters after inscribing fiber grating
Getting two length is that 100 ~ 1000mm inscribes the single-mode fiber 1 after fiber grating, fiber grating grid region 2 is in the position of one end 30 ~ 50mm of the single-mode fiber 1 after inscribing fiber grating, fiber grating grid region 2 length is 10 ~ 20mm, be that 50 ~ 80mm coat partly divests by the tip length of single-mode fiber 1 near fiber grating grid region 2 after inscription fiber grating, single-mode fiber 1 after adopting the method for mechanical treatment to reduce inscription fiber grating afterwards divests the diameter of coat part: by stretching for the single-mode fiber 1 inscribed after fiber grating, the pivot center of the single-mode fiber 1 in the stationary installation 5 that two ends are fixed on synchronous rotation motor 4 and after making inscription fiber grating overlaps with the pivot center of synchronous rotation motor 4, the runner 3 of a parcel abrasive sheet is housed above single-mode fiber 1 rotation axis after inscribing fiber grating, the runner 3 of parcel abrasive sheet is near also contacting the single-mode fiber 1 after inscribing fiber grating and divesting coat part uniform motion repeatedly along the single-mode fiber 1 after inscription fiber grating, carry out grinding, adopt microscopic observation system to detect the diameter that the single-mode fiber 1 after inscribing fiber grating divests coat part simultaneously, when the diameter that the single-mode fiber 1 after inscription fiber grating divests coat part is decreased to 50 ~ 100 μm, stop grinding, after fiber grating grid region 2 on single-mode fiber 6 after inscription fiber grating after being reduced by diameter with optical fiber cutter, the single-mode fiber of 30 ~ 50mm cuts, the end of the single-mode fiber 1 after the inscription fiber grating after making fiber grating grid region 2 be in diameter reduction, and to protect fiber grating grid region 2 length be 5 ~ 10mm, be positioned over afterwards in the supersonic cleaning machine that absolute ethyl alcohol is housed and wash 5 ~ 20 minutes,
(2). the self assembly of the single-mode fiber after the inscription fiber grating after two diameters reduce
Prepare length 10 ~ 30mm, there is interior cone angle 8 one end, internal diameter is the tubule 7 of (50 ~ 100 μm) × 3+ (1 ~ 5) μm, single-mode fiber 6 after inscription fiber grating after being reduced by two diameters after (1) step process inserts from cone angle 8 in tubule 7 one end, ensures that single-mode fiber 6 end after the inscription fiber grating after two diameters reductions is concordant and exceeds tubule 7 one end 5 ~ 10mm; Vertical secure thin tube 7 single-mode fiber 6 after inscription fiber grating after being reduced by two diameters exceeding tubule 7 one end are immersed in and viscosity is housed is less than 3 ~ 6mm in the glass cylinder 9 of the ultraviolet glue 10 of 100cp, low viscosity ultraviolet glue 10 moves upward along the single-mode fiber 6 after the inscription fiber grating after two diameters reductions under capillary forces, and making the single-mode fiber 6 after the inscription fiber grating after two diameters reductions tightly near forming the compactest parallel construction, the single-mode fiber 6 after the inscription fiber grating after reducing two diameters carries out self assembly; After 5 ~ 15 minutes, single-mode fiber 6 after inscription fiber grating after tubule 7 and two diameters wherein after self assembly being reduced takes out from ultraviolet glue, ensure that the single-mode fiber 6 after the inscription fiber grating after two diameters reductions after self assembly does not misplace, and the single-mode fiber 6 after inscription fiber grating after reducing two diameters after exceeding tubule 7 one end self assembly with ultraviolet glue 10 curing light source irradiates and within 1 ~ 10 minute, completes ultraviolet glue solidification, form twin-core fiber grating 11; Thereafter, cone angle 8 place instillation heat-curable glue in tubule 7 one end also fills up interior cone angle 8, the tubule 7 being inserted with twin-core fiber grating 11 is placed on 50 ~ 180 DEG C of constant temperature electric heaters and heats 10 ~ 60 minutes, the heat-curable glue in the interior cone angle 8 of tubule 7 one end is solidified;
(3). the end surface grinding of twin-core fiber grating
The tubule 7 being inserted with twin-core fiber grating 11 in (2) step is fixed on optic fiber polishing machine 12, adjustment tubule 7 height, twin-core fiber grating 11 is contacted with the abrasive sheet 13 on optic fiber polishing machine 12, according to the lapping mode of FC/PC fibre-optical splice, its end face is ground afterwards, and confirm smooth, flawless and incomplete with endface viewing device, stop twin-core fiber grating 11 end surface grinding and with dipping in spirituous dust-free paper by end face wiped clean;
(4). the processing of the twin-core fiber grating end ball needle point after end surface grinding
Fused optic fiber method: the tubule 7 of twin-core fiber grating 14 upper end after end surface grinding in (3) step is vertically fixed, twin-core fiber grating 14 lower end after regulating tubule 7 highly to make end surface grinding is in electric discharge machining apparatus 16 two sparking electrode 15 needle point central lower 0.5 ~ 3mm positions, regulate discharge time and the discharge current of electric discharge machining apparatus 16, the heat utilizing spark discharge to produce is by the fiber-fuse of the twin-core fiber grating 14 lower end 0.5 ~ 3mm after end surface grinding, the surface tension of gravity and fused optic fiber is utilized to form a good optical fiber ball, twin-core fiber grating 14 lower end after its cooling after end surface grinding forms a spherical needle point 17 of optical fiber, complete the processing of the twin-core fiber grating 14 end ball needle point after end surface grinding, under an electron microscope optical fiber spherical needle point 17 crudy is examined and determine, require that the right alignment of the twin-core fiber grating 14 after optical fiber spherical needle point 17 and end surface grinding is less than 5 μm, twin-core fiber grating 14 diameter ratio after optical fiber ball bubble-free and breakage, optical fiber spherical needle point 17 diameter and end surface grinding is more than or equal to 1.2, select qualified twin-core fiber grating probe, complete the processing of twin-core fiber grating probe.
In step (1), the processing mode that the diameter reducing the single-mode fiber 1 after inscribing fiber grating also can adopt hydrofluorite to corrode, single-mode fiber 1 after inscribing fiber grating is passed down through the micropore on plastic drum lid 18 and fixes, the hydrofluoric acid solution 20 that volume fraction is 10 ~ 50% is added in Plastic Drum 19, and the end immersion volume fraction making the single-mode fiber 1 after inscription fiber grating divest coat part is 60 ~ 90mm in the hydrofluoric acid solution 20 of 10 ~ 50%, every 2030 minutes, the single-mode fiber 1 after inscription fiber grating is taken out from Plastic Drum 7, measure the diameter that the single-mode fiber 1 after inscribing fiber grating divests coat part under an electron microscope, when the diameter inscribing the single-mode fiber 1 after fiber grating and divest coat part be corroded be decreased to 50 ~ 100 μm time, single-mode fiber 6 after inscription fiber grating after being reduced by diameter takes out and puts into the glass tank that acetone is housed from Plastic Drum 19, the end that single-mode fiber 6 after inscription fiber grating after diameter is reduced divests coat part immerses 80 ~ 90mm in acetone, does 10 ~ 30 minutes sofening treatment, after fiber grating grid region 2 on single-mode fiber 6 after inscription fiber grating after being reduced by diameter with optical fiber cutter, the single-mode fiber of 30 ~ 50mm cuts, fiber grating grid region 2 on single-mode fiber 6 after inscription fiber grating after diameter is reduced is in the least significant end of the single-mode fiber 6 after the inscription fiber grating after diameter reduction, and ensure that fiber grating grid region 2 length on the single-mode fiber 6 after inscribing fiber grating is 5 ~ 10mm, afterwards, be positioned in the supersonic cleaning machine that absolute ethyl alcohol is housed and wash 5 ~ 20 minutes.
In step (2), the material of tubule 7 is quartz or metal.
In step (4), also twin-core fiber grating 14 end of microballoon Method for Installation after end surface grinding can be adopted to process a spherical needle point: be horizontally fixed on six degree of freedom adjusting gear 24 by the tubule 7 of twin-core fiber grating 14 upper end after end surface grinding in (3) step, and one end dispensing needle head after grinding smears ultraviolet glue 10, manual adjustments six degree of freedom adjusting gear 24 under visual surveillance system, after making end surface grinding, twin-core fiber grating 14 smears one end of ultraviolet glue 10 close to the spherical needle point 21 of ruby fixing in V-type groove 23 on levelling bench 22, twin-core fiber grating 14 after end surface grinding is after aiming at ruby spherical needle point 21 center, the twin-core fiber grating 14 after end surface grinding is advanced to contact with the spherical needle point 21 of ruby, irradiate 1 ~ 10 minute with ultraviolet glue curing light source butt contact afterwards, complete the processing of the twin-core fiber grating 14 end ball needle point after end surface grinding, complete the processing of twin-core fiber grating probe.
Twin-core fiber grating 14 diameter ratio after ruby spherical needle point 21 diameter and end surface grinding is more than or equal to 1.2.
Based on the innovation point of the twin-core fiber grating micro-scale measurement probe manufacturing method of self assembly principle and Advantageous Effects be: adopt the single-mode fiber after inscribing fiber grating to make twin-core fiber grating probe, avoid and directly on multi-core fiber, inscribe fiber grating and bring inscription crosstalk, the twin-core fiber grating probe completed has the good feature of spectral signal, can improve the signal to noise ratio (S/N ratio) of twin-core fiber grating probe output signal; The present invention can design the structural parameters of twin-core fiber grating probe according to measurement demand, as the diameter etc. of the diameter of twin-core fiber grating probe, length and spherical needle point, have design, make feature flexibly; The twin-core fiber grating probe that the present invention makes carries single-mode tail fiber, avoid using multi-core fiber fan-out joint, significantly reduce the cost in the use of twin-core fiber grating probe and light loss, be conducive to the promotion and application of twin-core fiber grating probe in micro-scale measurement field.

Claims (5)

1., based on a twin-core fiber grating micro-scale measurement probe manufacturing method for self assembly principle, it is characterized in that: said method comprising the steps of:
(1). reduce the single mode fiber diameters after inscribing fiber grating
Getting two length is that 100 ~ 1000mm inscribes the single-mode fiber after fiber grating, fiber grating grid region is in the position of one end 30 ~ 50mm of the single-mode fiber after inscribing fiber grating, fiber grating grid region length is 10 ~ 20mm, be that 50 ~ 80mm coat partly divests by the tip length of single-mode fiber near fiber grating grid region after inscription fiber grating, single-mode fiber after adopting the method for mechanical treatment to reduce inscription fiber grating afterwards divests the diameter of coat part: by stretching for the single-mode fiber inscribed after fiber grating, the stationary installation that two ends are fixed on synchronous rotation motor makes the pivot center of single-mode fiber after inscribing fiber grating overlap with the pivot center of synchronous rotation motor, the runner of a parcel abrasive sheet is housed above the single-mode fiber rotation axis after inscribing fiber grating, the runner of parcel abrasive sheet is near also contacting the single-mode fiber after inscribing fiber grating and divesting coat part uniform motion repeatedly along the single-mode fiber after inscription fiber grating, carry out grinding, adopt microscopic observation system to detect the diameter that the single-mode fiber after inscribing fiber grating divests coat part simultaneously, when the diameter that the single-mode fiber after inscription fiber grating divests coat part is decreased to 50 ~ 100 μm, stop grinding, after fiber grating grid region on single-mode fiber after inscription fiber grating after being reduced by diameter with optical fiber cutter, the single-mode fiber of 30 ~ 50mm cuts, the end of the single-mode fiber after the inscription fiber grating after making fiber grating grid region be in diameter reduction, and to protect fiber grating grid region length be 5 ~ 10mm, be positioned over afterwards in the supersonic cleaning machine that absolute ethyl alcohol is housed and wash 5 ~ 20 minutes,
(2). the self assembly of the single-mode fiber after the inscription fiber grating after two diameters reduce
Prepare length 10 ~ 30mm, there is interior cone angle one end, internal diameter is the tubule of (50 ~ 100 μm) × 3+ (1 ~ 5) μm, single-mode fiber after inscription fiber grating after being reduced by two diameters after (1) step process inserts from cone angle in tubule one end, ensures that the single-mode fiber end after the inscription fiber grating after two diameters reductions is concordant and exceeds tubule one end 5 ~ 10mm; Vertical secure thin tube single-mode fiber after inscription fiber grating after being reduced by two diameters exceeding tubule one end are immersed in and viscosity is housed is less than 3 ~ 6mm in the glass cylinder of the ultraviolet glue of 100cp, low viscosity ultraviolet glue moves upward along the single-mode fiber after the inscription fiber grating after two diameters reductions under capillary forces, and making the single-mode fiber after the inscription fiber grating after two diameters reductions tightly near forming the compactest parallel construction, the single-mode fiber after the inscription fiber grating after reducing two diameters carries out self assembly; After 5 ~ 15 minutes, single-mode fiber after inscription fiber grating after tubule and two diameters wherein after self assembly being reduced takes out from ultraviolet glue, ensure that the single-mode fiber after the inscription fiber grating after two diameters reductions after self assembly does not misplace, and the single-mode fiber after inscription fiber grating after reducing two diameters after exceeding the self assembly of tubule one end with ultraviolet glue curing light source irradiates and within 1 ~ 10 minute, completes ultraviolet glue solidification, form twin-core fiber grating; Thereafter, cone angle place instillation heat-curable glue in tubule one end also fills up interior cone angle, is placed on by the tubule being inserted with twin-core fiber grating on 50 ~ 180 DEG C of constant temperature electric heaters and heats 10 ~ 60 minutes, the heat-curable glue in the interior cone angle of tubule one end is solidified;
(3). the end surface grinding of twin-core fiber grating
The tubule being inserted with twin-core fiber grating in (2) step is fixed on optic fiber polishing machine, adjustment tubule height, twin-core fiber grating is contacted with the abrasive sheet on optic fiber polishing machine, according to the lapping mode of FC/PC fibre-optical splice, its end face is ground afterwards, and confirm smooth, flawless and incomplete with endface viewing device, stop twin-core fiber grating end surface grinding and with dipping in spirituous dust-free paper by end face wiped clean;
(4). the twin-core fiber grating end ball needle point after end surface grinding makes
Fused optic fiber method: the tubule of the twin-core fiber grating upper end after end surface grinding in (3) step is vertically fixed, twin-core fiber grating lower end after regulating tubule height to make end surface grinding is in electric discharge machining apparatus two sparking electrode needle point central lower 0.5 ~ 3mm positions, regulate discharge time and the discharge current of electric discharge machining apparatus, the heat utilizing spark discharge to produce is by the fiber-fuse of the twin-core fiber grating lower end 0.5 ~ 3mm after end surface grinding, the surface tension of gravity and fused optic fiber is utilized to form a good optical fiber ball, twin-core fiber grating lower end after its cooling after end surface grinding forms a spherical needle point of optical fiber, complete the processing of the twin-core fiber grating end ball needle point after end surface grinding, under an electron microscope the spherical needle point crudy of optical fiber is examined and determine, require that the right alignment of the twin-core fiber grating after optical fiber ball needle point and end surface grinding is less than 5 μm, twin-core fiber grating diameter ratio after optical fiber ball bubble-free and breakage, optical fiber ball diameter and end surface grinding is more than or equal to 1.2, select qualified twin-core fiber grating probe, complete the making of twin-core fiber grating probe.
2. according to claim 1 based on the method for making of the twin-core fiber grating micro-scale measurement probe of self assembly principle, it is characterized in that: described step (1) reduces the processing mode that the single mode fiber diameters after inscribing fiber grating also can adopt hydrofluorite to corrode: the single-mode fiber after inscribing fiber grating is passed down through the micropore on plastic drum lid and fixes, add in Plastic Drum volume fraction be the hydrofluoric acid solution of 10 ~ 50% and the single-mode fiber after making inscription fiber grating divest coat part end immerse volume fraction be 60 ~ 90mm in the hydrofluoric acid solution of 10 ~ 50%, every 20 ~ 30 minutes, the single-mode fiber after inscription fiber grating is taken out from Plastic Drum, measure the diameter that the single-mode fiber after inscribing fiber grating divests coat part under an electron microscope, when the diameter inscribing the single-mode fiber after fiber grating and divest coat part be corroded be decreased to 50 ~ 100 μm time, single-mode fiber after inscription fiber grating after being reduced by diameter takes out and puts into the glass tank that acetone is housed from Plastic Drum, the end that single-mode fiber after inscription fiber grating after diameter is reduced divests coat part immerses 80 ~ 90mm in acetone, does 10 ~ 30 minutes sofening treatment, after fiber grating grid region on single-mode fiber after inscription fiber grating after being reduced by diameter with optical fiber cutter, the single-mode fiber of 30 ~ 50mm cuts, the least significant end of the single-mode fiber after the inscription fiber grating after making fiber grating grid region be in diameter reduction, and ensure that fiber grating grid region length is 5 ~ 10mm, be positioned over afterwards in the supersonic cleaning machine that absolute ethyl alcohol is housed and wash 5 ~ 20 minutes.
3. according to claim 1 based on the method for making of the twin-core fiber grating micro-scale measurement probe of self assembly principle, it is characterized in that: in step (2), the material of tubule is quartz or metal.
4. according to claim 1 based on the method for making of the twin-core fiber grating micro-scale measurement probe of self assembly principle, it is characterized in that: in step (4), also the twin-core fiber grating end of microballoon Method for Installation after end surface grinding can be adopted to process a spherical needle point: be horizontally fixed on six degree of freedom adjusting gear by the tubule of the twin-core fiber grating upper end after end surface grinding in (3) step, and one end dispensing needle head after grinding smears ultraviolet glue, manual adjustments six degree of freedom adjusting gear under visual surveillance system, after making end surface grinding, twin-core fiber grating smears one end of ultraviolet glue close to the spherical needle point of ruby fixing in V-type groove on levelling bench, twin-core fiber grating after end surface grinding is after aiming at the spherical needle point center of ruby, the twin-core fiber grating after end surface grinding is advanced to contact with the spherical needle point of ruby, irradiate 1 ~ 10 minute with ultraviolet glue curing light source butt contact afterwards, complete the processing of the spherical needle point of twin-core fiber grating, make twin-core fiber grating probe.
5. according to claim 4 based on the method for making of the twin-core fiber grating micro-scale measurement probe of self assembly principle, it is characterized in that: the twin-core fiber grating diameter ratio after the spherical tip diameter of ruby and end surface grinding is more than or equal to 1.2.
CN201510109878.3A 2015-03-05 2015-03-05 Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle Expired - Fee Related CN104677290B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201510109878.3A CN104677290B (en) 2015-03-05 2015-03-05 Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle
PCT/CN2016/075270 WO2016138853A1 (en) 2015-03-05 2016-03-02 Fabrication method of multi-core fiber bragg grating probe used for measuring structures of a micro part based on the capillary self-assemble technique
US15/503,836 US10481325B2 (en) 2015-03-05 2016-03-02 Fabrication method of multi-core fiber Bragg grating probe used for measuring structures of a micro part based on the capillary self-assemble technique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510109878.3A CN104677290B (en) 2015-03-05 2015-03-05 Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle

Publications (2)

Publication Number Publication Date
CN104677290A true CN104677290A (en) 2015-06-03
CN104677290B CN104677290B (en) 2017-06-09

Family

ID=53312662

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510109878.3A Expired - Fee Related CN104677290B (en) 2015-03-05 2015-03-05 Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle

Country Status (1)

Country Link
CN (1) CN104677290B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016138853A1 (en) * 2015-03-05 2016-09-09 Harbin Institute Of Technology Fabrication method of multi-core fiber bragg grating probe used for measuring structures of a micro part based on the capillary self-assemble technique
CN112168181A (en) * 2020-10-16 2021-01-05 广州市第一人民医院(广州消化疾病中心、广州医科大学附属市一人民医院、华南理工大学附属第二医院) Brain tissue blood oxygen saturation detection device and preparation method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110292965A1 (en) * 2010-06-01 2011-12-01 Mihailov Stephen J Method and system for measuring a parameter in a high temperature environment using an optical sensor
CN102274006A (en) * 2011-06-24 2011-12-14 山东省科学院激光研究所 Fiber grating temperature sensor and probe thereof
CN102587893A (en) * 2012-03-13 2012-07-18 山东省科学院激光研究所 Optic fiber temperature pressure sensor and probe thereof
CN204008437U (en) * 2014-05-06 2014-12-10 宁波大学 A kind of device for Real-Time Monitoring sol-gel solidification process
CN104215197A (en) * 2014-03-20 2014-12-17 哈尔滨工业大学 Device and method for measuring shapes of spaces on basis of low-reflectivity three-core fiber grating arrays

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110292965A1 (en) * 2010-06-01 2011-12-01 Mihailov Stephen J Method and system for measuring a parameter in a high temperature environment using an optical sensor
CN102274006A (en) * 2011-06-24 2011-12-14 山东省科学院激光研究所 Fiber grating temperature sensor and probe thereof
CN102587893A (en) * 2012-03-13 2012-07-18 山东省科学院激光研究所 Optic fiber temperature pressure sensor and probe thereof
CN104215197A (en) * 2014-03-20 2014-12-17 哈尔滨工业大学 Device and method for measuring shapes of spaces on basis of low-reflectivity three-core fiber grating arrays
CN204008437U (en) * 2014-05-06 2014-12-10 宁波大学 A kind of device for Real-Time Monitoring sol-gel solidification process

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
冯昆鹏: "四芯光纤光栅探针微尺度传感机理研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 *
裴丽等: "裴丽等", 《红外与激光工程》 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016138853A1 (en) * 2015-03-05 2016-09-09 Harbin Institute Of Technology Fabrication method of multi-core fiber bragg grating probe used for measuring structures of a micro part based on the capillary self-assemble technique
US10481325B2 (en) 2015-03-05 2019-11-19 Harbin Institute Of Technology Fabrication method of multi-core fiber Bragg grating probe used for measuring structures of a micro part based on the capillary self-assemble technique
CN112168181A (en) * 2020-10-16 2021-01-05 广州市第一人民医院(广州消化疾病中心、广州医科大学附属市一人民医院、华南理工大学附属第二医院) Brain tissue blood oxygen saturation detection device and preparation method thereof
CN112168181B (en) * 2020-10-16 2023-07-11 广州市第一人民医院(广州消化疾病中心、广州医科大学附属市一人民医院、华南理工大学附属第二医院) Brain tissue blood oxygen saturation detection device and preparation method thereof

Also Published As

Publication number Publication date
CN104677290B (en) 2017-06-09

Similar Documents

Publication Publication Date Title
CN104677283B (en) Four-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle
CN104677293B (en) The three core fibre grating micro-scale measurement probe manufacturing methods based on self assembly principle
CN103197380B (en) Preparation method of contact-type optical fiber micro probe based on optical fiber tapering technology
US10481325B2 (en) Fabrication method of multi-core fiber Bragg grating probe used for measuring structures of a micro part based on the capillary self-assemble technique
CN105157584B (en) A kind of on-line measurement device and method of non-contact object thickness
CN103900620B (en) A kind of device and method of continuous manufacture Fibre Optical Sensor
CN104678496B (en) Multi-core fiber based on self assembly principle is fanned out to joint preparation method
CN108535220B (en) Wedge-shaped tip nanostructure integrated optical fiber surface plasma resonance biochemical sensor
CN103399377A (en) Femtosecond laser direct writing sapphire ring light guide and preparation method thereof
CN101419297B (en) Method for processing inside and outside cone lens for generating hollow light beam
CN112171459B (en) Optical fiber side-polishing process device and method for full-parameter monitoring
CN112504069B (en) Non-contact precision measuring instrument
CN106643557A (en) Measuring device for macro-micro junction surface shape based on con-focal microscopy principle and measuring device method thereof
CN104677294B (en) The seven core fibre grating micro-scale measurement probe manufacturing methods based on self assembly principle
CN104677290B (en) Twin-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle
CN107247037A (en) Molecular state organic pollutant monitoring sensor based on single mode multimode coreless fiber structure
CN113607750A (en) Device and method for detecting subsurface defect of optical element
CN112432928A (en) Temperature compensation type polymer optical fiber SPR sensor
CN104678889B (en) A kind of laser interference control method of grating mechanical scratching machine
CN111546194A (en) D-type optical fiber sensor cladding side-polishing grinding device
Qin et al. Subsurface damage detection and prediction of thin-walled complex curved-surface component
Murakami et al. Development of a system for measuring micro hole accuracy using an optical fiber probe
CN102502474A (en) Nonplanar micron/submicron microneedle array and method for producing same
CN112710631A (en) Temperature refractive index testing method based on femtosecond laser direct writing inclined fiber bragg grating
CN207036689U (en) Molecular state organic pollutant monitoring sensor based on single mode multimode coreless fiber structure

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170609

Termination date: 20210305