CN103293131A - Quick-response conical micro-nano optical fiber humidity sensor and preparation method thereof - Google Patents
Quick-response conical micro-nano optical fiber humidity sensor and preparation method thereof Download PDFInfo
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Abstract
The invention discloses a quick-response conical micro-nano optical fiber humidity sensor and a preparation method thereof. The humidity sensor comprises a broadband light source, a conical micro-nano optical fiber structure and an optical spectrum analyzer which are sequentially connected, wherein the conical micro-nano optical fiber structure comprises a conical waist region and two conical transitional regions which are positioned at two ends of the conical waist region; the two conical transitional regions are connected with the broadband light source and the optical spectrum analyzer through a standard optical fiber respectively. The method comprises the following steps of: (1) removing a coating layer of a double-clad optical fiber to remain a bare optical fiber containing a fiber core, an inner cladding layer and an outer cladding layer; (2) fusing two ends of the bare optical fiber with the standard optical fiber through an optical fiber welding machine respectively; (3) performing fused biconical taper on the bare optical fiber to obtain the conical micro-nano optical fiber structure; (4) connecting the standard optical fiber of which the two ends are fused with the broadband light source and the optical spectrum analyzer to form the conical micro-nano optical fiber humidity sensor. The quick-response conical micro-nano optical fiber humidity sensor has a simple optical fiber structure, and is high in response speed, wide in measurement range and high in detection sensitivity.
Description
Technical field
The present invention relates to a kind of light fibre humidity transducer and preparation method thereof, the quick taper micro-nano fiber of especially a kind of response humidity sensor and preparation method thereof belongs to the ambient humidity fields of measurement.
Background technology
Development along with modern Fibre Optical Sensor industry, more and more be subjected to researcher and opto-electronics personage's great attention for the research of full optical fibre device, the development of these photonic device design theories and fabricating technology, be accompanied by the raising that device serviceability, integrated level and energy consumption etc. are required, make the characteristic line breadth of present full optical fibre device or diameter own through having reached sub-wavelength and nanoscale.Micro-nano fiber is the optical fiber that diameter reaches micron or nano-scale, it has strong laser field constraint, the unique optical characteristics of strong evanescent field transmission, utilize this strong evanscent field coupling can realize energy exchange efficiently between micro-nano fiber, it is integrated etc. to be conducive to make the mixing of miniature ultra-compact highly sensitive Fibre Optical Sensor and photonic device.For sub-micro nano fiber and device thereof, at present oneself is through being formed on the research focus in a plurality of fields such as optical communication, light sensing and bio-imaging detection, and microminiaturization becomes one of development trend of photonic device, has caused that the world pays close attention to widely.
Humidity is difficult the detection and one of the physical quantity of particular importance in the environment parameter, influential in various fields, at aspects such as response speed, monitoring range, manufacture craft, serviceable lifes requirement is arranged at its sensor, yet, rely on present technology, be difficult to satisfy above requirement comprehensively.Along with optical fiber technology and light development of integration technology, light fibre humidity transducer is low because of its loss, resistance to chemical attack, anti-electromagnetic interference (EMI), volume are little, in light weight etc., and good characteristic greatly paid close attention to and be widely used, many implementation methods have been carried, comprising inclined optical fiber grating, long period fiber grating, optical fiber Fabry-Perot chamber etc.Yet the sensing sensitivity of these methods and response time still are subjected to great limitation at present, document " Teck L.Yeo; Tong Sun; Kenneth T.V.Grattan; David Parry; Rob Lade; and Brian D.Powell for example, Polymer-coated fiber Bragg grating for relative humidity sensing, Sensors Journal, IEEE, 2005,5 (5): 1082-1089. " propose to plate on the bragg grating surface thin polymer film and increase susceptibility to humidity; this method manufacture craft is complicated; the sensitivity of Huo Deing experimentally is 4.5pm/%RH (unit humidity); " Francisco J.Arregui, Yanjing Liu, Ignacio R.Matias, Richard O.Claus, Optical fiber humidity sensor using a nano Fabry-Perot cavity formed by the ionic self-assembly method, Sensors and Actuators B:Chemical, 1999,59 (1): 54-59. " propose to use optical fiber Fabry-Perot chamber as the humidity sensor that responds fast; the response time of acquisition is 1s, can not satisfy the requirement of supper-fast response.
Therefore, research a kind ofly has not only that quick response, measurement range are wide, high sensitivity, light fibre humidity transducer simple and compact for structure, with low cost become a valuable problem.
Summary of the invention
The objective of the invention is in order to solve the defective of above-mentioned prior art, provide that a kind of simple in structure, response speed is fast, moisture measurement wide ranges and measure the quick taper micro-nano fiber of highly sensitive response humidity sensor.
Another object of the present invention is to provide a kind of preparation method who responds quick taper micro-nano fiber humidity sensor.
Purpose of the present invention can reach by taking following technical scheme:
The quick taper micro-nano fiber of a kind of response humidity sensor, it is characterized in that: comprise the wideband light source, micro-nano fiber pyramidal structure and the spectroanalysis instrument that link to each other successively, described micro-nano fiber pyramidal structure comprises an awl lumbar region and two conical transition zones that are positioned at awl two ends, lumbar region, and described two conical transition zones link to each other with spectroanalysis instrument with wideband light source by standard fiber respectively; Wherein,
Described wideband light source is used for sending the light that enters the micro-nano fiber pyramidal structure;
Described micro-nano fiber pyramidal structure is used for will be successively forming interference light through the light of two conical transition zones;
Described spectroanalysis instrument is used for the interference spectrum that record changes with ambient humidity.
As a kind of preferred version, described micro-nano fiber pyramidal structure is the structure by adopting the fused biconical taper technology to make to doubly clad optical fiber, and described doubly clad optical fiber is followed successively by fibre core, inner cladding, surrounding layer and coat from the inside to the outside.
As a kind of preferred version, described fibre core adopts height to mix germanite one-tenth made in Great Britain, and described inner cladding adopts germanium, fluorine to mix quartz altogether and makes, and described surrounding layer adopts pure quartz to make.
As a kind of preferred version, the awl lumbar region cross-sectional diameter of described micro-nano fiber pyramidal structure is 0～10 μ m.
As a kind of preferred version, each tapering transition section length of described micro-nano fiber pyramidal structure is less than awl lumbar region length, and the adjustable length of described micro-nano fiber pyramidal structure can change the spectral characteristic of humidity sensor as required.
As a kind of preferred version, each tapering transition section length of described micro-nano fiber pyramidal structure is 0～15mm.
Another object of the present invention can reach by taking following technical scheme:
A kind of preparation method who responds quick taper micro-nano fiber humidity sensor, its feature may further comprise the steps:
1) gets the doubly clad optical fiber of one section 15mm～20mm, remove the coat of this doubly clad optical fiber, the bare fibre of remaining fibre core and inside and outside covering;
2) adopt optical fiber splicer the bare fibre two ends respectively with the standard fiber welding, and by the alcohol wipe bare fibre, can reach the purpose of cleaning;
3) adopt the fused biconical taper technology to obtain the micro-nano fiber pyramidal structure to bare fibre: the subregion in the middle of the bare fibre is heated, the optical fiber in zone to be heated is in molten condition following time, by the optical fiber that is positioned at the heating region two ends is stretched, make the micro-nano fiber pyramidal structure;
4) the micro-nano fiber pyramidal structure is connected to form input/output with wideband light source and spectroanalysis instrument respectively by the standard fiber of its two ends welding, thereby constitutes taper micro-nano fiber humidity sensor.
As a kind of preferred version, the described optical fiber at heating region two ends that is arranged in of step 3) is at drawing process, fibre core and inside and outside cladding diameter scaled down, up to diameter is drawn bore into required size after, the optical fiber of heated center region forms the awl lumbar region, and the optical fiber that heats non-central zone then forms two conical transition zones.
Taper micro-nano fiber humidity sensor of the present invention in use, the micro-nano fiber pyramidal structure is placed external environment to be measured, the light that is sent by wideband light source forms interference light after entering the conical transition zone of micro-nano fiber pyramidal structure, when external environment humidity changes, interference spectrum changes thereupon, by spectroanalysis instrument the interference spectrum before and after changing is carried out record, because the humidity of external environment changes and causes that the interference spectrum of device drifts about, and measures the variation that its wavelength shift can be found out ambient humidity.
The present invention has following beneficial effect with respect to prior art:
1, taper micro-nano fiber humidity sensor of the present invention utilizes big evanscent field and the interference pattern of micro-nano fiber pyramidal structure uniqueness, can realize response and highly sensitive humidity sensor fast, and the moisture measurement wide ranges.
2, taper micro-nano fiber humidity sensor of the present invention is compared with the traditional optical humidity sensor, but have that volume is little, the weight device, can with advantages such as fibre system compatibility remote monitoring.
3, taper micro-nano fiber humidity sensor of the present invention is compared with other optical-fiber type humidity sensors, has that response speed is fast, size is littler, simple in structure, be convenient to advantages such as integrated.
4, the micro-nano fiber pyramidal structure size in the taper micro-nano fiber humidity sensor of the present invention possesses adjustability, can change the spectral characteristic of sensor.
Description of drawings
Fig. 1 is the structural representation of taper micro-nano fiber humidity sensor of the present invention.
Fig. 2 is the synoptic diagram of micro-nano fiber pyramidal structure in the taper micro-nano fiber humidity sensor of the present invention.
Structural representation when Fig. 3 carries out external environment moisture measurement experiment for taper micro-nano fiber humidity sensor of the present invention.
Fig. 4 carries out the data computation curve map of moisture measurement experiment for taper micro-nano fiber humidity sensor of the present invention.
Fig. 5 carries out the structural representation of response time during experiments of measuring for taper micro-nano fiber humidity sensor of the present invention.
Fig. 6 carries out the data computation curve map of response time experiments of measuring for taper micro-nano fiber humidity sensor of the present invention.
Embodiment
Embodiment 1:
As depicted in figs. 1 and 2, the taper micro-nano fiber humidity sensor of present embodiment comprises wideband light source 1, micro-nano fiber pyramidal structure 3 and the spectroanalysis instrument 6 that links to each other successively, described micro-nano fiber pyramidal structure 3 comprises an awl lumbar region 5 and two conical transition zones 4 that are positioned at awl two ends, lumbar region, and described two conical transition zones 4 link to each other with spectroanalysis instrument 6 with wideband light source 1 by standard fiber 2 respectively.
Described micro-nano fiber pyramidal structure 3 is the structure by adopting the fused biconical taper technology to make to doubly clad optical fiber, and described doubly clad optical fiber is followed successively by fibre core, inner cladding, surrounding layer and coat from the inside to the outside; Described fibre core adopts height to mix germanite one-tenth made in Great Britain, and described inner cladding adopts germanium, fluorine to mix quartz altogether and makes, and described surrounding layer adopts pure quartz to make.The awl lumbar region cross-sectional diameter of described micro-nano fiber pyramidal structure is 0～10 μ m.Each tapering transition section length of described micro-nano fiber pyramidal structure is generally 0～15mm less than awl lumbar region length.
The taper micro-nano fiber humidity sensor preparation process of present embodiment is as follows:
1) gets the doubly clad optical fiber of one section 15mm, remove the coat of this doubly clad optical fiber, the bare fibre of remaining fibre core and inside and outside covering;
2) adopt optical fiber splicer the bare fibre two ends respectively with the standard fiber welding, and by the alcohol wipe bare fibre;
3) adopt the fused biconical taper technology to obtain the micro-nano fiber pyramidal structure to bare fibre: the subregion in the middle of the bare fibre is heated, the optical fiber in zone to be heated is in molten condition following time, by the optical fiber that is positioned at the heating region two ends is stretched, make the micro-nano fiber pyramidal structure; In drawing process, fibre core and inside and outside cladding diameter scaled down, up to diameter is drawn bore into required size after, the optical fiber of heated center region forms the awl lumbar region, the optical fiber that heats non-central zone then forms two conical transition zones;
4) the micro-nano fiber pyramidal structure is connected to form input/output with wideband light source and spectroanalysis instrument respectively by the standard fiber of its two ends welding, thereby constitutes taper micro-nano fiber humidity sensor.
The taper micro-nano fiber humidity sensor principle of present embodiment is as follows:
The light that is sent by wideband light source 1, enter the conical transition zone 4 of micro-nano fiber pyramidal structure 3 by standard fiber 2, basic mode in conical transition zone 4 produces effective patterns with different high-order modes interferes, and by spectroanalysis instrument 6 detection outputs, reducing rapidly along with conical transition zone 4 fibre diameters simultaneously, at most of mold leakage of micro-nano fiber pyramidal structure 3 internal transmission in external environment, form the evanscent field effect of micro-nano fiber, utilize big evanscent field and the interference pattern of micro-nano fiber pyramidal structure 3 uniquenesses, realize response and highly sensitive humidity sensor fast.
The taper micro-nano fiber humidity sensor external environment moisture measurement experimentation of present embodiment is as follows:
As shown in Figure 3, micro-nano fiber pyramidal structure 3 is positioned in the climatic chamber 7, micro-nano fiber pyramidal structure 3 is fixed by installing 8, and set a steady temperature, change climatic chamber 7 interior humidity then and come the variation of environmental test humidity, because external environment humidity changes and causes that the interference spectrum of device drifts about, and measures the variation that its wavelength shift can be found out external environment humidity, its moisture measurement scope changes to 90% from 33%.
As shown in Figure 4, be the wavelength of the wave trough position correspondence that measures interference spectrum and the relation of external environment humidity, wherein circle is represented the measured data of experiment point, and solid line is represented the numerical fitting curve, and visible measured value has good linear fit degree; In measurement, wavelength increases along with the increase of humidity, and the humidity sensitivity that experiment obtains is 97.76pm/%RH, can see that thus the taper micro-nano fiber humidity sensor of present embodiment has been realized highly sensitive humidity sensor.
The experimentation of the taper micro-nano fiber humidity sensor measurement response time of present embodiment is as follows:
As shown in Figure 5, micro-nano fiber pyramidal structure 3 is positioned in the climatic chamber 7, and two ends connect laser instrument 9 and light power meter 10 respectively, the other end of light power meter 10 connects computing machine 11, set a steady temperature, change humidity in the climatic chamber 7 then and come the variation of environmental test humidity, by the required time of software records optical power change in the computing machine 11, measure micro-nano fiber pyramidal structure 3 response time of ambient humidity to external world.
As shown in Figure 6, for measuring laser intensity and the time relation under two different humidity change, just the response time of sensor is measured curve, the time required according to optical power change, measure micro-nano fiber pyramidal structure 3 to external world the response time of humidity be 188ms, can see that thus the taper micro-nano fiber humidity sensor response speed of present embodiment is fast.
The above; it only is the preferred embodiment of the invention; but protection scope of the present invention is not limited thereto; anyly be familiar with those skilled in the art in scope disclosed in this invention; be equal to replacement or change according to technical scheme of the present invention and inventive concept thereof, all belonged to protection scope of the present invention.
Claims (8)
1. one kind responds quick taper micro-nano fiber humidity sensor, it is characterized in that: comprise the wideband light source, micro-nano fiber pyramidal structure and the spectroanalysis instrument that link to each other successively, described micro-nano fiber pyramidal structure comprises an awl lumbar region and two conical transition zones that are positioned at awl two ends, lumbar region, and described two conical transition zones link to each other with spectroanalysis instrument with wideband light source by standard fiber respectively; Wherein,
Described wideband light source is used for sending the light that enters the micro-nano fiber pyramidal structure;
Described micro-nano fiber pyramidal structure is used for will be successively forming interference light through the light of two conical transition zones;
Described spectroanalysis instrument is used for the interference spectrum that record changes with ambient humidity.
2. the quick taper micro-nano fiber of a kind of response according to claim 1 humidity sensor, it is characterized in that: described micro-nano fiber pyramidal structure is the structure by adopting the fused biconical taper technology to make to doubly clad optical fiber, and described doubly clad optical fiber is followed successively by fibre core, inner cladding, surrounding layer and coat from the inside to the outside.
3. the quick taper micro-nano fiber of a kind of response according to claim 2 humidity sensor is characterized in that: described fibre core adopts height to mix that germanite is made in Great Britain to be become, and described inner cladding adopts germanium, fluorine to mix quartz altogether and makes, and described surrounding layer adopts pure quartz to make.
4. according to the quick taper micro-nano fiber of each described a kind of response of claim 1-3 humidity sensor, it is characterized in that: the awl lumbar region cross-sectional diameter of described micro-nano fiber pyramidal structure is 0～10 μ m.
5. according to the quick taper micro-nano fiber of each described a kind of response of claim 1-3 humidity sensor, it is characterized in that: each tapering transition section length of described micro-nano fiber pyramidal structure is less than awl lumbar region length.
6. the quick taper micro-nano fiber of a kind of response according to claim 5 humidity sensor, it is characterized in that: each tapering transition section length of described micro-nano fiber pyramidal structure is 0～15mm.
7. preparation method based on the quick taper micro-nano fiber of the described response of claim 1 humidity sensor, its feature may further comprise the steps:
1) gets the doubly clad optical fiber of one section 15mm～20mm, remove the coat of this doubly clad optical fiber, the remaining bare fibre that contains fibre core and inside and outside covering;
2) adopt optical fiber splicer the bare fibre two ends respectively with the standard fiber welding, and by the alcohol wipe bare fibre;
3) adopt the fused biconical taper technology to obtain the micro-nano fiber pyramidal structure to bare fibre: the subregion in the middle of the bare fibre is heated, the optical fiber in zone to be heated is in molten condition following time, by the optical fiber that is positioned at the heating region two ends is stretched, make the micro-nano fiber pyramidal structure;
4) the micro-nano fiber pyramidal structure is connected to form input/output with wideband light source and spectroanalysis instrument respectively by the standard fiber of its two ends welding, thereby constitutes taper micro-nano fiber humidity sensor.
8. a kind of preparation method who responds quick taper micro-nano fiber humidity sensor according to claim 7, it is characterized in that: the described optical fiber at heating region two ends that is arranged in of step 3) is at drawing process, fibre core and inside and outside cladding diameter scaled down, up to diameter is drawn bore into required size after, the optical fiber of heated center region forms the awl lumbar region, and the optical fiber that heats non-central zone then forms two conical transition zones.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5532493A (en) * | 1994-01-21 | 1996-07-02 | The United States Of America As Represented By The Secretary Of The Air Force | Optical waveguide chemical and biological sensor |
| CN201859117U (en) * | 2010-11-22 | 2011-06-08 | 中国计量学院 | Humidity sensor based on multimode interference SMS (single-mode multimode single-mode) optical fiber structure |
-
2013
- 2013-05-28 CN CN2013102039567A patent/CN103293131A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5532493A (en) * | 1994-01-21 | 1996-07-02 | The United States Of America As Represented By The Secretary Of The Air Force | Optical waveguide chemical and biological sensor |
| CN201859117U (en) * | 2010-11-22 | 2011-06-08 | 中国计量学院 | Humidity sensor based on multimode interference SMS (single-mode multimode single-mode) optical fiber structure |
Non-Patent Citations (2)
| Title |
|---|
| SHAN ZHU等: "Single-mode tapered optical fiber for temperature sensor based on multimode interference", 《PROC. OF SPIE-OSA-IEEE ASIA COMMUNICATIONS AND PHOTONICS》, vol. 8311, 31 December 2011 (2011-12-31), pages 83112 - 2 * |
| 张田虎: "基于微纳光纤环形谐振腔的湿度传感器", 《中国优秀硕士学位论文全文数据库 信息科技辑》, no. 01, 15 January 2013 (2013-01-15), pages 32 - 33 * |
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Application publication date: 20130911 |