CN104635656A - Vacuum transmission control system - Google Patents
Vacuum transmission control system Download PDFInfo
- Publication number
- CN104635656A CN104635656A CN201310576836.1A CN201310576836A CN104635656A CN 104635656 A CN104635656 A CN 104635656A CN 201310576836 A CN201310576836 A CN 201310576836A CN 104635656 A CN104635656 A CN 104635656A
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- CN
- China
- Prior art keywords
- control system
- control module
- vacuum
- transmission control
- devicenet
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 59
- 238000012544 monitoring process Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 19
- 238000012423 maintenance Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4188—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by CIM planning or realisation
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Small-Scale Networks (AREA)
Abstract
The invention provides a vacuum transmission control system comprising an upper scheduling control module, an Ethernet switch, a lower embedded control module and a DeviceNET concentrator. The upper scheduling control module is used for operating upper scheduling software and performing monitoring scheduling on the vacuum transmission control system; the Ethernet switch is used for mounting Ethernet equipment in the vacuum transmission control system; the lower embedded control module is used for centralized control of all components of the transmission control system and provided with an Ethernet interface and a DeviceNet interface; the lower embedded control module performs data transmission with the upper scheduling control module through the Ethernet switch; the DeviceNET concentrator is used for mounting DeviceNET equipment in the vacuum transmission control system and connected with the lower embedded control module. The vacuum transmission control system is not only convenient for equipment maintenance but also less in space occupation.
Description
Technical field
The present invention relates to control field, be specifically related to a kind of vacuum transmission control system.
Background technology
Generally include a kind of vacuum transmission control system in semiconductor processing equipment, this system mainly comprises front equipment end module (Equipment Front End Module, EFEM) and vacuum rear end (Vacuum Back End) two parts.Vacuum transmission control system mainly to complete in wafer fabrication processes from atmospheric environment to vacuum environment and controls and scheduling to the transmission between process equipment.
Existing vacuum transmission control system, along with the difference of processing technology, its system component is also usually different, and each assembly has its oneself controller and communications protocol.So the main control framework adopting upper and lower computer, completed the centralized control of each assembly controller by slave computer, completed the centralized dispatching of whole system by host computer.As the control device of assembly each in vacuum transmission control system, existing upper and lower owner will adopt industrial computer (Industrial Personal Computer, IPC) to dispatch each assembly of whole system and subset and manage.Industrial computer own vol is comparatively large, two independently controller (i.e. industrial computer) also make maintenance work complicated, take clean room space greatly, and clean space is very expensive.
Being not difficult to find out, also there is certain defect in prior art.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of vacuum transmission control system, makes plant maintenance easy and takes up room little.
For achieving the above object, the invention provides following technical scheme:
A kind of vacuum transmission control system, comprising:
Upper dispatching control module, for running upper dispatcher software, carries out monitoring and scheduling to described vacuum transmission control system;
Ethernet switch, for the ethernet device in vacuum transmission control system described in carry;
The next embedded type control module, for the centralized control of each assembly of transmission control system, has Ethernet interface and DeviceNET interface; The next embedded type control module carries out data transmission by described Ethernet switch and described upper dispatching control module;
DeviceNET hub, for the DeviceNET equipment in vacuum transmission control system described in carry, and is connected with described the next embedded type control module.
Further, described ethernet device comprises: vacuum mechanical-arm, atmospheric mechanical hand, LOADPORT, remote I/O module, described vacuum mechanical-arm, atmospheric mechanical hand, LOADPORT(load port module) be connected with described Ethernet switch all separately with remote I/O module, carry out data transmission by described Ethernet switch and described upper dispatching control module and the next embedded type control module.
Further, described LOADPORT is multiple.
Further, described DeviceNET equipment comprises: process equipment, vacuum gauge sensor, valve island, Programmable Logic Controller, described process equipment, vacuum gauge sensor, valve island and Programmable Logic Controller are connected with described DeviceNET hub all separately, carry out data transmission by described DeviceNET hub and described the next embedded type control module.
Further, described process equipment is multiple.
Further, described the next embedded type control module also comprises RS232 interface, for carry RS232 equipment.
Further, described RS232 equipment comprises: FFU, hummer, all carries out data transmission by described RS232 interface and described the next embedded type control module.
Vacuum transmission control system provided by the present invention, by using the next embedded type control module as slave computer, utilize Ethernet switch and DeviceNET hub that each assembly in whole transmission control system is put together, constitute the network architecture (Ethernet and DeviceNET) of two kinds of opposing open formulas, not only facilitate system extension but also make this body structure of slave computer compacter, so the space shared by control system effectively can be reduced, thus make vacuum transmission Control system architecture compact; Further, only need to send steering order by described the next embedded type control module, do not need to arrange an industrial computer for each equipment correspondence, also easier during later maintenance.
Accompanying drawing explanation
The electrical structure diagram of a kind of vacuum transmission control system that Fig. 1 provides for the embodiment of the present invention.
Embodiment
For making the object of the embodiment of the present invention, technical scheme and advantage clearly, below in conjunction with the embodiment of the present invention and accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described.It should be noted that, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Embodiment
As shown in Figure 1, a kind of vacuum transmission control system, comprising:
Upper dispatching control module, for running upper dispatcher software, carries out monitoring and scheduling to described vacuum transmission control system;
Ethernet switch, for the ethernet device in vacuum transmission control system described in carry;
The next embedded type control module, for the centralized control of each assembly of transmission control system, has Ethernet interface and DeviceNET interface; The next embedded type control module, carries out data transmission by described Ethernet switch and described upper dispatching control module;
DeviceNET hub, for the DeviceNET equipment in vacuum transmission control system described in carry, and is connected with described the next embedded type control module.
It should be noted that, described upper dispatching control module is communicated with described the next embedded type control module by described Ethernet switch, dispatch command is sent to described the next embedded type control module.Described Ethernet switch and described DeviceNET hub form two groups of open network architectures at this, facilitate the centralized management of plurality of devices.
As preferably, described ethernet device comprises: vacuum mechanical-arm, atmospheric mechanical hand, LOADPORT, remote I/O module, described vacuum mechanical-arm, atmospheric mechanical hand, LOADPORT and remote I/O module are connected with described Ethernet switch all separately, carry out data transmission by described Ethernet switch and described upper dispatching control module and the next embedded type control module.As preferably, described LOADPORT can also be multiple.
It should be noted that, described vacuum mechanical-arm is used between each process equipment, transmitting wafer under vacuum conditions, and is connected with Ethernet switch by Ethernet, is controlled by described the next embedded type control module; Atmospheric mechanical hand is used for transmitting wafer in EFEM inside under atmospheric environment, is connected, is controlled by described the next embedded type control module by Ethernet with Ethernet switch; LOADPORT is a kind of wafer load device, is connected with Ethernet switch by Ethernet, is controlled by described the next embedded type control module; Remote I/O module is inner and vacuum rear end field level equipment for control EFEM, is connected, is controlled by described the next embedded type control module by Ethernet with Ethernet switch.
As preferably, described DeviceNET equipment comprises: process equipment, vacuum gauge sensor, valve island, Programmable Logic Controller, described process equipment, vacuum gauge sensor, valve island and Programmable Logic Controller are connected with described DeviceNET hub all separately, carry out data transmission by described DeviceNET hub and described the next embedded type control module.As preferably, described process equipment can also be multiple.
It should be noted that, vacuum gauge sensor, for detecting the vacuum tightness of vacuum chamber and process equipment inside, is connected to described the next embedded type control module by DeviceNET hub; Valve island, for controlling the family of power and influence and the angle valve of vacuum transmission chamber, is connected to the next embedded type control module by DeviceNET hub; Programmable Logic Controller is for gathering various sensor and robotic information in vacuum transmission system, and the logical interlock completing each assembly in vacuum transmission system controls, and is connected to the next embedded type control module by DeviceNET hub.
Process equipment is specifically as follows semiconducter process equipment.In semiconductor fabrication processes, have the process equipment of difference in functionality because technique is different, various process equipment is all connected to the next embedded type control module by DeviceNET hub, and by the next embedded type control module centralized control.
As preferably, described the next embedded type control module also comprises RS232 interface, for carry RS232 equipment.Described RS232 equipment comprises: FFU, hummer, all carries out data transmission by described RS232 interface and described the next embedded type control module.Described FFU(Fan/Filter Unit, blower fan filtering unit), through clean gas flow filtration to blowing down, be used for making EFEM inside keep higher cleanliness factor.Hummer is loaded on EFEM, can send different sound carry out the current production status of alert according to the different conditions of production.
The vacuum transmission control system that the present embodiment provides is owing to using the next embedded control panel as slave computer, utilize Ethernet switch and DeviceNET hub that each assembly in whole transmission control system is put together, constitute the network architecture (Ethernet and DeviceNET) of two kinds of opposing open formulas, not only facilitate system extension but also make this body structure of slave computer compacter, so the space shared by control system effectively can be reduced, thus make vacuum transmission Control system architecture compact; Further, only need to send steering order by described the next embedded type control module, do not need to arrange an industrial computer for each equipment correspondence, also easier during later maintenance.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (7)
1. a vacuum transmission control system, is characterized in that, comprising:
Upper dispatching control module, for running upper dispatcher software, carries out monitoring and scheduling to described vacuum transmission control system;
Ethernet switch, for the ethernet device in vacuum transmission control system described in carry;
The next embedded type control module, for the centralized control of each assembly of transmission control system, has Ethernet interface and DeviceNET interface; The next embedded type control module carries out data transmission by described Ethernet switch and described upper dispatching control module;
DeviceNET hub, for the DeviceNET equipment in vacuum transmission control system described in carry, and is connected with described the next embedded type control module.
2. vacuum transmission control system according to claim 1, it is characterized in that, described ethernet device comprises: vacuum mechanical-arm, atmospheric mechanical hand, LOADPORT, remote I/O module, described vacuum mechanical-arm, atmospheric mechanical hand, LOADPORT and remote I/O module are connected with described Ethernet switch all separately, carry out data transmission by described Ethernet switch and described upper dispatching control module and the next embedded type control module.
3. vacuum transmission control system according to claim 2, is characterized in that, described LOADPORT is multiple.
4. vacuum transmission control system according to claim 1, it is characterized in that, described DeviceNET equipment comprises: process equipment, vacuum gauge sensor, valve island, Programmable Logic Controller, described process equipment, vacuum gauge sensor, valve island and Programmable Logic Controller are connected with described DeviceNET hub all separately, carry out data transmission by described DeviceNET hub and described the next embedded type control module.
5. vacuum transmission control system according to claim 4, is characterized in that, described process equipment is multiple.
6. vacuum transmission control system according to claim 1, is characterized in that, described the next embedded type control module also comprises RS232 interface, for carry RS232 equipment.
7. vacuum transmission control system according to claim 6, is characterized in that, described RS232 equipment comprises: FFU, hummer, all carries out data transmission by described RS232 interface and described the next embedded type control module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310576836.1A CN104635656A (en) | 2013-11-14 | 2013-11-14 | Vacuum transmission control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310576836.1A CN104635656A (en) | 2013-11-14 | 2013-11-14 | Vacuum transmission control system |
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| Publication Number | Publication Date |
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| CN104635656A true CN104635656A (en) | 2015-05-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201310576836.1A Pending CN104635656A (en) | 2013-11-14 | 2013-11-14 | Vacuum transmission control system |
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| CN (1) | CN104635656A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106597913A (en) * | 2015-10-20 | 2017-04-26 | 沈阳新松机器人自动化股份有限公司 | Silicon wafer transmission platform control system |
Citations (6)
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| US1506481A (en) * | 1923-08-07 | 1924-08-26 | Walter S Graffam | Cramping device |
| CN102402209A (en) * | 2010-09-14 | 2012-04-04 | 广州致远电子有限公司 | Embedded data acquisition and equipment control system |
| CN103199035A (en) * | 2012-01-06 | 2013-07-10 | 沈阳新松机器人自动化股份有限公司 | Control system of wafer loading and unloading platform |
| CN103199036A (en) * | 2012-01-06 | 2013-07-10 | 沈阳新松机器人自动化股份有限公司 | Equipment front-end module (EFEM) of integration scheduling system and scheduling method thereof |
| CN103219267A (en) * | 2013-04-10 | 2013-07-24 | 南京农业大学 | Automatic conveying system for wafer testing |
| CN103219856A (en) * | 2013-03-11 | 2013-07-24 | 上海交通大学 | Axis static state vacuum partition method of integrated rotary transformer |
-
2013
- 2013-11-14 CN CN201310576836.1A patent/CN104635656A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1506481A (en) * | 1923-08-07 | 1924-08-26 | Walter S Graffam | Cramping device |
| CN102402209A (en) * | 2010-09-14 | 2012-04-04 | 广州致远电子有限公司 | Embedded data acquisition and equipment control system |
| CN103199035A (en) * | 2012-01-06 | 2013-07-10 | 沈阳新松机器人自动化股份有限公司 | Control system of wafer loading and unloading platform |
| CN103199036A (en) * | 2012-01-06 | 2013-07-10 | 沈阳新松机器人自动化股份有限公司 | Equipment front-end module (EFEM) of integration scheduling system and scheduling method thereof |
| CN103219856A (en) * | 2013-03-11 | 2013-07-24 | 上海交通大学 | Axis static state vacuum partition method of integrated rotary transformer |
| CN103219267A (en) * | 2013-04-10 | 2013-07-24 | 南京农业大学 | Automatic conveying system for wafer testing |
Non-Patent Citations (1)
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| 刘明哲等: "半导体设备控制中SEMI标准模型研究", 《仪器仪表学报》 * |
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| CN106597913A (en) * | 2015-10-20 | 2017-04-26 | 沈阳新松机器人自动化股份有限公司 | Silicon wafer transmission platform control system |
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Application publication date: 20150520 |