CN103199035A - Control system of wafer loading and unloading platform - Google Patents

Control system of wafer loading and unloading platform Download PDF

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Publication number
CN103199035A
CN103199035A CN 201210003734 CN201210003734A CN103199035A CN 103199035 A CN103199035 A CN 103199035A CN 201210003734 CN201210003734 CN 201210003734 CN 201210003734 A CN201210003734 A CN 201210003734A CN 103199035 A CN103199035 A CN 103199035A
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module
signal
control
wafer loading
control system
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CN 201210003734
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Chinese (zh)
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刘一恒
褚明杰
贾凯
曲道奎
徐方
李学威
孟庆铸
杨奇峰
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沈阳新松机器人自动化股份有限公司
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Abstract

A control system of a wafer loading and unloading platform comprises an embedded system control module, an input module, a drive module and a signal interacting module, wherein the input module, the drive module and the signal interacting module are respectively in communication connection with the embedded system control module, the drive module drives the wafer loading and unloading platform through control signals of the embedded system control module, and the signal interacting module is used for collecting analog quantity signals of external devices and interacting digital signals with the external devices. Due to the fact that an embedded system is utilized as a control system of a Load Port, functions can be custom-made according to demands and cost can be lowered. The control system of EFEM can be directly operated through the input module and can be directly set through a communication mode directed at an upper computer, and debugging time is reduced. The control system of the wafer loading and unloading platform is good in operation performance and convenient to use. The sizes of the dedicated drive module and the signal interacting module are small, and occupied space in a clean room can be effectively saved.

Description

—种晶圆装卸台的控制系统 - kind of control system wafer loading dock

技术领域 FIELD

[0001] 本发明涉及晶圆装卸台技术领域,特别是涉及一种晶圆装卸台的控制系统。 [0001] The present invention relates to a technical field of wafer loading dock, and particularly to a control system of the wafer loading station.

背景技术 Background technique

[0002] 半导体加工设备中通常包括一种前端接口,该接口容纳着便于传递工件(S卩,晶圆)并监督这种传递的部件,该前端接口即为设备前端模块(EFEM)。 [0002] The semiconductor processing equipment typically includes one front end interface, which facilitates the transfer of the workpiece receiving (S Jie, wafer) and monitor such transmission member, namely the front end interface equipment front end module (EFEM). EFEM内通常安装有晶圆装卸台(Load Port),加工过程中,晶圆装卸台主要起到装卸晶圆的作用。 EFEM usually mounted within a wafer loading station (Load Port), during processing, the wafer loading station wafer loading main functions.

[0003] 现有的各品牌的Load Port,其人机交互功能一般是采用指示灯和单个按钮的方式来完成的。 [0003] Existing various brands Load Port, which is generally used interactive features of LEDs, and a single button to complete. 调试的过程中需要使用外接电脑,并连接串口或者以太网线等进行操作,且大多需要用户进行软件二次开发才能完成与上位机之间的信号交互,所以开发过程比较繁琐费时,使用控制不便。 Debugging process requires the use of an external computer and connect the serial port or Ethernet cable, etc. to operate, and most of the secondary development of software requires the user to complete the signal interaction with the host computer, so the development process is cumbersome and time-consuming, inconvenient to use control.

发明内容 SUMMARY

[0004] 基于此,有必要提供一种操控性能好,使用方便的晶圆装卸台的控制系统。 [0004] Based on this, it is necessary to provide a good handling performance, easy to use control system wafer loading and unloading station.

[0005] 一种晶圆装卸台的控制系统,包括: [0005] A control system of the wafer loading dock, comprising:

[0006] 嵌入式系统控制模块,用于控制晶圆装卸台; [0006] Embedded systems control module for controlling the wafer loading station;

[0007] 输入模块,与所述嵌入式系统控制模块通信连接,用于输入控制信号至所述嵌入式系统控制模块; [0007] The input module, the module communication connection with the embedded control system, for inputting a control signal to the embedded system control module;

[0008] 驱动模块,与所述嵌入式系统控制模块通信连接,用于驱动晶圆装卸台;及 [0008] The driving module and the embedded control system connected to a communication module, for driving the wafer loading station; and

[0009] 信号交互模块,与所述嵌入式系统控制模块通信连接,用于采集外部设备的模拟量信号,并与外部设备交互数字量信号。 [0009] The interaction module signal, and the embedded module communication connection control system for an external analog signal acquisition device and the external device to interact with the digital signal.

[0010] 进一步地,所述驱动模块包括: [0010] Furthermore, the drive module comprises:

[0011] 驱动控制器,与所述嵌入式系统控制模块通信连接,用于发生驱动控制信号; [0011] The drive controller, the module communication connection with the embedded control system, for generating a drive control signal;

[0012] H桥控制电路,与所述驱动控制器电连接,用于控制直流伺服电机; [0012] H-bridge control circuit, electrically connected to the driving controller for controlling the DC servo motor;

[0013] 继电器,与所述驱动控制器电连接,用于控制电磁阀。 [0013] relay, electrically connected to the driving controller for controlling the solenoid valves.

[0014] 进一步地,所述驱动模块还包括光电隔离器,所述光电隔离器设置于所述驱动控制器与继电器之间,和/或设置于所述驱动控制器与所述H桥控制电路之间。 [0014] Furthermore, the drive module comprises a further optical isolator, the optical isolator disposed between the drive controller and a relay, and / or provided to the drive controller and the H-bridge control circuit between.

[0015] 进一步地,所述驱动模块还包括有一模数转换模块,所述模数转换模块与所述驱动控制器通信连接,所述模数转换模块与一用于定位所述直流伺服电机的绝对式编码器通信连接。 [0015] Furthermore, the drive module further comprises an analog to digital conversion module, the analog to digital conversion module is connected with the drive controller in communication, the analog to digital conversion module with a DC servo motor for positioning of the absolute encoder communication connection.

[0016] 进一步地,所述信号交互模块包括: [0016] Further, the signal interaction module comprising:

[0017] 信号交互控制器,与所述嵌入式系统控制模块通信连接,用于产生信号交互控制信号; [0017] controller to exchange signals with the embedded control system connected to a communication module, interactive control signals for generating a signal;

[0018] 输入端子,与所述信号交互控制器通信连接,用于采集外部设备信号; [0018] an input terminal connected to the controller interacts with the communication signal, a signal for acquiring an external apparatus;

[0019] 输出端子,与所述信号交互控制器通信连接,用于向外部设备发送信号。 [0019] The output terminal connected to the communications controller to exchange signals and for transmitting signals to an external device.

[0020] 进一步地,所述输入端子用于采集晶圆装卸台的光电开关信号、接近开关信号、上位机输出信号、压力传感器信号和/或真空传感器信号;所述输出端子用于向上位机输入端发送信号的输出端子。 [0020] Further, the switch signal input terminal for an optoelectronic acquisition of the wafer loading station, proximity switch signal, the output signal of the host computer, the pressure sensor signal and / or the vacuum sensor signal; an output terminal for the upper machine an output terminal of the input transmission signal.

[0021] 进一步地,所述输入和/或输出端子与所述信号交互控制器之间设置有光电隔离器。 [0021] Further, the photoelectric isolation between input and / or output terminal and the controller is arranged to exchange signals.

[0022] 进一步地,所述输入模块为触摸屏。 [0022] Further, the input module is a touch screen. [0023] 进一步地,所述嵌入式系统控制模块与所述驱动模块之间及所述信号交互模块之间均采用CAN通信的通信连接。 [0023] Further, the embedded control system are used for communication between the CAN communication connection between the module and the drive module and the signal interaction module.

[0024] 进一步地,所述嵌入式系统控制模块为基于ARM的控制板。 [0024] Further, the system control module for the embedded ARM-based board.

[0025] 本发明的有益效果为:上述晶圆装卸台的控制系统由于使用嵌入式系统控制模块作为Load Port的控制系统,在功能上可以根据需求进行定制,有利于降低成本;由原来的需要外接PC等方式进步到可以通过输入模块直接对EFEM的控制系统进行操作,而且可以针对上位机的通信方式直接进行设置,减少了调试时间;操控性能好,使用方便。 [0025] Advantageous effects of the present invention are: the control system of the wafer stage loading due to the use of embedded system control module of the control system Load Port, the function can be customized according to the needs, help reduce costs; original required PC and other external way up to the control system of the EFEM may be directly operated through the input module, and can be provided directly to the PC communication mode, reducing the commissioning time; good handling, and easy to use. 且针对Load Port开发的专用驱动模块和信号交互模块体积小,可以有效节省在洁净室中所占空间。 Load Port and developed for specific interaction module and a signal drive module small size, can effectively save the space occupied in a clean room.

附图说明 BRIEF DESCRIPTION

[0026] 利用附图对本发明作进一步说明,但附图中的实施例不构成对本发明的任何限制。 [0026] using the drawings The present invention is further illustrated, but the embodiments in the drawings do not constitute any limitation on the present invention.

[0027] 图1为本发明的一种晶圆装卸台的控制系统的电气结构示意图。 [0027] Fig 1 a schematic structural diagram of a control system of the present invention, the wafer loading table electrical.

[0028] 图2为本发明的一种晶圆装卸台的驱动模块的电气结构示意图。 [0028] The structural diagram of the electrical driving module A wafer loading platform 2 of the present invention of FIG.

[0029] 图3为本发明的一种晶圆装卸台的信号交互模块的电气结构示意图。 [0029] Fig 3 a schematic electrical configuration of signal interaction module A wafer loading station of the present invention.

[0030] 在图1至图3中包括有: [0030] In Figures 1 to 3, comprising:

[0031] 1、嵌入式系统控制模块 [0031] 1, system control module embedded

[0032] 2、驱动模块 21、驱动控制器22、H桥控制电路23、继电器 [0032] 2, the driving module 21, the drive controller 22, H-bridge control circuit 23, relay

[0033] 3、信号交互模块 31、输入端子 32、输出端子 33、信号交互控制器 [0033] 3, the signal interaction module 31, an input terminal 32, output terminal 33, controller signal exchange

[0034] 4、输入模块 5、光电隔离器 6、模数转换模块 [0034] 4, the input module 5, 6 optical isolators, analog to digital conversion module

[0035] 701、直流伺服电机702、电磁阀 703、真空阀 [0035] 701, DC servo motor 702, the solenoid valve 703, the vacuum valve

[0036] 704、指示灯 705、绝对式编码器706、光电开关 [0036] 704, the indicator 705, the absolute encoder 706, photoelectric switch

[0037] 707、接近开关 708、上位机输出 709、压力传感器 [0037] 707, proximity switch 708, the output of the host computer 709, the pressure sensor

[0038] 710、真空传感器 711、上位机输入端。 [0038] 710, vacuum sensor 711, PC input.

具体实施方式 Detailed ways

[0039] 为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图和实施例对本发明进行进一步详细说明。 [0039] To make the objectives, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail in conjunction with the accompanying drawings and embodiments.

[0040] 如图1所示,一种晶圆装卸台的控制系统,包括: [0040] As shown in FIG. 1, a control system for a wafer loading dock, comprising:

[0041] 嵌入式系统控制模块1,用于控制晶圆装卸台; [0041] The embedded system control module 1 for controlling the wafer loading station;

[0042] 输入模块4,与所述嵌入式系统控制模块I通信连接,用于输入设置或控制信息至所述嵌入式系统控制模块I;[0043] 驱动模块2,与所述嵌入式系统控制模块I通信连接,通过所述嵌入式系统控制模块I的控制信号驱动晶圆装卸台; [0042] The input module 4, a control module connected to the I communication with the embedded system, or for inputting control information is provided to the embedded system control module I; [0043] 2 drive module, with the embedded control system I communication module connector, dock control signal for controlling the driving of the wafer through the module I embedded system;

[0044] 信号交互模块3,与所述嵌入式系统控制模块I通信连接,用于采集外部设备的模拟量信号,并与外部设备交互数字量信号。 [0044] Signal interaction module 3, and the embedded control system I communication module connected to external analog signal acquisition device, and interact with external digital equipment signals.

[0045] 本发明所述晶圆装卸台的控制系统,是在现有的晶圆装卸台(即Load Port)基础上,使用嵌入式系统来代替原来的控制系统,为嵌入式系统控制模块I加上驱动模块2和信号交互模块3来完成对外部设备的控制和信号交互功能;通过驱动模块2实现直流伺服电机701和电磁阀702等较大功率设备的驱动和控制功能;并通过信号交互模块3采集设备中模拟量信号,和交互数字量信号。 [0045] The present invention is a control system of the wafer loading station in the conventional wafer loading table (i.e., Load Port), based on the use of embedded control system to replace the original system, embedded system control module I 2 together with drive module 3 and a signal interaction module to complete the external device control signal, and interactive features; implement drive and control DC servo motor 701 and the solenoid 702 by other high power equipment drive module 2; and signal through interaction 3 in the module collection device analog signals, digital signals and interactive.

[0046] 由于使用嵌入式系统控制模块I作为Load Port的控制系统,在功能上可以根据需求进行定制,有利于降低成本;由原来的需要外接PC等方式进步到可以通过输入模块4直接对EFEM的控制系统进行操作,而且可以针对上位机的通信方式直接进行设置,减少了调试时间;操控性能好,使用方便。 [0046] Due to the use of embedded system control module I as a control system Load Port, and in function can be customized according to the needs, help reduce costs; the need for an external PC and other original way up to 4 can be directly input through the EFEM module the control system is operated, and can be provided directly to the PC communication mode, reducing the commissioning time; good handling, and easy to use. 且针对Load Port开发的专用驱动模块2和信号交互模块3体积小,可以有效节省在洁净室中所占空间。 Load Port and developed for specific driver modules 2 and the signal interaction module 3 small volume, can effectively save the space occupied in a clean room.

[0047] 作为优选的实施方式,本发明所述的输入模块4采用触摸屏。 [0047] As a preferred embodiment, the input module of the present invention, 4 touch screen. 采用触摸屏进行人机交互,比起按钮操作更加形象直观,而且触摸屏信息量大,可视性效果好,而且信息量大,进一步提高了本发明的操控性能和使用便利性。 Touch screen human-computer interaction, more than the visual image button operation and large touch screen information and good visibility effect, and the amount of information to further improve the handling characteristics of the invention and ease of use. 当然,所述的输入模块4也可以采用其它类型的输入模块4,只要能实现方便地进行人际交互的目的即可。 Of course, the input module 4 may also be other types of input module 4, can be achieved easily as long as the human interaction can be employed purpose.

[0048] 其中,所述的嵌入式系统控制模块I与所述输入模块4之间采用串口通信的通信连接。 [0048] wherein, the embedded system control module and the input module I using serial communication between the communication connection 4. 串口通信的通信线路简单,成本低且信号传输稳定。 Communication line serial communication simple, low cost and stable signal transmission.

[0049] 而在本实施例中,所述嵌入式系统控制模块I与所述驱动模块2之间,以及与所述信号交互模块3之间均采用CAN通信的通信连接。 [0049] In the present embodiment, the embedded system control module and the drive module between the I 2, and the interaction with the signal modules are used for communication between the CAN communication connection 3. 保证了通信的实时性和可靠性。 Ensuring the timeliness and reliability of communication.

[0050] 如图2所示,本发明所述的驱动模块2具体包括:驱动控制器21,与所述嵌入式系统控制模块I通信连接,用于产生驱动控制信号桥控制电路22,与所述驱动控制器21电连接,并与晶圆装卸台的直流伺服电机701电连接,用于控制所述直流伺服电机701 ;继电器23,与所述驱动控制器21电连接,并与晶圆装卸台的电磁阀702电连接,用于控制所述电磁阀702。 [0050] 2, the driving module according to the present invention 2 comprises: a drive controller 21, and the embedded control system connected to a communication module I, for generating a driving control signal the bridge control circuit 22, and the said drive controller 21 is electrically connected to the wafer and connected to a DC servo motor 701 is electrically loading station, for controlling the DC servo motor 701; relay 23 is electrically connected to the driving controller 21, and the wafer handling solenoid valve 702 is electrically connected to stations, for controlling the solenoid valve 702.

[0051] 其中,作为具体的实施方式之一,本实施例所述驱动模块2对晶圆装卸台的驱动,具体可以是指通过所述驱动控制器21电连接而驱动下述部件:电磁阀702,包括晶圆控制台与FOUP对接的气缸的电磁阀702,所述电磁阀702通过继电器23与所述驱动控制器21电连接;真空阀703,包括真空发生器的真空阀703,所述真空阀703与所述驱动控制器21电连接;晶圆装卸台的指示灯704,所述指示灯704与所述驱动控制器21电连接;所述直流伺服电机701,如前所述,直流伺服电机701由所述驱动控制器21控制所述H桥控制电路22而驱动。 [0051] wherein, as one specific embodiment, the present embodiment the driving module 2 to the wafer loading station 21 may refer to the specific electrically connected by the drive controller to drive the following components: a solenoid valve 702, solenoid valve cylinder includes a wafer FOUP docking with the console 702, the solenoid valve 70 223 is electrically connected to the driving controller 21 through the relay; vacuum valve 703, the vacuum valve comprises a vacuum generator 703, the the vacuum valve 703 is connected to the driving controller 21; the wafer loading table indicator 704, the indicator light 704 is electrically connected to the driving controller 21; the DC servo motor 701, as described above, DC the servo motor 701 by the drive controller 21 controls the H-bridge control circuit 22 is driven. 当然,本实施例所说的驱动指示灯704,较优选的是驱动Load Port中功率较大的常规指示灯 Of course, the present embodiment of said drive LEDs 704, more preferably is driving Load Port in large conventional power indicator

[0052] 优选地,所述驱动模块2还包括光电隔离器5,所述光电隔离器5设置于所述驱动控制器21与继电器23之间,和/或设置于所述驱动控制器21与所述H桥控制电路22之间。 [0052] Preferably, the drive module comprises a further optical isolator 2 5, 5 of the optical isolator 23 is provided between the relay 21 and the drive controller, and / or provided to the drive controller 21 between the H-bridge control circuit 22.

[0053] 其中,本实施例所述驱动模块2还包括有一模数转换模块6,所述模数转换模块6与所述驱动控制器21通信连接,所述模数转换模块6与一用于定位所述直流伺服电机701的绝对式编码器705通信连接。 [0053] wherein the driving module according to the present embodiment 2 further comprises an analog to digital conversion module 6, the analog to digital conversion module 6 with the drive connected to the communication controller 21, the analog to digital converter and a module for 6 positioning the DC servo motor 701 of the absolute encoder 705 communication link. 其中,所述的模数转换模块6是一种数据采集模块,用于将将模拟量信号转成数字量信号,以便于驱动控制器21通过采集的绝对式编码器705控制所述直流伺服电机701。 Wherein said analog to digital conversion module 6 is a data acquisition module, for forwarding the analog signals into digital signals, so as to actuate the controller 21 acquired by the absolute encoder 705 controls the DC servo motor 701.

[0054] 对于Load Port而言,映射(即Mapping)功能主要是需要检测晶圆的位置。 [0054] For the Load Port, the mapping (i.e. Mapping) main function is necessary to detect the position of the wafer. 通过本发明,Load Port的Mapping功能可以由直流伺服电机701加对射传感器进行双闭环控制,从而有效的保证了Mapping功能的精确性。 By the present invention, Load Port Mapping function of DC servo motor 701 may be applied to the dual-loop control insolation sensor, so as to effectively ensure the accuracy Mapping function. 采用绝对式编码器705来检测伺服电机的位置,保证设备断电时伺服电机位置不会丢失,上电后直接可以工作。 Absolute encoder 705 detects the position of the servo motor, the servo motor to ensure that the position is not lost when power is turned off, after power work directly. 对电磁阀702等设备驱动采用光电隔离器5加继电器23的方式实现。 Solenoid valve 702 like the drive device 5 is applied with optical isolation relay 23 is implemented embodiment. 光电隔离器5保证信号传递的准确性,继电器23提供干接点,可以外接大功率直流电源,从而保证对电磁阀702等设备进行有效的驱动。 5 optical isolator to ensure the accuracy of signal transmission, the relay contacts 23 provide a dry, high-power DC power supply may be external, solenoid valve 702 to ensure efficient driving equipment.

[0055] 如图3所示,本发明所述的信号交互模块3包括:信号交互控制器33,所述嵌入式系统控制模块I通信连接,用于发生信号交互控制信号;输入端子31,与所述信号交互控制器33通信连接,用于采集外部设备信号;输出端子32,与所述信号交互控制器33通信连接,用于向外部设备发送信号。 [0055] As shown in FIG. 3, the signal interaction module according to the present invention 3 comprises: a signal interaction controller 33, the embedded system control module I communication connection for interactive control signal generating signal; an input terminal 31, and the communication controller 33 is connected to exchange signals, a signal for acquiring an external device; an output terminal 32 connected to the communication controller 33 to interact with the signal, for transmitting a signal to an external device.

[0056] 在本实施例中,与外部设备的信号交互,其信号可以是包括气缸到位信号、光电开关706数字信号、Interlock的信号等的外部设备的信号,它们通过信号交互模块3进行采集和控制,并有所述的信号交互控制器33直接把实时状态中转给嵌入式系统控制模块I。 [0056] In the present embodiment, exchange signals with an external device, which signal may be a signal from an external device cylinder position signal, the photoelectric switch 706 digital signals, Interlock signal, etc., are collected by a signal interaction module 3 and control, and a signal according to the real-time interaction controller 33 directly transferred to the embedded system state control module I.

[0057] 其中,作为具体的实施方式之一,所述的输入端子31也可以是包括采集晶圆装卸台的光电开关706信号、接近开关707信号、上位机输出708信号、压力传感器709信号和/或真空传感器710信号的输入端子31 ;所述输出端子32包括向上位机输入端711发送信号的输出端子32。 [0057] wherein, as one specific embodiment, the input terminal 31 may be a photoelectric switch of the wafer loading station 706 acquired signal, proximity switch signal 707, the PC 708 outputs a signal, a pressure sensor 709 and the signal / or the vacuum sensor input signals 710 terminal 31; the output terminal 32 comprises upper machine transmission signal input terminal 711 output terminal 32.

[0058] 优选地,所述输入和/或输出端子32与所述信号交互控制器33之间设置有光电隔离器5。 [0058] Preferably, the input and / or output terminals 32 and 33 provided between the signal optical isolator interaction controller 5. 需说明的是,该光电隔离器5与连接继电器23的光电隔离器5目的和效果相同。 It should be noted that the same purpose and effect of the 5 optical isolator 5 and the relay 23 is connected to the opto-isolators.

[0059] 本发明单独把信号采集功能单独集成于所述信号交互模块3,是因为Load Port本身结构紧凑,要求各个设备体积尽量小,所以单独把该功能用一个板卡实现,这样可以有效减小把各种功能集成在嵌入式系统控制模块I上的体积。 [0059] The present invention separate the individual integrated signal acquisition function interaction module 3 to the signal, because the compact structure itself Load Port, each device requires a volume as small as possible, so that the separate functions implemented by a board, which can effectively reduce the various functions are integrated in small embedded systems control module I volume. 同理,使用光电隔离器5对数字输入/数字输出信号进行隔离,可以有效提高抗干扰能力保证 Similarly, the use of opto isolator 5 is a digital input / output digital signal isolation, can improve the anti-interference ability to ensure

[0060] 在另一优选的实施例中,所述输入端子31中,用于采集压力传感器709信号和/或真空传感器710信号的输入端子31,通过模数转换模块6取代所述光电隔离器5而与所述信号交互控制器33信号连接。 [0060] In another preferred embodiment, the input terminal 31, a pressure sensor 709 for acquiring a signal and / or the vacuum sensor signal 710 input terminal 31, in place of the optical isolators via analog to digital conversion module 6 5 is connected to the signal controller 33 to exchange signals. 这主要是利用模数转换模块6对压力传感器709信号和/或真空传感器710信号进行转换,转换成数字量信号。 This is mainly the use of analog to digital conversion module 6 pressure sensor 709 converts the signal and / or the vacuum sensor 710 signals, converted into digital signals. 这里所用的模数转换模块6与所述驱动模块2中使用的模数转换模块6目的和效果相同。 Analog to digital conversion module 6 as used herein and the drive module 2 analog to digital conversion module 6 using the same purpose and effect.

[0061 ] 其中,本发明所述的嵌入式系统控制模块I优选为基于ARM的控制板。 [0061] wherein the embedded system according to the present invention, the control module I is preferably an ARM based board. ARM (Advanced RISC Machines)是微处理器行业中具有性能高、成本低和能耗省等特点的微处理器,比较适用于嵌入控制。 ARM (Advanced RISC Machines) is the microprocessor industry with high performance, low cost and power consumption characteristics of the province of microprocessors, more suitable for embedded control. 由于基于ARM的控制板为微处理器技术领域中的公知技术,这里不赘述其结构和工作原理。 Since the board is based on ARM microprocessor BACKGROUND known technique, it is not repeated here its structure and operation principle.

[0062] 需指出的是,本发明晶圆装卸台的控制系统,作为一种嵌入式系统,亦可应用于EFEM、涂胶、光刻、PVD、CVD等工艺处理设备中。 [0062] Note that it is, the control system of the present invention, the wafer loading table, as an embedded system, the EFEM may be applied, coating, lithography, PVD, CVD and other processes in the processing apparatus. [0063] 以上所述实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对本发明专利范围的限制。 [0063] The above embodiments are only expressed several embodiments of the present invention, and detailed description thereof is more specific, but can not therefore be understood as limiting the scope of the present invention. 应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。 It should be noted that those of ordinary skill in the art, without departing from the spirit of the present invention, can make various changes and modifications, which fall within the protection scope of the present invention. 因此,本发明专利的保护范围应以所附权利要求为准。 Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims (10)

  1. 1.一种晶圆装卸台的控制系统,其特征在于,包括: 嵌入式系统控制模块,用于控制晶圆装卸台; 输入模块,与所述嵌入式系统控制模块通信连接,用于输入控制信号至所述嵌入式系统控制模块; 驱动模块,与所述嵌入式系统控制模块通信连接,用于驱动晶圆装卸台;及信号交互模块,与所述嵌入式系统控制模块通信连接,用于采集外部设备的模拟量信号,并与外部设备交互数字量信号。 1. A control system for the wafer handling station, characterized by comprising: a control module embedded system for controlling the wafer loading station; an input module, a control module in communication with the embedded system is connected to the control input signal to the embedded system control module; driving module connected to the communication control module and embedded systems, for driving the wafer loading station; and a signal interaction module, connected with the communication control module and embedded systems, for acquisition of analog signals to an external device, and interacting with an external digital signal apparatus.
  2. 2.根据权利要求1所述的晶圆装卸台的控制系统,其特征在于,所述驱动模块包括: 驱动控制器,与所述嵌入式系统控制模块通信连接,用于发生驱动控制信号; H桥控制电路,与所述驱动控制器电连接,用于控制直流伺服电机; 继电器,与所述驱动控制器电连接,用于控制电磁阀。 2. The control system of claim wafer loading platform, characterized in that the drive module comprises: a drive controller, the embedded system and the communication control module is connected to a drive for generating a control signal; H the bridge control circuit, electrically connected to the driving controller for controlling the DC servo motor; relay, electrically connected to the driving controller for controlling the solenoid valves.
  3. 3.根据权利要求2所述的晶圆装卸台的控制系统,其特征在于,所述驱动模块还包括光电隔离器,所述光电隔离器设置于所述驱动控制器与继电器之间,和/或设置于所述驱动控制器与所述H桥控制电路之间。 3. The control system of claim 2, the wafer loading station, characterized in that the drive module comprises a further optical isolator, the optical isolator disposed between the drive controller and a relay, and / or or disposed between the controller and the H-bridge control circuit of the drive.
  4. 4.根据权利要求3所述的晶圆装卸台的控制系统,其特征在于,所述驱动模块还包括有一模数转换模块,所述模数转换模块与所述驱动控制器通信连接,所述模数转换模块与一用于定位所述直流伺服电机的绝对式编码器通信连接。 4. The control system of claim 3, the wafer loading station, characterized in that the drive module further comprises an analog to digital conversion module, the analog to digital conversion module communication connection with the drive controller, the analog to digital conversion module connected to an absolute encoder for positioning the communication with the DC servo motor.
  5. 5.根据权利要求1-4任意一项所述的晶圆装卸台的控制系统,其特征在于,所述信号交互模块包括: 信号交互控制器,与所述嵌入式系统控制模块通信连接,用于产生信号交互控制信号; 输入端子,与所述信号交互控制器通信连接,用于采集外部设备信号; 输出端子,与所述信号交互控制器通信连接,用于向外部设备发送信号。 The control system of the wafer loading station in any of claims 1-4, characterized in that said signal interaction module comprising: a controller to exchange signals, connecting the embedded system and the communication control module, with generating a control signal to the interactive signal; an input terminal, to interact with the controller in communication with the signal connector, an external apparatus for acquiring a signal; an output terminal, the controller interacts with the communication signal is connected, for transmitting a signal to an external device.
  6. 6.根据权利要求5所述的晶圆装卸台的控制系统,其特征在于,所述输入端子用于采集晶圆装卸台的光电开关信号、接近开关信号、上位机输出信号、压力传感器信号和/或真空传感器信号;所述输出端子用于向上位机输入端发送信号的输出端子。 6. The control system of claim 5 wafer loading platform according to claim, characterized in that said photoelectric switch input signal terminal for acquiring the wafer loading station, proximity switch signal, the output signal of the host computer, and a pressure sensor signal / or the vacuum sensor signal; an output terminal for the output terminal of the upper machine input transmission signal.
  7. 7.根据权利要求6所述的晶圆装卸台的控制系统,其特征在于,所述输入和/或输出端子与所述信号交互控制器之间设置有光电隔离器。 The control system of claim 6 of the wafer loading station according to claim, characterized in that, provided between said input and / or output terminal and the optical isolator controller to exchange signals.
  8. 8.根据权利要求1所述的晶圆装卸台的控制系统,其特征在于,所述输入模块为触摸屏。 8. The control system of claim 1, the wafer loading station, characterized in that the input module is a touch screen.
  9. 9.根据权利要求8所述的晶圆装卸台的控制系统,其特征在于,所述嵌入式系统控制模块与所述驱动模块之间及所述信号交互模块之间均采用CAN通信的通信连接。 9. The control system of claim 8, the wafer loading station, characterized in that the communication connections are used between the CAN communication between the embedded module and the system control module and the drive signal exchange module .
  10. 10.根据权利要求1所述的晶圆装卸台的控制系统,其特征在于,所述嵌入式系统控制模块为基于ARM的控制板。 The control system of the wafer loading station according to claim, wherein the system control module is embedded ARM-based board.
CN 201210003734 2012-01-06 2012-01-06 Control system of wafer loading and unloading platform CN103199035A (en)

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