CN103199035A - Control system of wafer loading and unloading platform - Google Patents
Control system of wafer loading and unloading platform Download PDFInfo
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- CN103199035A CN103199035A CN2012100037346A CN201210003734A CN103199035A CN 103199035 A CN103199035 A CN 103199035A CN 2012100037346 A CN2012100037346 A CN 2012100037346A CN 201210003734 A CN201210003734 A CN 201210003734A CN 103199035 A CN103199035 A CN 103199035A
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Abstract
A control system of a wafer loading and unloading platform comprises an embedded system control module, an input module, a drive module and a signal interacting module, wherein the input module, the drive module and the signal interacting module are respectively in communication connection with the embedded system control module, the drive module drives the wafer loading and unloading platform through control signals of the embedded system control module, and the signal interacting module is used for collecting analog quantity signals of external devices and interacting digital signals with the external devices. Due to the fact that an embedded system is utilized as a control system of a Load Port, functions can be custom-made according to demands and cost can be lowered. The control system of EFEM can be directly operated through the input module and can be directly set through a communication mode directed at an upper computer, and debugging time is reduced. The control system of the wafer loading and unloading platform is good in operation performance and convenient to use. The sizes of the dedicated drive module and the signal interacting module are small, and occupied space in a clean room can be effectively saved.
Description
Technical field
The present invention relates to the wafer load port technical field, particularly relate to a kind of control system of wafer load port.
Background technology
Generally include a kind of front end interface in the semiconductor processing equipment, this interface is holding the parts of being convenient to transmit workpiece (that is, wafer) and supervising this transmission, and this front end interface is front equipment end module (EFEM).Wafer load port (Load Port) is installed in the EFEM usually, and in the course of processing, wafer load port mainly plays the effect of loading and unloading wafer.
The Load Port of existing various brands, its human-computer interaction function adopt the mode of indicator light and single button to finish.Need to use external computer in the process of debugging, and connection serial ports or ethernet line etc. are operated, and need the user to carry out that software secondary development just can be finished mostly and host computer between signal mutual, so development process is more loaded down with trivial details time-consuming, use control inconvenience.
Summary of the invention
Based on this, be necessary to provide a kind of handling good, the control system of wafer load port easy to use.
A kind of control system of wafer load port comprises:
The embedded system control module is used for the control wafer load port;
Input module communicates to connect with described embedded system control module, is used for input control signal to described embedded system control module;
Driver module communicates to connect with described embedded system control module, is used for driving wafer load port; And
The signal interactive module communicates to connect with described embedded system control module, be used for to gather the analog signals of external equipment, and with external equipment interactive digital amount signal.
Further, described driver module comprises:
Driving governor communicates to connect with described embedded system control module, is used for taking place drive control signal;
The H bridge control circuit is electrically connected with described driving governor, is used for the control DC servo motor;
Relay is electrically connected with described driving governor, is used for the control electromagnetically operated valve.
Further, described driver module also comprises photoisolator, and described photoisolator is arranged between described driving governor and the relay, and/or is arranged between described driving governor and the described H bridge control circuit.
Further, described driver module also includes an analog-to-digital conversion module, and described analog-to-digital conversion module and described driving governor communicate to connect, and the absolute type encoder that described analog-to-digital conversion module and is used for the described DC servo motor in location communicates to connect.
Further, described signal interactive module comprises:
The signal interaction controller communicates to connect with described embedded system control module, for generation of the mutual control signal of signal;
Input terminal communicates to connect with described signal interaction controller, is used for gathering the external equipment signal;
Lead-out terminal communicates to connect with described signal interaction controller, is used for sending signal to external equipment.
Further, described input terminal is for the photoelectric switching signal of gathering wafer load port, near switching signal, host computer output signal, pressure sensor signal and/or vacuum transducer signal; Described lead-out terminal is used for sending to the host computer input lead-out terminal of signal.
Further, be provided with photoisolator between described input and/or lead-out terminal and the described signal interaction controller.
Further, described input module is touch-screen.
Further, all adopt communicating to connect that CAN communicates by letter between described embedded system control module and the described driver module and between the described signal interactive module.
Further, described embedded system control module is the control board based on ARM.
Beneficial effect of the present invention is: the control system of above-mentioned wafer load port can customize on function according to demand owing to use the embedded system control module as the control system of Load Port, is conducive to reduce cost; , and can directly be arranged at the communication mode of host computer to can directly the control system of EFEM being operated by input module by original mode progress such as the external PC of needs, reduced debug time; Handling is good, and is easy to use.And special-purpose driver module and signal interactive module volume at Load Port exploitation are little, can effectively save in the clean room to take up space.
Description of drawings
The invention will be further described to utilize accompanying drawing, but the embodiment in the accompanying drawing does not constitute any limitation of the invention.
Fig. 1 is the electrical structure schematic diagram of the control system of a kind of wafer load port of the present invention.
Fig. 2 is the electrical structure schematic diagram of the driver module of a kind of wafer load port of the present invention.
Fig. 3 is the electrical structure schematic diagram of the signal interactive module of a kind of wafer load port of the present invention.
In Fig. 1 to Fig. 3, include:
1, embedded system control module
2, driver module 21, driving governor 22, H bridge control circuit 23, relay
3, signal interactive module 31, input terminal 32, lead-out terminal 33, signal interaction controller
4, input module 5, photoisolator 6, analog-to-digital conversion module
701, DC servo motor 702, electromagnetically operated valve 703, vacuum valve
704, indicator light 705, absolute type encoder 706, optoelectronic switch
707, near switch 708, host computer output 709, pressure sensor
710, vacuum transducer 711, host computer input.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples the present invention is further elaborated.
As shown in Figure 1, a kind of control system of wafer load port comprises:
Embedded system control module 1 is used for the control wafer load port;
Input module 4 communicates to connect with described embedded system control module 1, is used for input setting or control information to described embedded system control module 1;
Signal interactive module 3 communicates to connect with described embedded system control module 1, be used for to gather the analog signals of external equipment, and with external equipment interactive digital amount signal.
The control system of wafer load port of the present invention, be on existing wafer load port (being Load Port) basis, use embedded system to replace original control system, finish control and the signal interactive function to external equipment for embedded system control module 1 adds driver module 2 and signal interactive module 3; Realize that by driver module 2 DC servo motor 701 and electromagnetically operated valve 702 etc. are than the driving of powerful device and control function; And by analog signals and interactive digital amount signal in signal interactive module 3 collecting devices.
Owing to use embedded system control module 1 control system as Load Port, on function, can customize according to demand, be conducive to reduce cost; , and can directly be arranged at the communication mode of host computer to can directly the control system of EFEM being operated by input module 4 by original mode progress such as the external PC of needs, reduced debug time; Handling is good, and is easy to use.And special-purpose driver module 2 and signal interactive module 3 volumes at Load Port exploitation are little, can effectively save in the clean room to take up space.
As preferred embodiment, input module 4 of the present invention adopts touch-screen.Adopt touch-screen to carry out man-machine interaction, more visual in image compared with push-botton operation, and also the contact screen information amount is big, and visual effective, and contain much information, further improved handling of the present invention and ease of use.Certainly, described input module 4 also can adopt the input module 4 of other type, as long as can realize carrying out easily interpersonal mutual purpose.
Wherein, adopt communicating to connect of serial communication between described embedded system control module 1 and the described input module 4.The communication line of serial communication is simple, the low and stable signal transmission of cost.
And in the present embodiment, between described embedded system control module 1 and the described driver module 2, and with described signal interactive module 3 between all adopt communicating to connect that CAN communicates by letter.Real-time and the reliability of communication have been guaranteed.
As shown in Figure 2, driver module 2 of the present invention specifically comprises: driving governor 21 communicates to connect with described embedded system control module 1, for generation of drive control signal; H bridge control circuit 22 is electrically connected with described driving governor 21, and is electrically connected with the DC servo motor 701 of wafer load port, is used for the described DC servo motor 701 of control; Relay 23 is electrically connected with described driving governor 21, and is electrically connected with the electromagnetically operated valve 702 of wafer load port, is used for the described electromagnetically operated valve 702 of control.
Wherein, as one of concrete execution mode, the driving of 2 pairs of wafer load ports of the described driver module of present embodiment, specifically can refer to drive following parts by described driving governor 21 electrical connections: electromagnetically operated valve 702, the electromagnetically operated valve 702 that comprises the cylinder that the wafer control desk docks with FOUP, described electromagnetically operated valve 702 is electrically connected with described driving governor 21 by relay 23; Vacuum valve 703 comprises the vacuum valve 703 of vacuum generator, and described vacuum valve 703 is electrically connected with described driving governor 21; The indicator light 704 of wafer load port, described indicator light 704 is electrically connected with described driving governor 21; Described DC servo motor 701, as previously mentioned, DC servo motor 701 is driven by the described driving governor 21 described H bridge control circuits 22 of control.Certainly, the said driving indicator light 704 of present embodiment even more preferably drives the bigger conventional indicator light of power among the Load Port
Preferably, described driver module 2 also comprises photoisolator 5, and described photoisolator 5 is arranged between described driving governor 21 and the relay 23, and/or is arranged between described driving governor 21 and the described H bridge control circuit 22.
Wherein, the described driver module 2 of present embodiment also includes an analog-to-digital conversion module 6, described analog-to-digital conversion module 6 communicates to connect with described driving governor 21, and the absolute type encoder 705 that described analog-to-digital conversion module 6 and is used for the described DC servo motor 701 in location communicates to connect.Wherein, described analog-to-digital conversion module 6 is a kind of data acquisition modules, is used for just that analog signals changes into digital quantity signal, so that the absolute type encoder 705 controls described DC servo motor 701 of driving governor 21 by gathering.
For Load Port, mapping (being Mapping) function mainly is the position that needs to detect wafer.By the present invention, the Mapping function of Load Port can add the correlation transducer by DC servo motor 701 and carry out two closed-loop controls, thereby has effectively guaranteed the accuracy of Mapping function.Adopt absolute type encoder 705 to detect the position of servomotor, the servomotor position can not lost when guaranteeing device powers down, directly can work after powering on.The mode that adopts photoisolator 5 to add relay 23 to device drives such as electromagnetically operated valves 702 realizes.Photoisolator 5 guarantees the accuracy that signals transmit, and relay 23 provides dry contact, can external high-power DC power supply, thus guarantee electromagnetically operated valve 702 equipment such as grade are effectively driven.
As shown in Figure 3, signal interactive module 3 of the present invention comprises: signal interaction controller 33, and described embedded system control module 1 communicates to connect, and is used for taking place the mutual control signal of signal; Input terminal 31 communicates to connect with described signal interaction controller 33, is used for gathering the external equipment signal; Lead-out terminal 32 communicates to connect with described signal interaction controller 33, is used for sending signal to external equipment.
In the present embodiment, mutual with the signal of external equipment, its signal can be to comprise put in place the signal of external equipment of signal etc. of signal, optoelectronic switch 706 digital signals, Interlock of cylinder, they are gathered and control by signal interactive module 3, and described signal interaction controller 33 are arranged directly being given to embedded system control module 1 in the real-time status.
Wherein, as one of concrete execution mode, described input terminal 31 also can be the input terminal 31 that comprises optoelectronic switch 706 signals of gathering wafer load port, exports 708 signals, pressure sensor 709 signals and/or vacuum transducer 710 signals near switch 707 signals, host computer; Described lead-out terminal 32 comprises the lead-out terminal 32 that sends signal to host computer input 711.
Preferably, be provided with photoisolator 5 between described input and/or lead-out terminal 32 and the described signal interaction controller 33.It should be noted that this photoisolator 5 is identical with effect with photoisolator 5 purposes that connect relay 23.
The present invention is integrated in described signal interactive module 3 to the signals collecting function separately separately, be because the compact conformation of Load Port own, require each equipment volume as far as possible little, so separately this function is realized with an integrated circuit board, can effectively reduce so various functions are integrated in volume on the embedded system control module 1.In like manner, use 5 pairs of numerals of photoisolator input/digital output signal to isolate, can effectively improve antijamming capability and guarantee
In another preferred embodiment, in the described input terminal 31, be used for to gather the input terminal 31 of pressure sensor 709 signals and/or vacuum transducer 710 signals, replace described photoisolators 5 and be connected with described signal interaction controller 33 signals by analog-to-digital conversion module 6.This mainly is to utilize 6 pairs of pressure sensor 709 signals of analog-to-digital conversion module and/or vacuum transducer 710 signals to change, and converts digital quantity signal to.Here analog-to-digital conversion module 6 purposes of using in used analog-to-digital conversion module 6 and the described driver module 2 are identical with effect.
Wherein, embedded system control module 1 of the present invention is preferably the control board based on ARM.ARM (Advanced RISC Machines) be have the performance height in the microprocessor industry, cost is low and the microprocessor of characteristics such as saving energy, relatively be applicable to embed control.Owing to be known technology in the microprocessor technology field based on the control board of ARM, do not give unnecessary details its structure and operation principle here.
Be pointed out that the control system of wafer load port of the present invention as a kind of embedded system, also can be applicable in the PROCESS FOR TREATMENT equipment such as EFEM, gluing, photoetching, PVD, CVD.
The above embodiment has only expressed several execution mode of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to claim of the present invention.Should be pointed out that for the person of ordinary skill of the art without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection range of patent of the present invention should be as the criterion with claims.
Claims (10)
1. the control system of a wafer load port is characterized in that, comprising:
The embedded system control module is used for the control wafer load port;
Input module communicates to connect with described embedded system control module, is used for input control signal to described embedded system control module;
Driver module communicates to connect with described embedded system control module, is used for driving wafer load port; And
The signal interactive module communicates to connect with described embedded system control module, be used for to gather the analog signals of external equipment, and with external equipment interactive digital amount signal.
2. the control system of wafer load port according to claim 1 is characterized in that, described driver module comprises:
Driving governor communicates to connect with described embedded system control module, is used for taking place drive control signal;
The H bridge control circuit is electrically connected with described driving governor, is used for the control DC servo motor;
Relay is electrically connected with described driving governor, is used for the control electromagnetically operated valve.
3. the control system of wafer load port according to claim 2, it is characterized in that, described driver module also comprises photoisolator, and described photoisolator is arranged between described driving governor and the relay, and/or is arranged between described driving governor and the described H bridge control circuit.
4. the control system of wafer load port according to claim 3, it is characterized in that, described driver module also includes an analog-to-digital conversion module, described analog-to-digital conversion module and described driving governor communicate to connect, and the absolute type encoder that described analog-to-digital conversion module and is used for the described DC servo motor in location communicates to connect.
5. according to the control system of any described wafer load port of claim 1-4, it is characterized in that described signal interactive module comprises:
The signal interaction controller communicates to connect with described embedded system control module, for generation of the mutual control signal of signal;
Input terminal communicates to connect with described signal interaction controller, is used for gathering the external equipment signal;
Lead-out terminal communicates to connect with described signal interaction controller, is used for sending signal to external equipment.
6. the control system of wafer load port according to claim 5, it is characterized in that described input terminal is for the photoelectric switching signal of gathering wafer load port, near switching signal, host computer output signal, pressure sensor signal and/or vacuum transducer signal; Described lead-out terminal is used for sending to the host computer input lead-out terminal of signal.
7. the control system of wafer load port according to claim 6 is characterized in that, is provided with photoisolator between described input and/or lead-out terminal and the described signal interaction controller.
8. the control system of wafer load port according to claim 1 is characterized in that, described input module is touch-screen.
9. the control system of wafer load port according to claim 8 is characterized in that, all adopts communicating to connect that CAN communicates by letter between described embedded system control module and the described driver module and between the described signal interactive module.
10. the control system of wafer load port according to claim 1 is characterized in that, described embedded system control module is the control board based on ARM.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100037346A CN103199035A (en) | 2012-01-06 | 2012-01-06 | Control system of wafer loading and unloading platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100037346A CN103199035A (en) | 2012-01-06 | 2012-01-06 | Control system of wafer loading and unloading platform |
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| CN103199035A true CN103199035A (en) | 2013-07-10 |
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| CN2012100037346A Pending CN103199035A (en) | 2012-01-06 | 2012-01-06 | Control system of wafer loading and unloading platform |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104635656A (en) * | 2013-11-14 | 2015-05-20 | 沈阳新松机器人自动化股份有限公司 | Vacuum transmission control system |
| CN104626151A (en) * | 2013-11-13 | 2015-05-20 | 沈阳新松机器人自动化股份有限公司 | Mechanical arm wafer centering device and method |
| CN108227508A (en) * | 2016-12-15 | 2018-06-29 | 中芯国际集成电路制造(北京)有限公司 | Wafer load port efficiency monitoring method |
| WO2023102776A1 (en) * | 2021-12-08 | 2023-06-15 | 成都纽曼和瑞微波技术有限公司 | Mpcvd control system |
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| CN1800975A (en) * | 2005-11-28 | 2006-07-12 | 中国科学院光电技术研究所 | Stepped and repeated illuminating and nano-imprinting device |
| US20070147832A1 (en) * | 2005-12-26 | 2007-06-28 | Kazuhito Shigemori | Method of processing substrate, substrate processing system and substrate processing apparatus |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104626151A (en) * | 2013-11-13 | 2015-05-20 | 沈阳新松机器人自动化股份有限公司 | Mechanical arm wafer centering device and method |
| CN104626151B (en) * | 2013-11-13 | 2016-06-29 | 沈阳新松机器人自动化股份有限公司 | A kind of mechanical hand wafer centring means and method |
| CN104635656A (en) * | 2013-11-14 | 2015-05-20 | 沈阳新松机器人自动化股份有限公司 | Vacuum transmission control system |
| CN108227508A (en) * | 2016-12-15 | 2018-06-29 | 中芯国际集成电路制造(北京)有限公司 | Wafer load port efficiency monitoring method |
| WO2023102776A1 (en) * | 2021-12-08 | 2023-06-15 | 成都纽曼和瑞微波技术有限公司 | Mpcvd control system |
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Application publication date: 20130710 |