CN104635433B - External rolling photoetching micro-nano to plane impressing light supply apparatus - Google Patents
External rolling photoetching micro-nano to plane impressing light supply apparatus Download PDFInfo
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- CN104635433B CN104635433B CN201510042147.1A CN201510042147A CN104635433B CN 104635433 B CN104635433 B CN 104635433B CN 201510042147 A CN201510042147 A CN 201510042147A CN 104635433 B CN104635433 B CN 104635433B
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Abstract
The invention discloses a kind of external rolling photoetching micro-nano to plane impressing light supply apparatus, including the ultraviolet light source being arranged at outside drum die and the control circuit that can control described light source light photograph Strength Changes, ultraviolet light source includes parabolic shape lampshade, ultraviolet lamp tube, convex lens post, ultraviolet lamp tube position adjustment unit, convex lens post position adjustment unit and ultraviolet light source angle adjusting；Intensity control part includes incremental optical-electricity encoder, phase demodulation and amplifying circuit and ultraviolet lamp tube, it is achieved intensity of illumination changes with rolling print-out rate change；Ultraviolet light source angle adjusting, ultraviolet lamp tube position adjustment unit, convex lens post position adjustment unit, drum die surface is realized parallel with convex lens post focal line with the tangent line of substrate by adjustment, and distance is the nearest more good, but the light of ultraviolet light source can not fall on roll printing die surface.The present invention make that cylinder makes small but excellent really, improve machining accuracy and the crudy of workpiece pattern of mould.
Description
Technical field
The invention belongs to micro-nano manufacturing technology, a kind of external rolling photoetching micro-nano to plane impressing light supply apparatus.
Background technology
At present, in photoetching stamping technique, for increasing the scope of application of mould in imprinting apparatus and improving in given substrate area
Characteristic density, has promoted immersion lithographic and the development of extreme ultraviolet lithography, but their price is the most fairly expensive.
Photoetching impressing is by the imprint patterns on impression block to substrate, this technology not only economy but also reliable, and can obtain less
Geometric properties.The advantage of this technology is on impression block that the density of characteristic pattern determines its resolution, and unrestricted
Transmitting wavelength or the pore size of optical projection system in radiation source.
The Chinese patent (application number: 201410101905.8) of applicant's earlier application discloses a kind of rolling and imprints plane photoetching
Medium ultraviolet lamp source structure, including ultraviolet light source and the control circuit that described light source light photograph Strength Changes can be controlled, described
Ultraviolet light source includes parabolic shape lampshade, ultraviolet lamp tube and convex lens post, and described ultraviolet lamp tube is arranged on the throwing of described lampshade
On thing line focus, through the reflection of parabolic shape lampshade, will form a branch of parallel beam of light, convex lens post is arranged on throwing
The opening part of object plane, parallel beam of light pools straight line, convex lens at its focal point after the refraction action of convex lens post
One focus of post is on the machining area that plane formula photoetching is imprinted by rolling, and namely the focus of convex lens post is positioned at drum die
On the tangent line of surface and substrate；Between described ultraviolet light source and the mandrel of drum die when roller impressing mould rotates around mandrel,
Holding position is constant.
Ultraviolet source structure to be placed in narrow and small drums inside by this patent application, makes that whole device is extremely complex, heat radiation is tired
Difficulty, causes the deformation of expanding with heat and contract with cold of cylinder and mould, thus has a strong impact on machining accuracy, the most also to the intensity of mold materials,
Wearability and light transmission etc. are proposed requirements at the higher level, it is achieved get up difficult.
Summary of the invention
It is an object of the invention to as overcoming above-mentioned the deficiencies in the prior art, it is provided that a kind of external rolling photoetching micro-nano to plane imprints
Light supply apparatus, can make that cylinder makes small but excellent really thus improves machining accuracy and the crudy of workpiece pattern of mould,
Reduce the requirement to mold material, cost-effective, increase the life-span of ultraviolet source lamp；Can also be according to the work of photoetching marking press
Make speed, the irradiating angle of the whole light source of cylinder size adjustment of the light intensity of adjustment light source, and foundation automatically and the position of convex lens,
External ultraviolet source is made to adapt to the impression cylinder of different-diameter.
For achieving the above object, the present invention uses following technical proposals:
A kind of external rolling photoetching micro-nano to plane impressing light supply apparatus, including the ultraviolet light source being arranged at outside drum die
With can control described light source light according to the control circuit of Strength Changes, described ultraviolet light source includes parabolic shape lampshade, ultraviolet
Fluorescent tube, convex lens post, ultraviolet lamp tube position adjustment unit, convex lens post position adjustment unit and ultraviolet light source angle adjustment
Unit；
Described ultraviolet light source angle adjusting includes the rotary shaft connected for parabolic shape lampshade top movable, this rotary shaft
Two ends are fixed on fuselage biside plate, and fuselage side plate is fixed with two and adjusts circular arc with fuselage center for symmetrical light-source angle
Plate, parabolic shape lampshade is fixed on two light-source angles symmetrically and adjusts between arc plate, and each light-source angle adjusts arc plate
Middle part all have one along the symmetrical arc groove of described arc plate centrage, arc groove is provided with and is connected to parabolic shape lampshade
First connector of side plate.
The hole of sub-circular, whole external rolling photoetching micro-nano to plane impressing light supply apparatus just peace is had on the biside plate of fuselage
It is contained in inside this hole；
Described convex lens post position adjustment unit includes the two couples upper and lower clamping block for fixing convex lens post two ends, every pair upper,
Lower clamping block both sides are respectively arranged with a screw and fix, and are clamped by convex lens post, simultaneously in the both sides of convex lens post clamping block with convex lens
Centrage be symmetrical layout four to urges bolt, print the distance of working area to rolling for adjusting convex lens post centrage.Adjust
Time whole, first unclamping four pairs of urges bolt that convex lens post corner is arranged on clamping block, four push away bolt (g) and tighten together, are
The distance of convex lens post to working area is adjusted near；Four pressures bolt (a) are tightened together, are by the distance of convex lens post to working area
Adjust remote.After finally adjusting, drum die surface to be made is parallel with the focal line of the tangent line of substrate and convex lens post, and these two parallel
Distance between line is the nearest more good, but the light of ultraviolet light source can not fall on rolling impressing mould；
Described control circuit includes incremental optical-electricity encoder, phase demodulation and amplifying circuit, and described incremental optical-electricity encoder is the most solid
It is scheduled on after the driving motor of band mold drum, when controller drives motor rotation, is fixed on motor increment type below
The coding disk of photoelectric encoder will rotate, be contained in the photoelectric cell of coding disk side just have photoactive voltage produce (if electricity
Electric current is just had to occur if formation closed-loop path, road), the light-dependent current signal in this encoder is put through phase demodulation and power amplification circuit
After great, as the power supply of ultraviolet light source fluorescent tube, it be used for controlling the intensity of light, thus can make the illumination of ultraviolet light source
Intensity changes with the rotating speed of drum die and changes, and the biggest intensity of illumination of rotating speed of drum die is the strongest；
Described ultraviolet lamp tube position adjustment is to be completed by the adjustment backing plate being arranged at after uviol lamp base, ultraviolet lamp tube just peace
Being loaded in uviol lamp base, ultraviolet lamp tube is installed on parabolic shape by tube face and adjustment backing plate behind and fastening screw
On its focal point of lampshade.Existence due to foozle so that the centrage deviate more or less from parabolic of ultraviolet lamp tube
The focal line of face type lampshade, by the adjustment backing plate after processing tube face, makes described parabolic shape lampshade focal line and fluorescent tube center
Line is coaxial, if actual error is excessive, the light of parabolic shape lampshade injection is being not parallel beam of light, affects follow-up convex lens
The focusing of mirror post and the crudy of product.If the adjusting pad regulation of monoblock does not reaches requirement, adjusting pad can be cut into segment,
Adjust piecemeal and make up to required axiality, again uviol lamp base fixed screw is tightened after adjusting；
And be fixed on and drive the shaft coupling of the motor other end that the cylinder equipped with impressing mould will be driven to roll across with semi-solid photosensitive
The substrate of medium, convex pattern characteristics and female pattern feature will be stayed on semi-solid photosensitive medium antithesis, and whole lining
The end is to move together with workbench feed mechanism, and the instantaneous space rate of workbench feed mechanism and impressing mould are in operating position
Instantaneous linear velocity be equal, thus realize the rolling moulding process to plane of whole external light source photoetching marking press.
The present invention is earlier application " roll and plane photoetching is imprinted medium ultraviolet lamp source structure " (application number: 201410101905.8)
On the basis of grow up, it is external by ultraviolet source, not only avoid original application and ultraviolet source structure to be placed in narrow and small
Drums inside, make that whole device is extremely complex, heat radiation difficulty, cause the deformation of expanding with heat and contract with cold of cylinder and mould, thus sternly
Ghost image rings machining accuracy, the most also intensity, wearability and the light transmission etc. of mold materials is proposed requirements at the higher level, it is achieved
Get up difficult.
The ultraviolet source structure of the present invention can make that cylinder makes small but excellent really, thus improve machining accuracy and the work of mould
The crudy of part pattern, reduces the requirement to mold material, has saved cost, adds the life-span of ultraviolet source lamp.
Also according to the operating rate of photoetching marking press, can automatically adjust the light intensity of light source, and according to the whole light source of cylinder size adjustment
Irradiating angle and the position of convex lens, make external ultraviolet source adapt to the impression cylinder of different-diameter, allow after impressing half solid
Body photosensitive medium just departed from the irradiation contacting the line source that just can be focused on of cylinder and solidify.
The operation principle of the present invention:
After semi-solid photosensitive medium is laid on rolling imprinted substrate, just this substrate is placed on rolling photoetching micro-nano to plane impressing
Fixing in the feed station of machine, the feed mechanism of machine starts to move to processing district, and the most whole rolling impressing mould device is the most downward
Motion, after feed mechanism enters into working area, rolling impressing mould just pressure (this pressure is changeless) is solid to band half
On the substrate of body photosensitive medium, the cylinder of at this moment band rolling impressing mould starts to rotate under the drive driving motor, and feed station fills
Put and be synchronized with the movement with mould with rolling imprinted substrate, during whole rolling print, the instantaneous straight line of feed mechanism should be kept
In speed and cylinder, the instantaneous linear velocity of impressing mould is equal, and is fixed on driving motor incremental optical-electricity encoder below
Coding disk will and then drive motor to rotate, be contained in the photoelectric cell of coding disk side just have photoactive voltage produce (if
Circuit just has electric current to occur if forming closed-loop path), the light-dependent current signal in this encoder is through phase demodulation and power amplification circuit
After amplification, as the power supply of ultraviolet light source fluorescent tube, it is used for controlling the intensity of light, thus can make the light of ultraviolet light source
Changing with the rapid change of drum die according to intensity, the biggest intensity of illumination of speed of drum die is the strongest；And be fixed on and drive
The shaft coupling of the galvanic electricity machine other end will drive the cylinder equipped with impressing mould to roll across the substrate with semi-solid photosensitive medium, special
Levy pattern to be left in semi-solid medium, and whole substrate is to be moved together by feed mechanism, the instantaneous straight line of feed mechanism
In speed and cylinder, the instantaneous linear velocity of imprinting position is equal, thus the rolling realizing whole external light source photoetching marking press is right
Plane moulding process.After rolling print completes, whole rolling impression cylinder lifts, and mould goes back to zero-bit, and feed mechanism returns to simultaneously
Feeding position, unloads the most embossed good substrate work pieces, changes the new substrate work pieces that the next one is to be imprinted, repeats above-mentioned mistake
Journey.
Ultraviolet light can be focused on the characteristic pattern medium imprinted by the light source of the present invention, and light source radiating angle and convex lens
Position can regulate according to the size of cylinder so that the position of illumination curing is suitably adjusted, increase rolling to flat
The subject range of face photoetching imprinting apparatus.This rolling imprints external ultraviolet source structure to plane photoetching, it is common that will imprint
Semi-solid photosensitive medium be laid in rolling imprinted substrate on, then allow the impressing mould with characteristic pattern roll across this substrate (pressure
Die tool is secured on outer surface of cylinder) so that slide without relative successively with semi-solid medium in the patterned features surface of mould
Ground contact, stays on semi-solid medium surface, immediately after by this external ultraviolet source by the characteristic pattern of impressing grinding tool
Irradiate so that the media cures being stamped, obtain required self-supporting patterned layer.Requirement to ultraviolet source is: work as impressing
After mould rolls across substrate, the semi-solid medium with characteristic pattern that solidified imprinting mould is rolled across, and roll across according to medium
Speed gives enough light intensity so that it is be fully cured, and has no effect on the most patterned working media.
The present invention includes ultraviolet light source and can control the control circuit of described light source intensity of illumination, and ultraviolet light source includes throwing
Object plane type lampshade, ultraviolet lamp tube, convex lens post and position tunable arrangement thereof and whole ultraviolet light source angle adjusting device are purple
Outer fluorescent tube is just arranged on the focal line of described parabolic shape lampshade, through the reflection of parabolic shape lampshade, will form one
Bundle parallel beam of light, convex lens post is just arranged on the opening part of described paraboloidal lampshade, and parallel beam of light is through the folding of convex lens post
Pooling straight line at its focal point after penetrating effect, this focal line of convex lens post just falls after plane photoetching is imprinted by rolling
Just departed from on the semi-solid photosensitive medium of cylinder contact, say, that light source finally converge into straight line fall rolling to plane
On patterned semi-solid substrate after photoetching impressing, this line is parallel with the tangent line on drum die surface and substrate, certainly this two
Distance between bar parallel lines is the nearest more good, but not to fall on the mould of rolling print as principle with the light of ultraviolet light source；
After mould size determines, it is necessary to adjust angle and the focal line of convex lens post of described light supply apparatus, it is ensured that two parallel
Between line, the distance of (i.e. the tangent line of drum die surface and substrate and the focal line of convex lens post) is the nearest more good, and uviol lamp
The light of light source does not fall on mould.This device just need to keep constant once after adjusting, but after cylinder changes, just needs
Readjust.The most a set of rolling imprints external ultraviolet light source device to plane photoetching and adapts to different specification size
Cylinder.
The controlable electric current of light source intensity of illumination, including incremental optical-electricity encoder, phase demodulation and amplifying circuit, described increment type light
Photoelectric coder is secured to after the driving motor of cylinder, when controller drives motor rotation, is fixed on motor below
The coding disk of incremental optical-electricity encoder will follow synchronous rotary, and the photoelectric cell being contained in coding disk opposite side just has photosensitive
Voltage (if circuit forms closed-loop path and just has electric current to occur), the light-dependent current signal in this encoder is through phase demodulation and merit
After rate amplifying circuit amplifies, as the power supply of ultraviolet light source fluorescent tube, it is used for controlling the intensity of light, thus can make ultraviolet
The intensity of illumination of lamp source changes with the rapid change of drum die, and the biggest intensity of illumination of speed of drum die is the strongest；
And be fixed on and drive the shaft coupling of the motor other end that the cylinder equipped with impressing mould will be driven to roll across with semi-solid photosensitive medium
Substrate, characteristic pattern is left in semi-solid medium, and whole substrate is to be moved together by feed mechanism, feed mechanism
Instantaneous space rate and cylinder on the instantaneous linear velocity of impressing mould be equal, thus the rolling realizing whole external light source is right
The moulding process of plane photoetching marking press.
In the present invention, the ultraviolet lamp tube outside cylinder is placed on the position of parabolic shape lampshade focal line, through parabolic shape lamp
The reflection of cover, will form a branch of parallel beam of light.In the exit of parabolic shape lampshade equipped with the convex lens of position adjustable
Post, such parallel beam of light is by will pool straight line after the refraction action of convex lens post at its focal line.Pool straight
The luminous energy of line is in the inswept semi-solid medium with rolling impressing mould pattern characteristics of a certain distance so that it is solidification, the most also makes
Unprocessed ultraviolet semi-solid medium is not affected.The design of this kind of light path can not only meet rolling in plane photoetching impressing
The requirement of light source, and can make whole device that the efficiency of light energy utilization of ultraviolet source is greatly improved, and because whole device is cloth
Put outside cylinder, improve heat dispersion, add the life-span of ultraviolet source lamp, reduce deformation of expanding with heat and contract with cold to processing
The impact of precision.
Being placed on by ultraviolet tube on parabolic shape lampshade focal line, convex lens post is just arranged on the open front of parabolic shape lampshade,
And convex lens post can adjust to the distance of ultraviolet tube, say, that the distance of convex lens to working area can be according to rolling print
The size of cylinder is adjusted, it is achieved the half of the band pattern characteristics that a focal line of convex lens falls after cylinder imprints just is solid
On body medium, focal line is parallel with the tangent line on drum die surface and substrate, irradiates through ultraviolet light and realizes solidification, finally can obtain
Patterned layer to self-supporting.
Depending on the size of parabolic shape lampshade opening will be according to the size of convex lens post width and parabola focal length, General Parabolic face type
Lampshade opening outline is less than convex lens post width, but convex lens post width is greater than the width at installing port, it is ensured that convex lens
There are suitable adjustment amount, and the selection ultraviolet lamp tube to be enabled to of parabola focal length in post center to the distance of parabola focal length
Be placed on the focal line of parabolic shape lampshade, i.e. the radius of fluorescent tube is less than parabola focal length, simultaneously in the adjustment to be added of the lamp socket back side
Pad, segmentation adjusts and makes whole fluorescent tube centrage accurately overlap with the focal line of parabolic shape lampshade.As for convex lens post center to throwing
The distance of thing line focal length, will determine the distance in plane photoetching stamp work district to rolling according to external micro-nano photoetching impressing light source,
Guarantee that drum die surface is parallel with the focal line of convex lens post with the tangent line of substrate, and line-to-line is away from the nearest more good, but ultraviolet
The light of lamp source can not fall on mould, prevents the semi-solid photosensitive medium light remaining on mould from irradiating and is solidificated in mould
On, thus affect the crudy of workpiece.So basic configuration and size of parabolic shape lampshade is assured that.
Ultraviolet light to be just radiated in the semi-solid medium of the ultraviolet curable after rolling print, it is impossible to is radiated at and rolls
Print is with on the working media not rolled, and planoconvex lens post reflects the face that the ultraviolet light pooled stays on substrate under normal circumstances
Long-pending the smaller the better (ideally straight line), so convex lens post can adjust to the distance of illumination working area, so makes
Ultraviolet light through convex lens post reflect, at focal line formed straight line just fall rolling just after on set a distance.
Realize the very first time ultraviolet light after rolling over to be radiated in semi-solid medium to be solidified, with regard to energy after cylinder completes rolling print
Being formed as soon as possible can the patterned layer of self-supporting.
Ultraviolet source is placed on outside cylinder, and mould is no longer required for being light transmissive material, the size of cylinder and light source fluorescent tube size the most not shadow
Ring, improve the heat dispersion of total, so that the quality of processing is readily obtained guarantee.
During rolling print, the ultraviolet light that ultraviolet lamp tube sends is through the reflection of parabolic shape lampshade and the refraction of convex lens post
Converge and form straight line, this straight line just and one straight after rolling just on set a distance, it is achieved solidification.Whole
Individual external rolling is can be according to rolling to irradiating angle and its convex lens post position therein of the ultraviolet light source apparatus that plane photoetching imprints
Cylinder size adjusts, and the suitable irradiating angle adjusting ultraviolet light source apparatus and convex lens, to the distance of illumination working area, change
Darkening line gathers the position handing over into line, it is achieved the very first time after semi-solid medium rolls over is irradiated by ultraviolet light and solidifies, shape
One-tenth can the patterned layer of self-supporting.
The present invention according to the rotating speed of cylinder, can adjust the intensity of illumination of ultraviolet source, and the rotating speed of cylinder is the biggest, i.e. feed mechanism
Instantaneous space rate the biggest, the time of illumination is the shortest, and required intensity of illumination will be the strongest；The rotating speed of cylinder is the least,
The i.e. instantaneous space rate of feed mechanism is the least, and the time of illumination is the longest, and the intensity of illumination of required ultraviolet source is the most weak.To increase
Amount formula photoelectric encoder is connected with motor shaft, and is ordered about by electric machine rotation, the signal of output through phase demodulation and power amplifier,
Being re-used as the power supply of ultraviolet light source, the size of such rotating speed just controls the power of output signal, and then controls the strong of light source
Degree.The irradiating angle of the most whole light source can adjust according to cylinder size, simultaneously the present invention also realize the position of convex lens can
Adjust, make the focal line very first time of convex lens post fall in semi-solid medium to be solidified, just can be to the greatest extent after cylinder completes rolling print
Formed soon can the patterned layer of self-supporting, complete high-quality rolling to plane photoetching coinging.
Accompanying drawing explanation
The external light source of Fig. 1 rolls photoetching marking press fundamental diagram micro-nano to plane；
The external light source of Fig. 2 rolls photoetching micro-nano to plane impressing light path principle；
The external light source of Fig. 3 rolls the photoetching marking press intensity of light source micro-nano to plane can control principle.
The external light source of Fig. 4 rolls photoetching marking press structure micro-nano to plane；
The external light source of Fig. 5 rolls photoetching micro-nano to plane impressing angle adjustment arc plate and fixes (the B-B section view of Fig. 4)；
The external light source of Fig. 6 rolls photoetching micro-nano to plane impressing light-source structure (the A-A section view of Fig. 4)；
The external light source of Fig. 7 rolls the fixed structure (the C-C section view of Fig. 6) of photoetching micro-nano to plane impressing convex lens post；
The external light source of Fig. 8 rolls photoetching micro-nano to plane impressing convex lens post to be stepped up to adjust the bolt position (K of Fig. 6 with pushing
Direction view).
Wherein: 1, rolling impressing mould；101, convex pattern characteristics；102, female pattern feature；2, cylinder；3, bonding
Layer；4, ultraviolet light source；5, parabolic shape lampshade；6, convex lens post；7, convex lens position adjustment assembly (is by zero
Part 6,24,25,26, a and g assemble)；8, encoder light source；9, encoder condenser lens；10, coding disk；
11, slit diaphragm；12, photoelectric cell；13, amplifying circuit；14, workbench feed mechanism；15, cylinder feed mechanism；
16, fuselage side plate；17, light-source angle adjusts arc plate；18, parabolic shape lampshade assembly (be by part 4,5,19,
20,21,22,23 and s assemble)；19, parabolic shape lampshade side plate；20, side plate and the connection of parabolic shape lampshade
Screw；21, parabolic shape lampshade rotary shaft back-up ring；22, uviol lamp base；23, uviol lamp base adjusting pad plate；24、
Aluminium alloy convex lens post upper clamping block；25, block is clamped under aluminium alloy convex lens post；26, aluminium alloy clamping block screw；27、
Workbench；28, incremental optical-electricity encoder (being to be assembled by part 8,9,10,11 and 12)；H, semi-solid light
Sensitive media；F, parabola focal line；D, the opening of parabolic shape lampshade；f2, concave lens focus；D, light-source angle adjust sliding
Groove and traveller；S, rotary shaft；A, pressure bolt；G, push away bolt.
Detailed description of the invention
The invention will be further described below in conjunction with the accompanying drawings.
External light source rolls the operation principle of photoetching marking press micro-nano to plane
A kind of external light source rolls the operation principle of photoetching marking press micro-nano to plane as shown in Figure 1: as semi-solid photosensitive medium h
After being laid on rolling imprinted substrate, just it is placed on this substrate to roll and fixes on the workbench 27 of photoetching marking press micro-nano to plane,
The workbench feed mechanism 14 of machine starts to move to processing district.The most whole rolling impressing mould 1 device is sent into machine by cylinder
Structure 15 also moves downward, and after rolling impressing mould 1 enters into working area, (this pressure is fixing to rolling impressing mould 1 just pressure
Constant) on the substrate of band semisolid photosensitive medium h, at this moment (this mould is bonded in rolling impressing mould 1 by tack coat 3
On cylinder 2 form drum die) cylinder 2 drive motor drive under start rotate (Fig. 1 designates cylinder 2
Direction of rotation), workbench feed mechanism 14 is synchronized with the movement with mould with rolling imprinted substrate and (designates straight line fortune in Fig. 1
Dynamic direction).
Wherein, workbench 27, workbench feed mechanism 14, rolling impressing mould 1 and cylinder feed mechanism 15 are existing
Device, does not repeats them here.
During whole rolling print, impressing mould on the instantaneous space rate of workbench feed mechanism 14 and cylinder 2 should be kept
Instantaneous linear velocity be equal, and be fixed on and drive the coding disk 10 of motor incremental optical-electricity encoder 28 below will be with
Driving motor to rotate, be contained in the photoelectric cell 12 of coding disk 10 and slit diaphragm 11 side just have photoactive voltage produce (as
Really circuit just has electric current to occur if forming closed-loop path), the light-dependent current signal in this encoder is through phase demodulation and power amplification electricity
After road 13 is amplified, as the power supply of ultraviolet light source fluorescent tube 4, it is used for controlling the intensity of light, thus can make ultraviolet light
The intensity of illumination in source changes with the rapid change of drum die, and the biggest intensity of illumination of speed of drum die is the strongest.
And be fixed on and drive the shaft coupling of the motor other end that the cylinder 2 equipped with impressing mould will be driven to roll across with semi-solid light
The substrate of sensitive media, characteristic pattern (convex pattern characteristics 101 and female pattern feature 102) is left in semi-solid photosensitive medium
On h, and whole substrate is to be moved together by workbench feed mechanism 14, the instantaneous space rate of workbench feed mechanism 14
It is equal with the linear velocity of imprinting position on cylinder, thus plane is imprinted by the rolling realizing whole external light source photoetching marking press
Process.After rolling print completes, whole rolling impression cylinder 2 lifts, and mould goes back to zero-bit, simultaneously workbench feed mechanism 14 times
To feeding position, unload the most embossed good substrate work pieces, change the new substrate work pieces that the next one is to be imprinted, repeat above-mentioned
Process.
The present invention is described further in terms of three, respectively below in conjunction with Fig. 2 to Fig. 7 and embodiment: roll flat
The micro-nano photoetching in face imprints external light source part (principle is as shown in Figure 2), control part (principle such as figure of light source intensity of illumination
Shown in 3) and adjustment member.And adjustment member is divided into: the angle adjusting of photoetching impressing light source is (as shown in Figure 4,
Shown in Fig. 5 and shown in Fig. 6), lamp strip position adjustment unit (as shown in Figure 5) and the position adjustment unit of convex lens post focal line
(as shown in Figure 6 with shown in Fig. 7).
1, photoetching micro-nano to plane impressing light source part is rolled
A kind of external rolling photoetching micro-nano to plane impressing light source, its principle is as in figure 2 it is shown, include ultraviolet lamp tube 4, parabola
Type lampshade 5, convex lens post 6, convex lens position adjustment assembly 7 and whole ultraviolet light source angle adjusting device, described ultraviolet
Fluorescent tube 4 is just arranged on its focal point f of described parabola lampshade, through the reflection of parabolic shape lampshade 5, and will
Forming a branch of parallel beam of light, convex lens post 6 is just arranged at the opening D of described paraboloidal lampshade, and parallel beam of light is through excess convexity
At concave lens focus f after the refraction action of lens post2Place pools straight line, and this focal line of convex lens post just falls right in rolling
Plane photoetching impressing after just depart from on the semi-solid photosensitive medium h of cylinder contact, say, that light source finally converges into one
Bar straight line falls on the patterned semi-solid substrate after plane photoetching is imprinted by rolling, this line and drum die surface and substrate
Tangent line is parallel, and the distance between these two parallel lines is the nearest more good certainly, but not to fall at mould with the light of ultraviolet light source
Upper for principle；After mould size determines, it is necessary to adjust the irradiating angle (as shown in Figure 4, Figure 5 and Figure 6) of described light source
Focal line (the convex lens during as shown in Figure 6 and Figure 7, the part-structure of this two figure is just arranged on schematic diagram 2 with convex lens post 6
On mirror position adjustment assembly 7 position), it is ensured that between two parallel lines (i.e. the tangent line of drum die surface and substrate with
The focal line of convex lens post 6) distance the nearest more good, and the light of ultraviolet light source 4 do not falls on mould.This device
Just need to keep constant once after adjusting, after cylinder 2 changes, it is necessary to readjust.The most a set of rolling is to plane
Photoetching imprints external ultraviolet light source device and adapts to the cylinder of different specification size.
2, the control part of light source intensity of illumination
The controlable electric current of light source intensity of illumination, as it is shown on figure 3, include incremental optical-electricity encoder (it be by encoder light source 8,
Condenser lens 9, coding disk 10, slit diaphragm 11, photoelectric cell 12 form), amplifying circuit 13 and ultraviolet lamp tube 4.Described
Incremental optical-electricity encoder is secured to after the driving motor of cylinder 2, when controller drives motor rotation, is fixed on
The coding disk 10 of motor incremental optical-electricity encoder below will synchronous rotary, be contained in the photoelectric cell of coding disk 10 side
12 just have photoactive voltage produces (if circuit forms closed-loop path and just has electric current to occur), the photosensitive electricity in this encoder
Stream signal is after phase demodulation and power amplification circuit 13 amplify, and as the power supply of ultraviolet light source fluorescent tube 4, is used for controlling the strong of light
Degree, thus can make the intensity of illumination of ultraviolet light source change with the rotating speed of drum die and change, the rotating speed of drum die
The biggest intensity of illumination is the strongest；And be fixed on and drive the shaft coupling of the motor other end that the cylinder equipped with impressing mould will be driven to roll
Crossing the substrate with semi-solid photosensitive medium, convex pattern characteristics 101 and female pattern feature 102 will stay half antithesis
On solid photosensitive medium, and whole substrate is to move together with workbench feed mechanism 14, the wink of workbench feed mechanism 14
Time space rate and the impressing mould instantaneous linear velocity in operating position be equal, thus realize whole external light source photoetching pressure
The rolling of the print machine moulding process to plane.
3, adjustment member
1) angle adjusting of photoetching impressing light source
After semi-solid photosensitive medium h is laid on rolling imprinted substrate, just this substrate is placed on rolling photoetching pressure micro-nano to plane
Fixing on the workbench of print machine, the workbench feed mechanism 14 of machine starts to move to processing district, the most whole rolling impressing mould
Also moved downward by the driving of cylinder feed mechanism 15, after cylinder feed mechanism 15 enters into working area, roll impressing mould
Just pressing (this pressure is changeless) to the substrate of band semisolid photosensitive medium, at this moment band rolls impressing mould (this mould
Tool be bonded on cylinder 2 by tack coat 3) cylinder 2 drive motor drive under start rotate (Fig. 1 designates
The direction of rotation of cylinder), feed station device is synchronized with the movement with rolling imprinted substrate and mould and (designates linear motion in Fig. 1
Direction), whole rolling print during, characteristic pattern (convex pattern characteristics 101 and female pattern feature 102) just stays
In semi-solid medium.
Owing to the cylinder of rolling print varies, a fixing light source radiating angle is to meet wanting of cylinder size variation
Ask, devise light source radiating angle adjustable apparatus for this, be specifically shown in Fig. 4, Fig. 5 and Fig. 6.During adjustment, first unclamp Fig. 4
Middle light-source angle adjusts chute and traveller d place light-source angle adjusts the adjustment screw on arc plate chute (on fuselage side plate 16
Arc plate 17 is adjusted by the fixed light-source angle of screw), adjust chute due to light-source angle and traveller d place light-source angle is adjusted
Whole slide way mechanism is arranged symmetrically with about parabolic shape lampshade assembly 18 both sides, so must unclamp on both sides when adjusting screw simultaneously
(this screw is to be tightened on parabolic shape lampshade side plate 19, and parabolic shape lampshade side plate 19 is by side plate and parabola
The attachment screw 20 of type lampshade is fixed on parabolic shape lampshade 5), then allow parabolic shape lampshade 5 rotate around rotary shaft s
(here parabolic shape lampshade 5 around rotary shaft s be to be fixed on fuselage side plate by parabolic shape lampshade rotary shaft back-up ring 21
On 16), the tangent line making drum die surface and substrate is the nearest more good with the distance of convex lens post focal line, and ultraviolet light source
Light does not fall on mould.Change a cylinder and will adjust once this angle, adjust a convex lens post focal line the most again
Position.By angle adjustment and the position adjustment of convex lens post focal line of photoetching impressing light source, it is ensured that between two parallel lines
The distance of (i.e. the tangent line of drum die surface and substrate and the focal line of convex lens post) is the nearest more good, and ultraviolet light source
Light does not fall at mould.
2), lamp strip position adjustment unit
The position at fluorescent tube centrage place must be consistent with parabolic shape lampshade focal line, due to foozle, can make both
Between existence error more or less, inconsistent, in ultraviolet with described parabolic shape lampshade focal line in order to reduce fluorescent tube centrage
Tube face 22 adds uviol lamp base adjusting pad plate 23 (as shown in Figure 6) below, must be designed by this backing plate during design
Sufficiently thick, by grinding adjusting pad thickness, make described parabolic shape lampshade focal line and fluorescent tube centrage coaxiality error exist
Within 0.06mm, if actual error is excessive, the light of parabolic shape lampshade injection is being not parallel beam of light, affects follow-up
The focusing of convex lens post and the crudy of product.If the adjusting pad regulation of monoblock does not reaches requirement, adjusting pad can be cut into
Segment, adjusts piecemeal and makes up to required axiality, tightened by uviol lamp base fixed screw after adjusting.
3), the position adjustment unit of convex lens post focal line
Adjust the position of ultraviolet source fluorescent tube, it is ensured that a just parallel beam of light of parabolic shape lampshade injection, should
Parallel light focusing become focal line can just fall rolling print working region, and with drum die surface and the tangent line of substrate
Parallel it is necessary to realized by the position adjustment of convex lens post focal line, Fig. 6, Fig. 7 and Fig. 8 just specifically describe convex lens post
The clamping of 6 and the position adjustment of convex lens post 6.Wherein convex lens post 6 be by two aluminium alloy convex lens post upper clamping blocks 2,
Clamping is realized with clamping block 25 under two aluminium alloy convex lens posts and four pinching screws 26.As for convex lens post 6
Position adjustment realizes by four groups of urges bolt that (these four groups of urges bolt are arranged symmetrically in the aluminum of 6 four jiaos of convex lens post
On alloy clamping block), wherein, push away bolt g ratio and press the bolt a center away from convex lens post 6.Push away bolt g and pressure bolt a
One end be all rotatably connected on parabolic shape lampshade side plate 19.Here the bolt g that pushes away is used to adjust nearly convex lens post to rolling print work
Make the distance in district, i.e. adjust remote convex lens post 6 to ultraviolet source fluorescent tube distance；And press bolt a to be used to adjust remote convex lens post
To the distance of rolling print working area, i.e. adjust nearly convex lens post to ultraviolet source fluorescent tube distance.Guarantee between two parallel lines (i.e.
Drum die surface and the tangent line of substrate and the focal line of convex lens post) distance the nearest more good, and the light of ultraviolet light source
Do not fall at mould.
These three adjusts the set-up procedure of structure: advanced portable lighter pipe position adjustment, it is achieved parabolic shape lampshade focal line and fluorescent tube
Centrage coaxiality error is within 0.06mm；Then angle and the convex lens of photoetching impressing light source are the most alternately and repeatedly adjusted
The position of mirror post focal line, it is ensured that between two parallel lines (i.e. the tangent line of drum die surface and substrate and the focal line of convex lens post)
Distance the nearest more good, and the light of ultraviolet light source do not falls on mould.
Light source after so adjusting, it is possible to realize rolling photoetching micro-nano to plane and be embossed.
Although the detailed description of the invention of the present patent application is described by the above-mentioned accompanying drawing that combines, but not patent application is protected
The restriction of scope, one of ordinary skill in the art should be understood that on the basis of the technical scheme of patent application, art technology
Personnel need not to pay various amendments or deformation that creative work can make still within the protection domain of patent of the present invention.
Claims (5)
1. external rolling photoetching micro-nano to a plane impressing light supply apparatus, is characterized in that, including being arranged at outside drum die
Ultraviolet light source and described light source light can be controlled according to the control circuit of Strength Changes, described ultraviolet light source includes parabola
Type lampshade, ultraviolet lamp tube, convex lens post, ultraviolet lamp tube position adjustment unit, convex lens post position adjustment unit and uviol lamp
Light-source angle adjustment unit；
Described ultraviolet light source angle adjusting includes the rotary shaft connected for parabolic shape lampshade top movable, this rotary shaft
Two ends are fixed on fuselage biside plate, and fuselage side plate is fixed with two and adjusts circular arc with fuselage center for symmetrical light-source angle
Plate, parabolic shape lampshade is fixed on two light-source angles symmetrically and adjusts between arc plate, and each light-source angle adjusts arc plate
Middle part all have one along the symmetrical arc groove of described arc plate centrage, arc groove is provided with and is connected to parabolic shape lampshade
First connector of side plate；
Described convex lens post position adjustment unit includes the two couples upper and lower clamping block for fixing convex lens post two ends, every pair upper,
Lower clamping block both sides are respectively arranged with a screw and fix, and are clamped by convex lens post, simultaneously in the both sides of convex lens post clamping block with convex lens
Centrage is for being arranged symmetrically four pairs of urges bolt, for adjusting the convex lens post centrage distance to rolling print working area；
Described control circuit includes that incremental optical-electricity encoder, phase demodulation and amplifying circuit, described incremental optical-electricity encoder are fixed
After the driving motor of drum die, when controller drives motor rotation, it is fixed on motor increment photoelectric below
The coding disk synchronous rotary of encoder, the photoelectric cell being contained in coding disk side has photoactive voltage to produce, and circuit is formed and closes back
Road just has electric current to occur, this current signal is after phase demodulation and power amplification circuit amplify, as the power supply of ultraviolet light source fluorescent tube,
It is used for controlling the intensity of light, the intensity of illumination of ultraviolet light source thus can be made to change with the rotating speed of drum die and change,
The biggest intensity of illumination of rotating speed of drum die is the strongest.
External rolling the most as claimed in claim 1 photoetching micro-nano to plane impressing light supply apparatus, is characterized in that, be fixed on driving
The shaft coupling of the motor other end drives the cylinder equipped with impressing mould to roll across the substrate with semi-solid photosensitive medium, convex pattern
Stay on semi-solid photosensitive medium feature and female pattern feature antithesis, and whole substrate is together with workbench feed mechanism
Motion, instantaneous space rate and the impressing mould instantaneous linear velocity in operating position of workbench feed mechanism are equal, from
And realize the rolling moulding process to plane of whole external light source photoetching marking press.
External rolling the most as claimed in claim 1 photoetching micro-nano to plane impressing light supply apparatus, is characterized in that, described uviol lamp
Pipe position regulator is the adjustment backing plate being arranged at uviol lamp base below.
External rolling the most as claimed in claim 3 photoetching micro-nano to plane impressing light supply apparatus, is characterized in that, ultraviolet lamp tube is pacified
Being loaded in uviol lamp base, ultraviolet lamp tube is installed on parabolic shape by tube face and adjustment backing plate behind and fastening screw
On its focal point of lampshade.
External rolling the most as claimed in claim 1 photoetching micro-nano to plane impressing light supply apparatus, is characterized in that, drum die table
Face is parallel with the focal line of the tangent line of substrate and convex lens post, and the distance between these two parallel lines is the nearest more good, but uviol lamp
Light rolling the to be left impressing mould of light source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510042147.1A CN104635433B (en) | 2015-01-26 | 2015-01-26 | External rolling photoetching micro-nano to plane impressing light supply apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510042147.1A CN104635433B (en) | 2015-01-26 | 2015-01-26 | External rolling photoetching micro-nano to plane impressing light supply apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104635433A CN104635433A (en) | 2015-05-20 |
| CN104635433B true CN104635433B (en) | 2016-08-17 |
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| CN201510042147.1A Expired - Fee Related CN104635433B (en) | 2015-01-26 | 2015-01-26 | External rolling photoetching micro-nano to plane impressing light supply apparatus |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759856A (en) * | 2012-07-17 | 2012-10-31 | 西安交通大学 | Reflection-type long grating process method for laser-assisted roll pressing manufacturing machine tool |
| CN103869609A (en) * | 2014-03-18 | 2014-06-18 | 青岛理工大学 | Roll-to-plane photolithography impressing medium-ultraviolet light source structure |
| CN204422969U (en) * | 2015-01-26 | 2015-06-24 | 青岛理工大学 | External rolling impresses light supply apparatus to the micro-nano photoetching of plane |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100483231B1 (en) * | 2001-11-19 | 2005-04-15 | 주식회사 광성엥글라빙 | Exposing method and device for etching surface of embossing roller to light |
-
2015
- 2015-01-26 CN CN201510042147.1A patent/CN104635433B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759856A (en) * | 2012-07-17 | 2012-10-31 | 西安交通大学 | Reflection-type long grating process method for laser-assisted roll pressing manufacturing machine tool |
| CN103869609A (en) * | 2014-03-18 | 2014-06-18 | 青岛理工大学 | Roll-to-plane photolithography impressing medium-ultraviolet light source structure |
| CN204422969U (en) * | 2015-01-26 | 2015-06-24 | 青岛理工大学 | External rolling impresses light supply apparatus to the micro-nano photoetching of plane |
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| CN104635433A (en) | 2015-05-20 |
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