CN103869609B - Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing - Google Patents
Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing Download PDFInfo
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- CN103869609B CN103869609B CN201410101905.8A CN201410101905A CN103869609B CN 103869609 B CN103869609 B CN 103869609B CN 201410101905 A CN201410101905 A CN 201410101905A CN 103869609 B CN103869609 B CN 103869609B
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Abstract
The invention discloses an ultraviolet lamp light source structure in roll-to-plane photoetching impression, which comprises an ultraviolet lamp light source and a control circuit capable of controlling the illumination intensity change of the light source, wherein the ultraviolet lamp light source comprises a parabolic lampshade, an ultraviolet lamp tube and a convex lens column; the position between the ultraviolet lamp light source and the mandrel of the roller die is kept unchanged; the control circuit comprises an induction coil probe fixedly arranged on a mandrel at one side end face of the roller die, a plurality of permanent magnets which can correspond to the induction coil probe are uniformly arranged on the end face of the roller die, the polarity of the magnetic poles of the permanent magnets is alternately changed, and the induction coil probe is connected with the ultraviolet lamp tube through an amplifying circuit and a rectifying circuit to form a closed loop.
Description
Technical field
The invention belongs to micro-nano manufacturing technology, ultraviolet light source structure during especially a kind of rolling imprints to plane photoetching.
Background technology
At present, in photoetching stamping technique, it is constantly needed to reduce the characteristic size in photoengraving pattern, to improve given
The density of feature in substrate area, due to the continuous growth to higher geometric properties density requirements promoted immersion lithographic and
The development of extreme ultraviolet lithography.But their price is all fairly expensive.
Photoetching impressing is a kind of important channel that can inexpensively obtain smaller geometric properties, and it is usually directed to impression block
On geometrical pattern be transferred on substrate.The advantages of technology is launch wavelength or the projection in the resolution ratio not raying source of feature
The pore size limitation of system, its resolution ratio are primarily limited to the density of the characteristic pattern on impression block.
Plane is two kinds of technologies for realizing micro-nano geometrical pattern transfer to plane formula photoetching impressing to plane formula and rolling, and
Rolling can greatly improve the efficiency of photoetching impressing to planar technique, and it is generally by the curable impressing liquid medium of ultraviolet light（Example
Such as the photoresist of ultraviolet-curing）It is laid on rolling imprinted substrate, then prints the roll-in with characteristic pattern surface
Mould rolls across the substrate with imprintable liquid medium so that and the patterned surface of mould contacts successively with liquid medium, then
Architectural feature on roller impressing mould surface is stayed on substrate, passes through the irradiation of ultraviolet light again afterwards, being stamped medium will send out
Raw solidification, finally can obtain the patterned layer of self-supporting.Requirement for ultraviolet source is：When roller impressing mould rolls across substrate,
Ultraviolet source will can solidify the impressing liquid medium with characteristic pattern that roller impressing mould is rolling across, and can not influence also
Not patterned working media.Current ultraviolet source is different due to design structure, it is difficult to realizes above-mentioned requirements.
The content of the invention
The purpose of the present invention is to overcome above-mentioned the deficiencies in the prior art, there is provided one kind rolling is ultraviolet in being imprinted to plane photoetching
Light source structure, the light source can focus on ultraviolet light on the transparent mold surface of photoetching impressing, improve the utilization ratio of light source；
There can also be formed precision high, molding character is stable according to the operating rate of photoetching marking press, the light intensity of adjust automatically light source.
To achieve the above object, the present invention uses following technical proposals：
Ultraviolet light source structure during one kind rolling imprints to plane photoetching, including ultraviolet light source and the light source can be controlled
The control circuit of intensity of illumination change, the ultraviolet light source includes parabolic shape lampshade, ultraviolet lamp tube and convex lens post, described
Ultraviolet lamp tube is arranged on its focal point of the lampshade, by the reflex of parabolic shape lampshade, will be formed a branch of
Parallel beam of light, convex lens post are arranged on paraboloidal opening, and parallel beam of light is burnt at it after the refraction action of convex lens post
The convergence of point place is in alignment, a focus of convex lens post on the machining area that rolling imprints to plane formula photoetching, that is,
The focus of convex lens post is located on the tangent line of drum die surface and substrate；The mandrel of the ultraviolet light source and drum die it
Between when roller impressing mould rotates around mandrel, holding position is constant；
The control circuit includes the induction coil probe being fixedly installed on the mandrel of drum die one end, and foregoing roller
Uniform and pole polarity is alternately alternatively provided with multiple relative permanent magnets that can be popped one's head in induction coil, sensing in die face
The amplified circuit of coil probe and rectification circuit are connected to form a closed-loop path with ultraviolet lamp tube；Induced electromotive force is by with roller
Caused by the permanent magnet of mould synchronous axial system and fixed induction coil probe cutting magnetic line, when rolling is to plane photoetching pressure
When the roller of print rotates, induced-current, virtual value and the drum die rotating speed of this electric current will be produced in the closed-loop path of coil
Relevant, rotating speed is bigger, and virtual value is bigger, otherwise lower；It can thus cause the intensity of illumination of ultraviolet light source with roller mould
The rotating speed of tool changes and changed, and the bigger intensity of illumination of rotating speed of drum die will be stronger.
Ultraviolet light source structure during one kind rolling imprints to plane photoetching, including ultraviolet light source and the light source can be controlled
The control circuit of intensity of illumination change, the ultraviolet light source includes parabolic shape lampshade, ultraviolet lamp tube and convex lens post, described
One focus of convex lens post and the confocal point of parabolic type lampshade, ultraviolet tube is installed on the confocal point, by parabola
The reflex of type lampshade, will form a branch of parallel beam of light, and convex lens post is arranged on paraboloidal opening, parallel beam of light warp
Another focal point after the refraction action of excess convexity lens post in convex lens post converges in alignment, the straight line and drum die
Periphery and the tangent line of substrate plane overlap；Between the mandrel of the ultraviolet light source and drum die roller impressing mould around
When mandrel rotates, holding position is constant；
The control circuit includes the induction coil probe being fixedly installed on the mandrel of drum die end face, and foregoing
Multiple pole polarities are uniformly installed on drum die end face alternately to change and with the corresponding permanent magnet of induction coil probe can feel
The amplified circuit of coil probe and rectification circuit is answered to be connected to form a closed-loop path with ultraviolet lamp tube；Induced electromotive force is by with rolling
Caused by the permanent magnet and fixed induction coil probe cutting magnetic line of cylinder mould tool synchronous axial system, when rolling is to plane photoetching
When the roller of impressing rotates, induced-current will be produced in the closed-loop path of coil, virtual value and the drum die of this electric current turn
Speed is relevant, and rotating speed is bigger, and virtual value is bigger, otherwise lower；It can thus cause the intensity of illumination of ultraviolet light source with roller
The rotating speed of mould changes and changed, and the bigger intensity of illumination of rotating speed of drum die will be stronger.
The size of the parabolic shape lampshade opening is less than 2 times of drum die inner radials.
The induction coil center probe face permanent magnet.
The end face of the coil probe is with permanent magnet at a distance of 1-2mm.
The amplifying circuit is crystal amplifier, and the output end that its input is popped one's head in induction coil is connected, transistor
Amplifier connects with rectification circuit, it is rectified after electric signal be directly inputted in ultraviolet lamp tube, realize the light of ultraviolet light source
Change with change of the rolling to the drum die rotating speed of plane photoetching impressing by force, complete the light intensity of light source with rolling print speed from
Dynamic regulatory function.
In the present invention, ultraviolet lamp tube is placed on the position of parabolic type lampshade focus, by parabolic shape lampshade
Reflex, a branch of parallel beam of light will be formed.Convex lens post, such parallel beam of light are installed additional in the exit of parabolic shape lampshade
It will be converged after the refraction action of convex lens post in its focal point in alignment.It is inswept successively to converge straight luminous energy
Hydraulic fluid with roller impressing mould pattern characteristics, make its solidification, while the hydraulic fluid in non-processing area will not be by any
Influence.The design of such a lamp can not only meet rolling to plane photoetching imprint in light source requirement, due to ultraviolet light by reflection and
The refraction of convex lens post crosses so that the efficiency of light energy utilization of ultraviolet source greatly improves.
Ultraviolet tube is placed in a focus of parabolic shape lampshade and convex lens post simultaneously, and convex lens post is another
The working interface that one focus should imprint in rolling to plane formula photoetching（That is the imprinting moulding area of roller impressing mould and working media）,
Its ultraviolet light source capacity usage ratio will be higher.Precisely, during practical application, it is also contemplated that quartzy roller, tack coat and
Roll printing mould is finely tuned to the refraction action of light to whole light source position（This fine setting is for a person skilled in the art
Common knowledge, it will not be repeated here）, it is ensured that the light of light source output rolling to plane formula photoetching impressing machining area on, and
And a focus of convex lens post wants confocal point with parabolic type lampshade, the optical energy utilization efficiency of such light source can be higher.
The size D of parabolic shape lampshade opening will be depending on the size of roller internal diameter, convex lens post and ultraviolet lamp tube（This
In determine parabolic shape lampshade opening size D be general knowledge for a person skilled in the art, it is not necessary to creative work, herein
Repeat no more）, general D<2R (R is quartzy drums inside radius), its focal point f selection will enable to ultraviolet lamp tube to put
On the focus line of parabolic shape lampshade.By opening D, its focal point f and convex lens column dimension and its focal length length Lai really
Determine the concrete shape and size of parabolic shape lampshade（The concrete shape of object plane type lampshade and the determination of size are for art technology
It is conventional design for personnel, it is not necessary to additionally pay creative work, will not be repeated here）.
Ultraviolet light will be just radiated on the liquid for the ultraviolet curable that quartzy roller is rolling print, it is impossible to be radiated at
On the working media for not rolling print also, planoconvex lens post reflects the face that the ultraviolet light pooled leaves on substrate under normal circumstances
Product is the smaller the better, so the length of convex lens post focal length is substantially equal to convex lens post to the distance of substrate（To consider stone simultaneously
To the refraction action of light, the consideration of these factors is to be for a person skilled in the art for English roller, tack coat and roll printing mould
Routine techniques, it will not be repeated here）, so that ultraviolet light reflects the straight line formed in focal point by convex lens post and just fallen
In substrate plane.It can so ensure to be radiated at the liquid to be solidified in the very first time ultraviolet luminous energy very first time of rolling print
On medium, when roller complete rolling print after can just be formed as soon as possible can self-supporting patterned layer.
Ultraviolet source is placed in roller impressing mould, that is, is placed in the inside of quartzy roller.Ultraviolet light can pass through quartz rolling
Cylinder is irradiated on substrate, and roll printing mold material and tack coat should also be light transmissive material, when roller impressing mould rotates around mandrel,
Relative to mandrel axial line relative motion does not occur for ultraviolet source position, can thus cause quartzy roller during rolling prints
Ultraviolet source can be irradiated to mould and roll on the working media of print all the time, not roll the part of print without influence.
During rolling prints, ultraviolet source（Including ultraviolet lamp tube, parabolic shape lampshade, convex lens post）In opposing roller
Relative motion do not occur for mandrel line, i.e., reflection and convex lens post of the ultraviolet light that ultraviolet lamp tube is sent by parabolic shape lampshade
Refraction convergence forms straight line, and the straight line is just and one is straight on the tangent line of quartzy drum die surface and substrate.
The both ends of quartzy roller respectively add a bearing, and roller rotates around bearing, the axle center geo-stationary of ultraviolet source and roller, thus
It can guarantee that the position of the relatively quartzy centre of the drum of roller ultraviolet source during rolling does not change.
In order to ensure the uviol lamp normal work in quartzy roller, generally, the intensity of illumination of ultraviolet source is one
Individual definite value（That is the voltage and current of power supply is constant）, it does not adapt to rolling that process velocity changes to plane formula photoetching pressure
Print technique.Application claims according to the rotating speed of roller, can adjust the intensity of illumination of ultraviolet source, i.e. the rotating speed of roller is bigger, light
According to time it is shorter, required intensity of illumination will be stronger；The rotating speed of roller is smaller, and the time of illumination is just grown, required ultraviolet
The intensity of illumination of light source is weaker.Handed over to reach above-mentioned purpose uniform circle pole polarity on the bearing cap on the outside of roller impressing mould
For the permanent magnet of change, then keep with induction coil probe face permanent magnet and apart 1-2mm with the end face of permanent magnet.Work as roller
During mold rotation, permanent magnet also concomitant rotation, and induction coil probe is integrally fixed on the mandrel of roller, so due to the line of induction
Circle probe cutting magnetic line and in coil produce an induced electromotive force, this induced electromotive force can with the rotation speed change of roller and
Change, the electric current of the rotation speed change with roller, the bigger sense of rotating speed of roller will be produced if circuit is closed-loop path, in circuit
The effective current that should go out is bigger.This induced-current power supply of rectification as uviol lamp after amplifying circuit, can thus make
The intensity of illumination for obtaining ultraviolet source changes and changed with the rotating speed of roller, and the bigger intensity of illumination of rotating speed of roller is stronger.
When roller impressing mould rolls across substrate, it can cause the liquid with characteristic pattern that roller impressing mould rolls across to consolidate
Change, and do not interfere with the curable hydraulic fluid not rolled across also, while the device can also be according to the work speed of photoetching marking press
Degree, the light intensity of adjust automatically light source, enables rolling to be applicable plane formula photoetching Embosser the change of different speed of imprint automatically.
Brief description of the drawings
Fig. 1 rollings imprint light source optical path principle cross-sectional view to plane photoetching（Line with the arrow represents ultraviolet light）；
Fig. 2 rollings imprint light source optical path principle A-A sectional views to plane photoetching；
Fig. 3 rollings imprint light source intensity control principle drawing (K direction views) to plane photoetching；
Fig. 4 uviol lamp intensity control circuit theory diagrams；
Wherein, 1, rolling impressing mould；101st, convex pattern characteristics；102nd, female pattern feature；2nd, tack coat；3rd, quartz rolling
Cylinder；4th, ultraviolet light source；401st, parabolic shape lampshade；402nd, ultraviolet tube；403rd, convex lens post；5th, induction coil is popped one's head in；
6th, mandrel；7th, bearing；8th, permanent magnet；9th, amplifying circuit；10th, rectification circuit.
Embodiment
The present invention is described further in terms of five with reference to Fig. 1 to Fig. 4 and embodiment.
Roll the implementation process to plane formula photoetching impressing：Rolling to that in plane photoetching impressing, generally can consolidate ultraviolet light
The photoetching stamp work medium of change is placed on imprinted substrate, and the rolling impressing mould 1 with pattern characteristics then is placed on into the substrate
On, mould is to be fixed on by tack coat 2 on quartzy roller 3, when roller impressing mould rolls across imprintable liquid-working-medium
Wait, printable liquid-working-medium will be full of in the convex of roller impressing mould, female pattern feature 101,102, such as institute in Fig. 1
Show, ultraviolet light source 4（It is made up of parabolic shape lampshade 401, ultraviolet lamp tube 402, convex lens post 403）The ultraviolet light sent is through stone
The liquid for making ultraviolet-curing on the substrate with pattern characteristics is radiated at after English roller 3, tack coat 2 and rolling impressing mould 1
Working media solidifies, formed with can self-supporting characteristic pattern pattern layer.Roller impressing mould 1, ultraviolet light source 4 structure and
Installation site of the light source in roller impressing mould 1 is as shown in Figure 1 and Figure 2.
The implementation process of ultraviolet source：It is a kind of in Fig. 1 the light that ultraviolet lamp tube is sent to be converged purple in alignment
Outer light source 4, it is made up of parabolic shape lampshade 401, ultraviolet lamp tube 402, convex lens post 403.Ultraviolet lamp tube 402 is placed on
On the focus f positions of parabolic type lampshade 401, by the reflex of parabolic shape lampshade, a branch of parallel beam of light will be formed.
Install convex lens post 403 additional in the exit of parabolic shape lampshade, such parallel beam of light after the refraction action of convex lens post just
It can be converged in its focal point in alignment.Converge the straight luminous energy inswept work with roller impressing mould pattern characteristics successively
Make liquid, make its solidification, and the liquid medium in processing district is not unaffected, because ultraviolet light is by reflection and convex lens
Post refraction crosses so that the capacity usage ratio of ultraviolet source greatly improves.
Ultraviolet tube 402 is placed in a focus of parabolic shape lampshade 401 and convex lens post 403 simultaneously（Throw
Thing line style lampshade and the confocal point of convex lens）, and another focus of convex lens post 403（Line）Substantially should be in rolling to plane formula photoetching
On the machining area of impressing（That is the imprinting moulding area of roller impressing mould and working media）, the utilization rate of its ultraviolet light source energy
Will be higher.
Accurate when implementing, convex lens post 403 will be arranged on paraboloidal opening, a focus of convex lens post 403 and
Parabolic type lampshade 401 wants confocal point, and another focus is that is, convex on machining area of the rolling to plane formula photoetching impressing
The focus line of lens post 403 will be located on the tangent line of roller and substrate, be also contemplated that quartzy roller, tack coat and roll printing during installation
Mould is finely tuned to the refraction action of light to whole light source position, it is ensured that the light of light source output is in rolling to plane formula photoetching
On the machining area of impressing, and another focus of convex lens post wants confocal point, the light of such light source with parabolic type lampshade
Capacity usage ratio can be higher.
In Fig. 1 ultraviolet source structure design, the size D of parabolic shape lampshade opening will be according to roller internal diameter, ultraviolet
Fluorescent tube and the determination of the size of convex lens post and its focal length, D<2R (R is quartzy drums inside radius), its focal point f selection
Ultraviolet lamp tube is enabled to be placed on the focal line of parabolic shape lampshade.By opening D, its focal point f and convex lens column dimension
And its focal length length determines the concrete shape of parabolic shape lampshade and size, ultraviolet light will be radiated at quartzy roller
On the working region for rolling print.The area that the ultraviolet light that generally refraction of planoconvex lens post pools is thrown on substrate is smaller more
It is good, it is ideally straight line.The length of convex lens post focal length is equal to convex lens post to the distance of substrate（Pass through in implementation
Consider the refraction action of quartzy roller, tack coat and roll printing mould to light, suitably to be finely tuned）, so that ultraviolet light
Just fall in substrate plane in the straight line that focal point is formed by the refraction of convex lens post.It can ensure in the first of rolling
Between the ultraviolet luminous energy very first time be radiated on liquid-working-medium, can be formed as soon as possible can self-supporting after roller completes rolling print
Patterned layer.Have the advantages that formed precision is high, molding character is stable, reliable.
The installation site of ultraviolet source：Ultraviolet source is placed in roller impressing mould, is placed in the inside of quartzy roller.Ultraviolet light
Line can pass through quartzy roller 3, tack coat 2 and rolling impressing mould 1 and be irradiated on substrate.When roller impressing mould rotates around mandrel
When, relative to wire mandrel relative motion does not occur for ultraviolet source, can thus cause quartzy roller during rolling prints, ultraviolet
Light source can be irradiated to roller impressing mould and roll at the liquid working medium of print all the time.During rolling prints, ultraviolet light
Source position（Including ultraviolet lamp tube, parabolic shape lampshade, convex lens post）Opposing roller mandrel center does not change, i.e. uviol lamp
The ultraviolet light that pipe is sent crosses in alignment after the reflection of parabolic shape lampshade and the refraction of convex lens post, and the straight line is proper
Well and one is straight on the tangent line of quartzy drum die surface and substrate.The mandrel remains stationary of ultraviolet light source 4 and roller,
It so can guarantee that the center line of the relatively quartzy roller of roller ultraviolet source during rolling does not move.
The implementation process of controllable UV lamp：From Fig. 2, Fig. 3 and Fig. 4, induction coil probe 5 is mounted in quartzy roller
Side, be fixed on mandrel 6, and with mandrel 6 keep geo-stationary.When quartzy roller is occurred relative to mandrel 6 by bearing 7
During rotation, permanent magnet 8 on the bearing cap of quartzy roller side will with quartzy roller synchronous axial system, due to it is multiple forever
Magnet is uniform and pole polarity is alternately alternatively arranged on the bearing cap of quartzy roller side, the so static line of induction
Circle probe 5 will alternately cut the magnetic line of force for the different magnetic poles that permanent magnet 8 is sent, so as to produce virtual value with quartzy drum rotation speed
The induced electromotive force of change, after amplifying circuit 9 and rectification circuit 10, powered for uviol lamp, the lamp that such uviol lamp is sent
Light intensity is weak to be changed with the change of rolling print-out rate.
The implementation process of control circuit：The intensity of illumination of ultraviolet source be able to will change according to the rotating speed of roller, that is, roll
The rotating speed of cylinder is bigger, and the time of illumination is shorter, and required intensity of illumination is stronger；The rotating speed of roller is smaller, the time of illumination
Long, the intensity of illumination of required ultraviolet source is weaker.To reach above-mentioned purpose, we enclose in the outside of roller impressing mould uniform one
Pole polarity alternately change permanent magnet 8, then with induction coil pop one's head in 5 center face permanent magnets, make coil pop one's head in end face with
Permanent magnet is at a distance of 1-2mm.When drum die rotates, coupled permanent magnet also synchronous axial system therewith, can thus feel
Answer in coil probe 5 and produce an alternating voltage signal ui, this voltage can change with the rotation speed change of roller, the rotating speed of roller
The virtual value of bigger voltage is bigger.This signal is input to the input of amplifying circuit 9, the signal loading by amplification is to whole
After the input of current circuit 10, its output end obtains output voltage u1, the voltage is just the power supply of uviol lamp, can thus be caused
The intensity of illumination of ultraviolet source changes and changed with the degree that turns of roller, roller turn the bigger intensity of illumination of degree will be stronger.In Fig. 4
RbFor base biasing resistor, it provides quiescent point, R for amplifying circuitcFor collector load resistor, it amplifies triode
In circuit the change transitions of electric current for voltage change so as to realize the amplification of voltage export, C1、C2Blocking is played for coupled capacitor
The effect of circulation exchange.Certainly other amplifying circuits can also be used during specific implementation.
Although above-mentioned the embodiment of the present invention is described with reference to accompanying drawing, model not is protected to the present invention
The limitation enclosed, one of ordinary skill in the art should be understood that on the basis of technical scheme those skilled in the art are not
Need to pay various modifications or deformation that creative work can make still within protection scope of the present invention.
Claims (5)
- Ultraviolet light source structure during 1. one kind rolling imprints to plane photoetching, it is characterized in that, including ultraviolet light source and can control For the light source light according to the control circuit of Strength Changes, the ultraviolet light source includes parabolic shape lampshade, ultraviolet lamp tube and convex lens Mirror post, the ultraviolet lamp tube are arranged on its focal point of the lampshade, will by the reflex of parabolic shape lampshade A branch of parallel beam of light is formed, convex lens post is arranged on paraboloidal opening, and parallel beam of light passes through the refraction action of convex lens post In alignment in the convergence of its focal point afterwards, a focus of convex lens post is rolling the machining area to plane formula photoetching impressing On, that is, the focus of convex lens post is located on the tangent line of drum die surface and substrate；Convex lens post focal length is substantially equal to convex Distance of the lens post to substrate so that ultraviolet light just falls by the refraction of convex lens post in the straight line that focal point is formed puts down in substrate On face；Its focal point f selection will enable to ultraviolet lamp tube to be placed on the focal line of parabolic shape lampshade；The ultraviolet light Source is placed in roller impressing mould, is placed in the inside of roller, is printed between the mandrel of the ultraviolet light source and drum die in roll-in Mould around mandrel rotate when, holding position is constant；The control circuit includes the induction coil probe being fixedly installed on the side end face mandrel of drum die one, and foregoing roller In die face uniformly and pole polarity alternately be alternatively provided with it is multiple can with the corresponding permanent magnet of induction coil probe, sensing The amplified circuit of coil probe and rectification circuit are connected to form a closed-loop path with ultraviolet lamp tube；Induced electromotive force is by with roller Caused by the permanent magnet of mould synchronous axial system and fixed induction coil probe cutting magnetic line, when rolling is to plane photoetching pressure When the roller of print rotates, induced-current, virtual value and the drum die rotating speed of this electric current will be produced in the closed-loop path of coil Relevant, rotating speed is bigger, and virtual value is bigger, otherwise lower；It can thus cause the intensity of illumination of ultraviolet light source with roller mould The rotating speed of tool changes and changed, and the bigger intensity of illumination of rotating speed of drum die will be stronger；The amplifying circuit is crystal amplifier, and the output end that its input is popped one's head in induction coil is connected, transistor amplification Device connects with rectification circuit, it is rectified after electric signal be directly inputted in ultraviolet lamp tube, realize the light intensity of ultraviolet light source with Roll the change to the drum die rotating speed of plane photoetching impressing and change, the light intensity for completing light source is adjusted automatically with the speed of rolling print Save function.
- Ultraviolet light source structure during 2. a kind of rolling as claimed in claim 1 imprints to plane photoetching, it is characterized in that, described is convex Another focus of lens post and the confocal point of parabolic type lampshade.
- 3. ultraviolet light source structure as claimed in claim 1 or 2, it is characterized in that, the size of the parabolic shape lampshade opening Less than 2 times drum die inner radials.
- 4. ultraviolet light source structure as claimed in claim 1 or 2, it is characterized in that, the induction coil center probe face is forever Magnet.
- 5. ultraviolet light source structure as claimed in claim 1 or 2, it is characterized in that, the end face of the coil probe and permanent magnet At a distance of 1-2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410101905.8A CN103869609B (en) | 2014-03-18 | 2014-03-18 | Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410101905.8A CN103869609B (en) | 2014-03-18 | 2014-03-18 | Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing |
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| CN103869609B true CN103869609B (en) | 2018-04-06 |
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| CN104635433B (en) * | 2015-01-26 | 2016-08-17 | 青岛理工大学 | External roll-to-plane micro-nano photoetching impression light source device |
| GB2595310B (en) * | 2020-05-22 | 2023-05-24 | Stensborg As | A method of, and apparatus for, simultaneous dual-sided imprinting |
| CN118010927B (en) * | 2024-02-06 | 2024-08-23 | 安徽医科大学 | Self-calibration ozone reactivity online measurement device and method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1765179A (en) * | 2004-10-25 | 2006-05-03 | 张云江 | Fishing sensor |
| CN101090009A (en) * | 2006-06-13 | 2007-12-19 | 京都电机器株式会社 | Ultraviolet ray radiating device |
| CN101279530A (en) * | 2007-04-06 | 2008-10-08 | 小森公司 | Drying apparatus for sheet |
| CN202065922U (en) * | 2011-03-01 | 2011-12-07 | 武汉昱升光器件有限公司 | Ultraviolet curing lamp with focusing function |
| CN102331592A (en) * | 2010-07-14 | 2012-01-25 | 鸿富锦精密工业（深圳）有限公司 | Optical film manufacturing device and manufacturing method |
| CN102371748A (en) * | 2010-08-13 | 2012-03-14 | 乐金显示有限公司 | Roll mold, method for fabricating the same and method for fabricating thin film pattern using the same |
| CN103400534A (en) * | 2013-08-16 | 2013-11-20 | 青岛博纳光电装备有限公司 | Idler wheel die for rolling type nanometer imprinting |
| CN203773224U (en) * | 2014-03-18 | 2014-08-13 | 青岛理工大学 | Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011090172A (en) * | 2009-10-23 | 2011-05-06 | Mesh Kk | Exposure apparatus |
| JP2012220760A (en) * | 2011-04-11 | 2012-11-12 | Shinwa Industry Co Ltd | Cylindrical mask and exposure apparatus using the same |
| CN103399460A (en) * | 2013-08-16 | 2013-11-20 | 青岛博纳光电装备有限公司 | Manufacturing method for large size joint-free nano-sized roller mold |
-
2014
- 2014-03-18 CN CN201410101905.8A patent/CN103869609B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1765179A (en) * | 2004-10-25 | 2006-05-03 | 张云江 | Fishing sensor |
| CN101090009A (en) * | 2006-06-13 | 2007-12-19 | 京都电机器株式会社 | Ultraviolet ray radiating device |
| CN101279530A (en) * | 2007-04-06 | 2008-10-08 | 小森公司 | Drying apparatus for sheet |
| CN102331592A (en) * | 2010-07-14 | 2012-01-25 | 鸿富锦精密工业（深圳）有限公司 | Optical film manufacturing device and manufacturing method |
| CN102371748A (en) * | 2010-08-13 | 2012-03-14 | 乐金显示有限公司 | Roll mold, method for fabricating the same and method for fabricating thin film pattern using the same |
| CN202065922U (en) * | 2011-03-01 | 2011-12-07 | 武汉昱升光器件有限公司 | Ultraviolet curing lamp with focusing function |
| CN103400534A (en) * | 2013-08-16 | 2013-11-20 | 青岛博纳光电装备有限公司 | Idler wheel die for rolling type nanometer imprinting |
| CN203773224U (en) * | 2014-03-18 | 2014-08-13 | 青岛理工大学 | Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing |
Non-Patent Citations (1)
| Title |
|---|
| 《紫外LED光刻光源系统的研究进展》;王国贵 等;《照明工程学报》;20130430;第24卷(第2期);53－57页 * |
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