CN204422969U - External rolling impresses light supply apparatus to the micro-nano photoetching of plane - Google Patents
External rolling impresses light supply apparatus to the micro-nano photoetching of plane Download PDFInfo
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- CN204422969U CN204422969U CN201520058316.6U CN201520058316U CN204422969U CN 204422969 U CN204422969 U CN 204422969U CN 201520058316 U CN201520058316 U CN 201520058316U CN 204422969 U CN204422969 U CN 204422969U
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Abstract
The utility model discloses a kind of external rolling and light supply apparatus is impressed to the micro-nano photoetching of plane, comprise the ultraviolet light source being arranged at drum die outside and the control circuit that can control described light source light photograph Strength Changes, ultraviolet light source comprises parabolic shape lampshade, ultraviolet lamp tube, convex lens post, ultraviolet lamp tube position adjustment unit, convex lens post position adjustment unit and ultraviolet light source angle adjusting; Intensity control part comprises incremental optical-electricity encoder, phase demodulation and amplifying circuit and ultraviolet lamp tube, realizes intensity of illumination and changes with the change of roll extrusion print-out rate; Ultraviolet light source angle adjusting, ultraviolet lamp tube position adjustment unit, convex lens post position adjustment unit, drum die surface is realized parallel with convex lens post focal line with the tangent line of substrate by adjustment, and distance is more near better, but the light of ultraviolet light source can not drop on roll printing die surface.It is really small but excellent that the utility model makes cylinder make, and improves the machining precision of mould and the crudy of workpiece pattern.
Description
Technical field
The utility model belongs to micro-nano manufacturing technology, and especially a kind of external rolling impresses light supply apparatus to the micro-nano photoetching of plane.
Background technology
At present, in photoetching stamping technique, for increasing the scope of application of mould in imprinting apparatus and the characteristic density improved in given substrate region, facilitated the development of immersion lithographic and extreme ultraviolet lithography, but their price is all quite expensive.
Photoetching impression is by the imprint patterns on impression block on substrate, this technology not only economy but also reliable, and can obtain less geometric properties.The advantage of this technology is that on impression block, the density of characteristic pattern determines its resolution, and is not limited to the emission wavelength of radiation source or the pore size of optical projection system.
Chinese patent (the application number: 201410101905.8) disclose one and roll plane photoetching impression medium ultraviolet lamp source structure of applicant's earlier application, comprise ultraviolet light source and the control circuit of described light source light according to Strength Changes can be controlled, described ultraviolet light source comprises parabolic shape lampshade, ultraviolet lamp tube and convex lens post, described ultraviolet lamp tube is arranged on its focal point of described lampshade, through the reflex of parabolic shape lampshade, a branch of parallel beam of light will be formed, convex lens post is arranged on paraboloidal opening part, parallel beam of light pools straight line at its focus place after the refraction action of convex lens post, a focus of convex lens post is being rolled on the machining area to plane formula photoetching impression, namely the focus of convex lens post is positioned on the tangent line of drum die surface and substrate, between described ultraviolet light source and the mandrel of drum die when roller impressing mould rotates around mandrel, holding position is constant.
Ultraviolet source structure to be placed in narrow and small drums inside in this patented claim, make whole device very complicated, heat radiation difficulty, cause the distortion of expanding with heat and contract with cold of cylinder and mould, thus have a strong impact on machining precision, also requirements at the higher level are proposed to the intensity of mold materials, wearing quality and light transmission etc. simultaneously, implement difficult.
Utility model content
The purpose of this utility model is for overcoming above-mentioned the deficiencies in the prior art, a kind of external rolling is provided to impress light supply apparatus to the micro-nano photoetching of plane, what cylinder can be made to make is really small but excellent, thus improve the machining precision of mould and the crudy of workpiece pattern, reduce the requirement to mold material, cost-saving, increase the life-span of ultraviolet source lamp; Can also according to the operating rate of photoetching marking press, the light intensity of adjustment light source automatically, and according to the irradiating angle of the whole light source of cylinder size adjustment and the position of convex lens, make external ultraviolet source adapt to the impression cylinder of different-diameter.
For achieving the above object, the utility model adopts following technical proposals:
A kind of external rolling impresses light supply apparatus to the micro-nano photoetching of plane, comprise the ultraviolet light source being arranged at drum die outside and the control circuit that can control described light source light photograph Strength Changes, described ultraviolet light source comprises parabolic shape lampshade, ultraviolet lamp tube, convex lens post, ultraviolet lamp tube position adjustment unit, convex lens post position adjustment unit and ultraviolet light source angle adjusting;
Described ultraviolet light source angle adjusting comprises the turning axle connected for parabolic shape lampshade top movable, this rotating shaft terminal is fixed on fuselage biside plate, fuselage side plate is fixed with two light-source angle adjustment arc plates being symmetry with fuselage center line, parabolic shape lampshade is fixed between two light-source angle adjustment arc plates symmetrically, all have one along the arc groove of described arc plate center line symmetry in the middle part of each light-source angle adjustment arc plate, in arc groove, be provided with the first web member being connected to parabolic shape lampshade side plate.
The biside plate of fuselage has the hole of sub-circular, whole external rolling just is arranged on inside this hole to plane micro-nano photoetching impression light supply apparatus;
Described convex lens post position adjustment unit comprises the upper and lower clamp of two couples for fixing convex lens post two ends, often pair upper and lower clamp both sides have a screw to fix, convex lens post is clamped, simultaneously in the both sides of convex lens post clamp with layout four pairs of urges bolt that convex lens center line is symmetry, to print the distance of workspace to roll extrusion for adjusting convex lens post center line.During adjustment, first unclamp convex lens post corner and be arranged on four pairs of urges bolt on clamp, four push away bolt (g) and tighten together, are to adjust near by convex lens post to the distance of workspace; Four pressures bolt (a) are tightened together, are to adjust far away by convex lens post to the distance of workspace.Drum die surface will be made after finally adjusting parallel with the focal line of convex lens post with the tangent line of substrate, and the distance between these two parallel lines is more closely better, but the light of ultraviolet light source can not drop on and rolls on impressing mould;
Described control circuit comprises incremental optical-electricity encoder, phase demodulation and amplifying circuit, described incremental optical-electricity encoder is just fixed on after the drive motor of band mold drum, when controller drive motor operates, the code-wheel being fixed on motor incremental optical-electricity encoder below will rotate, the photovalve being contained in code-wheel side just has photoactive voltage and produces (just having electric current to occur if circuit forms closed-loop path), light-dependent current signal in this scrambler is after phase demodulation and power amplification circuit amplify, as the power supply of ultraviolet light source fluorescent tube, be used for controlling the intensity of light, the intensity of illumination of ultraviolet light source so just can be made to change with the rotating speed change of drum die, the larger intensity of illumination of rotating speed of drum die is stronger,
The adjustment of described ultraviolet lamp tube position has been come by the adjustment backing plate be arranged at after uviol lamp base, ultraviolet lamp tube is just installed in uviol lamp base, and ultraviolet lamp tube is installed on its focal point of parabolic shape lampshade by tube face and adjustment backing plate below thereof and holding screw.Due to the existence of foozle, the center line of ultraviolet lamp tube is made to depart from the focal line of parabolic shape lampshade more or less, by the adjustment backing plate after processing tube face, make described parabolic shape lampshade focal line coaxial with fluorescent tube center line, if actual error is excessive, the light of parabolic shape lampshade injection is just being not parallel beam of light, affects the follow-up focusing of convex lens post and the crudy of product.If the adjusting pad of monoblock regulates and do not reach requirement, adjusting pad can be cut into segment, adjustment makes it to reach required right alignment piecemeal, is tightened by uviol lamp base fixed screw after adjusting again;
And the shaft coupling being fixed on the drive motor other end will drive the cylinder that impressing mould is housed to roll across substrate with semi-solid photosensitive medium, convex pattern characteristics and female pattern feature will be stayed on semi-solid photosensitive medium antithesis, and whole substrate moves together with worktable feed mechanism, the instantaneous space rate of worktable feed mechanism and impressing mould are equal in the instantaneous linear velocity of working position, thus realize the moulding process rolled plane of whole external light source photoetching marking press.
The utility model is earlier application " rolling plane photoetching impression medium ultraviolet lamp source structure " (application number: basis 201410101905.8) grows up, it is external by ultraviolet source, not only avoid original application and ultraviolet source structure will be placed in narrow and small drums inside, make whole device very complicated, heat radiation difficulty, cause the distortion of expanding with heat and contract with cold of cylinder and mould, thus have a strong impact on machining precision, also requirements at the higher level are proposed to the intensity of mold materials, wearing quality and light transmission etc. simultaneously, implement difficult.
It is really small but excellent that ultraviolet source structure of the present utility model can make cylinder make, thus improve the machining precision of mould and the crudy of workpiece pattern, reduces the requirement to mold material, saved cost, add the life-span of ultraviolet source lamp.Also can according to the operating rate of photoetching marking press, the light intensity of automatic adjustment light source, and according to the irradiating angle of the whole light source of cylinder size adjustment and the position of convex lens, make external ultraviolet source adapt to the impression cylinder of different-diameter, allow the semi-solid photosensitive medium after impressing just depart from the irradiation of the line source that just can be focused on the contact of cylinder and to have solidified.
Principle of work of the present utility model:
Roll after on imprinted substrate when semi-solid photosensitive medium is laid in, just this substrate is placed in the feed station of rolling the micro-nano photoetching marking press of plane fixing, the feed mechanism of machine starts to move to processing district, the whole impressing mould device that rolls also moves downward simultaneously, after feed mechanism enters into workspace, rolling impressing mould just presses (this pressure is changeless) on the substrate of the semi-solid photosensitive medium of band, at this moment the cylinder rolling impressing mould is with to start to rotate under the drive of drive motor, feed station device is synchronized with the movement with roll extrusion print substrate and mould, roll in moulding process whole, the instantaneous linear velocity that should keep impressing mould on the instantaneous space rate of feed mechanism and cylinder is equal, and the code-wheel being fixed on drive motor incremental optical-electricity encoder below will follow drive motor to rotate, the photovalve being contained in code-wheel side just has photoactive voltage and produces (just having electric current to occur if circuit forms closed-loop path), light-dependent current signal in this scrambler is after phase demodulation and power amplification circuit amplify, as the power supply of ultraviolet light source fluorescent tube, be used for controlling the intensity of light, the intensity of illumination of ultraviolet light source so just can be made to change with the speed change of drum die, the larger intensity of illumination of speed of drum die is stronger, and the shaft coupling being fixed on the drive motor other end will drive the cylinder that impressing mould is housed to roll across substrate with semi-solid photosensitive medium, characteristic pattern is just stayed in semi-solid medium, and whole substrate is moved together by feed mechanism, on the instantaneous space rate of feed mechanism and cylinder, the instantaneous linear velocity of imprinting position is equal, thus realizes the rolling plane moulding process of whole external light source photoetching marking press.After roll extrusion has printed, the whole impression cylinder that rolls lifts, and mould goes back to zero-bit, and feed mechanism gets back to material loading position simultaneously, unloads the substrate work pieces impressed, changes the new substrate work pieces that the next one will impress, then repeat said process.
Ultraviolet light can focus on the characteristic pattern medium that impressed by light source of the present utility model, and the position of light source radiating angle and convex lens can regulate according to the size of cylinder, thus the position of illumination curing is suitably adjusted, increase the accommodation of rolling plane photoetching imprinting apparatus.This rolling impresses external ultraviolet source structure to plane photoetching, the semi-solid photosensitive medium that normally will impress is laid in and rolls on imprinted substrate, then the impressing mould with characteristic pattern is allowed to roll across this substrate (impressing mould is just fixed on outer surface of cylinder), the patterned features of mould surface is contacted without relative sliding successively with semi-solid medium, the characteristic pattern of impression grinding tool is stayed semi-solid medium on the surface, then the irradiation of this external ultraviolet source is subject to immediately, make the media cures be stamped, obtain required self-supporting patterned layer.To the requirement of ultraviolet source be: after impressing mould rolls across substrate, the semi-solid medium with characteristic pattern that solidified imprinting mould rolls across, and give enough light intensity according to the speed that medium rolls across, make it solidify completely, do not affect also not patterned actuating medium.
The utility model comprises ultraviolet light source and can control the control circuit of described light source intensity of illumination, ultraviolet light source comprises parabolic shape lampshade, ultraviolet lamp tube, convex lens post and position tunable arrangement thereof and whole ultraviolet light source angle adjusting device, ultraviolet lamp tube is just arranged on the focal line of described parabolic shape lampshade, through the reflex of parabolic shape lampshade, a branch of parallel beam of light will be formed, convex lens post is just arranged on the opening part of described paraboloidal lampshade, parallel beam of light pools straight line at its focus place after the refraction action of convex lens post, this focal line of convex lens post just drop on roll to plane photoetching impression after just depart from and cylinder contact semi-solid photosensitive medium on, that is light source finally converge into straight line drop on roll to plane photoetching impression after patterned semi-solid substrate on, this line is parallel with the tangent line of substrate with drum die surface, certainly the distance between these two parallel lines is more near better, but will with the light of ultraviolet light source do not drop on roll extrusion print mould on for principle, after mould size is determined, just need to adjust the angle of described light supply apparatus and the focal line of convex lens post, to ensure between two parallel lines that the distance of (i.e. drum die surface and the tangent line of substrate and the focal line of convex lens post) is more closely better, and the light of ultraviolet light source does not drop on mould.This device just need remain unchanged after adjusting, but when after cylinder change, just needs to readjust.That is a set of rolling impresses to plane photoetching the cylinder that external ultraviolet light source device can adapt to different specification size.
The controlable electric current of light source intensity of illumination, comprise incremental optical-electricity encoder, phase demodulation and amplifying circuit, described incremental optical-electricity encoder is just fixed on after the drive motor of cylinder, when controller drive motor operates, the code-wheel being fixed on motor incremental optical-electricity encoder below will follow synchronous rotary, the photovalve being contained in code-wheel opposite side just has photoactive voltage (just having electric current to occur if circuit forms closed-loop path), light-dependent current signal in this scrambler is after phase demodulation and power amplification circuit amplify, as the power supply of ultraviolet light source fluorescent tube, be used for controlling the intensity of light, the intensity of illumination of ultraviolet light source so just can be made to change with the speed change of drum die, the larger intensity of illumination of speed of drum die is stronger, and the shaft coupling being fixed on the drive motor other end will drive the cylinder that impressing mould is housed to roll across substrate with semi-solid photosensitive medium, characteristic pattern is just stayed in semi-solid medium, and whole substrate is moved together by feed mechanism, on the instantaneous space rate of feed mechanism and cylinder, the instantaneous linear velocity of impressing mould is equal, thus realizes the moulding process rolled plane photoetching marking press of whole external light source.
In the utility model, the ultraviolet lamp tube outside cylinder is placed on the position of parabolic shape lampshade focal line, through the reflex of parabolic shape lampshade, a branch of parallel beam of light will be formed.The convex lens post of position adjustable is housed in the exit of parabolic shape lampshade, and such parallel beam of light is by pooling straight line at its focal line place after the refraction action of convex lens post.Converging straight luminous energy in the inswept semi-solid medium with rolling impressing mould pattern characteristics of certain distance, making it solidify, also make unprocessed ultraviolet semi-solid medium not be affected simultaneously.The design of this kind of light path can not only meet the requirement of rolling light source in plane photoetching impression, and the efficiency of light energy utilization of whole device to ultraviolet source can be made greatly to improve, and because of whole device be arranged in outside cylinder, improve heat dispersion, add the life-span of ultraviolet source lamp, reduce the impact of distortion on machining precision of expanding with heat and contract with cold.
Ultraviolet tube is placed on parabolic shape lampshade focal line, convex lens post is just arranged on the open front of parabolic shape lampshade, and convex lens post can adjust to the distance of ultraviolet tube, that is convex lens can adjust according to the size of rolling impression cylinder to the distance of workspace, the focal line realizing convex lens drop on cylinder impression just after band pattern characteristics semi-solid medium on, focal line is parallel with the tangent line of substrate with drum die surface, realize solidification through UV-irradiation, finally can obtain the patterned layer of self-supporting.
The size of parabolic shape lampshade opening will be determined according to the size of convex lens post width and para-curve focal length, General Parabolic face type lampshade opening will be slightly less than convex lens post width, but convex lens post width is greater than the width at installing port place, guarantee that there is suitable adjustment amount at convex lens post center to the distance of para-curve focal length, and the selection of para-curve focal length is wanted to make ultraviolet lamp tube be placed on the focal line of parabolic shape lampshade, namely the radius of fluorescent tube is less than para-curve focal length, adjusting pad will be added at the lamp socket back side simultaneously, segmentation adjustment makes whole fluorescent tube center line accurately overlap with the focal line of parabolic shape lampshade.As for the distance of convex lens post center to para-curve focal length, to determine to the distance of rolling plane photoetching stamp work district according to external micro-nano photoetching impression light source, guarantee that drum die surface is parallel with the focal line of convex lens post with the tangent line of substrate, and line-to-line is apart from more near better, but the light of ultraviolet light source can not drop on mould, prevent from the semi-solid photosensitive medium light remained on mould from irradiating to be solidificated on mould, thus affect the crudy of workpiece.Basic configuration and the size of such parabolic shape lampshade just can determine.
Ultraviolet light will just in time be radiated in the semi-solid medium of the ultraviolet curable after roll extrusion print, can not be radiated at and just print on the actuating medium with non-roll extrusion in roll extrusion, planoconvex lens post reflects the area the smaller the better (ideally straight line) that the ultraviolet light that pools stays on substrate under normal circumstances, so convex lens post is wanted to adjust to the distance of illumination workspace, make ultraviolet light through the refraction of convex lens post like this, the straight line formed at focal line place just in time drop on after roll extrusion just on set a distance.Realize the very first time UV-irradiation after rolling in the semi-solid medium that will solidify, just can be formed as soon as possible after cylinder completes roll extrusion print can the patterned layer of self-supporting.
Ultraviolet source is placed on outside cylinder, and mould no longer requires it is light transmissive material, and size and the light source fluorescent tube size of cylinder are independent of each other, and improve the heat dispersion of total, thus the quality of processing is easily guaranteed.
Rolling in moulding process, the ultraviolet light that ultraviolet lamp tube sends converges through the refraction of the reflection of parabolic shape lampshade and convex lens post and forms straight line, this straight line just and after dropping on roll extrusion just always on set a distance, realize solidification.Whole external rolling can adjust according to cylinder size the irradiating angle of ultraviolet light source apparatus of plane photoetching impression and its convex lens post position wherein, the irradiating angle of suitable adjustment ultraviolet light source apparatus and convex lens are to the distance of illumination workspace, change light and gather the position of handing over into line, realize semi-solid medium roll over after the very first time be subject to UV-irradiation and solidify, being formed can the patterned layer of self-supporting.
The utility model can according to the rotating speed of cylinder, the intensity of illumination of adjustment ultraviolet source, and the rotating speed of cylinder is larger, and namely the instantaneous space rate of feed mechanism is larger, and the time of illumination is shorter, and required intensity of illumination will be stronger; The rotating speed of cylinder is less, and namely the instantaneous space rate of feed mechanism is less, and the time of illumination is just long, and the intensity of illumination of required ultraviolet source is more weak.Incremental optical-electricity encoder is connected with motor shaft, and ordering about by electric machine rotation, the signal of output, through phase demodulation and power amplifier, is re-used as the power supply of ultraviolet light source, and the size of such rotating speed just controls the power of output signal, and then controls the intensity of light source.In addition the irradiating angle of whole light source can adjust according to cylinder size, simultaneously also to realize the position of convex lens adjustable for the utility model, in the semi-solid medium focal line very first time of convex lens post being dropped on will solidify, just can be formed as soon as possible after cylinder completes roll extrusion print can the patterned layer of self-supporting, complete high-quality roll to impress plane photoetching process.
Accompanying drawing explanation
The external light source of Fig. 1 rolls plane micro-nano photoetching marking press fundamental diagram;
The external light source of Fig. 2 rolls plane micro-nano photoetching impression light path principle;
The external light source of Fig. 3 rolls can control principle to the plane micro-nano photoetching marking press intensity of light source.
The external light source of Fig. 4 rolls plane micro-nano photoetching marking press structure;
The external light source of Fig. 5 rolls fixing (B-B of Fig. 4 analyses and observe) to plane micro-nano photoetching impression angular setting arc plate;
The external light source of Fig. 6 rolls micro-nano photoetching impression light-source structure (A-A of Fig. 4 analyses and observe) of plane;
The external light source of Fig. 7 rolls the fixed sturcture (C-C of Fig. 6 analyses and observe) to plane micro-nano photoetching impression convex lens post;
The external light source of Fig. 8 rolls and steps up to adjust bolt position (the K direction view of Fig. 6) with pushing to plane micro-nano photoetching impression convex lens post.
Wherein: 1, roll impressing mould; 101, convex pattern characteristics; 102, female pattern feature; 2, cylinder; 3, tack coat; 4, ultraviolet light source; 5, parabolic shape lampshade; 6, convex lens post; 7, convex lens position adjustment assembly (be by part 6,24,25,26, a and g assemble); 8, encoder light source; 9, scrambler condenser; 10, code-wheel; 11, slit diaphragm; 12, photovalve; 13, amplifying circuit; 14, worktable feed mechanism; 15, cylinder feed mechanism; 16, fuselage side plate; 17, light-source angle adjustment arc plate; 18, parabolic shape lampshade assembly (being assembled by part 4,5,19,20,21,22,23 and s); 19, parabolic shape lampshade side plate; 20, the attachment screw of side plate and parabolic shape lampshade; 21, parabolic shape lampshade turning axle back-up ring; 22, uviol lamp base; 23, uviol lamp base adjusting pad plate; 24, aluminium alloy convex lens post upper clamping block; 25, clamp under aluminium alloy convex lens post; 26, aluminium alloy clamp screw; 27, worktable; 28, incremental optical-electricity encoder (being assembled by part 8,9,10,11 and 12); H, semi-solid photosensitive medium; F, parabola focal line; The opening of D, parabolic shape lampshade; f
2, concave lens focus; D, light-source angle adjustment chute and traveller; S, turning axle; A, pressure bolt; G, push away bolt.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail.
External light source rolls the principle of work to the micro-nano photoetching marking press of plane
A kind of external light source rolls to the principle of work of plane micro-nano photoetching marking press as shown in Figure 1: roll after on imprinted substrate when semi-solid photosensitive medium h is laid in, just be placed on by this substrate on the worktable 27 rolled the micro-nano photoetching marking press of plane fixing, the worktable feed mechanism 14 of machine starts to move to processing district.Whole impressing mould 1 device that rolls also is moved downward by cylinder feed mechanism 15 simultaneously, when rolling after impressing mould 1 enters into workspace, rolling impressing mould 1 just presses (this pressure is changeless) on the substrate of the semi-solid photosensitive medium h of band, at this moment the cylinder 2 rolling impressing mould 1 (this mould is bonded on cylinder 2 by tack coat 3 and forms drum die) starts to rotate (designating the sense of rotation of cylinder 2 in Fig. 1) under the drive of drive motor, worktable feed mechanism 14 is with rolling imprinted substrate and mould is synchronized with the movement (direction designating rectilinear motion in Fig. 1).
Wherein, worktable 27, worktable feed mechanism 14, roll impressing mould 1 and cylinder feed mechanism 15 is existing device, do not repeat them here.
Roll in moulding process whole, the instantaneous linear velocity of answering impressing mould on the instantaneous space rate of holding table feed mechanism 14 and cylinder 2 is equal, and the code-wheel 10 being fixed on drive motor incremental optical-electricity encoder 28 below will follow drive motor to rotate, the photovalve 12 being contained in code-wheel 10 and slit diaphragm 11 side just has photoactive voltage and produces (just having electric current to occur if circuit forms closed-loop path), light-dependent current signal in this scrambler is after phase demodulation and power amplification circuit 13 amplify, as the power supply of ultraviolet light source fluorescent tube 4, be used for controlling the intensity of light, the intensity of illumination of ultraviolet light source so just can be made to change with the speed change of drum die, the larger intensity of illumination of speed of drum die is stronger.
And the shaft coupling being fixed on the drive motor other end will drive the cylinder 2 that impressing mould is housed to roll across substrate with semi-solid photosensitive medium, characteristic pattern (convex pattern characteristics 101 and female pattern feature 102) is just stayed on semi-solid photosensitive medium h, and whole substrate is moved together by worktable feed mechanism 14, on the instantaneous space rate of worktable feed mechanism 14 and cylinder, the linear velocity of imprinting position is equal, thus realizes the rolling plane moulding process of whole external light source photoetching marking press.After roll extrusion has printed, the whole impression cylinder 2 that rolls lifts, and mould goes back to zero-bit, and worktable feed mechanism 14 gets back to material loading position simultaneously, unloads the substrate work pieces impressed, changes the new substrate work pieces that the next one will impress, then repeat said process.
Below in conjunction with Fig. 2 to Fig. 7 and embodiment, the utility model is described further from three aspects, respectively: roll and external the Lights section (principle as shown in Figure 2) is impressed to the micro-nano photoetching of plane, the control section (principle as shown in Figure 3) of light source intensity of illumination and adjustment member.And adjustment member is divided into: the position adjustment unit (as shown in Figure 6 with shown in Fig. 7) of the angle adjusting (as shown in Figure 4, shown in Fig. 5 and shown in Fig. 6) of photoetching impression light source, lamp strip position adjustment unit (as shown in Figure 5) and convex lens post focal line.
1, roll the Lights section is impressed to the micro-nano photoetching of plane
A kind of external rolling impresses light source to the micro-nano photoetching of plane, its principle as shown in Figure 2, comprise ultraviolet lamp tube 4, parabolic shape lampshade 5, convex lens post 6, convex lens position adjustment assembly 7 and whole ultraviolet light source angle adjusting device, described ultraviolet lamp tube 4 is just arranged on its focal point f of described parabola lampshade, through the reflex of parabolic shape lampshade 5, a branch of parallel beam of light will be formed, convex lens post 6 is just arranged on the opening D place of described paraboloidal lampshade, parallel beam of light after the refraction action of convex lens post at concave lens focus f
2place pools straight line, this focal line of convex lens post just drop on roll to plane photoetching impression after just depart from and cylinder contact semi-solid photosensitive medium h on, that is light source finally converge into straight line drop on roll to plane photoetching impression after patterned semi-solid substrate on, this line is parallel with the tangent line of substrate with drum die surface, certainly the distance between these two parallel lines is more near better, but will not drop on mould as principle with the light of ultraviolet light source; After mould size is determined, just need to adjust the focal line of the irradiating angle (as shown in Figure 4, Figure 5 and Figure 6) of described light source and convex lens post 6 (as shown in Figure 6 and Figure 7, the part-structure of this two figure is just arranged on adjustment assembly 7 position, convex lens position in schematic diagram 2), to ensure between two parallel lines that the distance of (i.e. drum die surface and the tangent line of substrate and the focal line of convex lens post 6) is more closely better, and the light of ultraviolet light source 4 does not drop on mould.This device just need remain unchanged after adjusting, and after cylinder 2 changes, just needs to readjust.That is a set of rolling impresses to plane photoetching the cylinder that external ultraviolet light source device can adapt to different specification size.
2, the control section of light source intensity of illumination
The controlable electric current of light source intensity of illumination, as shown in Figure 3, comprises incremental optical-electricity encoder (it is made up of encoder light source 8, condenser 9, code-wheel 10, slit diaphragm 11, photovalve 12), amplifying circuit 13 and ultraviolet lamp tube 4.Described incremental optical-electricity encoder is just fixed on after the drive motor of cylinder 2, when controller drive motor operates, the code-wheel 10 being fixed on motor incremental optical-electricity encoder below will synchronous rotary, the photovalve 12 being contained in code-wheel 10 side just has photoactive voltage and produces (just having electric current to occur if circuit forms closed-loop path), light-dependent current signal in this scrambler is after phase demodulation and power amplification circuit 13 amplify, as the power supply of ultraviolet light source fluorescent tube 4, be used for controlling the intensity of light, the intensity of illumination of ultraviolet light source so just can be made to change with the rotating speed change of drum die, the larger intensity of illumination of rotating speed of drum die is stronger, and the shaft coupling being fixed on the drive motor other end will drive the cylinder that impressing mould is housed to roll across substrate with semi-solid photosensitive medium, convex pattern characteristics 101 and female pattern feature 102 will be stayed on semi-solid photosensitive medium antithesis, and whole substrate moves together with worktable feed mechanism 14, the instantaneous space rate of worktable feed mechanism 14 and impressing mould are equal in the instantaneous linear velocity of working position, thus realize the moulding process rolled plane of whole external light source photoetching marking press.
3, adjustment member
1) angle adjusting of photoetching impression light source
Roll after on imprinted substrate when semi-solid photosensitive medium h is laid in, just this substrate is placed on the worktable rolled the micro-nano photoetching marking press of plane fixing, the worktable feed mechanism 14 of machine starts to move to processing district, the whole impressing mould that rolls also moves downward by the driving of cylinder feed mechanism 15 simultaneously, after cylinder feed mechanism 15 enters into workspace, rolling impressing mould just presses (this pressure is changeless) on the substrate of the semi-solid photosensitive medium of band, at this moment the cylinder 2 rolling impressing mould (this mould is bonded on cylinder 2 by tack coat 3) is with to start to rotate (in Fig. 1, designating the sense of rotation of cylinder) under the drive of drive motor, feed station device is synchronized with the movement (direction designating rectilinear motion in Fig. 1) with roll extrusion print substrate and mould, roll in moulding process whole, characteristic pattern (convex pattern characteristics 101 and female pattern feature 102) is just stayed in semi-solid medium.
Because the cylinder of roll extrusion print varies, a fixing light source radiating angle is the requirement that can not meet cylinder size variation, devises light source radiating angle adjustable apparatus for this reason, specifically sees Fig. 4, Fig. 5 and Fig. 6.During adjustment, first unclamp the adjustment screw (fuselage side plate 16 is fixed wtih light-source angle adjustment arc plate 17 by screw) on the adjustment chute of light-source angle in Fig. 4 and traveller d place light-source angle adjustment arc plate chute, because light-source angle adjustment chute and traveller d place light-source angle adjustment slide way mechanism are arranged symmetrically with about parabolic shape lampshade assembly 18 both sides, so must unclamp that (this screw is tightened on parabolic shape lampshade side plate 19 in both sides during adjustment screw simultaneously, and parabolic shape lampshade side plate 19 is fixed on parabolic shape lampshade 5 by the attachment screw 20 of side plate and parabolic shape lampshade), then allow parabolic shape lampshade 5 around turning axle s rotate (here parabolic shape lampshade 5 around turning axle s be fixed on fuselage side plate 16 by parabolic shape lampshade turning axle back-up ring 21), make the distance of the tangent line of drum die surface and substrate and convex lens post focal line more near better, and the light of ultraviolet light source does not drop on mould.Change a cylinder and will adjust once this angle, and then adjust the position of a convex lens post focal line.By the angular setting of photoetching impression light source and the position adjustment of convex lens post focal line, to guarantee between two parallel lines that the distance of (i.e. drum die surface and the tangent line of substrate and the focal line of convex lens post) is more closely better, and the light of ultraviolet light source does not drop on mould.
2), lamp strip position adjustment unit
The position at fluorescent tube center line place must be consistent with parabolic shape lampshade focal line, due to foozle, to make between both more or less there is error, in order to reduce fluorescent tube center line and described parabolic shape lampshade focal line is inconsistent, uviol lamp base adjusting pad plate 23 (as shown in Figure 6) is added below at uviol lamp base 22, that this backing plate must be designed during design is enough thick, by grinding adjusting pad thickness, make described parabolic shape lampshade focal line and fluorescent tube center line coaxiality error within 0.06mm, if actual error is excessive, the light of parabolic shape lampshade injection is just being not parallel beam of light, affect the follow-up focusing of convex lens post and the crudy of product.If the adjusting pad of monoblock regulates and do not reach requirement, adjusting pad can be cut into segment, adjustment makes it to reach required right alignment piecemeal, is tightened by uviol lamp base fixed screw after adjusting.
3), the position adjustment unit of convex lens post focal line
Adjust the position of ultraviolet source fluorescent tube, just can ensure the only parallel beam of light that parabolic shape lampshade penetrates, can the focal line that this parallel light focusing becomes just in time drop on the perform region of roll extrusion print, and it is parallel with the tangent line of substrate with drum die surface, will be realized by the position adjustment of convex lens post focal line, Fig. 6, Fig. 7 and Fig. 8 just specifically describe the clamping of convex lens post 6 and the position adjustment of convex lens post 6.Wherein convex lens post 6 realizes clamping by clamp 25 under two aluminium alloy convex lens post upper clamping blocks 2 and two aluminium alloy convex lens posts and four clamping screws 26.Position adjustment as convex lens post 6 is realized (these four groups of urges bolt are arranged symmetrically on the aluminium alloy clamp of 6 four jiaos, convex lens post) by four groups of urges bolt, wherein, pushes away the center of bolt g specific pressure bolt a away from convex lens post 6.The one end pushing away bolt g and pressure bolt a is all rotatably connected on parabolic shape lampshade side plate 19.Here the bolt g that pushes away is used to adjust nearly convex lens post to the distance of roll extrusion print workspace, namely adjusts convex lens post 6 far away to ultraviolet source fluorescent tube distance; And press bolt a to be used to adjust convex lens post far away to the distance of roll extrusion print workspace, namely adjust nearly convex lens post to ultraviolet source fluorescent tube distance.Guarantee that the distance of (i.e. drum die surface and the tangent line of substrate and the focal line of convex lens post) between two parallel lines is more near better, and the light of ultraviolet light source does not drop on mould.
The set-up procedure of these three adjust structure is: the adjustment of advanced row lamp strip position, realizes parabolic shape lampshade focal line and fluorescent tube center line coaxiality error within 0.06mm; Then repeatedly repeatedly alternately adjust the photoetching impression angle of light source and the position of convex lens post focal line simultaneously, to ensure between two parallel lines that the distance of (i.e. drum die surface and the tangent line of substrate and the focal line of convex lens post) is more closely better, and the light of ultraviolet light source does not drop on mould.
Light source after adjusting like this, just can realize rolling and be embossed the micro-nano photoetching of plane.
By reference to the accompanying drawings the embodiment of the utility model application is described although above-mentioned; but the restriction not to utility model application protection domain; one of ordinary skill in the art should be understood that; on the basis of the technical scheme of utility model application, those skilled in the art do not need to pay various amendment or distortion that creative work can make still within the protection domain of the utility model patent.
Claims (6)
1. external rolling impresses light supply apparatus to the micro-nano photoetching of plane, it is characterized in that, comprise the ultraviolet light source being arranged at drum die outside and the control circuit that can control described light source light photograph Strength Changes, described ultraviolet light source comprises parabolic shape lampshade, ultraviolet lamp tube, convex lens post, ultraviolet lamp tube position adjustment unit, convex lens post position adjustment unit and ultraviolet light source angle adjusting;
Described ultraviolet light source angle adjusting comprises the turning axle connected for parabolic shape lampshade top movable, this rotating shaft terminal is fixed on fuselage biside plate, fuselage side plate is fixed with two light-source angle adjustment arc plates being symmetry with fuselage center line, parabolic shape lampshade is fixed between two light-source angle adjustment arc plates symmetrically, all have one along the arc groove of described arc plate center line symmetry in the middle part of each light-source angle adjustment arc plate, in arc groove, be provided with the first web member being connected to parabolic shape lampshade side plate;
Described convex lens post position adjustment unit comprises the upper and lower clamp of two couples for fixing convex lens post two ends, often pair upper and lower clamp both sides have a screw to fix, convex lens post is clamped, be simultaneously arrange four pairs of urges bolt symmetrically in the both sides of convex lens post clamp with convex lens center line, to print the distance of workspace for adjusting convex lens post center line to roll extrusion.
2. external rolling impresses light supply apparatus to the micro-nano photoetching of plane as claimed in claim 1, it is characterized in that, described control circuit comprises incremental optical-electricity encoder, phase demodulation and amplifying circuit, described incremental optical-electricity encoder is fixed on after the drive motor of drum die, when controller drive motor operates, be fixed on the code-wheel synchronous rotary of motor incremental optical-electricity encoder below, the photovalve being contained in code-wheel side has photoactive voltage to produce, circuit forms closed-loop path has electric current to occur, this current signal is after phase demodulation and power amplification circuit amplify, as the power supply of ultraviolet light source fluorescent tube, be used for controlling the intensity of light, the intensity of illumination of ultraviolet light source so just can be made to change with the rotating speed change of drum die, the larger intensity of illumination of rotating speed of drum die is stronger.
3. external rolling impresses light supply apparatus to the micro-nano photoetching of plane as claimed in claim 1, it is characterized in that, the shaft coupling being fixed on the drive motor other end drives the cylinder that impressing mould is housed to roll across substrate with semi-solid photosensitive medium, stay on semi-solid photosensitive medium convex pattern characteristics and female pattern feature antithesis, and whole substrate moves together with worktable feed mechanism, the instantaneous space rate of worktable feed mechanism and impressing mould are equal in the instantaneous linear velocity of working position, thus realize the moulding process rolled plane of whole external light source photoetching marking press.
4. external rolling impresses light supply apparatus to the micro-nano photoetching of plane as claimed in claim 1, and it is characterized in that, described ultraviolet lamp tube position regulator is be arranged at uviol lamp base adjustment backing plate below.
5. external rolling impresses light supply apparatus to the micro-nano photoetching of plane as claimed in claim 4, it is characterized in that, ultraviolet lamp tube is installed in uviol lamp base, and ultraviolet lamp tube is installed on its focal point of parabolic shape lampshade by tube face and adjustment backing plate below thereof and holding screw.
6. external rolling impresses light supply apparatus to the micro-nano photoetching of plane as claimed in claim 1, it is characterized in that, drum die surface is parallel with the focal line of convex lens post with the tangent line of substrate, and the distance between these two parallel lines is more closely better, but the light of ultraviolet light source will leave and rolls impressing mould.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520058316.6U CN204422969U (en) | 2015-01-26 | 2015-01-26 | External rolling impresses light supply apparatus to the micro-nano photoetching of plane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520058316.6U CN204422969U (en) | 2015-01-26 | 2015-01-26 | External rolling impresses light supply apparatus to the micro-nano photoetching of plane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204422969U true CN204422969U (en) | 2015-06-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520058316.6U Withdrawn - After Issue CN204422969U (en) | 2015-01-26 | 2015-01-26 | External rolling impresses light supply apparatus to the micro-nano photoetching of plane |
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| CN (1) | CN204422969U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104635433A (en) * | 2015-01-26 | 2015-05-20 | 青岛理工大学 | External roll-to-plane micro-nano imprinting lithography light source device |
-
2015
- 2015-01-26 CN CN201520058316.6U patent/CN204422969U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104635433A (en) * | 2015-01-26 | 2015-05-20 | 青岛理工大学 | External roll-to-plane micro-nano imprinting lithography light source device |
| CN104635433B (en) * | 2015-01-26 | 2016-08-17 | 青岛理工大学 | External rolling photoetching micro-nano to plane impressing light supply apparatus |
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Granted publication date: 20150624 Effective date of abandoning: 20160817 |
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